Cooling assembly, magnetofluid sealing device and extension equipment
By attaching heat dissipation fins to the rotating shaft of the magnetic fluid sealing device and injecting cooling fluid, the temperature is reduced by utilizing radiation and convection heat transfer, thus solving the problem of the magnetic fluid sealing device's performance being affected at high temperatures and enabling the normal operation of the equipment.
Patent Information
- Application Number
- CN202423157042.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2025-12-09
- Estimated Expiration
- 2034-12-20
AI Technical Summary
Existing magnetohydrodynamic sealing devices suffer from performance degradation at high temperatures and are unable to effectively cool down, resulting in excessively high temperatures on the rotating shaft in CVD equipment.
A cooling component of a magnetohydrodynamic sealing device, including a cooling assembly, is designed. By attaching heat dissipation fins to a rotating shaft and injecting cooling fluid, the temperature is reduced by utilizing radiation and convection heat transfer.
This effectively reduces the overall temperature of the rotating shaft and the magnetohydrodynamic sealing device, ensuring normal equipment operation.
Smart Images
Figure CN223646679U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of CVD equipment technology, and in particular to a cooling component, a magnetohydrodynamic sealing device, and an epitaxial device. Background Technology
[0002] Chemical vapor phase epitaxy (CVD) can be divided into horizontal and vertical types. The epitaxial thickness and doping concentration uniformity of the epitaxial wafer are key parameters affecting the performance of silicon carbide devices. In horizontal epitaxial wafers, the further away from the gas inlet, the thinner the thickness. In vertical epitaxial wafers, the gas inlet is located in the center, so the epitaxial wafer is thicker in the center and thinner around the edges.
[0003] In existing technologies, rotating the epitaxial wafer via a base rotation can significantly reduce thickness and doping concentration inhomogeneities. However, during rotation, the rotating shaft needs to pass through a cavity to connect to the motor, and the cavity needs to maintain a seal and a certain degree of vacuum. Therefore, existing technologies typically use magnetohydrodynamic (MHD) sealing devices for dynamic sealing of the rotating shaft. In process engineering, the temperature inside the cavity can reach up to 1700℃, at which point the temperature conducted on the rotating shaft will also be extremely high. Ordinary MHD sealing devices are limited to operating temperatures of around 80℃-120℃, while those using special high-temperature carrier liquids and magnetic materials can withstand temperatures up to 300℃. However, at even higher temperatures (such as above 400℃), the performance of the MHD sealing device will be severely affected. Therefore, cooling measures for the MHD sealing device are urgently needed during use. Utility Model Content
[0004] The purpose of this invention is to provide a cooling component, a magnetohydrodynamic sealing device, and an extension device to solve the problem of cooling the magnetohydrodynamic sealing device.
[0005] To achieve this objective, the present invention adopts the following technical solution:
[0006] Cooling components, including:
[0007] A cooling plate having a first through cavity, the first through cavity comprising a large-diameter section and a small-diameter section connected in sequence, the cooling plate being provided with a first liquid inlet and a first liquid outlet, the first liquid inlet and the first liquid outlet being connected through a first flow channel provided in the cooling plate;
[0008] The heat dissipation fins include a sleeve portion and an annular fin portion connected to each other. The fin portion is located in the large diameter section, and the sleeve portion is located in the small diameter section. The heat dissipation fins are tightly sleeved on the rotating shaft of the magnetohydrodynamic sealing device through the sleeve portion.
[0009] In some embodiments, the size of the heat dissipation fins is smaller than the size of the first through cavity, so that there is a gap between the heat dissipation fins and the cavity wall of the first through cavity.
[0010] In some embodiments, the axial height of the sleeve portion is greater than the axial height of the large diameter section, and the cooling assembly further includes a locking sleeve that can be locked onto the rotating shaft. The locking sleeve is located below the sleeve portion to support the sleeve portion.
[0011] In some embodiments, the upper end face of the fin portion and / or the lower end face of the fin portion have a first groove distributed circumferentially.
[0012] In some embodiments, the first through cavity has a second groove in the cavity wall of the small diameter section.
[0013] A magnetohydrodynamic sealing device is also provided, comprising:
[0014] A magnetofluid assembly, comprising a magnetofluid cavity and a rotating shaft, wherein the magnetofluid cavity is used to contain magnetofluid, and the rotating shaft is connected to the magnetofluid cavity;
[0015] As described above, the cooling assembly is capable of being sealed to the magnetohydrodynamic cavity and the external cavity, the rotating shaft is provided with heat dissipation fins and enters the external cavity, and the heat dissipation fins rotate with the rotating shaft.
