Cavity assembly and vacuum pump

Abstract

The utility model provides a cavity assembly and a vacuum pump, and relates to the technical field of semiconductor equipment. The cavity assembly comprises multiple stages of cavities. The multiple stages of cavities are connected and form a cavity used for containing the rotor, a first isolation channel surrounding the cavity and an isolation part used for isolating the first isolation channel are formed between the adjacent cavities, and the adjacent cavities are further provided with an air inlet channel and an air outlet channel which are communicated with the first isolation channel; the gas outlet channel and the gas inlet channel are arranged on the two sides of the isolation part respectively, and the gas inlet channel introduces isolation gas into the first isolation channel, so that the isolation gas flows from one side of the isolation part to the other side of the isolation part along the first isolation channel and is exhausted from the gas outlet channel; therefore, the process gas in the cavity can be effectively prevented from entering the gap between the cavities and corroding the sealing element, the air tightness of the vacuum pump is ensured, and the production efficiency and the use cost of the vacuum pump are also ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor equipment, specifically, a cavity assembly and vacuum pump. BACKGROUND

[0002] In the semiconductor manufacturing process, vacuum pumps play a very important role, they are mainly used to maintain the vacuum environment inside the manufacturing equipment, which is essential for many semiconductor process steps. However, the existing vacuum pump is usually corroded by process gas after long time running, which leads to the failure of the sealing property of the vacuum pump, and even the phenomenon of air leakage, and frequent maintenance and replacement of the sealing element also reduce the production efficiency and increase the use cost. SUMMARY

[0003] The utility model discloses a cavity assembly and vacuum pump, which can effectively prevent process gas in the cavity from entering the gap between the cavities and corroding the sealing element, ensuring the air tightness of the vacuum pump, and ensuring the production efficiency and use cost of the vacuum pump.

[0004] The embodiment of the utility model is realized as follows:

[0005] The utility model provides a cavity assembly, including multistage cavity, the multistage cavity is connected and forms the cavity for accommodating rotor, the first isolation passage that surrounds the cavity is formed to the cavity between adjacent, and the isolation part for at least partial isolation of the first isolation passage, adjacent the cavity is equipped with the gas inlet channel and the gas outlet channel with the first isolation passage intercommunication, the gas outlet channel and the gas inlet channel are respectively equipped in the both sides of isolation part, the gas inlet channel passes into the isolation gas to the first isolation passage, to make the isolation gas from the one side of the isolation part along the first isolation passage flow to the other side of the isolation part, and discharge from the gas outlet channel.

[0006] In the above embodiment, the rotor is installed into the chamber by sequentially connecting the multiple-stage cavities and forming the chamber inside the multiple cavities; the first isolation channel surrounding the chamber and the isolation part for isolating the first isolation channel are arranged between any two adjacent cavities in the multiple-stage cavities, and the adjacent cavities are further provided with the gas inlet channel and the gas outlet channel in communication with the first isolation channel, the gas inlet channel and the gas outlet channel are connected with the first isolation channel, and the gas inlet channel and the gas outlet channel are respectively located on the two sides of the isolation part, so that after the isolation gas enters the first isolation channel from the gas inlet channel, the isolation gas can flow around the first isolation channel from one end of the isolation part to the other end of the isolation part and then flow out through the gas outlet channel, avoiding the isolation gas directly flowing out from the gas outlet channel after entering the first isolation channel from the gas inlet channel, so that the isolation gas flows around the outside of the chamber, and effective isolation is realized between the adjacent two cavities by the isolation gas, avoiding the process gas corroding other components, thereby ensuring stable operation of the vacuum pump.

[0007] The cavity assembly and the vacuum pump provided by the embodiment of the utility model have the beneficial effects that: the first isolation channel surrounding the chamber and the isolation part for isolating the first isolation channel are arranged between any two adjacent cavities in the multiple-stage cavities, and the adjacent cavities are further provided with the gas inlet channel and the gas outlet channel in communication with the first isolation channel, the gas inlet channel and the gas outlet channel are connected with the first isolation channel, and the gas inlet channel and the gas outlet channel are respectively located on the two sides of the isolation part, so that after the isolation gas enters the first isolation channel from the gas inlet channel, the isolation gas can flow around the first isolation channel from one end of the isolation part to the other end of the isolation part and then flow out through the gas outlet channel, avoiding the isolation gas directly flowing out from the gas outlet channel after entering the first isolation channel from the gas inlet channel, so that effective isolation is realized between the adjacent two cavities by the isolation gas, avoiding the process gas corroding other components, thereby ensuring stable operation of the vacuum pump. BRIEF DESCRIPTION OF DRAWINGS

[0008] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will be briefly introduced the drawings needed to be used in the embodiment, it should be understood, the following drawings only show some embodiments of the utility model, therefore should not be regarded as the limitation to the range, for the ordinary skilled person in the art, under the premise of not paying the creative labor, still can obtain other related drawings according to these drawings.

