Ultralow-temperature wide-width atmosphere plasma equipment
By setting up electrode plates in an atmospheric plasma device to form an electric field and using a cold-state pipe to discharge plasma, the problems of uneven processing effect and excessively high equipment temperature for wide-width products were solved, achieving uniform modification and temperature control.
Patent Information
- Application Number
- CN202422791312.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-15
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2034-11-15
AI Technical Summary
Existing plasma modification systems suffer from uneven processing results and excessively high nozzle temperatures when processing wide-width products.
Design an ultra-low temperature wide-range atmospheric plasma device, which adopts a through-cavity structure with an air inlet, an air outlet and an airflow channel. Two oppositely arranged electrode plates form an electric field, and inert gas forms plasma in the electric field. The plasma is discharged through a cold pipe to avoid excessive temperature.
It achieves uniformity in product surface modification and control of equipment temperature, solving the problems of uneven treatment effect and excessively high nozzle temperature.
Smart Images
Figure CN223639429U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a kind of super-low temperature wide-width atmospheric plasma equipment, belong to surface modification equipment field. BACKGROUND
[0002] Plasma surface modification process is using various surface plating layer and surface modification technology, endow the special mechanics, physics or chemical properties that substrate material itself does not have.Existing plasma modification system has following problems:
[0003] 1, when processing wide-width product, there can be some places processing time long, or some places are repeatedly processed when processing in the same place, and the effect after processing is not too uniform;
[0004] 2, equipment can cause gun head temperature to be too high due to long time work.
[0005] Therefore, it is necessary to improve existing atmospheric plasma equipment to solve the above problems. UTILITY MODEL CONTENTS
[0006] To solve the above technical problems, the utility model provides a kind of super-low temperature wide-width atmospheric plasma equipment, which can at least solve one of the problems of uniform processing effect and gun head temperature being too high.
[0007] The technical scheme of the utility model is:
[0008] A kind of super-low temperature wide-width atmospheric plasma equipment is provided with upper and lower through cavity, the through cavity is equipped with air inlet, air outlet and the gas flow channel that is connected with the air inlet and the air outlet, the gas flow channel is supplied with inert gas flow, the atmospheric plasma equipment is equipped with two electrode sheets that are oppositely arranged, electric field is formed between two electrode sheets, the electric field is at least partially formed in the gas flow channel, inert gas that flows from the air inlet enters the electric field and forms plasma, the plasma flows out from the air outlet along the flow direction of inert gas, and external product is modified;
[0009] Wherein, the atmospheric plasma equipment is also equipped with cold pipeline assembled in the gas flow channel, the air outlet is formed on the cold pipeline, so that the plasma is discharged after passing through the cold pipeline.
[0010] As a further improvement of the utility model, in the extension direction of the through cavity, two electrode sheets are arranged in up-down staggered manner.
[0011] As a further improvement of the utility model, in the extension direction of the cavity, the first airflow channel is formed between the upper surface of the cold pipeline and the air inlet, the second airflow channel is formed in the cold pipeline, the electric field is at least partially formed in the second airflow channel, and the cold pipeline is connected with the two electrode sheets respectively, so that the inert gas forms the plasma in the electric field after entering the second airflow channel from the first airflow channel.
[0012] As a further improvement of the utility model, the electrode sheet comprises an electric reaction end for fixed connection with the cold pipeline and an electric connection end connected with an external power source, and in the cross section of the extension direction of the cavity, the electric connection ends of the two electrode sheets are located on the two sides of the cold pipeline respectively.
[0013] As a further improvement of the utility model, the electric reaction end is provided with an assembly opening, the assembly openings of the two electrode sheets are opposite to each other, the cold pipeline is positioned by passing through the assembly openings, and in the extension direction of the cavity, the vertical distance between the two electrode sheets is 10-15mm.
[0014] As a further improvement of the utility model, in the extension direction of the cavity, the vertical distance between the electrode sheet close to the air outlet and the air outlet is 5-8mm.
