Movement device and automation equipment

Abstract

The embodiment of the utility model relates to the technical field of mechanical equipment, and particularly discloses a movement device and automatic equipment. The movable platform is arranged on the base table in a sliding mode, the movable platform is provided with a ventilation channel, one end of the ventilation channel communicates with an external air source, and the other end of the ventilation channel faces the base table, so that when the ventilation channel communicates with the external air source, the movable platform can suspend on the base table; and the driving assembly is arranged on the base table, the driving assembly is connected with the moving platform, and the driving assembly is used for driving the moving platform to move. By means of the mode, the air film gap can be formed between the movable platform and the base station through the ventilation channel in the movable platform under continuous supply of the external air source, so that the movable platform can suspend on the base station, and compared with an existing contact type sliding mode, the air film gap is formed between the movable platform and the base station. The friction force generated when the mobile platform moves is smaller.

Description

TECHNICAL FIELD

[0001] The embodiment of the present application relates to the technical field of mechanical equipment, in particular to a motion device and an automatic equipment. BACKGROUND

[0002] The linear motor platform is widely applied to the micro-lithography technology, numerical control processing, biological technology, integrated circuit packaging equipment, nanometer surface topography measurement and other fields as a kind of mobile platform with the characteristics of precise positioning, accurate motion, satisfying high precision, high stability and high rigidity.

[0003] The inventor of the present application found that, at present, the linear motor platform includes a base, a moving platform and a driving assembly, and the moving platform moves relative to the base under the driving action of the driving assembly, in order to reduce the friction between the moving platform and the base, a lubricating layer is usually added between the moving platform and the base, but the lubricating layer is easily worn out after long time use, which affects the user experience. CONTENT OF THE UTILITY MODEL

[0004] The embodiment of the present application provides a motion device and an automatic equipment, and mainly solves the problem that the wear of the existing contact type moving platform and base is serious under long time working state, which affects the user experience.

[0005] In order to solve the above technical problems, one technical scheme adopted by the present application is to provide a motion device comprising: a base; a moving platform, which is slidingly arranged on the base, and is provided with an air passage, one end of the air passage is communicated with an external air source, and the other end of the air passage is directed to the base, so that when the air passage is communicated with the external air source, the moving platform can be suspended on the base; and a driving assembly, which is arranged on the base, is connected with the moving platform, and is used to drive the moving platform to move.

[0006] Optionally, the air passage comprises a main passage section, a throttling section and a diffusion section, one end of the main passage is communicated with the external air source, the other end of the main passage is communicated with one end of the throttling section, and the other end of the throttling section is communicated with the diffusion section.

[0007] Optionally, the moving platform comprises a first base body, a second base body, a third base body and a fourth base body, the first base body, the second base body, the third base body and the fourth base body jointly enclose a first through cavity, the base is arranged in the first through cavity, and both ends of the base extend out of the first through cavity.

[0008] Optionally, the number of the ventilation channels is multiple, and the ventilation channels are arranged on the first base body and the second base body; and / or, a part of the ventilation channels are arranged on the first base body and the third base body, and another part of the ventilation channels are arranged on the second base body and the fourth base body.

[0009] Optionally, the first base body, the second base body, the third base body and the fourth base body are arranged with a moving gap between the base table.

[0010] Optionally, the moving platform is arranged with an avoiding slot, the avoiding slot is communicated with the first cavity, the avoiding slot is located on the second base body and / or the fourth base body, and the avoiding slot is used for avoiding the collision between the moving platform and the driving assembly when the moving platform moves.

[0011] Optionally, the driving assembly comprises a motor rotor and a motor stator, the motor rotor is capable of sliding relative to the motor stator, the motor rotor is fixed on the moving platform and is used for driving the moving platform to move, and the motor stator is fixed on the base table.

[0012] Optionally, the moving device further comprises an anti-collision assembly, and the anti-collision assembly is fixed on the base table.

