Vacuum evaporation device for preparing metallized film

Abstract

The vacuum evaporation device comprises a vacuum container, the vacuum container comprises an unwinding chamber, a winding chamber and a coating chamber, an unwinding roller is arranged in the unwinding chamber, a winding roller is arranged in the winding chamber, a large coating cooling roller and an evaporation source are arranged in the coating chamber, and the evaporation source is connected with the large coating cooling roller. A film is wound outside the unwinding roller and the winding roller, two film passing openings are formed in the upper end of the film coating chamber, the film penetrates through the film passing openings to be wound on the large film coating cooling roller, the evaporation source is arranged under the large film coating cooling roller, a gate valve assembly is arranged on one side of each film passing opening, and the gate valve assembly is arranged on the other side of each film passing opening. And the gate valve assembly is used for closing the film passing opening during roll changing. The vacuum evaporation device disclosed by the utility model is simple in structure and high in space utilization rate, the vacuumizing time is effectively shortened, the production efficiency is improved, the pollution of atmosphere to the coating chamber is reduced, and the coating quality is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation technology, specifically to a vacuum evaporation apparatus for preparing metallized thin films. Background Technology

[0002] When changing the substrate in a vacuum winding machine, the vacuum chamber needs to be opened to replace the substrate in the atmosphere and then the vacuum needs to be re-evacuated. This method exposes the substrate and the inside of the vacuum winding machine to the atmosphere for a long time, and the contact with air, especially when there are many modules in the vacuum winding machine, can have a serious impact on the quality of the equipment and flexible coating products.

[0003] Existing vacuum winding equipment commonly uses circular or rectangular structures as vacuum containers, and most are single-chamber vacuum containers. Various components are installed inside the container. Although circular vacuum containers occupy less internal space, they are inconvenient for film feeding, tape splicing, and component installation. Rectangular vacuum containers are convenient for internal operation, but they occupy more space, have low space utilization, and require a longer vacuuming time. Moreover, single-chamber vacuum containers usually connect the vacuum of the winding chamber and the vacuum of the coating chamber together for roll changing, which can disrupt the vacuum of the coating chamber and affect the vacuuming time, thus adversely affecting production and operation.

[0004] Therefore, there is a need to provide a vacuum evaporation apparatus for preparing metallized thin films to solve the above problems. Utility Model Content

[0005] To overcome the shortcomings of existing technologies, this utility model provides a vacuum evaporation deposition apparatus for preparing metallized thin films. It has a simple structure and high space utilization, effectively shortens the vacuum extraction time, improves production efficiency, reduces atmospheric pollution in the deposition chamber, and improves deposition quality.

[0006] The technical solution adopted by this utility model to solve its technical problem is:

[0007] A vacuum evaporation apparatus for preparing metallized thin films includes a vacuum container, which comprises an unwinding chamber, a winding chamber, and a coating chamber. An unwinding roller is disposed in the unwinding chamber, a winding roller is disposed in the winding chamber, and a coating cooling roller and an evaporation source are disposed in the coating chamber. A thin film is wound around the outside of the unwinding roller and the winding roller. Two film passages are provided at the upper end of the coating chamber, through which the thin film passes and wraps around the coating cooling roller. The evaporation source is disposed directly below the coating cooling roller, and a baffle valve assembly is disposed on one side of each film passage. During roll changing, the baffle valve assembly is used to close the film passage.

[0008] As a further improvement to the above technical solution, the vacuum container is configured as an elliptical shape, and both the upper and lower ends of the vacuum container are configured as flat structures. The unwinding chamber and the winding chamber are arranged side by side at the upper end of the coating chamber.

[0009] As a further improvement to the above technical solution, both the unwinding chamber and the winding chamber are provided with film guides. The film guides are connected to the film passage, and the two film guides are symmetrically arranged with the connection between the unwinding chamber and the winding chamber as the central axis.

