High-speed driving unit, double-station driving module and operation device

Abstract

The utility model relates to the technical field of semiconductor chip testing, and particularly discloses a high-speed driving unit, a double-station driving module and an operation device, and the high-speed driving unit comprises a vertical sliding rail, the lower end of the vertical sliding rail is used for being connected with an execution mechanism; the driving end of the horizontal direct-drive mechanism is connected with the vertical sliding rail, and the horizontal direct-drive mechanism drives the vertical sliding rail to reciprocate in the horizontal direction; the horizontal sliding rail is in sliding connection with the upper end of the vertical sliding rail in the horizontal direction; and the vertical direct-drive mechanism is fixedly arranged relative to the horizontal direct-drive mechanism, the driving end of the vertical direct-drive mechanism is connected with the horizontal sliding rail, and the horizontal sliding rail is driven to drive the vertical sliding rail to reciprocate in the vertical direction. The high-speed driving unit, the double-station driving module and the operation device provided by the utility model can effectively solve the problem of lower production efficiency caused by lower movement speed of the existing driving unit.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor chip testing technology, and in particular to a high-speed drive unit, a dual-station drive module, and an operating device. Background Technology

[0002] In semiconductor chip testing, actuators such as suction cups or cameras are frequently used. Typically, these actuators are mounted on a drive unit that moves them in translational motion. The drive unit moves the suction cup or camera to pick up the chip or perform visual inspection.

[0003] Existing drive units typically include:

[0004] A vertical direct drive assembly, wherein the drive end of the vertical direct drive assembly is connected to the actuator to drive the actuator to reciprocate in the vertical direction;

[0005] A horizontal direct drive assembly, the drive end of which is connected to the vertical direct drive assembly, to drive the vertical direct drive assembly and the actuator to reciprocate in the horizontal direction.

[0006] In the prior art, both the horizontal direct drive assembly and the vertical direct drive assembly are motor-screw modules. Since the entire vertical direct drive assembly is installed on the drive end of the horizontal direct drive assembly, when the horizontal direct drive assembly drives the actuator to move horizontally, it needs to drive not only the actuator itself, but also the motor and screw of the vertical direct drive assembly to move horizontally.

[0007] The motor is quite heavy, which greatly increases the workload of the horizontal direct drive component when it drives the motor of the vertical direct drive component. This makes it difficult for the horizontal direct drive component to drive the actuator to move at high speed, which to some extent limits the further improvement of production efficiency.

[0008] Therefore, it is necessary to improve the existing drive unit to solve the problem of its slow movement speed, which leads to low production efficiency.

[0009] The information disclosed in this background section is included only to enhance the understanding of the context of this disclosure, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0010] One objective of this invention is to provide a high-speed drive unit, a dual-station drive module, and a working device, which can effectively solve the problem of slow movement speed of existing drive units, resulting in low production efficiency.

[0011] To achieve the above objectives, in a first aspect, this utility model provides a high-speed drive unit, comprising:

[0012] A vertical slide rail, the lower end of which is used to connect to the actuator;

[0013] A horizontal direct drive mechanism, wherein the drive end of the horizontal direct drive mechanism is connected to the vertical slide rail, driving the vertical slide rail to reciprocate in the horizontal direction;

[0014] A horizontal slide rail, wherein the upper end of the horizontal slide rail is slidably connected to the upper end of the vertical slide rail in the horizontal direction;

[0015] A vertical direct drive mechanism is fixedly arranged relative to the horizontal direct drive mechanism, and the driving end of the vertical direct drive mechanism is connected to the horizontal slide rail, driving the horizontal slide rail to drive the vertical slide rail to reciprocate in the vertical direction.

[0016] Optionally, the horizontal direct drive mechanism includes:

[0017] Horizontal base plate;

[0018] A horizontal slider is slidably connected to the horizontal base plate in the horizontal direction, and the horizontal slider is slidably connected to the vertical slide rail in the vertical direction.

