Finishing head and polishing equipment

Abstract

The utility model provides a finishing head and polishing equipment, and relates to the technical field of semiconductor processing equipment, and the finishing head comprises a finishing device which can polish and finish the surface of a polishing pad in a rotating mode; the cleaning device can clean the surface of the polishing pad in a rotating mode, a containing cavity used for containing the trimming device is formed in the cleaning device, the containing cavity penetrates through the bottom of the cleaning device, and the trimming device can stretch out of the bottom of the cleaning device; the rotary driving device can output rotary power so as to drive the trimming device and the cleaning device to rotate; and the moving device is used for driving the trimming device and / or the cleaning device to move, so that the trimming device can be stored in / extend out of the storage cavity. The problems that in the prior art, the occupied space is large, and the device is not suitable for narrow space are solved.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor processing equipment, and more specifically, to a trimming head and polishing equipment. Background Technology

[0002] In wafer fabrication, wafers need to be polished. This polishing process requires the use of polishing pads and polishing fluid to grind and polish the wafer. The debris from the polished wafer and the polishing fluid slurry on the polishing pad surface gradually seep into the pad. Over time, the polishing pad surface hardens and becomes shiny, forming a glaze and becoming smooth, significantly reducing polishing efficiency. Therefore, surface preparation and maintenance of the polishing pad is an essential step in the polishing process. This preparation and maintenance typically involves using a dressing disc to grind the polishing pad surface, followed by brushing with a brush.

[0003] In some polishing devices in related technologies, the dressing disc and the brush are two separate devices. When dressing the polishing pad, the dressing disc is first moved above the polishing pad for grinding. After grinding, the dressing disc is removed from the polishing pad, and then the brush is moved onto the polishing pad for cleaning.

[0004] The applicant argues that existing polishing equipment occupies a large space and is unsuitable for smaller spaces. Utility Model Content

[0005] The purpose of this application is to provide a trimming head and polishing device, which aims to solve the problem that related technologies occupy a large space and cannot be used in small spaces.

[0006] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description or may be learned by practice of this application.

[0007] According to a first aspect of this application, a trimming head is provided, comprising:

[0008] The dressing device can grind and dress the surface of the polishing pad by rotating it.

[0009] The cleaning device is capable of cleaning the surface of the polishing pad in a rotating manner. The cleaning device has an internal cavity for housing the trimming device, which extends through the bottom of the cleaning device. The trimming device can extend from the bottom of the cleaning device.

[0010] A rotary drive device is capable of outputting rotational power to drive the trimming device and the cleaning device to rotate;

[0011] A moving device is used to move the trimming device and / or the cleaning device so that the trimming device can be retracted into / extracted from the receiving cavity.

[0012] In one exemplary embodiment of this application, a fixing part whose height position does not move is also included. The fixing part is used to receive the rotational power output by the rotational drive device. The fixing part is located inside the storage cavity and above the trimming device.

[0013] The moving device includes a first moving mechanism disposed between the fixed part and the trimming device, for driving the trimming device to move up and down; and / or,

[0014] The moving device includes a second moving mechanism disposed between the fixed part and the cleaning device for driving the cleaning device to move up and down.

[0015] In one exemplary embodiment of this application, the first moving mechanism includes:

[0016] A first airbag is installed between the fixing part and the trimming device. The first airbag is connected to a first air guiding structure for introducing and exporting gas into and out of itself.

[0017] A limiting block is disposed on the top of the trimming device and fixed relative to the trimming device, and the limiting block has a limiting groove in the vertical direction;

[0018] The limiting rod is connected and fixed to the fixing part, extends into the limiting groove, and can move in the limiting groove in the vertical direction.

[0019] In one exemplary embodiment of this application, the second moving mechanism includes:

[0020] The second airbag is installed between the fixing part and the top of the cleaning device, and the second airbag is connected to a second air guiding structure for introducing and exporting gas into and out of itself.

[0021] In one exemplary embodiment of this application, the first moving mechanism includes a first airbag installed between the fixing part and the trimming device, and the first airbag is connected to a first air guiding structure for inflating itself; the second moving mechanism includes a second airbag and a communicating airway, the second airbag is installed between the fixing part and the top of the cleaning device, and the communicating airway connects the first airbag and the second airbag.

