Sample setting device and laser repair system

Abstract

The utility model relates to a sample setting device and a laser repair system. The sample setting device comprises a bearing table assembly, a first adsorption assembly, a second adsorption assembly and a negative pressure mechanism, the first adsorption assembly is arranged on the bearing table assembly and provided with a plurality of first adsorption holes, and the first adsorption holes are distributed at intervals in the first direction; the second adsorption assembly and the first adsorption assembly are arranged on the same side of the bearing table assembly in a spaced mode in the second direction, and the second adsorption assembly can move in the direction close to or away from the first adsorption assembly relative to the bearing table assembly in the second direction. The second adsorption assembly is provided with a plurality of second adsorption holes which are arranged at intervals in the first direction; wherein the first direction intersects with the second direction; the negative pressure mechanism is communicated with the first adsorption holes and the second adsorption holes and used for enabling the first adsorption holes and the second adsorption holes to be in a negative pressure state, and therefore the sample to be repaired is adsorbed. The sample setting device can be suitable for to-be-repaired samples of various sizes.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer detection, in particular to a sample setting device and a laser repair system. BACKGROUND

[0002] In the panel industry, laser is needed to weld or cut the circuit on the panel to realize the repair of the panel. During the repair of the panel, the panel needs to be fixed. However, the size of the product is often different, and different sizes of the panel need a plurality of sizes of the clamp device to fix, when different sizes of the product need to be tested, the clamp device needs to be replaced, frequent replacement of the clamp device brings inconvenience to the workers, and in the process of replacing the clamp device, the repair efficiency is inevitably reduced. CONTENT OF THE UTILITY MODEL

[0003] Therefore, the present application provides a sample setting device and a laser repair system, which can be suitable for a plurality of sizes of the sample to be repaired.

[0004] The present application provides a sample setting device, which comprises a bearing table assembly, a first adsorption assembly, a second adsorption assembly and a negative pressure mechanism, the first adsorption assembly is arranged on the bearing table assembly, the first adsorption assembly has a plurality of first adsorption holes and the plurality of first adsorption holes are arranged along a first direction; the second adsorption assembly is arranged on the same side of the bearing table assembly along a second direction and is spaced apart from the first adsorption assembly, the second adsorption assembly can move towards the first adsorption assembly or away from the first adsorption assembly along the second direction, the second adsorption assembly has a plurality of second adsorption holes and the plurality of second adsorption holes are arranged along the first direction; wherein the first direction intersects with the second direction; the negative pressure mechanism is connected with the plurality of first adsorption holes and the plurality of second adsorption holes respectively, so as to make the plurality of first adsorption holes and the plurality of second adsorption holes in a negative pressure state, thereby adsorbing the sample to be repaired.

[0005] Further, the first adsorption assembly comprises a first mounting plate and a first adsorption plate, the first mounting plate and the first adsorption plate are arranged in a third direction, the first mounting plate is arranged on the carrier table assembly, the first adsorption plate is arranged on a surface of the first mounting plate away from the carrier table assembly, the first adsorption plate has the plurality of first adsorption holes, and the first adsorption holes penetrate through two surfaces of the first adsorption plate in the third direction, the plurality of first adsorption holes comprises a plurality of first group adsorption holes, each first group adsorption hole comprises at least one first adsorption hole, the first adsorption plate and the first mounting plate enclose a plurality of first cavities arranged in a spaced manner, the plurality of first cavities are respectively connected to the negative pressure mechanism, each first cavity is connected to a first group adsorption hole, and different first cavities are connected to different first group adsorption holes; the second adsorption assembly comprises a second mounting plate and a second adsorption plate, the second mounting plate and the second adsorption plate are arranged in the third direction, the second mounting plate is arranged on the carrier table assembly, the second adsorption plate is arranged on a surface of the second mounting plate away from the carrier table assembly, the second adsorption plate has the plurality of second adsorption holes, and the second adsorption holes penetrate through two surfaces of the second adsorption plate in the third direction, the plurality of second adsorption holes comprises a plurality of second group adsorption holes, each second group adsorption hole comprises at least one second adsorption hole, the second adsorption plate and the second mounting plate enclose a plurality of second cavities arranged in a spaced manner, the plurality of second cavities are respectively connected to the negative pressure mechanism, each second cavity is connected to a second group adsorption hole, and different second cavities are connected to different second group adsorption holes; wherein the third direction intersects with the first direction and the second direction.

[0006] Further, the sample arrangement device further comprises a main pipeline and a plurality of connection assemblies, the main pipeline is matched with each connection assembly, and the negative pressure mechanism is connected to one first cavity and one second cavity respectively, and the connection assemblies are one-to-one corresponding to the first cavities and the second cavities; the connection assembly comprises a first connecting piece, a second connecting piece, a first pipeline piece, a second pipeline piece, a third pipeline piece, and a three-way joint, the first connecting piece is connected to the first cavity, opposite ends of the first pipeline piece are connected to the first connecting piece and the three-way joint respectively, the second connecting piece is connected to the second cavity, opposite ends of the second pipeline piece are connected to the second connecting piece and the three-way joint respectively, opposite ends of the third pipeline piece are connected to the three-way joint and the main pipeline respectively, and one end of the main pipeline away from the three-way joint is connected to the negative pressure mechanism.

[0007] Further, the connection assembly further comprises a switch piece arranged on the third pipeline piece, and the switch piece is used for controlling the connection or disconnection between the negative pressure mechanism and the three-way joint.

[0008] Further, the sample setting device further comprises a vacuum detector arranged in the main pipe, the vacuum detector cooperating with the switch to detect the vacuum air tightness of each of the first and second chambers.

[0009] Further, the sample setting device further comprises a guide and a stopper, the guide being arranged in the carrier platform assembly and extending in a second direction, the second adsorption assembly being slidably connected to the guide in the second direction; the stopper being connected to the second adsorption assembly, the stopper having a first state and a second state relative to the guide, when the stopper is in the first state, the stopper locks the guide, and the relative position of the second adsorption assembly and the carrier platform assembly is fixed; when the stopper is in the second state, the stopper is unlocked from the guide, so that the second adsorption assembly can move relative to the carrier platform assembly.

[0010] Further, the sample setting device comprises a first horizontal adjustment mechanism, the first horizontal adjustment mechanism comprising a plurality of first adjustment assemblies, the plurality of first adjustment assemblies being arranged at intervals on the first mounting plate, the plurality of first adjustment assemblies cooperating to adjust the levelness of the first adsorption plate.

[0011] Further, each of the first adjustment assemblies comprises a first adjustment member, a locking member and a first fixing member, the first adjustment member being sequentially arranged in the locking member and the first mounting plate, and the first adjustment member being threadedly connected with the locking member and the first mounting plate respectively, the first adjustment member penetrating the surface of the first mounting plate away from the locking member and abutting against the carrier platform assembly; the first adjustment member being used to adjust the relative position of the carrier platform assembly and the first mounting plate, the locking member locking the first adjustment member after the first mounting plate and the carrier platform assembly are in a preset position; the first fixing member being sequentially arranged in the first adjustment member and the carrier platform assembly to limit the relative position of the first adjustment member and the carrier platform assembly.

[0012] Further, the sample setting device further comprises a limiting plate, the limiting plate comprising a first sub-plate and a second sub-plate connected by bending, the first sub-plate being connected to the carrier plate assembly, and the second sub-plate being connected to the side of the first mounting plate away from the second adsorption assembly.

[0013] Further, the bearing table assembly comprises a first bearing plate and a second bearing plate, the first bearing plate and the second bearing plate are arranged in a third direction in a stacked manner, one side of the second bearing plate away from the first bearing plate is used for arranging the first adsorption assembly and the second adsorption assembly; the sample arrangement device further comprises a second horizontal adjusting mechanism, the second horizontal adjusting mechanism comprises a penetrating piece and a plurality of second adjusting assemblies, the penetrating piece and the plurality of second adjusting assemblies are arranged around the outer periphery of the second bearing plate, and the penetrating piece and the plurality of second adjusting assemblies are matched and used for adjusting the levelness of the second bearing plate; the penetrating piece is used for connecting the first bearing plate and the second bearing plate, the second adjusting assembly comprises a second adjusting piece and a second fixing piece, the second adjusting piece is penetratingly arranged in the second bearing plate and is threadedly connected with the second bearing plate, one side of the second adjusting piece away from the second bearing plate abuts against the first bearing plate, the second adjusting piece is used for adjusting the relative position of the first bearing plate and the second bearing plate, and the second fixing piece is penetratingly arranged in the second adjusting piece and the first bearing plate in sequence, and the relative position of the first bearing plate and the second bearing plate is limited.