[0019] A horizontal lead screw is rotatably mounted on the horizontal base plate and threaded through the horizontal slider;

[0020] A horizontal motor is rotatably connected to the horizontal lead screw to drive the horizontal slider to slide back and forth relative to the horizontal base plate.

[0021] Optionally, the vertical direct drive mechanism includes:

[0022] A vertical base plate is fixed on the horizontal base plate, wherein the horizontal slide rail is slidably connected to the vertical base plate in the vertical direction, and the horizontal slide rail is slidably connected to the vertical slide rail in the horizontal direction;

[0023] A vertical lead screw is rotatably mounted on the vertical base plate and threaded through the horizontal slide rail to drive the horizontal slide rail to slide back and forth relative to the vertical base plate;

[0024] A vertical motor is rotatably connected to the vertical lead screw to drive the horizontal slide rail to slide back and forth relative to the horizontal base plate.

[0025] Optionally, the horizontal motor and the horizontal lead screw, and / or the vertical motor and the vertical lead screw, are connected by a belt and pulley assembly or a gear assembly.

[0026] Optionally, the lower end of the vertical slide rail is provided with a quick-release connector for detachable connection with the actuator.

[0027] Optionally, the quick-release connector is provided with a snap-fit ​​element for snap-fit ​​connection with the actuator.

[0028] Optionally, the quick-release connector is provided with a magnet for magnetically connecting with the actuator.

[0029] Secondly, a dual-station drive module is provided, including a module base plate and two high-speed drive units located on the module base plate.

[0030] Optionally, the two high-speed drive units are arranged symmetrically about the center of the vertical axis.

[0031] Thirdly, a working device is provided, including the high-speed drive unit or the dual-station drive module, and an actuator connected to the vertical slide rail.

[0032] The beneficial effects of this utility model are as follows: It provides a high-speed drive unit, a dual-station drive module, and a working device. When it is necessary to drive the actuator to move up and down, the vertical direct drive mechanism drives the horizontal slide rail to move up and down in the vertical direction; when it is necessary to drive the actuator to move left and right, the horizontal direct drive mechanism drives the vertical slide rail to move left and right.

[0033] In the above process, neither the horizontal direct drive mechanism nor the vertical direct drive mechanism needs to follow the actuator in translational motion. The direct drive mechanism has a smaller workload and a faster driving speed, thereby improving the execution efficiency of the actuator.

[0034] Therefore, the high-speed drive unit, dual-station drive module and working device provided by this utility model can effectively solve the problem of slow movement speed of existing drive units, resulting in low production efficiency. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the top structure of the dual-station drive module provided in the embodiment;

[0037] Figure 2 This is a schematic diagram of the bottom structure of the dual-station drive module provided in the embodiment;

[0038] Figure 3 This is a schematic diagram of the structure of the high-speed drive unit provided in the embodiment.

[0039] In the picture:

[0040] 100. Module base plate; 200. High-speed drive unit;

[0041] 1. Vertical slide rail;

[0042] 2. Horizontal direct drive mechanism; 201. Horizontal base plate; 202. Horizontal slider; 203. Horizontal lead screw; 204. Horizontal motor;

[0043] 3. Horizontal slide rail;

[0044] 4. Vertical direct drive mechanism; 401. Vertical base plate; 402. Vertical lead screw; 403. Vertical motor;

[0045] 5. Quick-release connector; 501. Clip-on component. Detailed Implementation

[0046] In this utility model, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this utility model. The term "embodiment" appearing in various places throughout the specification does not necessarily refer to the same embodiment, nor does it specifically limit its independence or connection with other embodiments. In principle, in this utility model, as long as there are no technical contradictions or conflicts, the technical features mentioned in each embodiment can be combined in any way to form corresponding implementable technical solutions.

[0047] Unless otherwise defined, the technical terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the use of related terms herein is merely for the purpose of describing particular embodiments and is not intended to limit the invention.

[0048] In the description of this utility model, the term "and / or" is used to describe the logical relationship between objects, indicating that three relationships can exist. For example, A and / or B means: A exists, B exists, and A and B exist simultaneously. Additionally, the character " / " generally indicates that the preceding and following objects have an "or" logical relationship.

