Chip photoresist stripping device

Abstract

The utility model provides a chip photoresist stripping device, and belongs to the technical field of photoresist stripping. The chip photoresist stripping device comprises a flower basket body, a flower basket container, a stirring magneton and a magnetic stirrer, the basket container is used for containing photoresist stripping liquid. The flower basket body is placed in the flower basket container, the flower basket body comprises an upper-layer disc, a lower-layer disc and a plurality of structural columns connected with the upper-layer disc and the lower-layer disc, the disc faces of the upper-layer disc and the lower-layer disc correspond to each other and are parallel to each other, the upper-layer disc and the lower-layer disc are fixed on the structural columns, and the disc faces of the upper-layer disc and the lower-layer disc are parallel to the bottom of the flower basket container. The lower-layer tray is positioned between the upper-layer tray and the bottom of the flower basket container; a gap is reserved between the upper-layer tray and the lower-layer tray; and the stirring magneton is placed on the lower-layer disc. The flower basket container is placed on the porcelain stirrer, and the magnetic stirrer is used for controlling the stirring magneton to rotate. The chip photoresist stripping device provided by the utility model can improve the photoresist stripping efficiency.

Description

TECHNICAL FIELD

[0001] The utility model relates to photoresist stripping technical field especially, a kind of chip photoresist stripping device. BACKGROUND

[0002] In semiconductor chip preparation process, in order to prepare effective metal electrode, the substrate of chip needs to be cleaned, photoetched and coated. The principle of chip photoetching is to use the metal via pattern on photoresist layer exposed and developed, to etch the metal electrode pattern on photo mask completely and accurately on the substrate of chip through etching process, and finally to prepare metal electrode through metal evaporation process. After the preparation of metal electrode is completed, photoresist needs to be stripped.

[0003] The existing photoresist stripping commonly used method is as follows: placing chip in flower basket device containing single slot or multiple slots, and then placing flower basket device in container containing stripping liquid. In order to ensure that photoresist can be completely stripped from chip substrate, generally, chip substrate is placed in stripping liquid for long time soaking or short time ultrasonic cleaning, and finally complete stripping of photoresist is realized.

[0004] In the existing photoresist stripping technology, for the method of removing photoresist by long time soaking, the time consumed is longer, which reduces production efficiency; and for the method of removing photoresist by short time ultrasonic cleaning, it is easy to cause serious damage to metal layer of metal electrode. UTILITY MODEL CONTENT

[0005] An object of the utility model is to solve the problems of long time production efficiency and short time ultrasonic cleaning causing damage to metal layer of metal electrode in the existing photoresist stripping technology.

[0006] In particular, the embodiment of the application provides a photoresist stripping device, which comprises:

[0007] Flower basket container for containing photoresist stripping liquid;

[0008] Flower basket body placed in the flower basket container, the flower basket body comprises upper layer disc and lower layer disc corresponding to each other and parallel to each other, and a plurality of structure columns connected with the upper layer disc and the lower layer disc, the upper layer disc and the lower layer disc are fixed on the plurality of structure columns, the disc surface of the upper layer disc and the lower layer disc is parallel to the bottom of the flower basket container, the lower layer disc is located between the upper layer disc and the bottom of the flower basket container, and a gap is reserved between the upper layer disc and the lower layer disc;

[0009] Stirring magnet placed on the lower layer disc; and

[0010] A magnetic stirrer, the flower basket container is placed on the magnetic stirrer, and the magnetic stirrer is used for controlling the rotation of the stirring magnet.

[0011] Further, the outer peripheral side of the lower layer disc is provided with an extension part extending to a preset length in the direction of the upper layer disc, and the extension part connects the upper layer disc and the lower layer disc as a whole.

[0012] Further, a plurality of spiral grooves are provided on the peripheral side of the extension part, one end of the spiral groove is communicated with the gap, and the other end of the spiral groove is located on the side of the extension part close to the upper layer disc.

[0013] Further, the lower layer disc is provided with a groove for accommodating the stirring magnet.

[0014] Further, the upper layer disc is provided with a retention hole for placing the stirring magnet from the upper layer disc to the groove, and the retention hole corresponds to the groove.

[0015] Further, the distance between the lower layer disc and the bottom of the flower basket container is a first preset height.

[0016] Further, a plurality of first through holes are provided on the lower layer disc, and the first through holes are used for stripping the photoresist.

[0017] Further, a plurality of second through holes are provided on the upper layer disc, and the second through holes are used for facilitating the flow of stripping liquid.

[0018] Further, the end of the structural column close to the bottom of the flower basket container is bent towards the side wall of the flower basket container.

[0019] Further, the end of the structural column away from the bottom of the flower basket container is provided with a gripping part higher than the opening of the flower basket container, and the gripping part is used for taking out the flower basket body from the flower basket container.

