Transfer device and machining equipment

Abstract

The utility model discloses a transfer device and machining equipment, the transfer device comprises a jig mechanism, a conveying mechanism and an unlocking piece, and the jig mechanism comprises a bearing piece used for installing a workpiece, a positioning piece rotationally connected with the bearing piece and an elastic piece connected with the positioning piece and the bearing piece; the elastic force of the elastic piece can enable the positioning piece to abut against the workpiece in the bearing piece; the conveying mechanism is in driving connection with the bearing piece and used for driving the jig mechanism to move in the first direction. The unlocking piece is fixedly arranged on the conveying mechanism and used for pushing the positioning piece to rotate when the jig mechanism moves, so that the positioning piece is far away from the workpiece in the bearing piece. By means of the conveying action of the conveying mechanism, when the jig mechanism moves to the unlocking piece, the unlocking piece can mechanically unlock the workpiece, a special driving piece does not need to be arranged, the structure is simpler, the equipment cost is lower, and the response is faster.

Description

Technical Field

[0001] This application relates to the field of automated equipment, and in particular to a transfer device and processing equipment. Background Technology

[0002] In the field of precision micromachining, most workpiece production and material handling take place in cleanroom environments, where dust control is extremely stringent during processing and workpiece transfer. For workpieces requiring high surface cleanliness (silicon wafers, flat substrates, glass, etc.), the production environment is often a Class 10,000 cleanroom. During processing and transfer within the cleanroom, it is crucial to prevent secondary dust particle contamination. Therefore, after surface processing, most workpieces undergo dust cleaning to prevent dust from affecting subsequent processes. Specifically, the workpiece to be cleaned is first clamped and positioned, then picked up and transported to the corresponding cleaning station for cleaning. Clamping and positioning the workpiece ensures that its position does not shift during cleaning, guaranteeing effective cleaning. In related technologies, the clamping and unlocking actions typically require dedicated drive components, resulting in higher equipment costs and slower response times. Utility Model Content

[0003] This application proposes a transfer device and processing equipment that can mechanically unlock workpieces without the need for a dedicated external power source.

[0004] This application proposes a transfer device, comprising:

[0005] The fixture mechanism includes a receiving member for mounting a workpiece, a positioning member rotatably connected to the receiving member, and an elastic member connecting the positioning member and the receiving member, wherein the elastic force of the elastic member enables the positioning member to abut against the workpiece in the receiving member.

[0006] A conveying mechanism, drivenly connected to the receiving component, is used to drive the fixture mechanism to move along a first direction;

[0007] The unlocking component is fixed on the conveying mechanism and is used to abut against the positioning component. When the fixture mechanism moves, it pushes the positioning component to rotate, so that the positioning component moves away from the workpiece in the receiving component.

[0008] In some embodiments, the upper side of the receiving member is provided with a limiting groove for accommodating the workpiece, and one side of the limiting groove is provided with a mounting hole;

[0009] The fixture mechanism further includes a swing member disposed in the mounting hole, one end of which is hinged to the receiving member; the positioning member is disposed on the upper side of the swing member, and the elastic member is disposed in the mounting hole, with one end abutting against the swing member and the other end abutting against the inner wall of the mounting hole.

[0010] In some embodiments, the fixture mechanism further includes a guide wheel rotatably mounted on the swing member and located below the receiving member, and the unlocking member is provided with a ramp corresponding to the guide wheel, the guide wheel being able to roll along the ramp to push the swing member to swing.

[0011] In some embodiments, the unlocking member is provided on opposite sides of the conveying mechanism, and the swing member is provided on opposite sides of the limiting groove; the positioning member is provided on each of the two swing members, and the two positioning members are used to clamp and position the workpiece.

[0012] In some embodiments, the swinging members are respectively provided on the two adjacent sides of the limiting groove, and the positioning members are respectively provided on the two swinging members. The two positioning members are respectively used to position the two adjacent sides of the workpiece. The transfer device includes two unlocking members, one of which is provided on the side of the transfer mechanism and the other is provided at the end of the transfer mechanism.

[0013] In some embodiments, the conveying mechanism includes:

[0014] The base, wherein the receiving member is slidably disposed with respect to the base along a first direction;

[0015] The drive assembly includes two synchronous pulleys arranged along the first direction, a synchronous belt wrapped around the synchronous pulleys, and a motor that drives one of the synchronous pulleys to rotate, the synchronous belt being driven to the receiving member.