[0010] As a further improvement to the above technical solution, the guiding membrane component is provided with a guiding membrane channel, the guiding membrane channel is provided with an upper guide port and a lower guide port, the lower guide port is connected to the membrane passage port, and the insert valve assembly is provided on one side of the upper guide port.

[0011] As a further improvement to the above technical solution, the guiding membrane channel is configured with an inclined structure.

[0012] As a further improvement to the above technical solution, a first guide roller is provided on the lower side of the unwinding roller and the winding roller respectively, and the central axis of the film guiding channel is tangent to the lower side of the first guide roller.

[0013] As a further improvement to the above technical solution, a second guide roller is provided on both sides above the large coating cooling roller, and the central axis of the film guiding channel is tangent to the upper side of the second guide roller.

[0014] As a further improvement to the above technical solution, the slide valve assembly includes a telescopic cylinder and a slide valve. The telescopic cylinder is fixed outside the vacuum container, and the slide valve is disposed inside the vacuum container. The telescopic end of the telescopic cylinder passes through the vacuum container and is connected to the slide valve. During vacuum evaporation, the telescopic cylinder drives the slide valve to abut against the upper guide port.

[0015] As a further improvement to the above technical solution, the end of the coating cooling roller is provided with a cooling water inlet and outlet.

[0016] As a further improvement to the above technical solution, the surface roughness of the coating cooling roller is less than 0.1 μm.

[0017] The beneficial effects of this utility model are:

[0018] This invention improves space utilization by using an elliptical vacuum container and dividing its interior into three chambers: an unwinding chamber, a coating chamber, and a rewinding chamber. Furthermore, a gate valve assembly is installed at the connection point between the coating chamber and the unwinding and rewinding chambers. Controlling the gate valve allows for independent control of the chambers, maintaining a constant vacuum level in the coating chamber, effectively shortening the vacuuming time, improving production efficiency, and reducing atmospheric contamination of the coating chamber, thereby enhancing the coating quality of the metallized thin film. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0020] Figure 1 This is a schematic diagram of the structure of the vacuum evaporation deposition apparatus of this utility model;

[0021] Figure 2 yes Figure 1 Enlarged view of point A in the middle.

[0022] Reference numerals: 1. Vacuum container; 11. Unwinding chamber; 12. Rewinding chamber; 13. Coating chamber; 14. Film passage; 2. Unwinding roller; 3. Rewinding roller; 4. Coating cooling roller; 5. Evaporation source; 6. Thin film; 7. Insert valve assembly; 71. Telescopic cylinder; 72. Insert valve; 8. Film guide component; 81. Film guide channel; 82. Upper guide port; 83. Lower guide port; 9. First passing roller; 10. Second passing roller. Detailed Implementation

[0023] The following will clearly and completely describe the concept, specific structure, and technical effects of this utility model in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are all within the scope of protection of this utility model. Furthermore, all connections / connections involved in the patent do not simply refer to direct contact between components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. For example, fixed connections / fixed installations can use screw connections, bolt connections, pin connections, key connections, adhesive connections, mortise and tenon connections, welding, riveting, etc., as needed. For detachable connections, screw connections, bolt connections, threaded connections, snap-fit ​​connections, mortise and tenon connections, Velcro connections, etc., can be used as needed. The various technical features in this utility model can be combined interactively without contradicting each other.

