Gas injection pipe, gas injection device and furnace tube device

Abstract

The utility model provides a gas injection tube, a gas injection device and a furnace tube device, and relates to the technical field of semiconductor processes. The gas injection pipe comprises a pipe body; the tube body comprises a horizontal part and a vertical part, the horizontal part is communicated with the vertical part, and the vertical part is located in the furnace tube; a straight nozzle; the straight nozzle is positioned in a first area of the vertical part; a convergent nozzle; the convergent nozzle is positioned in a second area of the vertical part; in the extending direction of the vertical part, the first area is located above the second area. According to the scheme disclosed by the invention, different types of nozzles are arranged in different areas of the pipe body, and gases with different masses can be injected into different areas in the pipe, so that the consistency of the thicknesses of films in different areas is improved.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor process technology, and in particular to a gas injection tube, apparatus, and furnace tube apparatus. Background Technology

[0002] In related technologies, due to the loading effect of the furnace tube apparatus, the film thickness grown in different regions of the wafer is inconsistent under the same temperature conditions, with the top region generally thicker and the bottom region thinner. The loading effect can usually be controlled by adjusting the temperature of different regions to achieve uniform film thickness. However, temperature affects the low-k dielectric constant (LK) value of the sidewall process (Spacer, SPA), thus impacting the performance of the chip device. Therefore, improving the uniformity of film thickness in different regions without affecting the low-k dielectric constant (LK) value is a technical problem that needs to be solved. Utility Model Content

[0003] This disclosure provides a gas injection pipe, device, and furnace tube device. By setting different types of nozzles in different regions of the pipe, different masses of gas can be injected into different regions of the pipe, thereby improving the consistency of film thickness in different regions.

[0004] According to a first aspect of the embodiments of this application, a gas injection tube is provided, comprising:

[0005] Tube body; the tube body includes a horizontal section and a vertical section, the horizontal section and the vertical section are connected, and the vertical section is located in the furnace tube;

[0006] A straight nozzle; the straight nozzle is located in the first region of the vertical section;

[0007] Converging nozzle; the convergent nozzle is located in the second region of the vertical section;

[0008] In the vertical extension direction, the first region is located above the second region.

[0009] In one embodiment, the first region includes a top region, a sub-top region, and a central region; the second region includes a sub-bottom region and a bottom region; wherein, the central region is located in the middle of the vertical part; the sub-top region and the top region are located above the central region and are successively away from the top of the vertical part; the sub-bottom region and the bottom region are located below the central region and are successively close to the bottom of the vertical part.

[0010] In one embodiment, the cross-sectional area of ​​the air inlet of the straight nozzle is equal to the cross-sectional area of ​​the air outlet; the orthographic projection of the air inlet on the side wall of the furnace tube coincides with the orthographic projection of the air outlet on the side wall of the furnace tube.

[0011] In one embodiment, the opening angle of the outlet of the straight nozzle is 0°; wherein, the opening angle refers to the angle between the axis of one end of the outlet and the axis of the straight nozzle.

[0012] In one embodiment, the air inlet of the straight nozzle is circular, and the diameter of the air inlet of the straight nozzle decreases sequentially from the central region to the top region.

[0013] In one embodiment, the cross-sectional area of ​​the inlet of the converging nozzle is larger than the cross-sectional area of ​​the outlet, and the cross-sectional area of ​​the outlet of the converging nozzle is equal to the cross-sectional area of ​​the outlet of the straight nozzle.

[0014] In one embodiment, the air inlet of the convergent nozzle is circular, and the diameter of the air inlet of the convergent nozzle decreases sequentially in the direction from the bottom region to the sub-bottom region.

[0015] In one embodiment, the opening angle of the outlet of the converging nozzle decreases sequentially in the direction from the bottom region to the sub-bottom region; wherein, the opening angle is the angle between the axis of one end of the outlet and the axis of the straight nozzle.

[0016] In one embodiment, the opening angle of the outlet of the convergent nozzle is between 10° and 75°.