[0014] The application further provides a laser repair system, which comprises the sample arrangement device provided by the application, a mounting seat, a stand and a laser repair piece, the sample arrangement device is used for arranging a sample to be repaired; the mounting seat is used for bearing the sample arrangement device, and the sample arrangement device can move relative to the mounting seat in a first direction; the stand is connected with the mounting seat and is arranged on the same side of the mounting seat and spaced apart from the sample arrangement device; and the laser repair piece is connected with the stand and is arranged corresponding to the sample arrangement device to repair the sample to be repaired.

[0015] In the present application, when the sample setting device is used to set the sample to be repaired, the opposite ends of the sample to be repaired are respectively arranged above the plurality of first adsorption holes and the plurality of second adsorption holes, the negative pressure mechanism respectively communicates the first adsorption holes and the plurality of second adsorption holes, and makes the first adsorption holes and the second adsorption holes in a negative pressure state, so that the plurality of first adsorption holes and the plurality of second adsorption holes cooperate to adsorb the sample to be repaired. The first adsorption assembly is arranged on the bearing table assembly, and the second adsorption assembly can move relative to the bearing table assembly along the second direction towards the direction of approaching or moving away from the first adsorption assembly, so as to reduce or increase the distance between the first adsorption assembly and the second adsorption assembly in the second direction, so that the first adsorption assembly and the second adsorption assembly cooperate to adsorb the sample to be repaired of different sizes. When the sample setting device is used to set the sample to be repaired of different sizes, only the relative position of the second adsorption assembly and the first adsorption assembly needs to be adjusted, and the sample setting device is convenient for the worker to adjust according to the size of the sample to be repaired. When the sample setting device is used in the laser repair system, the sample setting device does not need to be frequently replaced, which is beneficial to improve the efficiency of the laser repair system in repairing the sample to be repaired. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0017] Figure 1 Structure schematic diagram of the laser repair system of an embodiment of the present application;

[0018] Figure 2 Cooperative relationship schematic diagram of the sample setting device and the sample to be repaired of an embodiment of the present application;

[0019] Figure 3 Partial structure schematic diagram of the sample setting device of an embodiment of the present application;

[0020] Figure 4 Communication relationship schematic diagram of the negative pressure mechanism, the first adsorption hole and the second adsorption hole in the sample setting device of an embodiment of the present application;

[0021] Figure 5 Partial exploded structure schematic diagram of the sample setting device of an embodiment of the present application;

[0022] Figure 6 Perspective structure schematic diagram of the sample setting device of an embodiment of the present application;

[0023] Figure 7 For Figure 5 Enlarged structural schematic view of the middle M dashed box;

[0024] Figure 8 For Figure 5 Enlarged structural schematic view of the middle N dashed box;

[0025] Figure 9 Schematic top view of a sample setting device according to an embodiment of the present application;

[0026] Figure 10 For Figure 9 Sectional view in the direction of O-O;

[0027] Figure 11 For Figure 9 Sectional view in the direction of P-P;

[0028] Figure 12 For Figure 9 Sectional view in the direction of Q-Q.

[0029] Explanation of reference signs:

[0030] 100-sample setting device, 110-carrier table assembly, 111-first carrier plate, 112-second carrier plate, 120-first adsorption assembly, 121-first adsorption hole, 1211-first group of adsorption holes, 1212-first cavity, 1213-first sub-hole, 1214-second sub-hole, 122-first mounting plate, 123-first adsorption plate, 130-second adsorption assembly, 131-second adsorption hole, 1311-second group of adsorption holes, 1312-second cavity, 1313-third sub-hole, 1314-fourth sub-hole, 132-second mounting plate, 133-second adsorption plate, 140-negative pressure mechanism, 150-main pipeline, 160-connection assembly, 161-first connecting piece, 162-second connecting piece, 163-first pipeline piece, 164-second pipeline piece, 165-third pipeline piece, 166-three-way joint, 1661-first interface, 1662-second interface, 1663-third interface, 167-switch piece, 170-vacuum detector, 180-guide piece, 190-stop piece, 210-first horizontal adjustment mechanism, 211-first adjustment assembly, 212-first adjustment piece, 213-locking piece, 214-first fixing piece, 220-limiting plate, 221-first sub-plate, 222-second sub-plate, 230-second horizontal adjustment mechanism, 231-penetrating piece, 2311-first penetrating part, 2312-second penetrating part, 232-second adjustment assembly, 2321-second adjustment piece, 2322-second fixing piece, 240-scale, 250-first drag chain, 260-setting base, 300-laser repair system, 310-mounting seat, 320-stand, 330-laser repair piece, 400-sample to be repaired. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0032] The terms "first", "second", etc. in the specification and claims of the present application and the above drawings are used to distinguish different objects, not to describe a specific order. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but can optionally include steps or units not listed, or can optionally include other steps or units inherent to the process, method, product or device.

[0033] Reference to“an embodiment” or“the embodiment” means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment. The appearances of the phrase“in one embodiment” or“in an embodiment” in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily all referring to a particular embodiment logically divided into different embodiments. It is explicitly contemplated that embodiments described herein can be combined to form additional embodiments.

[0034] In the panel industry, it is necessary to use laser to weld or cut off the circuit on the panel to realize the repair of the panel. In the process of repairing the panel, the panel needs to be fixed. However, the size of the product is often different, and different sizes of the panel need a plurality of sizes of the clamp device to fix, when different sizes of the product need to be tested, the clamp device needs to be replaced, and the frequent replacement of the clamp device brings inconvenience to the workers, and in the process of replacing the clamp device, the repair efficiency is inevitably reduced.

[0035] Please refer to Figure 1 and Figure 2 The present application provides a laser repair system 300, which comprises a sample setting device 100 provided by the present application, a mounting seat 310, a stand 320 and a laser repair piece 330, the sample setting device 100 is used for setting the sample to be repaired 400; the mounting seat 310 is used for carrying the sample setting device 100, the sample setting device 100 can move relative to the mounting seat 310 along the first direction (such as the direction shown in the X direction in the figure) ; the stand 320 is connected with the mounting seat 310, and is arranged on the same side of the mounting seat 310 and spaced from the sample setting device 100; the laser repair piece 330 is connected with the stand 320, and is arranged corresponding to the sample setting device 100 to repair the sample to be repaired 400. Figure 1

[0036] It can be understood that the sample to be repaired 400 can be but is not limited to a display panel, a circuit board and the like.

[0037] It can be understood that the sample setting device 100, the stand 320 and the laser repair piece 330 are all located on the same side of the mounting seat 310.

[0038] It can be understood that the sample to be repaired 400 has a circuit.

[0039] ​In the embodiment, the laser repair system 300 is used to repair the sample 400 to be repaired, in particular, when the circuit in the sample 400 to be repaired has a fault of disconnection, the laser repair member 330 deposits metal on the sample 400 to be repaired to connect the circuit and achieve the repair of the sample 400 to be repaired; when the circuit of the sample 400 to be repaired is connected in a place where it should not be connected, the laser repair member 330 can emit laser on the sample 400 to be repaired to cut off the circuit and achieve the repair of the sample 400 to be repaired. In the embodiment, the laser repair member 330 is arranged on the stand 320 and corresponds to the sample setting device 100, and the sample setting device 100 can move relative to the mounting seat 310 along the first direction to move the repair area of the sample 400 to be repaired to the lower side of the laser repair member 330. In the embodiment, the sample setting device 100 can adapt to samples 400 to be repaired of various sizes to adsorb and fix samples 400 to be repaired of various sizes, thereby improving the use performance of the sample setting device 100. During the test of samples 400 to be repaired of various sizes, the sample setting device 100 does not need to be frequently replaced, which facilitates the staff to set the sample 400 to be repaired, reduces the time for setting the sample 400 to be repaired, and thus is conducive to improving the efficiency of the laser repair system 300 in repairing the sample 400 to be repaired.

[0040] It can be understood that, in Figure 2 , five different sizes of samples 400 to be repaired are shown, and in actual use, one sample setting device 100 can only set one sample 400 to be repaired at a time, and it should not be understood that the sample setting device 100 simultaneously sets five different sizes of samples 400 to be repaired.

[0041] Please refer to Figure 3 and Figure 4The application provides a sample setting device 100, which comprises a bearing table assembly 110, a first adsorption assembly 120, a second adsorption assembly 130 and a negative pressure mechanism 140. The first adsorption assembly 120 is arranged on the bearing table assembly 110, and the first adsorption assembly 120 has a plurality of first adsorption holes 121 which are arranged at intervals along a first direction. The second adsorption assembly 130 is arranged on the same side of the bearing table assembly 110 along a second direction and is spaced apart from the first adsorption assembly 120. The second adsorption assembly 130 can move towards or away from the first adsorption assembly 120 along the second direction relative to the bearing table assembly 110. The second adsorption assembly 130 has a plurality of second adsorption holes 131 which are arranged at intervals along the first direction. The first direction intersects the second direction. The negative pressure mechanism 140 is connected to the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131 respectively, so as to make the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131 in a negative pressure state, thereby adsorbing a sample to be repaired 400.