[0022] In one exemplary embodiment of this application, the first air guide structure includes an air intake shaft arranged in a vertical direction, one end of the air intake shaft is connected to the first airbag, and the other end of the air intake shaft is connected to a quick-connect rotary joint.

[0023] In one exemplary embodiment of this application, the cleaning device includes a top plate, a connecting plate, and a brush arranged sequentially from top to bottom; the connecting plate is configured as an annular structure, the upper surface of the connecting plate is fixedly connected to the lower surface of the top plate, the brush is fixedly connected to the lower surface of the connecting plate, and the storage cavity is disposed on the inner side of the connecting plate.

[0024] In one exemplary embodiment of this application, the rotary drive device includes:

[0025] The pulley can provide the rotational power through its own rotation;

[0026] The rotating shaft is fixedly connected to the bottom of the pulley;

[0027] The connecting column is set vertically, with its top end fixedly connected to the lower surface of the rotating shaft, and its bottom end passing through the top plate and fixedly connected to the fixing part.

[0028] In one exemplary embodiment of this application, a biasing member for applying a downward force to the top plate is provided above the top plate.

[0029] In one exemplary embodiment of this application, the trimming device includes:

[0030] A dressing disc is used to polish the surface of the polishing pad;

[0031] The mounting plate is fixedly connected to the top of the trimming disc, and the connection between the mounting plate and the fixing part is detachable.

[0032] According to a second aspect of this application, a polishing apparatus is provided having any of the dressing heads described above.

[0033] The exemplary embodiments of this application may have some or all of the following beneficial effects:

[0034] In the dressing head provided in the example embodiment of this application, by installing the dressing device inside the cleaning device, when the polishing pad needs to be ground and polished, the positions of the dressing device and the cleaning device are first adjusted by the moving device so that the dressing device is positioned below the receiving cavity. Specifically, the moving device can act on the dressing device and the cleaning device alone or simultaneously, by moving the dressing device downward, moving the cleaning device upward, or both simultaneously, to ensure that the dressing device can be accurately moved to the outside of the receiving cavity. On this basis, the rotary drive device drives the dressing device to rotate, thereby completing the grinding of the polishing pad. After the dressing device has finished grinding the polishing pad, the positions of the dressing device and the cleaning device are adjusted again by the moving device so that the dressing device is located inside the receiving cavity. Under the driving action of the rotary drive device, the cleaning device can clean the polishing pad. Therefore, through the above structure, the dressing device and the cleaning device are combined, effectively saving the space required, making the dressing device suitable for relatively small operating environments.

[0035] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0036] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0037] Figure 1 A cross-sectional view illustrating the rotary drive device in the dressing head is shown in an embodiment of this application;

[0038] Figure 2 A cross-sectional view illustrating the first moving mechanism in the trimming head is shown in an embodiment of this application;

[0039] Figure 3 This application shows a cross-sectional view illustrating the connecting air passage in the trimming head according to an embodiment of the present application;

[0040] Figure 4 It shows Figure 3 A magnified view of part A in the middle.

[0041] Explanation of reference numerals in the attached figures:

[0042] 1. Trimming device; 11. Trimming disc; 12. Mounting plate; 2. Cleaning device; 21. Top plate; 22. Connecting plate; 23. Brush; 3. Rotary drive device; 31. Pulley; 32. Rotating shaft; 33. Connecting column; 4. First moving mechanism; 41. First airbag; 42. Limiting block; 421. Limiting groove; 43. Limiting rod; 5. Second moving mechanism; 51. Second airbag; 52. Connecting air passage; 6. First air guide structure; 61. Air inlet shaft; 62. Quick-connect rotary joint; 7. Storage cavity; 8. First spring; 9. Second spring; 10. Fixing part. Detailed Implementation

[0043] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore their detailed descriptions will be omitted. Furthermore, the drawings are merely illustrative of this application and are not necessarily drawn to scale.

