Probe locking detection tool and probe resistance measuring instrument

Abstract

The utility model belongs to the semiconductor technology field, and discloses a probe locking detection tool and a probe resistance measuring instrument, the probe locking detection tool comprises a probe pedestal, a probe, a locking member and a locking induction assembly, when the probe is correctly installed in the probe pedestal and the probe pedestal and the probe pedestal are fixed through the locking member, the locking force enables the probe pedestal to generate a certain tiny deformation; the locking sensing assembly is installed in the probe installation area of the probe base, the locking sensing assembly can detect the deformation quantity of the probe base, and the deformation quantity is quantified through the resistance change so as to judge whether the probe can meet the locking requirement or not. The larger the deformation quantity of the probe base is, the larger the locking force is, and the smaller the resistance value of the locking sensing assembly is; when the deformation of the probe base reaches a preset threshold value, the locking sensing assembly, the probe and the probe base form a conduction circuit, and the state of the conduction circuit can be used as a signal to be input into a probe resistance measuring instrument, so that automatic detection is realized, manual misoperation is avoided, and the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, especially to a probe locking detection tool and probe resistance measuring instrument. BACKGROUND

[0002] The probe resistance measuring instrument is a key equipment for detecting the electrical characteristics of a wafer, and is used for measuring the resistance characteristics of a metal interconnection, a resistance layer or a doped semiconductor region on the wafer. Common test methods include the four-probe method and the two-probe method. By contacting the probe with the wafer surface, a test current is applied to the wafer, and a voltage signal is read to calculate the resistance value, so as to calculate the film thickness and resistance characteristics at a specified position and other data.

[0003] Since different types of wafers have different detection requirements, the operator needs to manually replace the corresponding type of probe for measurement. If the probe is not installed tightly or is installed out of position, it will not only affect the accuracy of the measurement data of the probe resistance measuring instrument, but also may scratch the wafer or damage the probe during the test, affecting the yield of wafer detection, causing economic losses, and increasing the cost of equipment maintenance. SUMMARY

[0004] The utility model aims at providing a probe locking detection tool and probe resistance measuring instrument, which can automatically detect the locking degree of the probe, ensure that the probe is installed in place, avoid human error, ensure the accuracy of the measurement data of the probe resistance measuring instrument, protect the integrity of the wafer, and improve the yield.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The probe locking detection tool comprises a probe and a probe base. The probe is detachably installed on the probe base. The probe locking detection tool further comprises:

[0007] A locking member, which can lock the probe and the probe base to each other;

[0008] A locking sensing assembly, which is arranged in the probe mounting area of the probe base. One end of the locking sensing assembly is electrically connected to the probe, and the other end of the locking sensing assembly is electrically connected to the probe base. The locking sensing assembly can change its resistance by sensing the deformation degree of the probe base. When the deformation of the probe base reaches a preset threshold, the probe, the locking sensing assembly and the probe base can form a conduction circuit.

[0009] Further, the locking sensing assembly comprises a strain gauge, which is detachably arranged at the probe mounting area of the probe base, one end of the strain gauge is electrically connected with the probe, and the other end of the strain gauge is electrically connected with the probe base.

[0010] Further, the strain gauge is attached to the probe mounting area of the probe base.

[0011] Further, a plurality of strain gauges are arranged at different positions of the probe mounting area of the probe base, and the plurality of strain gauges, the probe and the probe base are connected in series.

[0012] Further, the locking sensing assembly further comprises a signal amplifier, which is electrically connected with the strain gauge and used for amplifying the resistance change of the strain gauge.

[0013] Further, the locking sensing assembly further comprises a signal converter and a display screen, one end of the signal converter is electrically connected with the signal amplifier, the other end of the signal converter is electrically connected with the display screen, the signal converter can convert the voltage signal output by the signal amplifier into a digital signal and can be transmitted to the display screen.

[0014] Further, the locking member comprises a bolt, which is threadedly connected with the probe base and can adjust the locking degree of the probe and the probe base.

