Wafer magazine

Abstract

The wafer material box comprises a box body, a locking rod and a driving mechanism, the wafer material box is placed on a machine table, the driving mechanism upwards drives the locking rod and the driving mechanism to be located at a second position, a receding groove is communicated with a bearing groove, a worker fixes a wafer on a wafer frame, the wafer frame is inserted into the bearing groove from an inlet and an outlet, and then the wafer frame is inserted into the bearing groove. The mechanical arm grabs the wafer material box, the wafer material box leaves the machine table, the driving mechanism is located at the first position, due to the dead weight of the locking rod, the locking rod slides downwards to the driving mechanism, the locking block blocks the bearing groove, therefore, the inlet and the outlet are also blocked, and the wafer frame is limited in the bearing groove by the locking block and cannot be separated from the bearing groove from the inlet and the outlet. After the wafer frame is loaded into the bearing groove, when a worker lifts the wafer frame manually or a mechanical arm lifts the wafer frame, wafer materials cannot be separated from the inlet and outlet due to unstable carrying, and the stability of wafer transportation is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to wafer cassettes. Background Technology

[0002] During the transportation of wafers, the wafers are usually first fixed on a wafer frame, and then the wafer frame with the wafers is placed into a wafer cassette.

[0003] Existing wafer cassettes consist of several support plates and support slots. Wafer frames are inserted into the support plates via the support slots and placed inside the wafer cassette. When wafer materials need to be transported, the wafer cassettes are usually moved by robotic arms or manual handling. However, due to vibrations from robotic arms or uneven handling by manual handling, the wafer materials may tilt within the wafer cassette, which may cause the wafer frames to detach from the support slots under their own weight.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model discloses a wafer cassette. Due to vibrations from a robotic arm or uneven handling by humans, wafer materials may tilt within the wafer cassette, potentially causing the wafer frame to detach from the inlet / outlet support groove under its own weight.

[0006] The technical solution adopted in this utility model is as follows:

[0007] A wafer cassette for a loading mechanism, the loading mechanism including a machine base and a protrusion disposed on the upper end of the machine base, the wafer cassette comprising:

[0008] The box body has at least one opening and an inner cavity, the opening communicating with the inner cavity. The inner sidewall of the box body has a support groove, the groove opening of which extends through to the opening to form an inlet and outlet. The inner sidewall of the box body has a locking groove and a movable hole, the locking groove being close to the inlet and outlet, the movable hole being located at the bottom end of the locking groove, and the movable hole communicating with the locking groove.

[0009] A locking rod, wherein a locking block and a clearance groove are provided on the side of the locking rod near the inner cavity, and the locking rod slides in the locking groove;

[0010] A drive mechanism is positioned corresponding to the protrusion. The first end of the drive mechanism is rotatably connected to the bottom of the housing, and the second end of the drive mechanism extends into the movable hole.

[0011] In this configuration, the box is placed on a machine platform, and the protrusion-supporting drive mechanism moves to a first position. The drive mechanism drives the locking rod to slide upwards along the locking groove, and the clearance groove communicates with the support groove. The box leaves the machine platform, the protrusion moves away from the drive mechanism, and under gravity, the drive mechanism moves to a second position. The second end of the drive mechanism abuts against the bottom of the movable hole, and the bottom end of the locking rod abuts against the second end of the drive mechanism. The locking block blocks the support groove. A further technical solution is that the drive mechanism includes a base and a lever. The base is located at the bottom of the box, and a mounting groove is formed at the bottom of the base. The first end of the lever is rotatably located at the bottom of the base and within the mounting groove, while the second end of the lever extends into the movable hole and is located at the bottom of the locking rod.

[0012] A further technical solution is that the driving mechanism includes a base and a lever. The base is located at the bottom of the box body, and a mounting groove is provided at the bottom of the base. The first end of the lever is rotatably located in the mounting groove, and the second end of the lever extends into the movable hole. The top of the movable hole is not higher than the bottom of the box body.

[0013] A further technical solution is that the driving mechanism further includes a lever pin, which passes sequentially through the base and the first end of the lever, and the lever rotates around the lever pin.

[0014] A further technical solution is that two retaining rings are fixedly provided at both ends of the lever pin, and the retaining rings are located on the outer side wall of the base to restrict the lever pin from disengaging from the base.

[0015] A further technical solution is that the supporting groove has several sections, which are symmetrically arranged on the inner walls of opposite sides of the box and distributed at intervals along the height direction.

