Semiconductor substrate conveying track adjusting device

Abstract

The utility model discloses a semiconductor substrate conveying track adjusting device which comprises a bottom plate, a material pulling assembly, a terminal box and a track adjusting assembly. The material pulling assembly, the terminal box and the track adjusting assembly are installed on the bottom plate. The rail adjusting assembly comprises two vertical plates slidably mounted on the bottom plate, a left lead screw and a right lead screw, the left lead screw and the right lead screw penetrate through the two vertical plates and are mounted on the bottom plate, guide grooves are formed in the vertical plates, and the guide grooves are covered with limiting plates and pressing plates which are mounted on the vertical plates. First adjusting bolts connected with the vertical plates are arranged on the limiting plates, and the distance between the two vertical plates is rapidly adjusted according to actual requirements through cooperation of a left lead screw and a right lead screw with the two vertical plates so as to adapt to base plates of different sizes. The guide groove is designed to guide the substrate to enter a correct position, meanwhile, the limiting plate and the pressing plate are arranged to ensure the stability and accuracy of the substrate in the whole conveying process, the limiting block prevents the vertical plate from sliding out of the linear guide rail, and the first adjusting bolt and the second adjusting bolt provide adjustment for the positions of the limiting plate and the pressing plate.

Description

Technical Field

[0001] This utility model relates to the field of substrate transport track adjustment technology, specifically a semiconductor substrate transport track adjustment device. Background Technology

[0002] In semiconductor manufacturing, substrate transport and positioning is a critical step that directly affects the quality and efficiency of subsequent processes. With the increasing integration of semiconductor devices and the ever-stricter requirements for product precision, higher demands are being placed on the accuracy, stability, and automation of substrate transport systems.

[0003] Traditional substrate conveyor systems typically employ a fixed structure, making it difficult to quickly adapt to changes in substrate size or shape requirements. This results in long production line adjustment times and poor flexibility. Furthermore, due to the lack of an effective adjustment mechanism, traditional systems struggle to accurately place substrates in the predetermined positions every time, especially when dealing with minute dimensional differences between batches of substrates. This negatively impacts production efficiency and product quality. Utility Model Content

[0004] Purpose of the utility model: To provide a semiconductor substrate transport track adjustment device to solve the above-mentioned problems existing in the prior art.

[0005] Technical solution: A semiconductor substrate conveying track adjustment device, comprising:

[0006] Base plate, material pulling assembly mounted on the base plate, terminal box and track adjustment assembly;

[0007] The track adjustment assembly includes two upright plates slidably mounted on the base plate, and left and right lead screws penetrating the two upright plates and mounted on the base plate. Guide grooves are formed on the upright plates, and limiting plates and pressure plates mounted on the upright plates cover the guide grooves. First adjusting bolts connected to the upright plates are provided on the limiting plates.

[0008] The middle section of the pressure plate is provided with a connecting frame, which is connected to a sleeve. A screw is provided inside the sleeve, and a nut is fitted on the screw. The screw is connected to a movable cylinder installed on the upright plate. The two ends of the pressure plate are provided with movable components. The movable components include a movable block that is hinged to the pressure plate and slidably connected to the upright plate, a fixed block that is disposed on one side of the movable block and installed on the upright plate, and a second adjusting bolt that is installed on the fixed block and connected to the movable block.

[0009] In a further embodiment, the material pulling assembly includes a slide table mounted on the base plate, a bracket mounted on the slide table, a clamping cylinder mounted on the bracket, and a first motor mounted on one end of the slide table and driving the bracket to move; the clamping cylinder is located between two upright plates.

[0010] In a further embodiment, each terminal box is electrically connected to a first motor and a second motor located at one end of the left and right lead screws, and the second motor is mounted on the base plate.

[0011] In a further embodiment, the two upright plates are arranged parallel to each other, and a linear guide rail is provided between the two upright plates and the base plate. The linear guide rail is threadedly connected to the base plate and slidably connected to the upright plates. The left and right lead screws are threadedly engaged with the upright plates, and the two ends of the linear guide rail are also provided with limiting blocks.

[0012] In a further embodiment, the guide groove is used to place the substrate, the first adjusting bolt is rotatably connected to the limiting plate and threadedly engaged with the upright plate, the limiting plate has a chamfer at the entrance of the guide groove, and the upright plate has a photoelectric sensor at the entrance of the guide groove.

[0013] In a further embodiment, the connecting frame is hinged to the pressure plate and the sleeve, the sleeve is threaded to the screw, the nut is threaded to the screw, the screw is fixedly connected to the output shaft of the moving cylinder, and the second adjusting bolt is rotatably connected to the fixed block and threaded to the moving block.

[0014] In a further embodiment, a plurality of support rods for supporting the base plate are provided between the two upright plates, and the support rods are threadedly connected to the base plate.