[0013] Optionally, the moving device further comprises a grating ruler, the grating ruler is arranged on the moving platform, the grating ruler is capable of moving with the moving platform, and the grating ruler is used for measuring the moving distance of the moving platform.

[0014] To solve the above technical problems, another technical scheme adopted by the present application is to provide an automatic equipment comprising the above moving device.

[0015] The beneficial effects of the embodiments of the present application are as follows: Different from the prior art, the embodiments of the present application provide a moving device and an automatic equipment, which comprise a base table, a moving platform and a driving assembly, the moving platform is arranged with a ventilation channel, one end of the ventilation channel is communicated with an external air source, and the other end of the ventilation channel faces the base table, so that when the ventilation channel is communicated with the external air source, the moving platform can be suspended on the base table; the driving assembly is arranged on the base table, the driving assembly is connected with the moving platform, and the driving assembly is used for driving the moving platform to move. Through the above structure, the embodiments of the present application can make the moving platform suspended on the base table by connecting the moving platform with the external air source, so as to reduce the friction between the moving platform and the base table when the moving platform slides, and compared with the existing method of applying lubricating oil, the present application avoids the problem of lubricating oil failure after long time use. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application. Obviously, the drawings described below are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained according to the drawings without creative labor.

[0017] Figure 1 is an exploded structural schematic diagram of a motion device provided by the embodiments of the present application;

[0018] Figure 2 is an assembly schematic diagram of a motion device provided by the embodiments of the present application;

[0019] Figure 3 is a sectional view schematic diagram of a motion device provided by the embodiments of the present application;

[0020] Figure 4 is a partial enlarged view of A part in Figure 3

[0021] Figure 5 is a structural schematic diagram of a moving platform of a motion device provided by the embodiments of the present application;

[0022] Figure 6 is an enlarged structural schematic diagram of an anti-collision piece of a motion device provided by the embodiments of the present application.

[0023] Reference signs:

[0024] 1000, motion device;

[0025] 1, base station;

[0026] 2, moving platform; 2a, first base body; 2b, second base body; 2c, third base body; 2d, fourth base body; 21, air passage; 211, main passage section; 212, throttling section; 213, diffusion section; 22, first through cavity; 23, avoiding groove;

[0027] 3, driving assembly; 31, motor rotor; 32, motor stator;

[0028] 4, anti-collision assembly; 41, anti-collision piece; 411, fixed part; 412, buffer part;

[0029] 5, grating ruler. DETAILED DESCRIPTION

[0030] ​For the convenience of understanding the present application, the present application will be described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element or one or more intervening elements can be present therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element or one or more intervening elements can be present therebetween. The terms "vertical", "horizontal", "left", "right", and similar expressions used in the present specification are for illustrative purposes only.

[0031] Unless otherwise defined, all technical and scientific terms used in the present specification are intended to have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the present specification are only for the purpose of describing specific embodiments of the present application and are not intended to limit the present application. The term "and / or" used in the present specification includes any and all combinations of one or more of the associated listed items.

[0032] Please refer to Figure 1 and Figure 2 The motion device 1000 comprises a base 1, a moving platform 2 and a driving assembly 3, the moving platform 2 is slidingly arranged on the base 1, the driving assembly 3 is arranged on the base 1, the driving assembly 3 is connected with the moving platform 2, and the driving assembly 3 is used to drive the moving platform 2 to move.

