Liquid supply pipeline air tightness batch detection device for wafer cleaning equipment
By designing a batch testing device for the airtightness of the liquid supply pipeline for wafer cleaning equipment, and adopting a push-button rotation and multi-detection point structure, the problem of cumbersome and experience-dependent traditional testing methods is solved, and efficient and reliable airtightness testing is achieved.
Patent Information
- Application Number
- CN202422528365.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-18
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2034-10-18
AI Technical Summary
Traditional methods for testing the airtightness of the liquid supply pipeline in wafer cleaning equipment are cumbersome, rely on manual experience, are prone to testing failures, and are inefficient.
Design a batch testing device for the airtightness of the liquid supply pipeline of a wafer cleaning equipment. The device uses a push button to rotate instead of bolts to tighten, and combines multiple testing points to achieve automated batch testing by using the matching structure of the push button and the pressure block.
It simplifies the testing process, reduces labor intensity, improves the reliability and efficiency of testing, reduces reliance on experience, and enables batch testing.
Smart Images
Figure CN223637039U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of semiconductor production equipment, in particular to a liquid supply pipeline air tightness batch detection device for wafer cleaning equipment. BACKGROUND
[0002] The liquid supply pipeline of wafer cleaning equipment has high machining precision requirement, and after machining, the joint position usually needs to be detected for air tightness, the traditional detection mode is to put the joint position of the liquid supply pipeline into a special detection groove, then a pressing plate that can be attached to the outside profile of the joint is pushed by a bolt, then compressed air is connected from the outside and put in water for detection, this mode needs to tighten the bolt every time, on the one hand, the operation is complicated when tightening the bolt, and the tightness of the bolt needs to be determined by the experience of the detection personnel, and in actual operation, the bolt sometimes appears to retreat due to the reaction, resulting in detection failure. SUMMARY
[0003] The utility model mainly solves the technical problem that provides a liquid supply pipeline air tightness batch detection device for wafer cleaning equipment, which can improve the efficiency and reliability of air tightness detection.
[0004] To solve the above technical problems, one technical scheme of the utility model is provided: a liquid supply pipeline air tightness batch detection device for wafer cleaning equipment, the liquid supply pipeline air tightness batch detection device comprises a bottom plate, a push button and a pressing block, a plurality of detection device installation grooves are arranged on the bottom plate, each detection device installation groove is composed of a torsion groove and a pressing groove, the center line of the pressing groove is collinear with the center line of the torsion groove, an avoidance notch is arranged on one side of the torsion groove and communicated with the top of the pressing groove, the push button is installed in the torsion groove, the pressing block is installed in the pressing groove, the tail end of the pressing block can pass through the avoidance notch and abut against the push button, the push button can drive the pressing block to move linearly in the pressing groove, so that the top of the pressing block is pressed against the groove head inner wall of the pressing groove, the profile of the top of the pressing block matches the profile of the groove head inner wall of the pressing groove and the profile of the front and rear sides of the liquid supply pipeline to be detected, and a silica gel pad is installed on the top of the pressing block.
[0005] In a preferred embodiment of the utility model, the push button is from top to bottom in turn is twist head, positioning round table, oval push table and positioning shaft, the long axis of oval push table is greater than the diameter of positioning round table, corresponding twist groove is from bottom to top in turn is bottom shaft hole, push groove and axial positioning groove, bottom shaft hole and positioning shaft size match, push groove is the circular groove that diameter with the long axis size of oval push table matches, the thickness of push groove matches the thickness of oval push table, the diameter of axial positioning groove matches the diameter of positioning round table, one side of twist groove is equipped with the pressing block through port that communicates with pressing groove. Still be equipped with auxiliary positioning structure on bottom plate, auxiliary positioning structure includes sheet metal clamping plate, clamping plate positioning seat and the positioning rod hole that sets up on twist head, the top of sheet metal clamping plate is equipped with multiple rod grooves, clamping plate positioning seat is composed of multiple clamping plate positioning jack around axial positioning groove, when sheet metal clamping plate is fixed on bottom plate by relying on positioning jack, the top of sheet metal clamping plate is flush with positioning rod hole.
[0006] In a preferred embodiment of the utility model, the pressing groove includes a press rod groove and a press head groove, the pressing block includes a press rod and a press head, during installation, the press rod is placed in the press rod groove, the press head is placed in the press head groove, the tail end of the press rod extends into the twist groove through the avoiding notch, and the maximum distance between the top of the press head and the inner wall of the groove head of the press head groove is not greater than the sum of the maximum length of the tail end of the press rod extending into the twist groove and the thickness of the to-be-inspected position of the liquid supply pipeline.
