Semiconductor storage container loading unit and cleaning apparatus

Abstract

The embodiment of the utility model provides a semiconductor storage container loading unit and cleaning equipment, and relates to the technical field of semiconductor production. The semiconductor storage container loading unit is used for loading a storage container, a first air hole and a second air hole are formed in the storage container, the loading unit comprises a placing frame, a conveying assembly and a first driving assembly, the placing frame is provided with a feeding station and a discharging station, an inflation station is arranged on the feeding station or the discharging station, and the first driving assembly is arranged on the conveying assembly. An inflation joint and an exhaust joint are arranged on the inflation station, the inflation joint is used for being connected with the first air hole, and the exhaust joint is used for being connected with the second air hole; the conveying assembly is used for driving the storage container to move between the feeding station and the discharging station. The first driving assembly is used for driving the inflation connector to move so that the inflation connector can be connected with the first air holes in the different storage containers. The loading unit has the advantages that compatibility of the loading unit is improved, and the application range of the loading unit is widened.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production, specifically, a kind of semiconductor storage container loading unit and cleaning equipment. BACKGROUND

[0002] In the cleaning process of semiconductor storage container, nitrogen is needed to be flushed into storage container to reduce humidity in storage container, and at the same time, in part process, the cleaning effect of storage container can also be judged by flushing gas into storage container and detecting the residual situation of pollutants in exhaust gas. The step of filling gas in existing full-automatic storage container cleaning machine is generally carried out in loading unit.

[0003] And the gas filling port position of different brand storage containers is different, when facing different brands, different models of storage containers, gas filling port can only be set at different positions of loading unit, which leads to low compatibility and small application range of loading unit. UTILITY MODEL CONTENT

[0004] The utility model aims to provide a kind of semiconductor storage container loading unit, which can improve the compatibility of loading unit and increase the application range of loading unit.

[0005] Embodiments of the utility model can be implemented as follows:

[0006] In a first aspect, the utility model provides a kind of semiconductor storage container loading unit, for loading storage container, first gas hole and second gas hole are set on the storage container, comprising:

[0007] Placing rack, the placing rack has feeding station and discharging station, wherein, the feeding station or the discharging station is provided with gas filling station, gas filling connector and gas extraction connector are provided on the gas filling station, the gas filling connector is used to be connected with the first gas hole, the gas extraction connector is used to be connected with the second gas hole;

[0008] Conveying assembly, the conveying assembly is set on the placing rack, and the conveying assembly is used to drive storage container to move between the feeding station and the discharging station;

[0009] First drive assembly, the first drive assembly is set on the placing rack and is connected with the gas filling connector, and the first drive assembly is used to drive the gas filling connector along arc, so that the gas filling connector is connected with the first gas hole on different storage containers.

[0010] In optional implementation, the gas filling station is provided with the gas filling connector and the gas extraction connector on both sides, and the first drive assembly is also provided on both sides of the gas filling station, and the first drive assembly is connected with the gas filling connector.

[0011] In an optional embodiment, the inflating station has a mounting plate, the inflating connector and the deflating connector are arranged on the mounting plate, and a gap is left between the mounting plate and the placing rack for the conveying assembly to pass through.

[0012] In an optional embodiment, an arc-shaped through hole is formed on the mounting plate, the inflating connector is arranged in the through hole, and the first driving assembly is configured to drive the inflating connector to move along the length direction of the through hole.

[0013] In an optional embodiment, the first driving assembly includes a first rotating shaft, a first connecting rod and a first power member, the first rotating shaft is arranged on the mounting plate, the first connecting rod is rotatably arranged on the first rotating shaft, one end of the first connecting rod is connected with the inflating connector, the other end of the first connecting rod is connected with the first power member, and the first power member is configured to drive the first connecting rod to rotate around the first rotating shaft.

[0014] In an optional embodiment, the inflating station further has a second driving assembly, the second driving assembly is connected with the deflating connector, and the second driving assembly is configured to drive the deflating connector to move so that the inflating connector is connected with the second gas hole on different storage containers.

[0015] In an optional embodiment, the second driving assembly includes a second rotating shaft, a second connecting rod and a second power member, the second rotating shaft is arranged on the mounting plate, the second connecting rod is rotatably arranged on the second rotating shaft, one end of the second connecting rod is connected with the second power member, the other end of the second connecting rod is connected with the deflating connector, and the second power member is configured to drive the second connecting rod to rotate.

[0016] In an optional embodiment, the conveying assembly includes a supporting plate and a moving member, the supporting plate is configured to carry the storage container, the moving member is connected with the supporting plate, and the moving member is configured to drive the supporting plate to move between the feeding station and the discharging station.