[0020] The beneficial effects of the utility model are:

[0021] 1. The flower basket body is placed in the flower basket container filled with stripping liquid, the chip substrate is placed on the upper layer disc, the stirring magnet is placed on the lower layer disc, the stirring magnet is controlled by the magnetic stirrer, the stripping liquid in the flower basket container forms a vortex, the stripping of the photoresist attached on the chip is accelerated, and the efficiency of the photoresist stripping is improved.

[0022] 2. By arranging the spiral groove, under the stirring of the magnetic pole stirrer, the stripping liquid rises from the gap to the side of the extension part close to the upper layer disc along one end of the spiral groove, then the stripping liquid flows out from the other end of the spiral groove, and falls on the chip substrate, forming an impact on the substrate of the chip, accelerating the stripping of the photoresist BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 FIG. 1 is a structural schematic diagram of a chip photoresist stripping device according to an embodiment of the present application;

[0024] Figure 2 FIG. 2 is a structural schematic diagram of an upper layer tray according to an embodiment of the present application.

[0025] In the drawings:

[0026] 100 - chip photoresist stripping device; 1 - basket container; 2 - basket body; 21 - upper layer tray; 22 - lower layer tray; 23 - structure column; 3 - stirring magnet; 4 - magnetic stirrer; 5 - extension; 6 - mounting groove; 7 - spiral groove; 8 - groove; 9 - retention hole; 10 - second through hole. DETAILED DESCRIPTION

[0027] In order to make the above objectives, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. It can be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. In addition, it should be noted that, in order to facilitate the description, only the parts related to the present application are shown in the drawings, and not all the structures. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0028] The terms "comprising" and "having" and any variations thereof in the present application are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0029] In this paper, the "embodiment" means that the specific features, structures or characteristics described in conjunction with the embodiment can be included in at least one embodiment of the present application. The phrase appears at various places in the specification does not necessarily refer to the same embodiment, nor is it independent or alternative to other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0030] The chip photoresist stripping device 100 of the utility model discloses a basket container 1, a basket body 2, a stirring magnet 3 and a magnetic stirrer 4. The basket container 1 is used for containing photoresist stripping liquid. The basket body 2 is placed in the basket container 1. As shown in the figure 1, the basket body 2 includes the upper layer disc 21 and the lower layer disc 22 corresponding and parallel to the disc surface and a plurality of structure columns 23 connected with the upper layer disc 21 and the lower layer disc 22, the upper layer disc 21 and the lower layer disc 22 are fixed on the plurality of structure columns 23, the disc surface of the upper layer disc 21 and the lower layer disc 22 is parallel to the bottom of the basket container 1, the lower layer disc 22 is located between the upper layer disc 21 and the bottom of the basket container 1, and the gap is reserved between the upper layer disc 21 and the lower layer disc 22. The stirring magnet 3 is placed on the lower layer disc 22. The basket container 1 is placed on the magnetic stirrer 4, and the magnetic stirrer 4 is used for controlling the rotation of the stirring magnet 3.

[0031] The chip substrate is placed on the upper layer disc 21, the stirring magnet 3 is placed on the lower layer disc 22, then the basket device is placed in the basket container 1 filled with stripping liquid, and then the basket container 1 is placed on the magnetic stirrer 4. Open the magnetic stirrer 4, and the stirring magnet 3 rotates under the action of the magnetic stirrer 4, so that the stripping liquid in the basket container 1 flows and forms a vortex. After the chip is soaked in the stripping liquid for a period of time, the photoresist appears wrinkles and begins to gradually fall off. Under the action of the vortex formed by the magnetic stirrer 4, the photoresist appearing wrinkles is more easily separated from the chip. The distance between the stirring magnet 3 and the chip substrate can be realized by adjusting the distance between the upper layer disc 21 and the lower layer disc 22. When the stirring magnet 3 is adjusted to the appropriate position from the chip substrate, it can be ensured that the vortex formed by the stirring magnet 3 can act on the photoresist to the maximum extent, and the stripping of the photoresist is accelerated.

[0032] In one embodiment, as shown in Figure 1 The outer periphery side of the lower layer disc 22 is provided with an extension part 5 extending to a preset length in the direction of the upper layer disc 21, and the extension part 5 connects the upper layer disc 21 and the lower layer disc 22 as a whole. By setting the extension part 5, the upper layer disc 21 and the lower layer disc 22 are connected as a whole, and the stability of the structure of the basket body 2 is enhanced. At the same time, since the length of the extension part 5 is a preset length, as shown in Figure 1 The extension part 5 is partially higher than the upper layer disc 21, and an installation groove 6 is formed between the extension part 5 and the upper layer disc 21, the chip substrate is placed in the installation groove 6, and the chip is prevented from falling off from the upper layer disc 21 under the action of the vortex.