[0007] In a preferred embodiment of the utility model, the width of the press rod groove is greater than the width of the avoiding notch, a plurality of groups of bottom teeth of the same specification are symmetrically arranged on the two sides of the press rod, and the outer side surface of the bottom tooth abuts against the two side groove walls of the press rod groove. A plurality of groups of top teeth matching the positions of the bottom teeth are symmetrically arranged on the groove opening of the press rod groove, the distance between the two top teeth in the same group is greater than the width of the press rod, the top teeth are of the same specification, the width of the top teeth matches the distance between the two adjacent groups of bottom teeth, a tooth groove matching the width of the bottom tooth is arranged between the two adjacent groups of top teeth, and the sum of the thicknesses of the bottom tooth and the top tooth is less than the groove depth of the press rod groove.
[0008] The utility model discloses the traditional bolt tight pressing action is changed into push button rotation push, like this not only simplifies the tightening action and reduces the labor intensity when detecting, and can directly judge the degree of compression through the rotation angle, reduces the experience dependence when compressing and improves the reliability of detection, in addition, a plurality of detection positions are arranged on a bottom plate, and the original single detection is changed into batch detection, so that the efficiency of the whole detection process is significantly improved. BRIEF DESCRIPTION OF DRAWINGS
[0009] Figure 1is a three-dimensional structure schematic view of a preferred embodiment of the utility model;
[0010] Figure 2 is the structure schematic view of installation slot in the embodiment shown;
[0011] Figure 3 is the schematic view of knob and silica gel pad connection relation in the embodiment shown;
[0012] Figure 4 is the schematic view of knob auxiliary positioning structure in the embodiment shown;
[0013] Figure 5 is the schematic view of knob in the embodiment shown;
[0014] Figure 6 is the schematic view of silica gel pad in the embodiment shown;
[0015] Figure 7 is the schematic view of corresponding part to be detected in the embodiment shown;
[0016] The marks of each component in the drawing are as follows:
[0017] 1. bottom plate, 2. detection device installation slot, 3. push button, 4. pressing block, 5. sheet metal card plate, 6. limiting rod, 7. liquid supply pipeline;
[0018] 201. bottom shaft hole, 202. push groove, 203. axial positioning groove, 204. card plate positioning jack, 205. pressure head groove, 206. pressure rod groove, 207. top tooth, 208. tooth groove, 209. avoiding notch;
[0019] 301. twist head, 302. positioning round table, 303. oval push table, 304. positioning shaft, 305. positioning rod hole;
[0020] 401. pressure head, 402. pressure rod, 403. bottom tooth. DETAILED DESCRIPTION
[0021] The preferred embodiments of the utility model are described in detail below in combination with the drawings, so that the advantages and features of the utility model can be more easily understood by the person skilled in the art, and the protection scope of the utility model is more clearly and explicitly defined.
[0022] Please refer to Figures 1 to 6 , the utility model embodiment content includes:
[0023] The application discloses a kind of wafer cleaning equipment liquid supply pipeline air tightness batch detection device, the liquid supply pipeline air tightness batch detection device includes: bottom plate 1, push button 3 and pressing block 4, 12 detection device installation grooves 2 are arranged on the bottom plate 1, each detection device installation groove 2 is composed of torsion groove and pressing groove, the middle line of the pressing groove is collinear with the torsion groove, the side of the torsion groove is provided with the avoidance gap 209 that is communicated with the top of the pressing groove, the push button 3 is installed in the torsion groove, the pressing block 4 is installed in the pressing groove, the tail end of the pressing block 4 can pass through the avoidance gap 209 and the push button 3 abuts, the push button 3 can push the pressing block 4 and move linearly in the pressing groove, make the top of the pressing block 4 press towards the groove head inner wall of the pressing groove, the contour of the top of the pressing block 4 is matched with the contour of the groove head inner wall of the pressing groove and the contour of the joint position of the liquid supply pipeline 7 to be detected before and after, and the top of the pressing block 4 is provided with silica gel pad.
