Grinding head auxiliary fixing device and conveying vehicle

Abstract

The utility model provides a grinding head auxiliary fixing device and a conveying vehicle. The grinding head auxiliary fixing device comprises a containing groove and a taking and placing groove. The inner contour of the containing groove is matched with the outer contour of the grinding head, and the containing groove is used for containing the grinding head. The accommodating groove is provided with a plurality of groove bodies which are communicated with one another, the groove bodies are respectively matched with different parts of the grinding head, and the shapes and the sizes of the groove bodies are different; the taking and placing groove is at least formed in one side of the containing groove and at least communicated with one groove body to form a taking and placing space used for taking and placing the grinding head. According to the configuration, the containing groove is additionally formed, so that the grinding head can be placed in the containing groove in the carrying process, and the situation that the grinding head topples over or slides off in the carrying process, and unnecessary damage is caused is avoided; and meanwhile, the pick-and-place groove is formed to form the pick-and-place space, so that an operator can stretch into the pick-and-place space from the pick-and-place groove when picking and placing the grinding head, the grinding head is convenient to lift up or put down, and time and labor are saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor manufacturing, especially a grinding head auxiliary fixing device and conveying vehicle. BACKGROUND

[0002] Chemical mechanical polish (CMP) is widely used in the selective removal of materials to achieve the formation of topography and device structure in the semiconductor field manufacturing, which can remove the excess material on the wafer surface by combining chemical oxidation and mechanical grinding.

[0003] In actual production process, the grinding head and retaining ring of the grinding equipment are usually provided with a certain service life, and the equipment engineer needs to maintain and replace the above-mentioned parts when approaching the service life. During the maintenance process, the grinding head is manually carried by the equipment engineer or carried by using a cart without auxiliary fixing device. Since the grinding head usually weighs 20kg, the above-mentioned carrying method is time-consuming and laborious, and the grinding head is easy to fall and cause bumps during transportation, thereby forming unnecessary damage.

[0004] Therefore, how to save time and labor during the transportation of the grinding head and prevent falling and bumps has become a technical problem to be solved by the person skilled in the art. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a grinding head auxiliary fixing device and conveying vehicle to solve the problem of time-consuming and laborious carrying of the grinding head and easy falling and bumps in the prior art.

[0006] In order to achieve the above-mentioned purpose, the utility model provides a grinding head auxiliary fixing device, which comprises: a containing groove and a taking and placing groove.

[0007] The inner contour of the containing groove is matched with the outer contour of the grinding head, and the containing groove is used for containing the grinding head.

[0008] The containing groove has a plurality of groove bodies in communication with each other, and the groove bodies are matched with different parts of the grinding head respectively, and the shapes and sizes of the groove bodies are different.

[0009] The taking and placing groove is arranged on at least one side of the containing groove and is in communication with at least one of the groove bodies, forming a taking and placing space for taking and placing the grinding head.

[0010] Optionally, the depth of the taking and placing groove is greater than the depth of the groove body in communication therewith.

[0011] Optionally, the grinding head auxiliary fixing device comprises two said taking and placing grooves, and the two said taking and placing grooves are oppositely arranged on two sides of the accommodating groove.

[0012] Optionally, the groove body is a ring groove, and a plurality of said ring grooves are concentrically arranged.

[0013] Optionally, the accommodating groove has a first groove body, the first groove body is located at the center of the accommodating groove, the diameter of the first groove body is matched with the diameter of the valve guide of the grinding head, and the depth of the first groove body is matched with the maximum height of the grinding head.

[0014] Optionally, the accommodating groove has a second groove body, the diameter of the second groove body is matched with the diameter of the connecting part of the grinding head and the retaining ring, and the depth of the second groove body is matched with the height of the connecting part of the grinding head and the retaining ring.

[0015] Optionally, the accommodating groove has a third groove body, and the diameter of the third groove body is matched with the maximum diameter of the grinding head.

[0016] Optionally, the connecting surface between the two adjacent groove bodies is a bevel or an arc surface.

[0017] In order to achieve the above purpose, the utility model embodiment further provides a conveying vehicle, which comprises a vehicle body and a plurality of grinding head auxiliary fixing devices as described above;

[0018] The vehicle body has a top panel, and a plurality of the grinding head auxiliary fixing devices are uniformly arranged on the top panel, wherein the accommodating groove and the taking and placing groove are arranged to be concave from the surface of the top panel.