[0016] In some embodiments, the conveying mechanism further includes a slide rail disposed on the base, a slider adapted to the slide rail, and a connecting block connecting the slider and the receiving member, wherein the slide rail is disposed along a first direction.

[0017] In some embodiments, the timing pulleys are located at both ends of the slide rail, and the connecting block has through holes for the timing belt to pass through; the lower section of the timing belt is connected to the connecting block.

[0018] In some embodiments, the slide rail is provided with mounting seats for mounting the synchronous pulley at both ends, and the transmission mechanism further includes a cover plate that passes through the through hole and is provided at both ends on the mounting seat.

[0019] In some embodiments, buffer members are provided on the sides of the connecting block opposite to the mounting base; sensors are provided at both ends of the base, and sensing elements corresponding to the sensors are provided on the mounting base.

[0020] This application also proposes a processing apparatus, including the aforementioned transfer device and a machine base for mounting the transfer device.

[0021] The transfer device and processing equipment in this embodiment include a jig mechanism, a conveying mechanism, and an unlocking component. The jig mechanism includes a receiving component for mounting the workpiece, a positioning component rotatably connected to the receiving component, and an elastic component connecting the positioning component and the receiving component. The elastic force of the elastic component allows the positioning component to abut against the workpiece in the receiving component. The conveying mechanism is drivenly connected to the receiving component and is used to drive the jig mechanism to move along a first direction. The unlocking component is fixed on the conveying mechanism and is used to push the positioning component to rotate when the jig mechanism moves, causing the positioning component to move away from the workpiece in the receiving component. This application utilizes the transmission action of the conveying mechanism so that when the jig mechanism moves to the unlocking component, the unlocking component can mechanically unlock the workpiece. This eliminates the need for a dedicated driving component, resulting in a simpler structure, lower equipment cost, and faster response. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the transfer device in one embodiment of this application during material handling;

[0023] Figure 2 This is a schematic diagram of the clamping mechanism in one embodiment of this application;

[0024] Figure 3 for Figure 2 Structural diagrams of the swing component and positioning component in the embodiment;

[0025] Figure 4 This is a partial schematic diagram of the transfer device in another embodiment of this application.

[0026] Label Explanation:

[0027] 10. Clamping mechanism; 11. Receiving component; 12. Limiting groove; 13. Swinging component; 14. Positioning component; 15. Elastic component; 16. Guide wheel; 17. Unlocking component; 18. Ramp; 19. Material picking groove; 20. Conveying mechanism; 21. Base; 22. Slide rail; 23. Slider; 24. Connecting block; 25. Mounting base; 26. Synchronous pulley; 27. Synchronous belt; 28. Motor; 29. ​​Cover plate; 30. Buffer component; 31. Sensor; 32. Sensing component;

[0028] The purpose, features, and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0029] The solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments in this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0030] It should be noted that all directional indications in the embodiments of this application, such as up, down, left, right, front, back, etc., are only used to explain the relative positional relationship and movement of the components in a specific posture as shown in the attached figure. If the specific posture changes, the directional indication will also change accordingly.

[0031] It should also be noted that when a component is described as "fixed to" or "set on" another component, it can be directly on the other component or there may be an intervening component present. When a component is described as "connected to" another component, it can be directly connected to the other component or there may be an intervening component present.

[0032] Furthermore, the descriptions involving "first," "second," etc., in the embodiments of this application are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0033] This application proposes a transfer device, referring to... Figures 1 to 4 The transfer device includes: a fixture mechanism, comprising a receiving member 11 for mounting a workpiece, a positioning member 14 rotatably connected to the receiving member 11, and an elastic member 15 connecting the positioning member 14 and the receiving member 11, the elastic force of the elastic member 15 enabling the positioning member 14 to abut against the workpiece in the receiving member 11; a conveying mechanism 20, drivenly connected to the receiving member 11, for driving the fixture mechanism to move along a first direction; and an unlocking member 17, fixedly mounted on the conveying mechanism 20, for abutting against the positioning member 14, and pushing the positioning member 14 to rotate when the fixture mechanism moves, causing the positioning member 14 to move away from the workpiece in the receiving member 11. In this embodiment, by utilizing the linear transmission action of the conveying mechanism 20, when the fixture mechanism moves to the unlocking member 17, the unlocking member 17 can mechanically unlock the workpiece without the need for additional driving members. Furthermore, the components used for locking and unlocking have a simpler structure, lower equipment cost, and faster response.

