Probe tracking device and atomic force microscope

Abstract

The utility model relates to the technical field of atomic force microscopes, and discloses a probe tracking device which comprises a probe assembly and a light path assembly. The probe assembly comprises a displacement device and a probe arranged on the displacement device. The light path assembly comprises a light source, a first reflecting mirror, a second reflecting mirror and a position detector, and the relative positions of the first reflecting mirror, the second reflecting mirror and the probe are fixed. Detection light emitted by the light source is reflected by the first reflector and the second reflector and then is emitted to a first position of the probe, and is reflected by the probe, the second reflector and the first reflector and then is emitted to a second position of the position detector. The relative positions of the displacement device, the first reflecting mirror and the second reflecting mirror are fixed, so that probe tracking is realized. Moreover, only two reflectors are arranged, the number of optical elements is reduced, and the difficulty of light path alignment is reduced, so that the influence of light path variation caused by position variation of any reflector on the detection process can be reduced, and the detection result is more accurate. The utility model also discloses an atomic force microscope.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of atomic force microscope technology, for example to a probe tracking device and an atomic force microscope. BACKGROUND

[0002] At present, the atomic force microscope is a key device in the field of nanotechnology, and is widely used in multiple disciplines due to its excellent surface analysis capability. The atomic force microscope uses optical lever technology to perceive the slight deflection of the micro-cantilever needle tip under atomic force, and has extremely high measurement accuracy. In the sample scanning type atomic force microscope, the sample must be placed on the top of the scanner, so that the design of the sample scanning type atomic force microscope has certain limitations, compared with the needle tip scanning type atomic force microscope. However, in the scanning process of the needle tip scanning type atomic force microscope, how to ensure that the detection light spot on the back of the micro-cantilever needle tip remains relatively stationary with the needle tip, and how to ensure that the detection light accurately hits the position detector, are key problems that need to be solved.

[0003] The related technology provides a three-dimensional tracking scheme of an optical path, a tracking mirror is arranged on a tubular scanner, and a first alignment mirror and a second alignment mirror are arranged on both sides of the tubular scanner on the side of the reflecting surface of the tracking mirror. Since the relative positions of the tubular scanner, the tracking mirror, the first alignment mirror and the second alignment mirror are fixed, the detection light emitted by the light source can always be reflected to the probe through the first alignment mirror and the tracking mirror, and to the position detector through the tracking mirror and the second alignment mirror.

[0004] In the process of implementing the embodiments of the present disclosure, it is found that at least the following problems exist in the related art:

[0005] The related technology adopts the tubular scanner with fixed relative position and the alignment mirrors respectively used for aligning the probe and the position detector to realize probe tracking. However, in the process of realizing probe tracking by using the related technology, a plurality of reflecting mirrors with fixed relative positions need to be arranged, and the optical path alignment is difficult, and any change in the position of the reflecting mirror will cause the optical path to change and interfere with detection.

[0006] The above information disclosed in the background section is only intended to enhance the understanding of the background of the present application, and therefore can contain information that is not prior art known to those of ordinary skill in the art. SUMMARY

[0007] In order to have a basic understanding of some aspects of the disclosed embodiments, the following is a simple summary. The summary is not a general review, nor is it intended to determine the key / important components or delineate the protection scope of these embodiments, but as a prelude to the detailed description below.

[0008] The probe tracking device and the atomic force microscope provided by the embodiments of the present disclosure can reduce the number of optical elements with fixed relative positions, reduce the difficulty of optical path alignment, reduce the influence of optical path variation caused by arbitrary mirror position variation on the detection process, and make the detection result more accurate.

[0009] In some embodiments, the probe tracking device comprises: a probe assembly comprising a displacement device and a probe arranged on the displacement device; and an optical path assembly comprising a light source, a first mirror, a second mirror and a position detector, the first mirror, the second mirror and the probe having fixed relative positions; wherein the detection light emitted by the light source is reflected by the first mirror and the second mirror and then irradiates a first position of the probe, and the detection light reflected by the probe, the second mirror and the first mirror irradiates a second position of the position detector.

[0010] Optionally, the probe is arranged on a first side of the second mirror, a second side of the second mirror opposite to the first side forms a virtual image of the probe, and a third position of the virtual image corresponds to the first position of the probe; wherein an extension line of the detection light reflected by the first mirror before irradiating the probe and a reverse extension line of the detection light reflected by the second mirror after irradiating the probe intersect at the third position.