[0015] Further, the locking sensing assembly further comprises an alarm member, which is electrically connected with the locking sensing assembly, and the alarm member alarms when the self-resistance of the locking sensing assembly does not reach a predetermined threshold.

[0016] Further, the alarm member comprises a warning light.

[0017] The probe resistance measuring instrument comprises a mechanical arm and the probe locking detection tool.

[0018] The probe resistance measuring instrument comprises a mechanical arm and the probe locking detection tool.

[0019] The utility model provides a kind of probe locking detection tool and probe resistance measuring instrument, including probe base, probe, locking piece and locking response component, when the friction of probe and probe base is greater than the reaction force that wafer exerts to probe after probe contacts wafer surface, probe can keep stable, ensure that measurement data is reliable, reduce the risk of wafer damage simultaneously, improve yield rate;When probe is correctly installed into probe base, and probe and probe base are fixed by locking piece, its locking force will make probe base produce certain tiny deformation;By installing locking response component in the probe mounting area of probe base, locking response component can detect the deformation of probe base, and the deformation is quantified by resistance change, for judging whether probe meets locking requirement.The greater the deformation of probe base, the greater locking force, the smaller resistance value of locking response component;When the deformation of probe base reaches preset threshold (i.e. probe has been correctly locked), it is judged that probe has been correctly installed, and the resistance of locking response component will be adjusted to a specific value, so that probe, locking response component and probe base form conducting circuit, ensure that measuring instrument continues normal work;The state of the conducting circuit can be input as signal to probe resistance measuring instrument, to realize automatic detection, avoid artificial misoperation, improve detection efficiency.Probe and base are locked by locking piece, ensure that probe does not come loose due to stress, guarantee the accuracy of measurement data, and reduce the risk of wafer damage;By measuring the deformation of probe base, locking degree is quantified using resistance change of locking response component, to provide automatic locking detection, improve production efficiency and reliability. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is the structure schematic diagram of one angle of probe locking detection tool in the utility model;

[0021] Figure 2 It is the structure schematic diagram of another angle of probe locking detection tool in the utility model;

[0022] Figure 3 It is the bottom view of probe locking detection tool in the utility model.

[0023] In the drawing:

[0024] 100, probe; 200, probe base;

[0025] 1, locking piece; 2, strain gauge; 3, mechanical arm. DETAILED DESCRIPTION

[0026] The utility model will be further explained in detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0027] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0028] In the utility model, unless otherwise explicitly specified and limited, the first feature is "on" or "below" the second feature, which can include direct contact between the first and second features, or indirect contact between the first and second features through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0029] In the description of the embodiment, the terms "up", "down", "left", "right" and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, therefore, it cannot be understood as a limitation of the utility model. In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0030] Please refer to Figures 1 to 3The utility model provides a kind of probe locking detection tool, can automatically detect the locking degree of probe 100, ensure that probe 100 is installed in place, avoid artificial error, guarantee the accuracy of probe resistance measuring instrument measurement data, protect wafer integrity, improve yield. The probe locking detection tool, including probe 100, probe base 200, locking piece 1 and locking induction assembly, wherein probe 100 is detachably mounted on probe base 200, locking piece 1 can lock probe 100 and probe base 200 mutually;Locking induction assembly is located in the probe 100 installation area of probe base 200, one end of locking induction assembly is electrically connected with probe 100, the other end of locking induction assembly is electrically connected with probe base 200, locking induction assembly can change its resistance change by inductive deformation degree of probe base 200, when the deformation of probe base 200 reaches preset threshold, probe 100, locking induction assembly and probe base 200 can form conducting circuit.