[0019] Optionally, the vehicle body further has a plurality of cross plates, the plurality of cross plates are arranged in parallel to the top panel along the height direction of the vehicle body, and a plurality of the grinding head auxiliary fixing devices are uniformly arranged on the cross plates.

[0020] Compared with the existing grinding head carrying mode, the grinding head auxiliary fixing device and the conveying vehicle provided by the application have the following advantages:

[0021] The grinding head auxiliary fixing device provided by the application adds the accommodating groove matched with the outer contour of the grinding head, so that the grinding head can be placed in the accommodating groove during carrying, and the grinding head is prevented from being tilted or falling off during carrying, thereby avoiding unnecessary damage. Meanwhile, the taking and placing groove is arranged on at least one side of the accommodating groove, and the taking and placing groove is communicated with at least one groove body in the accommodating groove to form a taking and placing space, so that the operator can extend into the taking and placing space from the taking and placing groove when taking and placing the grinding head, thereby facilitating lifting or placing the grinding head and saving time and effort. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 A structure schematic view of the auxiliary fixing device of the grinding head is provided for the embodiment of the utility model;

[0023] Figure 2 A side view of the auxiliary fixing device of the grinding head is provided for the embodiment of the utility model;

[0024] Figure 3 A top view of the auxiliary fixing device of the grinding head is provided for the embodiment of the utility model;

[0025] Figure 4 A sectional view of the auxiliary fixing device of the grinding head is provided for the embodiment of the utility model;

[0026] Figure 5 A structure schematic view of the first conveying vehicle is provided for the embodiment of the utility model;

[0027] Figure 6 A structure schematic view of the second conveying vehicle is provided for the embodiment of the utility model.

[0028] Among them, the explanation of each figure mark is as follows:

[0029] 10 - accommodating groove; 100 - first groove body; 101 - second groove body; 102 - third groove body;

[0030] 20 - taking and placing groove; 30 - taking and placing space;

[0031] 40 - vehicle body; 400 - top panel; 401 - horizontal plate. DETAILED DESCRIPTION

[0032] In order to make the purpose, advantages and characteristics of the utility model more clear, the utility model is further explained in detail below by combining with the drawings and specific embodiments. It should be noted that the drawings are all very simplified and not drawn according to the proportion, and are only used to facilitate and clearly assist the purpose of explaining the embodiment of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing needs to be different, sometimes different proportions are used.

[0033] As used in this specification, the singular forms "a," "an" and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the context clearly dictates otherwise. The term "and / or" means "and", "or" or both. The term "at least two" generally means "two or more" unless the context clearly dictates otherwise. The terms "first", "second", "third", etc., are used only to describe a certain feature, and do not imply relative importance or a number of the features indicated. Thus, features defined with "first", "second", "third" can explicitly or implicitly include one or at least two of the features. The terms "one end" and "the other end", and "proximal" and "distal" generally refer to two parts corresponding to each other, which not only includes the end points, but also the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrated; it can be directly connected, or indirectly connected through an intermediate medium, or the internal communication or interaction of two elements. In addition, as used in this specification, a component disposed in another component generally only indicates a connection, coupling, cooperation or transmission relationship between the two components, and the two components can be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate component, and cannot be understood as indicating or implying the spatial positional relationship between the two components, i.e. one component can be in any position inside, outside, above, below or one side of another component, unless the context clearly indicates otherwise. The terms "up", "down", "top", "bottom" are generally arranged in the direction of gravity; the terms "vertical direction" generally refer to the direction along the gravity, which is generally perpendicular to the ground, and the terms "horizontal direction" generally refer to the direction parallel to the ground; the specific meaning of the above terms in this specification can be understood according to the specific circumstances by those skilled in the art.

[0034] The utility model discloses a grinding head auxiliary fixing device and conveying car, to solve the problem of time and energy consumption in carrying grinding head in prior art, and easy to dump and produce knock.