[0024] The push button 3 is in turn torsion head 301, positioning circular table 302, oval push table 303 and positioning shaft 304 from top to bottom, the major axis of the oval push table 303 is greater than the diameter of the positioning circular table 302, and the corresponding torsion groove is in turn bottom shaft hole 201, push groove 202 and axial positioning groove 203 from bottom to top, the bottom shaft hole 201 is matched with the size of the positioning shaft 304, the push groove 202 is circular groove with the size matched with the major axis of the oval push table 303, the thickness of the push groove 202 is matched with the thickness of the oval push table 303, and the diameter of the axial positioning groove 203 is matched with the diameter of the positioning circular table 302. Through the structure, after the push button 3 is installed in the torsion groove, the cooperation between the positioning shaft 304 and the positioning circular table 302 and the axial positioning groove 203 and the bottom shaft hole 201 can ensure that the push button 3 remains vertical when rotating, so that the distance change between the outer side of the oval push table 303 and the avoidance gap 209 in the movement process realizes the pushing action of the pressing block 4.
[0025] The bottom plate 1 is also provided with an auxiliary positioning structure, the auxiliary positioning structure includes sheet metal clamping plate 5, clamping plate positioning seat and positioning rod hole 305 arranged on the torsion head, the top of the sheet metal clamping plate 5 is provided with a plurality of rod grooves, the clamping plate positioning seat is composed of 10 clamping plate positioning insertion holes arranged around the axial positioning groove 203, the corresponding central angle between adjacent two insertion holes is 10°, and when the sheet metal clamping plate 5 is fixed on the bottom plate 1 by relying on the positioning insertion hole, the top end of the sheet metal clamping plate 5 is flush with the positioning rod hole 305. When rotating the push button 3 to push the pressing block 4 to close the joint position of the liquid supply pipeline 7, a limiting rod can be inserted into the positioning rod hole 305, so that the end of the limiting rod is clamped in the rod groove at the top of the sheet metal clamping plate, so that the push button 3 can be effectively prevented from loosening due to the reaction force in the detection process.
[0026] The pressing groove comprises a pressing rod groove 206 and a pressing head groove 205, the pressing block 4 comprises a pressing rod 402 and a pressing head 401, the pressing rod 402 is placed in the pressing rod groove 206 during installation, the pressing head 401 is placed in the pressing head groove 205, the tail end of the pressing rod 402 extends into the torsion groove through the avoiding gap 209, the maximum distance between the top of the pressing head 401 and the inner wall of the groove head of the pressing head groove 205 is not greater than the sum of the maximum length of the tail end of the pressing rod 402 extending into the torsion groove and the thickness of the to-be-inspected position of the liquid supply pipeline 7. The groove width of the pressing rod groove 206 is greater than the width of the avoiding gap 209, two groups of bottom teeth 403 of the same specification are symmetrically arranged on both sides of the pressing rod 402, and the outer side surface of the bottom tooth 403 abuts against the groove wall on both sides of the pressing rod groove 206. Two groups of top teeth matching the positions of the bottom teeth 403 are symmetrically arranged on the groove opening of the pressing rod groove 206, the specifications of each top tooth 207 are the same, the width of the top tooth 207 is gap-fitted with the distance between the two groups of adjacent bottom teeth 403, the distance between the two top teeth 207 in the same group is greater than the width of the pressing rod 402, tooth grooves 208 gap-fitted with the width of the bottom tooth 403 are arranged between the two groups of adjacent top teeth 207, and the sum of the thicknesses of the bottom tooth 403 and the top tooth 207 is also gap-fitted with the groove depth of the pressing rod groove 206. In this way, when the pressing rod 402 is placed, the bottom tooth 403 can enter the pressing rod groove 206 through the tooth groove 208 between the top teeth 207, and after the pressing rod 402 is pushed by the elliptical push table 303 during the air tightness detection process, the bottom tooth 403 will slide to below the top tooth 207 and abut against the top tooth 207, so that the top tooth 207 presses the bottom tooth 403, the deformation of the pressing rod 402 is effectively prevented, and the stability of the pressing head 401 in closing the liquid supply pipeline 7 is improved.
[0027] The device is a special detection device for a liquid supply pipeline, and is used for air tightness detection of the connection part between the pipeline and the interface of the liquid supply pipeline 7. During actual detection, the whole device is placed in water, and then the to-be-inspected joint of the liquid supply pipeline 7 is placed between the bottom of the pressing head groove 205 and the top of the pressing head 401. Since the profile of the top of the pressing head 401 and the inner wall of the groove head of the pressing head groove 205 matches the profile of the two sides of the to-be-inspected position, and the top of the pressing head 401 is further provided with a silica gel pad, when the push button 3 is rotated, the elliptical push table 303 can push the whole pressing block 4 to slide forward along the groove bottom to close the to-be-inspected position, then compressed air is introduced from the other end of the liquid supply pipeline 7, and whether bubbles are generated is observed, so that whether the to-be-inspected position of the joint has a gap can be determined.