[0017] In an optional embodiment, the moving member is provided with a jacking cylinder, the jacking cylinder is connected with the supporting plate and is configured to drive the supporting plate to move in the vertical direction.

[0018] In a second aspect, the utility model provides a kind of storage container cleaning equipment, including aforementioned semiconductor storage container loading unit.

[0019] The semiconductor storage container loading unit and the cleaning equipment provided by the embodiments of the utility model have the following beneficial effects.

[0020] When the storage containers of different models are placed at the inflating station for inflating, the first driving assembly drives the inflating connector to move, so that the inflating connector is opposite to and connected with the first air holes on the different storage containers, after the inflating is completed, the storage containers at the inflating station are moved to the unloading station for unloading by the conveying assembly, or the storage containers at the inflating station are moved to the feeding station for feeding by the conveying assembly. By driving the inflating connector to move at the inflating station, the loading unit can be suitable for the storage containers of different models, the compatibility of the loading unit is improved, and the application range of the loading unit is increased. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0022] Figure 1 The structural schematic diagram of the semiconductor storage container loading unit provided for the embodiment;

[0023] Figure 2 The bottom view of the inflating station of the semiconductor storage container loading unit provided for the embodiment.

[0024] Legend: 100 - placing rack; 110 - inflating station; 111 - inflating connector; 112 - air extraction connector; 113 - mounting plate; 114 - through hole; 115 - accommodating groove; 120 - unloading station; 200 - conveying assembly; 210 - supporting plate; 220 - moving piece; 230 - jacking air cylinder; 300 - first driving assembly; 310 - first rotating shaft; 320 - first connecting rod; 330 - first power piece; 400 - second driving assembly; 410 - second rotating shaft; 420 - second connecting rod; 430 - second power piece. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application claimed, but merely represents selected embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the application.

[0027] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0028] In the description of the application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the application is used, only for the convenience of describing the application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, structure and operation, therefore cannot be understood as limiting the application.

[0029] In addition, if the terms "first", "second" and the like are used only to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0030] It should be noted that the features in the embodiments of the application can be combined with each other without conflict.

[0031] In the cleaning process of the semiconductor storage container (such as FOUP), nitrogen needs to be injected into the storage container to reduce the humidity in the storage container. At the same time, after cleaning the storage container, gas needs to be injected into the interior of the storage container and the residual pollutants in the exhaust gas are detected to detect the cleaning effect of the storage container. The current full-automatic storage container cleaning machine generally performs the gas filling on the loaded unit of the full-automatic storage container cleaning machine.

[0032] The gas filling port and the gas exhaust port are arranged on the loaded unit, the gas filling port on the loaded unit is aligned with the gas filling port on the storage container, nitrogen is injected into the storage container through the gas filling port, and then the nitrogen is exhausted through the gas exhaust port on the storage container to realize the gas filling of the storage container. However, in the actual use process, the positions of the gas filling ports of different brands and different models of storage containers are different, and when the gas filling is performed on different brands and different models of storage containers, different loaded units need to be replaced, so that the compatibility of the loaded unit is poor and the application range is small; or a plurality of gas filling ports are arranged on the loaded unit to be suitable for a plurality of models of storage containers, but the loaded unit can only fill the limited storage containers according to the number of gas filling ports, and the problem of poor compatibility and small application range of the loaded unit has not been fundamentally solved.

[0033] In order to solve the above technical problems, the utility model provides a kind of loading unit of semiconductor storage container and cleaning equipment, for be applicable to the inflation processing of multiple storage containers, to further improve the compatibility of loading unit, increase the scope of application of loading unit.

[0034] The overall structure, working principle and technical effects of the loading unit of semiconductor storage container provided by the utility model are described in detail below by examples and in conjunction with the drawings.

[0035] The utility model provides a kind of semiconductor storage container cleaning equipment, including cleaning unit, drying unit and loading unit etc., cleaning unit is used to clean storage container, drying unit can dry the storage container after cleaning, then storage container is transported to loading unit and is inflated, to be used to reduce humidity in storage container or carry out environmental detection to storage container.