[0017] According to a second aspect of the embodiments of this application, a gas injection device is provided for injecting gas into a furnace tube, comprising:

[0018] Air supply chamber;

[0019] As described in the first aspect, the gas injection tube has a horizontal section connected to the gas supply chamber.

[0020] According to a third aspect of the embodiments of this application, a furnace tube apparatus is provided, characterized in that it includes a gas injection device as described in the second aspect.

[0021] According to the scheme disclosed herein, by setting different types of nozzles in different regions of the tube, gases of different masses can be injected into different regions of the tube, which helps to improve the consistency of film thickness in different regions; improves the problem of large differences in film thickness in different regions caused by the load effect of the furnace tube device, optimizes the furnace tube process, and improves the efficiency and quality of the furnace tube process.

[0022] It should be understood that the description in the utility model description section is not intended to limit the key or essential features of the embodiments of this disclosure, nor is it intended to restrict the scope of this disclosure. Other features of this disclosure will become readily apparent from the following description. Attached Figure Description

[0023] The above and other features, advantages, and aspects of the embodiments of this disclosure will become more apparent from the accompanying drawings and the following detailed description. In the drawings, the same or similar reference numerals denote the same or similar elements, wherein:

[0024] Figure 1 This is a schematic diagram of the structure of a gas injection pipe in the prior art;

[0025] Figure 2 This is a line graph showing the film thickness in different regions according to an embodiment of this disclosure;

[0026] Figure 3 This is a schematic diagram of the gas injection tube according to an embodiment of the present disclosure;

[0027] Figure 4 This is a schematic diagram of a straight nozzle according to an embodiment of the present disclosure;

[0028] Figure 5 This is a schematic diagram of a convergent nozzle according to an embodiment of the present disclosure;

[0029] Figure 6 This is a schematic diagram of the structure of the gas injection device according to an embodiment of the present disclosure;

[0030] Figure 7 This is a schematic diagram of a wafer processing scenario according to an embodiment of the present disclosure;

[0031] Figure 8 This is a schematic diagram showing the position of the nozzle and the edge of the wafer in an embodiment of this disclosure.

[0032] Explanation of reference numerals in the attached figures:

[0033] 1: Pipe body;

[0034] 2: Straight nozzle;

[0035] 3: Converging nozzle;

[0036] 4: Air supply chamber;

[0037] 5: Gas injection pipe;

[0038] 6: Crystal Boat;

[0039] 7: Heating device;

[0040] 8: Wafer. Detailed Implementation

[0041] The exemplary embodiments of this disclosure are described below with reference to the accompanying drawings, including various details of the embodiments to aid understanding, and should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this disclosure. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0042] In related technologies, silicon nitride (SiN) has long been chosen as the sidewall thin film for metal-oxide-semiconductor field-effect transistors (MOSFETs) due to its excellent blocking capability, insulation properties, thermal stability, and hydrofluoric acid resistance. As devices continue to shrink, FinFETs (Fin Field-Effect Transistors) have been introduced to improve gate control of the channel and mitigate the short-channel effect associated with device shrinkage. However, the three-dimensional structure of FinFETs introduces significant gate-source parasitic capacitance. With continued device shrinkage, this parasitic capacitance will exceed the gate channel capacitance required for switching between on and off states in a FinFET. To address these issues, existing technologies have proposed optimizing conventional SiN isolators. One solution is to introduce an air gap to reduce parasitic capacitance. However, a challenge with air gaps is that they can lead to structural instability and heat dissipation problems. Another solution is to use multilayer interlayer structures, such as oxide-nitride structures. Replacing some SiN with silicon dioxide (SiO2) (K=7.9), which has a lower dielectric constant, can effectively reduce parasitic capacitance. Silicon carbonitride (SiOCN) is an ideal alternative to SiN due to its ease of processing and lower dielectric constant. Here, K represents the dielectric constant of the dielectric material.

