Sheet grinding clamp and sheet grinding device

Abstract

The utility model discloses a thin sheet polishing clamp which enables a thin sheet to rub on a friction surface. The thin sheet polishing clamp is characterized in that the thin sheet polishing clamp comprises two clamping pieces and a sliding matching piece, a thin sheet is arranged between the two clamping pieces, the clamping pieces are provided with installation parts for installing the sliding matching piece, the sliding matching piece can move along the installation parts, and the sliding matching piece moves on the installation parts so that the angle of the thin sheet relative to a friction face can be changed. The utility model further discloses a sheet polishing device. According to the polishing sheet clamp and the sheet polishing device, the polishing angle of the sheet can be adjusted, the working efficiency is improved, the polishing angle is guaranteed, and the polishing plane is smooth; in addition, the polishing sheet clamp and the sheet polishing device can be used for polishing chamfers and planes.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of wafer processing, in particular to a clamp and device for polishing micro wafer. BACKGROUND

[0002] At present, the clamp needs to be used when polishing the micro wafer, but the clamp in the prior art cannot adjust the angle of clamping the workpiece, thereby causing the problem of inconvenient operation when polishing the micro wafer.

[0003] The micro wafer can be a wafer with small size in the prior art, for example, a small piece-shaped structure that can be held by hand, or a smaller wafer that cannot be held by hand. If the micro wafer plane is not polished, the equipment workpiece contact will be poor, leading to unstable equipment production factors. If the micro wafer chamfer is not polished or the polishing angle is not standardized, when installed and used on the equipment, it will cause uncontrollable factors on the quality of the products produced by the equipment.

[0004] The micro wafer can be a micro soldering sheet. There are two reasons for polishing the micro soldering sheet: removing impurities and oil stains on the surface of the soldering sheet to prevent short circuit, damage to the product and the soldering sheet itself; polishing the chamfer of the micro soldering sheet is to make the two sides of the soldering sheet smooth to prevent the copper wire from being broken during welding, and to facilitate the control of the size of the welding scar and the firmness of the welding spot.

[0005] At present, there is no special tool in the prior art, and only manual polishing can be performed, which easily leads to inaccurate chamfer angle and affects subsequent use.

[0006] Therefore, it is urgent to design an angle-adjustable clamp for polishing wafer. UTILITY MODEL CONTENTS

[0007] The utility model discloses a kind of angle-adjustable clamps to overcome the problem of inaccurate polishing angle.

[0008] The utility model provides a wafer polishing clamp, the wafer is rubbed on friction surface by the polishing clamp;The polishing clamp includes two clamping pieces and sliding fit piece,

[0009] The two clamping pieces are respectively first clamping piece and second clamping piece,

[0010] The first clamping piece and the second clamping piece cooperate with each other, and the wafer is arranged between the two clamping pieces,

[0011] One of the two clamping pieces is provided with a sliding fit piece, or both are provided with a sliding fit piece,

[0012] The clamping piece provided with the sliding fitting part is provided with a mounting part for mounting the sliding fitting part, the sliding fitting part can move along the mounting part, and the movement of the sliding fitting part on the mounting part changes the angle of the sheet relative to the friction surface.

[0013] The first clamping piece and the second clamping piece can be arranged in an up-down mode or a left-right mode.

[0014] The sliding fitting part can drive the clamp to move in a friction sliding mode.

[0015] The sheet polishing device can be composed of two parts or a large device.

[0016] The clamp can be used alone in manual polishing or used as an automatic polishing component in a sheet polishing device.

[0017] In some embodiments, the first clamping piece is provided with a first sliding fitting part which is a pulley block, and / or the second clamping piece is provided with a second sliding fitting part which is a pulley block.

[0018] The mounting part is a mounting through hole, and the sliding fitting part moves along the mounting through hole.

[0019] The sliding fitting part is arranged at the rear part of the corresponding clamping piece.

[0020] The mounting part is provided with an adjustment scale.

[0021] The first clamping piece and the second clamping piece are made of transparent material or metal material.

[0022] The adjustment scale is arranged to facilitate the adjustment and reference of technicians.

