Continuous ultraviolet laser device and laser device

Abstract

The utility model provides a continuous ultraviolet laser device and a laser device. The continuous ultraviolet laser device comprises an infrared laser module, a mixed light module and an ultraviolet laser module, the infrared laser module is used for generating target continuous infrared laser; the mixed light module comprises an infrared reflector assembly and a first conversion assembly, the infrared reflector assembly is used for converting a transmission light path of the target continuous infrared laser from a first red light path to a second red light path, and the first conversion assembly is used for performing multi-pass second harmonic conversion on the target continuous infrared laser to obtain first continuous mixed light; the ultraviolet laser module comprises a mixed light reflector assembly and a second conversion assembly, the mixed light reflector assembly is used for converting a transmission light path of the first continuous mixed light from a first mixed light path to a second mixed light path, and the second conversion assembly is used for performing multi-pass N-order harmonic conversion on the first continuous mixed light, and target continuous ultraviolet laser is obtained, so that the laser conversion efficiency is effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to laser technology field, specifically, a kind of continuous ultraviolet laser device and laser device. BACKGROUND

[0002] With the rapid development of science and technology, various laser technologies have ushered in extensive application and attention in various fields. For example, ultraviolet laser, because of its wide application in semiconductor (such as wafer) defect detection, semiconductor lithography, semiconductor material analysis and other aspects, it is concerned. In order to improve the conversion efficiency of laser, frequency doubling method can be used, including intracavity frequency doubling and extracavity frequency doubling.

[0003] For intracavity frequency doubling, there are many restrictions, and it is difficult to output high beam quality laser beam. For extracavity frequency doubling, if the fundamental frequency power is low, the conversion efficiency is also low. Under the same fundamental frequency power, if the branch power of the laser is low, the conversion efficiency is also low. Therefore, how to improve the nonlinear frequency conversion efficiency of laser is a technical problem to be solved. UTILITY MODEL CONTENT

[0004] Therefore, the purpose of the utility model is to provide a continuous ultraviolet laser device and a laser device, which can effectively improve the conversion efficiency.

[0005] The utility model provides a kind of continuous ultraviolet laser device, including infrared laser module, mixed light module and ultraviolet laser module;Wherein, the infrared laser module is used to generate target continuous infrared laser;The mixed light module is used to carry out multiple pass second harmonic conversion to the target continuous infrared laser, to convert part of the target continuous infrared laser into target continuous green laser, and the target continuous green laser and target remaining continuous infrared laser form first continuous mixed light;The ultraviolet laser module is used to carry out multiple pass N harmonic conversion to the first continuous mixed light, and target continuous ultraviolet laser is obtained;Wherein, N is integer greater than 2;

[0006] The mixed light module includes infrared mirror assembly and first conversion component;The infrared mirror assembly is used to convert the transmission light path of the target continuous infrared laser from first red light path to second red light path;The first conversion component is used to carry out multiple pass second harmonic conversion to the target continuous infrared laser transmitted through the second red light path, and the first continuous mixed light is obtained;

[0007] The ultraviolet laser module comprises a mixed light reflecting mirror assembly and a second conversion assembly; the mixed light reflecting mirror assembly is used for converting a transmission light path of the first continuous mixed light from a first mixed light light path to a second mixed light light path; the second conversion assembly is used for performing multi-pass N harmonic conversion on the first continuous mixed light transmitted through the second mixed light light path to obtain the target continuous ultraviolet laser.

[0008] In a possible implementation, the number of times of the multi-pass second harmonic conversion is K passes, and K pass paths are completely not shared, where K is an integer greater than 1, and the first conversion assembly comprises a frequency doubling element and M groups of first reflection assemblies, where M is an integer less than K by 1.

[0009] The frequency doubling element is used for receiving the target continuous infrared laser transmitted through the second red light path, and converting part of the target continuous infrared laser into first continuous green laser, and the first continuous green laser and first remaining continuous infrared laser form initial continuous mixed light.

[0010] The initial continuous mixed light is reflected multiple times through the M groups of first reflection assemblies, and the first remaining continuous infrared laser energy is converted to the first continuous green laser multiple times through the frequency doubling element to form target continuous green laser, and the target continuous green laser and target remaining continuous infrared laser form the first continuous mixed light.

[0011] In a possible implementation, each group of first reflection assemblies comprises a first phase compensation element and a first light reflecting element, wherein the first phase compensation element and the first light reflecting element in each group of first reflection assemblies are arranged at intervals, and the first phase compensation element is close to the frequency doubling element.

[0012] In a possible implementation, the number of times of the multi-pass N harmonic conversion is X passes, X pass paths are completely not shared, and N is 3, where X is an integer greater than 1, the target continuous ultraviolet laser is first target continuous ultraviolet laser, and the second conversion assembly comprises a first sum frequency element, a first dichroic mirror, a first light power absorber, and Y groups of second reflection assemblies, where Y is an integer less than X by 1.

[0013] The first sum frequency element is arranged on one side of the mixed light reflecting mirror assembly, and is used for receiving the first continuous mixed light transmitted through the second mixed light light path, and performing sum frequency processing on part of the target continuous green laser and part of the target remaining continuous infrared laser to form first continuous ultraviolet laser, and the first continuous ultraviolet laser and first remaining continuous mixed light form second continuous mixed light.

[0014] The second continuous mixed light is reflected multiple times by the Y group second reflecting assembly, and the first remaining continuous mixed light energy is converted to the first continuous ultraviolet laser multiple times by the first sum frequency element, forming a first target continuous ultraviolet laser, which forms a third continuous mixed light with a second remaining continuous mixed light;

[0015] The first dichroic mirror is configured to receive the third continuous mixed light converted by the first sum frequency element, transmit the second remaining continuous mixed light to the first optical power absorber, and reflect the first target continuous ultraviolet laser.

[0016] In a possible implementation, in the case where the number of times of the multi-pass Nth harmonic conversion is A pass, the A pass paths are completely not shared, and N is 5, where A is an integer greater than 1, the target continuous ultraviolet laser is a second target continuous ultraviolet laser, and the second conversion assembly includes a first sum frequency element, a second dichroic mirror, a second optical power absorber, a B group second reflecting assembly, a first mixed light reflecting mirror, a second sum frequency element, and a light splitting element, where B is an integer less than A by 1.

[0017] The first sum frequency element is disposed on one side of the mixed light reflecting mirror assembly, configured to receive the first continuous mixed light transmitted through the second mixed light light path, and perform sum frequency processing on part of the target continuous green laser and part of the target remaining continuous infrared laser to form a first continuous ultraviolet laser, which forms a second continuous mixed light with a first remaining continuous mixed light.

[0018] The second continuous mixed light is reflected multiple times by the B group second reflecting assembly, and the first remaining continuous mixed light energy is converted to the first continuous ultraviolet laser multiple times by the first sum frequency element, forming a fourth continuous mixed light; the fourth continuous mixed light includes a second remaining continuous infrared laser and a fifth continuous mixed light, and the fifth continuous mixed light includes a first remaining continuous green laser and a second continuous ultraviolet laser.

[0019] The second dichroic mirror is configured to receive the fourth continuous mixed light converted by the first sum frequency element, transmit the second remaining continuous infrared laser to the second optical power absorber, and reflect the fifth continuous mixed light to a third mixed light light path.

[0020] The first mixed light reflecting mirror is configured to convert the transmission light path of the fifth continuous mixed light from the third mixed light light path to a fourth mixed light light path.

[0021] The second sum-frequency element is arranged on one side of the first mixed light mirror, configured to receive the fifth continuous mixed light transmitted through the fourth mixed light optical path, and perform sum-frequency processing on part of the first remaining continuous green laser and part of the second continuous ultraviolet laser to form the second target continuous ultraviolet laser, and the second target continuous ultraviolet laser and the third remaining continuous mixed light form the sixth continuous mixed light.

[0022] The light splitting element is arranged on the side of the second sum-frequency element away from the first mixed light mirror, configured to split the received sixth continuous mixed light into the second target continuous ultraviolet laser, the second remaining continuous green laser, and the target remaining continuous ultraviolet laser.

[0023] In a possible implementation, each group of second reflection components includes a second phase compensation element and a second light reflection element, wherein the second phase compensation element and the second light reflection element in each group of second reflection components are arranged at intervals, and the second phase compensation element is close to the first sum-frequency element.

[0024] In a possible implementation, the mixed light mirror assembly includes a second mixed light mirror and a third mixed light mirror, the second mixed light mirror is arranged on the first mixed light optical path, and the third mixed light mirror is arranged on the second mixed light optical path.

[0025] In a possible implementation, the infrared laser module includes an infrared laser and an infrared light adjustment assembly.

[0026] The infrared laser is configured to generate an initial continuous infrared laser.

[0027] The infrared light adjustment assembly is arranged on an initial infrared light optical path transmitting the initial continuous infrared laser, configured to adjust the polarization state of the initial continuous infrared laser to obtain the target continuous infrared laser, and the first infrared light optical path direction of transmitting the target continuous infrared laser is the same as the initial infrared light optical path direction.

[0028] In a possible implementation, the infrared light adjustment assembly includes a polarization beam splitter and a first focusing lens arranged at intervals along the initial infrared light optical path.

[0029] The polarization beam splitter is configured to split the initial continuous infrared laser into a first continuous infrared laser and a second continuous infrared laser with different polarization directions, wherein the first continuous infrared laser has the same optical path direction as the initial continuous infrared laser, and the second continuous infrared laser has a perpendicular optical path direction to the initial continuous infrared laser.

[0030] The first focusing lens is configured to focus the first continuous infrared laser into a target continuous infrared laser, and the target continuous infrared laser is incident to the infrared mirror assembly along the first red light path.