[0035] As understood by those skilled in the art, the polishing head and the retaining ring in the polishing device are key factors to ensure the stability and uniformity of the wafer during polishing, wherein the main function of the polishing head is to ensure the uniform contact between the wafer and the polishing pad, thereby optimizing the uniformity and polishing effect of polishing; the main function of the retaining ring is to maintain the stable position of the wafer during the whole polishing process, which can effectively prevent the wafer from unnecessary displacement due to external factors. The polishing head and the retaining ring need to be in direct contact with the wafer during polishing and will be worn out, therefore, a service life is usually set, and the polishing head and the retaining ring need to be maintained and replaced when approaching or reaching the corresponding service life. The cross-sectional shape of the polishing head in the prior art is circular, and the weight is about 20 kg, which needs to be manually or using a trolley without auxiliary fixing device for carrying. Manual carrying is time-consuming and laborious, and when using a trolley for carrying, the polishing head is easy to fall or slide on the trolley without a fixing device, thereby causing unnecessary collision and affecting the service life. Based on this, the embodiment provides a polishing head auxiliary fixing device and a conveying vehicle. By additionally arranging a containing groove matched with the outer contour of the polishing head, the polishing head is placed in the containing groove during transportation, thereby avoiding the falling or sliding of the polishing head during transportation.

[0036] Please refer to Figures 1 to 4 The utility model provides a kind of polishing head auxiliary fixing device, comprising: containing groove 10 and taking and placing groove 20;The inner contour of containing groove 10 is matched with the outer contour of polishing head, for containing polishing head;Containing groove 10 has multiple intercommunicating groove bodies, and groove body is matched with different parts of polishing head respectively, and the shape and size of multiple groove bodies are different respectively;Taking and placing groove 20 is at least arranged in one side of containing groove 10, and at least intercommunicate with one of groove body, form the taking and placing space 30 for taking and placing polishing head.It needs to be explained, the polishing head in the prior art presents circular table shape, and it is provided with a boss in central position, valve guide is installed on the top surface of boss, and installation position connected with retaining ring is arranged on the side wall of boss, and the curvature of boss side wall is not uniform change, therefore, groove body with different shape and size is arranged in containing groove 10, to match polishing head, so that polishing head can be fitted with the groove wall of containing groove 10 when being placed in containing groove 10, to limit the position of polishing head when being disturbed by external environment during transportation, avoid unnecessary collision.

[0037] Preferably, the depth (in Figure 2 and Figure 4 It is the up-down direction) of taking and placing groove 20 is greater than the depth of groove body connected therewith.It needs to be explained, please refer to Figure 2The depth of the taking and placing groove 20 is greater than the depth of the groove body connected thereto, and meanwhile, the opening part of the taking and placing groove 20 coincides with the containing groove 10 and is partially located outside the containing groove 10. Therefore, when the grinding head is placed in the containing groove 10, a gap is left between the grinding head and the bottom of the taking and placing groove 20 to form a taking and placing space 30. Meanwhile, since the opening part of the taking and placing groove 20 is located outside the containing groove 10, the operator or the mechanical arm can extend into the taking and placing space 30 from the opening of the taking and placing groove 20 in the process of taking and placing the grinding head to complete the grasping of the grinding head, thereby saving time and effort.

[0038] Further, referring to Figures 1 to 3 , the grinding head auxiliary fixing device comprises two taking and placing grooves 20 which are oppositely arranged at two sides of the containing groove 10. It should be noted that, in Figure 1 the exemplary embodiment shown, the taking and placing grooves 20 are symmetrically arranged at two sides of the containing groove 10. Considering the weight of the grinding head, the operator can extend hands into the taking and placing space 30 to apply force in the process of taking and placing the grinding head to ensure safety in the carrying process. In other embodiments, the taking and placing grooves 20 can also be one or more, and the angle and distance between the multiple taking and placing grooves 20 are adapted to the angle and size between multiple clamping jaws on the mechanical arm. The present embodiment does not limit this.

[0039] Optionally, referring to Figure 1 , the groove body is an annular groove, and multiple annular grooves are concentrically arranged. In the present embodiment, the groove body is annularly arranged and is adapted to the shape of the grinding head. In other embodiments, the groove body can also be cylindrical, rectangular or other irregular shapes, and those skilled in the art can configure the shape of the groove body according to the actual shape of the grinding head.

[0040] Further, referring to Figure 2 and Figure 4 , the connecting surface between the two adjacent groove bodies is a slope or an arc surface. For example, Figure 2 and Figure 4 , the connecting surface between the two adjacent groove bodies is a slope, and the corresponding slope needs to be selected according to the outer contour of the grinding head. Under the premise of ensuring that the grinding head can be smoothly placed in the containing groove 10, the connecting surface can be fitted to the surface of the grinding head and a certain redundant space is left. In the case of certain disturbances from the outside, the redundant space can allow the grinding head to slightly shake, thereby consuming part of the kinetic energy, reducing the collision force between the grinding head and the containing groove 10, and reducing the probability of unnecessary damage to the grinding head. As a preferred embodiment, in order to better fit the outer contour of the grinding head, the connecting surface between the two adjacent groove bodies can be provided as an arc surface.