[0033] For the moving platform 2 described above, please refer to Figure 3 and Figure 4 The moving platform 2 is provided with a ventilation channel 21, one end of the ventilation channel 21 is communicated with an external air source, and the other end of the ventilation channel 21 is directed towards the base 1, so that when the ventilation channel 21 is communicated with the external air source, the moving platform 2 can be suspended on the base 1; specifically, when the external air source continuously blows air to the base 1 through the ventilation channel 21, a gas film gap can be formed between the moving platform 2 and the base 1, and gas always exists in the gas film gap, which makes the moving platform 2 suspended relative to the base 1 under the action of the gas static pressure of the gas, thereby avoiding physical contact between the moving platform 2 and the base 1 during sliding, avoiding the generation of friction between the moving platform 2 and the base 1, and avoiding the problem of lubricating oil failure caused by traditional contact sliding between the moving platform 2 and the base 1. There is no physical contact between the moving platform 2 and the base 1, which further improves the moving precision of the moving platform 2 and improves the application prospect of the motion device 1000 in the field with high-precision motion positioning requirements. Moreover, due to the compressible nature of the gas, the machining precision of the outer surface of the gas film formed by the moving platform 2 and the base 1 can be effectively reduced compared with the high machining precision of the contact surface required between the moving platform 2 and the base 1 in the traditional contact sliding mode, thereby reducing the machining cost of the motion device 1000.

[0034] It should be noted that the material of the mobile platform 2 includes, but is not limited to, stone, alloy material, composite material, ceramic material, etc. For example, in the embodiment, the material of the mobile platform 2 is preferably stone, and in particular, the mobile platform 2 is processed and manufactured by using marble. The marble material has the advantages of precise structure, uniform texture, good stability, high strength, high hardness, high precision under heavy load and general temperature, no rust, acid and alkali resistance, wear resistance, no magnetization, no deformation, etc.

[0035] For the above-mentioned ventilation channel 21, please refer to Figure 4 The ventilation channel 21 includes a main channel section 211, a throttling section 212 and a diffusion section 213. One end of the main channel section 211 is in communication with an external gas source to communicate the external gas source with the ventilation channel 21. The other end of the main channel section 211 is in communication with one end of the throttling section 212. The other end of the throttling section 212 is in communication with the diffusion section 213. The diameter of the throttling section 212 is smaller than that of the main channel section 211 and the diffusion section 213, so that the high-pressure gas supplied by the external gas source generates a high-speed airflow after flowing through the throttling section 212 from the main channel section 211. When the high-speed airflow impacts the surface of the base 1, it generates "impact pressure", which adheres to the surface of the base 1 by the Coanda effect to form a uniform gas film layer, thereby forming the above-mentioned gas film gap. Further, the diameter of the diffusion section 213 is larger than that of the main channel section 211, so that the static pressure of the airflow at the outlet of the diffusion section 213 increases, and the gas film between the mobile platform 2 and the base 1 has a higher pressure, thereby improving the carrying capacity and making the suspension more stable.

[0036] In some embodiments, the diameter of the diffusion section 213 linearly expands from small to large in the flow direction of the gas, gradually increases the cross-sectional area according to the principle of isentropic flow, gently reduces the flow rate of the gas, efficiently converts the kinetic energy of the accelerated airflow obtained from the throttling section 212 into static pressure energy, and the horn-shaped diffusion section 213 structure can inhibit the generation of turbulent flow, avoid the oscillation of the generated gas film, and improve the stability of the motion device during operation.

[0037] It can be understood that the shape of the mobile platform 2 includes, but is not limited to, block, ring, flat plate, etc. For example, in the embodiment, the shape of the mobile platform 2 is ring.

[0038] In particular, please refer to Figure 5, the mobile platform 2 comprises a first base body 2a, a second base body 2b, a third base body 2c and a fourth base body 2d, the first base body 2a is opposite to the third base body 2c, and the second base body 2b and the fourth base body 2d are opposite to each other, the first base body 2a, the second base body 2b, the third base body 2c and the fourth base body 2d jointly enclose a first through cavity 22, and the base 1 is arranged in the first through cavity 22 and two ends of the base 1 extend out of the first through cavity 22.

[0039] It can be understood that the connection modes of the first base body 2a, the second base body 2b, the third base body 2c and the fourth base body 2d include but are not limited to screwing, welding, gluing, mortise and tenon and the like.