[0033] In one embodiment, a plurality of spiral grooves 7 are provided on the peripheral side of the extension 5, the opening of one end of the spiral grooves 7 is communicated with the gap, and the opening of the other end is located on the side of the extension 5 close to the upper tray 21. By providing the spiral grooves 7, under the stirring of the magnetic stirrer, the stripping liquid rises from the gap to the side of the extension 5 close to the upper tray 21 along one end of the spiral grooves 7, and then flows out of the other end of the spiral grooves 7 and falls onto the chip substrate, forming an impact on the substrate of the chip and accelerating the stripping of the photoresist.

[0034] In one embodiment, a groove 8 for accommodating the stirring magnet 3 is provided on the lower tray 22. By providing the groove 8 on the lower tray 22 and placing the stirring magnet 3 in the groove 8, the stirring magnet 3 is prevented from falling off the lower tray 22 during rotation.

[0035] In one embodiment, a holding hole 9 for placing the stirring magnet 3 from the upper tray 21 into the groove 8 is provided on the upper tray 21, and the holding hole 9 corresponds to the groove 8. Specifically, the stirring magnet 3 is placed in the groove 8 through the holding hole 9, and after the stripping is completed, the stirring magnet 3 can be clamped out of the groove 8 using tweezers.

[0036] In one embodiment, the distance between the lower tray 22 and the bottom of the flower basket container 1 is a first predetermined height. The closer the distance between the stirring magnet 3 and the chip substrate, the easier the eddy current formed by the stripping liquid to make the photoresist separate. The farther the distance between the stirring magnet 3 and the magnetic stirrer 4, the smaller the control force of the magnetic stirrer 4 on the stirring magnet 3. By setting the distance between the lower tray 22 and the bottom of the flower basket container 1 as the first predetermined height, it is ensured that the magnetic stirrer 4 has enough magnetic force to control the movement of the stirring magnet 3, and at the same time, it is ensured that the eddy current formed by the stirring magnet 3 can completely strip the photoresist.

[0037] In one embodiment, a plurality of first through holes (not shown) are provided on the lower tray 22, and the first through holes are used to pass the stripped photoresist. After the photoresist is stripped, it falls to the bottom of the flower basket container 1 through the first through holes under the action of the eddy current.

[0038] In another embodiment, as shown in Figure 2 a plurality of second through holes 10 are provided on the upper tray 21, and the second through holes 10 are used to facilitate the flow of the stripping liquid. When the stirring magnet 3 stirs the stripping liquid, the stripping liquid contacts the substrate through the second through holes 10 from the bottom of the flower basket container 1, accelerating the stripping of the photoresist.

[0039] As shown in Figure 1 the end of the structural column 23 close to the bottom of the flower basket container 1 is bent towards the direction close to the outer sidewall of the flower basket container 1, so that the flower basket body 2 is more stable when placed in the flower basket container 1.

[0040] In one embodiment, the structural column 23 is provided with a gripping portion (not shown) higher than the opening of the basket container 1 at one end away from the bottom of the basket container 1, and the gripping portion is used to take out the basket body 2 from the basket container 1. Through the above setting, the contact between the corrosive stripping liquid and the operator is avoided, the operator is damaged, and the safety of the device during use is enhanced.

[0041] The above embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as a limitation on the scope of the application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which belong to the protection scope of the present application. Therefore, the protection scope of the present application patent should be subject to the appended claims.

Claims

1. A chip photoresist stripping apparatus, characterized by, The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid.

2. The chip photoresist stripping apparatus according to claim 1, wherein The application relates to a flower basket container for containing photoresist stripping liquid.

3. The chip photoresist stripping apparatus according to claim 2, wherein The application relates to a flower basket container for containing photoresist stripping liquid.

4. The chip photoresist stripping apparatus according to claim 1, wherein The application relates to a flower basket container for containing photoresist stripping liquid.

5. The chip photoresist stripping apparatus according to claim 4, wherein The application relates to a flower basket container for containing photoresist stripping liquid.

6. The chip photoresist stripping apparatus of claim 1, wherein The application relates to a flower basket container for containing photoresist stripping liquid.

7. The chip photoresist stripping apparatus according to claim 6, wherein The application relates to a flower basket container for containing photoresist stripping liquid.

8. The chip photoresist stripping apparatus of claim 1, wherein The application relates to a flower basket container for containing photoresist stripping liquid.

9. The chip photoresist stripping apparatus of claim 1, wherein The application relates to a flower basket container for containing photoresist stripping liquid.

10. The chip photoresist stripping apparatus of claim 1, wherein The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. The application relates to a flower basket container for containing photoresist stripping liquid. 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