[0011] Optionally, the detection light emitted by the light source is reflected by the first mirror and then irradiates the second mirror, and then the detection light is reflected by the second mirror to the first position of the probe.

[0012] Optionally, the detection light reflected by the probe is reflected by the second mirror and then irradiates the first mirror, and then the detection light is reflected by the first mirror to the second position of the position detector.

[0013] Optionally, the displacement device comprises: a piezoelectric scanning tube, and the first mirror is arranged on the piezoelectric scanning tube.

[0014] Optionally, the piezoelectric scanning tube is a cylindrical tube structure; and a metal electrode is arranged on an inner surface and / or an outer surface of the piezoelectric scanning tube.

[0015] Optionally, the displacement device further comprises: a metal cage arranged on the piezoelectric scanning tube, and the second mirror is arranged on the metal cage.

[0016] Optionally, the metal cage comprises: an optical path channel configured to make the detection light incident on the second mirror or reflected by the second mirror to the probe and the first mirror.

[0017] Optionally, an included angle between the piezoelectric scanning tube and an axis of the probe is less than 90°.

[0018] In some embodiments, the atomic force microscope comprises: any one of the above probe tracking devices.

[0019] The probe tracking device and the atomic force microscope provided by the embodiments of the present disclosure can achieve the following technical effects.

[0020] The probe tracking device comprises a probe assembly and an optical path assembly. The probe assembly comprises a displacement device and a probe arranged on the displacement device. The optical path assembly comprises a light source, a first mirror, a second mirror and a position detector, and the relative positions of the first mirror, the second mirror and the probe are fixed. The detection light emitted by the light source is reflected by the first mirror and the second mirror and then irradiates a first position of the probe, and is reflected by the probe, the second mirror and the first mirror and then irradiates a second position of the position detector. By fixing the relative positions of the displacement device, the first mirror and the second mirror, the detection light can irradiate the fixed position of the probe regardless of the displacement of the displacement device, so that the probe tracking is realized. On this basis, the detection light is reflected to the probe and the position detector only by the two mirrors, the number of optical elements with fixed relative positions is reduced, the optical path alignment difficulty is reduced, the influence of the optical path change caused by the change of the position of any mirror on the detection process is reduced, and the detection result is more accurate.

[0021] The foregoing general description and the following description are only exemplary and explanatory, and are not used to limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0022] One or more embodiments are exemplarily illustrated by corresponding drawings, which do not constitute limitation on the embodiments, elements with the same reference numerals in the drawings are shown as similar elements, the drawings do not constitute proportional limitation, and wherein:

[0023] Figure 1 is a structural schematic diagram of a probe tracking device provided by the embodiments of the present disclosure;

[0024] Figure 2 is another structural schematic diagram of a probe tracking device provided by the embodiments of the present disclosure;

[0025] Figure 3 is Figure 2 is a partial structural schematic diagram in the dotted line range in FIG. 8;

[0026] Figure 4 is a structural schematic diagram of another probe tracking device provided by the embodiments of the present disclosure;

[0027] Figure 5 is a structural schematic diagram of another probe tracking device provided by the embodiments of the present disclosure.

[0028] Reference signs:

[0029] 10: probe; 11: piezoelectric scanning tube; 12: metal cage;

[0030] 20: light source; 21: first mirror; 22: second mirror; 23: position detector; 24: first light segment; 25: second light segment; 26: third light segment; 27: fourth light segment; 28: fifth light segment; 29: sixth light segment;

[0031] 30: virtual image; 31: first position; 33: third position; 34: first extension segment; 35: second extension segment; 36: light path channel. DETAILED DESCRIPTION

[0032] In order to enable a more detailed understanding of the features and technical content of the embodiments of the present disclosure, the implementation of the embodiments of the present disclosure is described in detail below, and the accompanying drawings are used for reference only and do not limit the embodiments of the present disclosure. In the following technical description, in order to facilitate explanation, details are provided to provide a full understanding of the disclosed embodiments. However, one or more embodiments can still be implemented without these details. In other cases, well-known structures and devices can be simplified to facilitate the drawings.

