Sheet taking device
By designing a wafer-retrieving device that combines a guiding structure with a vacuum source, precise placement and removal of silicon wafers from a graphite boat were achieved, solving the damage problem caused by manual wafer handling and improving wafer-retrieving efficiency and accuracy.
Patent Information
- Application Number
- CN202422978086.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-04
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-12-04
AI Technical Summary
In existing technologies, the manual wafer removal process can easily damage the graphite boat and silicon wafer, increasing the defect rate and affecting product quality.
Design a wafer picking device that slides with a graphite boat through a guide structure, uses a vacuum source to provide negative pressure to adsorb silicon wafers, and achieves automated control through stop and push components to ensure the accuracy and stability of wafer picking.
It improves the efficiency and accuracy of wafer retrieval, avoids positional deviations during manual wafer retrieval, reduces silicon wafer damage, and improves work efficiency.
Smart Images
Figure CN223624965U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and in particular to a wafer picking device. Background Technology
[0002] Graphite boats are carriers used in the deposition of anti-reflective coatings on solar cells. Their structure contains many spaced-apart boat blades, with silicon wafers attached to both sides. Measuring the film thickness is a crucial quality and performance control step in solar cell production, ensuring the cell's photoelectric conversion efficiency. Currently, film thickness measurement mainly relies on manual methods using vacuum pens to pick up solar cells. While vacuum pens reduce direct contact, the small spacing between the graphite boat blades makes it easy to damage the cells and boat blades due to improper handling during manual removal, increasing the defect rate and affecting product quality. Utility Model Content
[0003] This application discloses a wafer picking device that can accurately pick up and place silicon wafers on a graphite boat, greatly improving the efficiency and accuracy of wafer picking, avoiding positional deviations that may occur during manual wafer picking, reducing damage to silicon wafers caused by inaccurate wafer picking, and improving work efficiency.
[0004] To achieve the above objectives, this application discloses a wafer-picking device for picking up silicon wafers from a graphite boat, comprising:
[0005] The material taking component has an adsorption port and a first desorption port that are interconnected;
[0006] A first guiding structure is provided, wherein the material taking component is slidably connected to the graphite boat through the first guiding structure to guide the material taking component to reciprocate between two adjacent blades of the graphite boat along a first direction, the first direction being parallel to the blades;
[0007] A vacuum source is provided, which is connected to both the adsorption port and the first desorption port. The first desorption port is configured to be manually opened or closed to create or remove negative pressure at the adsorption port.
[0008] In one possible implementation, the wafer-picking device further includes:
[0009] A first fixing seat is used for mounting on the graphite boat;
[0010] A first movable seat is movably disposed on a first fixed seat. The first movable seat has a second desorption port that communicates with the adsorption port and is also connected to the vacuum source.
[0011] The first stop is configured to move relative to the first movable seat to a stop position when the first movable seat moves toward the first fixed seat to a preset position, so as to prevent the second desorption port from communicating with the outside gas. The first stop can be held at the stop position under the negative pressure of the second desorption port. The picking member can move between the starting position and the adsorption position. The adsorption position is the position where the adsorption port overlaps with the silicon wafer in a direction perpendicular to the boat blade. When the picking member is located at the adsorption position, the picking member drives the first movable seat to move to the preset position.
[0012] In one possible implementation, the first movable seat has a first communicating cavity, and the second desorption port communicates with the first communicating cavity. The first movable seat also has a first communicating port, which communicates with the external environment and the first communicating cavity. The first stop is located in the first communicating cavity. When the first stop is in the stop position, the first stop prevents the second desorption port from communicating with the first communicating port. The tablet taking device also includes a first pushing member. The first pushing member is fixed in position in the first direction. The first pushing member is slidably connected to the first communicating cavity in the first direction. When the first movable seat moves toward the first fixed seat, the first pushing member pushes the first stop to move toward the stop position.