[0043] In related technologies, furnace tube processing is a crucial step in semiconductor manufacturing, used to heat semiconductor materials, causing chemical reactions to form the desired crystal structure and electrical properties. Furnace tube processing includes thermal oxidation, diffusion, and deposition. The structure of a vertical furnace tube machine is as follows: Figure 8 As shown, in a furnace tube apparatus, wafers are loaded onto boats. During the reaction, the boat rises into a quartz tube and is heated by an external heater. The loading of the wafers into the tube affects the temperature distribution, atmosphere flow, and heat treatment effect within the tube, resulting in differences in the film thickness grown by the wafers at different boat positions—a phenomenon known as the load effect of the furnace tube apparatus.

[0044] In existing technologies, such as Figure 1As shown, straight nozzles are used in different regions. The uniformity of film thickness in different regions is achieved by controlling the temperature of each region. However, temperature affects the k-value of LK SPA, thus impacting the performance of the chip device. For example... Figure 2 As shown, the film thickness varies in different regions, with the top film being thicker and the bottom film being thinner.

[0045] To address the aforementioned technical problems, embodiments of this disclosure provide a gas injection pipe, an apparatus, and a furnace tube apparatus for thin film deposition. The gas injection pipe for optimizing the furnace tube process includes: a pipe body; the pipe body includes a horizontal portion and a vertical portion, the horizontal portion and the vertical portion being connected, and the vertical portion being located within the furnace tube; a straight nozzle; the straight nozzle being located in a first region of the vertical portion; and a converging nozzle; the converging nozzle being located in a second region of the vertical portion. Through any embodiment of this disclosure, gases of different masses can be injected into different regions within the pipe, thereby improving the consistency of thin film thickness in different regions.

[0046] This disclosure provides a gas injection pipe 5 for optimizing furnace tube processes, such as... Figure 3 As shown, the gas injection pipe 5 used to optimize the furnace tube process includes:

[0047] Tube body 1; Tube body 1 includes a horizontal section and a vertical section, the horizontal section and the vertical section are connected, and the vertical section is located in the furnace tube;

[0048] Straight nozzle 2; Straight nozzle 2 is located in the first region of the vertical section;

[0049] Converging nozzle 3; Converging nozzle 3 is located in the second region of the vertical section;

[0050] In the vertical extension direction, the first region is located above the second region.

[0051] According to the embodiments of this disclosure, it should be noted that:

[0052] The first region includes a top region (TOP), a sub-top region (C-TOP), and a central region (Center); the second region includes a sub-bottom region (C-Bottom) and a bottom region (Bottom). The positions of the top region, sub-top region, central region, sub-bottom region, and bottom region relative to tube 1 are determined by… Figure 3For example, the top region is located at the very top of the gas injection pipe 5, and the top region is the end away from the gas supply chamber 4; the second-top region is located at the upper part of the gas injection pipe 5, and the second-top region is adjacent to and below the top region; the central region is located in the middle part of the gas injection pipe 5, and the central region is adjacent to and below the second-top region; the second-bottom region is located at the lower part of the gas injection pipe 5, and the second-bottom region is adjacent to and below the central region; the bottom region is located at the very bottom of the gas injection pipe 5, and the bottom region is the end closest to the gas supply chamber 4, adjacent to and below the second-bottom region.

[0053] Pipe 1 is used to transport gas, delivering externally supplied gas (such as oxygen, nitrogen, etc.) through gas supply chamber 4 into gas injection pipe 5. Figure 7 For example, the gas injection tube 5 can be made of high-purity silicon dioxide (SiO2); preferably, the silicon dioxide content is above 99%.

[0054] The tube body 1 includes a horizontal section and a vertical section, such as Figure 3 As shown, the vertical part is parallel to the y-axis of the three-dimensional coordinate system, and the horizontal part is parallel to the x-axis of the three-dimensional coordinate system. The horizontal part is connected to the vertical part, the vertical part is located in the furnace tube, and the horizontal part is located in the gas supply chamber 4.