[0036] Please refer to Figure 1 And Figure 2 The loading unit of semiconductor storage container provided by the utility model is applied to semiconductor storage container cleaning equipment to meet the inflation needs of different brands and different models of storage containers. It can be understood that the first gas hole and the second gas hole are provided on the storage containers of different brands and different models. When the storage containers after cleaning are inflated, nitrogen enters the storage containers from the first gas hole and is discharged from the second gas hole. The positions of the first gas hole and the second gas hole on the storage containers of different brands and different models are different. Taking the front opening unified pods (FOUP) as an example, for the commonly used Entegris, Shin-Etsu Polymer and Miraial FOUPs, the inventors found in actual use that the first gas holes on the wafer transfer boxes of different models all meet the standards of the international semiconductor industry association (SEMI), i.e., the sizes of the first gas holes are the same. Moreover, the inventors also found that although the positions of the first gas holes on the wafer transfer boxes of different models are different, when the wafer transfer boxes of different models are placed at the specified positions on the loading unit, the first gas holes on the same side of the wafer transfer boxes of multiple models are located on the same circumference.

[0037] The loading unit of the semiconductor storage container comprises a placing rack 100, a conveying assembly 200 and a first driving assembly 300. The placing rack 100 is installed on the storage container cleaning machine. After cleaning and drying, the storage container is conveyed to the placing rack 100 through the feeding device. The placing rack 100 has a feeding station and a discharging station 120. The feeding station and the discharging station 120 are respectively located at both ends of the placing rack 100, and an inflation station 110 is arranged at the feeding station or the discharging station 120. In this embodiment, the inflation station 110 is located at the feeding station as an example. The storage container is inflated at the inflation station 110, and the storage container after inflation is discharged at the discharging station 120. The inflation station 110 is provided with an inflation connector 111 and a gas extraction connector 112. The inflation connector 111 is used to connect with the first gas hole on the storage container, and the gas extraction connector 112 is used to connect with the second gas hole on the storage container. The conveying assembly 200 is arranged on the placing rack 100. The conveying assembly 200 is located between the feeding station and the discharging station 120, and is used to convey the storage unit after inflation at the inflation station 110 to the discharging station 120 for discharging. The first driving assembly 300 is arranged on the placing rack 100. The first driving assembly 300 is connected with the inflation connector 111. The first driving assembly 300 is used to drive the inflation connector 111 to move on the inflation station 110. When different storage containers are placed on the inflation station 110, the first driving assembly 300 drives the inflation connector 111 to move to be opposite to the first gas hole on the different storage containers, so that the inflation connector 111 is connected with the first gas hole, thereby inflating the storage containers of different brands and different models. Therefore, the existing loading unit can be compatible with storage containers of different brands and different models, and the application range of the loading unit is improved.

[0038] It can be understood that when the inflation station 110 is arranged on the discharging station 120, the conveying assembly 200 is used to convey the storage unit after inflation at the inflation station 110 to the feeding station for feeding.

[0039] Further, it can be understood that the inflation connector 111 is connected with an external gas source, and the gas extraction connector 112 is also connected with an external gas pipeline. When the cleaning effect of the storage container is detected, the gas extraction connector 112 can also be connected with an external environment detection member, so as to judge the cleaning effect of the storage container by the residual situation of the pollutants in the exhaust gas.

[0040] Please refer to Figure 1 and Figure 2Since the semiconductor storage container (for example, the FOUP) has two first gas holes and two second gas holes, in order to facilitate the storage container to be inflated, the inflation joint 111 and the exhaust joint 112 are arranged on both sides of the inflation station 110, so that when the storage container enters the inflation station 110 at a design angle, the inflation joint 111 on both sides is connected with the first gas hole on both sides of the storage container. Further, in order to facilitate the inflation joint 111 on both sides of the inflation station 110 to move, the first drive assembly 300 is arranged on both sides of the inflation station 110, and the two first drive assemblies 300 are connected with the corresponding inflation joint 111.

[0041] Please refer to Figure 1 and Figure 2 The inflation station 110 has a mounting plate 113 connected to the body of the placing rack 100 by a plurality of support rods, and a gap is left between the mounting plate 113 and the body of the placing rack 100 for the conveying assembly 200 to pass through. The inflation joint 111 and the exhaust joint 112 are arranged on the mounting plate 113. When inflating the storage container, the storage container is moved and placed on the mounting plate 113, and the inflation joint 111 is connected with the first gas hole on the storage container, and the exhaust joint 112 is connected with the second gas hole.

[0042] Further, it is found in actual processing that although the positions of the inflation ports on storage containers of different brands and different models are different, the inflation ports of all storage containers conform to the standard of the International Semiconductor Industry Association (SIMI), that is, the sizes of the inflation ports are the same. At the same time, although the positions of the storage containers of different brands and different models are different, the inflation ports on the same side are located on the same circular arc. Based on this, in order to facilitate the movement of the inflation joint 111 on the mounting plate 113, an arc-shaped through hole 114 is formed on the mounting plate 113 in this embodiment, the inflation joint 111 is arranged in the through hole 114, and the first drive assembly 300 is arranged on the lower side surface of the mounting plate 113, and the first drive assembly 300 is used to drive the inflation joint 111 to move along the length direction of the arc-shaped through hole 114, that is, to drive the inflation joint 111 to rotate at a predetermined radius, so that the inflation joint 111 is opposite to the first gas hole on different storage containers.