[0015] As a further improvement of the utility model, in the case that the width of the air outlet of the cold pipeline is unchanged, the length of the air outlet of the cold pipeline is directly proportional to the flow rate of the plasma.
[0016] As a further improvement of the utility model, the vertical distance between the two electrode sheets is inversely proportional to the flow rate of the inert gas in the airflow channel.
[0017] As a further improvement of the utility model, the atmospheric plasma equipment comprises a first shell and a second shell assembled with each other, the cavity penetrates through the first shell and the second shell simultaneously, the two electrode sheets are assembled in the first shell, and the second shell covers the two electrode sheets completely.
[0018] As a further improvement of the utility model, the side close to the air inlet of the first shell is provided with a recessed ring groove, the ring groove is recessed in the outer periphery of the air inlet and is assembled with a sealing element, the second shell abuts against the ring groove and limits the sealing element in the ring groove.
[0019] The beneficial technical effect of the utility model is: two electrode sheets are arranged oppositely in the atmospheric plasma equipment, an electric field is formed between the two electrode sheets, the electric field is formed at least partially in the airflow channel, the inert gas flowing from the air inlet enters the electric field to form plasma, thereby modifying the product surface, meanwhile, the cold pipeline is assembled in the airflow channel, the air outlet is formed on the cold pipeline, then the plasma is discharged after passing through the cold pipeline, thereby avoiding the problem of excessively high temperature of the equipment due to long time working. BRIEF DESCRIPTION OF DRAWINGS
[0020] Figure 1 It is a structure schematic view of a kind of ultra-low temperature wide atmospheric plasma equipment of the preferred embodiment of the utility model.
[0021] Figure 2 It is Figure 1 The structure schematic view of the atmospheric plasma equipment hidden second shell.
[0022] Figure 3 It is Figure 2 The combination structure schematic view of part first shell, electrode sheet and cold pipeline.
[0023] Figure 4 It is Figure 3 The structure schematic view hidden cold pipeline.
[0024] Figure 5 It is Figure 1 The section view of the atmospheric plasma equipment shown. DETAILED DESCRIPTION
[0025] In order to more clearly understand the technical means of the utility model, and can be implemented according to the content of the specification, the specific embodiment of the utility model is further described in detail below, the following examples are used to illustrate the utility model, but not to limit the scope of the utility model.
[0026] Please refer to Figures 1 to 5 The utility model discloses a kind of ultra-low temperature wide atmospheric plasma equipment 100, is provided with up-down through cavity 10, the through cavity 10 is equipped with air inlet 101, air outlet 102 and the airflow channel 103 that the air inlet 101 and the air outlet 102 are communicated, the airflow channel 103 is supplied with inert gas flow, the atmospheric plasma equipment 100 is equipped with two electrode sheets 2 of opposite arrangement, electric field is formed between two electrode sheets, the electric field is formed at least partially in the airflow channel 103, the inert gas flowing from the air inlet 101 enters the electric field to form plasma, the plasma is discharged from the air outlet 102 along the flow direction of the inert gas, and modification is carried out to external product.
[0027] In the embodiment, the atmospheric plasma device 100 comprises a first shell 11 and a second shell 12 assembled with each other, the through cavity 10 penetrates through the first shell 11 and the second shell 12, the two electrode sheets 2 are assembled on the first shell 11, and the second shell 12 completely covers the two electrode sheets 2. Preferably, the two shells are made of insulating material to avoid conduction and affect the safety of users.
[0028] In the extension direction of the through cavity 10, the two electrode sheets 2 are arranged in an up-down staggered manner. Of course, in other embodiments, the two electrode sheets 2 can also be arranged symmetrically with respect to the extension direction of the through cavity 10.
[0029] The vertical distance between the two electrode sheets 2 is inversely proportional to the flow rate of the inert gas in the airflow channel 103. That is, the greater the vertical distance between the two electrode sheets 2, the lower the electric field strength, and the flow rate of the inert gas in the airflow channel 103 is also reduced.