[0040] It should be noted that the first base body 2a, the second base body 2b, the third base body 2c and the fourth base body 2d can be processed individually and then assembled together, or any two or three adjacent ones can be integrally processed and then assembled, for example, in the present application, the first base body 2a, the second base body 2b and the third base body 2c are integrally formed.

[0041] Further, the number of the air passages 21 is multiple, and the air passages 21 are arranged on the first base body 2a and the third base body 2c; so that when the external air source supplies air to the mobile platform 2, a first air film gap is formed between the base 1 and the first base body 2a, the first air film gap generates a force along the first direction X on the mobile platform 2, and a second air film gap is formed between the base 1 and the second base body 2b, the second air film gap generates a force along the first direction X in the opposite direction on the mobile platform 2, so that the annular mobile platform 2 can keep force balance and be suspended relative to the base 1.

[0042] For the convenience of understanding, in the three-dimensional space, the movement direction of the mobile platform 2 is designated as a third direction Z, the direction of the third base body 2c towards the first base body 2a is a first direction X, the direction of the fourth base body 2d towards the second base body 2b is a second direction Y, and the first direction X, the second direction Y and the third direction Z are perpendicular to each other.

[0043] It should be noted that the limiting mode of the second direction Y of the mobile platform 2 includes but is not limited to air suspension mode, contact sliding mode, magnetic suspension mode and the like.

[0044] And / or, in other embodiments, a part of the ventilation channels 21 is arranged between the first base body 2a and the third base body 2c, capable of forming a first air film gap (not marked) between the base 1 and the first base body 2a, the first air film gap generates a force along the first direction X on the moving platform 2, and a second air film gap (not marked) is formed between the base 1 and the second base body 2b, the second air film gap generates a force along the first direction X in the opposite direction on the moving platform 2, so that the moving platform 2 can be suspended relative to the base 1 along the first direction X, another part of the ventilation channels 21 is arranged between the second base body 2b and the fourth base body 2d, capable of forming a third air film gap (not marked) between the base 1 and the second base body 2b, the third air film gap generates a force along the second direction Y on the moving platform 2, and a fourth air film gap (not marked) is formed between the base 1 and the fourth base body 2d, the fourth air film gap generates a force along the second direction Y in the opposite direction on the moving platform 2, so that the moving platform 2 can be suspended relative to the base 1 along the second direction Y, thereby realizing the limiting of the first direction X and the second direction Y between the moving platform 2 and the base 1.

[0045] It can be understood that the width of the first air film gap or the width of the second air film gap or the width of the third air film gap or the width of the fourth air film gap is adjustable, by controlling the flow, flow rate, etc. of the gas supplied by the external gas source. To cope with the different weights of the moving platform 2 of different materials resulting in changes in the air film gap.

[0046] It should be noted that the number of the above-mentioned ventilation channels 21 is even, for example: 4 pairs, 6 pairs, 8 pairs, etc. The ventilation channels 21 are symmetrically distributed on the moving platform 2, ensuring that the force distribution between the moving platform 2 and the base 1 is balanced, and improving the stability of the moving platform 2 when moving.

[0047] In some embodiments, after the base 1 is arranged in the first through cavity 22, the first base body 2a, the second base body 2b, the third base body 2c and the fourth base body 2d are arranged with a moving gap between the base 1, so that after the external gas source supplies gas, the moving platform 2 can form an air film gap with the base 1.

[0048] In some embodiments, referring to Figure 3 , the moving platform 2 is provided with an avoidance groove 23, the avoidance groove 23 is in communication with the first through cavity 22, the avoidance groove 23 is located on the second base body 2b and / or the fourth base body 2d, and the avoidance groove 23 is used to avoid the collision between the moving platform 2 and the driving assembly 3 when the moving platform 2 moves.

