Radio frequency coil supporting device

Abstract

The utility model provides a radio frequency coil supporting device. The radio frequency coil supporting device comprises a base, at least one shielding supporting structure and at least one coil supporting structure. The lower surface of the base is a flat surface; the lower ends of all the shielding supporting structures are fixedly arranged on the upper surface of the base, the upper ends of all the shielding supporting structures comprise shielding lifting units, and all the shielding lifting units are arranged below the shielding device and make contact with the shielding device to support the shielding device; the lower ends of all the coil supporting structures are fixedly arranged on the upper surface of the base, the upper ends of all the coil supporting structures comprise coil lifting units, and all the coil lifting units are arranged below the radio frequency coil device and make contact with the radio frequency coil device to support the radio frequency coil device. The radio frequency coil device is fixed at a relative position in the shielding device through the shielding supporting structure and the coil supporting structure, so that the radio frequency coil device is convenient to replace and install.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of thin film deposition, and relates to an ionized metal plasma technology, in particular to a radio frequency coil supporting device. BACKGROUND

[0002] The ionized metal plasma (IMP) technology is a physical vapor deposition technology for ionizing metal atoms by a radio frequency electromagnetic field and accelerating and guiding the ionized metal ions to the surface of a target wafer to form a thin film. The radio frequency coil is used to generate the radio frequency electromagnetic field for ionizing the metal atoms. In order to generate a stable radio frequency electromagnetic field, the radio frequency coil is usually fixedly installed on the inner wall of a shielding cover through a connecting piece.

[0003] During use, the radio frequency coil is subject to material loss due to the continuous radio frequency energy. Therefore, the radio frequency coil needs to be replaced. In the prior art, when the radio frequency coil is replaced and installed, a user manually supports the radio frequency coil and adjusts the position of the radio frequency coil to align the connecting piece fixedly connected with the radio frequency coil with the mounting hole on the shielding cover, so as to realize the replacement and installation of the radio frequency coil. This installation method is not convenient and has low installation efficiency. Moreover, due to the manual supporting method, the position of the radio frequency coil is difficult to keep unchanged during the entire installation process, which affects the installation accuracy of the radio frequency coil and further affects the effect of thin film deposition.

[0004] Therefore, how to provide a method for improving the convenience of replacing and installing the radio frequency coil and improving the installation accuracy of the radio frequency coil is an urgent problem to be solved by those skilled in the art. SUMMARY

[0005] The application aims to provide a radio frequency coil supporting device to solve the problem that the existing radio frequency coil needs to be manually supported by a user during replacement and installation, which is difficult to operate and the position of the radio frequency coil is difficult to keep stable, affecting the installation accuracy of the radio frequency coil and further affecting the effect of thin film deposition.

[0006] In a first aspect, the application provides a radio frequency coil supporting device, which comprises a base, at least one shielding supporting structure and at least one coil supporting structure.

[0007] The lower surface of the base is a flat surface.

[0008] The lower end of each shielding supporting structure is fixedly arranged on the upper surface of the base, and the upper end of each shielding supporting structure comprises a shielding lifting unit. All the shielding lifting units are arranged below the shielding device and in contact with the shielding device to support the shielding device.

[0009] The lower end of each of the coil support structures is fixedly arranged on the upper surface of the base, and the upper end of each of the coil support structures comprises a coil lifting unit, each of the coil lifting units is arranged below the radio frequency coil device and in contact with the radio frequency coil device to support the radio frequency coil device.

[0010] The shielding lifting unit and the coil lifting unit have a preset height difference to fix the relative position of the radio frequency coil device inside the shielding device.

[0011] In the present application, the relative position between the radio frequency coil device and the shielding device is stabilized by the support of the coil support structure and the shielding support structure, so as to facilitate the operator to replace and install the radio frequency coil device. Compared with the prior art in which the operator manually supports the radio frequency coil device, the support by the coil support structure and the shielding support structure is more stable, avoids the influence of hand shaking on the installation effect of the radio frequency coil device, improves the installation precision of the radio frequency coil device, and is more convenient, has higher replacement efficiency, and achieves better installation and replacement effect.

[0012] In an embodiment of the present application, the coil lifting unit comprises a first recess, the first recess is arranged directly below the connecting piece, and the shape of the first recess is matched with the shape of the connecting piece, so that the connecting piece is embedded in the first recess.

