Sealing transmission mechanism and extension device
By introducing a cooling jacket and cooling fluid into the magnetic coupling assembly, the problem of sealing failure at high temperatures was solved, the stable operation of the sealing transmission mechanism was achieved, gas leakage was avoided, and the sealing performance of the chemical vapor phase epitaxy process was improved.
Patent Information
- Application Number
- CN202423156228.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2025-12-09
- Estimated Expiration
- 2034-12-20
AI Technical Summary
In the prior art, the performance of magnetohydrodynamic sealing devices is affected at high temperatures, leading to sealing failure, leakage of process gases, and affecting the sealing performance of chemical vapor phase epitaxy processes.
The sealed transmission mechanism, which employs magnetic coupling components and a cooling jacket, uses cooling fluid to radiate heat to the rotating shaft and driven rotor, keeping the sealed transmission mechanism operating within a suitable temperature range and preventing seal failure.
It effectively avoids seal failure at high temperatures, ensures the sealing of process gases, reduces the temperature of the rotating shaft and driven rotor, maintains the normal operation of the magnetic coupling assembly, and reduces the risk of gas leakage.
Smart Images
Figure CN223646678U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to CVD equipment technical field especially relates to a sealing transmission mechanism and epitaxial device. BACKGROUND
[0002] Chemical vapor deposition (CVD) can be divided into horizontal type and vertical type, and the uniformity of the epitaxial thickness and the doping concentration of the epitaxial wafer is a key parameter affecting the performance of silicon carbide devices, and the epitaxial wafer of the horizontal type is farther from the air inlet position, and the thickness is thinner, and the air inlet of the vertical type is located at the center, so the center thickness of the epitaxial wafer is thick, and the periphery is thin.
[0003] In the prior art, the rotation of the base drives the rotation of the epitaxial wafer, which can greatly reduce the thickness and the non-uniformity of the doping concentration. However, since the rotating shaft needs to pass through the cavity and be connected with the motor, and the cavity needs to be sealed and maintain a certain degree of vacuum, the magnetic fluid sealing device is usually used in the prior art to dynamically seal the rotating shaft. In the process engineering, the temperature in the cavity can reach 1700 DEG C at the highest, at which time the temperature conducted on the rotating shaft will also be very high, and the working temperature of the ordinary magnetic fluid sealing device is limited to about 80 DEG C-120 DEG C, while the use of special high-temperature carrier liquid and magnetic material can withstand a temperature as high as 300 DEG C. However, at a higher temperature (such as more than 400 DEG C), its performance will be severely affected, resulting in sealing failure and causing process gas leakage. UTILITY MODEL CONTENTS
[0004] The utility model aims at providing a kind of sealing transmission mechanism, to be able to solve the problem of sealing failure due to temperature being too high.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] The sealing transmission mechanism comprises:
[0007] A rotating shaft;
[0008] A magnetic coupling assembly, the magnetic coupling assembly comprises a housing, the housing has a first cavity, a driving rotor is arranged outside the first cavity, a driven rotor is arranged in the first cavity, the driving rotor can be connected to a driving member, the rotating shaft is connected to the driven rotor, and the driving rotor can drive the driven rotor to rotate;
[0009] A cooling jacket, the cooling jacket is sealingly connected to the housing, a first end of the cooling jacket is communicated with the first cavity, the rotating shaft penetrates the cooling jacket, and a second end of the cooling jacket can be sealingly connected to an external cavity;
[0010] The cooling jacket is provided with a first liquid inlet hole and a first liquid outlet hole, and the first liquid inlet hole and the first liquid outlet hole are communicated through a first flow channel arranged in the cooling jacket.
[0011] In some embodiments, the sealing transmission mechanism further comprises a support seat having a through cavity, one end of the support seat being sealingly connected to the second end of the cooling jacket, and the other end of the support seat being sealingly connected to the outer cavity, and the rotating shaft passes through the through cavity to penetrate into the outer cavity.