[0031] In a possible implementation, the infrared light adjusting assembly further includes:

[0032] The third optical power absorber is arranged on a transmission path of the second continuous infrared laser and is configured to absorb the second continuous infrared laser.

[0033] In a possible implementation, the infrared mirror assembly includes a first infrared mirror and a second infrared mirror, the first infrared mirror is arranged on the first red light path, and the second infrared mirror is arranged on the second red light path.

[0034] In a possible implementation, the mixed light mirror assembly further includes:

[0035] The second focusing lens is arranged between the second mixed light mirror and the third mixed light mirror and is configured to collimate light beams transmitted between the second mixed light mirror and the third mixed light mirror.

[0036] In a possible implementation, the second conversion assembly further includes:

[0037] The third focusing lens is arranged between the second dichroic mirror and the first mixed light mirror and is configured to collimate light beams transmitted between the second dichroic mirror and the first mixed light mirror.

[0038] The utility model provides a kind of laser device, including laser generation module, light source adjusting assembly, optical path conversion assembly, light conversion element and F group reflection assembly;Wherein, F is integer greater than or equal to 1;

[0039] The laser generation module is configured to generate initial laser.

[0040] The light source adjusting assembly is arranged on an initial light path transmitting the initial laser, and is configured to adjust the polarization state of the initial laser to obtain first laser.

[0041] The optical path conversion assembly is configured to convert the transmission path of the first laser from a first light path to a second light path, and the first light path direction is the same as the initial light path direction.

[0042] The light conversion element is configured to receive the first laser transmitted through the second light path, and the first laser is reflected multiple times through the F group reflection assembly, and second laser is obtained after multiple conversion through the light conversion element.

[0043] In a possible implementation, the laser generating module is an infrared laser generating module, the first laser is an infrared laser, and the second laser is a green laser.

[0044] In a possible implementation, the laser generating module is a green laser generating module, the first laser is a green laser, and the second laser is an ultraviolet laser.

[0045] In a possible implementation, the number of times of multi-pass conversion is E passes, and E pass paths are partially collinear, E is an even number greater than 1, and F is half of E.

[0046] The laser device further includes a dichroic mirror, which is arranged on a third light path parallel to and opposite to the first light path; the second laser emitted from the light conversion element is converted to the third light path by the light path conversion assembly, and the dichroic mirror is configured to receive the second laser transmitted through the third light path and reflect the second laser.

[0047] In a possible implementation, the number of times of multi-pass conversion is E passes, and E pass paths are all not collinear, E is an integer greater than 1, and F is an integer less than E by 1.

[0048] In a possible implementation, the laser device further includes a light power detection assembly configured to detect the power of the initial laser or processed laser, and generate an adjustment instruction when the power of the initial laser or processed laser exceeds a preset range; the adjustment instruction is configured to instruct the laser generating module to adjust the power of the initial laser, so that the initial laser or processed laser is within the preset range; the processed laser is the initial laser processed by at least one optical element during transmission and processing.

[0049] In a possible implementation, the light path conversion assembly includes at least one mirror; each set of reflection assembly includes a phase compensation element and a light reflection element, wherein the phase compensation element and the light reflection element in each set of reflection assembly are arranged at intervals, and the phase compensation element is close to the light conversion element; and the light power detection assembly includes a power probe.

[0050] The power probe is arranged on a non-main light path and located on a light transmission side of a target reflection element, configured to detect the power of the processed laser transmitted by the target reflection element, and generate an adjustment instruction when the power of the processed laser exceeds a preset range.

[0051] The target reflection element is any mirror included in the light path conversion assembly, or any light reflection element.

[0052] In a possible implementation, the light power detection component comprises a light taking mirror and a power probe.

[0053] The light taking mirror is arranged on the main light path and is configured to partially reflect the initial laser or the processed laser to the power probe and output the remaining initial laser or processed laser.

[0054] The power probe is configured to detect the power of the initial laser or the processed laser partially taken by the light taking mirror and generate an adjustment instruction when the power of the initial laser or the processed laser exceeds a preset range.

[0055] The continuous ultraviolet laser device and the laser device provided by the embodiments of the present application can reduce cost and reduce the requirement for environment by using the cavity-out frequency multiplication mode compared with the cavity-in frequency multiplication mode. In addition, the multi-pass conversion technology is used in the conversion process of the laser in each stage, for example, in the process of second harmonic conversion and the process of Nth harmonic conversion, so that the laser conversion efficiency of each stage can be effectively improved compared with single-pass conversion.

[0056] It should be understood that the foregoing general description and the following detailed description are only exemplary and explanatory, rather than limiting the technical solutions of the present application.

[0057] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0058] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments, the drawings herein are incorporated into the description and form a part of the description, which show the embodiments consistent with the present application, and are used to illustrate the technical solutions of the present application together with the description. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0059] Figure 1 The principle block diagram of the continuous ultraviolet laser device provided by some embodiments of the present application is shown;

[0060] Figure 2 The principle block diagram of the continuous ultraviolet laser device provided by some other embodiments of the present application is shown;

[0061] Figure 3The structure schematic diagram of the continuous ultraviolet laser device is shown in some embodiments of the utility model;

[0062] Figure 4 The structure schematic diagram of the infrared laser module and the mixed light module is shown in some embodiments of the utility model;

[0063] Figure 5 The structure schematic diagram of the continuous ultraviolet laser device is shown in some embodiments of the utility model;

[0064] Figure 6 The structure schematic diagram of the continuous ultraviolet laser device is shown in some embodiments of the utility model;

[0065] Figure 7 The principle block diagram of the laser device is shown in some embodiments of the utility model;

[0066] Figure 8 The structure schematic diagram of the laser device is shown in some embodiments of the utility model;

[0067] Figure 9 The structure schematic diagram of the laser device is shown in some embodiments of the utility model. DETAILED DESCRIPTION

[0068] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. The components of the embodiments of the utility model described and shown in the drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the utility model.

[0069] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0070] The term "and / or", merely describes an associated relationship, which means that there can be three relationships, for example, A and / or B, which can represent: A exists alone, A and B exist together, and B exists alone. In addition, the term "at least one" herein means any one of the plurality or any combination of at least two of the plurality, for example, at least one of A, B and C includes any one or more elements selected from the set consisting of A, B and C.

[0071] With the rapid development of science and technology, various laser technologies have been widely applied and concerned in various fields. For example, in the field of semiconductor (such as wafer) defect detection, it is usually necessary to use low-noise and high-stability ultraviolet laser as a detection light source. Although high-repetition-rate picosecond ultraviolet laser can be regarded as a quasi-continuous light source, due to the relatively high peak power, it is easy to damage the wafer and knock off the particles on the wafer, so the continuous ultraviolet light source is more suitable for defect detection of the wafer. For the field of material processing, marking and engraving, it is usually necessary to use green laser as a processing light source.

[0072] Taking ultraviolet laser as an example, the main indicators of continuous ultraviolet laser applied in defect detection are relative intensity noise, output power stability and output power. However, the principle of generating continuous ultraviolet laser is simple, but it is a difficult problem in the industry to realize low-noise, high-stability and high-power (such as more than 1W) continuous ultraviolet laser.

[0073] Based on the resonant cavity technology, the conversion efficiency can be improved to a certain extent to realize higher power output. However, this technical solution is relatively complex, expensive, sensitive system, and requires high vibration and temperature and humidity, which leads to harsh transportation and use conditions and high maintenance cost.

[0074] And because the conversion efficiency of the nonlinear crystal frequency doubling is proportional to the peak power density of the incident light, the square of the crystal length, and the phase matching factor, and inversely proportional to the area of the incident light, when using continuous light cavity outside harmonic to generate laser, the peak power of the laser is the average power, which is much lower than the pulse light, resulting in low conversion efficiency and unable to achieve the required high power.

[0075] In addition, since the semiconductor detection equipment generally limits the electrical power of the light source within a predetermined range, for example, the wafer detection equipment generally limits the electrical power of the light source within 700W, which limits the pumping power of the Diode, and further needs to improve the conversion efficiency of pumping to infrared as much as possible.

[0076] On the other hand, if the infrared power is too high, it is difficult to obtain a narrow linewidth output. That is, due to the limitation of the infrared power, it is necessary to maximize the conversion efficiency to obtain a high enough green laser power, and at the same time, it is also necessary to maximize the conversion efficiency to obtain a high power (watt level) ultraviolet laser output. Therefore, how to reduce the technical difficulty while ensuring the conversion efficiency is a technical problem to be solved.

[0077] Based on the above research, the utility model provides a kind of continuous ultraviolet laser device and laser device, can reduce cost and device complexity while effectively improving conversion efficiency.

[0078] The continuous ultraviolet laser device provided by the embodiments of the utility model will be described in detail below in conjunction with the drawings.

[0079] Referring to Figure 1 As shown in the figure, Figure 1 It is the principle block diagram of the continuous ultraviolet laser device provided by some embodiments of the utility model. The continuous ultraviolet laser device 100 includes infrared laser module 10, mixed light module 20 and ultraviolet laser module 30.

[0080] Among them, the infrared laser module 10 is used to generate target continuous infrared laser;The mixed light module 20 is used to carry out the second harmonic conversion of multiple passages to the target continuous infrared laser, to convert part of the target continuous infrared laser into target continuous green laser, and the target continuous green laser and target residual continuous infrared laser form first continuous mixed light;The ultraviolet laser module 30 is used to carry out the N harmonic conversion of multiple passages to the first continuous mixed light, and target continuous ultraviolet laser is obtained;Wherein, N is an integer greater than 2.

[0081] Exemplarily, the wavelength of the target continuous infrared laser is 1064nm, and the wavelength of the target continuous green laser is 532nm.

