Pipeline angle measuring tool for semiconductor pipeline

Abstract

The utility model provides a pipeline angle measuring tool used for a semiconductor pipeline, the pipeline angle measuring tool used for the semiconductor pipeline comprises a detection part, a connection part and a calibration part, the detection part comprises a dial and a pointer, the pointer can be rotatably arranged on the dial, two ends of the pointer are respectively a pointer end and a gravity end, and the pointer end is connected with the connection part. The pointer end and the gravity end are perpendicular to the reference surface in the vertical direction. The connecting part and the pointer are oppositely arranged on two back-to-back end faces of the dial, the connecting part can abut against a semiconductor pipeline to be detected, and the calibration part is arranged at the bottom of the dial. The pipeline angle measurement tool for the semiconductor pipeline can accurately and conveniently measure the angle of the pipeline for semiconductor production, is simple in overall structure, few in parts and low in cost, can control the measurement error within + / -0.5 degrees, meets the fine angle tolerance requirement of the semiconductor pipeline, and is accurate in pipeline angle measurement and wide in application range.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor pipeline measurement, in particular to a pipeline angle measurement tool for semiconductor pipeline. BACKGROUND

[0002] In the semiconductor manufacturing process, the pipeline system is as critical as the blood vessels of the human body, which accurately delivers various special gases. Due to site restrictions and production requirements, semiconductor pipelines need to be welded and bent, so that the entire pipeline layout has a variety of different angle bends. Due to the strict requirements for process precision in semiconductor production, the angle of these pipelines cannot be deviated.

[0003] The existing conventional angle measurement tools, such as ordinary angle rulers and universal angle gauges, cannot achieve precision detection in the task of measuring semiconductor pipelines. Taking a square elbow pipeline as an example, when the existing tool is attached to the square structure, the angle ruler cannot be closely attached to the outer contour of the pipeline, which results in a large measurement error or even no reading, greatly hindering the installation and debugging process of the pipeline and posing a hidden danger to the stability of semiconductor production.

[0004] Therefore, it is necessary to design a pipeline angle measurement tool for semiconductor pipeline to solve the above problems. CONTENT OF THE INVENTION

[0005] Therefore, in order to overcome the defects of the prior art, the present application provides a pipeline angle measurement tool for semiconductor pipeline, which effectively solves the problem that the existing angle measurement tool cannot accurately measure the angle of the semiconductor pipeline.

[0006] According to the pipeline angle measurement tool for semiconductor pipeline provided by the present application, the pipeline angle measurement tool for semiconductor pipeline comprises a detection part, a connecting part and a calibration part, the detection part comprises a scale disc and a pointer, the pointer is rotatably arranged on the scale disc, both ends of the pointer are a pointer end and a gravity end, and the pointer end and the gravity end are vertically arranged on the reference surface along the vertical direction; the connecting part and the pointer are oppositely arranged on the two opposite end surfaces of the scale disc, the connecting part can abut against the semiconductor pipeline to be measured, and the calibration part is arranged at the bottom of the scale disc.

[0007] Preferably, the outer periphery of the scale disc is provided with a scale, the range of the scale is 0°-360°, and the pipeline angle measurement tool for semiconductor pipeline can be switched between a static state and a use state; in the case that the pipeline angle measurement tool for semiconductor pipeline is in the static state, the pointer end points to 90°, and in the case that the pipeline angle measurement tool for semiconductor pipeline is in the use state, the scale pointed by the pointer end is the angle of the semiconductor pipeline to be measured.

[0008] Preferably, the middle part of the dial is provided with a connecting hole, and the middle part of the indicating needle is connected with the middle part of the dial through the connecting hole.

[0009] Preferably, the periphery of the connecting hole is provided with a sliding groove, and the gravity end is slidably arranged in the sliding groove.

[0010] Preferably, the connecting part comprises a fixing member and a replacement member, the fixing member is fixedly arranged on the dial, the first end of the replacement member is detachably connected with the fixing member, and the second end of the replacement member is abutted with the semiconductor pipe to be measured.