[0055] like Figure 6 As shown, the straight nozzles 2 are embedded in the top region, the sub-top region, and the central region, and are located on the side of the vertical portion closest to the crystal boat 6. The number of straight nozzles 2 can be set according to process requirements; the number of straight nozzles 2 in different regions can also be set according to process requirements. For example, the top region has 5 straight nozzles 2 arranged at intervals, or the sub-top region has 10 straight nozzles 2 arranged at intervals. The spacing length of the straight nozzles 2 can be set according to process requirements.

[0056] like Figure 6 As shown, the converging nozzles 3 are embedded in the sub-bottom region and the bottom region, and are located on the side of the vertical portion near the crystal boat 6. The number of converging nozzles 3 can be set according to process requirements; the number of converging nozzles 3 in different regions can also be set according to process requirements. For example, the top region is provided with 4 converging nozzles 3 arranged at intervals, or the sub-top region is provided with 7 converging nozzles 3 arranged at intervals. The interval length of the converging nozzles 3 can be set according to process requirements.

[0057] According to embodiments of this disclosure, by providing a straight nozzle in the first region of the vertical part of the tube and a converging nozzle in the second region of the vertical part, gases of different masses can be injected into different regions of the tube, which helps to improve the consistency of film thickness in different regions; improves the problem of large differences in film thickness in different regions caused by the load effect of the furnace tube device, optimizes the furnace tube process, and improves the efficiency and quality of the furnace tube process.

[0058] In one embodiment, such as Figure 3 As shown, the first region includes a top region, a sub-top region, and a central region; the second region includes a sub-bottom region and a bottom region; wherein, the central region is located in the middle of the vertical part; the sub-top region and the top region are located above the central region and are successively away from the top of the vertical part; the sub-bottom region and the bottom region are located below the central region and are successively close to the bottom of the vertical part.

[0059] According to the embodiments of this disclosure, it should be noted that:

[0060] The top, sub-top, central, sub-bottom, and bottom zones are defined based on the temperature at different locations within the furnace tube assembly. The different temperatures in these zones are set according to process requirements and controlled by the heating device.

[0061] According to embodiments of this disclosure, by dividing the area into zones based on the temperature at different locations, the gas injection volume and temperature in different areas can be precisely controlled, ensuring full utilization of heat and improving energy efficiency.

[0062] In one embodiment, such as Figure 4 As shown, the cross-sectional area of ​​the air inlet of the straight nozzle 2 is equal to the cross-sectional area of ​​the air outlet; the orthographic projection of the air inlet onto the side wall of the furnace tube coincides with the orthographic projection of the air outlet onto the side wall of the furnace tube; as shown... Figure 5 As shown, the cross-sectional area of ​​the inlet of the converging nozzle 3 is larger than the cross-sectional area of ​​the outlet.

[0063] It is understandable that the straight nozzle 2 has its outlet near the crystal boat 6 and its inlet near the furnace tube sidewall; the converging nozzle 3 has its outlet near the crystal boat 6 and its inlet near the furnace tube sidewall. Figure 4 For example, the cross-sectional area S0 of the inlet of the straight nozzle 2 is equal to the cross-sectional area S1 of the outlet; the orthographic projection of the inlet onto the side wall of the furnace tube coincides with the orthographic projection of the outlet onto the side wall of the furnace tube; with Figure 5 For example, the cross-sectional area S0' of the inlet of the converging nozzle 3 is greater than the cross-sectional area S1' of the outlet.