[0034] In some embodiments, the upper side of the receiving member 11 is provided with a limiting groove 12 for accommodating the workpiece, and one side of the limiting groove 12 is provided with a mounting hole; the fixture mechanism also includes a swing member 13 disposed in the mounting hole, one end of the swing member 13 being hinged to the receiving member 11; a positioning member 14 is disposed on the upper side of the swing member 13, and an elastic member 15 is disposed in the mounting hole, with one end abutting against the swing member 13 and the other end abutting against the inner wall of the mounting hole. In this embodiment, by setting the swing member 13, the positioning member 14 and the receiving member 11 can be rotatedly connected. The positioning member 14 is disposed at the end away from the hinge axis of the swing member 13, and the elastic member 15 can be a spring. The spring force causes the free end of the swing member 13 to approach the limiting groove 12, thereby the positioning member 14 on the swing member 13 can abut against the workpiece in the limiting groove 12, completing the positioning of the workpiece. It is worth noting that two positioning members 14 can be used for clamping and positioning, or one positioning member 14 can be used to clamp the workpiece with the groove wall of the limiting groove 12 to achieve positioning. The specific positioning method is not limited. Compared to the sliding contact positioning method (where the positioning element 14 is slidably mounted on the receiving element 11 and abuts against the workpiece through elasticity), the swing positioning method using the swing element 13, the positioning element 14, and the elastic element 15 has lower requirements for the assembly accuracy of the swing element 13 and the positioning element 14, and is applicable to a wider range of scenarios. Furthermore, a material-retrieving groove 19 communicating with the limiting groove 12 can be provided on the side of the receiving element 11 to allow for material retrieval by clamping the workpiece from the edge, avoiding contact with the sides of the workpiece and preventing contamination.

[0035] In some embodiments, the fixture mechanism further includes a guide wheel 16 rotatably mounted on the swing member 13 and located below the receiving member 11. The unlocking member 17 has a ramp 18 corresponding to the guide wheel 16. The guide wheel 16 can roll along the ramp 18 to push the swing member 13 to swing. In this embodiment, the guide wheel 16 and the positioning member 14 are located at one end away from the rotation center of the swing member 13; the rotation center of the guide wheel 16 is set along a numerical direction. The unlocking member 17 may be a vertical plate arranged parallel to the first direction, and the vertical ramp 18 is located on the side of the vertical plate away from the conveying mechanism 20. The guide wheel 16 rolling on the ramp 18 reduces the friction when they contact each other, and the guide wheel 16 and the ramp 18 serve a guiding function. Because there is a certain angle between the ramp 18 and the first direction, the guide wheel 16 rolling along the ramp 18 can push the swing member 13 to swing, increasing the swing angle of the swing member 13. The elastic member 15 is compressed, allowing the positioning member 14 to move away from the workpiece, thus completing the unlocking.

[0036] In some embodiments, the conveying mechanism 20 is provided with unlocking members 17 on opposite sides, and the limiting groove 12 is provided with swinging members 13 on opposite sides; each of the two swinging members 13 is provided with a positioning member 14, which is used to clamp and position the workpiece. In this embodiment, the two unlocking members 17 are arranged in the second direction, and the two swinging members 13 are respectively disposed on both sides of the limiting groove 12. Correspondingly, the above-mentioned positioning member 14 and elastic member 15 are also provided on both swinging members 13. In this way, the two positioning members 14 can clamp the opposite sides of the workpiece to achieve centering clamping and positioning.

[0037] In addition, swing members 13 can be respectively provided on the two sides adjacent to the limiting groove 12, and positioning members 14 are respectively provided on the two swing members 13. The two positioning members 14 are used to position the adjacent two sides of the workpiece. The transfer device includes two unlocking members 17, one of which is provided on the side of the transfer mechanism 20, and the other is provided at the end of the transfer mechanism 20. In this embodiment, the workpiece can be clamped and positioned in the first direction and the second direction by the positioning member 14 and the side wall of the limiting groove 12 opposite to it. It is worth noting that the installation structure of the unlocking member 17 and its corresponding swing member 13, positioning member 14 and elastic member 15 located on the side of the transfer mechanism 20 can be consistent with the previous embodiment. The unlocking member 17 located at the end of the transfer mechanism 20 and its corresponding swing member 13 need to be different from the installation position of the unlocking member 17 and swing member 13 on the side. The swing member 13 and positioning member 14 corresponding to the unlocking member 17 located at the end can be named the first swing member 13 and the first positioning member 14, respectively. The middle section of the first swing member 13 is hinged to the receiving member 11. One end of the first swing member 13 is provided with a positioning member 14, and the other end is used to abut against the unlocking member 17 at the end to complete the unlocking.