[0049] It should be noted that along the direction perpendicular to the movement direction of the moving platform 2, the cross-sectional area of the avoidance groove 23 is greater than that of the driving assembly 3, so as to ensure the smooth avoidance of the driving assembly 3 by the avoidance groove 23.

[0050] It can be understood that the driving assembly 3 as a device for driving the movement of the moving platform 2 usually adopts a motor as a power source, and the motor type can be selected from, but not limited to, a linear motor, a rotary motor, etc. For example, in the embodiment, the motor type is preferably a linear motor.

[0051] For the driving assembly 3 described above, please refer to Figure 1 , the driving assembly 3 includes a motor mover 31 and a motor stator 32, the motor mover 31 is capable of sliding relative to the motor stator 32, the motor mover 31 is fixed to the moving platform 2, the motor mover 31 is used to drive the movement of the moving platform 2, the motor stator 32 is fixed to the base 1, and the avoiding groove 23 is capable of allowing the motor stator 32 to pass through.

[0052] In some embodiments, please refer to Figure 6 , the motion device 1000 further includes an anti-collision assembly 4, the anti-collision assembly 4 is fixed to the base 1, and the anti-collision assembly 4 is disposed on the same side of the base as the motor stator 32. In the present application, the movement stroke of the motor mover 31 is determined by the length of the motor stator 32, so the setting position of the anti-collision assembly 4 should be located within the movement stroke of the motor mover 31, that is, the projection of at least part of the anti-collision assembly 4 along the first direction X overlaps the projection of the motor stator 32.

[0053] Further, the anti-collision assembly 4 includes at least four anti-collision pieces 41, two of which are disposed at one end of the motor stator 32 along the third direction Z and are symmetrically fixed to the base 1, and the other two are disposed at the other end of the motor stator 32 along the opposite direction of the third direction Z and are symmetrically fixed to the base 1.

[0054] The anti-collision piece 41 includes a fixed part 411 and a buffer part 412, the fixed part 411 is fixed to the base 1, one end of the buffer part 412 is fixedly connected to the fixed part 411, and the other end of the buffer part 412 faces the moving platform 2. The buffer part 412 can be elastically deformed when impacted by the moving platform 2, thereby converting the force received during impact into elastic potential energy to achieve buffer protection for the moving platform 2, avoiding damage to the moving platform 2 due to impact on a hard object.

[0055] In some embodiments, the motion device 1000 further includes a grating ruler 5, the grating ruler 5 is disposed on the moving platform 2, the grating ruler 5 can move with the moving platform 2, and the grating ruler 5 is used to measure the movement distance of the moving platform 2. The grating ruler 5 cooperates with the linear motor to achieve high-precision control of the motion device 1000.

[0056] In some embodiments, the grating ruler 5 further includes a fixed support (not marked), the fixed support is used to fix the grating ruler 5 to the moving platform 2.

[0057] In order to avoid the dust and other foreign matters outside the motion device 1000 from shielding the grating ruler 5 when the motion device 1000 is working, thereby affecting the measurement accuracy of the grating ruler 5, in the embodiment, the first base body 2a is designated as the top of the motion device 1000, the third base body 2c is designated as the bottom of the motion device 1000, and the grating ruler 5 is arranged on the third base body 2c. The base 1, the first base body 2a, the second base body 2b and the third base body 2c form shielding protection for the grating ruler 5.