[0016] A further technical solution is that the clearance groove has a plurality of grooves and the locking block has a plurality of blocks, the plurality of clearance grooves and the plurality of locking blocks are arranged alternately along the vertical direction of the locking rod, and the height of the locking block is not less than the height of the support groove.

[0017] In the first position, the driving mechanism is in a position where a number of locking blocks correspond one-to-one with a number of supporting grooves, and the number of locking blocks blocks a number of supporting grooves; in the second position, a number of yielding grooves correspond one-to-one with a number of supporting grooves, and the number of yielding grooves communicates with a number of supporting grooves.

[0018] A further technical solution is that the top of the box body is also provided with a clamping part.

[0019] A further technical solution is that two handles can be rotatably provided on both sides of the top of the box.

[0020] The beneficial effects of this utility model embodiment are as follows:

[0021] (i) The wafer cassette includes a cassette body, a locking lever, and a drive mechanism. The cassette body is placed on the machine. When the bump supports the drive mechanism to the first position, the second end of the drive mechanism abuts against the top of the movable hole. The drive mechanism drives the locking lever to slide upward, allowing the positioning slot to connect with the support slot. The operator fixes the wafer onto the wafer frame. After inserting the wafer frame into the support slot through the inlet and outlet, the robotic arm grabs the wafer cassette. The wafer cassette leaves the machine. The drive mechanism moves away from the bump. Under the gravity of the drive mechanism and the locking lever, the drive mechanism moves to the second position. The second end of the drive mechanism abuts against the bottom of the movable hole, and the bottom end of the locking lever abuts against the second end of the drive mechanism. The locking block blocks the support slot, thus blocking the inlet and outlet as well. The wafer frame is restricted by the locking block in the support slot and cannot detach from the support slot through the inlet and outlet. By setting the locking lever and drive mechanism, when the wafer frame is inserted into the support slot, the operator can lift it manually or the robotic arm can lift it without causing the wafer material to detach from the inlet and outlet due to unstable handling, thus improving the stability of wafer transportation.

[0022] (ii) Furthermore, the drive mechanism also includes a lever pin, which passes sequentially through the outer wall of the base and the first end of the lever. The lever rotates around the lever pin. By setting the lever pin, the second end of the lever rotates around the lever pin, allowing it to drive the locking lever to slide upward. Two retaining springs are fixedly installed at both ends of the lever pin. The retaining springs are located on the outer wall of the base to prevent the lever pin from detaching from the base. The retaining springs fix the lever pin to the outer wall of the base, preventing the lever from detaching from the base due to vibration during handling. Attached Figure Description

[0023] Figure 1 This is a cross-sectional view of the second position in the wafer cassette of this utility model.

[0024] Figure 2 This is a side view of the locking rod in the wafer cassette of this utility model.

[0025] Figure 3 This is a cross-sectional view of the first position in the wafer cassette of this utility model.

[0026] Figure 4 This is a side view of the wafer cassette structure of this utility model.

[0027] Figure 5 This is a top view of the wafer cassette of this utility model.

[0028] In the picture:

[0029] 1. Box body; 11. Opening; 12. Support groove; 13. Inlet / outlet; 14. Lock groove; 15. Movable hole; 2. Locking rod; 21. Locking block; 22. Relief groove; 3. Drive mechanism; 31. Base; 32. Lever; 33. Lever pin; 34. Snap ring; 4. Mounting groove; 5. Clamping part; 6. Handle. Detailed Implementation

[0030] The specific embodiments of this utility model are described below with reference to the accompanying drawings.

[0031] To make the objectives, technical solutions, and advantages of this utility model clearer, the device proposed by this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer according to the following description. It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions, only used to conveniently and clearly assist in illustrating the purpose of the embodiments of this utility model. Please refer to the accompanying drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only used to complement the content disclosed in the specification, for those skilled in the art to understand and read, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0032] Example:

[0033] Figure 1 This is a cross-sectional view of the second position in the wafer cassette of this utility model. Figure 2 This is a side view of the locking rod in the wafer cassette of this utility model. Figure 3 This is a cross-sectional view of the first position in the wafer cassette of this utility model. Figures 1-3 As shown, the wafer hopper is used for the loading mechanism, which includes a machine base and a protrusion disposed on the upper part of the machine base.