[0042] Optionally, the first direction is perpendicular to the second direction.

[0043] It can be understood that, in the application, "a plurality of" means greater than or equal to two, which can be, but is not limited to, two, three, four, five, six, seven, eight, ten, twelve, fifteen, eighteen, twenty, twenty-two, twenty-five, twenty-eight, thirty or thirty-five, etc.

[0044] In the present embodiment, when the sample setting device 100 is used to set the sample to be repaired 400, the opposite ends of the sample to be repaired 400 are respectively arranged above the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131, the negative pressure mechanism 140 respectively communicates the first adsorption holes 121 and the plurality of second adsorption holes 131, and makes the first adsorption holes 121 and the second adsorption holes 131 in a negative pressure state, so that the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131 cooperate to adsorb the sample to be repaired 400. The first adsorption assembly 120 is arranged on the supporting table assembly 110, and the second adsorption assembly 130 can move along the second direction relative to the supporting table assembly 110 towards the direction of approaching or moving away from the first adsorption assembly 120, so as to reduce or increase the distance between the first adsorption assembly 120 and the second adsorption assembly 130 in the second direction, so that the first adsorption assembly 120 and the second adsorption assembly 130 cooperate to adsorb the sample to be repaired 400 of different sizes. When the sample setting device 100 is used to set the sample to be repaired 400 of different sizes, only the relative position of the second adsorption assembly 130 and the first adsorption assembly 120 needs to be adjusted, and the sample setting device 100 is convenient for the worker to adjust according to the size of the sample to be repaired 400. When the sample setting device 100 is used in the laser repair system 300, it is not necessary to frequently replace the sample setting device 100, which is conducive to improving the efficiency of the laser repair system 300 in repairing the sample to be repaired 400.

[0045] Optionally, when it is necessary to unload the sample to be repaired 400 from the sample setting device 100, the negative pressure state of the first adsorption holes 121 and the second adsorption holes 131 can be released, or the sample to be repaired 400 can be directly taken out.

[0046] Please refer to Figure 5 and Figure 6 In some embodiments, the first adsorption assembly 120 includes a first mounting plate 122 and a first adsorption plate 123, and the first mounting plate 122 and the first adsorption plate 123 are arranged along a third direction (for example, the direction of the arrow A in the figure) relative to the supporting table assembly 110. Figure 3The first mounting plate 122 is arranged on the carrier table assembly 110, the first adsorption plate 123 is arranged on the surface of the first mounting plate 122 away from the carrier table assembly 110, the first adsorption plate 123 has the plurality of first adsorption holes 121, and the first adsorption holes 121 penetrate through the first adsorption plate 123 along two surfaces opposite in the third direction. The plurality of first adsorption holes 121 includes a plurality of first group adsorption holes 1211, each of the first group adsorption holes 1211 includes at least one first adsorption hole 121, the first adsorption plate 123 and the first mounting plate 122 enclose a plurality of first cavities 1212 arranged at intervals, and the plurality of first cavities 1212 are respectively communicated with the negative pressure mechanism 140. Each first cavity 1212 is communicated with a group of first group adsorption holes 1211, and different first cavities 1212 are communicated with different first group adsorption holes 1211.

[0047] It can be understood that the third direction is the arrangement direction of the carrier table assembly 110 and the first adsorption assembly 120.

[0048] In the terms of the present application, "at least one" means one or more.

[0049] It can be understood that the number of the first cavities 1212 is equal to the number of the groups of first group adsorption holes 1211, and the first cavities 1212 are arranged one by one corresponding to the first group adsorption holes 1211.

[0050] It can be understood that the plurality of first cavities 1212 are arranged at intervals along the first direction, and different first cavities 1212 are not communicated with each other.

[0051] It can be understood that the negative pressure mechanism 140, the first cavities 1212 and the first group adsorption holes 1211 are communicated in sequence to form a gas path.

[0052] In the present embodiment, the first mounting plate 122 and the first adsorption plate 123 are arranged in a third direction in a stacked manner, and the first mounting plate 122 and the first adsorption plate 123 enclose the plurality of first chambers 1212 arranged at intervals, each of the first chambers 1212 is respectively communicated with the negative pressure mechanism 140 and a group of the first group of adsorption holes 1211. In other words, the negative pressure mechanism 140 can respectively make one or more of the plurality of first chambers 1212 in a negative pressure state, so that the corresponding first group of adsorption holes 1211 is in a negative pressure state to adsorb the sample to be repaired 400. More specifically, when the size of the sample to be repaired 400 is small, the negative pressure mechanism 140 can make one of the plurality of first chambers 1212 in a negative pressure state, and make the corresponding first group of adsorption holes 1211 of the first chamber 1212 in a negative pressure state to adsorb the sample to be repaired 400. As the size of the sample to be repaired 400 in the first direction increases, the negative pressure mechanism 140 can make a plurality of first chambers 1212 of the plurality of first chambers 1212 in a negative pressure state, and make a plurality of first groups of adsorption holes 1211 corresponding to the plurality of first chambers 1212 in a negative pressure state to adsorb the sample to be repaired 400 with a larger size. The sample setting device 100 provided in the present embodiment can adapt to the change of the size of the sample to be repaired 400 in the first direction, and by controlling at least one of the plurality of first chambers 1212 in a negative pressure state to adsorb the sample to be repaired 400, it is convenient for the worker to adjust according to the size of the sample to be repaired 400. When the sample setting device 100 is used in the laser repair system 300, it is not necessary to frequently replace the sample setting device 100, which is conducive to improving the efficiency of the laser repair system 300 in repairing the sample to be repaired 400.

[0053] It can be understood that, in Figure 6In the embodiment, the first chamber 1212 in the A dashed box has one of the first chambers 1212, the second chamber 1312 in the A' dashed box has one of the second chambers 1312, and the first chamber 1212 in the A dashed box is arranged correspondingly with the second chamber 1312 in the A' dashed box to form a group of chambers. Similarly, the first chamber 1212 in the B dashed box has one of the first chambers 1212, the second chamber 1312 in the B' dashed box has one of the second chambers 1312, and the first chamber 1212 in the B dashed box is arranged correspondingly with the second chamber 1312 in the B' dashed box to form a group of chambers. The first chamber 1212 in the C dashed box has one of the first chambers 1212, the second chamber 1312 in the C' dashed box has one of the second chambers 1312, and the first chamber 1212 in the C dashed box is arranged correspondingly with the second chamber 1312 in the C' dashed box to form a group of chambers. The first chamber 1212 in the D dashed box has one of the first chambers 1212, the second chamber 1312 in the D' dashed box has one of the second chambers 1312, and the first chamber 1212 in the D dashed box is arranged correspondingly with the second chamber 1312 in the D' dashed box to form a group of chambers. The first chamber 1212 in the E dashed box has one of the first chambers 1212, the second chamber 1312 in the E' dashed box has one of the second chambers 1312, and the first chamber 1212 in the E dashed box is arranged correspondingly with the second chamber 1312 in the E' dashed box to form a group of chambers.

[0054] Preferably, in some embodiments, the number of groups of the first group of adsorption holes 1211 is five, and the number of the first chambers 1212 is five, and the first group of adsorption holes 1211 corresponds to the first chamber 1212 one by one.

[0055] In the embodiment, the sample setting device 100 can be applicable to at least five sizes of the sample to be repaired 400. Assuming that the sample setting device 100 can be applicable to five sizes of the sample to be repaired 400, and the five samples to be repaired 400 have a first size, a second size, a third size, a fourth size, and a fifth size, respectively, and the first size, the second size, the third size, the fourth size, and the fifth size gradually increase, when the sample setting device 100 is used to set the sample to be repaired 400 with the first size, the negative pressure mechanism 140 communicates one of the first chambers 1212; when the sample setting device 100 is used to set the sample to be repaired 400 with the second size, the negative pressure mechanism 140 communicates two adjacent first chambers 1212; when the sample setting device 100 is used to set the sample to be repaired 400 with the third size, the negative pressure mechanism 140 communicates three adjacent first chambers 1212; when the sample setting device 100 is used to set the sample to be repaired 400 with the fourth size, the negative pressure mechanism 140 communicates four adjacent first chambers 1212; and when the sample setting device 100 is used to set the sample to be repaired 400 with the fifth size, the negative pressure mechanism 140 communicates five first chambers 1212.

[0056] Please refer to Figure 7 Optionally, in some embodiments, the first adsorption holes 121 comprise first sub-holes 1213 and second sub-holes 1214, the first sub-holes 1213 penetrate through the surface of the first adsorption plate 123 away from the first mounting plate 122, the second sub-holes 1214 penetrate through the surface of the first adsorption plate 123 facing the first mounting plate 122, the radial dimension of the first sub-holes 1213 is greater than that of the second sub-holes 1214.

