Vacuum adsorption carrying platform and appearance detection equipment

Abstract

The utility model discloses a vacuum adsorption platform deck and appearance inspection equipment, vacuum adsorption platform deck includes first base, second base, backlight source and third base, be equipped with the installation cavity between second base and first base, second base is light-transmitting piece, backlight source is equipped in the installation cavity and is used for emitting light towards the side of second base, and third base is equipped with the light-transmitting piece. The third base is arranged on the side, away from the first base, of the second base, the third base and the second base are matched to jointly define at least one adsorption cavity, the adsorption cavity is suitable for being connected with a negative pressure source, a plurality of adsorption holes are formed in the side, away from the second base, of the third base, the adsorption cavity communicates with the corresponding adsorption holes, and the third base is a light-transmitting part. Therefore, the vacuum adsorption carrying platform can realize good detection accuracy, and is especially suitable for carrying detection of thin soft plates.

Description

Technical Field

[0001] This utility model relates to the field of appearance inspection technology, and in particular to a vacuum adsorption stage and appearance inspection equipment. Background Technology

[0002] In related technologies, appearance inspection equipment typically uses image acquisition components, such as cameras, to acquire image information of items for defect detection. To improve image quality and adapt to different inspection needs, appearance inspection equipment usually includes a light source component that emits light towards the item. When the item is thin, the light can easily pass through the item and illuminate the platform used to support it, causing the image acquired by the image acquisition component to include images of part of the platform's structure, thus affecting the accuracy of the inspection. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a vacuum adsorption stage, which can achieve good detection accuracy and is particularly suitable for load-bearing detection of thin, flexible plates.

[0004] This utility model also proposes an appearance inspection device having the above-mentioned vacuum adsorption stage.

[0005] According to a first aspect of the present invention, a vacuum adsorption stage includes: a first base; a second base, wherein a mounting cavity is provided between the second base and the first base, and the second base is a light-transmitting element; a backlight source, wherein the backlight source is disposed in the mounting cavity and is used to emit light toward the side where the second base is located; and a third base, wherein the third base is disposed on the side of the second base opposite to the first base, and the third base and the second base cooperate to jointly define at least one adsorption cavity, the adsorption cavity being adapted to be connected to a negative pressure source, a plurality of adsorption holes being formed on the side of the third base opposite to the second base, the adsorption cavity communicating with the corresponding plurality of adsorption holes, and the third base being a light-transmitting element.

[0006] According to the vacuum adsorption stage of this utility model embodiment, by adding a backlight source to the back side of the second base and setting both the second and third bases as light-transmitting components, the light from the backlight source can pass through the second and third bases, so that the light from the backlight source can at least partially cancel the brightness of the light irradiated by the light source assembly to the third base. This effectively reduces the transmission of light through the walls of the third base structure, such as the adsorption hole, when visually inspecting thin items, which is beneficial to improving the detection accuracy. At the same time, when visually inspecting items with openings, the illumination brightness at the opening position can be increased, which is beneficial to improving the clarity of the acquired image at the opening position and improving the image contrast between the opening position and other positions, which further improves the detection accuracy.

[0007] In some embodiments, the first base defines the mounting cavity, which is open on one side facing the second base, and the vacuum adsorption stage further includes a glass element that closes the open side of the mounting cavity.

[0008] In some embodiments, the light transmittance of the second base, the third base, and the glass element is greater than or equal to 91.5%, and the heat resistance of the glass element is superior to that of the second base and the third base.

[0009] In some embodiments, the first base is provided with a heat dissipation inlet hole and a heat dissipation outlet hole, which are respectively connected to the mounting cavity.

[0010] In some embodiments, the backlight includes a mounting plate and a plurality of LEDs. The mounting plate is disposed on the side wall of the mounting cavity away from the second base, and the LEDs are disposed on the side of the mounting plate facing the second base. The first base has a plurality of spaced-apart heat dissipation vents at both ends of its length and a plurality of spaced-apart heat dissipation inlets at one end of its width. The first base has a centerline extending along its width direction, and the plurality of heat dissipation inlets are respectively located on both sides of the centerline in the length direction of the first base.

[0011] In some embodiments, the backlight connection wires extend through one of the heat dissipation air intakes.

[0012] In some embodiments, the vacuum adsorption stage further includes: a detection structure, wherein the first base has at least one detection structure on each side of its width direction, the detection structure being used to detect whether an item is adsorbed at the adsorption hole, and at least one detection groove is formed on the side of the third base away from the second base, each detection groove extending in a straight line and penetrating both ends of the width of the first base to form an opening, each detection groove corresponding to one detection structure at each end of the width direction of the first base, a portion of the emitting end of the detection structure being opposite to the opening, and another portion being located on the side of the opening away from the first base.