[0023] In some embodiments, the sliding fitting part can be arranged at the front part of the corresponding clamping piece.

[0024] In some embodiments, the sliding fitting is a pulley set, which comprises a roller mounting assembly, the roller mounting assembly comprising a first roller and a first mounting rod, the first roller being mounted on the mounting through hole of the corresponding clamping piece by the first mounting rod,

[0025] The pulley set comprises two or more roller mounting assemblies.

[0026] The first mounting rod and the mounting through hole can be in sliding fit or in threaded fit.

[0027] In some embodiments, the first mounting rod is provided with a first spring.

[0028] And / or, the first mounting rod is provided with a first bearing.

[0029] The first mounting rod and the mounting through hole can be provided with a spring for adjusting the mounting pressure or providing cushioning effect during use.

[0030] The first bearing is used to adjust the rotational friction of the first mounting rod.

[0031] The roller can rotate in one direction to polish the sheet in a predetermined direction.

[0032] The roller can be a universal wheel for polishing the sheet in other directions.

[0033] In some embodiments, the first clamping piece and / or the second clamping piece is provided with a groove at the end, which is a sheet positioning groove for installation and positioning of the sheet during planar polishing.

[0034] In some embodiments, the groove is rectangular, circular, M-shaped, diamond-shaped, triangular, a combination of triangular and rectangular, a combination of circular and rectangular.

[0035] The groove is used for installation or positioning of the sheet, and according to the shape of the sheet, a suitable shape for sheet processing can be selected. The groove can be provided with holes or slots or extra space for easy taking and placing of the sheet.

[0036] The hole or slot is selected to pass through the clamping piece from one side of the groove to the end of the clamping piece, and the sheet is taken out by a needle-shaped piece passing through the hole or slot. The taking method can be pushing the sheet or lifting the sheet.

[0037] The groove can be provided with an inclined surface, so that the polishing position of the sheet corresponds to the higher position of the inclined surface, facilitating planar polishing.

[0038] The groove at the end of the first clamping piece and the groove at the end of the second clamping piece can be the same or different. The two grooves can be different in shape, depth or size.

[0039] In some embodiments, the wafer polishing clamp further comprises a connecting shaft, the connecting shaft is arranged in the through hole formed in the middle part of the first and second clamping pieces to achieve the rotational connection between the two clamping pieces.

[0040] And / or,

[0041] The inner part of the first and second clamping pieces is provided with a spring fixing part, a second spring is fixed on the spring fixing part of the first and second clamping pieces, the first end of the second spring is arranged on the spring fixing part of the first clamping piece, and the second end of the second spring is arranged on the spring fixing part of the second clamping piece.

[0042] The wafer polishing clamp connects the first and second clamping pieces through the connecting shaft, which facilitates the opening and closing of the clamp.

[0043] The second spring is used to support the first and second clamping pieces to provide a stable clamping force.

[0044] In some embodiments, the wafer polishing clamp further comprises: the spring fixing part is a spring fixing hole or a spring fixing column;

[0045] And / or, the spring fixing hole or spring fixing column is arranged in the middle part of the corresponding clamping piece.

[0046] In some embodiments, the second clamping piece is provided with a buckle structure near one end of the first clamping piece; the buckle structure comprises a clamping hook and a clamping block; the clamping hook is connected with the clamping block, and the clamping hook and the clamping block are an integral part, or the clamping hook and the clamping block are movably connected.

[0047] And / or, the first clamping piece is provided with a wafer placing part for placing the wafer.

[0048] In some embodiments, the first end of the first mounting rod is provided with a clamping groove, the clamping groove is used for adjusting the position of the first mounting rod, and the first mounting rod is screwed with the mounting through hole;

[0049] Or, one end of the first mounting rod is provided with a push-pull handle; the push-pull handle is used to push or pull the first mounting rod.

[0050] The push-pull handle can quickly adjust the position of the first mounting rod relative to the mounting through hole.

[0051] In some embodiments, the second end of the first mounting rod is provided with a U-shaped frame, and the U-shaped frame is provided with a roller.

[0052] In some embodiments, the wafer is a micro wafer.