[0016] In some embodiments, the magnetohydrodynamic sealing device further includes a fixing seat located on the side of the cooling assembly away from the magnetohydrodynamic assembly. The fixing seat is sealed to the cooling plate. The fixing seat has a second through cavity through which the rotating shaft passes. The end of the fixing seat away from the cooling assembly can be sealed and fixed to the external cavity.
[0017] In some embodiments, the mounting base is provided with a second liquid inlet and a second liquid outlet, and the second liquid inlet and the second liquid outlet are connected through a second flow channel provided in the mounting base.
[0018] In some embodiments, the inner wall of the second through cavity is provided with a third groove corresponding to the second flow channel.
[0019] In some embodiments, multiple cooling discs and heat dissipation fins are stacked along the axial direction of the rotation axis.
[0020] In some embodiments, the upper end face of the cooling plate is provided with a seal surrounding the first through cavity.
[0021] In some embodiments, the magnetohydrodynamic sealing device is provided with a ring sleeve, which is clamped between the magnetohydrodynamic cavity and the cooling plate. An air intake channel is provided on the ring sleeve, one end of which is connected to an external air intake device, and the other end is connected to the inner ring of the ring sleeve.
[0022] An epitaxial device is also provided, comprising a reaction chamber and a magnetohydrodynamic sealing device as described above, wherein the rotating shaft passes through the reaction chamber to connect to a base located within the reaction chamber for fixing a substrate.
[0023] The beneficial effects of this utility model are:
[0024] In use, the heat dissipation fins are fixedly fitted onto the rotating shaft of the magnetic fluid sealing device. Cooling fluid is injected into the first inlet of the cooling plate. When the rotating shaft rotates, the heat on the rotating shaft is conducted to the heat dissipation fins, and then radiative heat exchange occurs with the fluid in the first flow channel, thereby reducing the temperature of the rotating shaft and the entire magnetic fluid sealing device. Attached Figure Description
[0025] Figure 1 This is an exploded view of the cooling component in this utility model;
[0026] Figure 2 This is a cross-sectional view of the cooling plate in this utility model;
[0027] Figure 3 This is a schematic diagram of the magnetohydrodynamic sealing device in this utility model;
[0028] Figure 4 This is a cross-sectional view of the magnetohydrodynamic sealing device in this utility model;
[0029] Figure 5 This is a cross-sectional view of the fixing base in this utility model;
[0030] Figure 6 This is a schematic diagram of the ring sleeve in this utility model.
[0031] In the picture:
[0032] 10. Cooling components;
[0033] 11. Cooling plate; 111. First through cavity; 112. First liquid inlet; 113. First liquid outlet; 114. First flow channel; 115. Second groove; 116. First slot;
[0034] 12. Heat dissipation fins; 121. First groove; 122. Sleeve portion; 123. Fin portion;
[0035] 13. Locking sleeve;
[0036] 20. Magnetorheological fluid assembly; 21. Magnetorheological fluid cavity; 22. Rotating shaft;
[0037] 30. Fixing base; 31. Second through cavity; 32. Second flow channel; 33. Third groove; 34. Second slot;
[0038] 40. Ring; 41. Intake passage;
[0039] 50. Sealing components;
[0040] 60. Reaction chamber;
[0041] 70. Base. Detailed Implementation
[0042] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0043] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0044] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0045] In the description of this embodiment, the terms "upper," "lower," "left," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0046] like Figures 1 to 6As shown, this application provides a cooling assembly, which includes a cooling plate 11 and heat dissipation fins 12. The cooling plate 11 has a first through cavity 111, and a first liquid inlet 112 and a first liquid outlet 113 are provided on the cooling plate 11. The first liquid inlet 112 and the first liquid outlet 113 are connected by a first flow channel 114 provided in the cooling plate 11. The first through cavity 111 includes a large diameter section and a small diameter section arranged in sequence. The heat dissipation fins 12 include a sleeve portion 122 and an annular fin portion 123 connected to each other. The fin portion 123 is placed in the large diameter section, and the sleeve portion 122 is placed in the small diameter section. The heat dissipation fins 12 are tightly sleeved on the rotating shaft 22 through the sleeve portion 122, so that when the rotating shaft 22 rotates, it drives the heat dissipation fins 12 to rotate.
