Device for separating ceramic plate from substrate of electrostatic chuck

Abstract

The utility model discloses an electrostatic chuck ceramic plate and substrate separating device, and belongs to the technical field of electrostatic chucks. The electrostatic chuck ceramic plate and substrate separating device comprises a base, a power source external port is installed on the side wall of the base, a heating piece is installed at the bottom of the base, a sliding sleeve is installed on the side wall of the base, and a blade is installed on the inner wall of the sliding sleeve. Through the arrangement of the power supply external port, the heating piece, the sliding sleeve, the blade, the limiting rod, the ceramic bottom plate, the adhesive layer and the substrate main body, the ceramic bottom plate, the adhesive layer and the substrate main body are inserted into the base, then after the power supply external port is electrified, the ceramic bottom plate is heated through the heating piece, so that the adhesive layer is softened, then the blade is pulled, and the ceramic bottom plate is heated through the limiting rod. The adhesive layer is cut, so that the ceramic bottom plate and the substrate main body are quickly separated, and compared with the traditional separation mode of directly using mechanical force, the separation mode of the utility model is safer, and the ceramic bottom plate and the substrate main body cannot be damaged.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck technology, specifically to a device for separating the ceramic plate and substrate of an electrostatic chuck. Background Technology

[0002] In high-tech manufacturing fields such as modern semiconductor manufacturing, flat panel display manufacturing, and photovoltaic industry, electrostatic chucks play a crucial role. With the increase of usage time and the influence of various complex working conditions in the processing, the ceramic plate of the electrostatic chuck may experience problems such as wear, surface damage, and decreased adsorption performance. When these problems occur, in order to reduce costs and ensure the continued efficient use of equipment, it is often not necessary to replace the entire electrostatic chuck. Instead, the ceramic plate and substrate are separated, and the problematic part is repaired or replaced with a new corresponding component. However, existing electrostatic chuck ceramic plate and substrate separation devices mainly use mechanical forces such as tension and pressure to directly separate the ceramic plate and substrate, which can easily damage the ceramic plate and substrate. Therefore, an electrostatic chuck ceramic plate and substrate separation device is needed.

[0003] Existing electrostatic chuck ceramic plate and substrate separation devices suffer from several drawbacks. Directly applying a tool to the edge of the ceramic plate during operation results in significant external force, causing edge chipping and damage. Furthermore, the electrostatic chuck is prone to shaking and displacement during separation, making precise separation of the connection points difficult. This increases the difficulty and time cost of separation, severely impacting efficiency. Therefore, there is an urgent need for an electrostatic chuck ceramic plate and substrate separation device. Utility Model Content

[0004] Based on this, the purpose of this utility model is to provide an electrostatic chuck ceramic plate and substrate separation device to solve the problems of existing electrostatic chuck ceramic plate and substrate separation devices, which directly apply large external force when using tools to contact the edge of the ceramic plate, causing chipping and damage to the ceramic plate edge; and the electrostatic chuck is prone to shaking and displacement during the separation process, making it difficult to accurately target the connection part for separation, increasing the difficulty and time cost of separation, and seriously affecting the separation efficiency.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an electrostatic chuck ceramic plate and substrate separation device, comprising a base, an external power port installed on the side wall of the base, a heating element installed at the bottom of the base, a sliding sleeve installed on the side wall of the base, a blade installed on the inner wall of the sliding sleeve, a limit rod installed on the outer wall of the blade, a ceramic base plate installed on the top of the heating element, an adhesive layer installed on the top of the ceramic base plate, a substrate body installed on the top of the adhesive layer, a support column installed on the outer wall of the base, an adjusting plate installed on the top of the support column, a support plate installed on the outer wall of the support column, a fixing sleeve installed at the bottom of the support plate, an adjusting rod installed on the inner wall of the fixing sleeve, a limit spring installed on the outer wall of the adjusting rod, a fixing pressure plate installed on the inner wall of the support plate, and a compression spring installed on the outer wall of the fixing pressure plate.

[0006] Preferably, the heating element is in close contact with the ceramic base plate, and the sliding sleeve is movably connected to the blade.

[0007] Preferably, the sliding sleeve is engaged with the limiting rod, and the sliding sleeve is symmetrically arranged with the central axis of the base as the center.

[0008] Preferably, the support column is movably connected to the support plate, and the inner wall of the adjustment disc has an open design.