[0053] The sheet clamp can be used for common sheets and micro-sheets of precision instruments.

[0054] The micro-sheets can be small sheets in the prior art, such as small sheet structures that can be held by hand, or smaller sheets that cannot be held by hand. The micro-sheets can be micro-wafers.

[0055] The width of the sheet can be 0.01 cm to 10 cm, preferably 0.5 cm, 1 cm, 2 cm.

[0056] The width of the micro-sheets can be 0.01-1.5 cm, preferably 0.3 cm, 0.5 cm, 0.7 cm, 0.8 cm.

[0057] The sheet polishing device comprises the sheet polishing clamp, and further comprises a friction surface fixing device and / or a friction surface adjusting device.

[0058] The sheet polishing device has the following beneficial effects:

[0059] 1. The angle-adjustable clamp for polishing sheets is provided, the clamp is provided with a pulley block on a clamping piece, and the pulley block can move along the direction of the corresponding mounting through hole, so that the angle of the clamping piece relative to the friction surface is adjusted, and the technical problem that the angle of the clamping workpiece cannot be adjusted in the prior art, resulting in inaccurate polishing angle, is solved.

[0060] 2. The sheet polishing clamp and device can also perform chamfer polishing and plane polishing.

[0061] 3. The sheet polishing clamp and device improve work efficiency, guarantee polishing angle, and polish flat plane.

[0062] 4. The sheet polishing clamp and device improve work efficiency, guarantee polishing angle, and polish flat plane.

[0063] 5. The sheet polishing clamp and device improve the stability of clamping the sheet and the stability of the device during polishing through the setting of the clamping hook. BRIEF DESCRIPTION OF DRAWINGS

[0064] Figure 1 The overall structure diagram of the clamp is provided for the embodiments of the utility model;

[0065] Figure 2 The side view of the clamp is provided for the embodiments of the utility model;

[0066] Figure 3 The structure diagram of the first clamp is provided for the embodiments of the utility model;

[0067] Figure 4 A structure schematic view of the second clamp provided by the embodiment of the utility model;

[0068] Figure 5 A side view of the first clamp provided by the embodiment of the utility model;

[0069] Figure 6 A side view of the second clamp provided by the embodiment of the utility model;

[0070] Figure 7 A whole structure back view of the clamp provided by the embodiment of the utility model;

[0071] Figure 8 A schematic view of the sliding cooperation piece provided by the embodiment of the utility model;

[0072] Figure 9 A bottom view of the sliding cooperation piece provided by the embodiment of the utility model;

[0073] Figure 10 A top view of the sliding cooperation piece provided by the embodiment of the utility model;

[0074] The reference signs are represented as:

[0075] 1, sheet polishing clamp;2, first clamp;3, second clamp;4, first sliding cooperation piece;5, second sliding cooperation piece;6, connecting shaft;7, holding part;8, sheet placing part;10, friction surface;12, 13, spring fixing hole;14, spring fixing column;21, groove;41, 51, mounting part;42, first mounting rod;43, first roller;45, clamping groove;46, U-shaped frame;47, nail;48, roller mounting hole;52, clamping groove. DETAILED DESCRIPTION

[0076] The technical solutions in the utility model will be described in detail and completely in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by the ordinary skilled in the art without creative labor are within the protection scope of the utility model.

[0077] The embodiments of the application will be further described in combination with the drawings and embodiments.

[0078] As Figure 1 , 2As shown, this utility model discloses an angle-adjustable thin-sheet grinding fixture 1, which allows the thin sheet to rub against the friction surface 10. The grinding fixture 1 includes two clamping pieces, namely a first clamping piece 2 and a second clamping piece 3. The first clamping piece 2 and the second clamping piece 3 cooperate with each other, and the thin sheet is disposed between the two clamping pieces. One of the two clamping pieces has a sliding engagement member or both of them have sliding engagement members. The sliding engagement member 4 can move along the mounting part 41, and the movement of the sliding engagement member 4 on the mounting part 41 causes the angle of the thin sheet relative to the friction surface 10 to change.