[0013] In some embodiments, there are three or more adsorption chambers, which are spaced apart along the length of the second base. Each adsorption chamber includes a first chamber and a second chamber. The second chamber is connected to one end of the first chamber in the width direction of the first base. The size of the second chamber is smaller than the size of the first chamber in both the length and width directions of the first base. A plurality of adsorption holes corresponding to the adsorption chambers are connected to the second chambers through the first chambers. The second chambers of the plurality of adsorption chambers are located on the same side in the width direction of the second base. A channel is formed on the first base that is directly connected to the second chamber. The channel and the mounting cavity are spaced apart along the width direction of the first base. The channel penetrates the surface of the first base away from the second base to form an opening. A vacuum pipe is provided at the opening.

[0014] The appearance inspection device according to a second aspect embodiment of the present invention includes an image acquisition component, a light source component, a driving component, and a vacuum adsorption stage according to the first aspect embodiment of the present invention. The camera component and the light source component are both located on the side where the adsorption hole of the vacuum adsorption stage is located. The driving component is used to drive the vacuum adsorption stage to move horizontally to pass through the shooting range of the camera component.

[0015] The appearance inspection device according to the embodiments of this utility model, by adopting the above-mentioned vacuum adsorption stage, helps to improve the inspection accuracy, thereby improving the inspection efficiency.

[0016] In some embodiments, the vacuum adsorption platform comprises two platforms, namely a first platform and a second platform. The upper surface of the first platform is a first conveying surface for conveying items along a first horizontal direction, and the lower surface of the second platform is a second conveying surface for receiving items on the first platform and conveying the items along the first horizontal direction. Corresponding to the two image acquisition components are a first image acquisition component and a second image acquisition component. The first image acquisition component is disposed above the first conveying surface and is used to acquire images of the upper surface of the items located on the first conveying surface. The second image acquisition component is disposed below the second conveying surface and is used to acquire images of the lower surface of the items located on the second conveying surface. The appearance inspection device further includes a loading component and a unloading component. The loading component is spaced apart from and independently disposed of from the first platform. The first platform is used to receive items on the loading component. The unloading component is spaced apart from and independently disposed of from the second platform and is used to stack and hold items acquired by the image acquisition component. The first horizontal direction is the length direction of the first base.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0019] Figure 1 This is a schematic diagram of a vacuum adsorption stage according to an embodiment of the present invention;

[0020] Figure 2 yes Figure 1 Another schematic diagram of the vacuum adsorption stage shown;

[0021] Figure 3 yes Figure 1 An exploded view of the vacuum adsorption stage shown in the figure;

[0022] Figure 4 yes Figure 1 Another exploded view of the vacuum adsorption stage shown;

[0023] Figure 5 yes Figure 1 A cross-sectional view of the vacuum adsorption stage shown.

[0024] Figure 6 yes Figure 1 Another cross-sectional view of the vacuum adsorption stage shown in the figure, without a backlight source;

[0025] Figure 7 This is a schematic diagram of the installation of a vacuum adsorption stage according to an embodiment of the present invention;

[0026] Figure 8 This is a schematic diagram of an appearance inspection device according to an embodiment of the present invention.

[0027] Figure label:

[0028] The device includes an appearance inspection unit 200, a first platform 101, a second platform 102, an image acquisition component 103, a first image acquisition component 1031, a second image acquisition component 1032, a material unloading component 104, a material loading component 105, a conveying component 106, a light source component 107, a first light source component 1071, and a second light source component 1072.

[0029] Vacuum adsorption stage 100, bracket 100a, first base 1, center line L, mounting cavity 1a, heat dissipation inlet 1b, heat dissipation outlet 1c, channel 1d, opening 1e, second base 2, adsorption cavity 2a, first chamber 2b, second chamber 2c, backlight 3, mounting plate 31, lamp bead 32, third base 4, adsorption hole 4a, detection groove 4b, opening 4c, glass component 5, vacuum pipeline 6, detection structure 7, emitting end 71. Detailed Implementation

[0030] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0031] The following disclosure provides numerous different embodiments or examples for implementing various structures of the present invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0032] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0033] Hereinafter, with reference to the accompanying drawings, a vacuum adsorption stage 100 according to a first aspect embodiment of the present invention will be described.

[0034] like Figures 1-4 As shown, the vacuum adsorption stage 100 includes a second base 2 and a third base 4. The third base 4 and the second base 2 cooperate to define at least one adsorption cavity 2a. The adsorption cavity 2a is adapted to be connected to a negative pressure source. A plurality of adsorption holes 4a are formed on the side of the third base 4 opposite to the second base 2. The adsorption cavity 2a communicates with the corresponding plurality of adsorption holes 4a.

[0035] As can be seen, when the vacuum adsorption stage 100 is in use, the adsorption chamber 2a can be connected to a negative pressure source. The negative pressure source operates to generate a certain negative pressure in the adsorption chamber 2a. The item (such as a PCB board, flexible board, or IC carrier board, etc.) is attached to the side of the third base 4 that is away from the second base 2, so that the item is adsorbed at the adsorption hole 4a, and the vacuum adsorption stage 100 can drive the item to move.