[0049] In this invention, terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any actual quantity, hierarchy, or order between these entities or operations.

[0050] Without further limitations, the use of terms such as “comprising,” “including,” “having,” or other similar expressions in this invention is intended to cover non-exclusive inclusion, which does not exclude the presence of additional elements in a process, method, or product that includes the stated elements, such that a process, method, or product that includes a series of elements may include not only those defined elements but also other elements not expressly listed, or elements inherent to such a process, method, or product.

[0051] Similar to the understanding in the Examination Guidelines, in this utility model, expressions such as "greater than," "less than," and "exceeding" are understood to exclude the stated number; expressions such as "above," "below," and "within" are understood to include the stated number. Furthermore, in the description of the embodiments of this utility model, "multiple" means two or more (including two), and similar expressions related to "multiple" are also understood in this way, such as "multiple groups" and "multiple times," unless otherwise explicitly specified.

[0052] In the description of the embodiments of this utility model, the space-related expressions used, such as "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "vertical," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," indicate the orientation or positional relationship based on the orientation or positional relationship shown in the specific embodiments or drawings. They are only for the convenience of describing the specific embodiments of this utility model or for the reader's understanding, and do not indicate or imply that the device or component referred to must have a specific position, a specific orientation, or be constructed or operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model.

[0053] Unless otherwise expressly specified or limited, the terms "installation," "connection," "linking," "fixing," and "setting," as used in the description of the embodiments of this utility model, should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral setting; it can be a mechanical connection, an electrical connection, or a communication connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two components or the interaction between two components. For those skilled in the art to which this utility model pertains, the specific meaning of the above terms in the embodiments of this utility model can be understood according to the specific circumstances.

[0054] This invention provides a high-speed drive unit, a dual-station drive module, and an operating device, which are suitable for automated production line scenarios that require high-speed and high-precision chip transfer or visual inspection. It can effectively solve the problem of slow movement speed of existing drive units, resulting in low production efficiency.

[0055] In this embodiment, the working device includes a high-speed drive unit or a dual-station drive module, and an execution mechanism connected to the high-speed drive unit or the dual-station drive module.

[0056] Optionally, the actuator includes at least one of a suction cup, a gripper, or a camera, for picking up, holding, or visually inspecting the chip.

[0057] See Figure 1 and Figure 2 In this embodiment, the dual-station drive module includes a module base plate 100 and two high-speed drive units 200 located on the module base plate 100.

[0058] See Figure 3 The high-speed drive unit 200 includes a vertical slide rail 1, a horizontal direct drive mechanism 2, a horizontal slide rail 3, and a vertical direct drive mechanism 4.

[0059] The lower end of the vertical slide rail 1 is used to connect to the actuator. The driving end of the horizontal direct drive mechanism 2 is connected to the vertical slide rail 1, driving the vertical slide rail 1 to reciprocate in the horizontal direction. The horizontal slide rail 3 is slidably connected to the upper end of the vertical slide rail 1 in the horizontal direction. The vertical direct drive mechanism 4 is fixedly arranged relative to the horizontal direct drive mechanism 2, and the driving end of the vertical direct drive mechanism 4 is connected to the horizontal slide rail 3, driving the horizontal slide rail 3 to drive the vertical slide rail 1 to reciprocate in the vertical direction.

[0060] The high-speed drive unit 200, dual-station drive module, and working device provided in this embodiment can drive the actuator to move up and down when it is necessary to drive the actuator to move up and down. The vertical direct drive mechanism 4 drives the horizontal slide rail 3 to drive the vertical slide rail 1 to move up and down in the vertical direction. When it is necessary to drive the actuator to move left and right, the horizontal direct drive mechanism 2 drives the vertical slide rail 1 to move left and right.

[0061] In the above process, neither the horizontal direct drive mechanism 2 nor the vertical direct drive mechanism 4 needs to follow the actuator in translational motion. The workload of the direct drive mechanism is small and the driving speed is fast, thereby improving the execution efficiency of the actuator.

