CVD coating MTS process waste gas collecting device

Abstract

The utility model relates to the technical field of industrial waste gas treatment, and discloses a CVD coating MTS process waste gas collecting device which comprises an MTS collector, a pair of cold water paired plates and a pair of waste gas inlet and outlet plates are assembled on the top of the MTS collector, a cooling assembly is assembled in the middle of the cold water paired plates, a cover plate is assembled right above the MTS collector, and a plurality of waste gas inlet and outlet plates are assembled on the cover plate. The top of the MTS collector is provided with a filter assembly, the cooling assembly comprises a cold disc, the cold disc is assembled on the inner wall of the cold water opposite plate, a coil pipe is assembled on the side, away from the cold water opposite plate, of the cold disc, the filter assembly comprises a filter plate, the filter plate is arranged at the top of the MTS collector, and the coil pipe is assembled on the side, away from the cold water opposite plate, of the cold disc. And filter holes are uniformly formed in the middle of the filter plate. According to the MTS waste gas treatment device, through the cooperation of the water inlet pipe, the water return pipe, the cooling disc, the coil pipe and other structures, high-temperature MTS gas is rapidly cooled and converted into liquid, the amount of MTS waste gas entering the waste gas tower is reduced, and the treatment load of the waste gas tower is relieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to industrial waste gas treatment technical field especially, relates to a kind of CVD coating MTS process waste gas collecting device. BACKGROUND

[0002] In semiconductor integrated circuit manufacturing process, photoetching, etching, film deposition are core steps, wherein silicon carbide material coating is crucial in chip manufacturing, when wafer coating is manufactured, MTS gas is mainly used to react in muffle to generate SiC deposition in product, in coating process, MTS gas enters muffle and is treated by high temperature deposition.

[0003] The CVD coating MTS process waste gas collecting device in prior art is convenient to use, and can meet the processing needs of CVD coating MTS process waste gas to a certain extent, but in actual production, most of the MTS gas becomes tail gas into the waste gas tower without chemical reaction, the current equipment only simply connects a waste gas conveying pipe to the dust filter and then connects to the waste gas tower to treat waste gas, because MTS acidic compounds are extremely strong, a large amount of flake lye is needed for neutralization reaction every day, a large amount of white precipitate is generated by acid-base reaction, which causes the waste gas tower to be blocked and paralyzed, the equipment cannot be started, which seriously affects production and increases processing cost, therefore, the CVD coating MTS process waste gas collecting device is proposed to solve the above problems. UTILITY MODEL CONTENT

[0004] In order to make up for the above shortcomings, the utility model provides a kind of CVD coating MTS process waste gas collecting device, to improve the problems of low MTS waste gas treatment efficiency and easy to cause equipment failure and high cost in prior art.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A kind of CVD coating MTS process waste gas collecting device, including MTS collector, a pair of cold water pair of plates and a pair of waste gas inlet and outlet plates are assembled in the top of the MTS collector, cooling assembly is assembled in the middle part of the cold water pair of plates, cover plate is assembled above the MTS collector, filter assembly is provided on the top of the MTS collector;

[0007] The cooling assembly includes cold disc, the cold disc is assembled in the inner wall of the cold water pair of plates, and coil pipe is assembled on the side of the cold disc away from the cold water pair of plates.

[0008] As a further description of the above technical scheme:

[0009] The filter assembly includes filter plate, the filter plate is arranged on the top of the MTS collector, and filter hole is uniformly arranged in the middle part of the filter plate.

[0010] As a further description of the above technical solution:

[0011] The middle part of the cold water pair plate is equipped with a water inlet pipe and a water return pipe.

[0012] As a further description of the above technical solution:

[0013] The middle part of the exhaust gas inlet and outlet plate is equipped with an air inlet pipe and an air outlet pipe.

[0014] As a further description of the above technical solution:

[0015] The middle part of the cold water pair plate is equipped with a water inlet pipe and a water return pipe.

[0016] As a further description of the above technical solution:

[0017] One end of the coil pipe is arranged at one end of the water inlet pipe close to the cold water pair plate, and the other end of the coil pipe is arranged at one end of the water return pipe close to the cold water pair plate.