[0036] It can be understood that there can be one or more adsorption chambers 2a; when there are multiple adsorption chambers 2a, the multiple adsorption chambers 2a can be arranged at intervals, and each adsorption chamber 2a is connected to multiple adsorption holes 4a respectively. The multiple adsorption chambers 2a can share the same negative pressure source, or the multiple adsorption chambers 2a can be connected to different negative pressure sources respectively. It can be seen that when multiple adsorption chambers 2a are connected to different negative pressure sources respectively, the individual control and adjustment of each adsorption chamber 2a can be realized. For example, the opening and closing of the negative pressure source can be controlled to control whether the adsorption chamber 2a is working, and the power of the negative pressure source can be controlled to adjust the pressure inside the adsorption chamber 2a, etc., so that the vacuum adsorption stage 100 can have different adsorption areas, adsorption methods and adsorption intensities to adapt to the size and weight of the items to be adsorbed, thereby improving the applicability of the vacuum adsorption stage 100.

[0037] In some embodiments, such as Figures 1-4 As shown, the vacuum adsorption stage 100 also includes a first base 1 and a backlight 3. The first base 1 is located on the side of the second base 2 away from the third base 4. In other words, the third base 4 is located on the side of the second base 2 away from the first base 1. A mounting cavity 1a is provided between the second base 2 and the first base 1. The backlight 3 is located in the mounting cavity 1a and is used to emit light toward the side where the second base 2 is located. The second base 2 and the third base 4 are both light-transmitting components.

[0038] Optionally, the mounting cavity 1a may be defined by both the second base 2 and the first base 1, or by the first base 1 alone, but is not limited thereto. The adsorption cavity 2a may be configured in the following ways: Example 1: A groove is formed on the side of the second base 2 facing the third base 4, the surface of the third base 4 facing the second base 2 is flat, and the third base 4 covers the opening of the groove, thus defining the adsorption cavity 2a between the second base 2 and the third base 4; Example 2: A groove is formed on the side of the third base 4 facing the second base 2, the surface of the second base 2 facing the third base 4 is flat, and the second base 2 covers the opening of the groove, thus defining the adsorption cavity 2a between the second base 2 and the third base 4; Example 3: Grooves are formed on the sides of the second base 2 and the third base 4 facing each other, the openings of the two grooves are opposite each other, and the two grooves are joined together to form the adsorption cavity 2a.

[0039] Therefore, when the backlight 3 is running, the backlight 3 can emit light towards the side where the second base 2 is located. Since the second base 2 and the third base 4 have a certain degree of light transmittance, the light emitted by the backlight 3 can pass through the second base 2 and the third base 4 and be emitted out.

[0040] When the vacuum adsorption stage 100 is used in the appearance inspection equipment 200, it can be used to fix items by adsorption. The image acquisition component is used to acquire an image of the surface of the item facing away from the third base 4, so as to inspect the surface of the item facing away from the third base 4. Usually, in order to improve image quality and adapt to different inspection needs, the appearance inspection equipment 200 is equipped with a light source component. The light source component emits light towards the surface of the item facing away from the third base 4. When the item is thin, such as a relatively thin flexible board (e.g., 0.1mm to 1mm thick), the item has a certain degree of light transmittance. During the inspection process, the light from the light source component can easily pass through the item and illuminate the third base 4. The structure of the third base 4, such as the light reflected from the walls of the adsorption holes 4a, allows light to easily pass through. When an object is acquired by an image acquisition component, the resulting image may contain images of the wall of the adsorption hole 4a, which can easily affect the accuracy of visual inspection. To address this, in this embodiment, a backlight 3 is added to the back side of the second base 2, and both the second base 2 and the third base 4 are configured as light-transmitting components. This allows the light from the backlight 3 to pass through the second base 2 and the third base 4, so that the light from the backlight 3 can at least partially cancel out the brightness of the light irradiated by the light source component onto the third base 4. This effectively reduces the transmission of light through the structure of the third base 4, such as the wall of the adsorption hole 4a, when visually inspecting thin objects. As a result, when the image acquisition component acquires an image of the object, the image portion containing the structure of the third base 4 is weakened, thereby achieving targeted and effective detection of the object and improving detection accuracy.

[0041] Furthermore, when visually inspecting items with openings, burrs are easily generated on the opening walls, and impurities such as ink can easily enter the opening. By setting up a backlight 3, the light from the backlight 3 can pass through the second base 2 and the third base 4 to illuminate the item, thereby increasing the brightness of the illumination at the opening location. This helps to improve the clarity of the acquired image at the opening location and highlights the surface features of the item, making it easier for the image acquisition component (103) to capture a high-contrast image. This also helps to improve the image contrast between the opening location and other locations, thereby improving the accuracy of subsequent image processing and analysis, and ultimately improving the detection accuracy. It is evident that the setting of the backlight 3 is beneficial to improving the detection accuracy of defects at the opening location of the item.