[0011] Preferably, the fixing member comprises a vertical part and an extension part, the vertical part is perpendicular to the surface of the dial, and the extension part extends from the end of the vertical part towards the two sides of the vertical part.

[0012] Preferably, the end of the replacement member connected with the fixing member is provided with a containing groove, and the fixing member can be arranged in the containing groove.

[0013] Preferably, the second end of the replacement member is provided with an abutting recess, and the abutting recess comprises a plurality of abutting surfaces connected with each other, and each abutting surface can be abutted with the semiconductor pipe to be measured.

[0014] Preferably, the bottom of the dial is provided with a calibration installation groove, the calibration installation groove is arranged on the end surface of the dial provided with the connecting part, and the groove bottom of the calibration installation groove is provided with a plurality of installation holes.

[0015] Preferably, the calibration part comprises a planar block and a connecting block connected with each other, the connecting block is arranged in the calibration installation groove through the installation hole, and the bottom surface of the planar block is a planar surface.

[0016] According to the pipeline angle measuring tool for semiconductor pipeline of the utility model, through the cooperation of the detection part, the connecting part and the calibration part, the angle of the pipeline for semiconductor production can be accurately and conveniently measured. The pipeline angle measuring tool for semiconductor pipeline has simple overall structure, few parts, no complex electronic elements and mechanical transmission structure, and only needs to be wiped and cleaned during daily maintenance, and whether the indicating needle is accurately measured can be checked regularly, so that ordinary workers can perform maintenance work after slight training. Since the materials of the constituent parts are common metals, the processing technology is mature, the cost is greatly reduced compared with the existing semiconductor detection equipment, and therefore the cost is low. Since the overall structure relies on the gravity principle, the indicating needle is vertically pointed to the gravity end, and the high-precision scale disc is combined, so that the measurement error can be controlled within ±0.5°, the fine angle tolerance requirement of the semiconductor pipeline is met, and therefore the pipeline angle measurement is accurate. Since the connecting part and the detection part are arranged on the two opposite surfaces of the scale disc, the connecting part with a suitable size can be selected according to the pipe diameter of the pipeline, and therefore the adaptability is high. Whether it is a standard pipe diameter pipeline, a special pipe diameter pipeline derived from process improvement, or a complex elbow pipe and a multi-angle joint formed by welding and bending, the angle measurement can be performed, and the application range is wide.

[0017] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 A structure schematic view of the pipeline angle measuring tool for semiconductor pipeline according to the embodiment of the utility model is shown;

[0020] Figure 2 A rear view of the pipeline angle measuring tool for semiconductor pipeline according to the embodiment of the utility model is shown;

[0021] Figure 3 A structure schematic view of the scale disc according to the embodiment of the utility model is shown;

[0022] Figure 4 A rear view of the scale disc according to the embodiment of the utility model is shown;

[0023] Figure 5 A structure schematic view of the dismounting part according to the embodiment of the utility model is shown;

[0024] Figure 6 A structural schematic diagram of a plane block and a connecting block is shown according to the embodiment of the utility model;

[0025] Figure 7 A structural schematic diagram of a pipeline angle measuring tool for semiconductor pipeline and a first pipeline to be measured connected is shown according to the embodiment of the utility model;

[0026] Figure 8 A structural schematic diagram of a dismounting and replacing part and a first pipeline to be measured connected is shown according to the embodiment of the utility model;

[0027] Figure 9 A structural schematic diagram of a pipeline angle measuring tool for semiconductor pipeline and a second pipeline to be measured connected is shown according to the embodiment of the utility model;

[0028] Figure 10 A structural schematic diagram of a dismounting and replacing part and a second pipeline to be measured connected is shown according to the embodiment of the utility model.