[0028] The above merely describes the embodiments of the present application, and does not limit the patent range of the present application, and any equivalent structure or equivalent process conversion according to the content of the present application and the drawings, or direct or indirect application in other related technical fields is also included in the patent protection range of the present application.
Claims
1. A liquid supply line air tightness batch detection device for a wafer cleaning apparatus, characterized by, The liquid supply pipeline airtightness batch detection device comprises a bottom plate, a push button and a pressing block, a plurality of detection device installation grooves are arranged on the bottom plate, each detection device installation groove is composed of a torsion groove and a pressing groove, the middle line of the pressing groove is collinear with the middle line of the torsion groove, an avoidance notch communicating with the top of the pressing groove is arranged on one side of the torsion groove, the push button is installed in the torsion groove, the pressing block is installed in the pressing groove, the tail end of the pressing block can pass through the avoidance notch and abut against the push button, the push button can push the pressing block to move linearly in the pressing groove, so that the top of the pressing block is pressed against the inner wall of the groove head of the pressing groove, the profile of the top of the pressing block and the profile of the inner wall of the groove head of the pressing groove are matched with the profile of the front and rear sides of the position to be detected of the liquid supply pipeline, and a silica gel pad is arranged on the top of the pressing block.
2. The liquid supply line airtightness batch detection device for wafer cleaning equipment according to claim 1, characterized in that, The push button comprises a torsion head, a positioning circular table, an oval push table and a positioning shaft from top to bottom, the major axis of the oval push table is greater than the diameter of the positioning circular table, the corresponding torsion groove comprises a bottom shaft hole, a push groove and an axial positioning groove from bottom to top, the size of the bottom shaft hole is matched with the size of the positioning shaft, the push groove is a circular groove with a diameter matched with the size of the major axis of the oval push table, the thickness of the push groove is matched with the thickness of the oval push table, the diameter of the axial positioning groove is matched with the diameter of the positioning circular table, and the side of the torsion groove is provided with a pressing block passing port communicating with the pressing groove.
3. The liquid supply line airtightness batch detection device for wafer cleaning equipment according to claim 2, characterized in that, An auxiliary positioning structure is further arranged on the bottom plate, the auxiliary positioning structure comprises a sheet metal clamping plate, a clamping plate positioning seat and a positioning rod hole arranged on the torsion head, a plurality of rod grooves are arranged on the top of the sheet metal clamping plate, the clamping plate positioning seat is composed of a plurality of clamping plate positioning insertion holes arranged around the axial positioning groove, and when the sheet metal clamping plate is fixed on the bottom plate by relying on the positioning insertion holes, the top end of the sheet metal clamping plate is flush with the positioning rod hole.
4. The liquid supply line airtightness batch detection device for wafer cleaning equipment according to claim 1, characterized in that, The pressing groove comprises a pressing rod groove and a pressing head groove, the pressing block comprises a pressing rod and a pressing head, the pressing rod is arranged in the pressing rod groove, the pressing head is arranged in the pressing head groove, the tail end of the pressing rod extends into the torsion groove through the avoidance notch, and the maximum distance between the top of the pressing head and the inner wall of the groove head of the pressing head groove is not greater than the sum of the maximum length of the tail end of the pressing rod extending into the torsion groove and the thickness of the position to be detected of the liquid supply pipeline.
5. The liquid supply line airtightness batch detection device for wafer cleaning equipment according to claim 4, characterized in that, The groove width of the pressing rod groove is greater than the width of the avoidance notch, a plurality of groups of bottom teeth of the same specification are symmetrically arranged on the two sides of the pressing rod, and the outer side surface of the bottom tooth abuts against the two side groove walls of the pressing rod groove.
6. The liquid supply line airtightness batch detection device for wafer cleaning equipment according to claim 5, characterized in that, A plurality of groups of top teeth matched with the positions of the bottom teeth are symmetrically arranged on the groove opening of the pressing rod groove, the distance between two top teeth in the same group is greater than the width of the pressing rod, the top teeth are of the same specification, the width of the top teeth is matched with the distance between two adjacent groups of bottom teeth, tooth grooves matched with the width of the bottom teeth are arranged between two adjacent groups of top teeth, and the sum of the thicknesses of the bottom teeth and the top teeth is less than the groove depth of the pressing rod groove.