[0031] In the process of measuring the probe 100, the probe 100 will contact the wafer and be subjected to a certain reaction force, when the friction between the probe 100 and the probe base 200 is less than the reaction force, the probe 100 can be loose or move, resulting in inaccurate measurement data, and if the probe 100 is loose, it can tilt or sway when contacting the wafer, resulting in damage to the wafer surface, therefore, only when the friction between the probe 100 and the probe base 200 is greater than the reaction force exerted by the wafer on the probe 100 after the probe 100 contacts the wafer surface, the probe 100 can remain stable, ensuring reliable measurement data and reducing the risk of wafer damage and improving yield; when the probe 100 is correctly installed into the probe base 200 and the probe 100 and the probe base 200 are fixed by the locking member 1, the locking force will cause a certain small deformation of the probe base 200; by installing the locking sensing assembly in the probe 100 installation area of the probe base 200, the locking sensing assembly can detect the deformation amount of the probe base 200, and quantify the deformation amount by resistance change, for judging whether the probe 100 meets the locking requirement. The greater the deformation amount of the probe base 200, the greater the locking force, and the smaller the resistance value of the locking sensing assembly; when the deformation of the probe base 200 reaches a preset threshold (i.e. the probe 100 has been correctly locked), it is determined that the probe 100 has been correctly installed, and the resistance of the locking sensing assembly will be adjusted to a certain value, so that the probe 100, the locking sensing assembly and the probe base 200 form a conduction circuit, ensuring that the measuring instrument continues to work normally; the state of the conduction circuit can be input as a signal to the probe resistance measuring instrument, so as to realize automatic detection, avoid human error operation and improve detection efficiency. By locking the probe 100 and the base by the locking member 1, it is ensured that the probe 100 will not be loose due to stress, the accuracy of the measurement data is ensured, and the risk of wafer damage is reduced; by measuring the deformation of the probe base 200, the locking degree is quantified by the resistance change of the locking sensing assembly, automatic locking detection is provided, and production efficiency and reliability are improved.

[0032] As Figure 1 and Figure 3As shown, in order to improve the sensitivity of deformation detection, in some embodiments, the locking sensing assembly includes a strain gauge 2 which is detachably arranged at the probe 100 mounting area of the probe base 200, one end of the strain gauge 2 is electrically connected with the probe 100, and the other end of the strain gauge 2 is electrically connected with the probe base 200; wherein, the strain gauge 2 detects the micro deformation of the object, and the resistance of the strain gauge 2 changes accordingly. Since the resistance change of the strain gauge 2 is linearly related to the deformation, the greater the deformation of the probe base 200, the more obvious the resistance change of the strain gauge 2. It can accurately perceive the micro deformation of the probe base 200 caused by locking the probe 100, and further judge whether the probe 100 is correctly locked by monitoring the resistance change of the strain gauge 2. When the deformation reaches the set threshold, the circuit will be turned on, thereby providing a reliable signal for locking detection. It should be noted that the resistance change of the strain gauge 2 and the deformation of the probe base 200 follow the formula: ΔR is the resistance change of the strain gauge 2; R0 is the nominal resistance of the strain gauge 2, which is a fixed value; k is the strain coefficient of the strain gauge 2, which is a fixed value; ε is the deformation to be measured. At the same time, the strain gauge 2 is usually in direct contact with the surface of the probe base 200, which avoids damage to the probe 100 or the base.

[0033] Specifically, the strain gauge 2 is pasted on the probe 100 mounting area of the probe base 200. Since the probe base 200 will produce micro deformation due to mechanical force during locking, by directly pasting the strain gauge 2 on the probe 100 mounting area, the stress and deformation applied to the probe base 200 when the probe 100 is locked can be perceived in the first time, ensuring that the deformation signal is efficiently transmitted to the strain gauge 2. This arrangement can more accurately reflect the locking degree of the probe 100, and improve the sensitivity and accuracy of signal acquisition.

[0034] In other embodiments, in order to improve the installation efficiency of the strain gauge 2, an installation groove is provided on the probe base 200, and the strain gauge 2 is installed in the installation groove. The installation groove provides a fixed installation position for the strain gauge 2, which can effectively improve the installation efficiency. At the same time, the fixed installation position of the strain gauge 2 can also prevent it from affecting the detection accuracy due to movement. It can be understood that the strain gauge 2 can be pasted in the installation groove by using strong glue, but the specific installation method is not limited here.