[0024] Reference Figure 1A vacuum evaporation deposition apparatus for preparing metallized thin films includes a vacuum container 1, which comprises an unwinding chamber 11, a winding chamber 12, and a deposition chamber 13. These three chambers are independent of each other, each performing a different task, and work together to complete the vacuum evaporation deposition process of the metallized thin film. The unwinding chamber 11 is equipped with an unwinding roller 2 for placing and releasing the substrate to be deposited. The winding chamber 12 is equipped with a winding roller 3 for collecting and storing the deposited film. The upper end of the deposition chamber 13 has two film passage openings 14. The deposition chamber 13 is equipped with a deposition cooling roller 4 and an evaporation source 5. The evaporation source 5 is located directly below the deposition cooling roller 4. The thin film 6 passes through the film passage openings 14 and winds around the deposition cooling roller 4. The evaporation source 5 heats the aluminum wire to turn it into aluminum vapor. Under vacuum conditions, A metallized thin film is deposited on the substrate surface of the coating cooling roller 4 at a lower temperature. At the same time, a baffle valve assembly 7 is provided on one side of the film passage 14. When changing rolls, the baffle valve assembly 7 is used to seal the film passage 14 so that the three chambers are independent of each other. Closing the baffle valve assembly 7 can keep the vacuum level of the coating chamber 13 unchanged. It is only necessary to extract the vacuum of the take-up chamber 11 or the unwinding chamber 12 to start working again, which effectively shortens the vacuum extraction time, improves production efficiency and reduces the pollution of the coating chamber 13 by the atmosphere, thereby improving the coating quality.

[0025] Reference Figure 1 In this embodiment of the present invention, the vacuum container 1 is elliptical in shape, and both the upper and lower ends of the vacuum container 1 are flat, which is conducive to the stable placement of the vacuum evaporation device. The unwinding chamber 11 and the winding chamber 12 are arranged side by side at the upper end of the coating chamber 13, which effectively improves the space utilization rate inside the vacuum evaporation device. Moreover, the three chambers are independent of each other by simply sealing the film passage 14 through the slide valve assembly 7, which is convenient and quick to operate, effectively shortens the vacuuming time, and improves production efficiency.

[0026] Reference Figure 2 In the embodiments of this utility model, both the unwinding chamber 11 and the winding chamber 12 are provided with film guides 8. The film guides 8 are connected to the film passage 14, and the two film guides 8 are symmetrically arranged with the connection between the unwinding chamber 11 and the winding chamber 12 as the central axis, forming a symmetrical channel with one inlet and one outlet, which is conducive to the smooth unwinding and winding of the unwinding roller 2 and the winding roller 3.

[0027] Specifically, the guiding film component 8 is provided with a guiding film channel 81, which is inclined to facilitate the guidance and positioning of the substrate or film during transport. The guiding film channel 81 is provided with an upper guide port 82 and a lower guide port 83. The lower guide port 83 is connected to the film passage port 14, so that the unwinding chamber 11 and the winding chamber 12 are respectively connected to the coating chamber 13, ensuring that the substrate can be smoothly transported from the unwinding chamber 11 to the coating chamber 13, and then from the coating chamber 13 to the winding chamber 12. The insert valve assembly 7 is located on one side of the upper guide port 82. During the roll changing operation, the insert valve assembly 7 seals the upper guide port 82 to maintain the vacuum level of the coating chamber 13. When evacuating, only the unwinding chamber 11 and the winding chamber 12 need to be evacuated, thereby shortening the evacuation time and improving production efficiency.

[0028] Reference Figure 1 , Figure 2 In this embodiment of the present invention, a first guide roller 9 is respectively provided on one side below the unwinding roller 2 and the winding roller 3. The central axis of the film guiding channel 81 is tangent to the lower side of the first guide roller 9. At the same time, a second guide roller 10 is provided on both sides above the large coating cooling roller 4. The central axis of the film guiding channel 81 is tangent to the upper side of the second guide roller 10. This allows the film 6 to bypass the first guide roller 9, pass parallel to the film guiding channel 81, and then wrap around the second guide roller 10. During the substrate transportation process, the first guide roller 9 and the second guide roller 10 provide additional support and guidance, ensuring that the entry and exit of the substrate can be easily controlled during the coating process, and ensuring that the film can be deposited normally.

