Conveying device for semiconductor processing

Abstract

The utility model discloses a conveying device for semiconductor processing, belongs to the technical field of semiconductor processing, and solves the problems that when a V-shaped frame of an existing device is used for turning over semiconductors, a plurality of semiconductors roll over on the V-shaped frame, and then the semiconductors are collided and damaged, the conveying device comprises a rack, a first U-shaped plate is fixedly installed on the top face of the rack, and a second U-shaped plate is fixedly installed on the top face of the rack. A turn-over assembly is arranged below the air drying assembly, grooves distributed in a linear array mode are formed in the outer surface of a conveying belt, a rotating rod on the leftmost side can be driven to rotate through a second motor, and through arrangement of a turn-over rod and an annular gear, when the rotating rod on the leftmost side rotates, the turn-over assembly can turn over the rotating rod on the leftmost side; when the first motor rotates, the other rotating rods can be driven to rotate together in the same rotating direction, then the connecting rods and the turning blocks at the ends of the connecting rods are driven to rotate together, when the turning blocks pass through the interior of the first motor, the turning blocks make contact with the bottom faces of semiconductors conveyed on the surface of the conveying belt, and then the turning blocks continue to rotate; and mutual collision between semiconductors cannot be caused.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, specifically is conveying device for semiconductor processing. BACKGROUND

[0002] Semiconductor refers to the conductivity performance between conductor and insulator at room temperature, and the semiconductor material occupies an important position in electronic industry and is the basis for manufacturing various electronic devices and integrated circuits. They are widely used in radio, television, temperature measuring equipment and the core unit of modern electronic products, and the semiconductor material is usually processed into the shape of circular wafer for the manufacture of integrated circuits.

[0003] Through the search, the application book with patent application No. 202322935903.6 discloses a conveying device for semiconductor processing, which belongs to the field of semiconductor processing. The device comprises a drying box, a conveying belt is rotatably connected inside the drying box, a rotating shaft is rotatably connected in the middle of the conveying belt, a plurality of V-shaped frames are arranged on the outer wall of the rotating shaft, a plurality of drying covers are fixedly connected inside the drying box, a wind pipe is arranged on the top of the drying box, a fan is fixedly connected inside the wind pipe, and the wind pipe and the drying cover are communicated;

[0004] Although the conveying device for semiconductor processing drives the semiconductor to be conveyed through the conveying belt, the semiconductor is turned over through the V-shaped frame to facilitate the drying of the semiconductor, the V-shaped frame of the conveying device for semiconductor processing is prone to cause multiple semiconductors to roll on the V-shaped frame when turning over the semiconductor, and then the semiconductor is damaged by knocking.

[0005] Therefore, we propose a conveying device for semiconductor processing. INVENTION CONTENTS

[0006] In view of the deficiencies of the prior art, the utility model provides a conveying device for semiconductor processing, which solves the problem that the V-shaped frame of the prior art device is prone to cause multiple semiconductors to roll on the V-shaped frame when turning over the semiconductor, and then the semiconductor is damaged by knocking.

[0007] To achieve the above purpose, the utility model realizes the following technical scheme: a conveying device for semiconductor processing, comprising a rack, a rotating roller is rotatably installed on the inner wall of the rack through a bearing ring, a conveying belt is sleeved on the outer surface of the rotating roller, a first motor is fixedly installed on the side wall of the rack, and the output end of the first motor is fixedly connected with one end of the leftmost rotating roller through the side wall of the rack.

[0008] A first U-shaped plate is fixedly installed on the top surface of the rack, a drying assembly is arranged at the top end in the first U-shaped plate, a turning-over assembly is arranged below the drying assembly, and recesses are arranged in a linear array on the outer surface of the conveying belt.

[0009] The turning-over assembly comprises a second motor, a rotating rod, a turning-over rod, a ring gear and a reversing gear, the bottom side of the inner wall of the first U-shaped plate is rotationally provided with rotating rods in linear array through bearing rings, the outer surface of the rotating rod is provided with a turning-over rod, the outer surface of one end of the rotating rod is fixedly provided with a ring gear, and a reversing gear is arranged between adjacent ring gears.