[0013] In one possible implementation, the first pusher includes a first flange and a second flange located at both ends of the first pusher, the first flange abutting against the first fixed seat, the second flange slidingly connected to the first communicating cavity along the first direction, the second flange abutting against the first stop, and a first elastic element provided between the first flange and the first movable seat.
[0014] In one possible implementation, the first guiding structure includes:
[0015] A first guide hole is provided, which extends through the first movable seat and the first fixed seat along the first direction;
[0016] A first guide rod is disposed on the material taking member, the first guide rod extends along the first direction and slides in cooperation with the first guide hole.
[0017] In one possible implementation, the wafer-picking device further includes:
[0018] A second guide structure is configured such that when the first movable seat moves toward the first fixed seat, the first movable seat moves toward the direction of the boat blade;
[0019] A reset element configured to provide a reset force to a first movable seat to move the first movable seat away from the first fixed seat.
[0020] In one possible implementation, the second guiding structure includes:
[0021] A first guide protrusion is disposed on the first movable seat and is inclined relative to the first direction.
[0022] The first guide groove is disposed on the first fixed base. The first guide protrusion cooperates with the first guide groove. The first guide groove is inclined relative to the first direction. The bottom of the first guide groove is close to the boat blade relative to the opening of the first guide groove. The inclination direction of the first guide protrusion is the same as the inclination direction of the first guide groove.
[0023] In one possible implementation, the first fixed seat is provided with a first support member, the first support member is inclined, the inclination direction of the first support member is the same as the inclination direction of the first guide groove, the first movable seat is movably connected to the first support member, and the reset member includes a first spring, the first spring is sleeved on the first support member, and one end of the first spring abuts against the first movable seat, and the other end of the first spring abuts against the first fixed seat.
[0024] In one possible implementation, the material-receiving component includes a material-receiving component body and a handle portion. The adsorption port is located on the material-receiving component body, and the first desorption port is located on the handle portion. The handle portion also has a second communication port communicating with the first desorption port. A lever is hinged to the handle portion, and the lever corresponds to the second communication port. The lever is used to open the second communication port when it is turned, so that the adsorption port is released from the negative pressure state. A second elastic member is provided between the lever and the handle portion, and the second elastic member is used to keep the lever in a state of blocking the second communication port.
[0025] In one possible implementation, the wafer-taking device further includes a third guide structure, and the wafer-taking component is slidably connected to the graphite boat through the third guide structure. The third guide structure and the first guide structure are arranged symmetrically with respect to the wafer-taking component, and the third guide structure is the same as the first guide structure.
[0026] Compared with the prior art, the beneficial effects of this application are as follows:
[0027] In the wafer picking device provided in this application, the picking component is slidably connected to the graphite boat via a first guide structure. The first guide structure provides a guide channel for the picking component, ensuring that the picking component can accurately reciprocate along a first direction between adjacent two blades of the graphite boat, ensuring the stability and reliability of the wafer picking process. The picking component has an adsorption port and a first desorption port that are interconnected. By communicating with a vacuum source, the vacuum source provides negative pressure to the adsorption port, using negative pressure to adsorb the silicon wafer, enabling the picking component to firmly adsorb the silicon wafer. The wafer is picked up by vacuum adsorption, and the negative pressure formed at the adsorption port... It can firmly adsorb silicon wafers, ensuring that the wafers will not fall accidentally during movement and handling. At the same time, when the first desorption port is opened, it can release the negative pressure state, facilitating the placement of silicon wafers. The first desorption port can be opened or closed manually, allowing operators to easily control the adsorption and release of silicon wafers as needed. This application can achieve precise picking and placing of silicon wafers on graphite boats, greatly improving the efficiency and accuracy of wafer picking, avoiding possible positional deviations during manual wafer picking, reducing damage to silicon wafers caused by inaccurate picking, and improving work efficiency. Attached Figure Description
[0028] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0029] Figure 1 This is one of the structural schematic diagrams of a film-taking device provided in an embodiment of the present utility model;
[0030] Figure 2 This is a second schematic diagram of a slice-taking device provided in an embodiment of the present utility model;
[0031] Figure 3 A schematic diagram of the structure of the first movable seat of the film-retrieving device provided in an embodiment of this utility model;
[0032] Figure 4 A schematic diagram of the structure of the first elastic element in a sheet-retrieving device provided in an embodiment of this utility model;
[0033] Figure 5 for Figure 4 A structural diagram from the perspective of AA;
[0034] Figure 6 This is a schematic diagram of the structure of a first guide groove for cleaning display in a film taking device provided in an embodiment of the present invention.