[0013] And / or, the coil lifting unit comprises a second recess, the second recess is arranged directly below the radio frequency coil, the second recess is a groove with a preset arc and a preset width, the preset arc is matched with the arc of the radio frequency coil, and the preset width is matched with the width of the radio frequency coil, so that the radio frequency coil is embedded in the second recess.

[0014] The radio frequency coil device comprises the radio frequency coil and the connecting piece fixed on the radio frequency coil, the connecting piece is located between the radio frequency coil and the shielding device, and the radio frequency coil and the shielding device are fixedly connected through the connecting piece.

[0015] In an embodiment of the present application, when the coil lifting unit comprises a first recess, the coil lifting unit corresponds to the connecting piece one by one.

[0016] In an embodiment of the present application, the coil support structure further comprises a coil lifting unit, the lifting end of the coil lifting unit is fixedly connected with the coil lifting unit, so as to adjust the height difference between the shielding lifting unit and the coil lifting unit to the preset height difference.

[0017] And / or, the shielding support structure further comprises a shielding lifting unit, a lifting end of the shielding lifting unit is fixedly connected with the shielding lifting unit, so as to adjust the height difference between the shielding lifting unit and the coil lifting unit to the preset height difference.

[0018] In an embodiment of the present application, the coil lifting unit comprises a screw transmission unit or a worm gear unit, or the shielding lifting unit comprises a screw transmission unit or a worm gear unit.

[0019] In an embodiment of the present application, the base comprises a base, at least one guide unit arranged on the upper surface of the base, and at least one moving unit arranged above the guide unit, the guide unit and the moving unit correspond one-to-one, the moving unit and the coil support structure correspond one-to-one, and the moving unit is fixedly connected with the lower end of the coil support structure.

[0020] In an embodiment of the present application, the guide unit comprises a guide rail, and the moving unit comprises a sliding block, the guide rail and the sliding block are mutually embedded;

[0021] Alternatively, the guide unit comprises a rack, and the moving unit comprises a gear corresponding to the rack.

[0022] In an embodiment of the present application, the shielding lifting unit comprises a third recess, the third recess is arranged directly below the shielding device, and the shape of the third recess is matched with the shape of the shielding device, so that the shielding device is embedded in the third recess.

[0023] In an embodiment of the present application, the material of the coil lifting unit is at least one of hard rubber, ceramic or metal.

[0024] In an embodiment of the present application, the material of the shielding lifting unit is at least one of hard rubber, ceramic or metal.

[0025] As described above, the present application provides a radio frequency coil support device, which supports the radio frequency coil device through the coil support structure, supports the shielding device through the shielding support structure, realizes the stability of the relative position between the radio frequency coil device and the shielding device during replacement and installation, avoids the shaking caused by manual support of the operator, improves the stability of the radio frequency coil device during installation, and effectively improves the installation precision of the radio frequency coil device. At the same time, supporting the radio frequency coil device through the coil support structure is more convenient and labor-saving, which effectively improves the replacement efficiency of the radio frequency coil device, and further makes the installation and replacement of the radio frequency coil device better. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1A structure diagram of a radio frequency coil supporting device according to an embodiment of the present application is shown.

[0027] Figure 2 A structure diagram of a radio frequency coil supporting device according to another embodiment of the present application is shown.

[0028] Figure 3 A structure diagram of a coil lifting unit according to an embodiment of the present application is shown.

[0029] Figure 4 A structure diagram of a shielding lifting unit according to an embodiment of the present application is shown.

[0030] Figure 5 A structure diagram of a coil lifting unit according to an embodiment of the present application is shown.

[0031] Figure 6 A structure diagram of a coil lifting unit according to another embodiment of the present application is shown.

[0032] Figure 7 A structure diagram of a moving unit and a guiding unit according to an embodiment of the present application is shown.

[0033] Figure 8 A structure diagram of a moving unit and a guiding unit according to another embodiment of the present application is shown.