[0057] In the present embodiment, when the sample to be repaired 400 is arranged on the first adsorption assembly 120, the first sub-holes 1213 are closer to the sample to be repaired 400 than the second sub-holes 1214, and the radial dimension of the first sub-holes 1213 is greater than that of the second sub-holes 1214, which is conducive to increasing the adsorption area of the first adsorption plate 123 to the sample to be repaired 400, thereby improving the adsorption force of the first adsorption plate 123 to the sample to be repaired 400, and improving the stability of the sample to be repaired 400 arranged on the first adsorption assembly 120.

[0058] Further optionally, the cross section of the first sub-holes 1213 is a waist type, and the cross section of the second sub-holes 1214 is a circular shape.

[0059] Similarly, the second adsorption assembly 130 comprises a second mounting plate 132 and a second adsorption plate 133, the second mounting plate 132 and the second adsorption plate 133 are arranged in a third direction, the second mounting plate 132 is arranged on the carrier table assembly 110, the second adsorption plate 133 is arranged on the surface of the second mounting plate 132 away from the carrier table assembly 110, the second adsorption plate 133 has a plurality of second adsorption holes 131, and the second adsorption holes 131 penetrate through two surfaces of the second adsorption plate 133 in the third direction, the plurality of second adsorption holes 131 comprise a plurality of second group adsorption holes 1311, each second group adsorption hole 1311 comprises at least one second adsorption hole 131, the second adsorption plate 133 and the second mounting plate 132 enclose a plurality of second cavities 1312 arranged at intervals, the plurality of second cavities 1312 are respectively communicated with the negative pressure mechanism 140, each second cavity 1312 is communicated with a second group adsorption hole 1311, and different second cavities 1312 are communicated with different second group adsorption holes 1311; wherein, the third direction intersects with the first direction and the second direction respectively.

[0060] It can be understood that the third direction is the arrangement direction of the carrier table assembly 110 and the second adsorption assembly 130.

[0061] It can be understood that the number of the second chambers 1312 is equal to the number of groups of the second groups of adsorption holes 1311, and the second chambers 1312 are arranged in one-to-one correspondence with the second groups of adsorption holes 1311.

[0062] It can be understood that the plurality of second chambers 1312 are arranged in a spaced manner along the first direction, and different second chambers 1312 are not communicated with each other.

[0063] It can be understood that the negative pressure mechanism 140, the second chambers 1312, and the second groups of adsorption holes 1311 are sequentially communicated to form a gas path.

[0064] In the embodiment, the second mounting plate 132 and the second adsorption plate 133 are arranged in a stacked manner along a third direction, and the second mounting plate 132 and the second adsorption plate 133 enclose the plurality of second chambers 1312 arranged in a spaced manner. Each of the second chambers 1312 is respectively communicated with the negative pressure mechanism 140 and a group of the second groups of adsorption holes 1311. In other words, the negative pressure mechanism 140 can respectively make one or more of the plurality of second chambers 1312 in a negative pressure state, so that the corresponding second groups of adsorption holes 1311 are in a negative pressure state to adsorb the sample to be repaired 400. More specifically, when the size of the sample to be repaired 400 is small, the negative pressure mechanism 140 can make one of the plurality of second chambers 1312 in a negative pressure state, and make the corresponding second group of adsorption holes 1311 of the second chamber 1312 in a negative pressure state to adsorb the sample to be repaired 400. As the size of the sample to be repaired 400 in the first direction increases, the negative pressure mechanism 140 can make a plurality of second chambers 1312 of the plurality of second chambers 1312 in a negative pressure state, and make a plurality of second groups of adsorption holes 1311 corresponding to the plurality of second chambers 1312 in a negative pressure state to adsorb a larger sample to be repaired 400. The sample setting device 100 provided in the embodiment can adapt to the change of the size of the sample to be repaired 400 in the first direction, and can adsorb the sample to be repaired 400 by controlling at least one of the plurality of second chambers 1312 in a negative pressure state, so as to facilitate the worker to adjust according to the size of the sample to be repaired 400. When the sample setting device 100 is used in the laser repair system 300, it is not necessary to frequently replace the sample setting device 100, which is beneficial to improve the efficiency of repairing the sample to be repaired 400 by the laser repair system 300.

[0065] Preferably, in some embodiments, the number of groups of the second groups of adsorption holes 1311 is five, the number of the second chambers 1312 is five, and the second groups of adsorption holes 1311 correspond to the second chambers 1312 in a one-to-one manner.

[0066] In the embodiment, the sample setting device 100 can be applicable to at least five sizes of the sample to be repaired 400. Assuming that the sample setting device 100 can be applicable to five sizes of the sample to be repaired 400, and the five samples to be repaired 400 have a first size, a second size, a third size, a fourth size and a fifth size respectively, the first size, the second size, the third size, the fourth size and the fifth size gradually increase, when the sample setting device 100 is used to set the sample to be repaired 400 with the first size, the negative pressure mechanism 140 is communicated with one of the second chambers 1312; when the sample setting device 100 is used to set the sample to be repaired 400 with the second size, the negative pressure mechanism 140 is communicated with two adjacent second chambers 1312; when the sample setting device 100 is used to set the sample to be repaired 400 with the third size, the negative pressure mechanism 140 is communicated with three adjacent second chambers 1312; when the sample setting device 100 is used to set the sample to be repaired 400 with the fourth size, the negative pressure mechanism 140 is communicated with four adjacent second chambers 1312; when the sample setting device 100 is used to set the sample to be repaired 400 with the fifth size, the negative pressure mechanism 140 is communicated with five second chambers 1312.

[0067] Optionally, referring to Figure 8 In some embodiments, the second adsorption hole 131 includes a third sub-hole 1313 and a fourth sub-hole 1314 which are communicated with each other, the third sub-hole 1313 penetrates through the surface of the second adsorption plate 133 away from the second mounting plate 132, and the fourth sub-hole 1314 penetrates through the surface of the second adsorption plate 133 facing the second mounting plate 132, the radial dimension of the third sub-hole 1313 is greater than the radial dimension of the fourth sub-hole 1314.

[0068] In the embodiment, when the sample to be repaired 400 is set on the second adsorption assembly 130, the third sub-hole 1313 is closer to the sample to be repaired 400 than the fourth sub-hole 1314, and the radial dimension of the third sub-hole 1313 is greater than the radial dimension of the fourth sub-hole 1314, which is conducive to increasing the adsorption area of the second adsorption plate 133 to the sample to be repaired 400, thereby improving the adsorption force of the second adsorption plate 133 to the sample to be repaired 400, and improving the stability of the sample to be repaired 400 set on the second adsorption assembly 130.

[0069] Further optionally, the cross section of the third sub-hole 1313 is a waist type, and the cross section of the fourth sub-hole 1314 is a circular shape.

[0070] Optionally, in some embodiments, the sample to be repaired 400 is in a positive direction, and the sample setting device 100 can be used to adsorb the sample to be repaired 400 with edge lengths of five inches, six inches, seven inches, nine inches, and fourteen inches. When the sample setting device 100 is used to adsorb a sample with an edge length of five inches, the negative pressure mechanism 140 is connected to one first chamber 1212 and one second chamber 1312; when the sample setting device 100 is used to adsorb a sample with an edge length of six inches, the negative pressure mechanism 140 is connected to adjacent two first chambers 1212 and adjacent two second chambers 1312; when the sample setting device 100 is used to adsorb a sample with an edge length of seven inches, the negative pressure mechanism 140 is connected to adjacent three first chambers 1212 and adjacent three second chambers 1312; when the sample setting device 100 is used to adsorb a sample with an edge length of nine inches, the negative pressure mechanism 140 is connected to adjacent four first chambers 1212 and adjacent four second chambers 1312; and when the sample setting device 100 is used to adsorb a sample with an edge length of fourteen inches, the negative pressure mechanism 140 is connected to adjacent five first chambers 1212 and adjacent five second chambers 1312.

[0071] Optionally, the number of first chambers 1212 is equal to the number of second chambers 1312, one first chamber 1212 is arranged corresponding to one second chamber 1312, and the number of first adsorption holes 121 connected to the first chamber 1212 is equal to the number of second adsorption holes 131 connected to the second chamber 1312 arranged corresponding to the first chamber 1212.

[0072] In the present embodiment, the first chambers 1212 and the second chambers 1312 are arranged corresponding to each other, so that when the sample to be repaired 400 is arranged on the first adsorption assembly 120 and the second adsorption assembly 130, the negative pressure mechanism 140, the first chambers 1212, and the second chambers 1312 cooperate to adsorb the opposite ends of the sample to be repaired 400 in the second direction, so as to improve the stability of the sample to be repaired 400 arranged on the sample setting device 100. Specifically, the first chambers 1212 and the second chambers 1312 arranged corresponding to each other are a group of chambers, and a plurality of first chambers 1212 and the second chambers 1312 arranged corresponding to the first chambers 1212 are a plurality of groups of chambers. The worker can control the negative pressure mechanism 140 to be connected to at least one group of chambers in the plurality of groups of chambers according to the size of the sample to be repaired 400 in the first direction, so as to achieve the adsorption of the opposite ends of the sample to be repaired 400 in the second direction. The sample setting device 100 provided in the present embodiment can stably arrange the sample to be repaired 400 on the first adsorption assembly 120 and the second adsorption assembly 130, and can be suitable for a plurality of different sizes of samples to be repaired 400, and has good use performance.