[0035] Explanation of reference numerals in the attached figures:
[0036] 10-Material pick-up component; 11-Adsorption port; 12-First desorption port; 13-Material pick-up component body; 14-Handle; 15-Second connecting port; 16-Lever;
[0037] 20 - First guide structure; 21 - First guide hole; 22 - First guide rod;
[0038] 30 - First fixed seat; 31 - First support member;
[0039] 40 - First movable seat; 41 - Second desorption port; 42 - First communicating cavity; 43 - First communicating port;
[0040] 50 - First stop component;
[0041] 60 - First pushing member; 61 - First flange; 62 - Second flange; 63 - First elastic member;
[0042] 70 - Second guide structure; 71 - First guide protrusion; 72 - First guide groove;
[0043] 80 - Reset component; 81 - First spring. Detailed Implementation
[0044] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0045] In this application, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0046] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.
[0047] Graphite boats are carriers used in the deposition of anti-reflective coatings on solar cells. Their structure contains many spaced-apart boat blades, with silicon wafers attached to both sides. Measuring the film thickness is a crucial quality and performance control step in solar cell production, ensuring the cell's photoelectric conversion efficiency. Currently, film thickness measurement mainly relies on manual methods using vacuum pens to pick up solar cells. While vacuum pens reduce direct contact, the small spacing between the graphite boat blades makes it easy to damage the cells and boat blades due to improper handling during manual removal, increasing the defect rate and affecting product quality.
[0048] In view of this, some embodiments of this application provide a wafer picking device that can accurately pick up and place silicon wafers on a graphite boat, greatly improving the efficiency and accuracy of wafer picking, avoiding positional deviations that may occur during manual wafer picking, reducing damage to silicon wafers caused by inaccurate wafer picking, and improving work efficiency.
[0049] The present application will be described in detail below through specific embodiments:
[0050] The film-taking device in the embodiments of this application, such as Figure 1-2 As shown, the wafer taking device includes a taking component 10, a first guiding structure 20, and a vacuum source. The taking component 10 has an adsorption port 11 and a first desorption port 12 that are connected to each other. The taking component 10 is slidably connected to the graphite boat through the first guiding structure 20 to guide the taking component 10 to reciprocate between two adjacent boat blades of the graphite boat along a first direction, which is parallel to the boat blades. The vacuum source is connected to both the adsorption port 11 and the first desorption port 12. The first desorption port 12 is configured to be manually opened or closed so that the adsorption port 11 forms a negative pressure or releases the negative pressure.
[0051] The wafer picking device provided in this application embodiment has a picking component 10 slidably connected to a graphite boat via a first guide structure 20. The first guide structure 20 provides a guide channel for the picking component 10, ensuring that the picking component 10 can accurately reciprocate along a first direction between adjacent two blades of the graphite boat, ensuring the stability and reliability of the wafer picking process. The picking component 10 has an adsorption port 11 and a first desorption port 12 that are interconnected. By communicating with a vacuum source, the vacuum source provides negative pressure to the adsorption port 11, using negative pressure to adsorb the silicon wafer, enabling the picking component 10 to firmly adsorb the silicon wafer. The wafer is picked up by vacuum adsorption. The negative pressure formed by the port 11 can firmly adsorb the silicon wafer, ensuring that the silicon wafer will not fall accidentally during movement and handling. At the same time, when the first desorption port 12 is opened, the negative pressure can be released, facilitating the placement of the silicon wafer. The first desorption port 12 can be opened or closed manually, allowing operators to easily control the adsorption and release of the silicon wafer as needed. This application can achieve precise picking and placing of silicon wafers on the graphite boat, greatly improving the efficiency and accuracy of wafer picking, avoiding possible positional deviations during manual wafer picking, reducing damage to the silicon wafer caused by inaccurate wafer picking, and improving work efficiency.