[0034] Element number explanation

[0035] 100 radio frequency coil device

[0036] 110 radio frequency coil

[0037] 120 connecting piece

[0038] 200 shielding device

[0039] 210 mounting hole

[0040] 300 radio frequency coil supporting device

[0041] 310 base

[0042] 311 moving unit

[0043] 311' gear

[0044] 311" sliding block

[0045] 312 guiding unit

[0046] 312' rack

[0047] 312" guide rail

[0048] 313 base

[0049] 320 coil support structure

[0050] 321 coil lifting unit

[0051] 3211 first recess

[0052] 3212 second recess

[0053] 322 coil lifting unit

[0054] 3221' screw rod sub-unit

[0055] 3221" worm sub-unit

[0056] 3222' screw sleeve sub-unit

[0057] 3222" worm wheel sub-unit

[0058] 330 shield support structure

[0059] 331 shield lifting unit

[0060] 3311 third recess DETAILED DESCRIPTION

[0061] The present application is herein described, by way of example only, with the

[0062] It is to be understood that the drawings are designed solely for the purpose of illustration and are not intended to limit the scope of the present application in any way. Further, it should be understood that all features that are common to all the figures are not necessarily marked in each of the figures, and that the features of the figures are not necessarily drawn to scale.

[0063] In the practical application of the dissociative metal plasma technology, the radio frequency coil device needs to be replaced due to the loss generated by the radio frequency coil device. In the prior art, when the radio frequency coil device is replaced and installed, the radio frequency coil device is usually placed inside the shielding device. When the connecting member in the radio frequency coil device is aligned with the mounting hole on the shielding device one by one by visual observation, the operator stabilizes the radio frequency coil at this position by manual support, and connects the mounting hole and the connecting member together through the connecting structure of the screw and the like. Since the hand is difficult to keep still for a long time, the position of the radio frequency coil device is easily changed due to the shaking of the operator's hand during the manual support of the radio frequency coil device, thereby affecting the installation precision of the radio frequency coil device, and even the connecting member and the mounting hole on the shielding device cannot be aligned, the position of the radio frequency coil device needs to be adjusted again, or even the connected connecting member and mounting hole need to be disassembled and connected again, which increases the difficulty of replacing and installing the radio frequency coil device, and is not convenient enough.

[0064] The following embodiments of the present application provide a radio frequency coil support device for supporting a radio frequency coil device so that the radio frequency coil device is in the process of replacing and installing. The operator does not need to manually support, so as to avoid the shaking of the operator's hand causing the position of the radio frequency coil device, thereby improving the installation precision of the radio frequency coil device and the convenience of replacing and installing the radio frequency coil device, and solving the problem of high difficulty of replacing and installing the radio frequency coil device and low installation precision in the prior art.

[0065] The principle of a radio frequency coil support device of the present embodiment will be described in detail below in combination with the drawings, that is, the embodiments, so that those skilled in the art can understand the radio frequency coil support device of the present embodiment without creative labor.

[0066] As Figure 1As shown, the embodiment provides a radio frequency coil support device 300 for supporting the radio frequency coil device 100 when installing the radio frequency coil device 100 to the shielding device 200, instead of manual support by the user. Specifically, the radio frequency coil support device 300 comprises a base 310, at least one shielding support structure 330 and at least one coil support structure 320. The lower surface of the base 310 is a flat surface, so that the radio frequency coil support device 300 can be placed stably. The shielding support structure 330 is used to support the shielding device 200, and the lower end thereof is connected to the upper surface of the base 310, and the upper end thereof is in contact with the shielding device 200. The coil support structure 320 is used to support the radio frequency coil device 100, and the lower end thereof is connected to the upper surface of the base 310, and the upper end thereof is in contact with the radio frequency coil device 100. Based on this, the radio frequency coil device 100 and the shielding device 200 are stably placed on the radio frequency coil support device 300, without the need for manual support by the user, and the relative position between the radio frequency coil device 100 and the shielding device 200 is kept unchanged during replacement and installation, effectively improving the installation precision of the radio frequency coil device 100 and the convenience of replacement and installation.

[0067] Further, the upper end of the shielding support structure 330 comprises a shielding lifting unit 331, which is arranged below the shielding device 200 and in contact with the shielding device 200 to support the shielding device 200. The upper end of the coil support structure 320 comprises a coil lifting unit 321, which is arranged below the radio frequency coil device 100 and in contact with the radio frequency coil device 100 to support the radio frequency coil device 100.