[0073] In some embodiments, the sample setting device 100 further comprises a total pipe 150 and a plurality of connecting assemblies 160, the total pipe 150 is matched with each of the connecting assemblies 160 for respectively communicating the negative pressure mechanism 140 with one of the first chambers 1212 and one of the second chambers 1312, the connecting assemblies 160 are respectively corresponding to the first chambers 1212 and the second chambers 1312 one by one; the connecting assembly 160 comprises a first connecting piece 161, a second connecting piece 162, a first pipe piece 163, a second pipe piece 164, a third pipe piece 165 and a three-way joint 166, the first connecting piece 161 is connected with the first chamber 1212, opposite ends of the first pipe piece 163 are respectively communicated with the first connecting piece 161 and the three-way joint 166, the second connecting piece 162 is connected with the second chamber 1312, opposite ends of the second pipe piece 164 are respectively communicated with the second connecting piece 162 and the three-way joint 166, opposite ends of the third pipe piece 165 are respectively communicated with the three-way joint 166 and the total pipe 150, one end of the total pipe 150 away from the three-way joint 166 is communicated with the negative pressure mechanism 140.

[0074] It can be understood that the number of the connecting assemblies 160 is equal to the number of the first chambers 1212, the number of the connecting assemblies 160 is equal to the number of the second chambers 1312, one of the connecting assemblies 160 respectively corresponds to one of the first chambers 1212 and one of the second chambers 1312.

[0075] In the embodiment, the negative pressure mechanism 140 and the total pipeline 150 are communicated to the plurality of groups of chambers, and the total pipeline 150 and the plurality of groups of chambers are connected through the connecting assembly 160. Specifically, the first group of adsorption holes 1211, the first chamber 1212, the first pipeline piece 163, and the tee joint 166 are sequentially communicated, the second group of adsorption holes 1311, the second chamber 1312, the second pipeline piece 164, and the tee joint 166 are sequentially communicated, and the end of the tee joint 166 away from the first chamber 1212 and the second chamber 1312 is communicated to the total pipeline 150 through the third pipeline piece 165 and finally communicated to the negative pressure mechanism 140. The tee joint 166 connects a corresponding group of chambers in parallel, so that the negative pressure mechanism 140 can simultaneously control the negative pressure conditions of the corresponding first chamber 1212 and the second chamber 1312, so that the corresponding first chamber 1212 and the second chamber 1312 can be simultaneously under the negative pressure mechanism 140 and adsorb the sample to be repaired 400, which is beneficial to improve the efficiency of the sample to be repaired 400 arranged in the sample arrangement device 100, and can simplify the operation steps of the workers and improve the efficiency of regulating the negative pressure conditions of the plurality of groups of chambers. Further, a plurality of groups of chambers correspond to a plurality of groups of connecting assemblies 160, and a plurality of groups of connecting assemblies 160 are aggregated to the negative pressure mechanism 140 through the total pipeline 150, so that the sample arrangement device 100 of the application only needs one set of negative pressure equipment, which is beneficial to the miniaturization design of the equipment.

[0076] Please refer to Figure 9 and Figure 10 It can be understood that the tee joint 166 has a first interface 1661, a second interface 1662, and a third interface 1663, the first interface 1661 and the third interface 1663 are communicated, and the second interface 1662 and the third interface 1663 are communicated, so that the end of the first pipeline piece 163 away from the first chamber 1212 is connected to the first interface 1661, the end of the second pipeline piece 164 away from the second chamber 1312 is connected to the second interface 1662, and the third interface 1663 communicates the end of the third pipeline piece 165 away from the total pipeline 150.

[0077] Please refer to Figure 4 and Figure 5 In some embodiments, the connecting assembly 160 further comprises a switch piece 167 arranged on the third pipeline piece 165, for controlling the communication or disconnection between the negative pressure mechanism 140 and the tee joint 166.

[0078] In the embodiment, the switch piece 167 is arranged on the third pipe piece 165, and the switch piece 167 is arranged between the main pipe 150 and the tee joint 166. The switch piece 167 is used to control the communication or disconnection between the negative pressure mechanism 140 and the tee joint 166, so as to control the negative pressure of the group of chambers corresponding to the connecting assembly 160. Specifically, when the switch piece 167 is opened, the main pipe 150 communicates with the tee joint 166, that is, the negative pressure mechanism 140 communicates with the tee joint 166. The negative pressure mechanism 140 can vacuumize the first chamber 1212 and the second chamber 1312 connected by the tee joint 166, so that the corresponding first chamber 1212 and second chamber 1312 are in a negative pressure state, thereby realizing the adsorption of the sample to be repaired 400. When the switch piece 167 is closed, the main pipe 150 is blocked from the tee joint 166, that is, the negative pressure mechanism 140 is disconnected from the tee joint 166. Therefore, the negative pressure mechanism 140 cannot vacuumize the first chamber 1212 and the second chamber 1312 connected by the tee joint 166, thereby realizing the breaking of the vacuum, so as to facilitate the disassembly of the sample to be repaired 400 from the first adsorption assembly 120 and the second adsorption assembly 130. In the embodiment, when the number of groups of the connecting assembly 160 is multiple, the number of switch pieces 167 is also multiple. Each switch piece 167 is used to control the on-off of the air path between the negative pressure mechanism 140 and the groups of chambers. The worker can control at least one of the multiple switch pieces 167, so as to control the negative pressure of the groups of chambers. The sample setting device 100 can control the negative pressure of the groups of chambers, and can adapt to samples to be repaired 400 of multiple sizes, thereby having good use performance.

[0079] In some embodiments, the sample setting device 100 further comprises a vacuum detector 170 arranged on the main pipe 150. The vacuum detector 170 cooperates with the switch piece 167 to detect the vacuum air tightness of each of the first chamber 1212 and the second chamber 1312.

[0080] Optionally, the vacuum detector 170 is a pressure gauge.

[0081] In the embodiment, the vacuum detector 170 is arranged in the main pipe 150, and the vacuum detector 170 cooperates with the switch piece 167 to detect the vacuum air tightness of each of the first chambers 1212 and the second chambers 1312, so as to detect the gas path with air leakage in time and facilitate the maintenance of the staff. Specifically, when the negative pressure mechanism 140 communicates all the first chambers 1212 and the second chambers 1312, if the first chambers 1212 and the second chambers 1312 have good air tightness, it is assumed that the vacuum detector 170 measures a first air pressure difference value, wherein the first air pressure difference value is the difference between the internal pressure of the first chambers 1212 and the second chambers 1312 and the atmospheric pressure at this time; further, after all the switch pieces 167 are closed, the switch pieces 167 are opened in sequence to measure the vacuum air tightness of the first chambers 1212 and the second chambers 1312 corresponding to the switch pieces 167, and it is assumed that the vacuum detector 170 measures a second air pressure difference value. If the second air pressure difference value is greater than the first air pressure difference value, it is proved that the first chambers 1212 and the second chambers 1312 communicated with the switch piece 167 have air leakage, so as to facilitate the staff to repair the gas path where the switch piece 167 is located. If the second air pressure difference value is equal to or very close to the first air pressure difference value, it is proved that the first chambers 1212 and the second chambers 1312 communicated with the switch piece 167 have good air tightness. The vacuum detector 170 provided in the embodiment facilitates the detection of the vacuum air tightness of each of the first chambers 1212 and the second chambers 1312, so that when one or more of the plurality of first chambers 1212 and the plurality of second chambers 1312 have air leakage, the gas path with air leakage can be detected in time, and the replacement or repair can be performed in time, so as to ensure the adsorption performance of the first adsorption assembly 120 and the second adsorption assembly 130 to the sample to be repaired 400, and improve the use performance of the sample arrangement device 100.

[0082] For example, if the first air pressure difference value is -40 MPa and the second air pressure difference value is -20 MPa, the first chambers 1212 and the second chambers 1312 communicated with the switch piece 167 have poor air tightness and have air leakage at this time.

[0083] Please refer to Figure 3In some embodiments, the sample setting device 100 further comprises a guide 180 and a stopper 190. The guide 180 is disposed on the carrier stage assembly 110 and extends along a second direction. The second adsorption assembly 130 is slidably connected to the guide 180 along the second direction. The stopper 190 is connected to the second adsorption assembly 130. The stopper 190 has a first state and a second state relative to the guide 180. When the stopper 190 is in the first state, the stopper 190 locks the guide 180, and the relative position of the second adsorption assembly 130 and the carrier stage assembly 110 is fixed. When the stopper 190 is in the second state, the stopper 190 is unlocked from the guide 180, so that the second adsorption assembly 130 can move relative to the carrier stage assembly 110.