[0044] Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another, these terms are used only for convenience, such as according to the orientation of the examples in the accompanying drawings. It is understood that if the device of the icon is flipped so that it is upside down, the component described as "upper" will become the component described as "lower." When a structure is "upper" of another structure, it may mean that the structure is integrally formed on the other structure, or that the structure is "directly" mounted on the other structure, or that the structure is "indirectly" mounted on the other structure through another structure.

[0045] The terms “a,” “one,” “the,” and “at least one” are used to indicate the existence of one or more elements / components / etc.; the terms “including” and “having” are used to indicate an open-ended inclusion and to mean that there may be other elements / components / etc. in addition to the listed elements / components / etc.; the terms “first” and “second” are used only as markers and are not a limitation on the number of objects.

[0046] like Figure 1 and Figure 2 As shown in the embodiments of this application, a trimming head includes:

[0047] The finishing device 1 is capable of grinding and finishing the surface of the polishing pad by rotating it.

[0048] The cleaning device 2 is capable of cleaning the surface of the polishing pad in a rotating manner. The cleaning device 2 has a storage cavity 7 for housing the trimming device 1. The storage cavity 7 extends through the bottom of the cleaning device 2, and the trimming device 1 can extend out from the bottom of the cleaning device 2.

[0049] The rotary drive device 3 is capable of outputting rotational power to drive the trimming device 1 and the cleaning device 2 to rotate.

[0050] A moving device is used to move the trimming device 1 and / or the cleaning device 2, so that the trimming device 1 can be retracted into / extracted from the storage cavity 7.

[0051] In this embodiment, the dressing head is located directly above the polishing pad. When the polishing pad needs to be polished, the moving device can either move the dressing device 1 downwards, or move the cleaning device 2 upwards, or simultaneously move the cleaning device 2 upwards and the dressing device 1 downwards. The desired effect is to create a relative displacement between the two, placing the dressing device 1 below the receiving cavity 7. Under the drive of the rotary drive device 3, the dressing device 1 can then grind the polishing pad. When the polishing pad needs to be cleaned, the moving device again adjusts the relative position between the dressing device 1 and the cleaning device 2, placing the dressing device 1 inside the cleaning device 2. Under the action of the rotary drive device 3, the cleaning device 2 can then clean the polishing pad. Through the above structure, the dressing device 1 and the cleaning device 2 are combined, effectively saving the space required for the dressing head and making the dressing device with this dressing head suitable for use in confined spaces.

[0052] In this embodiment, the trimming head further includes a fixed part 10 whose height position does not move. The rotary drive device 3 applies rotational power to the fixed part 10 to drive it to rotate. In this application, the fixed part 10 is configured as a fixed plate, located inside the receiving cavity 7 and above the trimming device 1. The top and bottom of the fixed part 10 are horizontally engaged with the cleaning device 2 and the trimming device 1, respectively, thereby enabling the fixed device to drive both to rotate. When the moving device is installed on the fixed part 10 and adjusts the distance between the trimming device 1 and the cleaning device 2, the following possible implementation methods exist:

[0053] Method 1: The moving device includes a first moving mechanism 4, which is installed between the fixed part 10 and the trimming device 1 and acts on the trimming device 1, while the cleaning device 2 remains in a fixed position. The first moving mechanism 4 adjusts the position of the trimming device 1 to move the trimming device 1 to below the cleaning device 2 or retract it into the storage cavity 7.

[0054] Method 2: The moving device includes a second moving mechanism 5, which is installed between the fixed part 10 and the top of the cleaning device 2 and acts on the cleaning device 2, while the position of the trimming device 1 remains unchanged. The second moving mechanism 5 adjusts the position of the cleaning device 2 so that the trimming device 1 can be located either outside or inside the storage cavity 7.

[0055] Method 3: The moving device includes a first moving mechanism 4 and a second moving mechanism 5. The first moving mechanism 4 acts on the dressing device 1, and the second moving mechanism 5 acts on the cleaning device 2. When the polishing pad needs to be ground, the first moving mechanism 4 drives the dressing device 1 to move downward, and the second moving mechanism 5 drives the cleaning device 2 to move upward. When the surface of the polishing pad needs to be cleaned, the first moving mechanism 4 drives the dressing device 1 to move upward, and the second moving mechanism drives the cleaning device 2 to move downward.

