Tooth-shaped electrode mechanism

Abstract

The utility model discloses a tooth-shaped electrode mechanism, which belongs to the technical field of plasma equipment electrodes and comprises an electrode plate, a tooth-shaped electrode plate and a tooth-shaped electrode plate, the electrode plate comprises a plurality of hollow-out parts, the hollow-out parts are in a long-strip rectangle shape and are evenly distributed on the electrode plate in the left-right direction, partition layers are arranged in the hollow-out parts, the partition layers cover the whole hollow-out parts, the partition layers divide the hollow-out parts into rectangular grooves located in the two faces of the electrode plate respectively, and right-angle sides are formed at the joints of the rectangular grooves and the surface of the electrode plate. According to the tooth-shaped electrode mechanism, plasma is limited between the two electrodes, so that the etching rate between the electrodes in each groove is relatively stable and is not influenced by peripheral loads. Obvious chromatic aberration cannot be generated on the surface of the product subjected to plasma treatment; the right-angle side enhances the discharge of the electrode, and the etching efficiency is high. Along with the increase of the product size and the load, the etching uniformity in the electrode plate is better.

Description

Technical Field

[0001] This utility model relates to the field of electrode technology for plasma devices, and in particular to a toothed electrode mechanism. Background Technology

[0002] Currently, multi-electrode vertical plasma systems on the market generally use two types of electrodes: solid-plate electrodes and grid-type electrodes. With increasing product size and load, solid-plate electrode designs may face challenges in achieving etching uniformity. Solid-plate electrodes have low discharge efficiency, resulting in a lower etching rate, and plasma-generated byproducts easily adhere to the planar electrodes, affecting etching and requiring frequent electrode cleaning, increasing costs and reducing electrode lifespan. Grid-type electrodes, on the other hand, are perforated, allowing plasma to move to adjacent electrodes through these openings. The plasma between electrodes is affected by the surrounding load, especially since the leftmost and rightmost electrodes have a unilateral load, resulting in an uneven etching rate between the cells compared to the middle cells, posing a challenge to the uniformity of the plasma system. Utility Model Content

[0003] The purpose of this invention is to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a toothed electrode mechanism that can achieve high etching rate and stable high uniformity in actual production.

[0004] According to an embodiment of the present invention, the toothed electrode mechanism includes: an electrode plate; multiple hollow portions, each hollow portion being a long rectangular strip, the multiple hollow portions being evenly distributed on the electrode plate along the left and right directions, a partition layer being provided inside the hollow portion, the partition layer covering the entire hollow portion, the partition layer dividing the hollow portion into rectangular grooves located on both sides of the electrode plate, and a right-angled side being formed at the junction of the rectangular groove and the surface of the electrode plate.

[0005] The toothed electrode mechanism according to the embodiments of this utility model has at least the following beneficial effects: This toothed electrode mechanism confines the plasma between two electrodes, resulting in a relatively stable etching rate between each electrode slot, unaffected by surrounding loads. The surface of the product after plasma treatment does not exhibit significant color differences; the right-angled edges enhance electrode discharge, leading to high etching efficiency. With increasing product size and load, the etching uniformity within the electrode plate improves. Due to the strong discharge at the right-angled edges, byproducts generated by the plasma reaction cannot adhere to them, reducing the frequency of electrode plate cleaning and saving costs. Therefore, this toothed electrode mechanism combines the advantages of both fence-type electrodes and whole-plate electrodes while overcoming their disadvantages, achieving both high etching rates and stable high uniformity.

[0006] According to some embodiments of this utility model, each rectangular groove is arranged along the vertical direction, and the length and width of each rectangular groove are the same.

[0007] According to some embodiments of this utility model, the rectangular grooves on both sides of the electrode plate have the same depth.

[0008] According to some embodiments of the present invention, a heat dissipation structure is also provided inside the electrode plate, which is used to cool the electrode plate.

[0009] According to some embodiments of the present invention, the heat dissipation structure includes an electrode water channel, which is disposed inside the electrode plate. The electrode water channel carries away the heat generated by the electrode through the circulating coolant.

[0010] According to some embodiments of the present invention, there is a gap between adjacent hollowed-out portions, and the electrode water channel is wound around the gap between multiple hollowed-out portions.

[0011] According to some embodiments of this utility model, an inlet head and an outlet head are welded to the side of the electrode plate, and the inlet head and the outlet head are respectively connected to the two ends of the electrode water channel.

[0012] According to some embodiments of the present invention, the electrode water channel is a groove formed on the surface of the electrode plate, and a water channel cover plate covers the electrode water channel.

[0013] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0015] Figure 1 This is a schematic diagram of the toothed electrode mechanism according to an embodiment of the present invention;

[0016] Figure 2 This is a magnified view of a portion of point A in the image;

[0017] Figure 3 yes Figure 1 Top sectional view.

[0018] Figure label:

[0019] Electrode plate 100;

[0020] 200 for the openwork section; 210 for the partition layer; 220 for the rectangular groove; 230 for the right-angled side;

[0021] Heat dissipation structure 300; electrode water channel 310; water inlet head 320; water outlet head 330; water channel cover plate 340. Detailed Implementation

[0022] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0023] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the mechanism or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" or "second" is used in the description, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0025] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0026] refer to Figures 1 to 3 Describes a toothed electrode mechanism according to an embodiment of the present invention.