[0047] With the aforementioned cooling assembly 10, the heat dissipation fins 12 are fixedly sleeved on the rotating shaft 22 of the magnetic fluid sealing device during use. Cooling fluid is injected into the first liquid inlet 112 of the cooling plate 11. When the rotating shaft 22 rotates, the heat on the rotating shaft 22 is conducted to the heat dissipation fins 12, and then radiative heat exchange occurs with the cooling fluid in the first flow channel 114, thereby reducing the temperature of the rotating shaft 22 and the entire magnetic fluid sealing device.
[0048] like Figure 1 and Figure 4 As shown, to prevent the heat dissipation fins 12 from contacting the cooling plate 11 due to gravity or other reasons and to reduce friction, in some embodiments, the size of the heat dissipation fins 12 is smaller than the size of the first through cavity 111, so that there is a gap between the heat dissipation fins 12 and the cavity wall of the first through cavity 111. In addition, to prevent the heat dissipation fins 12 from contacting the cooling plate 11 due to gravity, the axial height of the sleeve portion 122 is greater than the axial height of the large diameter section, and the cooling assembly 10 includes a locking sleeve 13, which is locked on the rotating shaft 22 and located below the sleeve portion 122, thereby supporting the sleeve portion 122, that is, lifting the heat dissipation fins 12 and reducing the contact between the heat dissipation fins 12 and the inner wall of the first through cavity 111.
[0049] based on,
[0050] Formula 1: Q 总 =Q1+Q2; Formula 2: Q1=C0×∈ 12 ×F1[(T1 / 100) 4 -(T2 / 100) 4 Formula 3: ∈ 12 =1 / (1 / ∈1+F1 / F2(1 / ∈1-1)); Formula 4: Q2=h×A(T s -T f );
[0051] Among them, Q 总Q1 is the total heat; Q2 is the heat transferred through radiation; Q3 is the heat transferred through convection; C O denoted as ρi, where ρ is the blackbody radiation coefficient; F1 is the surface area of the internal object; F2 is the surface area of the external object; h is the convective heat transfer coefficient; T1 is the surface temperature of the high-temperature object; T2 is the surface temperature of the low-temperature object; ∈1 is the blackbody radiation coefficient of the internal object; ∈2 is the blackbody radiation coefficient of the external object; Ti is the blackbody radiation coefficient of the external object; Ti is the surface area of the internal object; ∈2 is the surface area of the external object; Ti is the surface area of the external object; Ti is the surface area of the external object; Ti is the surface area of the internal object; ∈ S Surface temperature of an object; T f Fluid temperature;
[0052] like Figure 1 As shown, since the heat dissipation fins 12 are completely located within the cooling plate 11, according to the above formula, the heat dissipation can be increased by increasing the surface area of the heat dissipation fins 12. Therefore, in some embodiments, to improve heat dissipation efficiency, the upper end face and / or lower end face of the fin portion 123 have circumferentially distributed first grooves 121. The arrangement of the first grooves 121 increases the surface area of the fin portion 123, thereby increasing the heat dissipation. This theory is prior art and will not be elaborated further. In the current embodiment, the grooves on the upper end face of the fin portion 123 are misaligned with the grooves on the lower end face of the fin portion 123 to maximize the surface area. Similarly, a second groove 115 is provided on the cavity wall of the first through cavity 111 in the small diameter section to increase the area of the first through cavity 111, thereby increasing the heat dissipation. In the current embodiment, the second grooves 115 are arranged circumferentially along the small diameter section, and multiple second grooves 115 are distributed axially along the small diameter section to maximize the area.
[0053] like Figures 3 to 6 As shown, this application also provides a magnetofluid sealing device, which includes a magnetofluid assembly 20 and the aforementioned cooling assembly 10. The magnetofluid assembly 20 includes a magnetofluid cavity 21 and a rotating shaft 22, with the rotating shaft 22 connected to the magnetofluid cavity 21. The sleeve portion 122 of the heat dissipation fins 12 is tightly fitted onto the rotating shaft 22, allowing the cooling assembly 10 to be sealed between the magnetofluid cavity 21 and the external cavity. The rotating shaft 22 passes through the heat dissipation fins 12 and into the external cavity, thereby dissipating heat from the rotating shaft 22 and the magnetofluid within the magnetofluid cavity 21 by injecting cooling fluid into the cooling plate 11, enabling it to operate normally.
[0054] In some embodiments, the magnetohydrodynamic sealing device further includes a fixing seat 30, which is located on the side of the cooling assembly 10 away from the magnetohydrodynamic assembly 20. The fixing seat 30 has a second through cavity 31 and is sealed to the cooling plate 11. The end of the fixing seat 30 away from the cooling assembly 10 can be sealed and fixed to an external cavity, and the rotating shaft 22 passes through the second through cavity 31. This allows the cooling plate 11 in the cooling assembly 10 to be fixed by the fixing seat 30, and also allows the fixing seat 30 to be connected to the external cavity to seal the rotating shaft 22.