[0033] It should be noted that the embodiments in the embodiments of the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0034] In conjunction with Figures 1 to 5 The embodiments of the present disclosure provide a probe tracking device, which includes a probe assembly and a light path assembly. The probe assembly includes a displacement device and a probe arranged on the displacement device; the light path assembly includes a light source, a first mirror, a second mirror, and a position detector, and the relative positions of the first mirror, the second mirror, and the probe are fixed; wherein the detection light emitted by the light source is reflected by the first mirror and the second mirror and then is shot to a first position of the probe, and is reflected by the probe, the second mirror, and the first mirror and then is shot to a second position of the position detector.

[0035] In the embodiments of the present disclosure, the relative positional relationship of the displacement device, the first mirror and the second mirror is not limited, as long as the detection light emitted by the light source can be reflected by the first mirror and the second mirror to the first position of the probe, and reflected by the probe, the second mirror and the first mirror to the second position of the position detector. For example, when the probe and the second mirror are installed, the angle between the probe and the displacement device can be adjusted according to the experimental requirements, so that the distance between the needle tip of the probe and the sample meets the test requirements. Correspondingly, in order to ensure that the detection light can accurately irradiate the first position of the probe and the second position of the position detector, the angle between the first mirror and the second mirror needs to be adjusted according to the current position of the probe after adjustment. Specifically, the distance between the probe and the sample is adjusted to a first distance, and correspondingly, the angle between the first mirror and the second mirror can be adjusted to a first angle corresponding to the first distance. Then, the detection light can be sequentially reflected by the first mirror, the second mirror, the probe, the second mirror and the first mirror to the position detector. Alternatively, the distance between the probe and the sample is adjusted to a second distance, and correspondingly, the angle between the first mirror and the second mirror can be adjusted to a second angle corresponding to the second distance. Then, the detection light can be sequentially reflected by the first mirror, the second mirror, the probe, the second mirror and the first mirror to the position detector.

[0036] By using the probe tracking device provided in the embodiments of the present disclosure, the relative positions of the displacement device, the first mirror and the second mirror are fixed, so that no matter how the displacement device moves, the detection light can always irradiate the fixed position of the probe, thereby realizing probe tracking. On this basis, the detection light is reflected to the probe and the position detector only by two mirrors, reducing the number of optical elements with fixed relative positions, reducing the cost of probe tracking and the difficulty of optical path alignment, thereby reducing the influence of the change of the optical path caused by the change of the position of any mirror on the detection process, and making the detection result more accurate.

[0037] Optionally, the probe is arranged on the first side of the second mirror, the second side of the second mirror opposite to the first side forms a virtual image of the probe, and a third position of the virtual image corresponds to the first position of the probe; wherein the extension line of the detection light reflected by the first mirror before irradiating the probe and the reverse extension line of the detection light reflected by the second mirror after irradiating the probe intersect at the third position.

[0038] In the embodiments of the present disclosure, the probe tracking device is combined with the probe tracking method. Figures 1 to 3 As shown in FIG. 6, the first light segment, the second light segment, the fifth light segment and the sixth light segment of the detection light are in the same plane, and the virtual image is perpendicular to the plane in which the first light segment, the second light segment, the fifth light segment and the sixth light segment of the detection light are located. The first extension segment is symmetrical to the third light segment about the reflecting surface of the second mirror, and the second extension segment is symmetrical to the fourth light segment about the reflecting surface of the second mirror.

[0039] In the embodiments of the present disclosure, the angle between the probe and the displacement device can be adjusted according to experimental requirements, so that the distance between the needle tip of the probe and the sample meets the test requirements, as long as the virtual image is perpendicular to the plane where the first light segment, the second light segment, the fifth light segment and the sixth light segment of the detection light are located. Specifically, when the probe and the second mirror are installed, the angle between the first mirror and the second mirror needs to be adjusted according to the current position of the probe after adjustment. For example, the angle between the probe and the displacement device can be increased on the basis of the angle shown in Figure 3 The angle between the probe and the displacement device can be increased on the basis of the angle shown in

[0040] In this way, the probe is arranged on the front surface (first side) of the second mirror, and the back surface (second side) of the second mirror forms a virtual image corresponding to the probe. Since the probe and the virtual image are symmetrical about the reflecting surface of the second mirror, the third position of the virtual image is the first position of the probe. On this basis, the extension line (first extension segment) of the detection light reflected by the first mirror before irradiating the probe and the reverse extension line (second extension segment) of the detection light reflected by the second mirror after irradiating the probe intersect at the third position of the virtual image, so that the detection light reflected by the second mirror can irradiate the first position of the probe.