[0009] Figure 1 The utility model embodiment provides the vacuum pump structure schematic diagram;

[0010] Figure 2 The utility model embodiment provides the cavity structure schematic diagram;

[0011] Figure 3 The utility model provides a vacuum pump part structure section view schematic diagram provided for the utility model embodiment Figure 2 The utility model provides a vacuum pump part structure section view schematic diagram provided for the utility model embodiment

[0012] Figure 4 The utility model provides a vacuum pump part structure section view schematic diagram provided for the utility model embodiment

[0013] Figure 5 The utility model provides a vacuum pump part structure section view schematic diagram provided for the utility model embodiment Figure 4 The utility model provides a vacuum pump part structure section view schematic diagram provided for the utility model embodiment

[0014] Icon: 1-vacuum pump;10-cavity assembly;100-cavity;110-chamber;120-first isolation channel;130-isolation part;140-air inlet channel;150-air outlet channel;160-second isolation channel;170-first ring groove;180-second ring groove;101-first cavity;102-first wall face;103-second wall face;104-end cavity;200-sealing element. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical scheme and advantage of the utility model embodiment clearer, the technical scheme in the utility model embodiment will be described clearly and completely below in combination with the drawings in the utility model embodiment. Obviously, the described embodiment is a part of the embodiment of the utility model, rather than all the embodiment. The components of the utility model embodiment described and shown in the drawings here can be arranged and designed in various different configurations.

[0016] Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiment in the utility model, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the utility model.

[0017] It should be noted that: similar signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0018] In the description of the utility model, it needs to be explained that, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the utility model product is used, which is merely for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0019] In addition, the terms "horizontal", "vertical" and the like do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that it is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0020] In the description of the utility model, it also needs to be explained that, unless otherwise explicitly specified and limited, the terms "arrangement", "installation", "connection", "connection" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0021] In the semiconductor manufacturing process, vacuum pumps play a very important role, they are mainly used to maintain the vacuum environment inside the manufacturing equipment, which is essential for many semiconductor process steps. However, the existing vacuum pump is usually corroded by process gas after a long time of operation, which causes the sealing of the vacuum pump to fail, and even the phenomenon of air leakage occurs, and frequent maintenance and replacement of the sealing element also reduce the production efficiency and increase the use cost.

[0022] Based on the problems in the prior art, please refer to Figures 1 to 5 The utility model embodiment provides a kind of vacuum pump 1, which can effectively prevent process gas in chamber 110 from entering the gap between cavity 100 and corroding sealing element 200, ensure the air tightness of vacuum pump 1, also guarantee the production efficiency and use cost of vacuum pump 1.

[0023] In the embodiment, the vacuum pump 1 includes a cavity assembly 10.

[0024] In detail, as Figure 1 As shown in the figure, the cavity assembly 10 includes a plurality of stages of cavities 100.

[0025] The plurality of cavities 100 are connected and form a chamber 110 for accommodating the rotor, a first isolation channel 120 surrounding the chamber 110 and an isolation part 130 for isolating the first isolation channel 120 are formed between adjacent cavities 100, and an air inlet channel 140 and an air outlet channel 150 in communication with the first isolation channel 120 are further provided in the adjacent cavities 100, the air outlet channel 150 and the air inlet channel 140 are respectively arranged on two sides of the isolation part 130, the air inlet channel 140 introduces the isolation gas into the first isolation channel 120, so that the isolation gas flows from one side of the isolation part 130 to the other side of the isolation part 130 along the first isolation channel 120, and is discharged from the air outlet channel 150.