[0015] Beneficial effects: This utility model discloses a semiconductor substrate conveying track adjustment device. The track of this utility model cooperates with two vertical plates through left and right lead screws, and the distance between the two vertical plates can be quickly adjusted according to actual needs to adapt to substrates of different sizes. The guide groove design is used to guide the substrate into the correct position, and it is equipped with a limit plate and a pressure plate to ensure the stability and accuracy of the substrate throughout the conveying process. The limit block prevents the vertical plate from sliding out of the linear guide rail, and the first and second adjusting bolts provide fine adjustment of the position of the limit plate and the pressure plate.

[0016] Multiple support rods are distributed between the two upright plates, which increases the stability of the substrate during the transfer process. The slide table works with the first motor to achieve precise position control, ensuring that the substrate can be accurately transferred to the designated position. The clamping cylinder can automatically grab and release the substrate. The combination of the moving cylinder and the pressure plate can apply appropriate pressure as needed without damaging the substrate. Attached Figure Description

[0017] Figure 1 This is a perspective view of the present invention.

[0018] Figure 2 This is the front view of this utility model.

[0019] Figure 3 This is a top view of the present invention.

[0020] Figure 4 This is the right view of this utility model.

[0021] Figure 5 This is a rear view of the present invention.

[0022] Figure 6 This is a partial enlarged view of the movable component of this utility model.

[0023] The attached figures are labeled as follows: 1. Base plate; 2. Slide table; 3. Adjustment assembly; 11. Limiting block; 12. Linear guide rail; 21. First motor; 22. Bracket; 23. Clamping cylinder; 31. Vertical plate; 32. Limiting plate; 33. Left and right lead screws; 34. Pressure plate; 35. Moving cylinder; 36. Screw; 37. Nut; 38. Sleeve; 39. Connecting frame; 100. Base plate; 101. Terminal box; 311. Guide groove; 321. First adjusting bolt; 331. Second motor; 341. Moving block; 342. Fixing block; 343. Second adjusting bolt. Detailed Implementation

[0024] This invention relates to a semiconductor substrate conveying track adjustment device. Through left and right lead screws cooperating with two upright plates, the distance between the two upright plates can be quickly adjusted according to actual needs to accommodate substrates of different sizes. A guide groove design guides the substrate into the correct position, while limit plates and pressure plates are provided to ensure the stability and accuracy of the substrate throughout the conveying process. Limit blocks prevent the upright plates from sliding off the linear guide rail, and the first and second adjusting bolts provide fine adjustment of the positions of the limit plates and pressure plates. The specific implementation details the solution below.

[0025] Reference Figures 1-6 As shown, a semiconductor substrate conveying track adjustment device includes:

[0026] The base plate 1, the material pulling assembly, the terminal box 101 and the track adjusting assembly 3 are mounted on the base plate 1; the material pulling assembly includes a slide table 2 mounted on the base plate 1, a bracket 22 mounted on the slide table 2, a clamping cylinder 23 mounted on the bracket 22, and a first motor 21 mounted on one end of the slide table 2 and driving the bracket 22 to move; the clamping cylinder 23 is located between two upright plates 31; the terminal box 101 is electrically connected to the first motor 21 and a second motor 331 provided at one end of the left and right lead screws 33, and the second motor 331 is mounted on the base plate 1.

[0027] The track adjustment assembly 3 includes two upright plates 31 slidably mounted on the base plate 1, and left and right lead screws 33 passing through the two upright plates 31 and mounted on the base plate 1. Multiple support rods for supporting the base plate 100 are also provided between the two upright plates 31, and the support rods are threadedly connected to the base plate 1. The two upright plates 31 are arranged parallel to each other, and a linear guide rail 12 is provided between the two upright plates 31 and the base plate 1. The linear guide rail 12 is threadedly connected to the base plate 1 and slidably connected to the upright plates 31. The left and right lead screws 33 are threadedly engaged with the upright plates 31. Limiting blocks 11 are provided at both ends of 2; a guide groove 311 is provided on the upright plate 31, the guide groove 311 is used to support the base plate 100, and a limiting plate 32 and a pressure plate 34 installed on the upright plate 31 are covered on the guide groove 311. A first adjusting bolt 321 connected to the upright plate 31 is provided on the limiting plate 32. The first adjusting bolt 321 is rotatably connected to the limiting plate 32 and threadedly engaged with the upright plate 31. A chamfer is provided at the entrance of the guide groove 311 on the limiting plate 32. A photoelectric sensor is provided at the entrance of the guide groove 311 on the upright plate 31.

[0028] The middle section of the pressure plate 34 is provided with a connecting frame 39, which is hinged to both the pressure plate 34 and the sleeve 38. The connecting frame 39 is connected to the sleeve 38, which is threadedly engaged with the screw 36. The sleeve 38 contains the screw 36, and a nut 37 is fitted onto the screw 36. The nut 37 is threadedly engaged with the screw 36. The screw 36 is connected to a movable cylinder 35 mounted on the vertical plate 31. The screw 36 is fixedly connected to the output shaft of the movable cylinder 35. The two ends of the pressure plate 34 are provided with movable components. The movable components include a movable block 341 that is hinged to the pressure plate 34 and slidably connected to the vertical plate 31, a fixed block 342 that is disposed on one side of the movable block 341 and mounted on the vertical plate 31, and a second adjusting bolt 343 that is mounted on the fixed block 342 and connected to the movable block 341. The second adjusting bolt 343 is rotatably connected to the fixed block 342 and threadedly engaged with the movable block 341.