[0052] Furthermore, such as Figure 3-6 As shown, the wafer picking device also includes a first fixed seat 30 and a first movable seat 40. The first fixed seat 30 is used to be assembled on the graphite boat, and the first movable seat 40 is movably disposed on the first fixed seat 30. The first movable seat 40 has a second desorption port 41 that communicates with the adsorption port 11. The second desorption port 41 is also connected to a vacuum source. The wafer picking device also includes a first stop 50. The first stop 50 is configured to move relative to the first movable seat 40 to a stop position when the first movable seat 40 moves toward the first fixed seat 30 to a preset position, so as to prevent the second desorption port 41 from communicating with the outside gas. The first stop 50 can be held in the stop position under the negative pressure of the second desorption port 41. The picking member 10 can move between the starting position and the adsorption position. The adsorption position is the position where the adsorption port 11 overlaps with the silicon wafer in a direction perpendicular to the boat blade. When the picking member 10 is in the adsorption position, the picking member 10 drives the first movable seat 40 to move to the preset position.
[0053] The pick-up component 10 can move between the starting position and the adsorption position to pick up silicon wafers. The adsorption position is the area where the adsorption port 11 overlaps with the silicon wafer in a direction perpendicular to the boat blade. When the pick-up component 10 is in the adsorption position, it drives the first movable seat 40 to move toward the first fixed seat 30 to a preset position. When the first movable seat 40 moves toward the first fixed seat 30 to the preset position, the first stop component 50 moves relative to the first movable seat 40 to the stop position, triggering the stop function of the first stop component 50 to prevent the second desorption port 41 from communicating with the outside gas, so that the adsorption port 11 and the second desorption port 41 can form a negative pressure state, thereby enabling the pick-up of silicon wafers. The picker 10 can firmly adsorb the silicon wafer after reaching the adsorption position, and the first stop 50 can be kept in the stop position under the negative pressure of the second desorption port 41, ensuring that the negative pressure will not be accidentally released during the wafer picking process. In this way, the first desorption port 12 is always kept closed during the wafer picking process. The operator only needs to operate the picker 10. After driving the picker 10 to move to the adsorption position, the adsorption port 11 will automatically form a negative pressure state, ensuring that the negative pressure is generated accurately and in a timely manner. After the picker is completed, the operator can manually operate the first desorption port 12 to release the negative pressure state. This automated control method reduces the uncertainty of negative pressure formation caused by human factors and improves the accuracy and stability of wafer picking.
[0054] Specifically, such as Figure 5 As shown, the first movable seat 40 is provided with a first communicating cavity 42, and the second desorption port 41 is connected to the first communicating cavity 42. The first movable seat 40 is also provided with a first communicating port 43, which connects the external environment and the first communicating cavity 42. The first stop 50 is located in the first communicating cavity 42. When the first stop 50 is in the stop position, the first stop 50 prevents the second desorption port 41 from communicating with the first communicating port 43. The tablet taking device also includes a first pushing member 60. The first pushing member 60 is fixed in position in a first direction. The first pushing member 60 is slidably connected to the first communicating cavity 42 in the first direction. When the first movable seat 40 moves toward the first fixed seat 30, the first pushing member 60 pushes the first stop 50 to move to the stop position.