[0030] The side of the first shell 11 close to the air inlet 101 is provided with a recessed ring groove 111, the ring groove 111 is recessed on the outer periphery of the air inlet 101 and is assembled with a sealing element, the second shell 12 abuts against the ring groove 111, and the sealing element is limited inside the ring groove 111. By setting the sealing element, the two shells are sealed to avoid air flowing into the airflow channel 103.
[0031] The atmospheric plasma device 100 further comprises a cold pipe 104 assembled in the airflow channel 103, and the air outlet 102 is formed on the cold pipe 104 so that the plasma is discharged after passing through the cold pipe 104. The cold pipe 104 is preferably a quartz glass square tube. By setting the quartz glass square tube, the plasma gas flowing through the quartz glass square tube can be cooled, solving the problem of high temperature of the gun head due to long-time operation of the device.
[0032] In the extension direction of the through cavity 10, a first airflow channel 1031 is formed between the upper surface of the cold pipe 104 and the air inlet 101, a second airflow channel 1032 is formed in the cold pipe, the electric field is at least partially formed in the second airflow channel 1032, and the cold pipe 104 is connected with the two electrode sheets 2 respectively, so that the inert gas enters the second airflow channel 1032 from the first airflow channel 1031 to form the plasma in the electric field. In this way, the plasma is formed in the cold pipe 104, which can then be discharged at a relatively low temperature.
[0033] The electrode sheet 2 comprises an electric reaction end 21 for fixed connection with the cold pipeline 104, and an electric connection end 22 connected with an external power supply, and in the cross section of the extension direction of the through cavity 10, the electric connection ends 22 of the two electrode sheets 2 are respectively located on the two sides of the cold pipeline 104 and are staggered up and down. The electric connection end 22 is used for connecting a customized high-frequency power supply to discharge.
[0034] The electric reaction end 21 is provided with an assembly opening 211, and the assembly openings 211 of the two electrode sheets 2 are mutually aligned to pass through and position the cold pipeline 104, and in the extension direction of the through cavity 10, the vertical distance between the two electrode sheets 2 is 10-15 mm.
[0035] In the extension direction of the through cavity 10, the vertical distance between the electrode sheet 2 close to the gas outlet 102 and the gas outlet 102 is 5-8 mm. In this way, the plasma can flow out of the gas outlet 102 at a better rate.
[0036] In the case that the width of the gas outlet of the cold pipeline 104 is unchanged, the length of the gas outlet 102 of the cold pipeline 104 is proportional to the flow rate of the plasma. Of course, there is a mutual influence relationship among the width of the gas outlet of the cold pipeline 104, the vertical distance between the electrode sheet 2 close to the gas outlet 102 and the gas outlet 102, and the vertical distance between the two electrode sheets 2, and when the value of one of them changes, the values of the other two can be adjusted according to experiments, and this is not limited.
[0037] In summary, the ultra-low temperature wide-width atmospheric plasma equipment 100 of the utility model forms an electric field between the two electrode sheets 2 arranged relatively, and the electric field is at least partially formed in the airflow channel 103, the inert gas flowing from the air inlet 101 forms plasma in the electric field, thereby modifying the surface of the product, and at the same time, the cold pipeline 104 is assembled in the airflow channel 103, so that the gas outlet 102 is formed on the cold pipeline 104, and then the plasma is discharged after passing through the cold pipeline 104, thereby avoiding the problem of excessively high temperature of the equipment due to long-time work.
[0038] The above is only the preferred embodiment of the utility model, and is not used for limiting the utility model, and it should be pointed out that for ordinary skilled persons in the technical field, on the premise of not departing from the technical principles of the utility model, a plurality of improvements and modifications can be made, and these improvements and modifications should be regarded as the protection range of the utility model.