[0082] Here, the target continuous ultraviolet laser is used to detect a semiconductor. In the embodiments of the present disclosure, the semiconductor includes a wafer and a mask plate.

[0083] Specifically, referring to Figure 2 As shown in the figure, Figure 2 It is the principle block diagram of the continuous ultraviolet laser device provided by some embodiments of the utility model. The infrared laser module 10 includes infrared laser 101 and infrared light adjustment assembly 102.

[0084] Among them, the infrared laser 101 is used to generate initial continuous infrared laser. Exemplarily, the infrared laser 101 can be infrared fiber laser or infrared solid laser (Nd:YAG) and the like.

[0085] The infrared light adjusting assembly 102 is arranged on an initial red light path of the initial continuous infrared laser, and is used for adjusting a polarization state of the initial continuous infrared laser to obtain the target continuous infrared laser.

[0086] The mixed light module 20 comprises an infrared mirror assembly 201 and a first conversion assembly 202.

[0087] The ultraviolet laser module 30 comprises a mixed light mirror assembly 301 and a second conversion assembly 302.

[0088] In the embodiments of the present disclosure, multi-pass refers to double-pass and above.

[0089] In the embodiments of the present disclosure, the continuous ultraviolet laser device 100 adopts the extracavity frequency doubling technology, which can reduce the cost and the requirement for the environment compared with the intracavity resonant cavity technology.

[0090] Specifically, refer to Figure 3 , Figure 3 The infrared light adjusting assembly 102 comprises a polarization beam splitter 11 and a first focusing lens 12 which are arranged along the initial red light path.

[0091] The polarization beam splitter 11 is configured to split the initial continuous infrared laser into a first continuous infrared laser and a second continuous infrared laser with different polarization directions, wherein the first continuous infrared laser has the same optical path direction as the initial continuous infrared laser, and the second continuous infrared laser has a perpendicular optical path direction to the initial continuous infrared laser.

[0092] The first focusing lens 12 is configured to focus the first continuous infrared laser into the target continuous infrared laser, and the target continuous infrared laser is incident to the infrared mirror assembly 201 along the first red light path.

[0093] In some possible embodiments, the infrared light adjusting assembly 102 further comprises a third light power absorber 13 arranged on the transmission path of the second continuous infrared laser, and configured to absorb the second continuous infrared laser.

[0094] Please continue to refer to Figure 3 The infrared mirror assembly 102 comprises a first infrared mirror 21 and a second infrared mirror 22, wherein the first infrared mirror 21 is arranged on the first red light path, and the second infrared mirror 22 is arranged on the second red light path.

[0095] Please continue to refer to Figure 3 In the case that the number of the multi-pass second harmonic conversion is K, and the K pass paths are completely different, wherein K is an integer greater than 1, the first conversion assembly 202 comprises a frequency doubling element 23 and M groups of first reflection assemblies 24, wherein M is an integer less than K by 1.

[0096] The frequency doubling element 23 is configured to receive the target continuous infrared laser transmitted through the second red light path, and convert part of the target continuous infrared laser into a first continuous green laser, and the first continuous green laser and a first remaining continuous infrared laser form an initial continuous mixed light.

[0097] The initial continuous mixed light is reflected by the M groups of first reflection assemblies 24 for multiple times, and the frequency doubling element 23 converts the energy of the first remaining continuous infrared laser into the first continuous green laser for multiple times, to form a target continuous green laser, and the target continuous green laser and a target remaining continuous infrared laser form the first continuous mixed light.

[0098] For example, the frequency doubling element 23 is a non-critical phase matching type second harmonic nonlinear crystal, such as a lithium triborate (LBO) crystal.

[0099] Here, each group of first reflection components 24 includes a first phase compensation element 241 (specifically 241a, 241b) and a first light reflection element 242 (specifically 242a, 242b), wherein the first phase compensation element 241 and the first light reflection element 242 in each group of first reflection components 24 are arranged at intervals, and the first phase compensation element 241 is close to the frequency doubling element 23.

[0100] It can be understood that when M is 1, the first reflection component 24 is arranged on the side of the frequency doubling element 23 away from the infrared mirror assembly 201; when M is greater than 1, the M groups of first reflection components 24 are respectively located on the opposite sides of the frequency doubling element 23.

[0101] For example, the first phase compensation element 241 is a quartz plate. The first light reflection element 242 is a double-wavelength concave mirror for reflecting infrared laser (for example, wavelength 1064nm) and green laser (for example, wavelength 532nm).

[0102] In addition, for the multi-pass conversion process of the frequency doubling element, when the fundamental light (such as the target continuous infrared laser) passes through the frequency doubling element 23 for the first time, a part of the infrared light is converted into green light, which is only a small part at this time and serves as the seed light for the second frequency doubling. When the mixed light passes through the frequency doubling element 23 for the second time, the initial phase difference between the frequency doubling seed light and the fundamental light is adjusted to an integer multiple of 2π by phase compensation, and the infrared light of the mixed light will be further converted into green light. In this way, with the increase of the number of times of passing through the frequency doubling element 23, the length of the frequency doubling element 23 is equivalent to being multiplied, so as to realize high-efficiency frequency doubling of low-peak-power laser.

[0103] The following will be described in combination with Figure 3 The light path process of the mixed light module 20 will be described here, Figure 3 The examples in the above will be described by taking three-pass second harmonic conversion as an example.

[0104] The target continuous infrared laser passes through the first infrared mirror 21 and the second infrared mirror 22 to be converted from the first red light path to the second red light path, and then passes through the frequency doubling element 23, and then hits the first light reflection element 242a through the first phase compensation element 241a. After being reflected by the first light reflection element 242a, the first phase compensation element 241a returns to the frequency doubling element 23, and then hits the first light reflection element 242b through the first phase compensation element 241b. After being reflected by the first light reflection element 242b, the first phase compensation element 241b passes through the frequency doubling element 23 again, and outputs the first continuous mixed light along the first mixed light path.

[0105] Specifically, the first light path is: target continuous infrared laser light→first infrared mirror 21→second infrared mirror 22→frequency doubling element 23→first phase compensation element 241a→first light reflection element 242a; the second light path is: first light reflection element 242a→first phase compensation element 241a→frequency doubling element 23→first phase compensation element 241b→first light reflection element 242b; and the third light path is: first light reflection element 242b→first phase compensation element 241b→frequency doubling element 23→output first continuous mixed light.

[0106] Optionally, the frequency doubling element 23 adopts a LBO crystal of a non-critical phase matching type (NCPM), and the receiving angle of the fundamental frequency incident light reaches 1718 mrad*cm, so that the requirement for the incident angle of the infrared light beam is not high, and therefore, for the light beam re-reflected to the frequency doubling element 23, it is not necessary to re-incident to the crystal along the original light path, and a deviation within a certain angle range will not affect the conversion efficiency of the second frequency doubling, and then the multi-pass second harmonic conversion can be realized, that is, the remaining infrared light can be re-used for the second frequency doubling to obtain a target continuous green laser with higher power.

[0107] In order to more clearly describe the light path process of the mixed light module 20, here, the light path process of the mixed light module 20 can be seen from Figure 4 , Figure 4 The structure of the infrared laser module and the mixed light module provided by some embodiments of the present application is shown in the accompanying drawings. Figure 3 The difference between the structure of the infrared laser module and the mixed light module provided by some embodiments of the present application and the structure of the infrared laser module and the mixed light module provided by the prior art is that, Figure 4 The example in the prior art is described by taking a four-pass second harmonic conversion as an example.

[0108] Here, each group of first reflection assemblies 24 includes a first phase compensation element 241 (specifically 241a, 241b, 241c) and a first light reflection element 242 (specifically 242a, 242b, 242c), wherein the first phase compensation element 241 and the first light reflection element 242 in each group of first reflection assemblies 24 are arranged at intervals, and the first phase compensation element 241 is close to the frequency doubling element 23.

[0109] Specifically, the first light path is: target continuous infrared laser→first infrared mirror 21→second infrared mirror 22→frequency doubling element 23→first phase compensation element 241a→first light reflection element 242a; the second light path is: first light reflection element 242a→first phase compensation element 241a→frequency doubling element 23→first phase compensation element 241b→first light reflection element 242b; the third light path is: first light reflection element 242b→first phase compensation element 241b→frequency doubling element 23→first phase compensation element 241c→first light reflection element 242c; the fourth light path is: first light reflection element 242c→first phase compensation element 241c→frequency doubling element 23→output first continuous mixed light.

[0110] Here, in the case where K is even, the transmission light path of the first continuous mixed light avoids the infrared mirror assembly 201.

[0111] Please continue to refer to Figure 3 The mixed light mirror assembly 301 includes a second mixed light mirror 31 and a third mixed light mirror 32, the second mixed light mirror 31 is arranged on the first mixed light path; the third mixed light mirror 32 is arranged on the second mixed light path.

[0112] In some possible embodiments, the mixed light mirror assembly 301 further includes a second focusing lens 33 arranged between the second mixed light mirror 31 and the third mixed light mirror 32, for collimating the light beams transmitted between the second mixed light mirror 31 and the third mixed light mirror 32.

[0113] In combination with Figure 3 And Figure 4 It can be seen that, in the case where K is even, the mixed light mirror assembly 301 is arranged on the side of the frequency doubling element 23 close to the infrared mirror assembly 102; in the case where K is odd, the mixed light mirror assembly 301 is arranged on the side of the frequency doubling element 23 away from the infrared mirror assembly 201.