[0055] The first stop 50 is installed in the first connecting cavity 42 to accurately control the connection state between the second desorption port 41 and the first connecting port 43. When the first stop 50 is in the stop position, the first stop 50 blocks the second desorption port 41 and / or the first connecting port 43, preventing the connection state between the second desorption port 41 and the first connecting port 43, thus cutting off the connection state between the first desorption port 12 and the external gas, thereby forming a negative pressure state, ensuring that the tablet taking device can maintain a stable negative pressure state when adsorbing items. Specifically, when the first movable seat 40 moves toward the first fixed seat 30, the first pushing member 60 is fixed in position in the first direction and is slidably connected to the first communicating cavity 42 in the first direction, thereby pushing the first stop member 50 to move to the stop position, realizing automatic control of the negative pressure state formed by the second desorption port 41. The relative movement of the first pushing member 60 and the first movable seat 40 makes the entire tablet picking process smoother and more continuous. The first stop member 50 and the first pushing member 60 are designed independently, which makes the first stop member 50 lighter and easier to maintain in the stop position under the negative pressure of the second desorption port 41.
[0056] In this embodiment, we continue to refer to Figure 5 The first pushing member 60 includes a first flange 61 and a second flange 62 located at both ends of the first pushing member 60. The first flange 61 abuts against the first fixed seat 30, the second flange 62 is slidably connected to the first communicating cavity 42 along the first direction, the second flange 62 abuts against the first stop member 50, and a first elastic member 63 is provided between the first flange 61 and the first movable seat 40.
[0057] The first flange 61 abuts against the first fixed seat 30, providing a stable support point for the first pushing member 60. This ensures that the first pushing member 60 remains relatively stable during the pushing process, without significant shaking or displacement. The second flange 62 slides along the first connecting cavity 42 in the first direction and abuts against the first stop member 50. This accurately transmits the pushing force to the first stop member 50, allowing the first stop member 50 to reliably move to the stop position. This results in higher accuracy and precision when the first pushing member 60 pushes the first stop member 50. Meanwhile, a first elastic element 63 is provided between the first flange 61 and the first movable seat 40. When the picking member 10 drives the first movable seat 40 to move toward the first fixed seat 30, the first elastic element 63 is compressed. When the picking member 10 finishes picking up the material and moves back to the initial position, and the first movable seat 40 moves away from the first fixed seat 30, the elastic restoring force of the first elastic element 63 can push the first movable seat 40 back to the initial position, realizing automatic reset and ensuring that the first pushing member 60 will not get stuck in the first communicating cavity 42. The first elastic element 63 can be a spring.
[0058] Specifically, the first guide structure 20 includes a first guide hole 21 and a first guide rod 22. The first guide hole 21 is disposed through the first movable seat 40 and the first fixed seat 30 along the first direction. The first guide rod 22 is disposed on the material taking member 10. The first guide rod 22 extends along the first direction and slides in cooperation with the first guide hole 21.
[0059] The cooperation of the first guide hole 21 and the first guide rod 22 provides clear directional guidance for the movement of the pick-up component 10 between two adjacent blades of the graphite boat. The first guide hole 21 is set through the first movable seat 40 and the first fixed seat 30 along the first direction, ensuring that the pick-up component 10 always moves in a direction parallel to the blades during the movement, avoiding problems such as inaccurate wafer picking or collision with silicon wafers or the graphite boat caused by directional deviation. At the same time, the first guide rod 22 is set on the pick-up component 10, extends along the first direction and slides with the first guide hole 21. While picking up the material, the pick-up component 10 can drive the first movable seat 40 to move towards the first fixed seat 30, so that the pick-up component 10 can remain stable during the movement.
[0060] Furthermore, the tablet taking device also includes a second guide structure 70, which is configured to move the first movable seat 40 toward the first fixed seat 30 when the first movable seat 40 moves toward the first fixed seat 30. The tablet taking device also includes a reset member 80, which is configured to provide a reset force to the first movable seat 40 so as to move the first movable seat 40 away from the first fixed seat 30.