[0012] In some embodiments, the support seat is provided with a second liquid inlet hole and a second liquid outlet hole, and the second liquid inlet hole and the second liquid outlet hole are communicated through a second flow channel arranged in the support seat.
[0013] In some embodiments, the inner cavity wall of the through cavity is provided with a first groove at the second flow channel.
[0014] In some embodiments, the first groove is circumferentially arranged along the inner cavity wall of the through cavity, and a plurality of the first grooves are distributed along the axial direction of the through cavity.
[0015] In some embodiments, the inner wall of the cooling jacket facing the rotating shaft is provided with a second groove.
[0016] In some embodiments, the end surface of the support seat facing the cooling jacket is provided with a sealing member surrounding the through cavity.
[0017] In some embodiments, both ends of the cooling jacket are provided with bearings, and the rotating shaft passes through the bearings.
[0018] In some embodiments, a partition plate is arranged in the accommodation cavity to divide the internal space of the accommodation cavity into a second cavity and the first cavity, and the driving rotor is located in the second cavity.
[0019] Also provided is an epitaxial device comprising a reaction cavity and the sealing transmission mechanism as described above, and the rotating shaft penetrates into the reaction cavity to connect a susceptor located in the reaction cavity for fixing a substrate.
[0020] The utility model discloses the beneficial effects of:
[0021] The accommodation cavity and the cooling jacket can seal the rotating shaft, avoid seal failure caused by high temperature, and prevent gas in the outer cavity from leaking out. By injecting cooling fluid through the first liquid inlet hole and then flowing out through the first liquid outlet hole, the rotating shaft and the driven rotor can be radiatively cooled, so that their temperatures are reduced, and the magnetic coupling assembly can be kept in an appropriate working range to ensure normal operation. BRIEF DESCRIPTION OF DRAWINGS
[0022] Figure 1 is a sectional view of the sealing transmission mechanism in the utility model;
[0023] Figure 2 is Figure 1 the enlarged view of A in the middle;
[0024] Figure 3 is a sectional view of the supporting seat in the utility model.
[0025] In the figure,
[0026] 1, rotating shaft;
[0027] 2, magnetic coupling assembly; 21, installation cavity; 22, isolation plate; 23, driving rotor; 24, driven rotor; 25, first cavity; 26, second cavity;
[0028] 3, cooling jacket; 31, first liquid inlet hole; 32, first liquid outlet hole; 33, first flow channel;
[0029] 4, supporting seat; 41, through cavity; 42, second flow channel; 43, first recess; 44, embedding groove;
[0030] 5, bearing;
[0031] 6, synchronous wheel;
[0032] 7, cavity;
[0033] 8, base. DETAILED DESCRIPTION
[0034] The utility model will be further explained in detail in combination with the drawings and examples. It can be understood that the specific examples described here are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.
[0035] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0036] In the utility model, unless another definite provision and limitation, first feature is "on" or "under" second feature, can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them.
[0037] In the description of the embodiment, the terms "upper", "lower", "left", "right", and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore, cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only used to distinguish in description, and have no special meaning.
[0038] As Figures 1 to 3 shown, the application provides a sealing transmission mechanism, which comprises a rotating shaft 1, a magnetic coupling assembly 2 and a cooling jacket 3, the magnetic coupling assembly 2 comprises a mounting cavity 21, the mounting cavity 21 is provided with a first cavity 25, the first cavity 25 is provided with a driving rotor 23 outside, the first cavity 25 is provided with a driven rotor 24 inside, the driving rotor 23 can be connected with a driving member, the driving rotor 23 can drive the driven rotor 24 to rotate, the rotating shaft 1 is connected with the driven rotor 24; the cooling jacket 3 is sealingly connected with the mounting cavity 21, a first end of the cooling jacket 3 is communicated with the first cavity 25, the rotating shaft 1 penetrates through the cooling jacket 3, a second end of the cooling jacket 3 can be sealingly connected with an external cavity; the cooling jacket 3 is provided with a first liquid inlet hole 31 and a first liquid outlet hole 32, the first liquid inlet hole 31 and the first liquid outlet hole 32 are communicated through a first flow channel 33 arranged in the cooling jacket 3.