[0038] In some embodiments, the conveying mechanism 20 includes: a base 21, with the receiving member 11 slidably disposed with the base 21 along a first direction; a driving assembly including two synchronous pulleys 26 arranged along the first direction, a synchronous belt 27 wrapped around the synchronous pulleys 26, and a motor 28 driving one of the synchronous pulleys 26 to rotate, the synchronous belt 27 being drivenly connected to the receiving member 11. The motor 28 can be a stepper motor, and the transmission via the synchronous pulleys 26 and the synchronous belt 27 allows for precise control of the movement position of the clamping mechanism 10.

[0039] Furthermore, the conveying mechanism 20 also includes a slide rail 22 mounted on the base 21, a slider 23 adapted to the slide rail 22, and a connecting block 24 connecting the slider 23 and the receiving member 11. The slide rail 22 is arranged along a first direction. Synchronous pulleys 26 are located at both ends of the slide rail 22. The connecting block 24 has through holes for the synchronous belt 27 to pass through; the lower section of the synchronous belt 27 is connected to the connecting block 24. By providing through holes in the connecting block 24, the synchronous belt 27 can be avoided, while allowing the conveying mechanism 20 and the fixture mechanism to be arranged vertically, making the overall structure of the transfer device in this embodiment more compact.

[0040] Furthermore, the slide rail 22 is provided with mounting seats 25 at both ends for mounting the synchronous pulley 26, and the transmission mechanism 20 also includes through holes and cover plates 29 at both ends on the mounting seats 25. The cover plates 29 can shield the synchronous belt 27 below, providing a certain degree of protection.

[0041] In some embodiments, buffer elements 30 are respectively provided on the sides of the connecting block 24 opposite to the mounting base 25; sensors 31 are respectively provided at both ends of the base 21, and sensing elements 32 corresponding to the sensors 31 are provided on the mounting base 25. In this embodiment, the sensors 31 and corresponding sensing elements 32 are provided to monitor the position of the clamping mechanism 10. Of course, buffer elements 30 can also be provided on the sides of the connecting block 24. The buffer elements 30 can be rubber pillars or silicone pillars to prevent the connecting block 24 from directly colliding with the mounting base 25 during movement, which can play a certain protective and buffering role.

[0042] This application also proposes a processing apparatus, including the aforementioned transfer device and a machine base for mounting the transfer device. In this embodiment, the transfer device is used to transfer a workpiece along a first direction; the processing apparatus may further include a laser processing device disposed on one side of the transfer device. The laser processing device is disposed on the machine base and can process the workpiece in the fixture mechanism 10.

[0043] In a typical process, a workpiece undergoes seven flow actions: loading into the fixture mechanism, positioning and clamping the workpiece within the fixture mechanism, moving to the machining station, machining the workpiece, moving to the unloading station, releasing the workpiece from the fixture mechanism, and removing the workpiece from the fixture mechanism. This embodiment optimizes four process stages: "positioning and clamping the workpiece within the fixture mechanism," "moving to the machining station," and "moving to the unloading station and releasing the workpiece from the fixture mechanism." One end of the conveyor mechanism 20 equipped with the unlocking element 17 can be designated as the loading / unloading station, and the other end as the machining station. The fixture mechanism automatically unlocks upon entering the loading / unloading station and locks itself upon leaving the station, thus improving processing efficiency.

[0044] In this embodiment, the linear transmission action of the conveying mechanism 20 is specifically utilized to move the fixture mechanism to the unlocking member 17. The unlocking member 17 then mechanically unlocks the workpiece without requiring additional driving components. Furthermore, the components used for locking and unlocking have a relatively simple structure, resulting in lower equipment cost and faster response. Simultaneously, replacing some electrical control with a purely mechanical structure improves equipment stability.