[0084] In the embodiment, the guide 180 extends in the second direction, and the second adsorption assembly 130 is slidably connected to the guide 180 in the second direction, the guide 180 provides a guide function for the movement of the second adsorption assembly 130, so as to avoid the second adsorption assembly 130 from deviating during the movement relative to the first adsorption assembly 120, and the accuracy of adjusting the distance between the first adsorption assembly 120 and the second adsorption assembly 130 in the second direction is improved. In addition, the sample setting device 100 further comprises a stopper 190, when the stopper 190 is in the first state, the stopper 190 locks the guide 180, and the second adsorption assembly 130 is connected to the stopper 190, so that the relative position between the second adsorption assembly 130 and the guide 180 is fixed, further, the relative position between the second adsorption assembly 130 and the carrier table assembly 110 is fixed, the distance between the first adsorption assembly 120 and the second adsorption assembly 130 in the second direction is fixed, so that when the first adsorption assembly 120 and the second adsorption assembly 130 cooperate to adsorb the sample to be repaired 400, the second adsorption assembly 130 can be prevented from sliding relative to the carrier table assembly 110 in the second direction towards the direction away from the first adsorption assembly 120, so that the sample to be repaired 400 falls off, and the structural stability of the sample to be repaired 400 set on the carrier table assembly 110 is improved. When the stopper 190 is in the second state, the stopper 190 is unlocked from the guide 180, and the second adsorption assembly 130 is unlocked from the guide 180, and the second adsorption assembly 130 can move relative to the guide 180 in the second direction, so that the second adsorption assembly 130 can move relative to the carrier table assembly 110, and the distance between the first adsorption assembly 120 and the second adsorption assembly 130 in the second direction can be adjusted by the staff, so that the sample setting device 100 is suitable for different sizes of the sample to be repaired 400. When the sample setting device 100 is used in the laser repair system 300, the sample setting device 100 does not need to be frequently replaced, and the efficiency of repairing the sample to be repaired 400 by the laser repair system 300 is improved.

[0085] Optionally, the stopper 190 can be, but is not limited to, a guide rail clamp.

[0086] Optionally, the sample setting device 100 further comprises a scale 240, which is arranged on the bearing table assembly 110 and adjacent to the guide 180, the scale 240 extends along the second direction, when the second adsorption assembly 130 moves relative to the guide 180 along the second direction, the distance of the movement of the second adsorption assembly 130 can be obtained through the scale 240, and the distance between the first adsorption assembly 120 and the second adsorption assembly 130 along the second direction can also be obtained through the scale 240, so as to facilitate the staff to determine the distance of the movement of the second adsorption assembly 130 relative to the bearing table assembly 110 according to the size of the sample to be repaired 400, which is beneficial to improve the efficiency of adjusting the distance between the second adsorption assembly 130 and the first adsorption assembly 120, when the sample setting device 100 is applied to the laser repair system 300 and the laser repair system 300 is used for repairing samples to be repaired 400 of different sizes, the time for setting samples to be repaired 400 of different sizes can be saved, so as to improve the repair efficiency of the sample to be repaired 400.

[0087] Optionally, the sample setting device 100 further comprises a first drag chain 250, the first drag chain 250 has a first end and a second end arranged opposite to each other, the first end is connected to the first adsorption assembly 120, and the second end is connected to the bearing table assembly 110, and the first drag chain 250 is used for penetrating the plurality of second pipe fittings 164.

[0088] In the embodiment, the first drag chain 250 is used for penetrating the plurality of second pipe fittings 164, when the second adsorption assembly 130 moves relative to the bearing table assembly 110 along the second direction, the first drag chain 250 can drive the second pipe fittings 164 to move, so as to adapt to the movement of the second adsorption assembly 130, compared with the scheme that the second pipe fittings 164 are fixed on the bearing table assembly 110, the scheme of the present application can avoid that the second pipe fittings 164 and the second connecting piece 162 pull each other, and can avoid that the second pipe fittings 164 and the tee joint 166 pull each other, in addition, the first drag chain 250 can physically protect the second pipe fittings 164, can avoid that the second pipe fittings 164 are crushed, ensures the communication of the gas path between the second connecting piece 162, the second pipe fittings 164 and the tee joint 166, and prolongs the service life of the second pipe fittings 164, so as to ensure the adsorption effect of the second adsorption assembly 130 on the sample to be repaired 400, and improves the use performance of the sample setting device 100.

[0089] Please refer to Figure 5In some embodiments, the sample setting device 100 comprises a first horizontal adjustment mechanism 210, which comprises a plurality of first adjustment assemblies 211, the plurality of first adjustment assemblies 211 are arranged at intervals on the first mounting plate 122, and the plurality of first adjustment assemblies 211 are cooperated to adjust the levelness of the first adsorption plate 123.

[0090] In the present embodiment, the first horizontal adjustment mechanism 210 comprises a plurality of first adjustment assemblies 211, and the plurality of first adjustment assemblies 211 are cooperated to adjust the levelness of the first adsorption plate 123, so that the first adsorption plate 123 is parallel to the second adsorption plate 133, or the first adsorption plate 123 and the second adsorption plate 133 are as parallel as possible, in other words, so that the first adsorption plate 123 and the second adsorption plate 133 are adjusted to the same horizontal plane. When the opposite ends of the sample to be repaired 400 are arranged on the first adsorption assembly 120 and the second adsorption assembly 130 respectively, the sample to be repaired 400 can be arranged flat above the first adsorption plate 123 and the second adsorption plate 133, avoiding the adsorption effect of the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131 on the sample to be repaired 400 being reduced due to the height difference between the first adsorption plate 123 and the second adsorption plate 133, thereby improving the stability of the sample to be repaired 400 arranged on the sample setting device 100, and improving the use performance of the sample setting device 100.

[0091] Please refer to Figure 9 and Figure 11 In some embodiments, each of the first adjustment assemblies 211 comprises a first adjustment member 212, a locking member 213, and a first fixing member 214, the first adjustment member 212 is sequentially arranged through the locking member 213 and the first mounting plate 122, and the first adjustment member 212 is threadedly connected with the locking member 213 and the first mounting plate 122 respectively, the first adjustment member 212 penetrates the surface of the first mounting plate 122 away from the locking member 213 and abuts against the carrier table assembly 110; the first adjustment member 212 is used to adjust the relative position of the carrier table assembly 110 and the first mounting plate 122, the locking member 213 locks the first adjustment member 212 after the first mounting plate 122 and the carrier table assembly 110 are in a preset position; the first fixing member 214 is sequentially arranged through the first adjustment member 212 and the carrier table assembly 110 to limit the relative position of the first adjustment member 212 and the carrier table assembly 110.

[0092] It can be understood that the first adjustment member 212 has a first inner through hole for penetrating the first fixing member 214.

[0093] It can be understood that the preset position refers to the relative position of the first mounting plate 122 and the carrier assembly 110 when the first adsorption plate 123 is parallel to the second adsorption plate 133.

[0094] In the embodiment, the first adjusting member 212 is threadedly connected with the locking member 213 and the first mounting plate 122 respectively, the first adjusting member 212 penetrates through the surface of the first mounting plate 122 away from the locking member 213 and abuts against the carrier assembly 110, when the first adjusting member 212 rotates relative to the first mounting plate 122, one end of the first adjusting member 212 abuts against the carrier assembly 110, the first adjusting member 212 drives the first mounting plate 122 to move along the third direction towards the direction of approaching or moving away from the carrier assembly 110, so as to adjust the relative position of the first mounting plate 122 and the carrier assembly 110, thereby adjusting the relative position of the first adsorption plate 123 and the carrier assembly 110. The locking member 213 is used for locking the first adjusting member 212, the locking member 213 can rotate relative to the first adjusting member 212, when the locking member 213 abuts against the surface of the first mounting plate 122 away from the carrier assembly 110, the relative position of the locking member 213 and the first adjusting member 212 is locked, so as to prevent the first adjusting member 212 from continuing to rotate relative to the first mounting plate 122 to change the position of the first mounting plate 122, thereby locking the relative position of the first mounting plate 122 and the carrier assembly 110, and finally locking the relative position of the first adsorption plate 123 and the carrier assembly 110. Further, the first adjusting assembly 211 further comprises a first fixing member 214, the first fixing member 214 is sequentially provided on the first adjusting member 212 and the carrier assembly 110, so as to avoid the first adjusting member 212 and the carrier assembly 110 from being deflected, which is beneficial to further limiting the relative position of the first adjusting member 212 and the carrier assembly 110, and improving the accuracy of the first adjusting assembly 211 in adjusting the levelness of the first adsorption plate 123.