Claims
1. An ultra-low temperature, wide-breadth atmospheric plasma apparatus, comprising: The atmospheric plasma equipment (100) is provided with a through cavity (10) extending from top to bottom, the through cavity (10) is provided with an air inlet (101), an air outlet (102) and an airflow channel (103) connecting the air inlet (101) and the air outlet (102), the airflow channel (103) is used for flowing of inert gas, the atmospheric plasma equipment (100) is provided with two electrode sheets (2) arranged oppositely, an electric field is formed between the two electrode sheets (2), the electric field is formed at least partially in the airflow channel (103), the inert gas flowing from the air inlet (101) forms plasma in the electric field, the plasma flows out from the air outlet (102) along the flowing direction of the inert gas and modifies external products. The atmospheric plasma equipment (100) is further provided with a cold pipeline (104) arranged in the airflow channel (103), the air outlet (102) is formed on the cold pipeline (104), so that the plasma flows out after passing through the cold pipeline (104).
2. The ultra-low temperature wide atmosphere plasma apparatus of claim 1, wherein, In the extending direction of the through cavity (10), the two electrode sheets (2) are arranged in a staggered manner from top to bottom.
3. The ultra-low temperature wide atmosphere plasma apparatus of claim 2, wherein, In the extending direction of the through cavity (10), a first airflow channel (1031) is formed between the upper surface of the cold pipeline (104) and the air inlet (101), a second airflow channel (1032) is formed in the cold pipeline (104), the electric field is formed at least partially in the second airflow channel (1032), and the cold pipeline (104) is connected with the two electrode sheets (2) respectively, so that the inert gas flows from the first airflow channel (1031) into the second airflow channel (1032) and forms the plasma in the electric field.
4. The ultra-low temperature wide atmosphere plasma apparatus of claim 3, wherein, The electrode sheet (2) comprises an electric reaction end (21) for fixed connection with the cold pipeline (104) and an electric connection end (22) connected with an external power supply, in the extending direction of the through cavity (10), the electric connection ends (22) of the two electrode sheets (2) are located on the two sides of the cold pipeline (104) respectively.
5. The ultra-low temperature wide atmosphere plasma apparatus of claim 4, wherein, The electric reaction end (21) is provided with a fitting opening (211), the fitting openings (211) of the two electrode sheets (2) are aligned with each other, so that the cold pipeline (104) passes through and is positioned, in the extending direction of the through cavity (10), the vertical distance between the two electrode sheets (2) is 10-15 mm.
6. The ultra-low temperature wide atmosphere plasma apparatus of claim 5, wherein, In the extending direction of the through cavity (10), the vertical distance between the electrode sheet (2) close to the air outlet (102) and the air outlet (102) is 5-8 mm.
7. The ultra-low temperature wide atmosphere plasma apparatus of claim 1, wherein, In the case that the width of the air outlet (102) of the cold pipeline (104) is constant, the length of the air outlet (102) of the cold pipeline (104) is proportional to the flow rate of the plasma.
8. The ultra-low temperature wide atmosphere plasma apparatus of claim 1, wherein, The vertical distance between the two electrode sheets (2) is inversely proportional to the flow rate of the inert gas in the airflow channel (103).
9. The ultra-low temperature wide atmosphere plasma apparatus of claim 1, wherein, The atmospheric plasma device (100) comprises a first shell (11) and a second shell (12) assembled with each other, the through cavity (10) penetrates through the first shell (11) and the second shell (12) simultaneously, the two electrode sheets (2) are assembled on the first shell (11), and the second shell (12) covers the two electrode sheets (2) completely.
10. The ultra-low temperature wide atmosphere plasma apparatus of claim 9, wherein, A recessed ring groove (111) is arranged on one side of the first shell (11) close to the air inlet (101), the ring groove (111) is recessed on the outer periphery of the air inlet (101) and is assembled with a sealing element, and the second shell (12) abuts against the ring groove (111) and limits the sealing element inside the ring groove (111).