[0042] For example, the vacuum adsorption stage 100 includes a first base 1, a second base 2, a third base 4 and a backlight 3. The first base 1, the second base 2 and the third base 4 are respectively formed as plate structures. The first base 1, the second base 2 and the third base 4 are stacked in sequence along the vertical direction, which facilitates the simplification of the structure and assembly of the vacuum adsorption stage 100.

[0043] According to the vacuum adsorption stage 100 of this utility model embodiment, by adding a backlight source 3 to the back side of the second base 2 and setting both the second base 2 and the third base 4 as light-transmitting elements, the light from the backlight source 3 can pass through the second base 2 and the third base 4, so that the light from the backlight source 3 can at least partially cancel the brightness of the light irradiated by the light source assembly to the third base 4. In this way, when visually inspecting thin items, the transmission of light through the hole wall of the third base 4 structure, such as the adsorption hole 4a, can be effectively reduced, which is beneficial to improving the detection accuracy. At the same time, when visually inspecting items with openings, the illumination brightness at the opening position can be increased, which is beneficial to improving the clarity of the acquired image at the opening position and improving the image contrast between the opening position and other positions, which is conducive to further improving the detection accuracy.

[0044] In some embodiments, such as Figures 4-7 As shown, the first base 1 defines a mounting cavity 1a, which is open on the side facing the second base 2. The backlight 3 can be mounted in the mounting cavity 1a through the open side of the mounting cavity 1a, which facilitates the assembly of the backlight 3 with the first base 1. The vacuum adsorption stage 100 also includes a glass component 5, which closes the open side of the mounting cavity 1a.

[0045] As can be seen, the glass component 5 is located between the backlight 3 and the second base 2. The light emitted from the backlight 3 towards the second base 2 first passes through the glass component 5 before reaching the second base 2. Since the glass component 5 closes the open side of the mounting cavity 1a, it can process all the light emitted by the backlight 3 from the second base 2. Furthermore, because the glass component 5 has good light transmittance, it is not likely to affect the light emitted by the backlight 3. In addition, the glass component 5 facilitates the separation of the mounting cavity 1a from the second base 2, which helps to reduce the impact of the heat generated by the backlight 3 on the second base 2, thus providing a certain degree of heat insulation. This also helps to reduce the heat resistance requirements of the second base 2 and allows for more flexible material selection for the second base 2.

[0046] In some embodiments, the light transmittance of the second base 2, the third base 4, and the glass component 5 is greater than or equal to 91.5%, which allows the light from the backlight 3 to pass through the third base 4 better, thereby improving image clarity and contrast. Moreover, the heat resistance of the glass component 5 is better than that of the second base 2 and the third base 4, thereby improving the reliability of the glass component 5 and facilitating flexible material selection for the second base 2 and the third base 4.

[0047] It is understood that in the embodiments of this application, the light transmittance of the second base 2, the third base 4 and the glass component 5 is not specifically limited, and the light transmittance of the three can be equal or unequal.

[0048] In some embodiments, the glass component 5 is an ultra-clear glass component 5, and the second base 2 and the third base 4 are both acrylic components. Ultra-clear glass is understood to be a high-quality, multi-functional new type of high-grade glass, also known as low-iron glass or high-transparency glass. It features high light transmittance, low iron content, low spontaneous breakage rate, excellent color, superior physical properties, strong weather resistance, excellent imaging effect, and environmental friendliness. Acrylic (polymethyl methacrylate) is a specially treated organic glass, an important malleable polymer material, mainly polymerized from methyl methacrylate monomer (MMA). It possesses good transparency, chemical stability and weather resistance, good hardness, easy dyeing, easy processing, strong light transmittance, high printing adhesion, beautiful appearance, and recyclability.

[0049] Of course, the materials used for glass component 5, second base 2, and third base 4 are not limited to these.

[0050] In some embodiments, such as Figures 3-5 As shown, a heat dissipation inlet 1b and a heat dissipation outlet 1c are formed on the first base 1. The heat dissipation inlet 1b and the heat dissipation outlet 1c are respectively connected to the mounting cavity 1a. External gas can flow into the mounting cavity 1a through the heat dissipation inlet 1b to exchange heat with the backlight 3. The gas after heat exchange can be discharged to the outside of the mounting cavity 1a through the heat dissipation outlet 1c to achieve natural convection cooling or forced convection cooling of the backlight 3, so as to keep the backlight 3 within a certain temperature range and improve the reliability of the backlight 3.

[0051] For example, a connecting pipe is provided at the heat dissipation air inlet 1b, which can be connected to an external fan to drive airflow. Of course, the heat dissipation method of the backlight 3 is not limited to this; for example, a semiconductor cooling chip can also be provided on the side of the backlight 3 away from the second base 2.