[0068] It should be noted that the radio frequency coil support device 300 comprises at least one shielding support structure 330 and at least one coil support structure 320, but the number of shielding support structures 330 and coil support structures 320 in the radio frequency coil support device 300 can be changed according to actual needs, and the embodiment does not make specific limitations here. Exemplarily, as shown in FIG. 4, the radio frequency coil support device 300 comprises two shielding support structures 330 and two coil support structures 320. Figure 1As shown, the radio frequency coil supporting device 300 includes a shielding supporting structure 330 and a coil supporting structure 320, wherein the shielding supporting structure 330 has a ring-shaped structure or a circular structure with a diameter not less than that of the shielding device 200, so as to stably support the shielding device 200; the coil supporting structure 320 has a ring-shaped structure or a circular structure with a diameter not less than that of the radio frequency coil device 100, so as to stably support the radio frequency coil device 100. Alternatively, the radio frequency coil supporting device 300 includes a plurality of shielding supporting structures 330 and a plurality of coil supporting structures 320, wherein all the shielding supporting structures 330 are uniformly distributed below the shielding device 200 to support and hold up the shielding device 200, and all the coil supporting structures 320 are uniformly distributed below the radio frequency coil device 100 to support and hold up the radio frequency coil device 100, as long as the radio frequency coil device 100 and the shielding device 200 can be stably supported, which is not limited in the embodiment.

[0069] Preferably, the radio frequency coil supporting device 300 includes a plurality of shielding supporting structures 330 and a plurality of coil supporting structures 320, so as to avoid the ring-shaped structure or the circular structure from consuming more materials and being heavier.

[0070] In some optional embodiments, in order to stably place the radio frequency coil device 100 on the radio frequency coil supporting device 300, the coil holding unit 321 has a recess for placing the radio frequency coil device 100, so that the radio frequency coil device 100 is embedded in the coil holding unit 321, thereby improving the stability of the radio frequency coil device 100. It should be noted that, as shown in FIG. 3, the radio frequency coil device 100 includes a radio frequency coil 110 and a connecting piece 120, and the connecting piece 120 is located between the radio frequency coil 110 and the shielding device 200, and the radio frequency coil 110 and the shielding device 200 are fixedly connected through the connecting piece 120. Figure 2 As shown, the radio frequency coil device 100 includes a radio frequency coil 110 and a connecting piece 120, and the connecting piece 120 is located between the radio frequency coil 110 and the shielding device 200, and the radio frequency coil 110 and the shielding device 200 are fixedly connected through the connecting piece 120. In order to stably support the radio frequency coil device 100 by the coil supporting structure 320, the coil holding unit 321 can be embedded in the recess of the connecting piece 120 to support the radio frequency coil device 100, or can be embedded in the recess of the radio frequency coil 110 to support the radio frequency coil device 100.

[0071] Specifically, as shown in FIG. 3, the radio frequency coil supporting device 300 includes a plurality of shielding supporting structures 330 and a plurality of coil supporting structures 320, wherein the shielding supporting structures 330 are uniformly distributed below the shielding device 200 to support and hold up the shielding device 200, and the coil supporting structures 320 are uniformly distributed below the radio frequency coil device 100 to support and hold up the radio frequency coil device 100. Figure 3As shown, the coil lifting unit 321 includes a first recess 3211 arranged directly below the connecting piece 120, and the shape of the first recess 3211 is fitted to the shape of the connecting piece 120, so that the connecting piece 120 is embedded in the first recess 3211, and then the radio frequency coil device 100 is stably placed on the coil support structure 320; and / or, the coil support structure 321 includes a second recess 3212 arranged directly below the radio frequency coil 110, and the second recess 3212 is a groove with a preset radius and a preset width, wherein the preset radius is fitted to the radius of the radio frequency coil 110, and the preset width is fitted to the width of the radio frequency coil 110, so that the radio frequency coil 110 is embedded in the second recess 3212, and then the radio frequency coil device 100 is stably placed on the coil support structure 320.