[0009] Preferably, the adjusting rod forms a telescopic structure with the fixed sleeve via a limiting spring, and the adjusting rod is engaged with the adjusting disc.

[0010] Preferably, the fixed pressure plate forms a telescopic structure with the support plate through a compression spring, and the fixed pressure plate is tightly attached to the substrate body.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. This utility model uses an external power port, heating element, sliding sleeve, blade, limiting rod, ceramic base plate, adhesive layer, and substrate body to insert the ceramic base plate, adhesive layer, and substrate body into the base. After the external power port is powered on, the heating element heats the ceramic base plate, softening the adhesive layer. Then, by pulling the blade, the adhesive layer is cut, allowing the ceramic base plate to quickly separate from the substrate body. Compared with the traditional method of directly using mechanical force for separation, the separation method of this utility model is safer and will not damage the ceramic base plate and substrate body.

[0013] 2. This utility model, through the setting of support columns, adjusting plates, support plates, fixing sleeves, adjusting rods, limiting springs, fixing pressure plates, and compression springs, allows the ceramic base plate, adhesive layer, and substrate body to be placed in the base. After the adjusting rod is pulled down, the support plate is rotated to make the fixing pressure plate fit tightly against the substrate body. The compression springs then compress and fix the substrate body, preventing the ceramic base plate and substrate body from shaking during separation, which would prevent precise separation and affect efficiency. Attached Figure Description

[0014] Figure 1 This is a structural schematic diagram of the present utility model from the front view;

[0015] Figure 2 This is a side view of the structure of this utility model;

[0016] Figure 3 This is a structural diagram showing the disassembled internal components of this utility model;

[0017] Figure 4 This is a schematic diagram showing the internal cross-section of the fixing sleeve of this utility model.

[0018] In the diagram: 1. Base; 2. External power port; 3. Heating element; 4. Sliding sleeve; 5. Blade; 6. Limiting rod; 7. Ceramic base plate; 8. Adhesive layer; 9. Main substrate; 10. Support column; 11. Adjusting plate; 12. Support plate; 13. Fixing sleeve; 14. Adjusting rod; 15. Limiting spring; 16. Fixing pressure plate; 17. Compression spring. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0020] The embodiments of this utility model will be described below based on its overall structure.

[0021] Please see Figure 1-4An electrostatic chuck ceramic plate and substrate separation device includes a base 1. The device is characterized by: an external power port 2 installed on the side wall of the base 1; a heating element 3 installed on the bottom of the base 1; a sliding sleeve 4 installed on the side wall of the base 1; a blade 5 installed on the inner wall of the sliding sleeve 4; a limiting rod 6 installed on the outer wall of the blade 5; a ceramic base plate 7 installed on the top of the heating element 3; an adhesive layer 8 installed on the top of the ceramic base plate 7; and a substrate body 9 installed on the top of the adhesive layer 8. The heating element 3 and the ceramic base plate 7 are tightly fitted together. The sliding sleeve 4 is movably connected to the blade 5, and the sliding sleeve 4 is engaged with the limiting rod 6. The sliding sleeve 4 is centered on the central axis of the base 1. The present invention is described as follows: Through the external power port 2, heating element 3, sliding sleeve 4, blade 5, limiting rod 6, ceramic base plate 7, adhesive layer 8, and substrate body 9, the ceramic base plate 7, adhesive layer 8, and substrate body 9 are inserted into the base 1. Then, after the external power port 2 is powered on, the heating element 3 heats the ceramic base plate 7, softening the adhesive layer 8. Then, by pulling the blade 5, the adhesive layer 8 is cut, allowing the ceramic base plate 7 to quickly separate from the substrate body 9. Compared to the traditional method of directly using mechanical force for separation, the separation method of this invention is safer and will not damage the ceramic base plate 7 and substrate body 9.