[0052] In some embodiments, such as Figures 3-5As shown, the backlight 3 includes a mounting plate 31 and multiple LED beads 32. The mounting plate 31 is located on the side wall of the mounting cavity 1a away from the second base 2, and the LED beads 32 are located on the side of the mounting plate 31 facing the second base 2. Thus, the mounting plate 31 can reliably install multiple LED beads 32. During the movement of the vacuum adsorption platform, it is easy to realize the stable movement of the backlight 3 with the first base 1. At the same time, the mounting plate 31 will not block the light emitted by the LED beads 32 towards the second base 2. Multiple spaced-apart heat dissipation vents 1c are formed at both ends of the first base 1, and multiple spaced-apart heat dissipation inlets 1b are formed at one end of the first base 1. The first base 1 has a centerline L extending along its width direction. The multiple heat dissipation inlets 1b are located on both sides of the centerline L along the length direction of the first base 1, so that airflow flows from the multiple heat dissipation inlets 1b into the mounting cavity 1a, and after exchanging heat with the backlight 3, it can be discharged through any of the heat dissipation vents 1c. The above arrangement of the multiple heat dissipation inlets 1b and multiple heat dissipation vents 1c is beneficial to increasing the airflow path range, thereby increasing the heat dissipation area and facilitating the realization of heat dissipation. This arrangement ensures reliable heat dissipation for all LED beads 32 and is particularly suitable for scenarios where the vacuum adsorption stage 100 moves along the length of the first base 1. Furthermore, when multiple heat dissipation air inlets 1b are connected to an external fan, the multiple heat dissipation air inlets 1b are located at the same end of the first base 1 in the width direction, facilitating the arrangement of pipelines between the multiple heat dissipation air inlets 1b and the external fan, thus saving space. If the vacuum adsorption stage 100 moves along the length of the first base 1, the above-mentioned pipeline arrangement does not easily increase the space occupied by the vacuum adsorption stage 100 in its moving direction, thus reducing the risk of interference between the vacuum adsorption stage 100 and other components.

[0053] For example, the length direction of the first base 1 is a first horizontal direction, and the width direction of the first base 1 is a second horizontal direction. The first horizontal direction and the second horizontal direction are perpendicular to each other and both are perpendicular to the vertical direction. The first base 1 has a plurality of heat dissipation vents 1c at both ends in the first horizontal direction. The plurality of heat dissipation vents 1c located at the same end of the first base 1 in the first horizontal direction are spaced apart along the second horizontal direction. The first base 1 has a plurality of heat dissipation inlets 1b at one end in the second horizontal direction. The plurality of heat dissipation inlets 1b are spaced apart along the first horizontal direction. The first base 1 has a center line L extending along the second horizontal direction. The first base 1 includes a first part and a second part located on opposite sides of the center line L in the first horizontal direction. The size of the first part in the first horizontal direction is equal to the size of the second part in the first horizontal direction. At least one heat dissipation vent 1c is provided on each side of the center line L in the first horizontal direction. The heat dissipation inlets 1b and the heat dissipation vents 1c are located on different sides of the first base 1, so that the airflow direction changes in the mounting cavity 1a, which is beneficial to improving the heat exchange efficiency between the airflow and the backlight 3.

[0054] In some embodiments, the connecting wire of the backlight 3 passes through one of the heat dissipation air inlets 1b, and the connecting wire of the backlight 3 can be electrically connected to an external power source to enable power supply and control of the backlight 3. It can be seen that one of the heat dissipation air inlets 1b can both participate in forming the flow path of heat dissipation airflow to allow airflow out of the mounting cavity 1a, and at the same time provide space for the wiring arrangement of the backlight 3, serving multiple purposes and simplifying the structure of the first base 1.

[0055] In some embodiments, such as Figures 2-5 As shown, the vacuum adsorption stage 100 also includes a detection structure 7. The first base 1 has at least one detection structure 7 on each of its two sides in the width direction. The detection structure 7 is used to detect whether an item is adsorbed at the adsorption hole 4a. The third base 4 has at least one detection groove 4b on the side away from the second base 2. The detection groove 4b can be spaced apart from the adsorption hole 4a. Each detection groove 4b extends in a straight line and penetrates both ends of the width of the first base 1 to form an opening 4c. Each opening 4c corresponds to a detection structure 7. Thus, the two ends of the detection groove 4b in the width direction of the first base 1 correspond to a detection structure 7. A part of the emitting end 7 of the detection structure 7 is opposite to the opening 4c, and the other part of the emitting end 7 of the detection structure 7 is located on the side of the opening 4c away from the first base 1.

