Exposure machine

Abstract

The utility model discloses an exposure machine which comprises a beam frame provided with an object placing part; the exposure head is arranged on the beam frame and provides a light source for the object placing part; the driving assembly is at least used for driving the exposure head to move in the Z-axis direction, the driving assembly comprises a motor and a synchronous transmission assembly, and the synchronous transmission assembly comprises a driving wheel driven by the motor and a Z-axis direction synchronous belt arranged on the driving wheel in a sleeving mode; the driving wheel and the synchronous belt are in transmission through positioning assemblies arranged in an array mode, each positioning assembly comprises a positioning protrusion arranged on one of the driving wheel and the synchronous belt and a positioning groove formed in the other one of the driving wheel and the synchronous belt, and the positioning protrusions and the positioning grooves are matched to limit relative displacement of the driving wheel and the synchronous belt. According to the exposure machine with the structure, synchronous transmission is carried out through the driving assembly, and the problem that a synchronous wheel in a traditional synchronous structure is easy to deviate can be solved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of exposure technology, specifically about a kind of exposure machine. BACKGROUND

[0002] Exposure machine refers to the equipment that the image information on film or other head body is transferred to the surface coated with photosensitive substance by opening light to emit UVA wavelength ultraviolet rays, and it is widely used in semiconductor, microelectronics, biological devices and nanotechnology field.

[0003] In prior art, exposure machine is usually driven by screw rod. When the length of screw rod is large, the cost of synchronous transmission assembly is high, and it is heavy and difficult to install, and maintenance is difficult. When the speed of transmission is large, the noise of synchronous transmission assembly is particularly large. Alternatively, it is driven by conventional synchronous belt. In the process of transmission, the synchronous belt is easy to deviate, and when the speed of transmission is large, the synchronous belt deviation is more serious. After a period of transmission, the synchronous belt will be stretched and deformed, and the precision of synchronous transmission assembly will be reduced.

[0004] Therefore, in view of the above technical problems, it is necessary to provide a new exposure machine.

[0005] The information disclosed in this BACKGROUND section is only intended to increase an understanding of the general background of the application, and should not be taken as an acknowledgement or any form of suggestion that this information forms prior art that is already known to those of ordinary skill in the art. SUMMARY

[0006] The utility model aims at providing an exposure machine, which can solve the problem of easy deviation of conventional synchronous structure transmission.

[0007] In order to achieve the above purpose, the utility model provides an exposure machine, which comprises: beam frame, object placing part is arranged on the beam frame; exposure head, which is arranged on the beam frame, provides light source for the object placing part; drive assembly, which is used for driving the exposure head to move along Z axis direction, the drive assembly comprises motor and synchronous transmission assembly, the synchronous transmission assembly comprises driving wheel driven by the motor and Z axis direction synchronous belt sleeved on the driving wheel, the driving wheel and synchronous belt are driven by array arrangement of positioning assembly, the positioning assembly comprises positioning protrusion arranged on one of the driving wheel and synchronous belt and positioning groove arranged on the other one, the positioning protrusion and positioning groove cooperate to limit the relative displacement of the driving wheel and synchronous belt in reference direction, wherein the reference direction is parallel to the rotation axis of the driving wheel.

[0008] In one or more embodiments of the utility model, the positioning protrusion includes a first protruding part extending in a first direction and a second protruding part extending in a second direction, the positioning groove includes a first recess extending in the first direction and a second recess extending in the second direction, when the positioning protrusion and the positioning groove are matched, the first protruding part is clamped in the first recess, and the second protruding part is clamped in the second recess, wherein the first direction and the second direction have an included angle.

[0009] In one or more embodiments of the utility model, the positioning protrusion includes a guide part at the end thereof, and the width of the guide part is smaller than the slot width of the positioning groove in the slot width direction of the positioning groove.

[0010] In one or more embodiments of the utility model, the first protruding part and the second protruding part are matched in a herringbone shape, and the first recess and the second recess are matched in a herringbone shape.

[0011] In one or more embodiments of the utility model, the motor is a self-locking motor.

[0012] In one or more embodiments of the utility model, the object placing part includes a first clamp and / or a second clamp, and the first clamp and the second clamp are movably arranged in the height direction of the object placing part.

[0013] In one or more embodiments of the utility model, the first clamp includes a first clamp body and a first clamping piece, the first clamping piece is connected to the first clamp body, the second clamp includes a second clamp body and a second clamping piece, the second clamping piece is connected to the second clamp body, and the distance between the first clamp bodies is less than or equal to 40 mm.

[0014] In one or more embodiments of the utility model, the synchronous transmission assembly further includes a driven wheel driven by the driving wheel and a synchronous belt sleeved on the driven wheel, and the driven wheel and the driving wheel have the same wheel type.

[0015] In one or more embodiments of the utility model, the driving assembly further includes a speed reduction device, and the motor is connected to the synchronous transmission assembly through the speed reduction device.