[0041] In an optional embodiment, referring to Figures 1 to 4, the accommodating groove 10 has a first groove body 100, which is located in the center of the accommodating groove 10, the diameter (in the direction parallel to the paper surface in Figure 1 and Figure 3 ) of the first groove body 100 is adapted to the diameter of the valve guide of the grinding head, and the depth (in the up-down direction in Figure 2 and Figure 4 ) of the first groove body 100 is adapted to the maximum height of the grinding head. It should be noted that in the embodiment, the valve guide of the grinding head is arranged on the top surface of the aforementioned boss, the valve guide is a round plate-shaped member, the diameter of which is 118 mm, and the maximum height of the grinding head is 95 mm, thus the diameter of the first groove body 100 can be set to be between 119 mm and 121 mm, and the depth of the first groove body 100 can be set to be between 96 mm and 100 mm. In some embodiments, the diameter and the depth of the first groove body 100 can also be other reasonable values, which can be reasonably configured by those skilled in the art according to different grinding heads.

[0042] Further, the accommodating groove 10 has a second groove body 101, the diameter (in the direction parallel to the paper surface in Figure 1 and Figure 3 ) of the second groove body 101 is adapted to the diameter of the connecting part of the grinding head and the retaining ring, and the depth (in the up-down direction in Figure 2 and Figure 4 ) of the second groove body 101 is adapted to the height of the connecting part of the grinding head and the retaining ring. It should be noted that in the embodiment, the mounting position of the retaining ring is arranged on the side wall of the boss of the grinding head, which is lower in height but larger in diameter compared to the valve guide position. As an optional embodiment, the distance from the center of the valve guide to the mounting position of the retaining ring is 120 mm, and the height from the bottom of the grinding head to the mounting position of the retaining ring is 60 mm, thus the diameter of the second groove body 101 can be set to be between 242 mm and 245 mm, and the height of the second groove body 101 is between 62 mm and 65 mm.

[0043] Still further, the accommodating groove 10 has a third groove body 102, the diameter (in the direction parallel to the paper surface in Figure 1 and Figure 3 ) of the third groove body 102 is adapted to the maximum diameter of the grinding head. It should be noted that in the embodiment, the maximum diameter of the grinding head is 360 mm, thus the diameter of the third groove body 102 can be set to be between 380 mm and 400 mm. In the exemplary embodiment shown in Figure 1 , the accommodating groove 10 will also be provided with a groove body between the first groove body 100 and the second groove body 101 for adapting to the outer contour of the grinding head, and in other embodiments, more groove bodies can also be arranged in the accommodating groove 10 to match the outer contour of the grinding head, which is not limited in the embodiment.

[0044] Please refer toFigure 1 、 Figures 5 to 6 The utility model embodiment further provides a conveying vehicle, include: vehicle body 40 and a plurality of above -mentioned abrasive head auxiliary fixing device, vehicle body 40 has top panel 400, top panel 400 is uniformly arranged with a plurality of abrasive head auxiliary fixing device, wherein, the accommodation groove 10 and the taking and placing groove 20 are set down from the surface of top panel 400. With Figure 1 And Figure 5 For example, top panel 400 is uniformly provided with four abrasive head auxiliary fixing devices, and the valve guide position is the top surface when the abrasive head is normally placed, and the valve guide position is the bottom surface when the abrasive head is placed in the accommodation groove 10, that is, the abrasive head is placed upside down in the accommodation groove 10, therefore, the height of the abrasive head corresponds to the depth (in the up-down direction in Figure 5 And Figure 6 ) of the accommodation groove 10. Of course, in other embodiments, top panel 400 can also be provided with other numbers of abrasive head auxiliary fixing devices.

[0045] In this way, by using the above-mentioned abrasive head auxiliary fixing device, the abrasive head can be placed in the accommodation groove 10, avoiding the abrasive head from being overturned or falling off during transportation, causing unnecessary damage; at the same time, the taking and placing space 30 formed by the taking and placing groove 20 facilitates lifting or placing the abrasive head, saving time and effort and improving the efficiency of maintaining the grinding equipment.