[0041] Alternatively, the detection light emitted by the light source is reflected by the first mirror and then reflected by the second mirror to the first position of the probe.

[0042] In the embodiments of the present disclosure, the positions where the detection light emitted by the light source is incident on the first mirror and the second mirror are not limited. As long as the detection light emitted by the light source is reflected by the first mirror and then reflected by the second mirror to the first position of the probe, the positions are not limited. For example, as the displacement device is displaced to drive the first mirror and the second mirror to displace, the detection light can be incident on the first incident position of the first mirror or the second incident position of the first mirror.

[0043] In this way, the detection light emitted by the light source is reflected by the first mirror and then reflected by the second mirror to the first position of the probe. In combination with Figure 3 As shown in the figure, the detection light (second light segment) reflected by the first mirror is reflected by the second mirror and then irradiates the first position of the probe, so that the detection light emitted by the light source can be reflected to the first position of the probe only by the second mirror.

[0044] Optionally, the probe-reflected detection light is reflected by the second mirror towards the first mirror, and then reflected by the first mirror to the second position of the position detector.

[0045] In the embodiments of the present disclosure, the first mirror position where the probe-reflected detection light is incident is not limited. As long as the probe-reflected detection light can be reflected by the second mirror towards the first mirror, and the first mirror reflects the detection light reflected by the second mirror to the second position of the position detector, the detection light can be incident on the third incident position of the first mirror or the fourth incident position of the first mirror as the displacement device is displaced.

[0046] In this way, the probe-reflected detection light is reflected by the second mirror towards the first mirror, and then reflected by the first mirror to the second position of the position detector. In combination with Figure 3 and Figure 4 As shown in FIGS. 7 and 8, after the detection light reflected by the second mirror (the third light segment) irradiates the first position of the probe, the probe reflects the detection light back to the second mirror (the fourth light segment), and the second mirror reflects the detection light back to the first mirror (the fifth light segment), and then the first mirror reflects the detection light to the position detector (the sixth light segment), thereby realizing a complete detection light path.

[0047] Optionally, the displacement device includes a piezoelectric scanning tube. The first mirror is arranged on the piezoelectric scanning tube.

[0048] In the embodiments of the present disclosure, in addition to the piezoelectric scanning tube, the displacement device can also be a displacement stage.

[0049] In the embodiments of the present disclosure, the root of the piezoelectric scanning tube is fixed to the atomic force microscope, and the end is provided with the second mirror and / or the probe and other components. The first mirror can be arranged vertically at any position of the piezoelectric scanning tube, such as the middle of the piezoelectric scanning tube, or between the middle and the end of the piezoelectric scanning tube.

[0050] In the embodiments of the present disclosure, the piezoelectric scanning tube includes an optical path channel. The optical path channel is configured to make the detection light incident on the second mirror or reflected by the second mirror to the first mirror.

[0051] In this way, the first mirror is arranged on the piezoelectric scanning tube, which causes the first mirror to displace correspondingly with the bending and stretching of the piezoelectric scanning tube, so that the relative position between the piezoelectric scanning tube and the first mirror is fixed without the need for additional fixing devices, thereby realizing probe tracking.

[0052] Optionally, the piezoelectric scanning tube is a cylindrical tube structure; and the metal electrode is arranged on the inner surface and / or the outer surface of the piezoelectric scanning tube.

[0053] In the embodiments of the present disclosure, the position where the metal electrode is arranged on the piezoelectric scanning tube is not limited, and the metal electrode can be arranged at any position on the inner surface and / or outer surface of the piezoelectric scanning tube as long as the multi-axial movement of the piezoelectric scanning tube can be achieved. For example, a four-quadrant electrode design can be adopted, in which one inner electrode is arranged on the inner surface of the piezoelectric scanning tube to cover the inner wall of the piezoelectric ceramic tube, and four outer electrodes are arranged on the outer surface of the piezoelectric scanning tube to cover the outer wall of the piezoelectric scanning tube, and the four outer electrodes are spaced 90 degrees apart in the circumferential direction. Alternatively, an eight-quadrant electrode design can be adopted, in which one inner electrode is arranged on the inner surface of the piezoelectric scanning tube, and eight outer electrodes are arranged on the outer surface of the piezoelectric scanning tube, and the eight outer electrodes are spaced 45 degrees apart in the circumferential direction.