[0016] In one or more embodiments of the utility model, the synchronous belt is a steel wire polyurethane synchronous belt.

[0017] Compared with the prior art, the exposure machine of the utility model, through setting the positioning assembly between the synchronous belt and the driving wheel in the Z axis direction, the synchronous transmission assembly can drive through the positioning assembly, and the positioning assembly includes the positioning protrusions and the positioning grooves which can match with each other, for limiting the relative displacement of the driving wheel and the synchronous belt in the parallel direction of the driving wheel shaft (namely the reference direction), overcoming the problem that the synchronous belt is easy to deviate, improving the precision of the transmission assembly and being smaller in noise.

[0018] In another aspect, the synchronous belt adopts the polyurethane steel wire synchronous belt, and can be applicable to high tension, high load and high torque occasions. By installing the speed reduction device between the synchronous transmission assembly and the motor, the torque of the motor will increase after being decelerated by the speed reduction device, so that the technical effects of load lifting and stable forward and reverse rotation can be realized. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments in the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating labor.

[0020] Fig. 1 It is a schematic view of the exposure machine provided in an embodiment of the utility model;

[0021] Fig. 2 It is a schematic view of the driving assembly provided in an embodiment of the utility model;

[0022] Fig. 3 It is a schematic view of the protrusion part matched in the herringbone shape provided in an embodiment of the utility model.

[0023] MAIN REFERENCE SIGN EXPLANATION:

[0024] 1-beam frame, 2-exposure head, 3-driving assembly;

[0025] 31-driving wheel, 32-driven wheel, 33-synchronous belt, 34-motor, 35-speed reduction device;

[0026] 4-first clamp, 5-second clamp;

[0027] 61-first protrusion part, 62-second protrusion part, 71-first recessed part, 72-second recessed part. DETAILED DESCRIPTION

[0028] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0032] like Figs. 1 to 3 The exposure machine shown includes a beam frame 1, an exposure head 2, and a drive assembly 3. The beam frame 1 has an object placement section; the exposure head 2 is mounted on the beam frame 1 and provides an exposure light source for the object placement section; the drive assembly 3 includes a motor 34 and a synchronous transmission assembly; the synchronous transmission assembly includes a drive wheel 31 driven by the motor 34 and a Z-axis synchronous belt 33 sleeved on the drive wheel 31, where the Z-axis is the height direction of the object placement section; the drive wheel 31 and the synchronous belt 33 are connected by an array of positioning components, each including a positioning protrusion on one of the drive wheel 31 and the synchronous belt 33, and a positioning groove on the other, the positioning protrusion and the positioning groove cooperating to limit the relative displacement of the drive wheel 31 and the synchronous belt 33 in a reference direction.

[0033] The reference direction is parallel to the rotation axis of the driving wheel 31. The relative displacement of the driving wheel 31 and the synchronous belt 33 in the reference direction is limited by the cooperation of the positioning protrusion and the positioning groove, which avoids the problem of the synchronous belt deviating from the synchronous wheel in the conventional synchronous structure. Therefore, the driving assembly 3 does not need to be installed with a flange, which makes the driving assembly 3 easier to install than the conventional synchronous structure.

[0034] Further, the positioning protrusion includes a first protrusion part 61 extending in a first direction and a second protrusion part 62 extending in a second direction, and the positioning groove includes a first recess part 71 extending in the first direction and a second recess part 72 extending in the second direction. When the positioning protrusion and the groove cooperate, the first protrusion part 61 is clamped in the first recess part 71, and the second protrusion part 62 is clamped in the second recess part 72. The first direction and the second direction have an included angle therebetween.

[0035] It should be noted that the included angle between the first direction and the second direction means that the first direction and the second direction are not parallel, that is, the included angle between the first direction and the second direction is less than 180°. Since the first direction and the second direction have an included angle therebetween, the cooperation of the first protrusion part 61 and the first recess part 71 and the cooperation of the second protrusion part 62 and the second recess part 72 in the reference direction will not produce a relative position in the reference direction, thereby limiting the possible relative displacement of the driving wheel and the synchronous belt.

[0036] Further, the positioning protrusion includes a guide part at the end thereof. In the groove width direction of the positioning groove, the width of the guide part is less than the slot width of the positioning groove.

[0037] The width of the guide part at the end of the positioning protrusion is less than the slot width of the positioning groove, which is used to guide the smooth insertion of the guide part into the positioning groove, further guide the smooth alignment and insertion of the positioning protrusion into the positioning groove, and reduce the error and improve the assembly accuracy during assembly.

[0038] Further, as shown in Fig. 3 The first protrusion part 61 and the second protrusion part 62 cooperate to form a herringbone shape, and the first recess part 71 and the second recess part 72 cooperate to form a herringbone shape. That is, in actual application, the driving wheel 31 can adopt a herringbone wheel, and the synchronous belt 33 can adopt a herringbone tooth synchronous belt.

