Vacuum vapor deposition microchannel modification device

Abstract

The utility model discloses a vacuum vapor deposition microchannel modification device which comprises a vacuum component, a micro-fluidic chip and an extraction and injection component, the micro-fluidic chip is provided with an inlet and an outlet, the extraction and injection component is connected with the inlet through a pipeline, the extraction and injection component can extract air into the vacuum component and extract air into the vacuum component until negative pressure is formed, and the micro-fluidic chip is connected with the extraction and injection component through a pipeline. The extraction and injection part continuously carries out extraction and injection operation on the vacuum part in the negative pressure state, the modified fluid in the vacuum part can be volatilized into a gas state under the negative pressure, the extraction and injection part is connected with the inlet through the pipeline, and the inlet is communicated with the outlet; the gas-state modified fluid continuously enters the micro-fluidic chip through the outlet in the extraction and injection processes, so that the problem of micro-channel blockage caused by injection modification can be avoided, the modified fluid can be effectively contacted with the interior of the micro-fluidic chip, and rapid, clean and uniform micro-fluidic modification is realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microfluidic chip, and particularly relates to a vacuum vapor deposition microchannel modification device. BACKGROUND

[0002] PDMS is the most common material for manufacturing microfluidic chips in the field of microfluidics. In order to make it compatible with reagent systems in various biochemical reactions, the surface thereof usually needs to be treated for hydrophobicity. Injection modification (chemical plating film) and vacuum vapor deposition are two common modification operation methods. The injection modification is time-efficient, but since a fluid containing soluble modification substances is introduced into the microfluid channel, the microchannel may be blocked, or since the thickness of the plating film changes the original channel size, the vacuum vapor deposition can effectively avoid the above problems such as channel blockage, but has problems such as slow time efficiency and uneven space deposition. CONTENT OF THE UTILITY MODEL

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a vacuum vapor deposition microchannel modification device, which can make the inside of the microfluidic chip effectively contact with the modification fluid, and realize rapid, clean and uniform microfluidic modification.

[0004] The vacuum vapor deposition microchannel modification device provided in the first aspect of the present application comprises:

[0005] A vacuum component, wherein the vacuum component is provided with a modification fluid;

[0006] A microfluidic chip, wherein the microfluidic chip is arranged in the vacuum component, and the microfluidic chip is provided with an inlet and an outlet in communication;

[0007] An extraction injection component, wherein the extraction injection component can extract and inject gas, and the extraction injection component comprises a pipeline, and the extraction injection component is connected with the inlet through the pipeline.

[0008] According to the first aspect of the present application, the vacuum vapor deposition microchannel modification device has at least the following beneficial effects: the vacuum vapor deposition microchannel modification device comprises a vacuum component, a microfluidic chip, and an extraction and injection component, the microfluidic chip is provided with an inlet and an outlet, the extraction and injection component is connected to the inlet through a pipeline, the extraction and injection component can extract air from the vacuum component to form a negative pressure, the extraction and injection component continuously extracts and injects the vacuum component in the negative pressure state, and the modification fluid in the vacuum component volatilizes into a gaseous state under the negative pressure. Since the extraction and injection component is connected to the inlet through the pipeline, the inlet and the outlet are connected, and the gaseous modification fluid continuously enters the microfluidic chip through the outlet during the extraction and injection process, the problem of microchannel blockage caused by modification injection can be avoided, the modification fluid can effectively contact the inside of the microfluidic chip, and rapid, clean, and uniform microfluidic modification can be realized.

[0009] According to some embodiments of the present application, the extraction and injection component comprises a syringe and a syringe pump, the syringe is installed on the syringe pump, and the pipeline is connected to the syringe.

[0010] According to some embodiments of the present application, the vacuum component is provided with a storage part, and the modification fluid is arranged in the storage part.

[0011] According to some embodiments of the present application, the storage part is arranged at the bottom of the vacuum component, and the microfluidic chip is arranged above the storage part.