[0027] like Figures 1 to 3 As shown, the toothed electrode mechanism according to an embodiment of the present invention includes: an electrode plate 100; a plurality of hollow portions 200, each of which is a long rectangular strip and is evenly distributed on the electrode plate 100 in the left-right direction. A partition layer 210 is provided inside each hollow portion 200, covering the entire hollow portion 200. The partition layer 210 divides the hollow portion 200 into rectangular grooves 220 located on both sides of the electrode plate 100. A right-angled side 230 is formed at the junction of the rectangular groove 220 and the surface of the electrode plate 100.

[0028] Multi-electrode vertical plasma equipment is widely used in etching processes. Existing electrode designs are mainly divided into two types: full-plate electrodes and grid electrodes. While full-plate electrodes offer stable etching rates, their discharge efficiency is low and they are easily affected by load, resulting in poor etching uniformity. Although grid electrodes have high discharge efficiency, plasma movement causes uneven etching rates, affecting processing uniformity.

[0029] This toothed electrode mechanism features multiple equally spaced perforated sections 200 with a discontinuity in the middle of each perforated section 200. This design ensures that the electrode plate 100 has both right-angled edges 230 that enhance discharge and maintains a relatively independent space between the two electrode plates 100 within the plasma equipment. Consequently, this toothed electrode mechanism confines the plasma between the two electrodes, resulting in a relatively stable etching rate between each electrode slot, unaffected by surrounding loads. The plasma-treated product surface also exhibits no significant color difference; the right-angled edges 230 enhance electrode discharge, leading to high etching efficiency. With increasing product size and load, the etching uniformity within the electrode plate 100 improves. Due to the strong edge discharge of the right-angled edges 230, plasma-generated byproducts cannot adhere to them, reducing the cleaning frequency of the electrode plate 100 and saving costs. Therefore, this toothed electrode mechanism combines the advantages of both grid-type electrodes and solid-plate electrodes while overcoming their disadvantages, achieving both high etching rates and stable high uniformity.

[0030] like Figures 1 to 3 As shown, each rectangular groove 220 is arranged along the vertical direction, and the length and width of each rectangular groove 220 are the same. The depth of the rectangular grooves 220 on both sides of the electrode plate 100 is the same. The hollow portion 200 is separated by the partition layer 210, and rectangular grooves 220 of the same shape and size are formed on both sides of the electrode plate 100. The edges of the rectangular grooves 220 form right angle sides 230 on the electrode plate 100. Each right angle side 230 can enhance the discharge of the electrode, thereby improving the etching efficiency.

[0031] like Figures 1 to 3 As shown, the electrode plate 100 also includes a heat dissipation structure 300 for cooling the electrode plate 100. The heat dissipation structure 300 includes an electrode water channel 310, which is disposed inside the electrode plate 100. The electrode water channel 310 carries away the heat generated by the electrode through the flow of coolant. There are gaps between adjacent hollow portions 200, and the electrode water channel 310 is arranged around the gaps between the multiple hollow portions 200. An inlet head 320 and an outlet head 330 are welded to the side of the electrode plate 100, and the inlet head 320 and outlet head 330 are respectively connected to both ends of the electrode water channel 310. The electrode water channel 310 is a groove formed on the surface of the electrode plate 100, and a water channel cover plate 340 covers the electrode water channel 310.

[0032] like Figure 3As shown, a groove is formed on the electrode surface, and a water channel cover plate 340 is then covered on the groove surface, thereby forming an electrode water channel 310 inside the electrode plate 100. One end of the electrode water channel 310 is connected to the water inlet, and the other end is connected to the water outlet. The electrode water channel 310 is arranged in an S-shape around multiple rectangular grooves 220. Thus, the electrode water channel 310 can fully contact the heat-generating parts of the electrode plate 100, and the coolant flowing within the electrode water channel 310 carries away the heat from the heat-generating parts, thereby reducing the temperature of the electrode plate 100.

[0033] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A toothed electrode mechanism, characterized in that, include: Electrode plate (100); Multiple hollow sections (200) are provided, each of which is a long rectangular shape. The multiple hollow sections (200) are evenly distributed on the electrode plate (100) in the left-right direction. A partition layer (210) is provided inside each hollow section (200). The partition layer (210) covers the entire hollow section (200). The partition layer (210) divides the hollow section (200) into rectangular grooves (220) located on both sides of the electrode plate (100). A right angle side (230) is formed at the junction of the rectangular groove (220) and the surface of the electrode plate (100).

2. The toothed electrode mechanism according to claim 1, characterized in that, Each of the rectangular slots (220) is arranged along the front-to-back direction, and the length and width of each of the rectangular slots (220) are the same.

3. The toothed electrode mechanism according to claim 1, characterized in that, The rectangular grooves (220) on both sides of the electrode plate (100) have the same depth.

4. The toothed electrode mechanism according to claim 1, characterized in that, The electrode plate (100) is also provided with a heat dissipation structure (300), which is used to cool the electrode plate (100).

5. The toothed electrode mechanism according to claim 4, characterized in that, The heat dissipation structure (300) includes an electrode water channel (310), which is disposed inside the electrode plate (100). The electrode water channel (310) carries away the heat generated by the electrode through the flow of coolant.

6. The toothed electrode mechanism according to claim 5, characterized in that, There is a gap between adjacent hollow portions (200), and the electrode water channel (310) is wound around the gap between the plurality of hollow portions (200).

7. The toothed electrode mechanism according to claim 6, characterized in that, The electrode plate (100) is welded with an inlet head (320) and an outlet head (330) on its side. The inlet head (320) and the outlet head (330) are respectively connected to the two ends of the electrode water channel (310).

8. The toothed electrode mechanism according to claim 6, characterized in that, The electrode water channel (310) is a groove formed on the surface of the electrode plate (100), and the electrode water channel (310) is covered with a water channel cover plate (340).

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