[0095] Please refer to Figure 3 In some embodiments, the sample setting device 100 further comprises a limiting plate 220, the limiting plate 220 comprises a first sub-plate 221 and a second sub-plate 222 which are connected by bending, the first sub-plate 221 is connected with the carrier plate assembly, and the second sub-plate 222 is connected with the side of the first mounting plate 122 away from the second adsorption assembly 130.

[0096] Optionally, in some embodiments, the first sub-plate 221 is perpendicular to the second sub-plate 222.

[0097] In the embodiment, the first sub-plate 221 connects the bearing plate assembly, in other words, the first sub-plate 221 connects the surface of the bearing plate assembly facing the first adsorption assembly 120, the second sub-plate 222 connects the side of the first mounting plate 122 away from the second adsorption assembly 130, and the first sub-plate 221 and the second sub-plate 222 cooperate to support and limit the first mounting plate 122 to prevent the first mounting plate 122 from turning toward the side away from the second adsorption assembly 130, thereby improving the structural stability of the first mounting plate 122 arranged on the bearing table assembly 110 and further improving the structural stability of the first adsorption plate 123 arranged on the bearing table assembly 110, so that the plurality of first adsorption holes 121 of the first adsorption plate 123 can effectively play an adsorption role to adsorb the sample 400 to be repaired.

[0098] Please refer to Figure 9 and Figure 12 In some embodiments, the bearing table assembly 110 includes a first bearing plate 111 and a second bearing plate 112, the first bearing plate 111 and the second bearing plate 112 are arranged in a third direction in a stacked manner, and the side of the second bearing plate 112 away from the first bearing plate 111 is used to arrange the first adsorption assembly 120 and the second adsorption assembly 130; the sample arrangement device 100 further includes a second horizontal adjustment mechanism 230, the second horizontal adjustment mechanism 230 includes a penetrating piece 231 and a plurality of second adjustment assemblies 232, the penetrating piece 231 and the plurality of second adjustment assemblies 232 are arranged around the outer periphery of the second bearing plate 112, and the penetrating piece 231 and the plurality of second adjustment assemblies 232 cooperate to adjust the levelness of the second bearing plate 112; the penetrating piece 231 is used to connect the first bearing plate 111 and the second bearing plate 112, the second adjustment assembly 232 includes a second adjustment piece 2321 and a second fixing piece 2322, the second adjustment piece 2321 penetrates the second bearing plate 112 and is threadedly connected with the second bearing plate 112, the side of the second adjustment piece 2321 away from the second bearing plate 112 abuts against the first bearing plate 111, the second adjustment piece 2321 is used to adjust the relative position of the first bearing plate 111 and the second bearing plate 112, and the second fixing piece 2322 penetrates the second adjustment piece 2321 and the first bearing plate 111 in sequence to limit the relative position of the first bearing plate 111 and the second bearing plate 112.

[0099] It can be understood that, along the third direction, the first bearing plate 111, the second bearing plate 112, the first mounting plate 122 and the first adsorption plate 123 are arranged in sequence; and the first bearing plate 111, the second bearing plate 112, the second mounting plate 132 and the second adsorption plate 133 are arranged in sequence.

[0100] It can be understood that the second adjusting member 2321 has a second through hole for passing through the second fixing member 2322.

[0101] In the embodiment, the penetrating member 231 and the plurality of second adjusting assemblies 232 are arranged around the outer periphery of the second bearing plate 112 to adjust the levelness of the second bearing plate 112, so as to simultaneously adjust the levelness of the first adsorption plate 123 and the second adsorption plate 133, to avoid the whole first adsorption plate 123 and the whole second adsorption plate 133 from being inclined, so that the first adsorption plate 123 and the second adsorption plate 133 are located in the horizontal position, to better adsorb the sample 400 to be repaired. Specifically, taking the penetrating member 231 as a reference, at least one of the plurality of second adjusting assemblies 232 is adjusted to adjust the relative position of the second bearing plate 112 and the first bearing plate 111. Wherein, the second adjusting member 2321 is threadedly connected with the second bearing plate 112, and the side of the second adjusting member 2321 away from the second bearing plate 112 abuts against the first bearing plate 111, so that when the second adjusting member 2321 rotates relative to the second bearing plate 112, one end of the second adjusting member 2321 abuts against the first bearing plate 111, and the second adjusting member 2321 drives the second bearing plate 112 to move along the third direction towards the direction of approaching or moving away from the first bearing plate 111, to adjust the relative position of the first bearing plate 111 and the second bearing plate 112, so that the first adsorption plate 123 and the second adsorption plate 133 are located in the horizontal position. Further, the second adjusting assembly 232 further comprises a second fixing member 2322, which is sequentially penetrated into the second adjusting member 2321 and the first bearing plate 111, to avoid the second adjusting member 2321 and the first bearing plate 111 from being deflected, and to improve the accuracy of the second adjusting assembly 232 in adjusting the levelness of the second bearing plate 112.

[0102] Optionally, the second horizontal adjusting mechanism 230 further comprises a third fixing member (not shown in figure), the penetrating member 231 comprises a first penetrating part 2311 and a second penetrating part 2312, the first penetrating part 2311 and the second penetrating part 2312 are arranged along a third direction, the first penetrating part 2311 has a first guide inclined surface (not shown in figure) facing the second penetrating part 2312, the second penetrating part 2312 has a second guide inclined surface (not shown in figure) facing the first penetrating part 2311, the first guide inclined surface and the second guide inclined surface are both arc surfaces, and the first guide inclined surface abuts against the second guide inclined surface; the third fixing member is sequentially penetrated through the second bearing plate 112, the second penetrating part 2312, the first penetrating part 2311 and the first bearing plate 111, so as to fix the relative position of the first bearing plate 111 and the second bearing plate 112.

[0103] In the embodiment, the first penetrating part 2311 and the second penetrating part 2312 are oppositely arranged, when the second bearing plate 112 is slightly tilted relative to the first bearing plate 111, the weight of the second bearing plate 112 is borne on the first penetrating part 2311 through the second penetrating part 2312, the second guide inclined surface is pushed to slide relative to the first guide inclined surface, so that the contact between the first penetrating part 2311 and the second penetrating part 2312 is always kept as surface contact, so that the weight of the second bearing plate 112 is uniformly transmitted to the first bearing plate 111 through the second penetrating part 2312 and the first penetrating part 2311, the stress concentration caused by the contact between the first penetrating part 2311 and the second penetrating part 2312 being point contact is avoided, so that the first bearing plate 111 is prevented from being broken or deformed due to local force intensification, so as to be beneficial to prolong the service life of the first bearing plate 111.

[0104] Optionally, the sample setting device 100 further comprises a setting base 260, which is disposed between the bearing table assembly 110 and the mounting base 310, and is movable relative to the mounting base 310 along a first direction to drive the bearing table assembly 110, the first adsorption assembly 120 and the second adsorption assembly 130 to move relative to the mounting base 310 along the first direction; the bearing table assembly 110 is movable relative to the setting base 260 along a second direction to drive the first adsorption assembly 120 and the second adsorption assembly 130 to move relative to the mounting base 310 along the second direction, in other words, when the sample to be repaired 400 is disposed on the first adsorption assembly 120 and the second adsorption assembly 130, the sample to be repaired 400 can be moved relative to the mounting base 310 along the first direction and along the second direction to adjust the relative position between the sample to be repaired 400 and the laser repair component 330.

[0105] Optionally, the sample setting device 100 further comprises a second drag chain (not shown in the figure), which has a third end and a fourth end disposed opposite to each other, the third end is connected to the bearing table assembly 110, and the fourth end is connected to the setting base 260, and the second drag chain is used to pass through the plurality of third pipe fittings 165 and / or the main pipe 150; the laser repair system 300 further comprises a third drag chain (not shown in the figure), which has a fifth end and a sixth end disposed opposite to each other, the fifth end is connected to the setting base 260, and the sixth end is connected to the mounting base 310, and the third drag chain is used to pass through the plurality of third pipe fittings 165 and / or the main pipe 150.

[0106] In the embodiment, the second drag chain is used to pass through the plurality of third pipes 165 and / or the total pipe 150. When the carrying table assembly 110 moves relative to the setting base 260 in the second direction, the second drag chain can drive the third pipes 165 and / or the total pipe 150 to move to adapt to the movement of the carrying table assembly 110. Compared with the scheme that the third pipes 165 and / or the total pipe 150 are fixed to the setting base 260 or the mounting seat 310, the scheme of the present application can avoid the third pipes 165 and the three-way joint 166 from pulling each other, can avoid the third pipes 165 and the total pipe 150 from pulling each other, and can avoid the total pipe 150 and the negative pressure mechanism 140 from pulling each other. Similarly, when the setting base 260 moves relative to the mounting seat 310 in the first direction, the third drag chain can drive the third pipes 165 and / or the total pipe 150 to move to adapt to the movement of the setting base 260. Further, in addition, the second drag chain and the third drag chain can physically protect the third pipes 165 and the three-way joint 166, can avoid the third pipes 165 and the three-way joint 166 from being crushed, ensure the communication of the gas path between the three-way joint 166, the third pipes 165, the total pipe 150 and the negative pressure mechanism 140, and prolong the service life of the third pipes 165 and / or the total pipe 150, so as to ensure the adsorption effect of the first adsorption assembly 120 and the second adsorption assembly 130 on the sample to be repaired 400, and improve the use performance of the sample setting device 100.