[0026] In the embodiment, the plurality of cavities 100 are connected in sequence and form the chamber 110 for accommodating the rotor inside the plurality of cavities 100, so as to realize the installation of the rotor into the plurality of chambers 110; the first isolation channel 120 surrounding the chamber 110 and the isolation part 130 for isolating the first isolation channel 120 are arranged between any two adjacent cavities 100 in the plurality of cavities 100, and the air inlet channel 140 and the air outlet channel 150 in communication with the first isolation channel 120 are further provided in the adjacent cavities 100, the air inlet channel 140 and the air outlet channel 150 are connected with the first isolation channel 120, and the air inlet channel 140 and the air outlet channel 150 are respectively arranged on two sides of the isolation part 130, so that after the isolation gas enters the first isolation channel 120 from the air inlet channel 140, the isolation gas can flow around the first isolation channel 120 from one end of the isolation part 130 to the other end of the isolation part 130, and then flow out through the air outlet channel 150, avoiding the isolation gas directly discharged from the air outlet channel 150 after entering the first isolation channel 120 from the air inlet channel 140, so as to realize effective isolation between the adjacent two cavities 100 by the isolation gas, avoid the corrosion of the process gas to other components, and thus ensure the stable operation of the vacuum pump 1.

[0027] Optionally, the isolation gas can be an inert gas, for example, the isolation gas can be nitrogen. Of course, it is not limited thereto, and in other embodiments of the present application, the isolation gas can also be other gases, which are not limited here.

[0028] Further, as shown in Figures 2-3 The isolation part 130 forms a second isolation channel 160 in communication with the first isolation channel 120, and the flow area of the second isolation channel 160 is smaller than that of the first isolation channel 120.

[0029] In the embodiment, it is to be noted that, in order to ensure that the isolation gas can play an isolation role on the outside of the entire chamber 110, the isolation part 130 does not completely cut off the first isolation channel 120, but a second isolation channel 160 is formed in the isolation part 130 and communicates with the first isolation channel 120, so that when the isolation gas flows around the first isolation channel 120, a small part of the isolation gas also flows through the second isolation channel 160, so that the part provided with the isolation part 130 can also effectively play an isolation role, thereby achieving isolation of the entire circumference of the chamber 110 and improving the isolation effect.

[0030] Furthermore, by making the flow area of the second isolation channel 160 smaller than the flow area of the first isolation channel 120, only a small part of the isolation gas flows through the second isolation channel 160 when entering the first isolation channel 120, and most of the isolation gas flows around the first isolation channel 120 to the gas outlet channel 150.

[0031] Specifically, the isolation part 130 is arranged in the first isolation channel 120, and the isolation part 130 is spaced apart from at least part of the side wall of the first isolation channel 120 to form the second isolation channel 160.

[0032] In the embodiment, by arranging the isolation part 130 in the first isolation channel 120, the isolation part 130 is spaced apart from at least part of the side wall of the first isolation channel 120 to form the second isolation channel 160, so that the isolation part 130 can effectively block most of the airflow from flowing towards the second isolation channel 160, that is, only a small part of the isolation gas flows through the second isolation channel 160, and most of the isolation gas flows around the first isolation channel 120 to the gas outlet channel 150.

[0033] Further, in combination with Figures 4-5 As shown in the figure, at least one of the two adjacent cavities 100 is provided with a first ring groove 170, and the first ring groove 170 of one of the cavities 100 cooperates with the wall surface of the other adjacent cavity 100 to form the first isolation channel 120.

[0034] In the embodiment, the first ring groove 170 is arranged in one of the two adjacent cavities 100, so that the first ring groove 170 of one cavity 100 cooperates with the wall surface of the other cavity 100 to form the first isolation channel 120, which is simple in structure, convenient to process and low in production cost.

[0035] Of course, in other embodiments of the utility model, the first ring groove 170 can also be arranged in both of the two adjacent cavities 100, and the two first ring grooves 170 jointly form the first isolation channel 120, which is not limited here.

[0036] Further, as shown in Figure 2 The cavity assembly 10 further comprises a sealing member 200, which is arranged between two adjacent cavities 100 and surrounds the outer side of the first isolation channel 120.

[0037] In this embodiment, in order to further improve the sealing performance of the cavity assembly 10 when the plurality of cavities 100 are connected, a sealing member 200 is arranged between two adjacent cavities 100, the sealing member 200 has a ring structure, and the sealing member 200 is arranged on the outer side of the first ring groove 170, i.e. the sealing member 200 surrounds the outer side of the first isolation channel 120, so as to further improve the sealing performance of the two adjacent cavities 100.