[0018] As a further description of the above technical solution:

[0019] The filter plate is specifically designed to be inclined at 45 degrees to provide the transmission of the filter plate to the precipitate.

[0020] The air inlet pipe and the air outlet pipe are provided with a partition plate.

[0021] The utility model has the advantages of the following beneficial effects:

[0022] 1、In the utility model, through the design of the cooling assembly, the cold disc and the coil pipe are matched, the cold water circulates in the coil pipe, the MTS exhaust gas temperature can be effectively reduced, the high-temperature MTS gas is converted into liquid due to the low-temperature environment, the MTS exhaust gas amount entering the exhaust gas tower is greatly reduced, the processing load of the exhaust gas tower is reduced, the MTS exhaust gas treatment cost is reduced, and the stable operation of the exhaust gas tower is ensured.

[0023] 2、In the utility model, the filter plate and the filter hole are arranged to be inclined at 45 degrees, the impurities and part of the liquid MTS in the intercepted exhaust gas can slide along the inclined surface, the cleaning is facilitated, the internal cleanliness of the device is ensured, the equipment failure caused by the accumulation of the precipitate is avoided, and the normal operation of the exhaust gas collecting device is ensured. DRAWINGS

[0024] Figure 1 A three-dimensional schematic view of a CVD coating MTS process exhaust gas collecting device is provided.

[0025] Figure 2 This is a schematic diagram of the structure of the partition plate of the CVD coating MTS process exhaust gas collection device proposed in this utility model;

[0026] Figure 3 This is a schematic diagram of the coil structure of a CVD coating MTS process waste gas collection device proposed in this utility model.

[0027] Legend:

[0028] 1. MTS collector; 2. Cold water plate; 3. Exhaust gas inlet / outlet plate; 4. Cover plate; 5. Cooling assembly; 6. Water inlet pipe; 7. Water return pipe; 8. Cold plate; 9. Coil; 10. Air inlet pipe; 11. Air outlet pipe; 12. Filter assembly; 13. Filter plate; 14. Filter holes; 15. Partition plate; 16. Mounting slot. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] Reference Figure 1 and Figure 3 An embodiment of this utility model is provided: a CVD coating MTS process exhaust gas collection device, including an MTS collector 1, characterized in that: a pair of cold water plates 2 and a pair of exhaust gas inlet and outlet plates 3 are installed on the top of the MTS collector 1, a cooling component 5 is installed in the middle of the cold water plates 2, a cover plate 4 is installed directly above the MTS collector 1, and a filter component 12 is provided on the top of the MTS collector 1.

[0031] The cooling assembly 5 includes a cold plate 8, which is mounted on the inner wall of the cold water counter plate 2. A coil 9 is mounted on the side of the cold plate 8 away from the cold water counter plate 2. An inlet pipe 6 and a return pipe 7 are mounted in the middle of the cold water counter plate 2. An installation groove 16 is provided in the middle of the cold water counter plate 2. The inlet pipe 6 and the return pipe 7 are both mounted in the middle of the installation groove 16. One end of the coil 9 is located at the end of the inlet pipe 6 near the cold water counter plate 2, and the other end of the coil 9 is located at the end of the return pipe 7 near the cold water counter plate 2.

[0032] Specifically, after cold water is introduced through the inlet pipe 6, the cold water circulates in the coil 9 and finally flows out through the return pipe 7. This allows the cold plate 8 and the coil 9 to work together to cool the MTS exhaust gas entering the collector. Under the influence of the low temperature environment, the high temperature MTS gas is transformed into liquid MTS, which helps to reduce the MTS exhaust gas content in the subsequent exhaust gas treatment process, thereby reducing the difficulty and cost of exhaust gas treatment and improving the stability and reliability of the MTS process exhaust gas collection device.

[0033] Reference Figure 3 The filter assembly 12 includes a filter plate 13, which is disposed on the top of the MTS collector 1. Filter holes 14 are evenly arranged in the middle of the filter plate 13. The filter plate 13 is specifically designed with a 45-degree inclination to provide the filter plate 13 with good transportability of sediment.