[0072] It should be noted that the coil lifting unit 321 supports the radio frequency coil device 100 through the first recess 3211 and / or the second recess 3212, which improves the stability of the radio frequency coil device 100, and at the same time, since the first recess 3211 and the second recess 3212 are fitted to the shape of the radio frequency coil device 100, the coil lifting unit 321 will not scratch the radio frequency coil device 100 when the radio frequency coil device 100 is placed on the coil support structure 320, thereby effectively protecting the radio frequency coil device 100, and thus achieving better installation effect.

[0073] Similarly, as shown in the figure, Figure 4 The shielding lifting unit 331 includes a third recess 3311 arranged directly below the shielding device 200, and the shape of the third recess 3311 is fitted to the shape of the shielding device 200, so that the shielding device 200 is embedded in the third recess, which improves the stability of the shielding device 200, and avoids scratching the shielding device 200 by the shielding lifting unit 331, thereby effectively protecting the shielding device 200. Exemplarily, the third recess 3311 is a groove, the radius of the groove is fitted to the radius of the bottom of the shielding device 200, and the width of the groove is fitted to the width of the bottom of the shielding device 200. Specifically, the working principle and implementation of the third recess 3211 are similar to those of the first recess 3211 and the second recess 3212. Please refer to the foregoing content, which will not be repeated here.

[0074] Preferably, the radio frequency coil support device 300 provided by the present application includes at least four shielding lifting units 331, which are uniformly distributed in four directions below the shielding device 200, for stably supporting the entire shielding device 200.

[0075] Further, the coil lifting unit 321 is made of hard and smooth material, which avoids damaging the RF coil device 100. Meanwhile, the hard material provides the RF coil 100 with stability during placement or movement, thus avoiding affecting the installation precision. For example, the material of the coil lifting unit 321 is at least one of hard rubber, ceramic or metal.

[0076] Similarly, the material of the shielding lifting unit 331 is hard and smooth material. For example, the material of the shielding lifting unit 331 is at least one of hard rubber, ceramic or metal. Specifically, the shielding lifting unit 331 works and is implemented in a similar way to the coil lifting unit 321. Please refer to the foregoing description, which will not be repeated here.

[0077] Preferably, as shown in Figure 3 The coil lifting unit 321 includes a first recess 3211 and a second recess 3212. The first recess 3211 clamps the RF coil 110, and the second recess 3212 holds the connecting piece 120, so that the RF coil device 100 is placed stably on the coil support structure 320, and the connection between the connecting piece 120 and the RF coil 110 is not subjected to additional stress, which avoids the breakage of the connecting piece 120, effectively protects the RF coil device 100, and achieves better installation effect.

[0078] Further, the RF coil support device 300 includes a plurality of coil support structures 320. Specifically, the coil lifting unit 321 corresponds to the connecting piece 120 one by one, and each connecting piece 120 is placed in the first recess 3211 of the corresponding coil support structure 320, so as to protect all the connecting pieces 120 and avoid their breakage.

[0079] In some optional embodiments, in order to facilitate the installation of the RF coil device 100 in the shielding device 200, the shielding lifting unit 331 and the coil lifting unit 321 have a preset height difference. The preset height difference is a preset height difference, so that the bottom surface of the RF coil device 100 supported by the coil lifting unit 321 and the bottom surface of the shielding device 200 supported by the shielding lifting unit 331 have a preset height difference, so that the RF coil device 100 can be installed in a position in the shielding device 200.

[0080] Specifically, as shown in Figure 2As shown, the radio frequency coil device 100 includes a radio frequency coil 110 and a connecting piece 120, the shielding device 200 includes a mounting hole 210, and the mounting connection of the radio frequency coil 110 and the shielding device 200 is realized through the connection between the connecting piece 120 and the mounting hole 210. Based on this, in order to realize the smooth installation of the radio frequency coil device 100 on the shielding device 200, the mounting hole 210 must be aligned with the connecting piece 120. In the embodiment, there is a preset height difference between the shielding lifting unit 331 and the coil lifting unit 321, so that there is a preset height difference between the bottom surface of the radio frequency coil device 100 and the bottom surface of the shielding device 200, and then the radio frequency coil device 100 is at a preset height position inside the shielding device 200, so as to realize the alignment between the connecting piece 120 and the mounting hole 210, thereby realizing the installation of the radio frequency coil device 100.