[0029] The figure mark: 1 - detection part;101 - dial;102 - indicating needle;103 - pointer end;104 - gravity end;105 - connecting hole;106 - sliding groove;2 - connecting part;201 - fixed part;202 - dismounting and replacing part;203 - vertical part;204 - extension part;205 - containing recess;206 - abutment surface;3 - calibration part;301 - calibration installation slot;302 - installation hole;303 - plane block;304 - connecting block;4 - first pipeline to be measured;5 - second pipeline to be measured. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantage of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0031] In the description of the embodiments of this application, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0032] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0033] In the description of the embodiments of this application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0034] According to a first aspect of this utility model, a pipe angle measuring fixture for semiconductor pipes is provided, such as... Figures 1 to 10 As shown, the semiconductor pipe angle measuring fixture is used for measuring the angle of a semiconductor half-tube. The semiconductor pipe angle measuring fixture includes a detection part 1, a connection part 2, and a calibration part 3.

[0035] In the following description, reference will be made to Figures 1 to 10 The detailed structure of the detection section 1, connection section 2, and calibration section 3 of the semiconductor pipeline angle measuring fixture is described in detail.

[0036] like Figures 1 to 4 As shown, in this embodiment, the detection unit 1 includes a dial 101 and an indicator needle 102, the indicator needle 102 being rotatably disposed on the dial 101. The dial 101 may be formed as a disc structure, and the indicator needle 102 may be rotated at the center of the disc. The dial 101 may be made of aluminum alloy material through precision milling, and the surface of the dial 101 should be flat and smooth to meet the usage requirements.

[0037] The two ends of the indicating needle 102 are a pointer end 103 and a gravity end 104, both of which are perpendicular to the reference surface in the vertical direction. The reference surface may, for example, be the ground, a work surface or a measurement surface, and needs to meet the measurement requirements of the angle of the semiconductor pipe. Specifically, it may, for example, be a high-precision marble platform, and the vertical direction is perpendicular to the reference surface. In order to ensure measurement accuracy, the dial 101 and the indicating needle 102 should have sufficient accuracy, and the two ends of the indicating needle 102 should be perpendicular to the reference surface without using the pipe angle measurement tool for the semiconductor pipe. The indicating needle 102 can be made of stainless steel material, and the surface of the indicating needle 102 is chrome-plated, which has corrosion-resistant properties and is easy to observe. The gravity end 104 can be made of high-density tungsten alloy, which has a large gravity, so that under the gravity traction, the indicating needle 102 can always be perpendicular to the reference surface no matter how it is placed, and has stability.

[0038] The connecting part 2 and the indicating needle 102 are oppositely arranged on the two opposite end surfaces of the dial 101, and the connecting part 2 can abut against the semiconductor pipe to be measured. The two opposite end surfaces are used for swinging the indicating needle 102 and for the user to connect the pipe angle measurement tool for the semiconductor pipe to the semiconductor pipe to be measured, so as to avoid interference between the connecting part 2 and the detection part 1.

[0039] The calibration part 3 is arranged at the bottom of the dial 101, and the user needs to detect the detection part 1 by using the calibration part 3 when using the pipe angle measurement tool for the semiconductor pipe, so as to avoid measurement errors. The calibration method may, for example, be that the detection part 1 is placed on a high-precision marble platform through the calibration part 3, and whether the indicating needle 102 of the detection part 1 is perpendicular to the marble platform is observed. If it is perpendicular, the pipe angle measurement tool for the semiconductor pipe can be used for angle measurement, and if it is not perpendicular, the connection between the indicating needle 102 and the dial 101 needs to be adjusted so that the indicating needle 102 can be perpendicular to the marble platform.