[0039] The cooling jacket 3 is communicated with the first cavity 25, in use, the cooling jacket 3 can be sealingly connected with the external cavity, the mounting cavity 21 and the cooling jacket 3 can seal the rotating shaft 1, so that the sealing failure caused by high temperature is avoided, thereby preventing the gas in the external cavity from leaking out; at the same time, the cooling fluid is injected into the first flow channel 33 through the first liquid inlet hole 31, and then flows out through the first liquid outlet hole 32, so that the rotating shaft 1 and the driven rotor 24 are radiated and cooled, the temperature of the rotating shaft 1 and the driven rotor 24 is reduced, so that the magnetic coupling assembly 2 is kept in a suitable working range, and the magnetic coupling assembly 2 can operate normally.
[0040] In the current embodiment, the active rotor 23 and the driven rotor 24 are magnets, and the cooling jacket 3 is usually made of non-magnetic materials, such as stainless steel, titanium alloy, ceramic and engineering plastics, and its material can be selected according to the temperature of the application scenario.
[0041] In some embodiments, the cooling jacket 3 is cylindrical, allowing it to extend axially along the rotating shaft 1, and its internal first flow channel 33 also extends axially along the rotating shaft 1, thereby further improving heat exchange efficiency. The cooling jacket 3 also makes heat exchange more convenient for the rotating shaft 1 and the housing 21.
[0042] In some embodiments, the cooling sleeve 3 and the housing 21 may be connected by means of welding, screwing or snap-fitting, etc.
[0043] like Figure 1 and Figure 3 As shown, in the current embodiment, the sealing transmission mechanism further includes a support base 4. The support base 4 has a through cavity 41. One end of the support base 4 is sealed and connected to the second end of the cooling sleeve 3, and the other end of the support base 4 is sealed and connected to the external cavity. The rotating shaft 1 passes through the through cavity 41 to enter the external cavity, and is then connected to the external cavity through the support base 4, thereby sealing the rotating shaft 1 and the external cavity. To ensure sealing, a sealing element (not shown in the figure) surrounding the through cavity 41 is provided on the end face of the support base 4 facing the cooling sleeve 3, thereby sealing the two by compressing the sealing element. Specifically, a groove 44 is provided on the end face of the support base 4 facing the cooling sleeve 3, and the groove 44 surrounds the through cavity 41, with the sealing element embedded in the groove 44. Similarly, a sealing element can also be provided on the end of the support base 4 away from the cooling sleeve 3, thereby sealing and fixing it to the external cavity; details will not be elaborated further. For example, the sealing element can be a sealing ring.
[0044] Furthermore, the support base 4 is provided with a second liquid inlet and a second liquid outlet. The second liquid inlet and the second liquid outlet are connected through a second flow channel 42 provided in the support base 4, so that by injecting cooling fluid into the support base 4, radiative heat exchange is carried out with the rotating shaft 1, thereby performing double heat dissipation and cooling of the rotating shaft 1, further improving the heat exchange efficiency.