[0058] The motion device 1000 provided by the application comprises a base 1, a moving platform 2 and a driving assembly 3. The moving platform 2 is arranged on the base 1 in a sliding manner, and the driving assembly 3 is arranged on the base 1 and connected with the moving platform 2, and the driving assembly 3 is used for driving the moving platform 2 to move. Specifically, the moving platform 2 is provided with a ventilation channel 21, one end of the ventilation channel 21 is communicated with an external gas source, and the other end of the ventilation channel 21 is directed towards the base 1, so that when the ventilation channel 21 is communicated with the external gas source, the moving platform 2 can be suspended on the base 1. Through the above structure, the application can continuously supply gas to the moving platform 2 by relying on the external gas source. After the gas passes through the ventilation channel 21, the gas enters between the moving platform 2 and the base 1, so that a gas film gap is formed between the moving platform 2 and the base 1. There is always gas in the gas film gap, and the moving platform 2 is suspended relative to the base 1 under the action of the gas static pressure of the gas, thereby avoiding physical contact between the moving platform 2 and the base 1 during the sliding process of the moving platform 2, avoiding the generation of friction between the moving platform 2 and the base 1, avoiding the wear problem between the moving platform 2 and the base 1 caused by long-term use of the traditional contact type sliding, and further improving the movement accuracy of the moving platform 2 under the driving of the driving assembly 3.

[0059] The application further provides an automatic equipment embodiment, which comprises the motion device 1000 described above, and the structure and functions of the motion device 1000 are described in the above embodiment, which will not be repeated here.

[0060] It should be noted that the application provides the preferred embodiments of the application in the specification and drawings, but the application can be implemented in many different forms and is not limited to the embodiments described in the specification. These embodiments are not additional limitations on the content of the application, and the purpose of providing these embodiments is to make the disclosure of the application more thorough and comprehensive. Furthermore, each of the above technical features continues to be combined, forming various embodiments not listed above, which are considered to be within the scope of the application. Furthermore, those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should be within the protection scope of the claims of the application.

Claims

1. A motion device, characterized by, The motion device comprises: a base; a moving platform, which is slidingly arranged on the base, the moving platform being provided with a ventilation passage, one end of the ventilation passage being connected to an external air source, and the other end of the ventilation passage being directed towards the base, so that when the ventilation passage is connected to the external air source, the moving platform can be suspended on the base; a driving assembly, which is arranged on the base and connected to the moving platform, the driving assembly being used to drive the moving platform to move.

2. The motion device according to claim 1, wherein: the ventilation passage comprises a main passage section, a throttling section and a diffusion section, one end of the main passage section being connected to the external air source, and the other end of the main passage section being connected to one end of the throttling section, and the other end of the throttling section being connected to the diffusion section.

3. The motion device according to claim 1, wherein: the moving platform comprises a first base body, a second base body, a third base body and a fourth base body, the first base body, the second base body, the third base body and the fourth base body jointly enclosing a first through cavity, and the base being arranged in the first through cavity and extending out of the first through cavity at both ends.

4. The motion device according to claim 3, wherein: the number of the ventilation passages is plural, and the ventilation passages are arranged on the first base body and the third base body; and / or, a part of the ventilation passages are arranged on the first base body and the third base body, and another part of the ventilation passages are arranged on the second base body and the fourth base body.

5. The motion device according to claim 4, wherein: a moving gap is arranged between the first base body, the second base body, the third base body, the fourth base body and the base.

6. The motion device according to claim 3, wherein: the moving platform is provided with an avoiding slot, the avoiding slot being connected to the first through cavity, the avoiding slot being arranged on the second base body and / or the fourth base body, and the avoiding slot being used to avoid the collision between the moving platform and the driving assembly when the moving platform moves.

7. The motion device according to any one of claims 1-6, wherein: the driving assembly comprises a motor rotor and a motor stator, the motor rotor being capable of sliding relative to the motor stator, the motor rotor being fixed to the moving platform and used to drive the moving platform to move, and the motor stator being fixed to the base.

8. The motion device according to any one of claims 1-6, wherein: the motion device further comprises an anti-collision assembly, and the anti-collision assembly is fixed to the base.

9. The motion device according to any one of claims 1-6, wherein: the motion device further comprises a grating ruler, the grating ruler being arranged on the moving platform and capable of moving with the moving platform, and the grating ruler being used to measure the moving distance of the moving platform.

10. An automated apparatus, characterized by, The motion device comprises the motion device according to any one of claims 1-9.

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