Scanning electron microscope sample table

Abstract

The utility model belongs to the field of sample tables, and particularly discloses a scanning electron microscope sample table which comprises a base, a fixed table and a lifting table, the fixed table is fixedly connected to the top of the base, the lifting table is movably connected to the top of the base in the vertical direction, and when the lifting table is located at the lowest position, the surface of the lifting table is flush with the surface of the fixed table; the sample table further comprises a lifting driving mechanism used for driving the lifting table to ascend and descend. The height of the lifting table can be adjusted through the lifting driving mechanism, when samples with different heights need to be detected, the samples can be adhered to the fixed table and the lifting table respectively, and the samples on the fixed table and the samples on the lifting table are kept at the same height by adjusting the position of the lifting table, so that when the samples are detected, the detection efficiency is greatly improved. Samples with different heights do not need to be detected in batches, and the detection efficiency can be improved due to reduction of sample taking and placing times.

Description

Technical Field

[0001] This application belongs to the field of sample stages, and more specifically, relates to a scanning electron microscope sample stage. Background Technology

[0002] A scanning electron microscope (SEM) is an electronic observation device that falls between a transmission electron microscope (TEM) and an optical microscope. It uses a narrowly focused, high-energy electron beam to scan a sample. Through the interaction between the beam and the material, various physical information is excited, collected, magnified, and re-imaged to characterize the microscopic morphology of the material. Before each sample examination, an SEM requires a considerable amount of time to evacuate the sample to achieve the necessary vacuum level.

[0003] In related technologies, for the testing of multiple samples, the common practice is to prepare multiple samples on a single sample stage to reduce the time spent on frequent vacuuming. Traditional sample stages are typically flat surfaces, and samples are attached to the stage using conductive adhesive. However, because some samples have different heights, to avoid the electron microscope probe from bumping into the samples during testing, the testing of samples with different heights needs to be done in batches, leading to a decrease in testing efficiency. Utility Model Content

[0004] To address the shortcomings of existing technologies, this application provides a scanning electron microscope sample stage, which aims to solve the problem that existing sample detection methods require batch processing due to height differences, resulting in reduced detection efficiency.

[0005] This application provides a scanning electron microscope sample stage, specifically including a base, a fixed stage, and a lifting stage. The fixed stage is fixedly connected to the top of the base, and the lifting stage is movably connected to the top of the base in a vertical direction. When the lifting stage is in its lowest position, its surface is flush with the surface of the fixed stage. The sample stage also includes a lifting drive mechanism for driving the lifting stage to move up and down.

[0006] Compared with the prior art, the above-described technical solution conceived in this application allows for the adjustment of the height of the lifting platform via a lifting drive mechanism. When samples of different heights need to be tested, the samples can be attached to the fixed platform and the lifting platform respectively. By adjusting the position of the lifting platform, the samples on the fixed platform and the lifting platform are kept at the same height. Therefore, when testing the samples, samples of different heights do not need to be tested in multiple steps, which can achieve the beneficial effect of improving testing efficiency by reducing the number of times samples need to be picked up and placed.

[0007] As a further preferred embodiment, the lifting drive mechanism includes a connecting rod and a drive component. The connecting rod is vertically fixed to the bottom of the lifting platform. The base has a positioning groove for the connecting rod to be inserted into. The drive component is disposed on the base and lifts the lifting platform by driving the connecting rod.

[0008] By adopting the above technical solution, the lifting platform is connected to the base through a connecting rod, and the driving component can lift the platform by driving the connecting rod, thereby improving the stability of the lifting platform.

[0009] As a further preferred embodiment, one side of the connecting rod is provided with a toothed groove arranged along its length direction, and the driving component includes a rotating gear, which is rotatably connected to the base and meshes with the toothed groove. The rotating gear rotates to drive the connecting rod to move.

[0010] By adopting the above technical solution, the rotation of the rotating gear can stably adjust the rise and fall of the lifting platform through the connecting rod, making the operation simple and convenient.

[0011] As a further preferred embodiment, the driving component further includes a rotating rod, one end of which is coaxially and fixedly connected to the rotating gear, and the other end of which extends to one side of the base.

[0012] By adopting the above technical solution, the rotating rod can be driven to rotate, which in turn causes the rotating gear to rotate, allowing the height of the lifting platform to be manually adjusted. The structure is simple and easy to operate.

[0013] As a further preferred embodiment, the driving component also includes a limiting ring, which is coaxially and fixedly connected to the rotating rod, and the base is provided with a limiting groove that is adapted to the insertion of the limiting ring.

[0014] By adopting the above technical solution, the limiting ring is rotatably set in the limiting groove. The groove wall of the limiting groove can prevent the limiting ring from falling out of the limiting groove, which can reduce the risk of the rotating rod moving along the extension direction of the rotating hole during rotation, thereby ensuring the stability of the rotating rod during rotation.