[0056] Thus, part of the signal emitted by the transmitter 71 propagates through the detection groove 4b, and the other part propagates through the space on the side of the third base 4 away from the first base 1. When an item is adsorbed at the adsorption hole 4a, the item can block the other part of the signal emitted by the transmitter 71, so that the detection structure 7 can promptly determine that the item has been successfully adsorbed at the adsorption hole 4a. It is understandable that when the object is thin, such as less than 1mm (e.g., 0.05mm, 0.1mm, etc.), the diameter of the signal spot emitted by the transmitter 71 is larger than the thickness of the object. Typically, the diameter of the signal spot emitted by the transmitter 71 is greater than or equal to 1mm, such as 1mm to 2mm. The setting of the detection groove 4b allows a portion of the signal emitted by the transmitter 71 to propagate through it and be lost, while the remaining portion of the signal emitted by the transmitter 71 can illuminate the adsorbed object to determine whether the adsorption was successful. Obviously, the setting of the detection groove 4b can improve the problem of misjudgment caused by the signal spot diameter of the transmitter 71 easily illuminating the third base 3 when it is larger than the thickness of the object, which is conducive to improving the accuracy of detection and judgment.

[0057] Optionally, the detection structure 7 is a photoelectric sensor; the position of the detection structure 7 in the stacking direction of the first base 1 and the second base 2 is adjustable so that the detection structure 7 can adapt to different combinations of the first base 1, the second base 2 and the third base 4, which is beneficial to improving the versatility of the detection structure 7.

[0058] For example, there are multiple detection grooves 4b, which are spaced apart along the length of the first base 1. Each detection groove 4b has two openings 4c corresponding to a detection structure 7, so each detection groove 4b corresponds to two detection structures 7, which facilitates detection when the items are placed in multiple configurations. For example, if there are two detection grooves 4b, there are four detection structures 7, which facilitates detection when the items are placed in four configurations.

[0059] In some embodiments, such as Figure 3 , Figure 5 and Figure 6 As shown, there are three or more adsorption chambers 2a, and multiple adsorption chambers 2a are spaced apart along the length direction of the second base 2, so that the vacuum adsorption stage 100 can adsorb items of different sizes along the length direction of the first base 1.

[0060] In other embodiments of this application, the number of adsorption cavities 2a may be two or one; multiple adsorption cavities 2a may also be spaced apart along the width direction of the first base 1, or multiple adsorption cavities 2a may be arranged in multiple rows and columns along the length direction and width direction of the first base 1, or at least two of the multiple adsorption cavities 2a may be arranged in an inner and outer arrangement, for example, one adsorption cavity 2a may be arranged around the outer periphery of another adsorption cavity 2a, and the aforementioned one adsorption cavity 2a may be extended into an open annulus or a closed annulus.

[0061] It should be noted that the "open ring" mentioned in this article refers to a ring with an opening (i.e., a non-closed ring). Here, "ring" is interpreted in a broad sense, that is, it is not limited to "circular ring", but can also be "polygonal ring", etc.

[0062] Optionally, the dimensions of the multiple adsorption cavities 2a in the corresponding directions may be the same or different. For example, the multiple adsorption cavities 2a may have the same width in the width direction of the first base 1, and the lengths of the multiple adsorption cavities 2a in the length direction of the first base 1 may be the same or different.

[0063] In some embodiments, such as Figure 3 , Figure 5 and Figure 6As shown, multiple adsorption chambers 2a are spaced apart along the length of the second base 2. Each adsorption chamber 2a includes a first chamber 2b and a second chamber 2c. The second chamber 2c is connected to one end of the first chamber 2b in the width direction of the first base 1. The dimensions of the second chamber 2c are smaller than those of the first chamber 2b in both the length and width directions of the first base 1. Multiple adsorption holes 4a corresponding to the adsorption chambers 2a are connected to the second chambers 2c through the first chamber 2b. The second chambers 2c of the multiple adsorption chambers 2a are located on the same side in the width direction of the second base 2. A channel 1d is formed on the first base 1 that directly communicates with the second chambers 2c. The channel 1d and the mounting chamber 1a are spaced apart along the width direction of the first base 1, and the channel 1d penetrates the surface of the first base 1 facing away from the second base 2 to form an opening 1e. A vacuum pipe 6 is provided at the opening 1e. It can be understood that the width direction of the second base 2 is the same as the width direction of the first base 1.

[0064] It can be seen that, in the length direction of the first base 1, the size of the second chamber 2c is smaller than that of the first chamber 2b, and in the width direction of the first base 1, the size of the second chamber 2c is smaller than that of the first chamber 2b. Multiple adsorption holes 4a corresponding to the adsorption chamber 2a can be formed on a portion of the first chamber 2b corresponding to the third base 4, while no adsorption holes 4a are formed on a portion of the second chamber 2c corresponding to the third base 4. By setting a channel 1d on the first base 1, and the channel 1d penetrating the surface of the first base 1 away from the second base 2 to form an opening 1e, it is convenient to make the opening 1e have a sufficient and matching opening area. The side of the first base 1 away from the second base 2 can provide a larger operating space, and at the same time, it is convenient to make the opening 1e located on the same side of the first base 1 in the width direction, thereby facilitating the connection between the negative pressure source and the vacuum pipeline 6 and improving the assembly efficiency. Furthermore, the arrangement of channel 1d with mounting cavity 1a, and the arrangement of first chamber 2b and second chamber 2c are mutually matched, making it easy for mounting cavity 1a and first chamber 2b to be opposite each other, and the corresponding areas of the two to be matched in size. This avoids the backlight 3 being too large, resulting in excess and high cost, and also avoids the backlight 3 being too small, making it difficult to illuminate all adsorption holes 4a. At the same time, the channel 1d is opposite to the second chamber 2c, which makes it easier to simplify the structure of channel 1d.