[0022] Please see Figure 1-4 An electrostatic chuck ceramic plate and substrate separation device is disclosed. A support column 10 is mounted on the outer wall of a base 1. An adjusting plate 11 is mounted on the top of the support column 10. A support plate 12 is mounted on the outer wall of the support column 10. A fixing sleeve 13 is mounted on the bottom of the support plate 12. An adjusting rod 14 is mounted on the inner wall of the fixing sleeve 13. A limit spring 15 is mounted on the outer wall of the adjusting rod 14. A fixing pressure plate 16 is mounted on the inner wall of the support plate 12. A compression spring 17 is mounted on the outer wall of the fixing pressure plate 16. The support column 10 and the support plate 12 are movably connected. The inner wall of the adjusting plate 11 is designed with an open hole. The adjusting rod 14 and the fixing sleeve 13 form a telescopic structure through the limit spring 15, and the adjusting rod 14 and the adjusting plate 11 are engaged. The fixed pressure plate 16 is connected to the support plate 12 via the compression spring 17 to form a telescopic structure. The fixed pressure plate 16 is tightly attached to the substrate body 9. After the ceramic base plate 7, adhesive layer 8 and substrate body 9 are placed in the base 1 via the support column 10, adjustment plate 11, support plate 12, fixed sleeve 13, adjustment rod 14, limit spring 15, fixed pressure plate 16 and compression spring 17, the adjustment rod 14 is pulled down and the support plate 12 is rotated to make the fixed pressure plate 16 tightly attached to the substrate body 9. The elastic force of the compression spring 17 is used to compress and fix the substrate body 9, so as to avoid the ceramic base plate 7 and substrate body 9 shaking during the separation process, which would prevent precise separation and affect efficiency.

[0023] Working principle: In use, first move the device to the desired position, then place the ceramic base plate 7, adhesive layer 8, and substrate body 9 into the base 1, pull down the adjusting rod 14, and then rotate the support plate 12 to make the fixing pressure plate 16 fit tightly with the substrate body 9. The substrate body 9 is then pressed and fixed by the elastic force of the compression spring 17 to prevent the ceramic base plate 7 and substrate body 9 from shaking during separation, which would prevent precise separation and affect efficiency. Then, insert the ceramic base plate 7, adhesive layer 8, and substrate body 9 into the base 1. After the external power port 2 is powered on, the ceramic base plate 7 is heated by the heating plate 3 to soften the adhesive layer 8. Then, by pulling the blade 5, the adhesive layer 8 is cut, allowing the ceramic base plate 7 to quickly separate from the substrate body 9. This completes the use of the device. The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0024] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A device for separating an electrostatic chuck ceramic plate from a substrate, comprising a base (1), characterized in that: The base (1) has an external power port (2) installed on its side wall, a heating element (3) installed on its bottom, a sliding sleeve (4) installed on its side wall, a blade (5) installed on the inner wall of the sliding sleeve (4), a limit rod (6) installed on the outer wall of the blade (5), a ceramic base plate (7) installed on the top of the heating element (3), an adhesive layer (8) installed on the top of the ceramic base plate (7), and a substrate body (9) installed on the top of the adhesive layer (8). A support column (10) is installed on the outer wall. An adjustment plate (11) is installed on the top of the support column (10). A support plate (12) is installed on the outer wall of the support column (10). A fixing sleeve (13) is installed on the bottom of the support plate (12). An adjustment rod (14) is installed on the inner wall of the fixing sleeve (13). A limit spring (15) is installed on the outer wall of the adjustment rod (14). A fixing pressure plate (16) is installed on the inner wall of the support plate (12). A compression spring (17) is installed on the outer wall of the fixing pressure plate (16).

2. The electrostatic chuck ceramic plate and substrate separation device according to claim 1, characterized in that: The heating element (3) is tightly fitted to the ceramic base plate (7), and the sliding sleeve (4) is movably connected to the blade (5).

3. The electrostatic chuck ceramic plate and substrate separation device according to claim 1, characterized in that: The sliding sleeve (4) is engaged with the limiting rod (6), and the sliding sleeve (4) is symmetrically arranged with the central axis of the base (1) as the center.

4. The electrostatic chuck ceramic plate and substrate separation device according to claim 1, characterized in that: The support column (10) is movably connected to the support plate (12), and the inner wall of the adjustment disc (11) is designed with openings.

5. The electrostatic chuck ceramic plate and substrate separation device according to claim 1, characterized in that: The adjusting rod (14) forms a telescopic structure with the fixed sleeve (13) through the limiting spring (15), and the adjusting rod (14) is engaged with the adjusting plate (11).

6. The electrostatic chuck ceramic plate and substrate separation device according to claim 1, characterized in that: The fixed pressure plate (16) forms a telescopic structure with the support plate (12) through the compression spring (17), and the fixed pressure plate (16) is closely attached to the substrate body (9).

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