[0035] In order to improve the reliability of the detection result and avoid the error of the local stress of the single strain gauge 2, in some embodiments, a plurality of strain gauges 2 are arranged, the plurality of strain gauges 2 are arranged at different positions of the probe 100 mounting area of the probe base 200 respectively, and the plurality of strain gauges 2, the probe 100 and the probe base 200 are connected in series. By distributing the plurality of strain gauges 2 at different positions of the probe 100 mounting area of the probe base 200 for multi-point measurement, when the detection of the plurality of measurement points all meets the locking requirement, the circuit is turned on, and thus the overall deformation of the probe base 200 can be comprehensively considered, the detection deviation caused by uneven material or assembly error is reduced, and the judgment accuracy of the locking state is improved.

[0036] In order to enhance the identification ability of the micro deformation of the probe base 200, the locking sensing assembly further comprises a signal amplifier, which is electrically connected with the strain gauge 2 and is used for amplifying the resistance change of the strain gauge 2. The micro deformation caused by the locking of the probe 100 may cause the signal amplitude to be too low, and direct measurement is easy to be affected by noise. Or factors such as electromagnetic interference, mechanical vibration or temperature change in the working environment will all affect the measurement signal of the strain gauge 2. Through the signal amplifier, the small resistance change can be amplified, so that the subsequent circuit can more accurately detect the deformation of the probe base 200, and the sensitivity of the locking detection is improved. It should be noted that the appropriate signal amplifier model can be selected according to the actual situation, which is not limited here.

[0037] Specifically, the locking sensing assembly further comprises a signal converter and a display screen, one end of the signal converter is electrically connected with the signal amplifier, the other end of the signal converter is electrically connected with the display screen, the signal converter can convert the voltage signal output by the signal amplifier into a digital signal, and can be transmitted to the display screen; wherein the amplified voltage signal is converted into a digital signal by the signal converter and transmitted to the display screen, so that the operator can observe the locking state of the probe 100 in real time by observing the display screen, without relying on external equipment for data analysis, and the work efficiency is improved. It should be noted that the signal converter can but not limited to adopt ADS signal converter, which is not limited here.

[0038] In other embodiments, the locking sensing assembly can but not limited to comprise a pressure sensitive sensor, wherein the pressure sensitive sensor has the characteristics of fast response speed and large dynamic range, can quickly capture the small pressure change generated in the locking process of the probe 100, and realize more efficient real-time monitoring.

[0039] As Figure 2As shown, in order to improve the stability of the locking piece 1, in some embodiments, the locking piece 1 comprises a bolt which is threadedly connected with the probe base 200 for adjusting the locking degree of the probe 100 and the probe base 200; wherein, by adopting the mechanical locking mode of bolt thread connection, reliable and stable probe 100 fixing force can be provided to ensure that the probe 100 and the probe base 200 will not loosen, thereby improving the accuracy and repeatability of the measurement.

[0040] In order to monitor the locking state of the probe 100 in real time, in some embodiments, the locking sensing assembly further comprises an alarm piece which is electrically connected with the locking sensing assembly, and the alarm piece alarms when the self-resistance of the locking sensing assembly does not reach the predetermined threshold; wherein, the alarm piece can monitor the locking state of both the probe 100 and the probe base 200 in real time, and when the resistance of the locking sensing assembly does not reach the predetermined threshold (i.e. the probe 100 is not correctly locked), the alarm is triggered immediately to remind the operator to check and adjust the installation of the probe 100, avoiding measurement errors caused by insufficient locking.

[0041] Specifically, the alarm piece comprises a warning light, wherein the warning light as the alarm piece can provide intuitive visual feedback through the conversion or flickering of the light color; the operator can quickly identify the abnormal locking state, especially when the light is relatively dark in the production site or the operator is far away from the equipment, the display of the warning light can effectively attract attention and reduce human negligence.

[0042] In other embodiments, the alarm piece can also be an audible and visual alarm, which is not limited here.