[0045] In this embodiment, the working principle of the transfer device and processing equipment is as follows: The transfer device and processing equipment include a jig mechanism, a conveying mechanism 20, and an unlocking member 17. The jig mechanism includes a receiving member 11 for mounting the workpiece, a positioning member 14 rotatably connected to the receiving member 11, and an elastic member 15 connecting the positioning member 14 and the receiving member 11. The elastic force of the elastic member 15 enables the positioning member 14 to abut against the workpiece in the receiving member 11. The conveying mechanism 20 is drivenly connected to the receiving member 11 and is used to drive the jig mechanism to move along a first direction. The unlocking member 17 is fixed on the conveying mechanism 20 and is used to push the positioning member 14 to rotate when the jig mechanism moves, so that the positioning member 14 moves away from the workpiece in the receiving member 11. This application utilizes the transmission action of the conveying mechanism 20 to enable the jig mechanism to move to the unlocking member 17, at which point the unlocking member 17 can mechanically unlock the workpiece without the need for additional driving members. Furthermore, the structure is simpler, the equipment cost is lower, and the response is faster.

[0046] The above are only some or preferred embodiments of this application. Neither the text nor the drawings should limit the scope of protection of this application. All equivalent structural transformations made using the content of this application's specification and drawings under the overall concept of this application, or direct / indirect applications in other related technical fields, are included within the scope of protection of this application.

Claims

1. A transfer device, characterized in that, include: The fixture mechanism includes a receiving member for mounting a workpiece, a positioning member rotatably connected to the receiving member, and an elastic member connecting the positioning member and the receiving member, wherein the elastic force of the elastic member enables the positioning member to abut against the workpiece in the receiving member. A conveying mechanism, drivenly connected to the receiving component, is used to drive the fixture mechanism to move along a first direction; An unlocking element, disposed on the conveying mechanism, is used to push the positioning element to rotate when the fixture mechanism moves to the unlocking element, so that the positioning element moves away from the workpiece in the receiving element.

2. The transfer device according to claim 1, characterized in that, The upper side of the receiving component is provided with a limiting groove for accommodating the workpiece, and one side of the limiting groove is provided with a mounting hole. The fixture mechanism further includes a swing member disposed in the mounting hole, one end of which is hinged to the receiving member; the positioning member is disposed on the upper side of the swing member, and the elastic member is disposed in the mounting hole, with one end abutting against the swing member and the other end abutting against the inner wall of the mounting hole.

3. The transfer device according to claim 2, characterized in that, The fixture mechanism further includes a guide wheel rotatably mounted on the swing member and located below the receiving member. The unlocking member is provided with a ramp corresponding to the guide wheel. The guide wheel can roll along the ramp to push the swing member to swing.

4. The transfer device according to claim 3, characterized in that, The unlocking component is provided on each of the opposite sides of the conveying mechanism, and the swing component is provided on each of the opposite sides of the limiting groove; the positioning component is provided on each of the two swing components, and the two positioning components are used to clamp and position the workpiece.

5. The transfer device according to claim 2, characterized in that, The oscillating member is provided on each of the two adjacent sides of the limiting groove, and the positioning member is provided on each of the two oscillating members. The two positioning members are used to position the adjacent two sides of the workpiece. The transfer device includes two unlocking members, one of which is provided on the side of the transfer mechanism and the other is provided at the end of the transfer mechanism.

6. The transfer device according to claim 1, characterized in that, The transmission mechanism includes: The base, wherein the receiving member is slidably disposed with respect to the base along a first direction; The drive assembly includes two synchronous pulleys arranged along the first direction, a synchronous belt wrapped around the synchronous pulleys, and a motor that drives one of the synchronous pulleys to rotate, the synchronous belt being driven to the receiving member.

7. The transfer device according to claim 6, characterized in that, The conveying mechanism further includes a slide rail disposed on the base, a slider adapted to the slide rail, and a connecting block connecting the slider and the receiving member, wherein the slide rail is arranged along a first direction.

8. The transfer device according to claim 7, characterized in that, The synchronous pulleys are located at both ends of the slide rail, and the connecting block has through holes for the synchronous belt to pass through; the lower section of the synchronous belt is connected to the connecting block; the two ends of the slide rail are respectively provided with mounting seats for mounting the synchronous pulleys, and the transmission mechanism also includes a cover plate that passes through the through hole and is located at both ends on the mounting seat.

9. The transfer device according to claim 8, characterized in that, The connecting block and the mounting base are respectively provided with buffers on their opposite sides; the base is provided with sensors at both ends, and the mounting base is provided with sensing elements corresponding to the sensors.

10. A processing device, characterized in that, It includes the transfer device according to any one of claims 1 to 9, and a machine for mounting the transfer device.

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