[0056] In this embodiment, no specific restrictions are placed on the specific structure of the first moving mechanism 4 and the second moving mechanism 5. For example, devices such as airbags, cylinders, and hydraulic cylinders can be used.

[0057] In this embodiment, the dressing device 1 includes a dressing disc 11 and a mounting plate 12. The dressing disc 11 directly contacts the polishing pad and is used to polish the upper surface of the polishing pad. The mounting plate 12 is connected between the fixing part 10 and the dressing disc 11. The bottom of the mounting plate 12 is bolted to the dressing disc 11, and the top is bolted to the fixing part 10, ensuring the stability and maintainability of the entire device. This connection method not only facilitates assembly, but more importantly, it allows for easy replacement when the dressing disc 11 becomes severely worn due to prolonged use, greatly extending the service life of the entire dressing device 1. Of course, bolted connections are not limiting; other connection methods such as snap-fit ​​or plug-in connections can also be used.

[0058] In this embodiment of the application, the cleaning device 2 includes a top plate 21, a connecting plate 22 and a brush 23 arranged sequentially from top to bottom; the top plate 21 is a circular closed plate, the connecting plate 22 is an annular structure, the upper surface of the connecting plate 22 is fixedly connected to the lower surface of the top plate 21, the brush 23 is fixedly connected to the lower surface of the top plate 21, and the storage cavity 7 is located inside the connecting plate 22.

[0059] In this embodiment of the application, the first moving mechanism 4 includes:

[0060] The first airbag 41 is installed between the fixing part 10 and the trimming device 1, and is connected to the first air guiding structure 6. Specifically, the first airbag 41 is located between the fixing part 10 and the top plate 21. The first airbag 41 has an annular structure and a cavity in the center for communicating with the first air guiding structure 6. An inner ring fixing block and an outer ring fixing block are fixed on the top of the top plate 21. The inner ring fixing block and the outer ring fixing block are used to fix the inner and outer sides of the first airbag 41, respectively. The first air guiding structure 6 is used to introduce and export gas into the first airbag 41.

[0061] The limiting block 42 is set on the top of the trimming device 1 and fixed relative to the trimming device 1. Specifically, the limiting block 42 is fixedly connected to the upper surface of the top plate 21, and the limiting block 42 has a limiting groove 421 in the vertical direction.

[0062] The limiting rod 43 is fixedly connected to the bottom of the fixing part 10. Specifically, the limiting rod 43 is set in a horizontal direction, one end of the limiting rod 43 is fixedly connected to the bottom of the fixing part 10, and the other end of the limiting rod 43 extends into the limiting groove 421.

[0063] When it is necessary to move the trimming device 1 to the lower part of the storage cavity 7, air can be injected into the first airbag 41 through the first air guiding structure 6, causing the first airbag 41 to expand and thus move the trimming device 1 downward to the lower part of the storage cavity 7. At the same time, the limiting rod 43 slides downward in the limiting groove 421. The limiting groove 421 constrains the limiting rod 43, thereby constraining the range of motion of the trimming device 1 and preventing the trimming device 1 from detaching from the fixing part 10.

[0064] When it is necessary to move the trimming device 1 into the storage cavity 7, simply extract the gas from the first airbag 41 to create a negative pressure state in the first airbag 41, thereby driving the mounting plate 12 and trimming disc 11 to rise and retract into the storage cavity 7.

[0065] like Figure 3 and Figure 4 As shown in this embodiment, the second moving mechanism 5 includes a second airbag 51, which is installed between the fixing part 10 and the top of the cleaning device 2. Specifically, pressure blocks are fixed on the upper surface of the fixing part 10 and the lower surface of the top plate 21, and the second airbag 51 is fixed between the two pressure blocks. The second airbag 51 is connected to a second air guiding structure for introducing and exporting gas into and out of itself.

[0066] When it is necessary to position the trimming device 1 outside the receiving cavity 7, simply inflate the second airbag 51 through the second air guide structure, causing the second airbag 51 to expand and move the cleaning device 2 upwards, thus positioning the trimming device 1 outside the receiving cavity 7. After the gas inside the second airbag 51 is expelled, the cleaning device 2 will automatically fall, allowing the trimming device 1 to reposition itself inside the cleaning device 2.