[0034] The wafer cassette includes a cassette body 1, a locking lever 2, and a driving mechanism 3. The cassette body 1 has at least one opening 11 and an inner cavity, with the opening 11 communicating with the inner cavity. A support groove 12 is formed on the inner sidewall of the cassette body 1, with the groove opening extending through the opening 11 to form an inlet / outlet 13. For example, there are several support grooves 12, symmetrically arranged on opposite sides of the inner wall of the cassette body 1 and spaced apart along the height direction. A locking groove 14 is provided vertically on the inner sidewall of the cassette body 1, near the inlet / outlet 13. The cassette body 1 also has a movable hole 15, located at the bottom end of the locking groove 14 and communicating with it. A locking block 21 and a clearance groove 22 are provided on the side of the locking lever 2 near the inner cavity, and the locking lever 2 slides within the locking groove 14. For example, there are several clearance slots 22 and several locking blocks 21. The clearance slots 22 and the locking blocks 21 are arranged alternately in sequence along the vertical direction of the locking rod 2. The height of the locking block 21 is not less than the height of the support slot.

[0035] like Figure 1 and Figure 3 As shown, the first end of the drive mechanism 3 is rotatably connected to the bottom of the box 1, and the position of the drive mechanism corresponds to the protrusion. The second end of the drive mechanism 3 extends into the movable hole 15. For example, the drive mechanism 3 includes a base 31 and a lever 32. The base 31 is located at the bottom of the box 1, and a mounting groove 4 is provided at the bottom of the base 31. The first end of the lever 32 is rotatably located in the mounting groove 4, and the second end of the lever 32 extends into the movable hole 15. The top of the movable hole 15 is not higher than the bottom of the box 1. By setting the movable hole 15 and the lever 32, the second end of the lever 32 can move up and down within the movable hole 15, and during the up and down movement, it supports the bottom end of the locking rod 2, lifting or lowering the locking rod 2. The drive mechanism 3 is positioned corresponding to the protrusion. The box 1 is placed on the machine platform, and the protrusion supports the drive mechanism 3 to move to the first position. The drive mechanism 3 drives the locking rod 2 to slide upward along the locking groove 14, allowing the positioning groove 22 to communicate with the supporting groove 12. As the housing 1 leaves the machine platform, the protrusion moves away from the drive mechanism 3. Under the influence of gravity, the drive mechanism 3 moves to the second position, with its second end abutting the bottom end of the movable hole 15. The bottom end of the lock rod 2 abuts the second end of the drive mechanism 3, and the locking block 21 blocks the support groove 12. For example, in the first position, several locking blocks 21 correspond one-to-one with several support grooves 12, and these locking blocks 21 block several support grooves 12. In the second position, several clearance grooves 22 correspond one-to-one with several support grooves 12, and these clearance grooves 22 communicate with several support grooves 12.

[0036] like Figure 1As shown, the drive mechanism 3 further includes a lever pin 33, which passes through the outer wall of the base 31 and the first end of the lever 32 in sequence. The lever 32 rotates around the lever pin 33. By setting the lever pin 33, the second end of the lever 32 can rotate around the lever pin 33, so that it can drive the locking rod 2 to slide upward.

[0037] like Figure 1 As shown, two retaining rings 34 are fixedly provided at both ends of the lever pin 33. The retaining rings 34 are located on the outer wall of the base 31 to restrict the lever pin 33 from leaving the base 31. The retaining rings 34 fix the lever pin 33 to the outer wall of the base 31 so that the lever 32 will not leave the base 31 due to vibration during transportation.

[0038] Figure 5 This is a top view of the wafer cassette structure of this utility model. Figure 5 As shown, the top of the box body 1 is provided with a clamping part 5, and the robotic arm on the machine can lift the box body 1 by gripping the clamping part 5.

[0039] like Figure 5 As shown, two handles 6 are rotatably provided on both sides of the top of the box 1, which can be used by the staff to lift the box 1, making manual handling easier.

[0040] In operation, this embodiment is as follows:

[0041] After the operator rotates handle 6 to the vertical position, they grasp handle 6 to lift the wafer cassette and place it on the machine platform with bumps, aligning the mounting slot 4 of base 31 with the bumps. The bumps push up lever 32, and the second end of lever 32 rotates upward around lever pin 33. The second end of lever 32 moves upward in movable hole 15, contacts the bottom end of locking lever 2, pushes up locking lever 2, and moves to the top of movable hole 15. At this time, drive mechanism 3 is in the second position, and lever 32 drives locking lever 2 to slide upward. Several clearance slots 22 are connected to several support slots 12. The wafer is fixed on the wafer frame and inserted into the support slot 12 from the inlet / outlet 13. After loading, the automated robotic arm on the machine lifts the box 1 from the gripping part 5, and the protrusion disengages from the mounting slot 4. Due to the weight of the lever 32 and the locking lever 2, the lever 32 and the locking lever 2 move down together. The second end of the lever 32 moves down in the movable hole 15 and abuts against the bottom end of the movable hole 15. Several locking blocks 21 block several support slots 12, and the wafer frame is restricted in the support slot 12, so that the wafer frame cannot be detached from the inlet / outlet 13.