[0029] Reference Figure 2 In an embodiment of this utility model, the slide valve assembly 7 includes a telescopic cylinder 71 and a slide valve 72. The telescopic cylinder 71 is fixed outside the vacuum container 1, and the slide valve 72 is disposed inside the vacuum container 1. The telescopic end of the telescopic cylinder 71 passes through the vacuum container 1 and is connected to the slide valve 72. During vacuum evaporation, the telescopic cylinder 71 drives the slide valve 72 to seal against the upper guide port 82.

[0030] In addition, the end of the coating cooling roller 4 is provided with a cooling water inlet and outlet. The cooling water circulates inside the coating cooling roller 4 through the inlet and outlet, thereby effectively removing the heat of the film 6 on the roller surface and reducing the surface temperature of the film 6. During the vapor deposition process, it can effectively prevent defects such as cracking of the film 6 due to high temperature. At the same time, the surface roughness of the coating cooling roller 4 is less than 0.1μm, which ensures the smoothness of the surface of the coating cooling roller 4, so as to ensure the coating quality and the smooth transmission of the film 6.

[0031] The above is a detailed description of the preferred embodiments of the present utility model. However, the present utility model is not limited to the described embodiments. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. A vacuum evaporation apparatus for preparing metallized thin films, characterized in that: The device includes a vacuum container, comprising an unwinding chamber, a winding chamber, and a coating chamber. The unwinding chamber is equipped with an unwinding roller, the winding chamber with a winding roller, and the coating chamber with a coating cooling roller and an evaporation source. A thin film is wound around the outside of the unwinding roller and the winding roller. The upper end of the coating chamber has two film passages through which the film passes and is wound around the coating cooling roller. The evaporation source is located directly below the coating cooling roller. A baffle valve assembly is provided on one side of each film passage, which is used to close the film passage during roll changing.

2. The vacuum evaporation apparatus for preparing metallized thin films according to claim 1, characterized in that: The vacuum container is elliptical in shape, and both the upper and lower ends of the vacuum container are flat. The unwinding chamber and the winding chamber are arranged side by side at the upper end of the coating chamber.

3. The vacuum evaporation apparatus for preparing metallized thin films according to claim 1, characterized in that: Both the unwinding chamber and the rewinding chamber are equipped with film guides, which are connected to the film passage opening. The two film guides are symmetrically arranged with the connection between the unwinding chamber and the rewinding chamber as the central axis.

4. The vacuum evaporation apparatus for preparing metallized thin films according to claim 3, characterized in that: The membrane guide component is provided with a membrane guide channel, which has an upper guide port and a lower guide port. The lower guide port is connected to the membrane passage port, and the slide valve assembly is located on one side of the upper guide port.

5. The vacuum evaporation apparatus for preparing metallized thin films according to claim 4, characterized in that: The guide membrane channel is configured with an inclined structure.

6. The vacuum evaporation apparatus for preparing metallized thin films according to claim 4, characterized in that: A first guide roller is provided on one side below the unwinding roller and the winding roller respectively, and the central axis of the film guide channel is tangent to the lower side of the first guide roller.

7. The vacuum evaporation apparatus for preparing metallized thin films according to claim 4, characterized in that: The upper sides of the large coating cooling roller are provided with second guide rollers, and the central axis of the film guiding channel is tangent to the upper side of the second guide rollers.

8. A vacuum evaporation apparatus for preparing metallized thin films according to claim 4, characterized in that: The slide gate valve assembly includes a telescopic cylinder and a slide gate valve. The telescopic cylinder is fixed outside the vacuum container, and the slide gate valve is disposed inside the vacuum container. The telescopic end of the telescopic cylinder passes through the vacuum container and is connected to the slide gate valve. During vacuum evaporation, the telescopic cylinder drives the slide gate valve to abut against the upper guide port.

9. A vacuum evaporation apparatus for preparing metallized thin films according to claim 1, characterized in that: The end of the coating cooling roller is provided with a cooling water inlet and outlet.

10. A vacuum evaporation apparatus for preparing metallized thin films according to claim 1, characterized in that: The surface roughness of the coating cooling roller is less than 0.1 μm.

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