[0043] The utility model also provides a kind of probe resistance measuring instrument, including mechanical arm 3 and the probe locking detection tool in any of the above embodiments, probe base 200 is connected with mechanical arm 3;When probe 100 is correctly installed in probe base 200, probe base 200 is powered on with mechanical arm 3, and probe resistance measuring instrument can measure wafer;When the two are fixed by locking piece 1, the locking force will make probe base 200 produce certain tiny deformation;By installing locking sensing assembly in the probe 100 installation area of probe base 200, locking sensing assembly can detect the deformation of probe base 200, and the deformation is quantified by resistance change, for judging whether probe 100 meets locking requirement.The greater the deformation of probe base 200, the greater the locking force, and the smaller the resistance value of locking sensing assembly;When the deformation of probe base 200 reaches preset threshold, locking sensing assembly, probe 100 and probe base 200 form conducting circuit, and the state of the conducting circuit can be input as signal to probe resistance measuring instrument, realize automatic detection, avoid artificial misoperation, and improve detection efficiency.Obviously, the above embodiment of the utility model is only for clearly illustrating the utility model, and is not the limitation of the embodiment of the utility model.For ordinary skilled person in the art, various obvious changes, re-adjustment and replacement can be carried out without departing from the protection scope of the utility model.It is unnecessary and impossible to enumerate all embodiments here.Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model claim.

Claims

1. A probe locking detection tool, comprising a probe (100) and a probe base (200), the probe (100) being detachably mounted on the probe base (200), characterized in that, The probe locking detection fixture also includes: A locking member (1) is provided, which is capable of locking the probe (100) and the probe base (200) together; A locking sensing component is disposed in the probe (100) mounting area of ​​the probe base (200). One end of the locking sensing component is electrically connected to the probe (100), and the other end of the locking sensing component is electrically connected to the probe base (200). The locking sensing component can change its own resistance by sensing the degree of deformation of the probe base (200). When the deformation of the probe base (200) reaches a preset threshold, the probe (100), the locking sensing component, and the probe base (200) can form a conductive circuit.

2. The probe locking and detecting tooling of claim 1, wherein, The locking sensing assembly includes a strain gauge (2), which is detachably disposed in the probe (100) mounting area of ​​the probe base (200). One end of the strain gauge (2) is electrically connected to the probe (100), and the other end of the strain gauge (2) is electrically connected to the probe base (200).

3. The probe locking and detecting tooling of claim 2, wherein, The strain gauge (2) is attached to the probe (100) mounting area of ​​the probe base (200).

4. The probe lock detection tooling of claim 3, wherein, Multiple strain gauges (2) are provided, and the multiple strain gauges (2) are respectively located at different positions in the probe (100) mounting area of ​​the probe base (200). The multiple strain gauges (2), the probe (100) and the probe base (200) are connected in series.

5. The probe lock detection tooling of claim 2, wherein, The locking sensing component also includes a signal amplifier, which is electrically connected to the strain gauge (2) and is used to amplify the resistance change of the strain gauge (2).

6. The probe lock detection tooling of claim 5, wherein, The locking sensing component also includes a signal converter and a display screen. One end of the signal converter is electrically connected to the signal amplifier, and the other end of the signal converter is electrically connected to the display screen. The signal converter can convert the voltage signal output by the signal amplifier into a digital signal and transmit it to the display screen.

7. The probe lock detection tooling of claim 1, wherein, The locking member (1) includes a bolt that is threadedly connected to the probe base (200) and the bolt is capable of adjusting the degree of locking between the probe (100) and the probe base (200).

8. The probe locking detection fixture according to claim 1, characterized in that, The locking sensing component also includes an alarm element, which is electrically connected to the locking sensing component. When the resistance of the locking sensing component itself does not reach a predetermined threshold, the alarm element will sound an alarm.

9. The probe locking detection fixture according to claim 8, characterized in that, The alarm device includes a warning light.

10. A probe resistance measuring instrument, including a robotic arm (3), characterized in that, The probe (100) resistance measuring instrument further includes the probe locking detection fixture as described in any one of claims 1-9, wherein the probe base (200) is connected to the robotic arm (3).

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