[0062] Therefore, the high-speed drive unit 200, dual-station drive module and working device provided by this utility model can effectively solve the problem of slow movement speed of existing drive units, resulting in low production efficiency.

[0063] In this embodiment, the horizontal direct drive mechanism 2 includes a horizontal base plate 201, a horizontal slider 202, a horizontal lead screw 203, and a horizontal motor 204.

[0064] The horizontal slider 202 is slidably connected to the horizontal base plate 201 in the horizontal direction, and the horizontal slider 202 is slidably connected to the vertical slide rail 1 in the vertical direction; the horizontal lead screw 203 is rotatably mounted on the horizontal base plate 201 and threaded through the horizontal slider 202; the horizontal motor 204 is rotatably connected to the horizontal lead screw 203 to drive the horizontal slider 202 to reciprocate relative to the horizontal base plate 201.

[0065] The vertical direct drive mechanism 4 includes a vertical base plate 401, a vertical lead screw 402, and a vertical motor 403.

[0066] The vertical base plate 401 is fixed on the horizontal base plate 201; the horizontal slide rail 3 is slidably connected to the vertical base plate 401 in the vertical direction, and the horizontal slide rail 3 is slidably connected to the vertical slide rail 1 in the horizontal direction; the vertical lead screw 402 is rotatably mounted on the vertical base plate 401 and threaded through the horizontal slide rail 3 to drive the horizontal slide rail 3 to reciprocate relative to the vertical base plate 401; the vertical motor 403 is rotatably connected to the vertical lead screw 402 to drive the horizontal slide rail 3 to reciprocate relative to the horizontal base plate 201.

[0067] When the actuator moves, neither the horizontal motor 204 nor the vertical motor 403 needs to move with the actuator. Therefore, the workload of the horizontal motor 204 and the vertical motor 403 is small, and the driving speed is fast, thereby improving the execution efficiency of the actuator.

[0068] Optionally, the horizontal motor 204 and the horizontal lead screw 203 and / or the vertical motor 403 and the vertical lead screw 402 are connected by a belt and pulley assembly or a gear assembly.

[0069] In this embodiment, the lower end of the vertical slide rail 1 is provided with a quick-release connector 5 for detachable connection with the actuator. By providing the quick-release connector 5, the actuator and the vertical slide rail 1 can be quickly connected and disconnected, facilitating the replacement and maintenance of the actuator and improving work efficiency.

[0070] Optionally, the quick-release connector 5 is provided with a latching element 501 for snap-fit ​​connection with the actuator, and / or, the quick-release connector 5 is provided with a magnet for magnetic connection with the actuator.

[0071] In this embodiment, the two high-speed drive units 200 are arranged rotationally symmetrically about the center of the vertical axis. The rotational symmetry design facilitates the interlocking of the two high-speed drive units 200, thereby improving the overall structural compactness and reducing the floor space required.

[0072] In summary, the high-speed drive unit 200, dual-station drive module, and working device provided in this embodiment have the following advantages:

[0073] ① High-speed performance: The horizontal motor 204 and the vertical motor 403 do not need to move with the actuator, which reduces the workload of the motor, improves the driving speed and accuracy, realizes the high-speed and precise movement of the actuator, and effectively improves production efficiency.

[0074] ② Compact structure: The central rotational symmetry design of the dual-station drive module makes the structure more compact, reduces the floor space, and is beneficial for production line layout.

[0075] ③ Easy to maintain: The quick-release connector 5 makes it easier to connect and disconnect the actuator, and facilitates maintenance and replacement.

[0076] ④ Flexibility: The actuator can be a suction cup, gripper or camera, suitable for a variety of operational needs, such as chip transfer, visual inspection, etc.

[0077] ⑤ High scalability: The dual-station drive module design is easy to expand, and the drive units can be added or removed according to production needs to adapt to production lines of different sizes.