[0065] According to the second aspect embodiment of the present utility model, the appearance inspection device 200, such as Figure 8 As shown, the device includes an image acquisition component 103, a light source component 107, a driving component, and a vacuum adsorption stage 100 according to the first aspect embodiment of the present invention. The image acquisition component 103 and the light source component 107 are both located on the side where the adsorption hole 4a of the vacuum adsorption stage 100 is located. The driving component is used to drive the vacuum adsorption stage 100 to move horizontally to pass through the shooting range of the image acquisition component 103.

[0066] According to the appearance inspection device 200 of this utility model embodiment, by adopting the above-mentioned vacuum adsorption stage 100, the inspection accuracy can be improved, thereby improving the inspection efficiency.

[0067] In some embodiments, such as Figure 8 As shown, there are two vacuum adsorption stages 100, namely a first stage 101 and a second stage 102. The upper surface of the first stage 101 is a first conveying surface, and the first stage 101 is used to convey the item along a first horizontal direction. The lower surface of the second stage 102 is a second conveying surface, and the second stage 102 is used to receive the item on the first stage 101 and convey the item along the first horizontal direction. Correspondingly, there are two image acquisition components 103, namely a first image acquisition component 1031 and a second image acquisition component 1032. The first image acquisition component 1031 is located above the first conveying surface and is used to acquire images of the upper surface of the item located on the first conveying surface. The second image acquisition component 1032 is located below the second conveying surface and is used to acquire images of the lower surface of the item located on the second conveying surface. The first horizontal direction is the length direction of the first base 1. Thus, the opposite two sides of the item can be detected sequentially, improving the detection efficiency.

[0068] like Figure 8 As shown, the appearance inspection device 200 also includes a loading component 105 and a unloading component 104. The loading component 105 is spaced apart from and independently arranged with the first platform 101. The first platform 101 is used to receive items on the loading component 105. The unloading component 104 is spaced apart from and independently arranged with the second platform 102. The unloading component 104 is used to stack and hold items that have been acquired by the image acquisition component 103.

[0069] It is evident that the working state of the first platform 101 does not affect the working state of the feeding component 105. That is, whether the first platform 101 is running and its running speed are unrelated to the feeding component 105, and similarly, whether the feeding component 105 is running and its running speed are unrelated to the first platform 101. Similarly, the working state of the second platform 102 does not affect the working state of the unloading component 104. That is, whether the second platform 102 is running and its running speed are unrelated to the unloading component 104, and similarly, whether the unloading component 104 is running and its running speed are unrelated to the second platform 102.

[0070] For example, the appearance inspection device 200 may include a conveying component 106, which is used to convey items from the loading component 105 to the first platform 101; of course, the loading component 105 may also directly convey items to the first platform 101. The unloading component 104 is used to stack and hold items acquired by the first image acquisition component 1031 and the second image acquisition component 1032. After the items are acquired by the first image acquisition component 1031 and the second image acquisition component 1032, they are stacked sequentially on the unloading component 104 to achieve centralized processing of items stacked to a certain height on the unloading component 104. Optionally, a bracket 100a is provided on the upper side of the second platform 102, and the corresponding drive component drives the second platform 102 to move through the bracket 100a.

[0071] For example, the first stage 101 and the second stage 102 can be arranged sequentially along the first horizontal direction. The loading component 105 is located on the side of the first stage 101 away from the second stage 102 in the first horizontal direction, and the unloading component 104 is located on the side of the second stage 102 away from the first stage 101 in the first horizontal direction, which facilitates the vertical arrangement of the appearance inspection equipment 200. The light source component 107 may include a first light source component 1071 corresponding to the first stage 101 and a second light source component 1072 corresponding to the second stage 102. The first image acquisition component 1031 and the first light source component 1071 are both located above the first stage 101, and the second image acquisition component 1032 and the second light source component 1072 are both located below the second stage 102. The item is directly or indirectly conveyed to the first platform 101 via the loading component 104. The first platform 101 moves the item along the first horizontal direction to pass through the shooting range of the first image acquisition component 1031, thereby capturing an image of the upper surface of the item. Then, the first platform 101 conveys the item to the second platform 102. The second platform 102 moves the item along the first horizontal direction to pass through the shooting range of the second image acquisition component 1032, thereby capturing an image of the lower surface of the item. Finally, the second platform 102 conveys the captured item to the unloading component 104.

[0072] Other configurations and operations of the appearance inspection device 200 according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0073] Furthermore, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, this application will not describe the various possible combinations separately. In addition, various different embodiments of this application can also be arbitrarily combined, as long as they do not violate the spirit of this application, they should also be regarded as the content disclosed in this application.