[0114] Again, refer to Figure 3 In the case where the number of the multi-pass N-harmonic conversion is X-pass, the X-pass paths are completely not shared, and N is 3, wherein X is an integer greater than 1, the target continuous ultraviolet laser is a first target continuous ultraviolet laser, and the second conversion assembly 302 includes a first frequency doubling element 34, Y sets of second reflection assemblies 35, a first dichroic mirror 36, and a first light power absorber 37, wherein Y is an integer less than X by 1. Exemplarily, the wavelength of the first target continuous ultraviolet laser is 355 nm.

[0115] The first sum frequency element 34 is arranged on one side of the mixed light mirror assembly 301, and is used to receive the first continuous mixed light transmitted through the second mixed light path, and perform sum frequency processing on part of the target continuous green laser and part of the target remaining continuous infrared laser to form a first continuous ultraviolet laser. The first continuous ultraviolet laser and the first remaining continuous mixed light form a second continuous mixed light.

[0116] For example, the first sum frequency element 34 is a third harmonic nonlinear crystal, such as a lithium triborate (LBO) crystal or a beta-phase barium borate (BBO) crystal.

[0117] The second continuous mixed light is reflected multiple times by the Y group second reflection assembly 35, and the energy of the first remaining continuous mixed light is converted to the first continuous ultraviolet laser multiple times by the first sum frequency element 34 to form a first target continuous ultraviolet laser. The first target continuous ultraviolet laser and the second remaining continuous mixed light form a third continuous mixed light.

[0118] Here, in the case where X is an even number, the transmission path of the third continuous mixed light avoids the mixed light mirror assembly 301.

[0119] The first dichroic mirror 36 is used to receive the third continuous mixed light converted by the first sum frequency element 34 multiple times, transmit the second remaining continuous mixed light to the first optical power absorber 37, and reflect the first target continuous ultraviolet laser.

[0120] Here, in the case where X is an even number, the transmission path of the second remaining continuous mixed light avoids the mixed light mirror assembly 301.

[0121] Here, each group of second reflection assemblies 35 includes a second phase compensation element 351 (specifically, 351a, 351b) and a second light reflection element 352 (specifically, 352a, 352b). The second phase compensation element 351 and the second light reflection element 352 in each group of second reflection assemblies 35 are arranged at intervals, and the second phase compensation element 351 is close to the first sum frequency element 34.

[0122] For example, the second phase compensation element 351 is a quartz plate. The second light reflection element 352 is a three-wavelength concave mirror, which is used to reflect infrared laser (for example, with a wavelength of 1064 nm), green laser (for example, with a wavelength of 532 nm), and ultraviolet laser (for example, with a wavelength of 355 nm).

[0123] The following will be described in combination with Figure 3 The light path process of the ultraviolet laser module 30 will be described. Here, Figure 3 The example in the above description takes a three-pass third harmonic conversion as an example.

[0124] The first continuous mixed light passes through the second mixed light mirror 31, the second focusing lens 33 and the third mixed light mirror 32, and is converted from the first mixed light light path to the second mixed light light path, and then passes through the first sum frequency element 34, and then passes through the second phase compensation element 351a to the second light reflection element 352a. After being reflected by the second light reflection element 352a, it returns to the first sum frequency element 34 through the second phase compensation element 351a, and then passes through the second phase compensation element 351b to the second light reflection element 352b. After being reflected by the second light reflection element 352b, it passes through the second phase compensation element 351b and passes through the first sum frequency element 34 again, and outputs the third continuous mixed light. The third continuous mixed light is incident on the first dichroic mirror 36. The red light beam and the green light beam (second remaining continuous mixed light) in the third continuous mixed light are transmitted from the first dichroic mirror 36 and are absorbed by the first light power absorber 37. The ultraviolet laser in the third continuous mixed light is reflected by the first dichroic mirror 36, and the first target continuous ultraviolet laser is obtained.

[0125] Specifically, the first light path is: first continuous mixed light→second mixed light mirror 31→second focusing lens 33→third mixed light mirror 32→first sum frequency element 34→second phase compensation element 351a→second light reflection element 352a; the second light path is: second light reflection element 352a→second phase compensation element 351a→first sum frequency element 34→second phase compensation element 351b→second light reflection element 352b; and the third light path is: second light reflection element 352b→second phase compensation element 351b→first sum frequency element 34→first dichroic mirror 36→output first target continuous ultraviolet laser.

[0126] It should be noted that in the multiple-pass frequency doubling, when propagating in air, the wavelengths of the fundamental light and the frequency-doubled light are different, and the different air refractive indices will additionally introduce a phase difference, which causes a certain phase difference between the fundamental light and the frequency-doubled light when returning. Therefore, in the embodiment of the present disclosure, a quartz piece with a certain thickness is introduced to compensate for the phase difference between the fundamental light and the frequency-doubled light, so that the fundamental light and the frequency-doubled light are in phase, thereby achieving the effect of multiple frequency doubling enhancement.

[0127] Referring to Figure 5 as shown, Figure 5The utility model provides a continuous ultraviolet laser device's structure schematic diagram provided by some other embodiments of the utility model. In the case that the number of the multi-pass N harmonic conversion is A pass, the A pass paths are completely not common, and N is 5, wherein A is an integer greater than 1, the target continuous ultraviolet laser is second target continuous ultraviolet laser, the second conversion assembly 302 includes first sum frequency element 34, B group second reflection assembly 35, second dichroic mirror 41, second optical power absorber 42, first mixed light reflection mirror 43, second sum frequency element 44 and light splitting element 45, wherein B is an integer less than A by 1. Exemplarily, the wavelength of the second target continuous ultraviolet laser is 213nm.

[0128] The first sum frequency element 34 is arranged on one side of the mixed light reflection mirror assembly 301, is used for receiving the first continuous mixed light transmitted through the second mixed light optical path, and carries out sum frequency processing on part of the target continuous green laser and part of the target remaining continuous infrared laser, forms first continuous ultraviolet laser, and the first continuous ultraviolet laser and first remaining continuous mixed light form second continuous mixed light.

[0129] The second continuous mixed light is reflected by the B group reflection assembly 35 multiple times, and the first remaining continuous mixed light energy is converted to the first continuous ultraviolet laser by the first sum frequency element 34 multiple times, and fourth continuous mixed light is formed;The fourth continuous mixed light includes second remaining continuous infrared laser and fifth continuous mixed light, and the fifth continuous mixed light includes first remaining continuous green laser and second continuous ultraviolet laser.

[0130] Here, in the case that A is even, the transmission optical path of the fourth continuous mixed light avoids the mixed light reflection mirror assembly 301.

[0131] Here, each group of second reflection assembly 35 includes second phase compensation element 351 (specifically 351a, 351b) and second light reflection element 352 (specifically 352a, 352b), wherein the second phase compensation element 351 in each group of second reflection assembly 35 is arranged at intervals with the second light reflection element 352, and the second phase compensation element 351 is close to the first sum frequency element 34.

[0132] Exemplarily, the second phase compensation element 351 is a quartz sheet. The second light reflection element 352 is a three-wavelength concave mirror, which is used for reflecting infrared laser (such as wavelength 1064nm), green laser (such as wavelength 532nm) and ultraviolet laser (such as wavelength 355nm).

[0133] The second dichroic mirror 41 is configured to receive the fourth continuous mixed light converted by the first sum-frequency element 34, transmit the second remaining continuous infrared laser to the second optical power absorber 42, and reflect the fifth continuous mixed light to a third mixed light path.

[0134] Here, in the case that A is even, the transmission path of the second remaining continuous infrared laser avoids the mixed light mirror assembly 301.

[0135] The first mixed light mirror 43 is configured to convert the transmission path of the fifth continuous mixed light from the third mixed light path to a fourth mixed light path.

[0136] The second sum-frequency element 44 is disposed on one side of the first mixed light mirror 43, configured to receive the fifth continuous mixed light transmitted through the fourth mixed light path, and perform sum-frequency mixing on part of the first remaining continuous green laser and part of the second continuous ultraviolet laser to form the second target continuous ultraviolet laser, and the second target continuous ultraviolet laser and the third remaining continuous mixed light form the sixth continuous mixed light.

[0137] For example, the second sum-frequency element 44 is a fifth-harmonic nonlinear crystal, such as a beta-phase barium borate (BBO) crystal or a cesium lithium triborate (CLBO) crystal.

[0138] The light splitting element 45 is disposed on the side of the second sum-frequency element 44 away from the first mixed light mirror 43, configured to split the received sixth continuous mixed light into the second target continuous ultraviolet laser, the second remaining continuous green laser, and the target remaining continuous ultraviolet laser.

[0139] For example, the light splitting element 45 is a triple prism.

[0140] In some possible implementations, the second conversion assembly 302 further includes a third focusing lens 46 disposed between the second dichroic mirror 41 and the first mixed light mirror 43, configured to collimate the light beams transmitted between the second dichroic mirror 41 and the first mixed light mirror 43.

[0141] The following will be described in combination with Figure 5 The light path process of the ultraviolet laser module 30 will be described here, and Figure 5 The examples in the above will be described by taking three-pass third-harmonic conversion and one-pass fifth-harmonic conversion as examples.

