Pipeline structure for preventing gas from flowing backwards and semiconductor manufacturing equipment

Abstract

The utility model provides a pipeline structure capable of preventing gas from flowing backwards and semiconductor manufacturing equipment, and the pipeline structure capable of preventing gas from flowing backwards comprises at least one gas cabinet which is provided with a gas outlet pipeline; the gas outlet pipeline is connected to one end of the main pipeline, and the other end of the main pipeline is communicated with a gas consumption end; the one-way valve is located on the air outlet pipeline, and an air outlet of the one-way valve faces the main pipeline; by arranging the one-way valve on the gas outlet pipeline, gas can be well prevented from flowing backwards into the gas holder when the gas consumption end stops supplying gas, damage to the gas holder and the pipeline is avoided, meanwhile, by arranging the one-way valve on the gas outlet pipeline, it is ensured that the gas can only flow to the gas consumption end from the gas holder, and therefore the safety of the system is improved; by arranging the one-way valve on the gas outlet pipeline, gas can be well prevented from flowing backwards into the gas holder when the gas consumption end stops supplying gas, damage to the gas holder and the pipeline is avoided, meanwhile, by arranging the one-way valve on the gas outlet pipeline, it is ensured that the gas can only flow to the gas consumption end from the gas holder, and therefore the safety of the system is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a pipeline structure and semiconductor manufacturing equipment for preventing gas backflow. Background Technology

[0002] In industrial production processes, the stability and safety of gas supply systems are crucial. Gas supply systems typically need to provide continuous and stable pressure and flow to multiple devices to ensure smooth production. However, in practical applications, gas supply systems may encounter various problems, such as gas backflow and pressure fluctuations. These problems not only affect production efficiency but may also threaten equipment and personnel safety.

[0003] Currently, many industrial sites use a dual-gas holder series supply method, delivering gas to various equipment through a main pipeline. This design can ensure the continuity and stability of gas supply to a certain extent. However, when the equipment stops requiring gas, due to the fluidity of the gas, backflow of process gas may occur in the pipeline, i.e., gas from the high-pressure side flows to the low-pressure side.

[0004] Therefore, preventing gas backflow is a technical problem that urgently needs to be solved. Utility Model Content

[0005] The present invention addresses the problem of providing a pipeline structure and semiconductor manufacturing equipment that prevents gas backflow, thereby preventing gas backflow, improving gas flow efficiency, optimizing fluid dynamics performance, enhancing system stability and safety, and improving the simplicity and cost-effectiveness of reactor structure.

[0006] To solve the above problems, this utility model provides a pipeline structure to prevent gas backflow, comprising: at least one gas holder, the gas holder having a gas outlet pipeline; a main pipeline, the gas outlet pipeline being connected to one end of the main pipeline, and the other end of the main pipeline being connected to a gas consumption end; and a one-way valve located on the gas outlet pipeline, the outlet end of the one-way valve being disposed facing the main pipeline.

[0007] Optionally, the one-way valve is located on the outlet pipe near the main pipe.

[0008] Optionally, the gas outlet pipeline includes a first sub-gas outlet pipeline connected to the gas holder and a second sub-gas outlet pipeline connected to the first sub-gas outlet pipeline. The other end of the second sub-gas outlet pipeline is connected to the main pipeline. There is an angle between the first sub-gas outlet pipeline and the second sub-gas outlet pipeline. The one-way valve is located on the second sub-gas outlet pipeline.

[0009] Optionally, the installation dimensions of the one-way valve are matched with the dimensions of the outlet pipeline.

[0010] Optionally, the valve core of the one-way valve has a spiral structure, and the one-way valve is a corrosion-resistant valve.

[0011] Optionally, it also includes: a monitoring and control system located on the gas outlet pipeline, used to monitor the pressure and flow rate in the gas outlet pipeline, and automatically adjust the opening degree of the one-way valve according to preset parameters.

[0012] Optionally, the monitoring and control system includes at least one pressure sensor, one flow sensor, and one control unit, wherein the control unit automatically adjusts the check valve based on the signals from the pressure sensor and the flow sensor.

[0013] Optionally, the monitoring and control system further includes a user interface for adjusting preset parameters of the pressure sensor and the flow sensor.

[0014] Optionally, when the number of gas holders is greater than one, each of the gas outlet pipes is connected in series at one end of the main pipe.

[0015] Accordingly, this utility model also provides a semiconductor manufacturing equipment, including the above-mentioned pipeline structure for preventing gas backflow.

[0016] Compared with the prior art, the technical solution of this utility model has the following advantages:

[0017] In the technical solution of the pipeline structure for preventing gas backflow of this utility model, at least one gas holder has an outlet pipeline; a main pipeline, the outlet pipeline is connected to one end of the main pipeline, and the other end of the main pipeline is connected to the gas consumption end; a one-way valve is located on the outlet pipeline, and the outlet of the one-way valve is set facing the main pipeline; by setting a one-way valve on the outlet pipeline, it is possible to effectively prevent gas from backflowing into the gas holder when the gas consumption end stops demanding gas, thus avoiding damage to the gas holder and pipeline. At the same time, by setting a one-way valve on the outlet pipeline, it is ensured that gas can only flow from the gas holder to the gas consumption end, thereby improving the safety of the system.