[0015] As a further preferred embodiment, the bottom of the lifting platform is also fixedly connected to a vertically arranged support rod, and the base is provided with a support groove that is compatible with the support rod for insertion.

[0016] By adopting the above technical solution, when the lifting platform is raised or lowered, the support rod is located in the support groove, which can improve the stability of the lifting platform during the lifting process, and at the same time, the support rod provides support for the lifting platform.

[0017] As a further preferred embodiment, the support rod is elastically provided with a limiting block that abuts against the inner wall of the support groove.

[0018] By adopting the above technical solution, the limiting block abuts against the inner wall of the support groove, increasing the friction and making the lifting platform more stable after it moves.

[0019] As a further preferred embodiment, the support groove is provided with a plurality of limiting grooves arranged in the vertical direction for the limiting block to be movably embedded in.

[0020] By adopting the above technical solution, the placement stability of the lifting platform can be further improved after the limiting block is embedded in the limiting groove.

[0021] As a further preferred embodiment, the lifting platform and the base can be fixedly connected by fixing bolts, and both the lifting platform and the base are provided with first fixing screw holes for installing fixing bolts.

[0022] By adopting the above technical solution, when storing samples or testing samples of the same height, the lifting platform and the base are connected and fixed by fixing bolts, so that the sample platform can store or install samples of the same height.

[0023] As a further preferred embodiment, the base is also provided with a second fixing screw hole that is threadedly engaged with the fixing bolt.

[0024] By adopting the above technical solution, when the height of the lifting platform is adjusted, the fixing bolt can be removed from the first fixing screw hole and threadedly connected to the second fixing screw hole, which can prevent the fixing bolt from being lost. After the sample is tested, the fixing bolt is threadedly connected to the first fixing screw hole to fix the lifting platform to the base for storage.

[0025] In summary, compared with the prior art, the technical solutions conceived in this application have the following main technical advantages:

[0026] 1. This application can adjust the height of the lifting platform through a lifting drive mechanism. When samples of different heights need to be tested, the samples can be attached to the fixed platform and the lifting platform respectively. The higher samples are placed on the fixed platform and the lower samples are placed on the lifting platform. By raising the position of the lifting platform, the samples on the fixed platform and the samples on the lifting platform are kept at the same height. Thus, when testing the samples, samples of different heights do not need to be tested in multiple times, thereby reducing the problem of low testing efficiency caused by multiple sample loading and unloading, and avoiding the problem of long vacuuming time required for multiple scanned electron microscope tests.

[0027] 2. During the lifting process of the lifting platform in this application, the support rod is located in the support groove, which can improve the stability of the lifting process. At the same time, the support rod supports the lifting platform, making the sample placed on the lifting platform more stable.

[0028] 3. In this application, when the sample stage is stored or used to test samples of the same height, the lifting platform and the base are connected and fixed by fixing bolts. This facilitates the storage of the sample stage or the installation of samples of the same height for testing. When the height of the lifting platform is adjusted, the fixing bolts can be removed from the first fixing screw hole and threaded into the second fixing screw hole to avoid losing the fixing bolts. After the sample is tested, the fixing bolts are threaded back into the first fixing screw hole to fix the lifting platform to the base for storage. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of the scanning electron microscope sample stage in the first state provided in this application;

[0030] Figure 2 This is a schematic diagram of the overall structure of the scanning electron microscope sample stage in the second state provided in this application;

[0031] Figure 3 This is a schematic diagram of the overall structure of the base provided in this application;

[0032] Figure 4 This is a schematic diagram of the overall structure of the lifting platform provided in this application;

[0033] Figure 5 yes Figure 1 A front view structural diagram;

[0034] Figure 6 yes Figure 5 Schematic diagram of the cross-sectional structure along line AA.

[0035] In all the accompanying drawings, the same reference numerals are used to denote the same elements or structures, wherein:

[0036] 1. Base; 11. Second fixing screw hole; 12. First support groove; 121. First limiting groove; 13. Second support groove; 131. Second limiting groove; 14. Positioning groove; 141. Mounting groove; 142. Rotating hole; 143. Limiting groove; 15. Rotating gear; 16. Rotating rod; 161. Limiting ring; 162. Rotating groove; 17. Connecting block; 2. Lifting platform; 21. First fixing screw hole; 22. First support rod; 221. First limiting block; 23. Second support rod; 24. Connecting rod; 241. Gear groove; 3. Fixing platform; 4. Fixing bolt. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0038] Reference Figure 1-6This application discloses a scanning electron microscope (SEM) sample stage for sample fixation. In this embodiment, it can be used to assist in sample testing of a scanning electron microscope (WZZR-202101019). It includes a base 1, a fixed stage 3, a lifting stage 2, and a lifting drive mechanism. The fixed stage 3 is fixedly connected to the top of the base 1 and is an integrally formed structure. The lifting stage 2 is movably connected to the top of the base 1 in the vertical direction. The lifting stage 2 and the base 1 are also detachably connected. When the lifting stage 2 is in its lowest position, its surface is flush with the surface of the fixed stage 3. The surfaces of the lifting stage 2 and the fixed stage 3 form a circular sample stage. The sample is attached to the fixed stage 3 or the lifting stage 2 with conductive tape for testing. The lifting drive mechanism can drive the lifting stage 2 to rise and fall, so that the tops of samples with different heights are flush, allowing samples of different heights to be placed in the electron microscope for testing at the same time, reducing the problem of low testing efficiency caused by multiple tests.

[0039] In this embodiment, the lifting platform 2 and the base 1 are fixedly connected by fixing bolts 4. Both the lifting platform 2 and the base 1 have first fixing screw holes 21 for installing the fixing bolts 4. When the device is placed for storage, the fixing bolts pass through the first fixing screw holes 21 on the lifting platform 2 and connect with the first fixing screw holes 21 on the base 1. When the fixing bolts 4 are fully screwed into the first fixing screw holes 21 on the base 1, the fixing platform 3 is flush with the upper surface of the lifting platform 2. At this time, the sample stage can test samples of the same height. Furthermore, the side wall of the base 1 also has second fixing screw holes 11 that threadedly engage with the fixing bolts 4. When the user needs to test samples of different heights, the relatively taller sample can be attached to the fixing platform 3, and the relatively shorter sample to the lifting platform 2. The user can remove the fixing bolts 4 from the first fixing screw holes 21 and install them in the second fixing screw holes 11 to prevent loss.

[0040] In this embodiment, the lifting drive mechanism for driving the lifting platform 2 to rise and fall includes a connecting rod 24 and a driving component. The connecting rod 24 is vertically fixed to the bottom of the lifting platform 2, that is, the connecting rod 24 is perpendicular to the lifting platform 2. The base 1 has a vertically arranged positioning groove 14 for the connecting rod 24 to be inserted into. The connecting rod 24 can move up and down in the positioning groove 14. The driving component is installed in the base 1 and can realize the lifting of the lifting platform 2 through the driving component connecting rod 24.

[0041] Specifically, one side of the connecting rod 24 is provided with a toothed groove 241 arranged along its length. The driving component includes a rotating gear 15 and a rotating rod 16. The side wall of the positioning groove 14 on the base 1 is provided with an installation groove 141. The rotating gear 15 is rotatably connected to the installation groove 141 on the base 1 and meshes with the toothed groove 241. The rotation of the rotating gear 15 can drive the connecting rod 24 to move. One end of the rotating rod 16 is coaxially fixedly connected to the rotating gear 15. The base 1 is provided with a rotating hole 142 that communicates with the installation groove 141. The other end of the rotating rod 16 extends through the rotating hole 142 to one side of the base 1. The rotating rod 16 is rotatably connected in the rotating hole 142. The end of the rotating rod 16 away from the rotating gear 15 is provided with a rotating groove 162. The cross-section of the rotating groove 162 is hexagonal, which allows a hexagonal wrench to be inserted. Inserting the hexagonal wrench into the rotating groove 162 can drive the rotating rod 16 and the rotating gear 15 to rotate, thereby driving the toothed groove 241 and the connecting rod 24 to move up and down. To facilitate the installation of the drive component, the base 1 has an opening slot that communicates with the mounting groove 141 and the rotating hole 142. After the drive component is installed, the connecting block 17 is installed at the opening slot and bonded to the base 1.

[0042] Furthermore, the driving component also includes a limiting ring 161, which is coaxially fixedly connected to the rotating rod 16. The outer diameter of the limiting ring 161 is larger than the inner diameter of the rotating hole 142. A limiting groove 143 adapted to the insertion of the limiting ring 161 is provided on the side wall of the rotating hole 142 on the base 1. A limiting groove 143 adapted to the insertion of the limiting ring 161 is also provided on the connecting block 17. The limiting groove 143 can restrict the limiting ring 161 from falling out of the limiting groove 143, thereby making the rotation of the rotating rod 16 more stable.