[0142] The first continuous mixed light passes through the second mixed light mirror 31, the second focusing lens 33 and the third mixed light mirror 32, and is converted from the first mixed light light path to the second mixed light light path, then passes through the first sum frequency element 34, then passes through the second phase compensation element 351a and hits the second light reflection element 352a, is reflected by the second light reflection element 352a, returns to the first sum frequency element 34 through the phase compensation element 351a, then passes through the second phase compensation element 351b and hits the second light reflection element 352b, is reflected by the second light reflection element 352b, passes through the second phase compensation element 351b again and passes through the first sum frequency element 34, and outputs the fourth continuous mixed light. The fourth continuous mixed light hits the second dichroic mirror 41, the red light beam (second residual continuous infrared laser) in the fourth continuous mixed light is transmitted from the second dichroic mirror 41 and is absorbed by the second light power absorber 42, and the green light beam and the ultraviolet laser (fifth continuous mixed light) in the fourth continuous mixed light are reflected by the second dichroic mirror 41 to the third mixed light light path and pass through the third focusing lens 46. The fifth continuous mixed light is converted from the third mixed light light path to the fourth mixed light light path by the first mixed light mirror 43, then passes through the second sum frequency element 44, and outputs the sixth continuous mixed light which hits the light splitting element 45. The sixth continuous mixed light is split into the second target continuous ultraviolet laser (for example, with a wavelength of 213 nm), the second residual continuous green laser (for example, with a wavelength of 532 nm) and the target residual continuous ultraviolet laser (for example, with a wavelength of 355 nm) by the light splitting element 45.

[0143] Specifically, for three times harmonic conversion, the first light path is: first continuous mixed light→second mixed light mirror 31→second focusing lens 33→third mixed light mirror 32→first sum frequency element 34→second phase compensation element 351a→second light reflection element 352a; the second light path is: second light reflection element 352a→second phase compensation element 351a→first sum frequency element 34→second phase compensation element 351b→second light reflection element 352b; and the third light path is: second light reflection element 352b→second phase compensation element 351b→first sum frequency element 34→second dichroic mirror 41→output fifth continuous mixed light. For five times harmonic conversion, the light path is: fifth continuous mixed light→third focusing lens 46→first mixed light mirror 43→second sum frequency element 44→light splitting element 45→output second target continuous ultraviolet laser.

[0144] Optionally, in this example, since the three times harmonic conversion is performed in the first sum frequency element 34, the conversion efficiency is improved. In order to accelerate the generation efficiency of the continuous ultraviolet laser, the five times harmonic conversion is performed in the second sum frequency element 44.

[0145] In other embodiments, a single-pass third harmonic conversion may be performed in the first frequency-sum element 34, and a multi-pass fifth harmonic conversion may be performed in the second frequency-sum element 44. Alternatively, a multi-pass third harmonic conversion may be performed in the first frequency-sum element 34, and a multi-pass fifth harmonic conversion may also be performed in the second frequency-sum element 44.

[0146] Accordingly, in the case of multi-pass fifth harmonic conversion by the second frequency element 44, the number of multi-pass fifth harmonic conversions is C-pass, and the C-pass paths are completely non-common. The second conversion component 302 may also include a D-group third reflector assembly. Figure 5 Not shown in the image, please refer to the following: Figure 5 The second reflector assembly 35), where D is an integer one less than C.

[0147] Here, each group of third reflection components includes a third phase compensation element and a third light reflection element. The third phase compensation element and the third light reflection element in each group of third reflection components are spaced apart, and the third phase compensation element is close to the second sum-frequency element 44.

[0148] For example, the third phase compensation element is a quartz plate. The third light reflecting element is a three-wavelength concave mirror used to reflect green laser (e.g., wavelength 532nm) and two types of ultraviolet laser (e.g., wavelengths 355nm and 213nm).

[0149] See Figure 6 As shown, Figure 6 This is a schematic diagram of the structure of a continuous ultraviolet laser device provided in some embodiments of the present invention. Figure 5 The difference in the embodiment is that, in the case where the number of harmonic conversions of the multi-pass Nth harmonic is A-pass, the A-pass paths are completely non-common, and N is 4, where A is an integer greater than 1, the target continuous ultraviolet laser is a third target continuous ultraviolet laser, and the second conversion component 302 includes a first sum-frequency element 34, a group B of second reflection components 35, a third dichroic mirror 51, a fourth optical power absorber 52, a first mixed light reflector 43, a third sum-frequency element 53, and a beam splitter 45, where B is an integer one less than A. For example, the wavelength of the third target continuous ultraviolet laser is 266 nm.

[0150] The first frequency-summing element 34 is disposed on one side of the hybrid light reflector assembly 301, and is used to receive the first continuous hybrid light transmitted through the second hybrid light optical path, and to perform frequency-summing processing on a portion of the target continuous green laser and a portion of the target remaining continuous infrared laser to form a first continuous ultraviolet laser. The first continuous ultraviolet laser and the first remaining continuous hybrid light form a second continuous hybrid light.

[0151] The second continuous mixed light is reflected by the B group second reflecting component 35 for multiple times, and the first remaining continuous mixed light energy is converted to the first continuous ultraviolet laser light by the first sum frequency element 34 for multiple times to form a seventh continuous mixed light; the seventh continuous mixed light comprises a third remaining continuous green laser light and an eighth continuous mixed light, and the eighth continuous mixed light comprises a third remaining continuous infrared laser light and a third continuous ultraviolet laser light.

[0152] The third dichroic mirror 51 is configured to receive the seventh continuous mixed light converted by the first sum frequency element 34 for multiple times, transmit the third remaining continuous green laser light to the fourth optical power absorber 52, and reflect the eighth continuous mixed light to a third mixed light light path.

[0153] Here, in the case that A is an even number, the transmission light path of the third remaining continuous green laser light avoids the mixed light reflecting mirror component 301.

[0154] The first mixed light reflecting mirror 43 is configured to convert the transmission light path of the eighth continuous mixed light from the third mixed light light path to a fourth mixed light light path.

[0155] The third sum frequency element 53 is disposed on one side of the first mixed light reflecting mirror 43, configured to receive the eighth continuous mixed light transmitted by the fourth mixed light light path, and perform sum frequency processing on part of the third remaining continuous infrared laser light and part of the third continuous ultraviolet laser light to form the third target continuous ultraviolet laser light, and the third target ultraviolet laser light and the fourth remaining continuous mixed light form a ninth continuous mixed light.

[0156] For example, the third sum frequency element 53 is a fourth harmonic nonlinear crystal, such as a lithium triborate (LBO) crystal or a beta phase barium borate (BBO) crystal.

[0157] The light splitting element 45 is disposed on the side of the third sum frequency element 53 away from the first mixed light reflecting mirror 43, configured to split the received ninth continuous mixed light into the third target continuous ultraviolet laser light, the fourth remaining continuous infrared laser light, and a second target remaining continuous ultraviolet laser light.

[0158] In some possible implementation manners, the second conversion component 302 further comprises a third focusing lens 46 disposed between the third dichroic mirror 51 and the first mixed light reflecting mirror 43, configured to collimate the light beam transmitted between the third dichroic mirror 51 and the first mixed light reflecting mirror 43.

[0159] The following will be described in combination with Figure 6 The light path process of the ultraviolet laser module 30 will be described here, here, Figure 6The examples in the table are illustrated by taking the third harmonic conversion and the fourth harmonic conversion as examples.

[0160] The first continuous mixed light is reflected by the second mixed light mirror 31, the second focusing lens 33 and the third mixed light mirror 32, and then converted from the first mixed light path to the second mixed light path, and then passes through the first sum frequency element 34, and then passes through the second phase compensation element 351a to hit the second light reflection element 352a. After being reflected by the second light reflection element 352a, it returns to the first sum frequency element 34 through the second phase compensation element 351a, and then hits the second light reflection element 352b through the second phase compensation element 351b. After being reflected by the second light reflection element 352b, it passes through the second phase compensation element 351b again and passes through the first sum frequency element 34. The seventh continuous mixed light is output, hits the third dichroic mirror 51, and the green light beam (third remaining continuous green laser) in the seventh continuous mixed light is transmitted from the third dichroic mirror 51 and absorbed by the fourth light power absorber 52. The red light beam and ultraviolet laser (eighth continuous mixed light) in the seventh continuous mixed light are reflected by the third dichroic mirror 51 to the third mixed light path and pass through the third focusing lens 46. The eighth continuous mixed light is converted from the third mixed light path to the fourth mixed light path by the first mixed light mirror 43, and then passes through the third sum frequency element 53. The ninth continuous mixed light is output and hits the light splitting element 45. The ninth continuous mixed light is split into the third target continuous ultraviolet laser (for example, with a wavelength of 266nm), the fourth remaining continuous infrared laser (for example, with a wavelength of 1064nm) and the second target remaining continuous ultraviolet laser (for example, with a wavelength of 355nm) by the light splitting element 45.

[0161] Specifically, for third harmonic conversion, the first light path is: first continuous mixed light→second mixed light mirror 31→second focusing lens 33→third mixed light mirror 32→first sum frequency element 34→second phase compensation element 351a→second light reflection element 352a; the second light path is: second light reflection element 352a→second phase compensation element 351a→first sum frequency element 34→second phase compensation element 351b→second light reflection element 352b; the third light path is: second light reflection element 352b→second phase compensation element 351b→first sum frequency element 34→third dichroic mirror 51→output eighth continuous mixed light; for fifth harmonic conversion, the light path is: eighth continuous mixed light→third focusing lens 46→first mixed light mirror 43→third sum frequency element 53→light splitting element 45→output third target continuous ultraviolet laser.

[0162] Optionally, in the present example, since the third harmonic conversion is carried out by the first sum-frequency element 34 in multiple passes, the conversion efficiency has been improved, in order to accelerate the efficiency of generating continuous ultraviolet laser, the fourth harmonic conversion is carried out by the third sum-frequency element 53 in one pass.

[0163] In other embodiments, the third harmonic conversion can also be carried out by the first sum-frequency element 34 in one pass, and the fourth harmonic conversion can be carried out by the third sum-frequency element 53 in multiple passes. Or the third harmonic conversion can also be carried out by the first sum-frequency element 34 in multiple passes, and the fourth harmonic conversion can also be carried out by the third sum-frequency element 53 in multiple passes.