[0045] According to the formula:
[0046] Formula 1: Q 总 =Q1+Q2; Formula 2: Q1=C0×∈ 12 ×F1[(T1 / 100) 4 -(T2 / 100) 4 Formula 3: ∈ 12 =1 / (1 / ∈1+F1+F2(1-∈1-1)); Formula 4: Q2=h×A(T S -T f );
[0047] Among them, Q 总 Q1 is the total heat; Q2 is the heat transferred through radiation; Q3 is the heat transferred through convection; C O denoted as ρi, where ρ is the blackbody radiation coefficient; F1 is the surface area of the internal object; F2 is the surface area of the external object; h is the convective heat transfer coefficient; T1 is the surface temperature of the high-temperature object; T2 is the surface temperature of the low-temperature object; ∈1 is the blackbody radiation coefficient of the internal object; ∈2 is the blackbody radiation coefficient of the external object; Ti is the blackbody radiation coefficient of the external object; Ti is the surface area of the internal object; ∈2 is the surface area of the external object; Ti is the surface area of the external object; Ti is the surface area of the external object; Ti is the surface area of the internal object; ∈ S Surface temperature of an object; T f Fluid temperature;
[0048] Based on the above theories, such as Figure 3 As shown, in some embodiments, a first groove 43 is provided on the inner wall of the through cavity 41 corresponding to the second flow channel 42, thereby increasing the surface area of the inner wall of the through cavity 41, thus increasing the heat exchange capacity and further improving the heat exchange efficiency. In the current embodiment, the first groove 43 is arranged circumferentially around the inner wall of the through cavity 41, thereby maximizing the area of a single first groove 43 to ensure heat exchange efficiency; in addition, multiple first grooves 43 can be provided, and multiple first grooves 43 are arranged along the axial direction of the through cavity 41, thereby increasing the heat exchange efficiency by increasing the number of first grooves 43. It can be understood that in some embodiments, a second groove can also be provided on the inner wall of the cooling jacket 3 facing the rotating shaft 1, thereby increasing the surface area of the inner wall of the cooling jacket 3 and improving the heat exchange efficiency. The form of the second groove can be the same as that of the first groove 43, and will not be described again.
[0049] like Figure 1 As shown, in some embodiments, to prevent the rotating shaft 1 from shaking, bearings 5 are also provided at both ends of the cooling sleeve 3, so that the rotating shaft 1 passes through the bearings 5 to ensure the stability of the rotation of the rotating shaft 1. Exemplarily, the bearings 5 may be, but are not limited to, high-temperature thermally conductive ceramic bearings.
[0050] like Figure 1 and Figure 2 As shown, in some embodiments, a partition plate 22 is provided inside the mounting cavity 21 to divide the mounting cavity 21 into a second cavity 26 and the aforementioned first cavity 25; the active rotor 23 is located inside the second cavity 26. Figure 1 As shown, the active rotor 23 is connected to a synchronous pulley 6, and the driving component is connected to the active rotor 23 through the synchronous pulley 6. Specifically, a drive shaft is connected to the active rotor 23, and a bearing 5 is also provided in the second cavity 26. The drive shaft passes through the bearing 5, and the synchronous pulley 6 is connected to the drive shaft. Thus, the bearing 5 ensures the stability of the drive shaft rotation and further improves the stability of the rotating shaft 1.
[0051] Exemplarily, the isolation plate 22 can be installed on the inner wall of the accommodating cavity 21 in the form of welding, screwing or clamping, so as to isolate the first cavity 25 from the second cavity 26.
[0052] The application also provides an epitaxial device, which comprises a reaction cavity 7 (the external cavity described above) and the sealing transmission mechanism described above, and the rotating shaft 1 penetrates the reaction cavity 7 to connect the susceptor 8 for fixing the substrate in the reaction cavity 7. In one aspect, the heat exchange form of the cooling jacket 3 and the support seat 4 is adopted, so that the driven rotor 24 and the driving rotor 23 do not need to adopt special high-temperature-resistant materials, thereby reducing the cost; at the same time, the process gas leakage caused by the temperature being too high due to some unexpected factors can be avoided; in another aspect, when the transmission mode of the synchronous wheel 6 and the rotating shaft 1 being directly connected, the conventional driving member is used to drive the synchronous wheel 6 to rotate through the belt, and there is a certain friction and vibration; when the rotating shaft 1 rotates, the vibration can cause the susceptor 8 to shake, the longer the rotating shaft 1 is, the more obvious the shaking is, and the substrate is easy to be thrown out of the susceptor 8; and the transmission mode of the magnetic field transmission torque of the driving rotor 23 and the driven rotor 24 is adopted, so that the driving rotor 23 and the driven rotor 24 do not contact, and thus there is no wear, the noise and vibration are small, the possibility of the substrate being thrown out of the susceptor 8 due to the vibration is reduced; at the same time, the wear and maintenance of the mechanical parts are reduced, and the service life is prolonged.