[0010] Preferably, the side wall of the first U-shaped plate is fixedly provided with a second motor, one end of the leftmost rotating rod is fixedly connected to the output end of the second motor through the side wall of the first U-shaped plate, the reversing gear is rotationally provided on the inner wall of the first U-shaped plate through a bearing ring, and the reversing gear is engaged with the ring gear at the adjacent position thereof, wherein the leftmost rotating rod can be driven to rotate through the second motor, the remaining rotating rods can be driven to rotate together through the turning-over rod and the ring gear when the leftmost rotating rod rotates, and the rotating directions of all the rotating rods are the same.

[0011] Preferably, the turning-over rod comprises a connecting rod and a turning block, the connecting rod is fixedly provided on the outer surface of the rotating rod, the connecting rod is arranged in array along the length direction and the circumferential direction of the rotating rod, one end of the connecting rod away from the rotating rod is fixedly provided with a turning block with a rhombic cross section, the connecting rod and the turning block are corresponding to the groove positions, and the width of the connecting rod and the turning block is the same as that of the groove, wherein the connecting rod and the turning block at the end thereof can be driven to rotate together when the rotating rod rotates, the turning block passes through the inside of the first motor when the connecting rod and the turning block rotate, then the turning block contacts the bottom surface of the semiconductor conveyed on the surface of the conveying belt, and the turning block continues to rotate to turn over the semiconductor.

[0012] Preferably, the air-drying assembly comprises a second U-shaped plate, a mounting groove, a fan and an electric heating net, the second U-shaped plate is fixedly provided on the inner wall of the first U-shaped plate, two mounting grooves are formed in the top surface of the second U-shaped plate in symmetrical distribution, the inner wall of the two mounting grooves is fixedly provided with a fan, and the side wall of the second U-shaped plate is fixedly provided with an electric heating net in communication with the power supply through a wire, wherein the electric heating net generates heat after being powered on, the heat generated by the electric heating net can be blown to the semiconductor on the top surface of the conveying belt through the fan, and the semiconductor can be dried.

[0013] Preferably, two air inlets are formed in the top surface of the first U-shaped plate in symmetrical distribution, and the inner wall of the air inlet is fixedly provided with a filter plate, wherein the filter plate can filter the external air.

[0014] The utility model provides a conveying device for semiconductor processing.

[0015] 1. The semiconductor processing conveying device, the leftmost rotating rod can be driven to rotate by the second motor, when the leftmost rotating rod rotates, the remaining rotating rods can be driven to rotate in the same direction by the setting of the turnover rod and the ring gear, and then the connecting rod and the end of the turnover block can be driven to rotate together, when the turnover block passes through the inside of the first motor, the turnover block will contact the bottom surface of the semiconductor conveyed on the surface of the conveyor belt, and then the turnover block continues to rotate, the semiconductor can be turned over, the semiconductor on the top surface of the conveyor belt can be turned over multiple times by the linear array distribution of the rotating rod, the semiconductor can be dried by the air drying assembly, which can improve the drying effect of the semiconductor, and the semiconductor will not be knocked between each other when turning over, the V-shaped frame of the existing device can be used to solve the problem that multiple semiconductors are rolled on the V-shaped frame and then knocked and damaged between each other when turning over the semiconductor;

[0016] 2. The semiconductor processing conveying device, the electric heating net generates heat by being electrified, the heat generated by the electric heating net can be blown to the semiconductor on the top surface of the conveyor belt by the fan, which can accelerate the drying rate of the semiconductor, and the external air can be filtered by the filter plate. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model;

[0018] Figure 2 It is a structural schematic diagram of the air drying assembly of the utility model;

[0019] Figure 3 It is a structural schematic diagram of the turnover assembly of the utility model;

[0020] Figure 4 It is an enlarged structural schematic diagram of A of the utility model Figure 3 .

[0021] In the figure: 1, rack; 2, conveyor belt; 21, groove; 22, first motor; 3, first U-shaped plate; 31, air inlet; 32, filter plate; 4, air drying assembly; 41, second U-shaped plate; 42, mounting groove; 43, fan; 44, electric heating net; 5, turnover assembly; 51, second motor; 52, rotating rod; 53, turnover rod; 531, connecting rod; 532, turnover block; 54, ring gear; 55, reversing gear. DETAILED DESCRIPTION

[0022] Clearly, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0023] Example 1:

[0024] As Figures 1-4As shown: including rack 1, the inner wall of rack 1 is rotatably mounted with rotating roller through bearing ring, the outer surface of rotating roller is sleeved with conveying belt 2, the side wall of rack 1 is fixedly installed with first motor 22, the output end of first motor 22 penetrates the side wall of rack 1 and is fixedly connected with one end of the leftmost rotating roller, the top surface of rack 1 is fixedly installed with first U-shaped plate 3, the top end inside first U-shaped plate 3 is provided with air drying assembly 4, air drying assembly 4 is provided below with turnover assembly 5, the outer surface of conveying belt 2 is provided with grooves 21 arranged in linear array, turnover assembly 5 includes second motor 51, rotating rod 52, turnover rod 53, ring gear 54 and reversing gear 55, the bottom side of the inner wall of first U-shaped plate 3 is rotatably mounted with rotating rod 52 arranged in linear array through bearing ring, the outer surface of rotating rod 52 is provided with turnover rod 53, the outer surface of one end of rotating rod 52 is fixedly sleeved with ring gear 54, reversing gear 55 is arranged between adjacent ring gears 54, the side wall of first U-shaped plate 3 is fixedly installed with second motor 51, the output end of second motor 51 is fixedly connected with one end of the leftmost rotating rod 52 penetrating the side wall of first U-shaped plate 3, reversing gear 55 is rotatably mounted on the inner wall of first U-shaped plate 3 through bearing ring, reversing gear 55 is engaged with ring gear 54 at its adjacent position, turnover rod 53 includes connecting rod 531 and turnover block 532, connecting rod 531 is fixedly installed on the outer surface of rotating rod 52, connecting rod 531 is arranged in array along the length direction and the circumferential direction of rotating rod 52, the end of connecting rod 531 away from rotating rod 52 is fixedly installed with turnover block 532 with rhombus cross section, connecting rod 531 and turnover block 532 are both corresponding to the position of groove 21, the width of connecting rod 531 and turnover block 532 is same with groove 21, the leftmost rotating rod 52 can be rotated through second motor 51, the remaining rotating rods 52 can be rotated in the same direction through the setting of turnover rod 53 and ring gear 54, then connecting rod 531 and turnover block 532 at the end of connecting rod 531 can be rotated, when turnover block 532 passes through the inside of first motor 22, turnover block 532 will contact with the bottom surface of semiconductor transported on the surface of conveying belt 2, then turnover block 532 continues to rotate, which can turn over the semiconductor, the semiconductor on the top surface of conveying belt 2 can be turned over for multiple times through the linear array arrangement of rotating rod 52, the semiconductor can be dried through air drying assembly 4, which is beneficial to improve the drying effect of semiconductor, and the semiconductor will not be bumped when being turned over;

[0025] Example 2:

[0026] As Figures 1-2The air-drying assembly 4 includes a second U-shaped plate 41, a mounting groove 42, a fan 43 and an electric heating net 44, the second U-shaped plate 41 is fixedly installed on the inner wall of the first U-shaped plate 3, two symmetrically-distributed mounting grooves 42 are formed in the top surface of the second U-shaped plate 41, the fan 43 is fixedly installed on the inner wall of the two mounting grooves 42, the electric heating net 44 is fixedly installed on the side wall of the second U-shaped plate 41 and is connected with the power supply through a wire, two symmetrically-distributed air inlets 31 are formed in the top surface of the first U-shaped plate 3, the filter plate 32 is fixedly installed on the inner wall of the air inlet 31, the electric heating net 44 generates heat by being electrified, the heat generated by the electric heating net 44 can be blown to the semiconductor on the top surface of the conveying belt 2 by the fan 43, and the drying rate of the semiconductor can be accelerated, and the external air can be filtered by the filter plate 32.