[0164] In the case of the fourth harmonic conversion carried out by the third sum-frequency element 53 in multiple passes, the second conversion assembly 302 can further include multiple sets of fourth mirror assembly, which can be specifically referred to the description of the fifth harmonic conversion carried out by the second sum-frequency element 45 in multiple passes in the foregoing embodiments, which will not be described here.

[0165] The laser device provided by the embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0166] Referring to Figure 7 the accompanying drawings, Figure 7 the principle block diagram of the laser device provided by some embodiments of the present application. The laser device 700 includes a laser generation module 71, a light source adjustment assembly 72, a light path conversion assembly 73, a light conversion element 74, and an F set of reflection assemblies 75; wherein F is an integer greater than or equal to 1.

[0167] The laser generation module 71 is configured to generate initial laser; the light source adjustment assembly 72 is arranged on an initial light path for transmitting the initial laser, and is configured to adjust the polarization state of the initial laser to obtain first laser.

[0168] The light path conversion assembly 73 is configured to convert the transmission light path of the first laser from a first light path to a second light path; the first light path direction is the same as the initial light path direction.

[0169] The light conversion element 74 is configured to receive the first laser transmitted through the second light path, and to perform multiple reflections on the first laser through the F set of reflection assemblies 75, and to obtain second laser after multiple-pass conversion through the light conversion element 74.

[0170] The light conversion element 74 can be specifically a nonlinear crystal. Here, multiple-pass refers to double-pass and above. Generally, a single pass of fundamental light through a nonlinear crystal is referred to as a "single-pass" structure, that is, the fundamental light is converted only once. Double-pass is that the fundamental light passes through the nonlinear crystal twice, that is, the fundamental light is converted twice. Similarly, multiple-pass is that the fundamental light passes through the nonlinear crystal multiple times, and the fundamental light is converted multiple times.

[0171] In some possible embodiments, the laser generation module 71 is an infrared laser generation module, the first laser is an infrared laser, and the second laser is a green laser.

[0172] Here, the infrared laser generation module can specifically be an infrared laser, and optionally, the infrared laser generation module can be the infrared laser 101 in the foregoing embodiments.

[0173] For example, the infrared laser has a wavelength of 1064 nm, and the green laser has a wavelength of 532 nm. Optionally, the infrared laser can be the target continuous infrared laser in the foregoing embodiments, and the green laser can be the target continuous green laser in the foregoing embodiments.

[0174] Correspondingly, the optical conversion element 74 can be a second-harmonic nonlinear crystal of a non-critical phase matching type, for example, a lithium triborate (LBO) crystal.

[0175] In some other possible embodiments, the laser generation module is a green laser generation module, the first laser is a green laser, and the second laser is an ultraviolet laser.

[0176] Here, the green laser generation module can specifically be a green laser that directly generates a green laser, or can be a set of devices that can convert an infrared laser into a green laser, for example, a set of devices composed of the infrared laser module and the mixed light module in the foregoing embodiments.

[0177] For example, the green laser has a wavelength of 532 nm, and the ultraviolet laser has a wavelength of 266 nm.

[0178] Correspondingly, the optical conversion element 74 can be a fourth-harmonic nonlinear crystal, for example, a beta-phase barium borate (BBO) crystal.

[0179] In the embodiments of the present disclosure, the multiple-path conversion multiple-path portions are collinear or completely non-collinear, where collinear means that the route of a certain path of the light beam returns along the completely consistent route of the previous path, and non-collinear means that the route of a certain path and the route of the previous path are misaligned.

[0180] Specifically, refer to Figure 8 , Figure 8 The structure diagram of the laser device provided by some embodiments of the present application is shown. In the present example, the number of multiple-path conversions is E paths and the E-path portions are collinear, E is an even number greater than 1, and F is half of E.

[0181] As Figure 8As shown in the figure, the light source adjusting assembly 72 comprises a first polarization beam splitter 721, a Faraday rotator 722, a half-wave plate 723, a second polarization beam splitter 724 and a focusing lens 725 arranged in sequence along the initial light path.

[0182] The first polarization beam splitter 721 is configured to split the initial laser beam into a first candidate laser beam and a second candidate laser beam with different polarization directions, wherein the first candidate laser beam has the same direction as the initial laser beam, and the second candidate laser beam is perpendicular to the initial laser beam.

[0183] The Faraday rotator 722 is configured to deflect the polarization state of the incident light beam by 45 degrees. The half-wave plate 723 is configured to change the polarization direction of the first candidate laser beam.

[0184] The second polarization beam splitter 724 is configured to split the first candidate laser beam with the changed polarization direction into a third candidate laser beam and a fourth candidate laser beam with different polarization directions; wherein the third candidate laser beam has the same direction as the initial laser beam, and the fourth candidate laser beam is perpendicular to the initial laser beam.

[0185] The focusing lens 725 is configured to focus the third candidate laser beam into the first laser beam, which is incident to the light path conversion assembly 73 along the first light path.

[0186] In some possible embodiments, the light source adjusting assembly 72 further comprises a fifth optical power absorber 726 arranged on the transmission light path of the second candidate laser beam, configured to absorb the second candidate laser beam.

[0187] The light path conversion assembly 73 comprises a first mirror 731 and a second mirror 732, wherein the first mirror 731 is arranged on the first light path, and the second mirror 732 is arranged on the second light path.

[0188] Referring again to Figure 8 , the light conversion element 74 is configured to receive the first laser beam transmitted through the second light path, and convert part of the first laser beam into a first preliminary laser beam, and the first preliminary laser beam and the first remaining laser beam form a first mixed light.

[0189] The first mixed light is reflected multiple times by the F-group reflection assembly 75, and the first remaining laser beam energy is converted to the first preliminary laser beam multiple times by the light conversion element 74, forming a second laser beam, and the second laser beam and the second remaining laser beam form a second mixed light.

[0190] In the embodiment, the laser device 700 further comprises a dichroic mirror 76, which is arranged on a third light path parallel to and opposite to the first light path; the second laser light emitted from the light conversion element 74 is converted to the third light path by the light path conversion assembly 73, and the dichroic mirror 76 is configured to receive the second laser light transmitted through the third light path and reflect the second laser light.

[0191] Specifically, the light path conversion assembly 73 is further configured to receive the second mixed light and convert the transmission light path of the second mixed light from a fourth light path to a third light path, the third light path being parallel to and opposite to the first light path, and the fourth light path being parallel to and opposite to the second light path.

[0192] The dichroic mirror 76 is arranged between the second polarization beam splitter 724 and the focusing lens 725, configured to transmit the second residual laser light and reflect the second laser light.

[0193] Here, each set of reflection assembly 75 comprises a phase compensation element 751 (specifically 751a, 751b, 751c) and a light reflection element 752 (specifically 752a, 752b, 752c), wherein the phase compensation element 751 and the light reflection element 752 in each set of reflection assembly 75 are arranged at intervals, and the phase compensation element 751 is close to the light conversion element 74.

[0194] Specifically, the phase compensation element 751 is a quartz plate. The light reflection element 752 is a two-wavelength concave mirror.

[0195] The following will be described in combination with Figure 8 The light path process of the laser device 700 will be described, here, Figure 8 The example in the above is described by taking six-way conversion and path part collinear as an example.

[0196] The laser generating module 71 emits initial laser, which is transmitted through the first polarization beam splitter 721, and then is transmitted through the Faraday rotator 722 to make the polarization of the light rotate by 45°, and then is transmitted through the half-wave plate 723 to adjust the polarization direction of the light, and then is transmitted through the second polarization beam splitter 724 to adjust the polarization direction of the light to the horizontal direction, and then is transmitted through the dichroic mirror 76, and then is transmitted through the focusing lens 725 to obtain the first laser, which is converted from the first light path to the second light path through the first mirror 731 and the second mirror 732, and then is transmitted through the light conversion element 74, and then is transmitted through the phase compensation element 751a to the light reflection element 752a, is reflected through the light reflection element 752a, and then is returned to the light conversion element 74 through the phase compensation element 751a, and then is transmitted through the phase compensation element 751b to the light reflection element 752b, is reflected through the light reflection element 752b again, and then is returned to the light conversion element 74 through the phase compensation element 751b, and then is transmitted through the phase compensation element 751c to the light reflection element 752c, is reflected through the light reflection element 752c, and then is returned to the light conversion element 74 through the phase compensation element 751c, is transmitted through the phase compensation element 751b to the light reflection element 752b, is reflected through the light reflection element 752b again, and then is returned to the light conversion element 74 through the phase compensation element 751b, and then is transmitted through the phase compensation element 751a to the light reflection element 752a, is reflected through the light reflection element 752a, and then is returned to the light conversion element 74 through the phase compensation element 751a, and then is output from the light conversion element 74 as the second mixed light, which is transmitted to the second mirror 732, is converted from the fourth light path to the third light path through the second mirror 732 and the first mirror 731, and then is guided out as the second laser through the dichroic mirror 76, and the second remaining laser will continue to return, be transmitted through the Faraday rotator 722 to rotate the polarization of the light by 45°, and then be reflected along the first polarization beam splitter 721 to the fifth light power absorber 726 to be absorbed.

[0197] Specifically, the first light path is: first laser light→first mirror 731→second mirror 732→light conversion element 74→phase compensation element 751a→light reflection element 752a; the second light path is: light reflection element 752a→phase compensation element 751a→light conversion element 74→phase compensation element 751b→light reflection element 752b; the third light path is: light reflection element 752b→phase compensation element 751b→light conversion element 74→phase compensation element 751c→light reflection element 752c; the fourth light path is: light reflection element 752c→phase compensation element 751c→light conversion element 74→phase compensation element 751b→light reflection element 752b; the fifth light path is: light reflection element 752b→phase compensation element 751b→light conversion element 74→phase compensation element 751a→light reflection element 752a; and the sixth light path is: light reflection element 752a→phase compensation element 751a→light conversion element 74→second mirror 732→first mirror 731→focusing lens 725→dichroic mirror 76→output second laser light.