[0043] Reference Figure 2-4To ensure the stability and smooth movement of the lifting platform 2, a vertically installed support rod is fixedly connected to the bottom of the lifting platform 2. A support groove is provided on the base 1 to be inserted into and adapted to the support rod. A limiting block is elastically provided at the end of the support rod away from the lifting platform 2, which abuts against the inner wall of the support groove. A groove is provided on the side wall of the support rod. The limiting block is located in the groove and is connected to the inner wall of the groove by a spring. Several limiting grooves are arranged vertically in the support groove for the limiting block to move into. The diameter of the limiting block is larger than the limiting groove to prevent the limiting block from completely entering the limiting groove and affecting the movement of the lifting platform 2. In this embodiment, the support rods include a first support rod 22 and a second support rod 23, both of which are parallel to the connecting rod 24. The support grooves include a first support groove 12 slidably fitted on the base 1 and the first support rod 22, and a second support groove 13 slidably fitted on the base 1 and the second support rod 23. The limiting blocks include a first limiting block 221 located at the end of the first support rod 22 away from the lifting platform 2, and a second limiting block (not shown in the figure) located at the end of the second support rod 23 away from the lifting platform 2. The first limiting block 221 and the second limiting block are at the same distance from the lifting platform 2. The side wall of the first support groove 12 has several first limiting grooves 1 for the first limiting block 221 to be inserted into. 21. The side wall of the second support groove 13 is provided with a plurality of second limiting grooves 131 for the second limiting block to be engaged. In this embodiment, there are eight first limiting grooves 121 and eight second limiting grooves 131, which are arranged at equal intervals. The distances from the first limiting grooves 121 and the second limiting grooves 131 to the connecting rod 24 are the same and correspond one-to-one. When the connecting rod 24 moves up and down, the lifting platform 2 drives the first support rod 22 and the second support rod 23 to move accordingly. The first limiting block 221 will undergo elastic deformation and engage in the first limiting groove 121, and the second limiting block will undergo elastic deformation and engage in the second limiting groove 131. The first limiting block 221 and the second limiting block can be engaged at the same time, thereby supporting and limiting the movement of the lifting platform 2.

[0044] It should be understood that expressions such as "comprising" and "may include" as used in this application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In this application, terms such as "comprising" and / or "having" may be interpreted as indicating a specific characteristic, number, operation, constituent element, component, or combination thereof, but should not be interpreted as excluding the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0045] It should be understood that the terms “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0046] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0047] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0048] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A scanning electron microscope sample stage, characterized in that, The sample stage includes a base (1), a fixed platform (3) and a lifting platform (2). The fixed platform (3) is fixedly connected to the top of the base (1), and the lifting platform (2) is movably connected to the top of the base (1) in the vertical direction. When the lifting platform (2) is in the lowest position, its surface is flush with the surface of the fixed platform (3). The sample stage also includes a lifting drive mechanism for driving the lifting platform (2) to rise and fall.

2. The scanning electron microscope sample stage as described in claim 1, characterized in that, The lifting drive mechanism includes a connecting rod (24) and a drive component. The connecting rod (24) is vertically fixed to the bottom of the lifting platform (2). The base (1) has a positioning groove (14) for the connecting rod (24) to be inserted into. The drive component is set on the base (1) and the lifting platform (2) is lifted by driving the connecting rod (24).

3. A scanning electron microscope sample stage as described in claim 2, characterized in that, The connecting rod (24) has a toothed groove (241) arranged along its length on one side. The driving component includes a rotating gear (15), which is rotatably connected to the base (1) and meshes with the toothed groove (241). The rotating gear (15) rotates to drive the connecting rod (24) to move.

4. A scanning electron microscope sample stage as described in claim 3, characterized in that, The driving component also includes a rotating rod (16), one end of which is coaxially fixedly connected to the rotating gear (15), and the other end of which extends to one side of the base (1).

5. A scanning electron microscope sample stage as described in claim 4, characterized in that, The driving component also includes a limiting ring (161), which is coaxially fixedly connected to the rotating rod (16), and the base (1) has a limiting groove (143) that is adapted to the insertion of the limiting ring (161).

6. A scanning electron microscope sample stage as described in claim 1, characterized in that, The bottom of the lifting platform (2) is also fixedly connected to a vertically arranged support rod, and the base (1) is provided with a support groove that is compatible with the support rod.

7. A scanning electron microscope sample stage as described in claim 6, characterized in that, The support rod is elastically provided with a limiting block that abuts against the inner wall of the support groove.

8. A scanning electron microscope sample stage as described in claim 7, characterized in that, The support groove is provided with several limiting grooves arranged vertically for the limiting block to be movably embedded in.

9. A scanning electron microscope sample stage as described in claim 1, characterized in that, The lifting platform (2) and the base (1) can be fixedly connected by fixing bolts (4), and the lifting platform (2) and the base (1) are provided with first fixing screw holes (21) for installing fixing bolts (4).

10. A scanning electron microscope sample stage as described in claim 9, characterized in that, The base (1) is also provided with a second fixing screw hole (11) that is threadedly engaged with the fixing bolt (4).

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