[0107] In the present application, the phrase "embodiment" or "embodiments" means that the specific features, structures, or characteristics described in connection with the embodiment can be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily all refer to the same embodiment, nor is it necessarily mutually exclusive of other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in the present application can be combined with other embodiments. In addition, it should be understood that the features, structures or characteristics described in the embodiments of the present application can be combined with each other without contradiction, to form another embodiment which does not deviate from the spirit and scope of the technical scheme of the present application.

[0108] Finally, it should be pointed out that the above embodiments are only used to illustrate the technical scheme of the present application and not to limit it. Although the present application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that the technical scheme of the present application can be modified or replaced by equivalents without deviating from the spirit and scope of the technical scheme of the present application.

Claims

1. A sample setting device, characterized by, The sample setting device comprises: a bearing table assembly, a first adsorption assembly arranged on the bearing table assembly, the first adsorption assembly having a plurality of first adsorption holes arranged in a first direction; a second adsorption assembly arranged on the same side of the bearing table assembly as the first adsorption assembly in a second direction, the second adsorption assembly being movable relative to the bearing table assembly in the second direction towards or away from the first adsorption assembly, the second adsorption assembly having a plurality of second adsorption holes arranged in the first direction; wherein the first direction intersects the second direction; and a negative pressure mechanism in communication with the plurality of first adsorption holes and the plurality of second adsorption holes respectively, for enabling the plurality of first adsorption holes and the plurality of second adsorption holes to be in a negative pressure state, thereby adsorbing the sample to be repaired.

2. The sample setup apparatus of claim 1, wherein, The first adsorption assembly comprises a first mounting plate and a first adsorption plate arranged in a third direction, the first mounting plate being arranged on the bearing table assembly, the first adsorption plate being arranged on the surface of the first mounting plate away from the bearing table assembly, the first adsorption plate having the plurality of first adsorption holes, and the first adsorption holes penetrating through the first adsorption plate in the third direction on two opposite surfaces, the plurality of first adsorption holes comprising a plurality of first groups of adsorption holes, each first group of adsorption holes comprising at least one first adsorption hole, the first adsorption plate and the first mounting plate enclosing a plurality of first cavities arranged in a spaced manner, the plurality of first cavities being in communication with the negative pressure mechanism respectively, each first cavity being in communication with a first group of adsorption holes, and different first cavities being in communication with different first groups of adsorption holes; The second adsorption assembly comprises a second mounting plate and a second adsorption plate arranged in a third direction, the second mounting plate being arranged on the bearing table assembly, the second adsorption plate being arranged on the surface of the second mounting plate away from the bearing table assembly, the second adsorption plate having the plurality of second adsorption holes, and the second adsorption holes penetrating through the second adsorption plate in the third direction on two opposite surfaces, the plurality of second adsorption holes comprising a plurality of second groups of adsorption holes, each second group of adsorption holes comprising at least one second adsorption hole, the second adsorption plate and the second mounting plate enclosing a plurality of second cavities arranged in a spaced manner, the plurality of second cavities being in communication with the negative pressure mechanism respectively, each second cavity being in communication with a second group of adsorption holes, and different second cavities being in communication with different second groups of adsorption holes; wherein the third direction intersects the first direction and the second direction respectively.

3. The sample setup apparatus of claim 2, wherein, The sample setting device further comprises a total pipe and a plurality of connecting assemblies, the total pipe is matched with each of the connecting assemblies, and is used for connecting the negative pressure mechanism with one of the first chambers and one of the second chambers respectively, and the connecting assemblies are matched with the first chambers and the second chambers one by one respectively; the connecting assembly comprises a first connecting piece, a second connecting piece, a first pipe piece, a second pipe piece, a third pipe piece and a tee joint, the first connecting piece is connected with the first chamber, opposite ends of the first pipe piece are connected with the first connecting piece and the tee joint respectively, the second connecting piece is connected with the second chamber, opposite ends of the second pipe piece are connected with the second connecting piece and the tee joint respectively, opposite ends of the third pipe piece are connected with the tee joint and the total pipe respectively, and one end of the total pipe, which is away from the tee joint, is connected with the negative pressure mechanism.

4. The sample setup apparatus of claim 3, wherein, The connecting assembly further comprises a switch piece, the switch piece is arranged on the third pipe piece, and is used for controlling the connection or disconnection between the negative pressure mechanism and the tee joint.

5. The sample setup apparatus of claim 4, wherein, The sample setting device further comprises a vacuum detector, the vacuum detector is arranged on the total pipe, and the vacuum detector is matched with the switch piece to detect the vacuum air tightness of each of the first chambers and the second chambers.

6. The sample arrangement device according to any one of claims 1 to 5, characterized in that The sample setting device further comprises a guide piece and a stop piece, the guide piece is arranged on the bearing table assembly and extends along a second direction, and the second adsorption assembly is slidably connected with the guide piece along the second direction; the stop piece is connected with the second adsorption assembly, the stop piece has a first state and a second state relative to the guide piece, when the stop piece is in the first state, the stop piece locks the guide piece, and the relative positions of the second adsorption assembly and the bearing table assembly are fixed; when the stop piece is in the second state, the stop piece is unlocked with the guide piece, so that the second adsorption assembly can move relative to the bearing table assembly.

7. The sample arrangement device according to any one of claims 2 to 5, characterized in that, The sample setting device comprises a first horizontal adjusting mechanism, the first horizontal adjusting mechanism comprises a plurality of first adjusting assemblies, the plurality of first adjusting assemblies are arranged at intervals on the first mounting plate, and the plurality of first adjusting assemblies are matched to adjust the levelness of the first adsorption plate.

8. The sample setup apparatus of claim 7, wherein, Each of the first adjusting assemblies comprises a first adjusting piece, a locking piece and a first fixing piece, the first adjusting piece is sequentially arranged through the locking piece and the first mounting plate, and the first adjusting piece is threadedly connected with the locking piece and the first mounting plate respectively, the first adjusting piece penetrates through the surface of the first mounting plate, which is away from the locking piece, and abuts against the bearing table assembly; the first adjusting piece is used for adjusting the relative positions of the bearing table assembly and the first mounting plate, the locking piece locks the first adjusting piece after the first mounting plate and the bearing table assembly are in a preset position; and the first fixing piece is sequentially arranged through the first adjusting piece and the bearing table assembly to limit the relative positions of the first adjusting piece and the bearing table assembly.

9. The sample arrangement device according to any one of claims 2 to 5, characterized in that, The sample setting device further comprises a limiting plate, which comprises a first sub-plate and a second sub-plate connected by bending, the first sub-plate is connected to the bearing plate assembly, and the second sub-plate is connected to the side of the first mounting plate away from the second adsorption assembly.

10. The sample arrangement device according to any one of claims 2 to 5, characterized in that, The bearing table assembly comprises a first bearing plate and a second bearing plate, the first bearing plate and the second bearing plate are arranged in a third direction in a stacked manner, and the side of the second bearing plate away from the first bearing plate is used for arranging the first adsorption assembly and the second adsorption assembly. The sample setting device further comprises a second horizontal adjusting mechanism, which comprises a penetrating piece and a plurality of second adjusting assemblies, the penetrating piece and the plurality of second adjusting assemblies are arranged around the outer periphery of the second bearing plate, and the penetrating piece and the plurality of second adjusting assemblies are matched to adjust the levelness of the second bearing plate. The penetrating piece is used for connecting the first bearing plate and the second bearing plate, the second adjusting assembly comprises a second adjusting piece and a second fixing piece, the second adjusting piece is penetrated in the second bearing plate and is threadedly connected with the second bearing plate, the side of the second adjusting piece away from the second bearing plate abuts against the first bearing plate, the second adjusting piece is used for adjusting the relative position of the first bearing plate and the second bearing plate, the second fixing piece is penetrated in the second adjusting piece and the first bearing plate in sequence, and the relative position of the first bearing plate and the second bearing plate is limited.

11. A laser repair system, characterized by, The laser repair system comprises: The sample setting device according to any one of claims 1 to 10 is used for setting a sample to be repaired; A mounting seat is used for bearing the sample setting device, and the sample setting device is movable relative to the mounting seat in a first direction; A stand is connected to the mounting seat and is arranged on the same side of the mounting seat and spaced apart from the sample setting device; and A laser repair piece is connected to the stand and is arranged corresponding to the sample setting device to repair the sample to be repaired.

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