[0067] like Figure 3 and Figure 4 As shown in the preferred embodiment of this application, the trimming head simultaneously has a first moving mechanism 4 and a second moving mechanism 5. Specifically, the first moving mechanism 4 includes a first airbag 41, which is installed between the fixing part 10 and the trimming device 1, and the first airbag 41 is connected to a first air guiding structure 6 for inflating itself; the second moving mechanism 5 includes a second airbag 51 and a connecting air passage 52, the second airbag 51 is installed between the fixing part 10 and the top of the cleaning device 2, and the connecting air passage 52 connects the first airbag 41 and the second airbag 51.

[0068] When air is inflated into the first airbag 41 through the first air guide structure 6, the gas inside the first airbag 41 can be introduced into the second airbag 51 through the connecting air passage 52. As the first airbag 41 and the second airbag 51 expand continuously, the trimming device 1 moves downward while the cleaning device 2 moves upward, thereby positioning the trimming device 1 outside the receiving cavity 7.

[0069] like Figure 1 As shown in the embodiment of this application, the rotary drive device 3 includes:

[0070] The pulley 31 can provide the rotational power through its own rotation. Specifically, the motor can be installed above the pulley 31 to directly drive the pulley 31 to rotate, or the motor can be set on one side of the pulley 31 to drive the drive wheel to rotate, and the drive wheel will then drive the pulley 31 to rotate through the synchronous belt.

[0071] The rotating shaft 32 is fixedly connected to the bottom of the pulley 31;

[0072] The connecting column 33 is set vertically, with its top end fixedly connected to the lower surface of the rotating shaft 32, and its bottom end passing through the top plate 21 and fixedly connected to the fixing part 10. When the top plate 21 moves up and down, the connecting column 33 can also guide the top plate 21, thereby improving the stability of the top plate 21 when it moves.

[0073] When the pulley 31 rotates, the pulley 31 drives the fixed part 10 to rotate through the rotating shaft 32 and the connecting column 33. The fixed part 10 then drives the dressing device 1 and the cleaning device 2 to rotate, thereby realizing the grinding and cleaning of the polishing pad.

[0074] In this embodiment, the first air guiding structure 6 is located directly above the center of the first airbag 41. The first air guiding structure 6 includes an air intake shaft 61. The bottom of the air intake shaft 61 passes through the top plate 21 and the fixing part 10 and is connected to the cavity located at the center of the first airbag 41. The top of the air intake shaft 61 passes through the rotating shaft 32 and the pulley 31 and extends above the pulley 31. The top of the air intake shaft 61 is provided with a quick-connect rotary connector 62 for connecting with an inflation device. When inflation is required, simply connecting the inflation device to the quick-connect rotary connector 62 will achieve the effect of inflating the first airbag 41.

[0075] like Figure 1 and Figure 3 and Figure 4 As shown in this embodiment, a biasing component for applying a downward force to the top plate 21 is also provided above the top plate 21. Specifically, the biasing component includes a first spring 8 and a second spring 9. The first spring 8 is sleeved on the outside of the intake shaft 61, and a spring pressure plate is fixed above the pulley 31 on the first spring 8. The top of the first spring 8 abuts against the lower surface of the spring pressure plate, and the bottom of the first spring 8 abuts against the upper surface of the top plate 21. The second spring 9 is sleeved on the outside of the connecting column 33, and the top of the second spring 9 abuts against the bottom surface of the rotating shaft 32, and the bottom of the second spring 9 abuts against the upper surface of the connecting plate 22. When the second airbag 51 inflates, the cleaning device 2 moves upward to compress the first spring 8 and the second spring 9. When the second airbag 51 deflates, the first spring 8 and the second spring 9 release their elasticity and continue to provide downward pressure to the cleaning device 2 after the brush 23 abuts against the polishing pad, thereby improving the stability of the cleaning device 2 during operation.

[0076] In this application embodiment, a polishing device is also provided, which includes any of the above-described dressing heads.

[0077] Other embodiments of this application will readily conceive of by those skilled in the art upon consideration of the specification and practice of the embodiments thereof. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not claimed in this application. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this application are indicated by the appended claims.