[0079] The first clamping piece 2 and the second clamping piece 3 can be arranged vertically or horizontally. The specific arrangement of the first clamping piece 2 and the second clamping piece 3 is related to the position of the thin sheet to be processed or the structure of the thin sheet grinding device.

[0080] The sliding engagement component can be driven by the roller 43 to move the clamp, or it can be driven by frictional sliding motion. The sliding engagement component only needs to enable the clamp to slide in a certain direction.

[0081] The frictional sliding can be achieved by the cooperation of a slider and a groove.

[0082] like Figures 1-4 As shown, the first clamping piece 2 has a first sliding engagement member 4, which is a pulley assembly, and / or the second clamping piece has a second sliding engagement member 5, which is a pulley assembly;

[0083] The mounting portions 41 and 51 are mounting through holes, and the sliding fitting moves along the mounting through holes;

[0084] The sliding fit is located at the tail of the corresponding clamping piece.

[0085] like Figures 8-10 As shown, the sliding fit is a pulley system, which includes a roller mounting assembly. The roller mounting assembly includes a first roller 43 and a first mounting rod 42. The first roller 43 is mounted to the mounting through hole of the first clamping piece 2 or the mounting through hole of the second clamping piece 3 via the first mounting rod 42.

[0086] The pulley block includes two or more roller mounting combinations.

[0087] The first mounting rod 42 and the mounting through hole can be either a sliding fit or a threaded fit.

[0088] Preferably, the end of the first mounting rod 42 engages with the U-shaped frame 46, and the first roller 43 is installed inside the U-shaped frame 46. The first mounting rod 42 is attached to the U-shaped frame by a nail 47.

[0089] The first mounting rod 42 is provided with a first spring.

[0090] The first mounting rod is provided with a first bearing. The first bearing is used to adjust the rotating friction of the first mounting rod.

[0091] A spring can be arranged between the first mounting rod 42 and the mounting through hole, which is used to adjust the mounting pressure or provide a buffering effect during use.

[0092] The roller 43 can rotate in one direction to polish the sheet in a predetermined direction.

[0093] The roller 43 can be a universal wheel for polishing the sheet in other directions.

[0094] The first sliding fitting part can include two or more roller mounting combinations. When the number of roller mounting combinations is even, the roller mounting combinations are symmetrically mounted on the first clamp 2; or the roller mounting combinations are uniformly mounted on the first clamp 2. The first sliding fitting part can include rollers of different sizes. According to the specific size, different positions of the clamp are set. The setting mode of multiple rollers can increase the stability of rolling and avoid the movement jam caused by the wear of a roller.

[0095] In some embodiments, a recess 21 is formed at the end of the first clamping piece 2 and / or the second clamping piece 3. The recess 21 is a sheet positioning groove, which is used for installation and positioning of the sheet during planar polishing.

[0096] In some embodiments, the recess 21 is rectangular, circular, M-shaped, diamond-shaped, triangular, a combination of triangular and rectangular, a combination of circular and rectangular.

[0097] The recess 21 is used for installation or positioning of the sheet. According to the shape of the sheet, a suitable shape for sheet processing can be selected. The recess 21 can be provided with holes, grooves or excess space for easy taking and placing of the sheet.

[0098] The hole or groove is selected to pass through the clamping piece from one side of the recess 21 to one end of the clamping piece, and the sheet is taken out by a needle-shaped part passing through the hole or groove. The taking method can be pushing the sheet or lifting the sheet.

[0099] The recess 21 can be provided with an inclined surface, so that the polishing position of the sheet corresponds to the higher position of the inclined surface, facilitating planar polishing.

[0100] The recess 21 at the end of the first clamp 2 and the recess 21 at the end of the second clamp 2 can be the same or different. The two recesses can be different in shape, depth or size.

[0101] In some embodiments, the thin-plate grinding fixture 1 further includes a connecting shaft 6; the connecting shaft 6 passes through a through hole formed in the middle part of the first clamping piece 2 and the second clamping piece 3 to realize the rotational connection between the two clamping pieces.