[0061] When the first movable seat 40 moves toward the first fixed seat 30, the second guide structure 70 moves the first movable seat 40 toward the boat blade, guiding its movement and making it more stable as it approaches the boat blade, reducing swaying and deviation. This ensures that the suction port 11 on the picking component 10 can get closer to the silicon wafer on the graphite boat during suction, improving the accuracy of wafer picking. The second guide structure 70 works in conjunction with the first guide structure 20 to ensure a certain distance between the second guide structure 70 and the boat blade and the silicon wafer before suction, and only approaches the silicon wafer when preparing for suction, avoiding damage to the silicon wafer and graphite boat due to unstable movement, making the movement of the picking device more coordinated and efficient. At the same time, the reset component 80 provides a reset force to the first movable seat 40, enabling the first movable seat 40 to automatically move away from the first fixed seat 30 and return to its initial position after completing wafer picking, improving the automation level of the operation.
[0062] Specifically, such as Figure 6As shown, the second guide structure 70 includes a first guide protrusion 71 and a first guide groove 72. The first guide protrusion 71 is disposed on the first movable seat 40 and is inclined relative to the first direction. The first guide groove 72 is disposed on the first fixed seat 30. The first guide protrusion 71 and the first guide groove 72 cooperate. The first guide groove 72 is inclined relative to the first direction. The bottom of the first guide groove 72 is closer to the boat blade than the opening of the first guide groove 72. The inclination direction of the first guide protrusion 71 is the same as the inclination direction of the first guide groove 72.
[0063] The first guide protrusion 71 and the first guide groove 72 are inclined relative to each other in the first direction, and the inclination directions are the same. This allows the first movable seat 40 to move towards the first fixed seat 30, controlling the direction and distance of movement of the first movable seat 40. Due to the inclined guiding effect, the first movable seat 40 can move accurately towards the boat blade. This ensures that the pick-up component 10 can approach the silicon wafer on the graphite boat with a precise path, improving the accuracy and precision of wafer picking. The tight cooperation between the first guide protrusion 71 and the first guide groove 72 provides stable support and guidance for the movement of the first movable seat 40. This cooperation method limits the swaying and offset of the first movable seat 40 in other directions, making the first movable seat 40 more stable when approaching the boat blade. The sliding of the first guide protrusion 71 in the first guide groove 72 is relatively smooth, reducing resistance and jamming during the movement process. This makes the wafer picking operation smoother and reduces equipment wear and energy consumption.
[0064] In one possible implementation, such as Figure 3 As shown, a first support member 31 is provided on the first fixed seat 30. The first support member 31 is inclined and the inclination direction of the first support member 31 is the same as the inclination direction of the first guide groove 72. The first movable seat 40 is movably connected to the first support member 31. The reset member 80 includes a first spring 81. The first spring 81 is sleeved on the first support member 31, and one end of the first spring 81 abuts against the first movable seat 40, and the other end of the first spring 81 abuts against the first fixed seat 30.
[0065] The inclined first support member 31 and the first guide groove 72 are inclined in the same direction, ensuring that the support direction and the movement direction are consistent during the movement of the first movable seat 40, which can better bear and transmit force. The first movable seat 40 is movably connected to the first support member 31, so that the first movable seat 40 can move smoothly along the direction of the support member during the movement, while not detaching from the support. The first spring 81 is sleeved on the first support member 31 and can provide elastic restoring force when the first movable seat 40 moves. When the first movable seat 40 moves toward the first fixed seat 30, the spring is compressed. When the external force disappears, the elastic restoring force of the spring pushes the first movable seat 40 away from the first fixed seat 30, realizing automatic reset. This allows the wafer picking device to quickly return to the initial state after completing one wafer picking operation, improving work efficiency. At the same time, the first spring 81 plays a buffering role during the movement of the first movable seat 40. When the first movable seat 40 is subjected to external impact or rapid movement, the spring can absorb and mitigate the impact force, reducing damage to the equipment.