[0012] According to some embodiments of the present application, the vacuum component is provided with a pipeline inlet, the pipeline extends into the vacuum component through the pipeline inlet, and the pipeline inlet and the pipeline are sealingly arranged.

[0013] According to some embodiments of the present application, the pipeline inlet and the pipeline are sealingly arranged through a sealing glue.

[0014] According to some embodiments of the present application, the pipeline is a capillary tube, one end of the capillary tube is connected to the inlet, and the other end of the capillary tube is connected to the extraction and injection component.

[0015] According to some embodiments of the present application, the capillary tube comprises a polyether ether ketone material.

[0016] According to some embodiments of the present application, the internal air pressure of the vacuum component is set to 0.9 atm.

[0017] According to some embodiments of the present application, the modification fluid comprises a fluorosilane vapor deposition modification fluid.

[0018] Additional aspects and advantages of the present application will be made apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0019] The above and / or additional aspects and advantages of the present application will become apparent and be readily appreciated from the following description, taken in conjunction with the accompanying drawings, in which:

[0020] Figure 1 is a structural schematic diagram of a vacuum vapor deposition microchannel modification device according to an embodiment of the present application.

[0021] REFERENCE NUMERALS

[0022] vacuum component 100, storage portion 110;

[0023] pipe 210, syringe 220;

[0024] microfluidic chip 300, inlet 310, outlet 320. DETAILED DESCRIPTION

[0025] Embodiments of the present application are described below in detail, examples of which are shown in the accompanying drawings, in which the same or similar reference numerals throughout the drawings denote the same or similar elements or elements having the same or similar functions. The embodiments described below by reference to the accompanying drawings are exemplary, and are only for the purpose of explaining the present application, and cannot be understood as limiting the present application.

[0026] In the description of the present application, it is to be understood that, in relation to the orientation description, for example, the orientation or position relationship indicated by up, down, front, back, left, right, inner, outer, etc. is based on the orientation or position relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0027] In the description of the present application, the meaning of several is one or more, and the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, and above, below, etc. are understood as including the number. If it is described as first, second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0028] In the description of the present application, unless otherwise explicitly limited, the words such as setting, mounting, connecting, assembling, cooperating, etc. should be interpreted in a broad sense, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0029] The following description will be made with reference toFigure 1 A vacuum vapor deposition microchannel modification device is described in embodiments of the present application.

[0030] A vacuum vapor deposition microchannel modification device is described in embodiments of the present application. Figure 1 The vacuum component 100 is provided with a modification fluid, the microfluidic chip 300 is arranged in the vacuum component 100, the microfluidic chip 300 is provided with an inlet 310 and an outlet 320 in communication, and the extraction and injection component includes a pipeline 210. The extraction and injection component is connected with the inlet 310 through the pipeline 210, and the extraction and injection component can extract and inject gas. Through the gas extraction operation, the interior of the vacuum component 100 can be extracted to a negative pressure state, and the modification fluid can be volatilized under the negative pressure state. The extraction and injection component is connected with the inlet 310 through the pipeline 210, the inlet 310 is in communication with the outlet 320, the modification fluid volatilized into a gaseous state is subjected to suction force from the gas extraction, and flows from the outlet 320 into the interior of the microfluidic chip 300. It can be understood that the inlet 310 and the outlet 320 of the microfluidic chip 300 are in communication. Specifically, the inlet 310 and the outlet 320 of the microfluidic chip 300 are in communication through an internal flow channel. The modification fluid under the negative pressure state is in a gaseous state, and the gaseous modification fluid entering the interior of the microfluidic chip 300 will not cause the microchannel to be blocked or the original channel size to be changed. The extraction and injection component can extract and inject gas. After the extraction and injection component extracts the interior of the vacuum component 100 to the negative pressure state, the extraction and injection component continuously performs the gas extraction operation and the gas injection operation in the interior of the vacuum component 100. The gaseous modification fluid enters the microfluidic chip 300 from the outlet 320 during the gas extraction, and the gaseous modification fluid is discharged from the interior of the microfluidic chip 300 during the gas injection. Through the continuous gas extraction and gas injection operations, the modification fluid can be fully contacted with the microfluidic chip 300, and rapid, clean and uniform microfluidic modification can be realized. In some embodiments, the modification fluid includes a fluorosilane vapor deposition modification fluid.