[0064] The principle behind setting straight nozzles 2 in the top, sub-top, and central areas, and converging nozzles 3 in the sub-bottom and bottom areas, is as follows: Figure 4 and Figure 5 For example, assume the cross-sectional area of ​​the inlet of the straight nozzle 2 is S0 and the cross-sectional area of ​​the outlet is S1, and the cross-sectional area of ​​the inlet of the converging nozzle 3 is S0' and the cross-sectional area of ​​the outlet is S1'; the velocity of the external gas passing through the inlet of the straight nozzle 2 is V0 and the velocity of the outlet is V1, and the velocity of the external gas passing through the inlet of the straight nozzle 2 is V0' and the velocity of the outlet is V1'; the velocity of the external gas before entering the straight nozzle 2 is equal to the velocity of the external gas before entering the converging nozzle 3 (i.e., V0 = V0'); the gas density is ρ; the mass flux of the gas flowing through the nozzle is Jm; Jm = ρV; the mass of the gas flowing through the nozzle per unit time is m; m = Jm * S = ρVS; according to the law of conservation of mass, the mass of the gas passing through both ends of the nozzle per unit time is the same, that is:

[0065] Straight nozzle 2: ρV0S0=ρV1S1;

[0066] Converging nozzle 3: ρV0'S0' =ρV1' S1';

[0067] Since V0 = V0', S0 < S0', and S0 = S1 = S1', then V1' > V1. Therefore, the gas flowing out of the converging nozzle 3 has a faster flow rate. In the same amount of time, the faster flow rate can transport more gas mass, thereby increasing the thickness of the thin film.

[0068] According to embodiments of this disclosure, a straight nozzle is provided in a first region of the vertical part of the tube and a converging nozzle is provided in a second region of the vertical part, which enables the injection of gases of different masses into different regions of the tube, thereby improving the consistency of film thickness in different regions.

[0069] In one embodiment, the outlet of the straight nozzle 2 is circular, and the diameter of the outlet of the straight nozzle 2 decreases sequentially from the central region to the top region.

[0070] In one embodiment, the air outlet of the straight nozzle 2 can be circular or square (such as rectangular or square). If the air outlet of the straight nozzle 2 is rectangular, the width of the air outlet of the straight nozzle 2 decreases sequentially from the central region to the top region.

[0071] In one embodiment, such as Figure 8 As shown, the outlet of the straight nozzle 2 is located on the side close to the crystal boat 6, and this outlet is used to eject the gas inside the tube 1.

[0072] According to embodiments of this disclosure, the diameter of the air outlet of the straight nozzle decreases sequentially from the central region, the sub-top region, and the top region, which ensures that more gas is contained at the bottom of the tube and helps to increase the ejection speed of the lower air outlet.

[0073] In one embodiment, the cross-sectional area of ​​the inlet of the converging nozzle is larger than the cross-sectional area of ​​the outlet, and the cross-sectional area of ​​the outlet of the converging nozzle is equal to the cross-sectional area of ​​the outlet of the straight nozzle.

[0074] In one embodiment, the air inlet of the converging nozzle 3 is circular, and the diameter of the air inlet of the converging nozzle 3 decreases sequentially in the direction from the bottom region to the sub-bottom region.

[0075] In one embodiment, the air inlet of the converging nozzle 3 can be circular or square (such as rectangular or square). If the air inlet of the converging nozzle 3 is rectangular, the width of the air inlet of the converging nozzle 3 decreases sequentially in the direction from the bottom region to the sub-bottom region.

[0076] According to embodiments of this disclosure, the diameter of the inlet of the converging nozzle decreases sequentially from the bottom region to the sub-bottom region, which ensures that more gas is contained at the bottom of the tube and helps to increase the ejection speed of the lower outlet.

[0077] In one embodiment, the opening angle of the outlet of the converging nozzle 3 decreases sequentially in the direction from the bottom region to the sub-bottom region; wherein, the opening angle is the angle between the axis of one end of the outlet and the axis of the converging nozzle 3.

[0078] In one embodiment, such as Figure 5 As shown, the opening angle refers to the angle α between the axis of the air outlet and the nozzle axis. When the opening angle of the air outlet of the converging nozzle 3 decreases sequentially from the bottom region to the sub-bottom region, the S0' of the converging nozzle 3 gradually decreases from the bottom region to the sub-bottom region of the tube body 1.