[0039] Further, the synchronous belt 33 can be selected from a steel wire polyurethane synchronous belt. The polyurethane material can provide good wear resistance and anti-aging performance; and such a synchronous belt 33 is internally provided with a steel wire core, which can further enhance the tensile strength and tear resistance of the synchronous belt 33.

[0040] Further, the motor 34 is a self-locking motor. The self-locking motor can be automatically locked after the motor stops working to prevent rotation.

[0041] Further, the object placing part comprises the first clamp 4 and / or the second clamp 5, the first clamp 4 and the second clamp 5 are movably arranged along the height direction of the object placing part. As an alternative, the object placing part can only comprise the first clamp 4 or the second clamp 5; the first clamp 4 can be movably arranged along the height direction of the object placing part only, or the second clamp 5 can be movably arranged along the height direction of the object placing part only.

[0042] Further, the first clamp 4 comprises a first clamp body and a first clamping member connected to the first clamp body, the second clamp 5 comprises a second clamp body and a second clamping member connected to the second clamp body, the distance between the first clamp bodies is less than or equal to 40mm. Specifically, the first clamping member and the second clamping member are clamping cylinders. The distance between the first clamp bodies can also be selected according to actual needs.

[0043] Further, the synchronous transmission assembly further comprises a driven wheel 32 driven by the driving wheel 31 and a synchronous belt 33 sleeved on the driven wheel 32, the driven wheel 32 and the driving wheel 31 are of the same type. It can be understood that the synchronous belt 33 is sleeved on the driven wheel 32 and the driving wheel 31, and the driven wheel 32 is distributed with the same positioning protrusions and positioning grooves as the driving wheel 31.

[0044] Further, the driving assembly 3 further comprises a speed reducer 35, the motor 34 is connected to the synchronous transmission assembly through the speed reducer 35. After the motor 34 is decelerated through the speed reducer 35, the torque will increase, the load will increase, and the noise can be further reduced in combination with the counterweight of the driving assembly 3.

[0045] It is obvious for those skilled in the art that the present application is not limited to the details of the above-mentioned exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0046] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be combined appropriately to form other embodiments that those skilled in the art can understand.

Claims

1. An exposure machine characterized by comprising: The application relates to a light exposure device, comprising: a beam frame provided with an object placing part; an exposure head provided on the beam frame and used for providing exposure light source for the object placing part; a driving assembly used for driving the exposure head to move along the Z-axis direction, wherein the driving assembly comprises a motor and a synchronous transmission assembly, the synchronous transmission assembly comprises a driving wheel driven by the motor and a Z-axis direction synchronous belt sleeved on the driving wheel, the driving wheel and the synchronous belt are in transmission through an array-arranged positioning assembly, the positioning assembly comprises a positioning protrusion arranged on one of the driving wheel and the synchronous belt and a positioning groove arranged on the other one of the driving wheel and the synchronous belt, the positioning protrusion and the positioning groove are matched to limit the relative displacement of the driving wheel and the synchronous belt in a reference direction, wherein the reference direction is parallel to the rotation axis of the driving wheel.

2. The exposure machine according to claim 1, characterized by The positioning protrusion comprises a first protrusion part extending along a first direction and a second protrusion part extending along a second direction, the positioning groove comprises a first recess part extending along the first direction and a second recess part extending along the second direction, when the positioning protrusion and the positioning groove are matched, the first protrusion part is clamped in the first recess part, and the second protrusion part is clamped in the second recess part, wherein the first direction and the second direction have an included angle.

3. The exposure machine according to claim 1, characterized by, The positioning protrusion comprises a guide part at the end thereof, and the width of the guide part is smaller than the slot width of the positioning groove in the slot width direction of the positioning groove.

4. The exposure machine according to claim 2, characterized by The first protrusion part and the second protrusion part are matched in a herringbone shape, and the first recess part and the second recess part are matched in a herringbone shape.

5. The exposure apparatus according to one of claims 1, wherein The motor is a self-locking motor.

6. The exposure apparatus according to one of claims 1, wherein The object placing part comprises a first clamp and / or a second clamp, the first clamp and the second clamp are movably arranged along the height direction of the object placing part.

7. The exposure machine according to claim 6, characterized by The first clamp comprises a first clamp body and a first clamping piece connected to the first clamp body, the second clamp comprises a second clamp body and a second clamping piece connected to the second clamp body, and the spacing between the first clamp bodies is less than or equal to 40 mm.

8. The exposure apparatus according to one of claims 1, wherein The synchronous transmission assembly further comprises a driven wheel driven by the driving wheel and a synchronous belt sleeved on the driven wheel, and the driven wheel and the driving wheel have the same wheel type.

9. The exposure apparatus according to one of claims 1, wherein The driving assembly further comprises a speed reduction device, and the motor is connected to the synchronous transmission assembly through the speed reduction device.

10. The exposure apparatus according to one of claims 1, wherein The synchronous belt is a steel wire polyurethane synchronous belt.

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