[0031] It can be understood that, in addition to being in communication with the outside through the pipeline 210, the other parts of the vacuum component 100 are completely sealed from the outside, so that the interior of the vacuum component 100 can form a vacuum negative pressure state.

[0032] It should be noted that, in some embodiments, other vacuum extraction devices can also be used to perform the negative pressure extraction operation on the vacuum component 100 to maintain the vacuum component 100 in the negative pressure state. At this time, the extraction and injection component does not need to repeatedly perform the negative pressure extraction operation, but only needs to repeatedly perform the gas extraction and gas injection operations under the negative pressure state.

[0033] In some embodiments, the extraction injection component performs the air extraction operation on the vacuum component 100 to set the internal air pressure of the vacuum component 100 to 0.9 atm. The internal air pressure of the vacuum component 100 is set to 0.9 atm, and the modified fluid volatilizes into a gaseous state at 0.9 atm. The extraction injection component continuously performs the air extraction operation and the air injection operation on the inside of the vacuum component 100, so that the gaseous modified fluid continuously enters and exits the inside of the microfluidic chip 300, achieving rapid, clean, and uniform microfluidic modification. In other embodiments, the vacuum extraction device performs the air extraction operation on the vacuum component 100 to set the internal air pressure of the vacuum component 100 to 0.9 atm. It can be understood that in other embodiments, the negative pressure value of the vacuum component 100 can be adjusted according to the channel size of the microfluidic chip 300 and the size of the vacuum component 100.

[0034] In some embodiments, the extraction injection component includes a syringe 220 and an injection pump, the syringe 220 is installed on the injection pump, and the pipeline 210 is connected to the syringe 220. The extraction injection component can extract and inject gas. Specifically, the extraction injection component includes a syringe 220 and an injection pump, the syringe 220 is installed on the injection pump, the injection pump has air extraction and air injection functions, one end of the pipeline 210 is connected to the syringe 220, the other end of the pipeline 210 passes through the vacuum component 100 and is connected to the microfluidic chip 300, and the injection pump can perform air extraction and air injection operations on the vacuum component 100 through the syringe 220 and the pipeline 210, so that the gaseous modified fluid continuously enters and exits the inside of the microfluidic chip 300, achieving rapid, clean, and uniform microfluidic modification.

[0035] In some embodiments, the injection pump repeatedly pulls and pushes the syringe 220 at a constant rate, so that the syringe 220 continuously performs the air extraction operation and the air injection operation on the inside of the vacuum component 100, and the modified fluid fully contacts the microfluidic chip 300. By repeatedly pulling and pushing the syringe 220 at a constant rate, the rate of the gaseous modified fluid entering and exiting the inside of the microfluidic chip 300 remains constant, improving the uniformity of the modification. It should be noted that the rate at which the injection pump repeatedly pulls and pushes the syringe 220 can be adjusted according to the channel size of the microfluidic chip 300 and the size of the vacuum component 100 in actual use.

[0036] In some embodiments, the vacuum component 100 is provided with a storage portion 110, and the modifying fluid is arranged in the storage portion 110. The modifying fluid is arranged in the vacuum component 100, specifically, the vacuum component 100 is provided with the storage portion 110, and the modifying fluid in liquid state is arranged in the storage portion 110 under normal atmospheric pressure. When the vacuum component 100 is pumped by the extraction injection component, the vacuum component 100 is pumped to a negative pressure state, and the modifying fluid arranged in the storage portion 110 volatilizes into gaseous state under the negative pressure state and flows out of the storage portion 110. The gaseous modifying fluid is sucked into the microfluidic chip 300 under the suction of the extraction injection component, and is discharged from the microfluidic chip 300 to the outside during the air injection, thereby realizing rapid, clean and uniform microfluidic modification.