[0102] In some embodiments, both the first clip 2 and the second clip 3 have spring fixing members inside. The second spring is fixed to the spring fixing members on the first clip 2 and the second clip 3. The first end of the second spring is disposed in the spring fixing member of the first clip 2, and the second end of the second spring is disposed in the spring fixing member of the second clip 3.

[0103] The thin-plate grinding fixture connects the first and second clamping plates via a connecting shaft, facilitating the opening and closing of the fixture.

[0104] The second spring is used to support the first clamp 2 and the second clamp 3 to provide a stable clamping force.

[0105] In some embodiments, the spring fixing member is a spring fixing hole 13 and / or a spring fixing post 14.

[0106] In some embodiments, the spring fixing hole 13 or the spring fixing post 14 is located in the middle of the corresponding clip.

[0107] In some implementations, such as Figure 2 , 5 As shown in Figure 6, the second clamping piece has a snap-fit ​​structure at one end near the first clamping piece; the snap-fit ​​structure includes a hook 71 and a locking block 72; the locking block is fixed on the second clamping piece, and the hook 71 is connected to the locking block 72. The hook provides clamping stability after the first clamp and the second clamp are engaged.

[0108] In some embodiments, a slot 45 is provided at the first end of the first mounting rod 42, the slot 45 being used to adjust the position of the first mounting rod, and the first mounting tube being threadedly engaged with the mounting through hole;

[0109] In some embodiments, one end of the first mounting rod is provided with a push-pull handle; the push-pull handle is used to push or pull the first mounting rod. The function of the push-pull handle is to quickly adjust the position of the first mounting rod relative to the mounting through hole, which facilitates user operation and improves work efficiency.

[0110] In some embodiments, the sheet is a microsheet.

[0111] The sheet clamp can be used for ordinary sheets or for miniature sheets for precision instruments.

[0112] The micro sheet can be a small sheet in the prior art, such as a small sheet structure that can be held by hand, or a smaller sheet that cannot be held by hand. The micro sheet can be a micro soldering sheet.

[0113] The width of the sheet can be 0.01cm to 10cm, preferably 0.5cm, 1cm, 2cm.

[0114] The width of the micro sheet can be 0.01-1.5cm, preferably 0.3cm, 0.5cm, 0.7cm, 0.8cm.

[0115] In the utility model, through the setting of the first sliding fit part 4 and the second sliding fit part 5, a lever-like structure is formed between the upper and lower clamping pieces. Since the first sliding fit part 4 and the second sliding fit part 5 can move along the direction of the corresponding mounting through hole, the length of the lever structure can be changed by the sliding fit part, so that the grinding angle of the friction sheet can be adjusted.

[0116] Specifically, when the first sliding fit part 4 moves to the inside of the clamp, the angle of the sheet relative to the friction surface 10 becomes smaller, and the angle adjustment of the sheet and the friction surface 10 is realized. Similarly, when the first sliding fit part 4 moves to the outside of the clamp, that is, the first mounting rod 42 moves to the outside of the clamp, the angle of the sheet relative to the friction surface 10 becomes larger, and the angle adjustment of the sheet and the friction surface 10 is realized.

[0117] Similarly, the second sliding fit part 5 and the first sliding fit part 4 have the same angle adjustment mode.

[0118] According to the grinding needs, one of the first clamping piece and the second clamping piece can be selected on the upper side.

[0119] As an optional embodiment, the sheet grinding clamp further comprises a connecting shaft 6; the connecting shaft 6 is arranged in the through hole formed in the middle part of the upper and lower clamping pieces to realize the rotary connection between the upper and lower clamping pieces. In this way, a rotary connection structure can be formed between the upper and lower clamping pieces, so that the user can conveniently adjust the angle of the clamped workpiece.

[0120] As an optional embodiment, the second sliding fit part 5 has the same structure as the first sliding fit part 4. In this embodiment, the structure of the first sliding fit part 5 and the second sliding fit part 4 is completely consistent, only the direction is opposite, and the setting position is different. This setting method can ensure that the clamped workpiece is always located at the center position of the upper and lower clamping pieces, and avoid eccentricity.