[0018] Furthermore, the valve core of the one-way valve has a helical structure and is corrosion-resistant. The helical structure of the valve core reduces fluid resistance, improves sealing performance, optimizes hydrodynamic performance, and extends service life. This design allows for good flexibility in a smaller size, and combined with the sealing structure installed in the same hole as the valve plate, it significantly reduces the overall size of the one-way valve assembly.

[0019] Furthermore, when the number of gas holders is greater than one, each gas outlet line is connected in series at one end of the main line. This design provides the system with flexibility and scalability, allowing the number of gas holders to be increased or decreased as needed to accommodate different gas requirements. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a pipeline structure for preventing gas backflow in one embodiment of the present invention. Detailed Implementation

[0021] Currently, at the process site, after the gas consumption end (equipment end) stops requiring gas, due to the fluidity of the gas, there are still some problems with process gas backflow in the pipeline.

[0022] Based on this, the present invention provides a pipeline structure for preventing gas backflow, including at least one gas holder, the gas holder having an outlet pipeline; a main pipeline, the outlet pipeline being connected to one end of the main pipeline, and the other end of the main pipeline being connected to a gas consumption end; a one-way valve located on the outlet pipeline, the outlet of the one-way valve being oriented towards the main pipeline; by setting a one-way valve on the outlet pipeline, it is possible to effectively prevent gas from backflowing into the gas holder when the gas consumption end stops demanding gas, thus avoiding damage to the gas holder and pipeline. At the same time, by setting a one-way valve on the outlet pipeline, it is ensured that gas can only flow from the gas holder to the gas consumption end, thereby improving the safety of the system.

[0023] Meanwhile, the inventors also discovered through research that using a helical valve core in a one-way valve can reduce fluid resistance, improve sealing performance, optimize hydrodynamic performance, and extend service life. This design offers good flexibility within a smaller size, and combined with the sealing structure installed in the same orifice as the valve plate, it significantly reduces the overall size of the one-way valve assembly.

[0024] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0025] First, please refer to Figure 1 A pipeline structure 100 for preventing gas backflow includes a gas holder 101, an outlet pipeline 102, a main pipeline 104, and a one-way valve 103.

[0026] Figure 1 The following explanation uses two gas holders 101 as an example. The arrows in the diagram represent the direction of gas flow.

[0027] In some embodiments, the number of gas holders 101 may be one, three, or some other number.

[0028] In this embodiment, the gas holder 101 has an outlet pipe 102, each outlet pipe 102 is connected in series at one end of the main pipe 104, and the other end of the main pipe 104 is connected to the gas consumption end (not shown in the figure); a one-way valve 103 is located on the outlet pipe 102, and the outlet end of the one-way valve 103 is arranged facing the main pipe 104.

[0029] In this embodiment, by setting a one-way valve 103 on the gas outlet pipe 102, it is possible to effectively prevent gas from flowing back into the gas holder 101 when the gas consumption end stops demanding gas, thus avoiding damage to the gas holder 101 and the pipe. At the same time, by setting a one-way valve 103 on the gas outlet pipe 102, it is ensured that gas can only flow from the gas holder 101 to the gas consumption end, thereby improving the safety of the system.

[0030] In this embodiment, each gas cabinet 101 contains a plurality of gas cylinders 101a, and each gas cylinder is connected to the gas outlet pipe 102. The figure shows an example of two gas cylinders in each gas cabinet 101.

[0031] In this embodiment, each gas outlet pipe 102 is connected in series at one end of the main pipe 104. This design provides the system with flexibility and scalability, allowing the number of gas holders 101 to be increased or decreased as needed to accommodate different gas requirements.

[0032] In this embodiment, the one-way valve 103 is located on the outlet pipe 102 near the main pipe 104. The main function of the one-way valve 103 is to ensure that gas can only flow from the gas holder 101 to the main pipe 104, preventing gas from flowing back into the gas holder 101 from the gas consumption end (such as semiconductor manufacturing equipment). This design protects the gas holder 101 and the entire gas supply system from damage caused by backflow. Furthermore, by placing the one-way valve 103 near the main pipe 104, gas flow can be controlled more effectively, thereby improving the stability of the entire gas supply system. Maintenance and replacement can be convenient without requiring large-scale disassembly of the entire gas holder 101 or piping system.