[0037] In some embodiments, the storage portion 110 has an upwardly arranged opening, and the gaseous modifying fluid can flow out of the opening when the liquid modifying fluid volatilizes into gaseous state under the negative pressure state. It can be understood that, in some embodiments, the storage portion 110 includes a cylindrical side, an upper opening of the side, and a bottom of the side mounted on the vacuum component 100, and the side arranged around the modifying fluid is contained. In other embodiments, the storage portion 110 includes a rectangular or square side, which can also achieve the containment of the modifying fluid.

[0038] In some embodiments, the storage portion 110 and the vacuum component 100 are designed in one piece, which can reduce the manufacturing cost of the storage portion 110 and the vacuum component 100. In other embodiments, the storage portion 110 and the vacuum component 100 are designed in separate pieces.

[0039] It should be noted that the volume of the modifying fluid arranged in the storage portion 110 is tens to hundreds of microliters, specifically, in some embodiments, the volume of the modifying fluid arranged in the storage portion 110 is 10-500 μL. It can be understood that, in actual use, the volume of the modifying fluid can be adjusted according to the channel size of the microfluidic chip 300 and the size of the vacuum component 100. When the channel size of the microfluidic chip 300 is larger, the volume of the modifying fluid needed is more; when the channel size of the microfluidic chip 300 is smaller, the volume of the modifying fluid needed is less. When the size of the vacuum component 100 is larger, the modifying fluid needs more volume to ensure the concentration after volatilization; when the size of the vacuum component 100 is smaller, the modifying fluid only needs less volume to ensure the concentration after volatilization.

[0040] In some embodiments, the storage part 110 is arranged at the bottom of the vacuum part 100, and the microfluidic chip 300 is arranged above the storage part 110. The storage part 110 stores the modified fluid in a liquid state at normal pressure. The storage part 110 is arranged at the bottom of the vacuum part 100, and the microfluidic chip 300 is arranged above the storage part 110. When the modified fluid volatilizes under negative pressure, the gaseous modified fluid diffuses upward above the storage part 110, so that the modified fluid can quickly contact the microfluidic chip 300 during volatilization, thereby improving the modification efficiency. It can be understood that, in some embodiments, the vacuum part 100 is provided with a support, the microfluidic chip 300 is placed on the support, the storage part 110 is arranged at the middle position of the vacuum part 100, and the position of the microfluidic chip 300 is directly above the storage part 110, so that the microfluidic chip 300 can be fully contacted with the gaseous modified fluid diffused upward.

[0041] In some embodiments, the vacuum part 100 is provided with a pipe 210 inlet, the pipe 210 extends into the vacuum part 100 through the pipe 210 inlet, and the pipe 210 inlet and the pipe 210 are sealingly arranged. One end of the pipe 210 is connected to the extraction injection part, and the other end of the pipe 210 extends into the vacuum part 100 and is connected to the inlet 310 of the microfluidic chip 300. Specifically, the vacuum part 100 is provided with a pipe 210 inlet, the pipe 210 inlet is arranged at the side of the vacuum part 100, the pipe 210 extends into the vacuum part 100 through the pipe 210 inlet, and the pipe 210 is connected to the microfluidic chip 300 in the vacuum part 100. In order to ensure the sealing performance of the vacuum part 100, the pipe 210 inlet and the pipe 210 are sealingly arranged, so that the inside of the vacuum part 100 can be in a negative pressure state, and the volatilized modified fluid under the negative pressure state can be easily extracted. In some embodiments, the pipe 210 inlet and the pipe 210 are sealingly arranged by sealing glue. The sealing glue is used to seal the connection between the pipe 210 inlet and the pipe 210, so that there is no gap between the pipe 210 inlet and the pipe 210, and the gas cannot flow out from the gap between the pipe 210 inlet and the pipe 210, thereby realizing the repeated air extraction and injection operation under the negative pressure state.