[0066] In this embodiment, as Figure 2 As shown, the material handling component 10 includes a material handling component body 13 and a handle portion 14. The adsorption port 11 is provided on the material handling component body 13, and the first desorption port 12 is provided on the handle portion 14. The handle portion 14 is also provided with a second communication port 15 that communicates with the first desorption port 12. A lever 16 is hinged on the handle portion 14. The lever 16 corresponds to the second communication port 15. The lever 16 is used to open the second communication port 15 when it is turned, so that the adsorption port 11 is released from the negative pressure state. A second elastic member is provided between the lever 16 and the handle portion 14. The second elastic member is used to keep the lever 16 in the state of blocking the second communication port 15.
[0067] The opening and closing of the second connecting port 15 is controlled by hinged lever 16 on the handle 14. Users can operate the device by directly moving the lever 16 with their fingers while holding the handle 14. This simple and convenient operation requires no additional complex actions or tools. Since the operation to move the material-picking component 10 is also completed on the handle 14, users can perform material picking and de-adsorption operations with one hand, allowing the other hand to assist in fixing the entire picking device, greatly improving work efficiency. The second elastic element holds the lever 16 in the stop position of the second connecting port 15, ensuring that the adsorption port 11 maintains a stable negative pressure state during normal material picking. Adsorption is only released when the user actively moves the lever 16, preventing accidental release of negative pressure from the adsorption port 11 due to accidental collisions or other unforeseen factors, thus ensuring the reliability and stability of the material picking process.
[0068] Furthermore, the wafer taking device also includes a third guide structure, and the taking component 10 is slidably connected to the graphite boat through the third guide structure. The third guide structure and the first guide structure 20 are arranged symmetrically with respect to the taking component 10, and the third guide structure is the same as the first guide structure 20.
[0069] Since the third guide structure and the first guide structure 20 are symmetrically arranged relative to the material picker 10, the guide structures on both sides can make the material picker 10 receive a uniform and balanced guiding force during the movement of the material picker 10. This can avoid the material picker 10 from tilting, jamming or other unstable movement phenomena caused by uneven force, and ensure that the material picker 10 slides smoothly in the graphite boat, thereby improving the accuracy and reliability of material picking.
[0070] In this embodiment, the end of the first guide rod 22 is provided with a first snap ring groove, and a first snap ring is disposed on the first snap ring groove. The end of the first fixed seat 30 away from the first movable seat 40 is provided with a first limiting part. When the material taking part 10 is in the initial position, the first snap ring cooperates with the first limiting part, and the first snap ring can prevent the material taking part 10 from detaching from the first movable seat 40 and the first fixed seat 30.
[0071] The design of the first retaining ring cooperating with the first limiting part can effectively prevent the material picking component 10 from detaching from the first movable seat 40 and the first fixed seat 30 during movement. Especially in frequent material picking operations or working environments where there may be vibration or impact, this restriction can ensure the integrity of the entire material picking device and avoid material picking failure due to accidental detachment of the material picking component 10. At the same time, this can ensure continuous and stable material picking operations without the need for frequent adjustments due to component detachment, which helps to improve production efficiency and ensure the continuity of the production process.
[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.
Claims
1. A wafer picking device for picking up silicon wafers from a graphite boat, characterized in that, include: The material taking component has an adsorption port and a first desorption port that are interconnected; A first guiding structure is provided, wherein the material taking component is slidably connected to the graphite boat through the first guiding structure to guide the material taking component to reciprocate between two adjacent blades of the graphite boat along a first direction, the first direction being parallel to the blades; A vacuum source is provided, which is connected to both the adsorption port and the first desorption port. The first desorption port is configured to be manually opened or closed to create or remove negative pressure at the adsorption port.