[0079] According to embodiments of this disclosure, the opening angle of the outlet of the converging nozzle decreases sequentially from the bottom region to the sub-bottom region, which can ensure that the outlet velocity gradually decreases from bottom to top, thereby improving the situation where the film thickness is thicker above the tube and the film thickness is thinner below the tube.

[0080] In one embodiment, such as Figure 4 As shown, the opening angle of the air outlet of the straight nozzle 2 is 0°.

[0081] In one embodiment, such as Figure 5 As shown, the opening angle of the outlet of the converging nozzle 3 is between 10° and 75°.

[0082] According to the embodiments of this disclosure, it should be noted that:

[0083] The opening angle of the outlet of the converging nozzle 3 is between 10° and 75°. The opening angle of the outlet of the converging nozzle 3 can be set according to process requirements. The opening angle of the converging nozzle 3 can be finely adjusted by an adjustment mechanism to adapt to different transport gas requirements.

[0084] According to embodiments of this disclosure, by providing a straight nozzle with an opening angle of 0° in the first region of the tube and a converging nozzle with an opening angle between 10° and 75° in the first region of the tube, gases of different masses can be injected into different regions of the tube, thereby improving the consistency of film thickness in different regions.

[0085] This disclosure provides a gas injection device for injecting gas into furnace tubes, such as... Figure 7 As shown, the gas injection device for injecting gas into the furnace tubes includes:

[0086] Air supply chamber 4;

[0087] Gas injection pipe 5; the horizontal part of the gas supply chamber 4 of the pipe body 1 of gas injection pipe 5 is connected.

[0088] In one embodiment, the gas supply chamber 4 can be understood as a structure with an internal cavity, which is a container for holding external gas. This container can hold a small portion or a large portion of the external gas. Figure 7 As shown, the size of the accommodating section can be set according to specific needs. The gas supply chamber 4 is part of the gas injection device. One end of the gas supply chamber 4 is provided with an air inlet, and the other end is provided with an air outlet; the air inlet is the connection channel between the gas supply chamber 4 and the external gas source, and its main function is to introduce external gas (such as air, oxygen, nitrogen or other process gases) to meet the gas requirements of furnace tube processes or other applications; the air outlet is connected to the bottom end of the pipe body 1 of the gas injection pipe 5 to transport the external gas in the gas supply chamber 4 into the gas injection pipe 5.

[0089] The gas supply chamber 4 and the gas injection pipe 5 can be respectively equipped with mutually compatible locking structures to facilitate connection. Alternatively, the gas supply chamber 4 and the gas injection pipe 5 can be indirectly connected through other connection structures, such as connecting the gas supply chamber 4 and the gas injection pipe 5 with threads and sealing materials such as polytetrafluoroethylene sealing tape to achieve sealing, thereby realizing the connection between the gas supply chamber 4 and the gas injection pipe 5.

[0090] In one embodiment, the gas injection pipe 5 includes: a pipe body 1; the bottom end of the pipe body 1 is bent at a preset angle and inserted into the gas supply chamber 4; a straight nozzle 2; the straight nozzle 2 is located in a first region of the pipe body 1; and a converging nozzle 3; the converging nozzle 3 is located in a second region of the pipe body 1; wherein the first region includes a top region, a sub-top region, and a central region; and the second region includes a sub-bottom region and a bottom region. Preferably, the preset angle is 90°, which can be set according to process requirements.

[0091] According to embodiments of this disclosure, by providing different types of nozzles in different regions of the tube, gases of varying masses can be injected into different regions of the tube, thereby improving the consistency of film thickness in different regions. Simultaneously, this improves the accuracy of gas delivery by the gas injection device.

[0092] This disclosure provides a furnace tube apparatus for thin film deposition, such as... Figure 7 As shown, the furnace tube assembly for thin film deposition includes a gas injection device.

[0093] The furnace tube device is used to perform thin film deposition on wafer 8.