[0081] Preferably, as Figure 2 As shown, the coil supporting structure 320 further includes a coil lifting unit 322. The upper end of the coil lifting unit 322 is connected to the coil lifting unit 321, and the height of the coil lifting unit 321 is changed through the lifting of the coil lifting unit 322, and then the height difference between the coil lifting unit 321 and the shielding lifting unit 331 is changed to reach a preset height difference. That is, through the lifting of the coil lifting unit 321 by the coil lifting unit 322, the alignment between the connecting piece 120 and the mounting hole 210 is realized, thereby realizing the installation of the radio frequency coil device 100.

[0082] Specifically, the lifting end of the coil lifting unit 322 is fixedly connected to the coil lifting unit, and the height of the coil lifting unit 321 is changed by changing the height of the lifting end of the coil lifting unit 322.

[0083] Illustratively, the coil lifting unit 322 includes a screw transmission unit. Specifically, as Figure 5 As shown, the screw transmission unit includes a screw rod sub-unit 3221' and a screw sleeve sub-unit 3222'. The screw rod sub-unit 3221' includes two screw rods sleeved together, one end of which is connected to the coil lifting unit 321, and the other end is a manually rotated part. The screw sleeve sub-unit 3222' includes a sleeve sleeved outside the screw rod sub-unit 3221' and a connecting rod fixedly connected to the sleeve. The inside of the sleeve has a thread corresponding to the screw rod sub-unit 3221', and the connecting rod is fixed to the base 310. When it is necessary to change the height of the coil lifting unit 321, the screw rod sub-unit 3221' is rotated, and the lifting of the coil lifting unit 321 is realized.

[0084] Alternatively, as Figure 6As shown, the coil lifting unit 322 comprises a worm gear unit, specifically, the worm gear unit comprises a worm sub-unit 3221" and a worm wheel sub-unit 3222", wherein the worm sub-unit 3221" has a threaded structure, one end of which is connected to the coil lifting unit 321, the worm wheel sub-unit 3222" has a gear structure corresponding to the threaded structure of the worm sub-unit 3221", and the worm wheel sub-unit 3222" is fixedly connected to the base 310. When it is necessary to change the height of the coil lifting unit 321, the worm wheel sub-unit 3222" is rotated to drive the worm sub-unit 3221" to extend or retract, so as to realize the lifting of the coil lifting unit 321.

[0085] The above embodiments of the present application exemplarily show the specific structure of the coil lifting unit 322, but the structure of the coil lifting unit 322 is not limited thereto, as long as the lifting of the coil lifting unit 321 can be realized, which is not specifically limited herein.

[0086] Alternatively, the shielding support structure 330 comprises a shielding lifting unit (not shown in the figure), and the alignment between the connecting piece 120 and the mounting hole 210 is realized through the shielding lifting unit. The lifting end of the shielding lifting unit is fixedly connected to the shielding lifting unit 331 to adjust the height difference between the shielding lifting unit 331 and the coil lifting unit 321 to a preset height difference. Exemplarily, the shielding lifting unit comprises a screw transmission unit or a worm gear unit. Specifically, the working principle and implementation manner of the shielding lifting unit are similar to those of the coil lifting unit, please refer to the foregoing content, which will not be repeated here.

[0087] Of course, the radio frequency coil support device 300 can also simultaneously comprise the coil lifting unit 322 and the shielding lifting unit, that is, the coil support structure 320 comprises the coil lifting unit 322, and the shielding support structure 330 comprises the shielding lifting unit, and the height difference between the shielding lifting unit 331 and the coil lifting unit 321 is adjusted through the coil lifting unit 322 and the shielding lifting unit to realize the alignment between the connecting piece 120 and the mounting hole 210, which is not specifically limited herein.

[0088] Further, the number of the coil support structure 320 corresponds to the number of the connecting piece 120 one by one, and each coil support structure 320 comprises a coil lifting unit 322 to finely adjust each connecting piece 120 of the radio frequency coil device 300, thereby effectively improving the installation precision of the radio frequency coil device 300 and achieving better installation effect.