[0042] In this embodiment, the locking rod 2 is driven by the driving mechanism 3 to open or close the inlet and outlet 13, so that when the wafer frame is put into the support slot 12, the wafer material will not be separated from the inlet and outlet 13 due to the unstable handling when the operator lifts it manually or the robotic arm lifts it, thus improving the stability of wafer transportation.

[0043] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0044] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A wafer cassette, characterized in that, For a feeding mechanism, the feeding mechanism includes a machine base and a protrusion disposed on the upper end of the machine base, and the wafer cassette includes: The box body (1) has at least one opening (11) and an inner cavity, the opening (11) and the inner cavity are connected, the inner side wall of the box body (1) is provided with a support groove (12), the groove of the support groove (12) extends through the opening (11) to form an inlet and outlet (13), the inner side wall of the box body (1) is provided with a locking groove (14) and a movable hole (15), the locking groove (14) is close to the inlet and outlet (13), the movable hole (15) is located at the bottom end of the locking groove (14), and the movable hole (15) is connected to the locking groove (14); Locking rod (2), the locking rod (2) is provided with a locking block (21) and a relief groove (22) on the side near the inner cavity, the locking rod (2) slides in the locking groove (14); The drive mechanism (3) is positioned corresponding to the protrusion. The first end of the drive mechanism (3) is rotatably connected to the bottom of the box body (1), and the second end of the drive mechanism (3) extends into the movable hole (15). In this process, the box body (1) is placed on the machine platform, the protrusion support drive mechanism (3) moves to the first position, the drive mechanism (3) drives the locking rod (2) to slide upward along the locking groove (14), the clearance groove (22) is connected to the support groove (12); the box body (1) leaves the machine platform, the protrusion moves away from the drive mechanism (3), the drive mechanism (3) and the locking rod (2) move to the second position under the action of gravity, the second end of the drive mechanism (3) abuts against the bottom end of the movable hole (15), the bottom end of the locking rod (2) abuts against the second end of the drive mechanism (3), and the locking block (21) blocks the support groove (12).

2. The wafer cassette according to claim 1, characterized in that: The drive mechanism (3) includes a base (31) and a lever (32). The base (31) is located at the bottom of the box (1). The bottom of the base (31) has an installation groove (4). The first end of the lever (32) is rotatably located in the installation groove (4). The second end of the lever (32) extends into the movable hole (15). The top of the movable hole (15) is not higher than the bottom of the box (1).

3. The wafer cassette according to claim 2, characterized in that: The drive mechanism (3) also includes a lever pin (33), which passes through the base (31) and the first end of the lever (32) in sequence, and the lever (32) rotates around the lever pin (33).

4. The wafer cassette according to claim 3, characterized in that: Two retaining rings (34) are fixedly provided at both ends of the lever pin (33). The retaining rings (34) are located on the outer side wall of the base (31) to restrict the lever pin (33) from disengaging from the base (31).

5. The wafer cassette according to claim 1, characterized in that: The support groove (12) has several sections, which are symmetrically arranged on the inner walls of opposite sides of the box body (1) and distributed at intervals along the height direction.

6. The wafer cassette according to claim 5, characterized in that: The clearance groove (22) has a plurality of them, and the locking block (21) has a plurality of them. The plurality of clearance grooves (22) and the plurality of locking blocks (21) are arranged alternately in sequence along the vertical direction of the locking rod (2). The height of the locking block (21) is not less than the height of the support groove. In the first position, the drive mechanism (3) is in a certain position, and a number of the locking blocks (21) correspond one-to-one with a number of the supporting grooves (12), and the number of the locking blocks (21) blocks a number of the supporting grooves (12); in the second position, a number of the yielding grooves (22) correspond one-to-one with a number of the supporting grooves (12), and the number of the yielding grooves (22) communicates with a number of the supporting grooves (12).

7. The wafer cassette according to claim 1, characterized in that: The top of the box body (1) is also provided with a clamping part (5).

8. The wafer cassette according to claim 1, characterized in that: The top of the box (1) is provided with two handles (6) on both sides.

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