[0121] As an optional embodiment, a sealing ring is arranged between the first mounting rod and the first bearing. In this embodiment, the sealing ring can play a dustproof role.

[0122] Those skilled in the art can understand that the above-mentioned embodiments can be freely combined and superimposed without conflict.

[0123] The above merely describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application. The above merely describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A thin sheet grinding fixture, wherein the grinding fixture causes the thin sheet to rub against a friction surface; characterized in that: The thin-film grinding fixture includes two clamping plates and a sliding mating component. The two clips are the first clip and the second clip, respectively. The first and second clips cooperate with each other, and a thin sheet is placed between the two clips. One of the two clamping pieces is provided with a sliding engagement component, or both of them are provided with sliding engagement components. The clip with a sliding fit has a mounting part for mounting the sliding fit. The sliding fit can move along the mounting part, and the movement of the sliding fit on the mounting part causes the angle of the thin plate relative to the friction surface to change.

2. The thin-sheet grinding fixture as described in claim 1, characterized in that, The first clamping piece has a first sliding engagement member, which is a pulley system, and / or the second clamping piece has a second sliding engagement member, which is also a pulley system; And / or, the mounting portion is a mounting through hole, and the sliding fit member moves along the mounting through hole; And / or, the sliding mating member is disposed at the rear of the corresponding clamping piece; And / or, the mounting part is provided with an adjustment scale; And / or, the first clip and the second clip are made of transparent material or metal material; And / or, the sheet grinding fixture further includes a connecting shaft; the connecting shaft passes through a through hole formed in the middle of the first clamping piece and the second clamping piece to realize a rotational connection between the two clamping pieces.

3. The thin-sheet grinding fixture as described in claim 2, characterized in that, The sliding fit component is a pulley system, which includes a roller mounting assembly. The roller mounting assembly includes a first roller and a first mounting rod. The first roller is mounted to the mounting through hole of the corresponding clamping piece via the first mounting rod. The pulley block includes two or more roller mounting combinations.

4. The thin-sheet grinding fixture as described in claim 3, characterized in that, A first spring is provided on the first mounting rod; And / or, a first bearing is provided on the first mounting rod; And / or, both the first clip and the second clip have spring fixing members inside, the second spring is fixed to the spring fixing members on the first clip and the second clip, the first end of the second spring is disposed in the spring fixing member of the first clip, and the second end of the second spring is disposed in the spring fixing member of the second clip.

5. The sheet grinding fixture as described in any one of claims 1-4, characterized in that, The first clamping piece and / or the second clamping piece have grooves at their ends. The grooves are thin sheet positioning grooves used for installation or positioning during thin sheet surface grinding.

6. The thin-sheet grinding fixture as described in claim 5, characterized in that, The groove can be rectangular, circular, M-shaped, rhomboid, triangular, a combination of triangle and rectangle, or a combination of circle and rectangle.

7. The sheet grinding fixture as described in claim 4, characterized in that, The spring fixing component is a spring fixing hole or a spring fixing post; And / or, the spring fixing hole or spring fixing post is located in the middle of the corresponding clip.

8. The sheet grinding fixture as described in any one of claims 1-4, 6, and 7, characterized in that, The first clip has a sheet placement section for placing a sheet.

9. The sheet grinding fixture as described in claim 3 or 4, characterized in that, The first end of the first mounting rod is provided with a slot, which is used to adjust the position of the first mounting rod. The first mounting rod is threaded into the mounting through hole. Alternatively, the first end of the first mounting rod is provided with a push-pull handle; the push-pull handle is used to push or pull the first mounting rod.

10. The sheet grinding fixture as described in claim 9, characterized in that, The second end of the first mounting rod is provided with a U-shaped frame, and the U-shaped frame is provided with rollers.

11. The sheet grinding fixture as described in any one of claims 1-4, 6, 7 or 10, characterized in that, The sheet is a micro-sheet.

12. A thin-sheet polishing apparatus, characterized in that, The thin-sheet grinding device includes the thin-sheet grinding fixture according to any one of claims 1-11, and the thin-sheet grinding device further includes a friction surface fixing device and / or a friction surface adjusting device.

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