[0089] The shielding device 200 comprises a side shielding member arranged circumferentially around the radio frequency coil device 100 and a bottom shielding member (not shown in the figure) connected to the bottom of the side shielding member, for shielding the radio frequency electromagnetic field inside when ionizing metal atoms, so as to avoid affecting the external lines. In order to realize the connection of the side shielding member and the bottom shielding member, the bottom of the side shielding member is an inwardly curved arc, so as to be buckled with the bottom shielding member. Based on this, the diameter of the bottom entrance of the side shielding member is generally smaller than the diameter of the radio frequency coil device 100, and since the radio frequency coil device 100 needs to be supported, the diameter of the upper end of the coil support structure 300 provided in the embodiment is the same as the diameter of the radio frequency coil device 100. Therefore, in order to enable the upper end of the radio frequency coil support device 300, i.e. the upper end of all the coil support structures 320, to be inserted into the shielding device 200, in some optional embodiments, as shown in Figure 2 The base 310 comprises a base 313, at least one guide unit 312 arranged on the upper surface of the base 313, and at least one moving unit 311 arranged above the guide unit 312, wherein the guide unit 312 and the moving unit 311 correspond one-to-one, the moving unit 311 corresponds one-to-one with the coil support structure 320, and the moving unit 311 is fixedly connected with the lower end of the coil support structure 320. Specifically, the moving unit 311 moves along the guide unit 312 on the upper surface of the base 313 and drives the coil support structure 320 to move synchronously, thereby changing the horizontal position of the coil support structure 320 so that the upper end of the coil support structure 320 is inserted into the shielding device 200. For example, all the coil support structures 320 are driven to move by the moving unit 311, so that the upper ends of all the coil support structures 320 are contracted like the center, so as to be inserted into the shielding device 200, and then all the coil support structures 320 are driven to move by the moving unit 311 again, so that the upper ends of all the coil support structures 320 are fitted with the diameter of the radio frequency coil device 100, thereby realizing the support of the radio frequency coil device 100.

[0090] It should be noted that the moving unit 311 corresponds one-to-one with the coil support structure 320, and the guide unit 311 corresponds to the movement track of the coil support structure 320, so that the moving unit 311 drives the movement of the coil support structure 320 along the guide unit 312. For example, the guide unit 312 is a straight guide member, the guide member corresponds one-to-one with the moving unit 311, i.e. one-to-one with the coil support structure 320, and the guide track of the guide member is the movement track of the corresponding coil support structure 320.

[0091] For example, as shown in Figure 7As shown, the guide unit 312 includes a rack 312', and the moving unit 311 includes a gear 311' corresponding to the rack 312'. The rack 312' is disposed on the upper surface of the base 313, and the gear 311' is fixedly connected to the lower end of the coil support structure 320. When the gear 311' rotates, it can move along the rack 312' on the upper surface of the base 313, causing the coil support structure 320 to move synchronously, thereby changing the horizontal position of the coil support structure 320. At this time, the shape trajectory of the rack 311' is the movement trajectory of the coil support structure 320. Alternatively, as... Figure 8 As shown, the guide unit 312 includes a guide rail 312”, and the moving unit 311 includes a slider 311”. The guide rail 312” is disposed on the upper surface of the base 313, and the slider 311” is fixedly connected to the lower end of the coil support structure 320. The guide rail 312” and the slider 311” are interlocked so that the slider 311” moves along the guide rail 312” on the upper surface of the base 313, and drives the coil support structure 320 to move synchronously, thereby changing the horizontal position of the coil support structure 320. At this time, the shape trajectory of the guide rail 312” is the moving trajectory of the coil support structure 320. Alternatively, the guide unit 312 and the moving unit 311 can be other structures, as long as the moving unit 311 can move along the guide unit 312, thereby driving the coil support structure 320 to move synchronously. This application does not impose specific limitations here.

[0092] In summary, the RF coil support device 300 provided in this application supports the RF coil device 100 through the coil support structure 320 and the shielding support structure 330 supports the shielding device 200. This eliminates the need for manual support by the operator during the replacement and installation of the RF coil device 100, improving the stability of the RF coil device 100 during installation and enhancing the convenience of replacing and installing the RF coil device 100. Consequently, it effectively improves the installation accuracy and replacement efficiency of the RF coil device 100, achieving a better installation and replacement effect. Meanwhile, this application further enhances the stability of the RF coil device 100 during installation by attaching and supporting the first recess 3211 and the second recess 3212 of the coil support unit 321, and attaching and supporting the shielding device 200 by attaching and supporting the third recess 3311 of the shield support unit 331. The non-attached shape will not cause scratches, effectively protecting the RF coil device 100 and the shielding device 200, further improving the installation effect of the RF coil device 100, and facilitating the practical application of the dissociated metal plasma technology.