[0029] Working principle: First, the terminal box 101 provides power, and the first motor 21 and the second motor 331 receive the power supply from the terminal box 101;

[0030] As required by the track width, the position of the limiting plate 32 is adjusted by the first adjusting bolt 321 to ensure that the base plate 100 can accurately enter the guide groove 311; by rotating the second motor 331 on the left and right lead screws 33, the upright plate 31 will slide along the linear guide rail 12 to adjust the track spacing; when the desired position is reached, the lead screw stops rotating and the upright plate 31 is fixed in the new position; the moving cylinder 35 is activated, and the pressure plate 34 is moved by the threaded engagement of the screw 36 and the sleeve 38 to adjust its position relative to the upright plate 31, ensuring that the pressure plate 34 can correctly act on the base plate 100; if more fine adjustment is required, the position of the moving block 341 is finely adjusted by the second adjusting bolt 343.

[0031] The first motor 21 starts, driving the bracket 22 mounted on the slide table 2 to move along the slide table 2 to the position where the substrate 100 is to be clamped; the clamping cylinder 23 is activated, grabbing the substrate 100 and fixing it; the first motor 21 starts again, moving the clamped substrate 100 to a predetermined position between the two upright plates 31 and then stopping; before the substrate 100 enters the guide groove 311, the photoelectric sensor detects whether an object is approaching. If so, it means that the substrate 100 has reached the designated position, and the next operation can be triggered at this time.

[0032] After the above work is completed, the substrate 100 can be smoothly transported on the track. During the process, each sensor will continuously monitor the position and status of the substrate 100.

[0033] The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present invention, various equivalent transformations can be made to the technical solutions of the present invention, and all such equivalent transformations fall within the protection scope of the present invention.

Claims

1. A semiconductor substrate conveying track adjustment device, comprising: Base plate, material pulling assembly mounted on the base plate, terminal box and track adjustment assembly; The track adjustment assembly is characterized in that it includes two upright plates slidably mounted on the base plate, and left and right lead screws penetrating the two upright plates and mounted on the base plate. Guide grooves are formed on the upright plates, and limiting plates and pressure plates mounted on the upright plates cover the guide grooves. A first adjusting bolt connected to the upright plate is provided on the limiting plate. The middle section of the pressure plate is provided with a connecting frame, which is connected to a sleeve. A screw is provided inside the sleeve, and a nut is fitted on the screw. The screw is connected to a movable cylinder installed on the upright plate. The two ends of the pressure plate are provided with movable components. The movable components include a movable block that is hinged to the pressure plate and slidably connected to the upright plate, a fixed block that is disposed on one side of the movable block and installed on the upright plate, and a second adjusting bolt that is installed on the fixed block and connected to the movable block.

2. The semiconductor substrate conveying track adjustment device according to claim 1, characterized in that: The material pulling assembly includes a slide table mounted on the base plate, a bracket mounted on the slide table, a clamping cylinder mounted on the bracket, and a first motor mounted on one end of the slide table and driving the bracket to move; the clamping cylinder is located between two upright plates.

3. The semiconductor substrate conveying track adjustment device according to claim 1, characterized in that: The terminal boxes are all electrically connected to the first motor and the second motors located at one end of the left and right lead screws. The second motors are mounted on the base plate.

4. The semiconductor substrate conveying track adjustment device according to claim 1, characterized in that: The two upright plates are arranged parallel to each other, and a linear guide rail is provided between the two upright plates and the base plate. The linear guide rail is threadedly connected to the base plate and slidably connected to the upright plates. The left and right lead screws are threadedly engaged with the upright plates, and the two ends of the linear guide rail are also provided with limit blocks.

5. The semiconductor substrate conveying track adjustment device according to claim 1, characterized in that: The guide groove is used to place the substrate. The first adjusting bolt is rotatably connected to the limiting plate and threadedly engaged with the upright plate. The limiting plate has a chamfer at the entrance of the guide groove, and the upright plate has a photoelectric sensor at the entrance of the guide groove.

6. The semiconductor substrate conveying track adjustment device according to claim 1, characterized in that: The connecting frame is hinged to the pressure plate and the sleeve. The sleeve is threaded to the screw. The nut is threaded to the screw. The screw is fixedly connected to the output shaft of the moving cylinder. The second adjusting bolt is rotatably connected to the fixed block and threaded to the moving block.

7. The semiconductor substrate conveying track adjustment device according to claim 1, characterized in that: Between the two upright plates, there are also a number of support rods for supporting the base plate, and the support rods are threadedly connected to the base plate.

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