[0074] In the description of this utility model, it should be understood that the terms "center," "length," "width," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In other words, the usage posture of the vacuum adsorption stage shown in the accompanying drawings is merely an example of this application, and the usage posture of the vacuum adsorption stage can also be adjusted according to requirements, so that the length direction and width direction of the first base are other directions. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0075] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0076] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0077] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A vacuum adsorption stage, characterized in that, include: First base; A second base is provided, and an installation cavity is provided between the second base and the first base. The second base is a light-transmitting component. A backlight source is disposed within the mounting cavity and is used to emit light toward the side where the second base is located; A third base is disposed on the side of the second base opposite to the first base, and the third base cooperates with the second base to jointly define at least one adsorption cavity. The adsorption cavity is adapted to be connected to a negative pressure source. A plurality of adsorption holes are formed on the side of the third base opposite to the second base. The adsorption cavity communicates with the corresponding plurality of adsorption holes. The third base is a light-transmitting element.

2. The vacuum adsorption stage according to claim 1, characterized in that, The first base defines the mounting cavity, which is open on the side facing the second base. The vacuum adsorption stage further includes: A glass component that closes the open side of the mounting cavity.

3. The vacuum adsorption stage according to claim 2, characterized in that, The light transmittance of the second base, the third base, and the glass component is all greater than or equal to 91.5%, and the heat resistance of the glass component is superior to that of the second base and the third base.

4. The vacuum adsorption stage according to claim 1, characterized in that, The first base has a heat dissipation air inlet and a heat dissipation air outlet, which are respectively connected to the mounting cavity.

5. The vacuum adsorption stage according to claim 4, characterized in that, The backlight includes a mounting plate and multiple LEDs. The mounting plate is disposed on the side wall of the mounting cavity away from the second base. The LEDs are disposed on the side of the mounting plate facing the second base. Multiple spaced-apart heat dissipation vents are formed at both ends of the length of the first base. Multiple spaced-apart heat dissipation inlets are formed at one end of the width of the first base. The first base has a center line extending along its width direction. The multiple heat dissipation inlets are located on both sides of the center line in the length direction of the first base.

6. The vacuum adsorption stage according to claim 4, characterized in that, The backlight connection wire passes through one of the heat dissipation air inlets.

7. The vacuum adsorption stage according to claim 1, characterized in that, Also includes: The detection structure includes at least one detection structure on each side of the first base in its width direction. The detection structure is used to detect whether an item is adsorbed at the adsorption hole. At least one detection groove is formed on the side of the third base away from the second base. Each detection groove extends in a straight line and penetrates both ends of the width of the first base to form an opening. Each opening corresponds to one detection structure. A portion of the emitting end of the detection structure is opposite to the opening, and another portion is located on the side of the opening away from the first base.

8. The vacuum adsorption stage according to any one of claims 1-7, characterized in that, The adsorption chambers are three or more, and the multiple adsorption chambers are spaced apart along the length direction of the second base. Each adsorption chamber includes a first chamber and a second chamber. The second chamber is connected to one end of the first chamber in the width direction of the first base. The size of the second chamber is smaller than that of the first chamber in both the length and width directions of the first base. A plurality of adsorption holes corresponding to the adsorption chambers are connected to the second chambers through the first chambers. The second chambers of the plurality of adsorption chambers are located on the same side in the width direction of the second base. A channel is formed on the first base that is directly connected to the second chamber. The channel and the mounting cavity are spaced apart along the width direction of the first base. The channel penetrates the surface of the first base away from the second base to form an opening. A vacuum pipe is provided at the opening.

9. An appearance inspection device, characterized in that, The device includes an image acquisition component, a light source component, a driving component, and a vacuum adsorption stage according to any one of claims 1-8. The image acquisition component and the light source component are both located on the side where the adsorption hole of the vacuum adsorption stage is located. The driving component is used to drive the vacuum adsorption stage to move horizontally to pass through the shooting range of the image acquisition component.

10. The appearance inspection device according to claim 9, characterized in that, The vacuum adsorption platform consists of two platforms, namely a first platform and a second platform. The upper surface of the first platform is a first conveying surface used to convey the item along a first horizontal direction. The lower surface of the second platform is a second conveying surface used to receive the item on the first platform and convey the item along the first horizontal direction. Correspondingly, the two image acquisition components are a first image acquisition component and a second image acquisition component. The first image acquisition component is located above the first conveying surface and is used to acquire images of the upper surface of the item located on the first conveying surface. The second image acquisition component is located below the second conveying surface and is used to acquire images of the lower surface of the item located on the second conveying surface. The appearance inspection equipment further includes a loading component and a unloading component. The loading component is spaced apart from and independently arranged with respect to the first platform. The first platform is used to receive items on the loading component. The unloading component is spaced apart from and independently arranged with respect to the second platform, and is used to stack and hold items acquired by the image acquisition component. The first horizontal direction is the length direction of the first base.

Images