[0093] The descriptions of the processes or structures corresponding to the above figures each have their own emphasis. For parts of a process or structure that are not described in detail, please refer to the relevant descriptions of other processes or structures.

[0094] The above embodiments are only illustrative of the principles of the present application and its effects, and are not intended to limit the present application. Any modification or change made by any person skilled in the art without departing from the spirit and scope of the present application shall be covered by the claims of the present application.

Claims

1. A radio frequency coil support apparatus, characterized by, The base, at least one shielding support structure and at least one coil support structure are included. The lower surface of the base is a flat surface. The lower ends of all the shielding support structures are fixedly arranged on the upper surface of the base, the upper ends of all the shielding support structures include shielding lifting units, all the shielding lifting units are arranged below the shielding device and are in contact with the shielding device to support the shielding device. The lower ends of all the coil support structures are fixedly arranged on the upper surface of the base, the upper ends of all the coil support structures include coil lifting units, all the coil lifting units are arranged below the radio frequency coil device and are in contact with the radio frequency coil device to support the radio frequency coil device. The shielding lifting units and the coil lifting units have a preset height difference to fix the relative position of the radio frequency coil device inside the shielding device.

2. The radio frequency coil support apparatus of claim 1, wherein, The coil lifting unit includes a first recess, the first recess is arranged directly below the connecting piece, and the shape of the first recess is consistent with the shape of the connecting piece, so that the connecting piece is embedded in the first recess. And / or, the coil lifting unit includes a second recess, the second recess is arranged directly below the radio frequency coil, the second recess is a groove with a preset arc and a preset width, the preset arc is consistent with the arc of the radio frequency coil, and the preset width is consistent with the width of the radio frequency coil, so that the radio frequency coil is embedded in the second recess. The radio frequency coil device includes the radio frequency coil and the connecting piece fixed on the radio frequency coil, the connecting piece is located between the radio frequency coil and the shielding device, and the radio frequency coil and the shielding device are fixedly connected through the connecting piece.

3. The radio frequency coil support apparatus of claim 2, wherein, When the coil lifting unit includes a first recess, the coil lifting unit corresponds to the connecting piece one by one.

4. The radio frequency coil support apparatus of claim 1, wherein, The coil support structure further includes a coil lifting unit, the lifting end of the coil lifting unit is fixedly connected with the coil lifting unit to adjust the height difference between the shielding lifting unit and the coil lifting unit to the preset height difference. And / or, the shielding support structure further includes a shielding lifting unit, the lifting end of the shielding lifting unit is fixedly connected with the shielding lifting unit to adjust the height difference between the shielding lifting unit and the coil lifting unit to the preset height difference.

5. The radio frequency coil support apparatus of claim 4, wherein, The coil lifting unit includes a screw transmission unit or a worm gear unit, or the shielding lifting unit includes a screw transmission unit or a worm gear unit.

6. The radio frequency coil support apparatus of claim 1, wherein, The base includes a base, at least one guide unit arranged on the upper surface of the base, and at least one moving unit arranged above the guide unit, the guide unit corresponds to the moving unit one by one, the moving unit corresponds to the coil support structure one by one, and the moving unit is fixedly connected with the lower end of the coil support structure.

7. The radio frequency coil support apparatus of claim 6, wherein, The guide unit includes a guide rail, and the moving unit includes a sliding block, the guide rail and the sliding block are embedded in each other. Or, the guide unit includes a rack, and the moving unit includes a gear corresponding to the rack.

8. The radio frequency coil support apparatus of claim 1, wherein, The shield lifting unit includes a third recess provided right below the shield device, and the third recess is shaped to fit the shape of the shield device so that the shield device is embedded in the third recess.

9. The radio frequency coil support apparatus of claim 1, wherein, The material of the coil lifting unit is at least one of hard rubber, ceramic, or metal.

10. The radio frequency coil support apparatus of claim 1, wherein, The material of the shield lifting unit is at least one of hard rubber, ceramic, or metal.

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