[0040] This semiconductor pipeline angle measuring fixture, through the cooperation of the detection unit 1, the connection unit 2, and the calibration unit 3, can accurately and conveniently measure the angle of pipelines used in semiconductor production. This semiconductor pipe angle measuring fixture has a simple overall structure with few parts and no complex electronic components or mechanical transmission structures. Routine maintenance only requires wiping and cleaning, and periodic checks on the accuracy of the indicator needle 102. Ordinary workers can perform the maintenance work with minimal training. Since the components are made of common metals and the processing technology is mature, the cost is significantly reduced compared to existing semiconductor testing equipment, resulting in low cost. Because the overall structure relies on the principle of gravity, the indicator needle 102 is pulled vertically by the gravity end 104, ensuring accurate vertical pointing. Combined with the high-precision scale 101, the measurement error can be controlled within ±0.5°, meeting the fine angle tolerance requirements of semiconductor pipes, thus ensuring accurate pipe angle measurement. Since the connecting part 2 and the detection part 1 are located on opposite sides of the scale 101, the appropriate size of the connecting part 2 can be selected according to the pipe diameter, making it highly adaptable. It can measure angles for standard diameter pipes, irregular diameter pipes derived from process improvements, complex bends formed by welding and bending, and multi-angle joints, making it applicable to a wide range of applications.

[0041] Preferably, such as Figures 1 to 4 As shown, in this embodiment, the outer periphery of the dial 101 is provided with a scale, the scale range being 0°-360°, which is sufficient for pipe inspection. This semiconductor pipe angle measuring fixture can switch between a static state and a working state. When the semiconductor pipe angle measuring fixture is in a static state (e.g....), Figure 1 As shown), pointer 103 points to 90°, when the semiconductor channel angle measuring fixture is in use (e.g. Figure 7 and Figure 9 As shown in the figure, the scale pointed to by pointer 103 is the angle of the semiconductor channel under test.

[0042] Preferably, such as Figure 3 As shown, in this embodiment, a connecting hole 105 is provided in the center of the dial 101, and the center of the indicator needle 102 is connected to the center of the dial 101 through the connecting hole 105. The connection can be made, for example, by using a connecting pin, which also allows the indicator needle 102 to rotate. During the calibration step, the indicator needle 102 can be adjusted by adjusting the connection position of the connecting pin.

[0043] Preferably, such as Figure 1 and Figure 3As shown, in this embodiment, a sliding groove 106 is provided around the connecting hole 105, and the gravity end 104 is slidably disposed in the sliding groove 106. The sliding groove 106 can be formed as a circular groove surrounding the connecting hole 105. Since the gravity end 104 has a large volume, it is disposed in the sliding groove 106 in order to allow the indicator needle 102 to rotate smoothly.

[0044] Preferably, such as Figure 2 , Figure 4 and Figure 5 As shown, in this embodiment, the connecting part 2 may include a fixing member 201 and a replaceable member 202. The fixing member 201 is fixedly disposed on the dial 101. The first end of the replaceable member 202 is detachably connected to the fixing member 201, and the second end of the replaceable member 202 abuts against the semiconductor pipe to be tested. The fixing member 201 can be fixedly connected to the dial 101, and the fixed connection can be, for example, integrally formed or welded. The replaceable member 202 can be detachably connected to the fixing member 201, so that different sizes of replaceable members 202 can be replaced according to the different diameters of the pipe to be tested.

[0045] Preferably, such as Figure 2 , Figure 4 and Figure 5 As shown, in this embodiment, the fixing member 201 may include a vertical portion 203 and an extension portion 204. The vertical portion 203 is perpendicular to the surface of the dial 101, and the extension portion 204 extends from the end of the vertical portion 203 toward both sides of the vertical portion 203. The fixing member 201 may be formed into a T-shaped structure, which may include the aforementioned vertical portion 203 and extension portion 204. The T-shaped structure facilitates the connection and disassembly of the replacement member 202.

[0046] Preferably, such as Figure 5 As shown in the embodiment, the end of the replacement component 202 connected to the fixing component 201 is provided with a receiving groove 205, and the fixing component 201 can be disposed in the receiving groove 205. The size and structure of the receiving groove 205 match the size and structure of the fixing component 201 to facilitate disassembly and replacement.