[0094] Figure 8 A schematic diagram showing the position of the nozzle relative to the wafer edge is shown, as follows: Figure 8 As shown, the nozzle (including the straight nozzle 2 and the converging nozzle 3) ejects gas, and the gas forms an airflow in the area between the nozzle and the wafer. The airflow contacts the edge of the wafer to achieve thin film deposition on the wafer 8.

[0095] In one embodiment, the furnace tube assembly includes at least one of a crystal boat 6 and a heating device 7.

[0096] According to embodiments of this disclosure, by providing different types of nozzles in different regions of the tube, gases of different masses can be injected into different regions of the tube, thereby improving the consistency of film thickness in different regions. Simultaneously, it improves the accuracy of gas delivery in the furnace tube apparatus used for thin film deposition.

[0097] In the description of this specification, it should be understood that, unless otherwise expressly specified and limited, the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential,” etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure.

[0098] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this disclosure, "multiple" means two or more, unless otherwise explicitly specified.

[0099] In this disclosure, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0100] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0101] The foregoing disclosure provides many different implementations or examples for carrying out different structures of this disclosure. To simplify the disclosure, specific examples of components and arrangements have been described above. Of course, these are merely examples and are not intended to limit the scope of this disclosure. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0102] The specific embodiments described above do not constitute a limitation on the scope of protection of this disclosure. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A gas injection tube, characterized in that, include: The tube body includes a horizontal section and a vertical section, the horizontal section and the vertical section are connected, and the vertical section is located in the furnace tube; Straight nozzle; The straight nozzle is located in the first region of the vertical section; A convergent nozzle; the convergent nozzle is located in the second region of the vertical section; In the direction of extension of the vertical portion, the first region is located above the second region.

2. The gas injection tube according to claim 1, characterized in that, The first region includes a top region, a sub-top region, and a central region; the second region includes a sub-bottom region and a bottom region; wherein, the central region is located in the middle of the vertical part; the sub-top region and the top region are located above the central region and are successively away from the top of the vertical part; the sub-bottom region and the bottom region are located below the central region and are successively close to the bottom of the vertical part.

3. The gas injection tube according to claim 2, characterized in that, The cross-sectional area of ​​the air inlet of the straight nozzle is equal to the cross-sectional area of ​​the air outlet; the orthographic projection of the air inlet on the side wall of the furnace tube coincides with the orthographic projection of the air outlet on the side wall of the furnace tube.

4. The gas injection pipe according to claim 3, characterized in that, The air inlet of the straight nozzle is circular, and the diameter of the air inlet of the straight nozzle decreases sequentially in the direction from the central region to the top region.

5. The gas injection tube according to claim 4, characterized in that, The opening angle of the air inlet of the straight nozzle is 0°; wherein, the opening angle refers to the angle between the axis of one end of the air inlet and the side wall of the straight nozzle.

6. The gas injection pipe according to claim 2, characterized in that, The cross-sectional area of ​​the inlet of the converging nozzle is larger than the cross-sectional area of ​​the outlet, and the cross-sectional area of ​​the outlet of the converging nozzle is equal to the cross-sectional area of ​​the outlet of the straight nozzle.

7. The gas injection pipe according to claim 6, characterized in that, The air inlet of the convergent nozzle is circular, and the diameter of the air inlet of the convergent nozzle decreases sequentially in the direction from the bottom region to the sub-bottom region.

8. The gas injection pipe according to claim 7, characterized in that, The opening angle of the air outlet of the converging nozzle decreases sequentially in the direction from the bottom region to the sub-bottom region; wherein, the opening angle refers to the angle between the axis of one end of the air outlet and the sidewall of the straight nozzle.

9. The gas injection tube according to claim 8, characterized in that, The opening angle of the outlet of the converging nozzle is between 10° and 75°.

10. A gas injection device for injecting gas into furnace tubes, characterized in that, include: Air supply chamber; The gas injection tube according to any one of claims 1 to 9, wherein the horizontal portion of the tube body is connected to the gas supply chamber.

11. A furnace tube device, characterized in that, Includes the gas injection device as described in claim 10.

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