[0038] Optionally, the sealing member 200 can be an elastic ring.

[0039] Further, as shown in Figure 2 The cavity 100 is further provided with a second ring groove 180, which surrounds the outer circumferential side of the first isolation channel 120, and the sealing member 200 is arranged in the second ring groove 180.

[0040] In this embodiment, the second ring groove 180 is arranged on the outer side of the first ring groove 170, and the sealing member 200 is installed in the second ring groove 180, so that the second ring groove 180 can play a role of installation and positioning of the sealing member 200 when the two adjacent cavities 100 are connected, and the sealing member 200 is stably installed between the two adjacent cavities 100, thereby ensuring the sealing performance of the cavity assembly 10.

[0041] Further, the gas inlet channel 140 and the gas outlet channel 150 are arranged in the same cavity 100.

[0042] In this embodiment, the gas inlet channel 140 and the gas outlet channel 150 are arranged in the same cavity 100, so as to facilitate the processing of the cavity 100.

[0043] Of course, in other embodiments of the utility model, the gas inlet channel 140 and the gas outlet channel 150 can also be arranged in two adjacent cavities 100 respectively, as long as the isolation gas can be input and discharged to the first isolation channel 120 through the gas inlet channel 140 and the gas outlet channel 150, which is not limited here.

[0044] Further, the number of cavities 100 is a plurality, and the plurality of cavities 100 are connected in sequence.

[0045] Optionally, in practical applications, the vacuum pump 1 can be a multi-stage Roots or claw vacuum pump 1, and the number of the cavities 100 is usually 2-5, of course, not limited thereto, in other embodiments of the present application, the vacuum pump 1 can also be other types of pumps, and the number of the cavities 100 can also be other numbers, which are not specifically limited herein.

[0046] In detail, the multi-stage cavity 100 includes at least a first cavity 101, the first cavity 101 has opposite first and second wall surfaces 102 and 103, a cavity chamber 110 penetrates through the first and second wall surfaces 102 and 103, the first wall surface 102 is provided with a first annular groove 170, an air inlet channel 140 and an air outlet channel 150, and the first annular groove 170 is arranged around the cavity chamber 110, a partition 130 is protrudingly arranged in the first annular groove 170, the air inlet and outlet channels 140 and 150 penetrate through the second wall surface 103, and when there are a plurality of first cavities 101, the first wall surface 102 of one of the adjacent first cavities 101 is connected with the second wall surface 103 of another first cavity.

[0047] In the present embodiment, in the two adjacent first cavities 101, the second wall surface 103 of one of the first cavities 101 is connected with the first wall surface 102 of the other first cavity 101, the second wall surface 103 and the first annular groove 170 form a first isolation channel 120, and the air inlet and outlet channels 140 and 150 are arranged on the two sides of the partition 130, the air inlet channel 140 introduces isolation gas into the first isolation channel 120, so that the isolation gas flows from one end of the partition 130 along the first isolation channel 120 to the other end of the partition 130, and is discharged from the air outlet channel 150.

[0048] Further, the multi-stage cavity 100 also includes an end cavity 104, the end cavity 104 is connected with at least one end of the first cavity 101, and has the same structure as the first or second wall surface 102 or 103 to cooperate with the adjacent first cavity 101 to form the first isolation channel 120.

[0049] In the present embodiment, as shown in Figure 1 , the plurality of first cavities 101 are sequentially connected, and the cavity 100 located at the leftmost end or the rightmost end is the end cavity 104, therefore, by connecting the end cavity 104 with the first cavity 101, an isolation channel can also be formed between the first cavity 101 and the end cavity 104, and the isolation effect is achieved.