[0033] In this embodiment, the gas outlet pipeline 102 includes a first sub-gas outlet pipeline 102a connected to the gas tank 101 and a second sub-gas outlet pipeline 102b connected to the first sub-gas outlet pipeline 102a. The other end of the second sub-gas outlet pipeline 102b is connected to the main pipeline 104. The first sub-gas outlet pipeline 102a and the second sub-gas outlet pipeline 102b have an angle between them. The one-way valve 103 is located on the second sub-gas outlet pipeline 102b.

[0034] In this embodiment, the second sub-outlet pipe 102b is generally the outlet pipe 102 at the corner. The reason for setting the one-way valve 103 at the corner is that the corner also plays a role in preventing backflow to a certain extent.

[0035] In this embodiment, the included angle is 90°.

[0036] In some embodiments, the included angle may also be changed according to the actual location of the gas consumption end.

[0037] In this embodiment, the installation dimensions of the one-way valve 103 are matched with the dimensions of the air outlet pipe 102. The installation dimensions of the one-way valve 103 can be selected based on the actual pipe dimensions on site, such as 3 / 8'', 1 / 2, etc.

[0038] In this embodiment, the valve core of the one-way valve 103 has a helical structure. The one-way valve 103 is a corrosion-resistant valve. The helical structure of the valve core of the one-way valve 103 can reduce fluid resistance and improve sealing performance, optimize hydrodynamic performance, and extend service life. This design can have good flexibility in a small size. In addition, the sealing structure installed in the same hole as the valve plate can significantly reduce the size of the entire one-way valve 103 assembly.

[0039] In this embodiment, when the valve core with a spiral structure is closed, the elastic force generated by the bulge on the elastomer covers the fluid passage, forming a reliable seal and preventing fluid backflow.

[0040] In this embodiment, a monitoring and control system (not shown in the figure) located on the gas outlet pipeline 102 is also included. This system monitors the pressure and flow rate in the gas outlet pipeline 102 and automatically adjusts the opening degree of the one-way valve 103 according to preset parameters. Through automatic monitoring and adjustment, manual intervention can be reduced, the automation level and efficiency of the system can be improved, the stability and safety of the entire gas supply system can be enhanced, and maintenance costs and downtime can be reduced.

[0041] In this embodiment, the monitoring and control system includes at least one pressure sensor, one flow sensor, and one control unit. The control unit automatically adjusts the one-way valve 103 based on the signals from the pressure sensor and the flow sensor.

[0042] In this embodiment, the monitoring and control system further includes a user interface for adjusting preset parameters of the pressure sensor and the flow sensor.

[0043] Accordingly, this utility model also provides a semiconductor manufacturing apparatus that includes the above-mentioned pipeline structure 100 for preventing gas backflow.

[0044] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A pipeline structure for preventing gas backflow, characterized in that, include: At least one gas holder, the gas holder having a gas outlet pipe; The main pipeline has an outlet pipe connected to one end, and the other end of the main pipeline is connected to the gas consumption end. A one-way valve is located on the outlet pipeline, with the outlet end of the one-way valve facing the main pipeline.

2. The pipeline structure for preventing gas backflow as described in claim 1, characterized in that, The one-way valve is located on the outlet pipe near the main pipe.

3. The pipeline structure for preventing gas backflow as described in claim 1, characterized in that, The gas outlet pipeline includes a first sub-gas outlet pipeline connected to the gas holder and a second sub-gas outlet pipeline connected to the first sub-gas outlet pipeline. The other end of the second sub-gas outlet pipeline is connected to the main pipeline. There is an angle between the first sub-gas outlet pipeline and the second sub-gas outlet pipeline. The one-way valve is located on the second sub-gas outlet pipeline.

4. The pipeline structure for preventing gas backflow as described in claim 1, characterized in that, The installation dimensions of the one-way valve are matched with the dimensions of the outlet pipeline.

5. The pipeline structure for preventing gas backflow as described in claim 1, characterized in that, The valve core of the one-way valve has a spiral structure, and the one-way valve is a corrosion-resistant valve.

6. The pipeline structure for preventing gas backflow as described in claim 1, characterized in that, Also includes: The monitoring and control system located on the outlet pipeline is used to monitor the pressure and flow rate in the outlet pipeline and automatically adjust the opening degree of the one-way valve according to preset parameters.

7. The pipeline structure for preventing gas backflow as described in claim 6, characterized in that, The monitoring and control system includes at least one pressure sensor, one flow sensor, and one control unit. The control unit automatically adjusts the check valve based on the signals from the pressure sensor and the flow sensor.

8. The pipeline structure for preventing gas backflow as described in claim 6, characterized in that, The monitoring and control system also includes a user interface for adjusting preset parameters of the pressure sensor and the flow sensor.

9. The pipeline structure for preventing gas backflow as described in claim 1, characterized in that, When the number of gas holders is greater than one, each of the gas outlet pipelines is connected in series at one end of the main pipeline.

10. A semiconductor manufacturing apparatus, characterized in that, Includes the pipeline structure for preventing gas backflow as described in any one of claims 1 to 9.

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