[0034] Specifically, the filter holes 14 on the filter plate 13 effectively intercept impurities and some liquid MTS in the exhaust gas, which helps to improve the filtration efficiency and quality of MTS exhaust gas. The filter plate 13 is designed with a 45-degree inclination, and the intercepted sediment will slide down the inclined filter plate 13 under the action of gravity, which is convenient for subsequent centralized cleaning and avoids sediment accumulation in the device and blockage. This maintains good flow inside the MTS process exhaust gas collection device and helps to improve the working efficiency of the MTS collector 1.

[0035] Reference Figure 2 An inlet pipe 10 and an outlet pipe 11 are installed in the middle of the exhaust gas inlet / outlet plate 3, and a partition 15 is provided between the inlet pipe 10 and the outlet pipe 11.

[0036] Specifically, the MTS waste gas is smoothly input and output through the inlet pipe 10 and the outlet pipe 11, and the excess MTS process waste gas is discharged and quickly input into the waste gas tower by setting the baffle 15.

[0037] Working principle: MTS exhaust gas enters the MTS collector 1 through the inlet pipe 10. At this time, cold water flows in through the inlet pipe 6, circulates through the coil 9, and flows out through the return pipe 7. During this process, the cold plate 8 works with the coil 9 to cool the MTS exhaust gas entering the collector. Since the melting point of MTS is -78℃, the high-temperature MTS gas is converted into liquid MTS when cooled. At the same time, the filter plate 13 plays its role through the filter holes 14. Impurities and some liquid MTS in the exhaust gas are intercepted by the filter holes 14. Because the filter plate 13 is designed with a 45-degree inclination, the intercepted sediment will slide down the inclined filter plate 13, which is convenient for subsequent cleaning and effectively improves the transfer of sediment. After cooling and filtration, the exhaust gas is discharged from the MTS collector 1 through the outlet pipe 11 under the separation of the baffle 15 and enters the exhaust gas tower.

[0038] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A CVD coating MTS process exhaust gas collection device, comprising an MTS collector (1), characterized in that: The top of the MTS collector (1) is equipped with a pair of cold water plates (2) and a pair of exhaust gas inlet and outlet plates (3). The middle of the cold water plates (2) is equipped with a cooling assembly (5). The top of the MTS collector (1) is equipped with a cover plate (4). The top of the MTS collector (1) is equipped with a filter assembly (12). The cooling assembly (5) includes a cold plate (8) which is mounted on the inner wall of the cold water plate (2) and a coil (9) is mounted on the side of the cold plate (8) away from the cold water plate (2).

2. The CVD coating MTS process waste gas collection device according to claim 1, characterized in that: The filter assembly (12) includes a filter plate (13), which is disposed on the top of the MTS collector (1), and filter holes (14) are uniformly arranged in the middle of the filter plate (13).

3. The CVD coating MTS process waste gas collection device according to claim 1, characterized in that: The cold water plate (2) is equipped with an inlet pipe (6) and a return pipe (7) in the middle.

4. The CVD coating MTS process waste gas collection device according to claim 1, characterized in that: The exhaust gas inlet / outlet plate (3) is equipped with an inlet pipe (10) and an outlet pipe (11) in the middle.

5. The CVD coating MTS process waste gas collection device according to claim 3, characterized in that: The cold water plate (2) has an installation groove (16) in the middle, and the inlet pipe (6) and the return pipe (7) are both installed in the middle of the installation groove (16).

6. The CVD coating MTS process waste gas collection device according to claim 3, characterized in that: One end of the coil (9) is located at the end of the inlet pipe (6) near the cold water plate (2), and the other end of the coil (9) is located at the end of the return pipe (7) near the cold water plate (2).

7. The CVD coating MTS process waste gas collection device according to claim 2, characterized in that: The filter plate (13) is specifically designed with a 45-degree inclination to provide the filter plate (13) with good transportability of sediment.

8. The CVD coating MTS process waste gas collection device according to claim 4, characterized in that: A partition (15) is provided between the air inlet pipe (10) and the air outlet pipe (11).

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