[0050] In summary, the utility model provides a cavity subassembly 10 and vacuum pump 1 through multistage cavity 100 connects in turn and forms the chamber 110 containing rotor in multistage cavity 100 inside to realize the rotor installation to multistage chamber 110, and the first isolation passage 120 and isolation part 130 for cutting off the first isolation passage 120 are arranged between any two adjacent cavities 100 in multistage cavity 100 around the chamber 110, and adjacent cavity 100 is equipped with with the first isolation passage 120 intercommunication's air inlet passage 140 and air outlet passage 150, air inlet passage 140 and air outlet passage 150 are connected with the first isolation passage 120, and air inlet passage 140 and air outlet passage 150 are located respectively on both sides of isolation part 130, so that after the isolation gas enters the first isolation passage 120 from air inlet passage 140, the isolation gas can flow from one end of isolation part 130 around the first isolation passage 120 to the other end of isolation part 130 and flow out through air outlet passage 150, avoiding the isolation gas from air inlet passage 140 entering the first isolation passage 120 directly from air outlet passage 150, so that the effective isolation effect between the adjacent two cavities 100 is realized by the isolation gas, the process gas corrosion other components are avoided, thereby guaranteeing the stable operation of vacuum pump 1.

[0051] The above only is the preferred embodiment of the utility model and does not limit the utility model, and the utility model can have various changes and changes for the person skilled in the art, and any modification, equivalent replacement, improvement etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A cavity assembly (10) characterized by, The cavity assembly (10) comprises a plurality of cavities (100) connected and forming a chamber (110) for accommodating a rotor, a first isolation channel (120) surrounding the chamber (110) and an isolation part (130) for at least partially isolating the first isolation channel (120) are formed between adjacent cavities (100), and an air inlet channel (140) and an air outlet channel (150) in communication with the first isolation channel (120) are further provided between adjacent cavities (100), the air outlet channel (150) and the air inlet channel (140) are respectively arranged on both sides of the isolation part (130), the air inlet channel (140) introduces isolation gas into the first isolation channel (120), so that the isolation gas flows from one side of the isolation part (130) along the first isolation channel (120) to the other side of the isolation part (130) and is discharged from the air outlet channel (150).

2. The cavity assembly (10) according to claim 1, characterized in that The isolation part (130) forms a second isolation channel (160) in communication with the first isolation channel (120), and the flow area of the second isolation channel (160) is smaller than that of the first isolation channel (120).

3. The cavity assembly (10) of claim 2, characterized in that The isolation part (130) is arranged in the first isolation channel (120), and the isolation part (130) is spaced apart from at least part of the side wall of the first isolation channel (120) to form the second isolation channel (160).

4. The cavity assembly (10) of claim 1, wherein, At least one of the two adjacent cavities (100) is provided with a first ring groove (170), and the first ring groove (170) of one of the cavities (100) cooperates with the wall surface of the other adjacent cavity (100) to form the first isolation channel (120).

5. The cavity assembly (10) of claim 1, wherein, The cavity assembly (10) further comprises a sealing member (200) arranged between the two adjacent cavities (100), and the sealing member (200) is arranged outside the first isolation channel (120).

6. The cavity assembly (10) of claim 5, characterized in that The cavity (100) is further provided with a second ring groove (180) arranged around the outer circumferential side of the first isolation channel (120), and the sealing member (200) is arranged in the second ring groove (180).

7. The cavity assembly (10) of claim 1, wherein, The air inlet channel (140) and the air outlet channel (150) are arranged in the same cavity (100). Alternatively, the air inlet channel (140) and the air outlet channel (150) are arranged in the two adjacent cavities (100) respectively.

8. The cavity assembly (10) of claim 4, wherein, The multi-stage cavity (100) comprises at least a first cavity (101) having opposite first and second wall surfaces (102, 103), the cavity (110) penetrating through the first and second wall surfaces (102, 103), the first wall surface (102) being provided with the first ring groove (170), the gas inlet passage (140) and the gas outlet passage (150), the first ring groove (170) being arranged around the cavity (110), the isolation portion (130) being arranged in the first ring groove (170) in a protruding manner, the gas inlet passage (140) and the gas outlet passage (150) penetrating through the second wall surface (103), and when the first cavities (101) are multiple, the first wall surface (102) of an adjacent first cavity (101) is connected with the second wall surface (103) of another first cavity.

9. The cavity assembly (10) of claim 8, characterized in that The multi-stage cavity (100) further comprises an end cavity (104) connected with one end of the at least first cavity (101) and formed with the same structure as the first wall surface (102) or the second wall surface (103) to cooperate with the adjacent first cavity (101) to form the first isolation passage (120).

10. A vacuum pump (1) characterized in that, A cavity assembly (10) as claimed in any one of claims 1 to 9.

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