[0198] It should be noted that the above is only a six-pass case, and other four-pass or eight-pass and more cases are similar to this. For example, if it is a four-pass case, one set of reflection assemblies 75 on the right side of the light conversion element 74 can be reduced, and optionally, one set of phase compensation elements 751a and light reflection elements 752a can be removed, or one set of phase compensation elements 751c and light reflection elements 752c can be removed. If it is an eight-pass case, one set of reflection assemblies 75 can be added on the left side of the light conversion element 74.

[0199] Please refer to Figure 9 , Figure 9 The structure schematic diagram of the laser device provided by some other embodiments of the utility model. Different from Figure 8 , in the example, the number of the multi-pass conversion is E-pass, and all the E-pass paths are not collinear, E is an integer greater than 1, and F is an integer less than E.

[0200] For the embodiment in Figure 9 , different from the embodiment in Figure 8 , the setting position of the dichroic mirror 76 is different, and the second mixed light does not pass through the light path conversion assembly 73, but is directly emitted (reflected) through the dichroic mirror 76.

[0201] In addition, in the embodiment, the light source adjusting assembly 72 is different from the embodiment in Figure 8 ,

[0202] In the embodiment, the light source adjusting assembly 72 comprises a first polarization beam splitter 721 and a focusing lens 725 which are sequentially and spacedly arranged along the initial light path.

[0203] The first polarization beam splitter 721 is used to split the initial laser beam into a third candidate laser and a fourth candidate laser with different polarization directions; wherein the optical path direction of the third candidate laser is the same as that of the initial laser, and the optical path direction of the fourth candidate laser is perpendicular to that of the initial laser. The focusing lens 725 is used to focus the third candidate laser into the first laser, and the first laser is incident on the optical path conversion component 73 along the first optical path.

[0204] In some possible implementations, the laser device 700 further includes a sixth optical power absorber 78 disposed on the light-transmitting side of the dichroic mirror 76 for absorbing the second residual laser.

[0205] See Figure 9 As shown, the second residual laser in the second mixed light is emitted through the dichroic mirror 76 and can be absorbed by the sixth optical power absorber 78.

[0206] The following is combined Figure 9 The optical path process of the laser device 700 will be explained here. Figure 9 The example in the text uses a tee conversion where all paths are non-collinear to illustrate the concept.

[0207] Specifically, the first optical path is: first laser → first reflector 731 → second reflector 732 → light conversion element 74 → phase compensation element 751a → light reflection element 752a; the second optical path is: light reflection element 752a → phase compensation element 751a → light conversion element 74 → phase compensation element 751b → light reflection element 752b; the third optical path is: light reflection element 752b → phase compensation element 751b → light conversion element 74 → dichroic mirror 76 → output second laser.

[0208] To detect whether the power of the second laser is within a corresponding preset range, in some possible embodiments, the laser device further includes an optical power detection component 77 (not shown). The optical power detection component 77 is used to detect the power of the initial laser or the processed laser, and when the power of the initial laser or the processed laser exceeds the preset range, it generates an adjustment command. The adjustment command is used to instruct the laser generating module 71 to adjust the power of the initial laser so that the initial laser or the processed laser is within the preset range. The processed laser is the laser that the initial laser has been processed by at least one optical element during transmission processing.

[0209] Here, the optical power detection component 77 is used to detect the power of the initial laser or the processed laser. That is, the optical power detection component 77 can detect the power of the laser at any position in the optical path process from the initial laser to the second laser.

[0210] It should be noted that the preset range corresponding to the different stages of the laser is different.

[0211] It can be understood that, according to the conversion relationship between the second laser and the initial laser, or the conversion relationship between the second laser and the processed laser, the second laser can be made to be within the corresponding preset range in the case that the initial laser or the processed laser is within the corresponding preset range.

[0212] In the embodiment, the optical path conversion assembly 73 comprises at least one mirror; each set of reflection assembly 75 comprises a phase compensation element 751 and a light reflection element 752, wherein the phase compensation element 751 and the light reflection element 752 in each set of reflection assembly 75 are arranged at intervals, and the phase compensation element 751 is close to the light conversion element 74.

[0213] In some possible embodiments, the optical power detection group 77 comprises a power probe 771. The power probe 771 is arranged on the non-main optical path and located on the light transmission side of the target reflection element, used for power detection of the processed laser transmitted by the target reflection element, and generates an adjustment instruction when the power of the processed laser exceeds the preset range; the target reflection element is any mirror included in the optical path conversion assembly 73, or any light reflection element 752.

[0214] For example, referring to Figure 8 , the power probe 771 is located on the light transmission side of the first mirror 731, used for power detection of the first laser transmitted by the first mirror 731, and generates an adjustment instruction when the power of the first laser exceeds the corresponding preset range.

[0215] Among them, the main optical path is the transmission optical path in the process of converting the initial laser into the second laser, and correspondingly, the non-main optical path is other optical paths except the main optical path.

[0216] Here, the target reflection element can be adjusted according to the different specific implementation stages.

[0217] For example, in the case that the first laser is a red laser and the second laser is a green laser, the target reflection element can be any mirror included in the infrared mirror assembly 201 in the foregoing embodiments, such as the first infrared mirror 21 or the second infrared mirror 22 shown in Figures 3-6 , and the target reflection element can also be any first light reflection element 242 in the foregoing embodiments.

[0218] In another example, in the case that the first laser is a green laser and the second laser is an ultraviolet laser, the target reflective element can be any of the mirrors included in the infrared mirror assembly 201, any of the mirrors included in the mixed light mirror assembly 301, or any of the mirrors included in the second conversion assembly 302 in the foregoing embodiments, such as the first infrared mirror 21, the second infrared mirror 22, the second mixed light mirror 31, the third mixed light mirror 32, or the first mixed light mirror 43 shown in FIG. Figures 3-6 The target reflective element can also be any of the first light reflective elements 242 or any of the second light reflective elements 352 in the foregoing embodiments.

[0219] In some possible implementations, the light power detection group 77 includes a power probe 771.

[0220] For example, referring to FIG. Figure 9 The light taking mirror 772 is disposed on the first light path, specifically between the focusing lens 725 and the first mirror 731, for partially reflecting the first laser to the power probe 771 and outputting the remaining first laser to the first mirror 731.

[0221] The continuous ultraviolet laser device and the laser device provided by the embodiments of the present application can reduce cost and requirements on the environment by using the cavity-out frequency multiplication method compared with the cavity-in frequency multiplication method. In addition, the multi-pass conversion technology is used in the conversion process of the laser at each stage, for example, in the second harmonic conversion process and the Nth harmonic conversion process, so that the laser conversion efficiency at each stage can be effectively improved compared with the single-pass conversion.

[0222] The above-described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0223] In the description of the embodiments of the present application, it should be pointed out that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the product in use, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the liquid level detection device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0224] In the description of the embodiments of the present application, it should be pointed out that, unless otherwise explicitly specified and limited, the terms "set", "mount", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0225] Finally, it should be pointed out that: the above-described embodiments are only specific embodiments of the present application, which are used to illustrate the technical solutions of the present application, but not to limit it, the protection scope of the present application is not limited to this, although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any skilled in the art within the technical range disclosed by the present application, it can still modify or easily think of changes to the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to some technical features; and these modifications, changes or replacements do not make the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application. All should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A continuous ultraviolet laser device, characterized by comprising: The infrared laser module, the mixed light module and the ultraviolet laser module; wherein the infrared laser module is used to generate target continuous infrared laser; the mixed light module is used to carry out multi-pass second harmonic conversion on the target continuous infrared laser, so that part of the target continuous infrared laser is converted into target continuous green laser, and the target continuous green laser and target residual continuous infrared laser form first continuous mixed light; the ultraviolet laser module is used to carry out multi-pass N harmonic conversion on the first continuous mixed light, and target continuous ultraviolet laser is obtained; wherein N is an integer greater than 2; The mixed light module includes an infrared mirror assembly and a first conversion assembly; the infrared mirror assembly is used to convert the transmission light path of the target continuous infrared laser from a first red light path to a second red light path; the first conversion assembly is used to carry out multi-pass second harmonic conversion on the target continuous infrared laser transmitted through the second red light path, and the first continuous mixed light is obtained; The ultraviolet laser module includes a mixed light mirror assembly and a second conversion assembly; the mixed light mirror assembly is used to convert the transmission light path of the first continuous mixed light from a first mixed light path to a second mixed light path; the second conversion assembly is used to carry out multi-pass N harmonic conversion on the first continuous mixed light transmitted through the second mixed light path, and the target continuous ultraviolet laser is obtained.

2. The laser device of claim 1, wherein, In the case that the number of times of the multi-pass second harmonic conversion is K pass, and the K pass paths are completely not shared, wherein K is an integer greater than 1, the first conversion assembly includes a frequency doubling element and M groups of first reflection assemblies, wherein M is an integer less than K by 1; The frequency doubling element is used to receive the target continuous infrared laser transmitted through the second red light path, and convert part of the target continuous infrared laser into first continuous green laser, and the first continuous green laser and first residual continuous infrared laser form initial continuous mixed light; The initial continuous mixed light is reflected multiple times through the M groups of first reflection assemblies, and the first residual continuous infrared laser energy is converted to the first continuous green laser multiple times through the frequency doubling element, forming target continuous green laser, and the target continuous green laser and target residual continuous infrared laser form the first continuous mixed light.