[0054] In this way, the piezoelectric scanning tube has a cylindrical tubular structure, and the metal electrode is arranged on the inner surface and / or outer surface of the tubular structure, so that the displacement of the piezoelectric scanning tube in different axial directions can be achieved.

[0055] Optionally, the displacement device further comprises a metal cage. The metal cage is arranged on the piezoelectric scanning tube, and the second mirror is arranged on the metal cage.

[0056] In the embodiments of the present disclosure, the metal cage is arranged at the end of the piezoelectric scanning tube.

[0057] In this way, by arranging the metal cage on the piezoelectric scanning tube and arranging the second mirror on the metal cage, the second mirror can be more conveniently disassembled, thereby improving the efficiency of maintaining the second mirror.

[0058] Optionally, the metal cage comprises an optical path channel. The optical path channel is configured to make the detection light incident on the second mirror or reflected by the second mirror to the probe and the first mirror.

[0059] In this way, by arranging the optical path channel on the metal cage, the detection light can pass through the optical path channel on the metal cage to be incident on the second mirror or reflected by the second mirror to the probe and the first mirror.

[0060] Optionally, the included angle between the piezoelectric scanning tube and the axis of the probe is less than 90 degrees.

[0061] In this way, by making the included angle between the piezoelectric scanning tube and the axis of the probe an acute angle, the probe does not need to be additionally arranged, which is convenient for disassembly and maintenance.

[0062] In some embodiments, the present disclosure also provides an atomic force microscope comprising the probe tracking device of any one of the above.

[0063] The above description and drawings suffice to fully enable one skilled in the art to practice the embodiments of the present disclosure. Other embodiments can include structural and other changes. The embodiments are merely representative of possible variations. Individual components and functions are optional unless explicitly required, and the order of operations can be varied. Portions and features of some embodiments can be included in, or substituted for, portions and features of other embodiments. The embodiments of the present disclosure are not limited to the structures described above and shown in the drawings, and can be varied in a variety of ways. The scope of the present disclosure is limited only by the claims that follow.

Claims

1. A probe tracking device, characterized by, The probe tracking device comprises: a probe assembly comprising a displacement device and a probe arranged on the displacement device; a light path assembly comprising a light source, a first mirror, a second mirror and a position detector, the relative positions of the first mirror, the second mirror and the probe being fixed; wherein the detection light emitted by the light source is reflected by the first mirror and the second mirror to a first position of the probe, and is reflected by the probe, the second mirror and the first mirror to a second position of the position detector.

2. The apparatus of claim 1, wherein, The probe is arranged on a first side of the second mirror, a second side of the second mirror opposite to the first side forming a virtual image of the probe, a third position of the virtual image corresponding to the first position of the probe; wherein the extension line of the detection light reflected by the first mirror before irradiating the probe and the reverse extension line of the detection light reflected by the second mirror after irradiating the probe intersect at the third position.

3. The apparatus of claim 2, wherein, The detection light emitted by the light source is reflected by the first mirror to the second mirror, and then reflected by the second mirror to the first position of the probe.

4. The apparatus of claim 2, wherein, The detection light reflected by the probe is reflected by the second mirror to the first mirror, and then reflected by the first mirror to the second position of the position detector.

5. The apparatus of any one of claims 1 to 4, wherein, The displacement device comprises: a piezoelectric scanning tube, and the first mirror is arranged on the piezoelectric scanning tube.

6. The apparatus of claim 5, wherein, The piezoelectric scanning tube is a cylindrical tube structure; wherein a metal electrode is arranged on the inner surface and / or the outer surface of the piezoelectric scanning tube.

7. The apparatus of claim 5, wherein, The displacement device further comprises: a metal cage arranged on the piezoelectric scanning tube, and the second mirror is arranged on the metal cage.

8. The apparatus of claim 7, wherein, The metal cage comprises: a light path channel configured to make the detection light incident on the second mirror or reflected by the second mirror to the probe and the first mirror.

9. The apparatus of claim 5, wherein, The included angle between the piezoelectric scanning tube and the axis of the probe is less than 90°.

10. An atomic force microscope, characterized by, The probe tracking device as claimed in any one of claims 1 to 9. The probe tracking device as claimed in any one of claims 1 to 9.

Images