[0047] Preferably, such as Figure 5 As shown, in this embodiment, the second end of the replacement component 202 is provided with an abutment recess. The abutment recess may include a plurality of interconnected abutment surfaces 206, each of which can abut against the semiconductor pipe under test. The abutment surfaces 206 may be formed as arc-shaped surfaces, and the plurality of interconnected abutment surfaces 206 have different sizes to accommodate pipes of different specifications. Furthermore, each abutment surface 206 is provided with another opposing abutment surface 206, which, through the two abutment surfaces 206, can clamp and abut against the sidewall of the pipe. See also Figure 8 and Figure 10 ,Figure 8 The first pipe to be tested, 4, has a smaller diameter, thus it can abut against a smaller contact surface, 206. Figure 10 The second test pipe 5 has a larger diameter, thus allowing it to abut against a larger abutment surface 206. The abutment recess of the replacement part 202 can be a standard part, with each abutment surface 206 pre-set according to standard pipe specifications. However, it is not limited to this; the abutment recess of the replacement part 202 can also be custom-made according to the pipe diameter.

[0048] Preferably, such as Figure 4 and Figure 6 As shown, in this embodiment, a calibration mounting groove 301 is provided at the bottom of the dial 101. The calibration mounting groove 301 is located on the end face of the dial 101 where the connecting part 2 is provided. To avoid interference with the detection part 1, the connection between the calibration part 3 and the dial 101 is coplanar with the connecting part 2. A plurality of mounting holes 302 are provided at the bottom of the calibration mounting groove 301. These mounting holes 302 can be, for example, threaded holes.

[0049] Preferably, such as Figure 4 and Figure 6 As shown, in this embodiment, the calibration unit 3 may include a planar block 303 and a connecting block 304 connected to each other. The connecting block 304 is disposed in the calibration mounting groove 301 through a mounting hole 302, and the bottom surface of the planar block 303 is flat. The connecting block 304 can be threadedly connected to the mounting hole 302 using a connector such as a connecting screw. The planar bottom surface of the planar block 303 can be placed on a marble platform for calibration.

[0050] The measurement process of this semiconductor pipe using a pipe angle measuring fixture is as follows: First, preliminary measurement preparation is carried out, and the semiconductor pipe to be measured (e.g., the pipe angle measuring fixture) is placed in the test position. Figure 7 The first test pipe 4 and Figure 9 One end of the second pipe to be tested (5) is fixed to a clamping device (in the prior art, a commonly used clamping device for semiconductor pipe testing is sufficient) to ensure that the pipe end is precisely parallel to the horizontal plane, laying the foundation for subsequent measurements. Based on the outer diameter of the pipe to be tested, a suitable replacement part 202 is selected and inserted into the T-shaped fixing part 201. Calibration is then performed by placing the calibration unit 3 stably on a high-precision marble platform. With the eye level with the pointer, check if the pointer accurately points to 90 degrees. If there is a deviation, fine-tune the position of the scale 101, and simultaneously adjust the connection between the indicator needle 102 and the scale 101 until the pointer returns to 90 degrees, completing the calibration. Finally, after successful calibration, hold the fixture and tightly fit the abutment recess of the replacement part 202 against the pipe to be tested, ensuring a seamless fit. The dial of the scale 101 faces the operator, with the line of sight perpendicular to the pointer, clearly reading the scale indicated by the pointer. This reading is the precise angle of the bend.

[0051] The pipe angle measuring tool for semiconductor pipes can accurately and conveniently measure the angle of the pipe for semiconductor production through the cooperation of the detection part, the connecting part and the calibration part. The pipe angle measuring tool for semiconductor pipes has simple overall structure, few parts, no complex electronic elements and mechanical transmission structure, and only needs to be wiped and cleaned during daily maintenance, and whether the indicating needle is accurately measured can be checked periodically, so that ordinary workers can perform the maintenance work after slight training. Since the materials of the constituent parts are common metals, the processing technology is mature, and compared with the existing semiconductor detection equipment, the cost is greatly reduced, so the cost is low. Since the overall structure relies on the principle of gravity, the indicating needle is pulled by the gravity end and vertically points to the precision, and combined with the high-precision scale, the measurement error can be controlled within ±0.5°, so that the fine angle tolerance requirement of the semiconductor pipe is met, and thus the pipe angle measurement is accurate. Since the connecting part and the detection part are arranged on the two surfaces of the scale which are opposite to each other, the connecting part with appropriate size can be selected according to the pipe diameter of the pipe, so that the adaptability is high. Whether it is a standard pipe diameter pipe, a special pipe diameter pipe derived from process improvement, or a complex elbow pipe and a multi-angle joint formed by welding and bending, the angle measurement can be performed, and the application range is wide.