[0043] Please refer to Figure 1 and Figure 2The first driving assembly 300 comprises a first rotating shaft 310, a first connecting rod 320 and a first power member 330. The first rotating shaft 310 is vertically arranged on the lower side of the mounting plate 113. The first connecting rod 320 is rotatably arranged on the first rotating shaft 310, and the two ends of the first connecting rod 320 are bent along the first rotating shaft 310. One end of the first connecting rod 320 is connected with the inflation joint 111, and the other end of the first connecting rod 320 is connected with the first power member 330. The first power member 330 is used to drive the first connecting rod 320 to rotate around the first rotating shaft 310. In some optional embodiments, the first power member 330 comprises a first cylinder. The cylinder base of the first cylinder is hingedly connected with the mounting plate 113, and the piston rod of the first cylinder is hingedly connected with the first connecting rod 320. Thus, by driving the piston rod of the first cylinder to extend or retract, the first connecting rod 320 is driven to rotate around the first rotating shaft 310, thereby achieving the effect of driving the inflation joint 111 to rotate. In other optional embodiments, the first power member 330 can also be an electric push rod, a hydraulic cylinder or other structure that can drive the first connecting rod 320 to rotate around the first rotating shaft 310. The specific structure of the first power member 330 is not limited here.

[0044] Please refer to Figure 1 and Figure 2The second air hole position on the storage container of different brands and different models is also different, therefore, in order to make the air extraction joint 112 connect with the second air hole on different storage containers. In some optional embodiments, the inflation station 110 is further provided with a second driving assembly 400, the second driving assembly 400 is connected with the air extraction joint 112, the second driving assembly 400 is used for driving the air extraction joint 112 to move, so as to make the inflation joint 111 connect with the second air hole on different storage containers. Further, the second driving assembly 400 includes a second rotating shaft 410, a second connecting rod 420 and a second power piece 430, the second rotating shaft 410 is vertically arranged on the lower side plane of the mounting plate 113, the second connecting rod 420 is rotationally arranged on the second rotating shaft 410, and the two ends of the second connecting rod 420 are bent along the second rotating shaft 410. And one end of the second connecting rod 420 is connected with the air extraction joint 112, the other end of the second connecting rod 420 is connected with the second power piece 430, the second power piece 430 is used for driving the second connecting rod 420 to rotate around the second rotating shaft 410. In some optional embodiments, the second power piece 430 includes a second air cylinder, the cylinder seat of the second air cylinder is hinged with the mounting plate 113, the piston rod end of the second air cylinder is hinged with the second connecting rod 420. Thus, by driving the piston rod of the second air cylinder to extend or retract, the second connecting rod 420 is driven to rotate around the second rotating shaft 410, thereby realizing the effect of driving the air extraction joint 112 to rotate. In other optional embodiments, the second power piece 430 can also be an electric push rod, a hydraulic cylinder and other structures that can drive the second connecting rod 420 to rotate around the second rotating shaft 410, the specific structure of the second power piece 430 is not limited here.

[0045] Please refer to Figure 1 and Figure 2In some optional embodiments, the conveying assembly 200 comprises a supporting plate 210 for carrying the storage container and a moving piece 220 connected with the supporting plate 210, the moving piece 220 is used to drive the supporting plate 210 to move between the feeding station and the discharging station 120. In the embodiment, the inflation station 110 is arranged on the feeding station, and the moving piece 220 is used to drive the supporting plate 210 to move between the inflation station 110 and the discharging station 120. The moving piece 220 can be a slide rail and slide block, a rodless electric cylinder, a ball screw or other structures capable of driving the supporting plate 210 to move linearly, and the specific structure of the moving piece 220 is not limited in the utility model. Further, a jacking cylinder 230 is arranged on the moving piece 220, the piston rod of the jacking cylinder 230 extends vertically upward and is connected with the supporting plate 210, the jacking cylinder 230 is used to drive the supporting plate 210 to move in the vertical direction, and a containing groove 115 for accommodating the supporting plate 210 is arranged on the side of the mounting plate 113 facing the discharging station 120. When the storage container on the inflation station 110 is taken down and moved to the discharging station 120, the supporting plate 210 is driven to move below the containing groove 115, the supporting plate 210 is lifted and the storage container on the inflation station 110 is jacked up, and then the storage container can be taken out from the inflation station 110 through the supporting plate 210, so as to facilitate subsequent movement of the storage container.