[0042] In some embodiments, the pipe 210 inlet can be integrally formed on the side of the vacuum part 100 by injection molding, extrusion or the like, so as to simplify the molding process between the vacuum part 100 and the pipe 210 inlet and save manufacturing cost.

[0043] In some embodiments, the vacuum part 100 is arranged as a vacuum tank. In other embodiments, the vacuum part 100 can also be arranged as a vacuum box in the shape of a rectangular or square. The shape and size of the vacuum part 100 do not affect the modification operation inside, as long as the vacuum sealing performance is ensured.

[0044] In some embodiments, the pipe 210 is provided as a capillary tube, one end of the capillary tube is connected with the inlet 310, and the other end of the capillary tube is connected with the suction injection component. The channel of the microfluidic chip 300 has a small volume, and the pipe 210 is provided as a capillary tube. The capillary tube is suitable for being communicated with the inlet 310 of the microfluidic chip 300. When the suction injection component performs suction and injection, the airflow can only pass through the inlet 310, the micro flow channel inside the microfluidic chip 300 and the outlet 320. Through repeated suction and injection operations, the gaseous modified fluid can continuously enter and exit the inside of the microfluidic chip 300.

[0045] In some embodiments, the capillary tube is made of polyether ether ketone material. Polyether ether ketone (PEEK) is a special polymer material, which has excellent chemical stability and corrosion resistance. The capillary tube made of polyether ether ketone material is used to connect the suction injection component and the inlet 310 of the microfluidic chip 300, and has good stability. In other embodiments, the capillary tube can also be made of glass material, polymer material, metal material, quartz material, polytetrafluoroethylene material and other materials, which does not affect the suction and injection operations.

[0046] The embodiments of the present application are described in detail above with reference to the drawings, but the present application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the purpose of the present application.

Claims

1. A vacuum vapor deposition microchannel modification device, characterized by, The application relates to a vacuum component, a micro-fluidic chip and an extraction-injection component. The vacuum component is internally provided with a modified fluid. The micro-fluidic chip is arranged in the vacuum component and is provided with an inlet and an outlet in communication. The extraction-injection component is capable of extracting and injecting gas and is provided with a pipeline.

2. A vacuum vapor deposition microchannel modification device according to claim 1, wherein The extraction-injection component is provided with a syringe and a syringe pump.

3. The vacuum vapor deposition microchannel modification device of claim 1, wherein, The pipeline is connected with the syringe.

4. A vacuum vapour deposition microchannel modification device according to claim 3, wherein, The vacuum component is provided with a storage part in which the modified fluid is arranged.

5. The vacuum vapor deposition microchannel modification device of claim 1, wherein, The storage part is arranged at the bottom of the vacuum component and the micro-fluidic chip is arranged above the storage part.

6. A vacuum vapour deposition microchannel modification apparatus as claimed in claim 5, wherein, The vacuum component is provided with a pipeline inlet through which the pipeline extends into the vacuum component.

7. The vacuum vapor deposition microchannel modification device of claim 1, wherein, The pipeline inlet is sealed with the pipeline.

8. A vacuum vapour deposition microchannel modification device according to claim 7, wherein, The pipeline inlet is sealed with the pipeline by a sealing glue.

9. The vacuum vapor deposition microchannel modification device of claim 1, wherein, The pipeline is a capillary tube, one end of which is connected with the inlet and the other end of which is connected with the extraction-injection component.

10. The vacuum vapor deposition microchannel modification device of claim 1, wherein, The capillary tube is made of polyether ether ketone. The internal air pressure of the vacuum component is 0.9 atm. The modified fluid is a fluorosilane vapor deposition modified fluid.

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