[0052] Finally, it should be noted that: the above-described embodiments are only specific embodiments of the present application, used to illustrate the technical solutions of the present application, and not to limit them. The protection scope of the present application is not limited thereto. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can modify or easily think of changes to the technical solutions recorded in the foregoing embodiments, or make equivalent replacements to some technical features, without departing from the technical range disclosed in the present application. Such modifications, changes or replacements do not make the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A pipe angle measuring tool for semiconductor piping, characterized by, The pipeline angle measuring tool for the semiconductor pipeline comprises a detection part, a connecting part and a calibration part, the detection part comprises a dial and a pointer, the pointer is rotatably arranged on the dial, two ends of the pointer are a pointer end and a gravity end respectively, the pointer end and the gravity end both vertically drop on a reference surface along a vertical direction; the connecting part and the pointer are oppositely arranged on two opposite end surfaces of the dial, the connecting part can abut against a semiconductor pipeline to be measured, and the calibration part is arranged on the bottom of the dial.

2. The pipe angle measuring tool for semiconductor pipeline according to claim 1, wherein, The outer periphery of the dial is provided with a scale, and the scale ranges from 0° to 360°. The pipeline angle measuring tool for the semiconductor pipeline can be switched between a static state and a use state, in the case that the pipeline angle measuring tool for the semiconductor pipeline is in the static state, the pointer end points to 90°, and in the case that the pipeline angle measuring tool for the semiconductor pipeline is in the use state, the pointer end points to the angle of the semiconductor pipeline to be measured.

3. The pipe angle measuring tool for semiconductor pipeline according to claim 1, wherein The middle part of the dial is provided with a connecting hole, and the middle part of the pointer is connected with the middle part of the dial through the connecting hole.

4. The pipe angle measuring tool for semiconductor pipeline according to claim 3, wherein The connecting hole is provided with a sliding groove on the periphery, and the gravity end is slidably arranged in the sliding groove.

5. The pipe angle measurement tool for semiconductor pipelines according to claim 1, wherein, The connecting part comprises a fixing part and a detachable part, the fixing part is fixedly arranged on the dial, the first end of the detachable part is detachably connected with the fixing part, and the second end of the detachable part abuts against the semiconductor pipeline to be measured.

6. The pipe angle measurement tool for semiconductor pipelines according to claim 5, wherein The fixing part comprises a vertical part and an extension part, the vertical part is perpendicular to the surface of the dial, and the extension part extends from the end of the vertical part towards the two sides of the vertical part.

7. The pipe angle measurement tool for semiconductor pipelines according to claim 6, wherein The end of the detachable part connected with the fixing part is provided with a containing groove, and the fixing part can be arranged in the containing groove.

8. The pipe angle measurement tool for semiconductor pipelines according to claim 5, wherein The second end of the detachable part is provided with an abutting recess, The abutting recess comprises a plurality of abutting surfaces connected with each other, and each abutting surface can abut against the semiconductor pipeline to be measured.

9. The pipe angle measurement tool for semiconductor pipelines according to claim 1, wherein, The bottom of the dial is provided with a calibration installation groove, and the calibration installation groove is arranged on the end surface of the dial provided with the connecting part. The groove bottom of the calibration installation groove is provided with a plurality of installation holes.

10. The pipe angle measurement tool for semiconductor pipelines according to claim 9, wherein The calibration part comprises a planar block and a connecting block connected with each other, the connecting block is arranged in the calibration installation groove through the installation hole, and the bottom surface of the planar block is a plane.

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