[0078] It should be noted that the linear drive mechanism mentioned in this utility model can be a cylinder, hydraulic cylinder, electric cylinder, or motor lead screw linear module, etc., and the rotary drive mechanism mentioned can be a brushed motor, brushless motor, or rotary cylinder, etc. This utility model does not limit the specific structural form of the linear drive mechanism and the rotary drive mechanism.

[0079] Finally, it should be noted that although the above embodiments have been described in the text and drawings of this application, this should not limit the scope of patent protection of this application. Any technical solutions that are based on the essential concept of this application and utilize the content described in the text and drawings of this application, resulting in equivalent structural or procedural substitutions or modifications, as well as the direct or indirect application of the technical solutions of the above embodiments to other related technical fields, are all included within the scope of patent protection of this application.

Claims

1. A high-speed drive unit, characterized in that, include: A vertical slide rail (1), the lower end of which is used to connect to an actuator; A horizontal direct drive mechanism (2) is provided, the drive end of which is connected to the vertical slide rail (1) to drive the vertical slide rail (1) to reciprocate in the horizontal direction. A horizontal slide rail (3) is slidably connected to the upper end of the vertical slide rail (1) in the horizontal direction; A vertical direct drive mechanism (4) is fixedly arranged relative to the horizontal direct drive mechanism (2), and the driving end of the vertical direct drive mechanism (4) is connected to the horizontal slide rail (3), which drives the horizontal slide rail (3) to drive the vertical slide rail (1) to reciprocate in the vertical direction.

2. The high-speed drive unit according to claim 1, characterized in that, The horizontal direct drive mechanism (2) includes: Horizontal base plate (201); A horizontal slider (202) is slidably connected to the horizontal base plate (201) in the horizontal direction, and the horizontal slider (202) is slidably connected to the vertical slide rail (1) in the vertical direction; A horizontal lead screw (203) is rotatably mounted on the horizontal base plate (201) and threaded through the horizontal slider (202). A horizontal motor (204) is rotatably connected to the horizontal lead screw (203) to drive the horizontal slider (202) to slide back and forth relative to the horizontal base plate (201).

3. The high-speed drive unit according to claim 2, characterized in that, The vertical direct drive mechanism (4) includes: A vertical base plate (401) is fixed on the horizontal base plate (201), wherein the horizontal slide rail (3) is slidably connected to the vertical base plate (401) in the vertical direction, and the horizontal slide rail (3) is slidably connected to the vertical slide rail (1) in the horizontal direction; A vertical lead screw (402) is rotatably mounted on the vertical base plate (401) and threaded through the horizontal slide rail (3) to drive the horizontal slide rail (3) to slide back and forth relative to the vertical base plate (401); A vertical motor (403) is rotatably connected to the vertical lead screw (402) to drive the horizontal slide rail (3) to slide back and forth relative to the horizontal base plate (201).

4. The high-speed drive unit according to claim 3, characterized in that, The horizontal motor (204) and the horizontal lead screw (203) and / or the vertical motor (403) and the vertical lead screw (402) are connected by a belt pulley assembly or a gear assembly.

5. The high-speed drive unit according to claim 1, characterized in that, The lower end of the vertical slide rail (1) is provided with a quick-release connector (5) for detachable connection with the actuator.

6. The high-speed drive unit according to claim 5, characterized in that, The quick-release connector (5) is provided with a snap fastener (501) for snap-fit ​​connection with the actuator.

7. The high-speed drive unit according to claim 5, characterized in that, The quick-release connector (5) is provided with a magnet for magnetic connection with the actuator.

8. A dual-station drive module, characterized in that, It includes a module base plate (100) and two high-speed drive units (200) located on the module base plate (100) as described in any one of claims 1-7.

9. The dual-station drive module according to claim 8, characterized in that, The two high-speed drive units (200) are arranged symmetrically about the center of the vertical axis.

10. A working device, characterized in that, It includes the high-speed drive unit (200) as described in any one of claims 1-7 or the dual-station drive module as described in any one of claims 8-9, and the actuator connected to the vertical slide rail (1).

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