[0046] Optionally, the vehicle body 40 further has a plurality of cross plates 401, the plurality of cross plates 401 are arranged in parallel to the top panel 400 along the height direction (in the up-down direction in Figure 5 And Figure 6 ) of the vehicle body 40, and the plurality of cross plates 401 are uniformly arranged with a plurality of abrasive head auxiliary fixing devices. It should be noted that in the exemplary examples shown in Figure 5 And Figure 6 , the vehicle body 40 is provided with multiple layers, each layer is formed by the cross plates 401 along the height direction of the vehicle body 40, and the plurality of abrasive head auxiliary fixing devices can be arranged only on the top layer as shown in Figure 5 , or a certain number of abrasive head auxiliary fixing devices can be arranged on each layer as shown in Figure 6 , and those skilled in the art can reasonably configure according to the number of machines to be maintained.

[0047] In summary, in the abrasive head auxiliary fixing device and the conveying vehicle provided by the utility model embodiment, the abrasive head auxiliary fixing device comprises: an accommodation groove and a taking and placing groove; the inner contour of the accommodation groove is matched with the outer contour of the abrasive head, and the accommodation groove is used for accommodating the abrasive head; the accommodation groove has a plurality of groove bodies in communication with each other, the groove bodies are matched with different parts of the abrasive head respectively, and the shapes and sizes of the groove bodies are different from each other; the taking and placing groove is arranged on at least one side of the accommodation groove and is in communication with at least one groove body, forming a taking and placing space for taking and placing the abrasive head.

[0048] Thus, by additionally arranging the accommodating grooves matched with the outer contour of the grinding head, the grinding head can be placed in the accommodating grooves during the carrying process, so as to avoid the grinding head from falling or sliding during the carrying process, thereby causing unnecessary damage; meanwhile, the taking and placing groove is arranged on at least one side of the accommodating grooves, and the taking and placing groove is communicated with at least one groove body in the accommodating grooves to form a taking and placing space, so that the operator can extend into the taking and placing space from the taking and placing groove when taking and placing the grinding head, thereby facilitating the lifting or placing of the grinding head, saving time and effort.

[0049] The above description is only a description of the preferred embodiments of the present application, and is not any limitation on the scope of the present application, and any modification or modification of the above disclosure by a person skilled in the art belongs to the protection scope of the claims.

Claims

1. An auxiliary fixing device for a polishing head, characterized by, The application relates to a grinding head auxiliary fixing device. The inner contour of the accommodating groove is matched with the outer contour of the grinding head, and the accommodating groove is used for accommodating the grinding head. The accommodating groove has a plurality of groove bodies which are matched with different parts of the grinding head and have different shapes and sizes. The taking-and-placing groove is arranged on one side of the accommodating groove and is communicated with at least one groove body to form a taking-and-placing space for the grinding head. The depth of the taking-and-placing groove is greater than that of the groove body communicated with the taking-and-placing groove.

2. The auxiliary fixing device for the lapping head according to claim 1, characterized in that, The grinding head auxiliary fixing device comprises two taking-and-placing grooves which are arranged on the two sides of the accommodating groove.

3. The auxiliary fixing device of the polishing head according to claim 2, wherein, The groove bodies are annular grooves which are concentrically arranged.

4. The polishing head auxiliary fixation device of claim 1, wherein The accommodating groove has a first groove body which is located at the center of the accommodating groove, the diameter of the first groove body is matched with the diameter of the valve guide of the grinding head, and the depth of the first groove body is matched with the maximum height of the grinding head.

5. The auxiliary fixing device of the polishing head according to claim 4, wherein The accommodating groove has a second groove body which is matched with the connecting part between the grinding head and the retaining ring in diameter and height.

6. The auxiliary fixing device of the polishing head according to claim 5, wherein The accommodating groove has a third groove body which is matched with the maximum diameter of the grinding head.

7. The auxiliary fixing device of the polishing head according to claim 6, wherein The connecting surface between two adjacent groove bodies is a bevel or an arc surface.

8. The auxiliary fixing device of the polishing head according to claim 1, wherein The application relates to a grinding head auxiliary fixing device.

9. A delivery vehicle characterized by, The vehicle body has a top panel which is uniformly provided with a plurality of grinding head auxiliary fixing devices, and the accommodating groove and the taking-and-placing groove are arranged below the surface of the top panel. The vehicle body is further provided with a plurality of horizontal plates which are arranged in parallel to the top panel along the height direction of the vehicle body, and the horizontal plates are uniformly provided with a plurality of grinding head auxiliary fixing devices. ​ 10. The delivery cart of claim 9, wherein, ​

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