Claims

1. A trimming head, characterized in that, include: The finishing device (1) is capable of grinding and finishing the surface of the polishing pad in a rotating manner; The cleaning device (2) is capable of cleaning the surface of the polishing pad in a rotating manner. The cleaning device (2) has a storage cavity (7) for storing the trimming device (1) inside. The storage cavity (7) extends through the bottom of the cleaning device (2). The trimming device (1) can extend out from the bottom of the cleaning device (2). The rotary drive device (3) is capable of outputting rotational power to drive the trimming device (1) and the cleaning device (2) to rotate; A moving device is used to move the trimming device (1) and / or the cleaning device (2) so that the trimming device (1) can be retracted into / extracted from the receiving cavity (7).

2. The trimming head according to claim 1, characterized in that, It also includes a fixed part (10) whose height position does not move. The fixed part (10) is used to receive the rotational power output by the rotational drive device (3). The fixed part (10) is located in the storage cavity (7) and above the trimming device (1). The moving device includes a first moving mechanism (4) disposed between the fixed part (10) and the trimming device (1) for driving the trimming device (1) to move up and down; and / or, The moving device includes a second moving mechanism disposed between the fixed part (10) and the cleaning device (2) for driving the cleaning device (2) to move up and down.

3. The trimming head according to claim 2, characterized in that, The first moving mechanism (4) includes: The first airbag (41) is installed between the fixing part (10) and the trimming device (1). The first airbag (41) is connected to a first air guiding structure (6) for introducing and exporting gas into itself. A limiting block (42) is disposed on the top of the trimming device (1) and fixed relative to the trimming device (1). The limiting block (42) has a limiting groove (421) in the vertical direction. The limiting rod (43) is connected and fixed to the fixing part (10), extends into the limiting groove (421) and can move in the limiting groove (421) in the vertical direction.

4. The trimming head according to claim 2, characterized in that, The second moving mechanism (5) includes: The second airbag (51) is installed between the fixing part (10) and the top of the cleaning device (2), and the second airbag (51) is connected to a second air guiding structure for introducing and exporting gas into itself.

5. The trimming head according to claim 2, characterized in that, The first moving mechanism (4) includes a first airbag (41), which is installed between the fixing part (10) and the trimming device (1). The first airbag (41) is connected to a first air guiding structure (6) for inflating itself. The second moving mechanism (5) includes a second airbag (51) and a connecting airway (52). The second airbag (51) is installed between the fixing part (10) and the top of the cleaning device (2). The connecting airway (52) is connected between the first airbag (41) and the second airbag (51).

6. The trimming head according to claim 3 or 5, characterized in that, The first air guide structure (6) includes an air intake shaft (61) arranged in a vertical direction. One end of the air intake shaft (61) is connected to the first airbag (41), and the other end of the air intake shaft (61) is connected to a quick-connect rotary joint (62).

7. The trimming head according to claim 6, characterized in that, The cleaning device (2) includes a top plate (21), a connecting plate (22), and a brush (23) arranged sequentially from top to bottom; the connecting plate (22) is configured as a ring structure, the upper surface of the connecting plate (22) is fixedly connected to the lower surface of the top plate (21), the brush (23) is fixedly connected to the lower surface of the connecting plate (22), and the storage cavity (7) is disposed on the inner side of the connecting plate (22).

8. The trimming head according to claim 7, characterized in that, The rotary drive device (3) includes: The pulley (31) is able to provide the rotational power through its own rotation; A rotating shaft (32) is fixedly connected to the bottom of the pulley (31); The connecting column (33) is set in the vertical direction, with its top end fixedly connected to the lower surface of the rotating shaft (32) and its bottom end passing through the top plate (21) and fixedly connected to the fixing part (10).

9. The trimming head according to claim 7, characterized in that, A biasing member for applying a downward force to the top plate (21) is provided above the top plate (21).

10. The trimming head according to claim 2, characterized in that, The trimming device (1) includes: A dressing disc (11) is used to polish the surface of the polishing pad; The mounting plate (12) is fixedly connected to the top of the trimming disc (11) and is detachably connected to the fixing part (10).

11. A polishing device, characterized in that, It has any one of the trimming heads according to claims 1-10.

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