[0027] The working principle and use process of the utility model are as follows: the semiconductor processing conveying device, when using, the first motor 22 drives the rotating roller on the inner wall of the rack 1 to rotate, which can drive the conveying belt 2 to rotate along the surface of the rotating roller, and then the semiconductor is placed on the top surface of the conveying belt 2, so that the semiconductor can be conveyed, and the electric heating net 44 and the fan 43 are started at the same time, the heat generated by the electric heating net 44 is blown to the top surface of the conveying belt 2 by the fan 43, when the semiconductor enters the inside of the first U-shaped plate 3, the top surface of the semiconductor can be air-dried by the air-drying assembly 4, and the leftmost rotating rod 52 can be driven to rotate by starting the second motor 51, when the leftmost rotating rod 52 rotates, the remaining rotating rods 52 can be driven to rotate in the same direction, and then the connecting rod 531 and the turning block 532 at the end thereof can be driven to rotate together, the connecting rod 531 and the turning block 532 are arranged to be opposite to the position of the groove 21 and have the same width, when the connecting rod 531 and the turning block 532 rotate, the turning block 532 passes through the inside of the first motor 22, and then the turning block 532 contacts the bottom surface of the semiconductor conveyed on the surface of the conveying belt 2, and then the turning block 532 continues to rotate, so that the semiconductor can be turned over, so that the other side of the semiconductor can be air-dried, and the rotating rods 52 are arranged in a linear array, so that the semiconductor on the top surface of the conveying belt 2 can be turned over for many times, and the air-drying effect of the semiconductor can be improved.

[0028] The basic principle and main features of the present application and the advantages of the present application are shown and described above, for those skilled in the art, obviously the present application is not limited to the details of the above exemplary embodiments, and can be realized in other specific forms without departing from the spirit or basic characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be considered as limiting the claims involved.

[0029] In addition, it should be understood that, although the present application is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A conveying device for semiconductor processing, comprising a frame (1), wherein a rotating roller is rotatably mounted on the inner wall of the frame (1) via a bearing ring, and a conveyor belt (2) is sleeved on the outer surface of the rotating roller, and a first motor (22) is fixedly mounted on the side wall of the frame (1), wherein the output end of the first motor (22) passes through the side wall of the frame (1) and is fixedly connected to one end of the leftmost rotating roller; Its features are: The top surface of the frame (1) is fixedly installed with a first U-shaped plate (3), and the top of the first U-shaped plate (3) is provided with a drying component (4). The bottom of the drying component (4) is provided with a flipping component (5). The outer surface of the conveyor belt (2) is provided with grooves (21) arranged in a linear array. The flipping assembly (5) includes a second motor (51), a rotating rod (52), a flipping rod (53), a ring gear (54), and a reversing gear (55). The bottom side of the inner wall of the first U-shaped plate (3) is rotatably mounted with rotating rods (52) arranged in a linear array through bearing rings. The outer surface of the rotating rod (52) is provided with a flipping rod (53). The outer surface of one end of the rotating rod (52) is fixedly fitted with a ring gear (54). A reversing gear (55) is provided between adjacent ring gears (54).

2. The semiconductor processing conveying device according to claim 1, characterized in that: A second motor (51) is fixedly installed on the side wall of the first U-shaped plate (3). The output end of the second motor (51) passes through the side wall of the first U-shaped plate (3) and is fixedly connected to one end of the leftmost rotating rod (52). The reversing gear (55) is rotatably installed on the inner wall of the first U-shaped plate (3) through a bearing ring. The reversing gear (55) meshes with the ring gear (54) at its adjacent position.

3. The semiconductor processing conveying device according to claim 1, characterized in that: The flipping rod (53) includes a connecting rod (531) and a flipping block (532). The connecting rod (531) is fixedly installed on the outer surface of the rotating rod (52). The connecting rods (531) are arranged in an array along the length and circumferential direction of the rotating rod (52). A flipping block (532) with a rhomboid cross-section is fixedly installed at the end of the connecting rod (531) away from the rotating rod (52). The connecting rod (531) and the flipping block (532) are both positioned corresponding to the groove (21). The width of the connecting rod (531) and the flipping block (532) is the same as that of the groove (21).

4. The semiconductor processing conveying device according to claim 1, characterized in that: The air-drying assembly (4) includes a second U-shaped plate (41), a mounting groove (42), a fan (43), and an electric heating mesh (44). The second U-shaped plate (41) is fixedly installed on the inner wall of the first U-shaped plate (3). Two symmetrically distributed mounting grooves (42) are opened on the top surface of the second U-shaped plate (41). The fan (43) is fixedly installed on the inner wall of the two mounting grooves (42). The electric heating mesh (44) connected to the power supply through a wire is fixedly installed on the side wall of the second U-shaped plate (41).

5. The semiconductor processing conveying device according to claim 1, characterized in that: The top surface of the first U-shaped plate (3) has two symmetrically distributed air inlets (31), and the inner wall of the air inlets (31) is fixedly installed with a filter plate (32).

Images