2. The film-taking device according to claim 1, characterized in that, The film-taking device further includes: A first fixing seat is used for mounting on the graphite boat; A first movable seat is movably disposed on a first fixed seat. The first movable seat has a second desorption port that communicates with the adsorption port and is also connected to the vacuum source. The first stop is configured to move relative to the first movable seat to a stop position when the first movable seat moves toward the first fixed seat to a preset position, so as to prevent the second desorption port from communicating with the outside gas. The first stop can be held at the stop position under the negative pressure of the second desorption port. The picking member can move between the starting position and the adsorption position. The adsorption position is the position where the adsorption port overlaps with the silicon wafer in a direction perpendicular to the boat blade. When the picking member is located at the adsorption position, the picking member drives the first movable seat to move to the preset position.
3. The film-taking device according to claim 2, characterized in that, The first movable seat has a first communicating cavity, and the second desorption port communicates with the first communicating cavity. The first movable seat also has a first communicating port, which communicates with the external environment and the first communicating cavity. The first stop is located in the first communicating cavity. When the first stop is in the stop position, the first stop prevents the second desorption port from communicating with the first communicating port. The tablet taking device also includes a first pushing member. The first pushing member is fixed in position in the first direction. The first pushing member is slidably connected to the first communicating cavity in the first direction. When the first movable seat moves toward the first fixed seat, the first pushing member pushes the first stop to move toward the stop position.
4. The film-taking device according to claim 3, characterized in that, The first pushing member includes a first flange and a second flange located at both ends of the first pushing member. The first flange abuts against the first fixed seat, the second flange is slidably connected to the first communicating cavity along the first direction, the second flange abuts against the first stop member, and a first elastic member is provided between the first flange and the first movable seat.
5. The film-taking device according to claim 2, characterized in that, The first guide structure includes: A first guide hole is provided, which extends through the first movable seat and the first fixed seat along the first direction; A first guide rod is disposed on the material taking member, the first guide rod extends along the first direction and slides in cooperation with the first guide hole.
6. The film-taking device according to claim 2, characterized in that, The film-taking device further includes: A second guide structure is configured such that when the first movable seat moves toward the first fixed seat, the first movable seat moves toward the direction of the boat blade; A reset element configured to provide a reset force to a first movable seat to move the first movable seat away from the first fixed seat.
7. The film-taking device according to claim 6, characterized in that, The second guide structure includes: A first guide protrusion is disposed on the first movable seat and is inclined relative to the first direction. The first guide groove is disposed on the first fixed base. The first guide protrusion cooperates with the first guide groove. The first guide groove is inclined relative to the first direction. The bottom of the first guide groove is close to the boat blade relative to the opening of the first guide groove. The inclination direction of the first guide protrusion is the same as the inclination direction of the first guide groove.
8. The film-taking device according to claim 7, characterized in that, The first fixed seat is provided with a first support member. The first support member is inclined and the inclination direction of the first support member is the same as the inclination direction of the first guide groove. The first movable seat is movably connected to the first support member. The reset member includes a first spring. The first spring is sleeved on the first support member, and one end of the first spring abuts against the first movable seat, and the other end of the first spring abuts against the first fixed seat.
9. The film-taking device according to claim 1, characterized in that, The material handling component includes a material handling component body and a handle. The adsorption port is located on the material handling component body, and the first desorption port is located on the handle. The handle also has a second communication port that communicates with the first desorption port. A lever is hinged to the handle, and the lever corresponds to the second communication port. The lever is used to open the second communication port when it is turned, so that the adsorption port is released from the negative pressure state. A second elastic element is provided between the lever and the handle. The second elastic element is used to keep the lever in a state of blocking the second communication port.
10. The film-taking device according to claim 1, characterized in that, The wafer taking device further includes a third guide structure, and the taking component is slidably connected to the graphite boat through the third guide structure. The third guide structure and the first guide structure are arranged symmetrically with respect to the taking component, and the third guide structure is the same as the first guide structure.