[0053] Obviously, the above embodiments of the utility model are only examples for clearly explaining the utility model, and are not the limitation of the embodiments of the utility model. For ordinary skilled in the art, various obvious changes, re-adjustment and replacement can be carried out without departing from the protection scope of the utility model. Here, all the embodiments need not and cannot be exhausted. Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model claim.
Claims
1. A sealed transmission mechanism, characterized by, The sealed transmission mechanism comprises: a rotating shaft (1); a magnetic coupling assembly (2) comprising a housing (21) having a first cavity (25) in which a driven rotor (24) is arranged, and a driving rotor (23) arranged outside the first cavity (25) and capable of being connected to a driving member, the rotating shaft (1) being connected to the driven rotor (24) and the driving rotor (23) being capable of driving the driven rotor (24) to rotate; a cooling jacket (3) sealingly connected to the housing (21), a first end of the cooling jacket (3) being in communication with the first cavity (25), the rotating shaft (1) penetrating the cooling jacket (3), and a second end of the cooling jacket (3) being capable of being sealingly connected to an external cavity. The cooling jacket (3) is provided with a first liquid inlet hole (31) and a first liquid outlet hole (32), and the first liquid inlet hole (31) and the first liquid outlet hole (32) are in communication through a first flow channel (33) arranged in the cooling jacket (3).
2. The sealed transmission mechanism of claim 1, wherein, The sealed transmission mechanism further comprises a support seat (4) having a penetrating cavity (41), one end of the support seat (4) being sealingly connected to the second end of the cooling jacket (3), and the other end of the support seat (4) being sealingly connected to the external cavity, and the rotating shaft (1) penetrating the penetrating cavity (41) to penetrate into the external cavity.
3. The sealed transmission mechanism of claim 2, wherein, The support seat (4) is provided with a second liquid inlet hole and a second liquid outlet hole, and the second liquid inlet hole and the second liquid outlet hole are in communication through a second flow channel (42) arranged in the support seat (4).
4. The sealed transmission mechanism of claim 3, wherein, The inner cavity wall of the penetrating cavity (41) is provided with a first groove (43) corresponding to the second flow channel (42).
5. The sealed transmission mechanism of claim 4, wherein, The first grooves (43) are circumferentially arranged along the inner cavity wall of the penetrating cavity (41), and a plurality of the first grooves (43) are distributed along the axial direction of the penetrating cavity (41).
6. The sealed transmission mechanism of claim 1, wherein, The inner wall of the cooling jacket (3) facing the rotating shaft (1) is provided with a second groove.
7. The sealed transmission mechanism of claim 2, wherein, The end surface of the support seat (4) facing the cooling jacket (3) is provided with a sealing member surrounding the penetrating cavity (41).
8. The sealed transmission mechanism of claim 1, wherein, Both ends of the cooling jacket (3) are provided with bearings (5), and the rotating shaft (1) penetrates the bearings (5).
9. The sealed transmission mechanism of claim 1, wherein, The housing (21) is provided with a partition plate (22) to divide the internal space of the housing (21) into a second cavity (26) and the first cavity (25), and the driving rotor (23) is located in the second cavity (26).
10. Epitaxial apparatus comprising a reaction chamber (7), characterized in that, The sealed transmission mechanism further comprises a reaction cavity (7) in which a substrate (8) for fixing a substrate is arranged, and the rotating shaft (1) penetrates the reaction cavity (7).