[0046] In summary, the implementation principle of the semiconductor storage container loading unit provided by the utility model is as follows: when different models of storage containers are placed and inflated in the inflation station 110, the first driving assembly 300 drives the inflation connector 111 to move, so that the inflation connector 111 is opposite and connected with the first gas hole on the different storage containers, after inflation, the conveying assembly 200 is used to move the storage container at the inflation station 110 to the discharging station 120 for discharging, or the conveying assembly 200 is used to move the storage container at the inflation station 110 to the feeding station for feeding. By driving the inflation connector 111 to move on the inflation station 110, the loading unit can be suitable for different models of storage containers, the compatibility of the loading unit is improved, and the application range of the loading unit is increased.

[0047] The above merely describes the specific embodiments of the utility model, but the protection scope of the utility model is not limited to this, any person skilled in the art can easily think of the changes or replacements within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. A semiconductor storage container loading unit for loading a storage container having a first gas hole and a second gas hole formed therein, the semiconductor storage container loading unit comprising: a first gas hole forming unit for forming the first gas hole; a second gas hole forming unit for forming the second gas hole; and a first gas hole and a second gas hole forming unit for forming the first gas hole and the second gas hole. The application relates to a semiconductor storage container loading unit. The application comprises: a placing rack with an upper feeding station and a lower feeding station, wherein the upper feeding station or the lower feeding station is provided with an inflation station, the inflation station is provided with an inflation joint and an air extraction joint, the inflation joint is used for being connected with the first air hole, and the air extraction joint is used for being connected with the second air hole; a conveying assembly arranged on the placing rack and used for driving a storage container to move between the upper feeding station and the lower feeding station; 2. The semiconductor storage container loading unit according to claim 1, characterized by, a first driving assembly arranged on the placing rack and connected with the inflation joint, the first driving assembly is used for driving the inflation joint to move along an arc shape so as to make the inflation joint connected with the first air hole on different storage containers.

3. The semiconductor storage container loading unit according to Claim 1, wherein The inflation station is provided with the inflation joint and the air extraction joint on both sides, and the first driving assembly is arranged on both sides of the inflation station and connected with the inflation joint.

4. The semiconductor storage container loading unit according to claim 3, characterized by The inflation station is provided with a mounting plate, and the inflation joint and the air extraction joint are arranged on the mounting plate.

5. The semiconductor storage container loading unit according to claim 4, characterized by An arc-shaped through hole is formed in the mounting plate, the inflation joint is arranged in the through hole, and the first driving assembly is used for driving the inflation joint to move along the length direction of the through hole.

6. The semiconductor storage container loading unit according to claim 3, wherein The first driving assembly comprises a first rotating shaft, a first connecting rod and a first power piece, the first rotating shaft is arranged on the mounting plate, the first connecting rod is rotationally arranged on the first rotating shaft, one end of the first connecting rod is connected with the inflation joint, the other end of the first connecting rod is connected with the first power piece, and the first power piece is used for driving the first connecting rod to rotate around the first rotating shaft.

7. The semiconductor storage container loading unit according to claim 6, wherein The inflation station is also provided with a second driving assembly, the second driving assembly is connected with the air extraction joint, and the second driving assembly is used for driving the air extraction joint to move so as to make the inflation joint connected with the second air hole on different storage containers.

8. The semiconductor storage container loading unit according to claim 3, wherein The second driving assembly comprises a second rotating shaft, a second connecting rod and a second power piece, the second rotating shaft is arranged on the mounting plate, the second connecting rod is rotationally arranged on the second rotating shaft, one end of the second connecting rod is connected with the second power piece, the other end of the second connecting rod is connected with the air extraction joint, and the second power piece is used for driving the second connecting rod to rotate.

9. The semiconductor storage container load unit according to claim 8, characterized by The conveying assembly comprises a supporting plate and a moving piece, the supporting plate is used for carrying a storage container, the moving piece is connected with the supporting plate, and the moving piece is used for driving the supporting plate to move between the upper feeding station and the lower feeding station.

10. A semiconductor storage container cleaning apparatus characterized by comprising: The moving piece is provided with a jacking air cylinder, the jacking air cylinder is connected with the supporting plate and used for driving the supporting plate to move in a vertical direction. The application also relates to a semiconductor storage container loading unit comprising any one of the semiconductor storage container loading units in claims 1-9.

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