3. The laser device of claim 2, wherein, Each group of first reflection assemblies includes a first phase compensation element and a first light reflection element, wherein the first phase compensation element and the first light reflection element in each group of first reflection assemblies are arranged at intervals, and the first phase compensation element is close to the frequency doubling element.

4. The laser device of claim 1, wherein, In the case that the number of times of the multi-pass N harmonic conversion is X pass, X pass paths are completely not shared, and N is 3, wherein X is an integer greater than 1, the target continuous ultraviolet laser is first target continuous ultraviolet laser, and the second conversion assembly includes a first sum frequency element, a first dichroic mirror, a first light power absorber and Y groups of second reflection assemblies, wherein Y is an integer less than X by 1; The first sum-frequency element is arranged on one side of the mixed light reflecting mirror assembly, and is used for receiving the first continuous mixed light transmitted through the second mixed light light path, and performing sum-frequency processing on part of the target continuous green laser and part of the target remaining continuous infrared laser to form a first continuous ultraviolet laser, and the first continuous ultraviolet laser and the first remaining continuous mixed light form a second continuous mixed light; The second continuous mixed light is reflected multiple times through the Y group second reflecting assembly, and the energy of the first remaining continuous mixed light is converted to the first continuous ultraviolet laser multiple times through the first sum-frequency element to form a first target continuous ultraviolet laser, and the first target continuous ultraviolet laser and a second remaining continuous mixed light form a third continuous mixed light; The first dichroic mirror is used for receiving the third continuous mixed light converted by the first sum-frequency element multiple times, transmitting the second remaining continuous mixed light to the first optical power absorber, and reflecting the first target continuous ultraviolet laser.

5. The laser device of claim 1, wherein In the case that the number of the multi-pass Nth harmonic conversion is A pass, the A pass paths are completely not shared, and N is 5, wherein A is an integer greater than 1, the target continuous ultraviolet laser is a second target continuous ultraviolet laser, and the second conversion assembly includes a first sum-frequency element, a second dichroic mirror, a second optical power absorber, a B group second reflecting assembly, a first mixed light reflecting mirror, a second sum-frequency element, and a light splitting element, wherein B is an integer less than A by 1; The first sum-frequency element is arranged on one side of the mixed light reflecting mirror assembly, and is used for receiving the first continuous mixed light transmitted through the second mixed light light path, and performing sum-frequency processing on part of the target continuous green laser and part of the target remaining continuous infrared laser to form a first continuous ultraviolet laser, and the first continuous ultraviolet laser and the first remaining continuous mixed light form a second continuous mixed light; The second continuous mixed light is reflected multiple times through the B group second reflecting assembly, and the energy of the first remaining continuous mixed light is converted to the first continuous ultraviolet laser multiple times through the first sum-frequency element to form a fourth continuous mixed light; the fourth continuous mixed light includes a second remaining continuous infrared laser and a fifth continuous mixed light, and the fifth continuous mixed light includes a first remaining continuous green laser and a second continuous ultraviolet laser; The second dichroic mirror is used for receiving the fourth continuous mixed light converted by the first sum-frequency element multiple times, transmitting the second remaining continuous infrared laser to the second optical power absorber, and reflecting the fifth continuous mixed light to a third mixed light light path; The first mixed light reflecting mirror is used for converting the transmission light path of the fifth continuous mixed light from the third mixed light light path to a fourth mixed light light path; The second sum-frequency element is arranged on one side of the first mixed light reflecting mirror, and is used for receiving the fifth continuous mixed light transmitted through the fourth mixed light light path, and performing sum-frequency processing on part of the first remaining continuous green laser and part of the second continuous ultraviolet laser to form the second target continuous ultraviolet laser, and the second target continuous ultraviolet laser and a third remaining continuous mixed light form a sixth continuous mixed light; The spectral element is arranged on the side of the second sum-frequency element away from the first mixed light reflecting mirror, and is used for decomposing the received sixth continuous mixed light into the second target continuous ultraviolet laser, a second residual continuous green laser, and a target residual continuous ultraviolet laser.

6. The laser device according to claim 4 or 5, characterized in that Each second reflection assembly includes a second phase compensation element and a second light reflecting element, wherein the second phase compensation element and the second light reflecting element are arranged at intervals in each second reflection assembly, and the second phase compensation element is close to the first sum-frequency element.

7. The laser device of claim 1, wherein, The mixed light reflecting mirror assembly includes a second mixed light reflecting mirror and a third mixed light reflecting mirror, wherein the second mixed light reflecting mirror is arranged on the first mixed light path, and the third mixed light reflecting mirror is arranged on the second mixed light path.

8. The laser device of claim 1, wherein, The infrared laser module includes an infrared laser and an infrared light adjusting assembly. The infrared laser is used to generate an initial continuous infrared laser. The infrared light adjusting assembly is arranged on an initial infrared light path for transmitting the initial continuous infrared laser, and is used for adjusting the polarization state of the initial continuous infrared laser to obtain the target continuous infrared laser; the first infrared light path direction for transmitting the target continuous infrared laser is the same as the initial infrared light path direction.

9. The laser device of claim 8, wherein, The infrared light adjusting assembly includes a polarization beam splitter and a first focusing lens arranged at intervals along the initial infrared light path. The polarization beam splitter is used to split the initial continuous infrared laser into first and second continuous infrared lasers with different polarization directions; wherein the first continuous infrared laser has the same light path direction as the initial continuous infrared laser, and the second continuous infrared laser has a light path direction perpendicular to the initial continuous infrared laser. The first focusing lens is used to focus the first continuous infrared laser into the target continuous infrared laser, and the target continuous infrared laser is incident on the infrared reflecting mirror assembly along the first infrared light path.

10. The laser device of claim 9, wherein, The infrared light adjusting assembly further includes: A third light power absorber arranged on the transmission path of the second continuous infrared laser is used to absorb the second continuous infrared laser.

11. The laser device of claim 1, wherein, The infrared reflecting mirror assembly includes a first infrared reflecting mirror and a second infrared reflecting mirror, wherein the first infrared reflecting mirror is arranged on the first infrared light path, and the second infrared reflecting mirror is arranged on the second infrared light path.

12. The laser device of claim 7, wherein, The mixed light reflecting mirror assembly further includes: A second focusing lens arranged between the second mixed light reflecting mirror and the third mixed light reflecting mirror is used to collimate the light beams transmitted between the second mixed light reflecting mirror and the third mixed light reflecting mirror.

13. The laser device of claim 5, wherein, The second conversion assembly further includes: A third focusing lens arranged between the second dichroic mirror and the first mixed light reflecting mirror is used to collimate the light beams transmitted between the second dichroic mirror and the first mixed light reflecting mirror.

14. A laser device, characterized by comprising: The laser generating module, the light source adjusting assembly, the light path conversion assembly, the light conversion element, and the F reflection assembly are included; wherein F is an integer greater than or equal to 1. The laser generating module is used to generate an initial laser. The light source adjusting assembly is arranged on an initial light path for transmitting the initial laser, and is configured to adjust a polarization state of the initial laser to obtain first laser; The light path converting assembly is configured to convert a transmission light path of the first laser from a first light path to a second light path, and the first light path is in the same direction as the initial light path; The light converting element is configured to receive the first laser transmitted through the second light path, and to reflect the first laser through the F sets of reflecting assemblies multiple times, and to convert the first laser through the light converting element multiple times to obtain second laser.

15. The laser device of claim 14, wherein, The laser generating module is an infrared laser generating module, the first laser is infrared laser, and the second laser is green laser.

16. The laser device of claim 14, wherein, The laser generating module is a green laser generating module, the first laser is green laser, and the second laser is ultraviolet laser.

17. The laser device of any of claims 14-16, wherein, The number of times of the multiple conversions is E times, and E is an even number greater than 1, and F is half of E. The laser device further comprises a dichroic mirror arranged on a third light path parallel to and opposite to the first light path, the second laser emitted from the light converting element is converted to the third light path by the light path converting assembly, and the dichroic mirror is configured to receive the second laser transmitted through the third light path and reflect the second laser.

18. The laser device of any of claims 14-16, wherein, The number of times of the multiple conversions is E times, and E is an integer greater than 1, and F is an integer less than E by 1.

19. The laser device of any of claims 14-16, wherein, The laser device further comprises an optical power detecting assembly configured to detect power of the initial laser or processed laser, and to generate an adjusting instruction when the power of the initial laser or processed laser exceeds a preset range; the adjusting instruction is configured to instruct the laser generating module to adjust the power of the initial laser, so that the initial laser or processed laser is within the preset range; and the processed laser is laser processed by at least one optical element during transmission.

20. The laser device of claim 19, wherein, The light path converting assembly comprises at least one mirror; each set of reflecting assemblies comprises a phase compensation element and a light reflecting element, wherein the phase compensation element and the light reflecting element in each set of reflecting assemblies are arranged at intervals, and the phase compensation element is close to the light converting element; and the optical power detecting assembly comprises a power probe. The power probe is arranged on a non-main light path and located on a light transmission side of a target reflecting element, and is configured to detect power of processed laser transmitted by the target reflecting element, and to generate an adjusting instruction when the power of the processed laser exceeds a preset range. The target reflecting element is any mirror included in the light path converting assembly, or any light reflecting element.

21. The laser device of claim 19, wherein, The optical power detecting assembly comprises a light taking mirror and a power probe. The light taking mirror is arranged on a main light path, and is configured to reflect part of the initial laser or processed laser to the power probe, and to output the remaining initial laser or processed laser. The power probe is configured to detect the power of the part of the initial laser or the processed laser taken by the light taking mirror, and generate an adjustment instruction when the power of the initial laser or the processed laser exceeds a preset range.

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