[0055] In the current embodiment, the locking sleeve 13 is disposed within the second through cavity 31.
[0056] like Figure 3 and Figure 4 As shown, in some embodiments, to increase heat dissipation efficiency, multiple cooling discs 11 are stacked along the axial direction of the rotation axis 22. It is understood that each cooling disc 11 corresponds to a heat dissipation fin 12. When multiple cooling discs 11 are stacked, the heat dissipation fins 12 are also stacked sequentially. The locking sleeve 13 in the cooling assembly 10 is placed inside the second through cavity 31 to support the stacked heat dissipation fins 12. A gap is also formed between the locking sleeve 13 and the cavity wall of the second through cavity 31, allowing fluid to flow through the gap. In the current embodiment, the cooling disc 11 is provided with multiple connection holes for connection; the connection holes can be, but are not limited to, threaded holes and countersunk holes.
[0057] like Figure 1 and Figure 4 As shown, to enhance sealing, in some embodiments, the upper end face of the cooling plate 11 is provided with a sealing member 50 surrounding the first through cavity 111, thereby sealing the gap between adjacent cooling plates 11 and the gap between the cooling plate 11 and the magnetohydrodynamic cavity 21. Specifically, the upper end face of the cooling plate 11 is provided with a first groove 116 surrounding the first through cavity 111, and the sealing member 50 is embedded in the first groove 116. There is a gap between the outer periphery of the heat dissipation fins 12 and the cavity wall of the first through cavity 111, so that fluid can flow between two axially adjacent cooling plates 11 and heat dissipation fins 12 through this gap.
[0058] like Figure 5 As shown, in some embodiments, the mounting base 30 is provided with a second liquid inlet and a second liquid outlet. The second liquid inlet and the second liquid outlet are connected through a second flow channel 32 provided within the mounting base 30, thereby allowing cooling fluid to be injected into the mounting base 30. This further facilitates heat dissipation for the rotating shaft 22 through the mounting base 30, improving heat dissipation efficiency. Furthermore, a third groove 33 is provided on the inner wall of the second through cavity 31 corresponding to the second flow channel 32, thereby increasing the surface area for heat diffusion and further improving heat dissipation efficiency. In addition, to ensure a seal between the mounting base 30 and the cooling plate 11, a second groove 34 surrounding the second through cavity 31 is provided on the upper end face of the mounting base 30. A sealing element 50 is also provided within the second groove 34 to seal the gap between the two.
[0059] like Figure 3 and Figure 4As shown, in some embodiments, the magnetohydrodynamic sealing device is provided with a ring 40, which is clamped between the magnetohydrodynamic cavity 21 and the cooling plate 11. The inner ring of the ring 40 is connected to the first through cavity 111 and the second through cavity 31. An air inlet channel 41 is provided on the ring 40. One end of the air inlet channel 41 is connected to an external air inlet device, and the other end is connected to the inner ring of the ring 40. Cooling gas is then injected into the cooling plate 11 through the ring 40 to cool the rotating shaft 22, the cooling plate 11, and the heat dissipation fins 12, thereby further improving the heat dissipation efficiency.
[0060] This application also provides an epitaxial device, which includes a reaction chamber 60 and the aforementioned magnetohydrodynamic sealing device. The end of a mounting base 30 away from the cooling assembly 10 is sealed and fixed to the reaction chamber 60 (the aforementioned external cavity). In the current embodiment, a sealing element 50 can also be provided on the mounting base 30 to seal the space between the mounting base 30 and the reaction chamber 60; in some embodiments, the mounting base 30 can be welded to the reaction chamber 60 for sealing. A rotating shaft 22 passes through the reaction chamber 60 to connect to a base 70 located within the reaction chamber 60 for fixing a substrate, thereby driving the base 70 to rotate. The cooling assembly 10 cools the rotating shaft 22 and the magnetohydrodynamic fluid within the magnetohydrodynamic cavity 21, ensuring normal operation.
[0061] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A cooling assembly, characterized in that, include: Cooling plate (11), the cooling plate (11) has a first through cavity (111), the first through cavity (111) includes a large diameter section and a small diameter section connected in sequence, the cooling plate (11) is provided with a first liquid inlet (112) and a first liquid outlet (113), the first liquid inlet (112) and the first liquid outlet (113) are connected by a first flow channel (114) provided in the cooling plate (11); The heat dissipation fins (12) include a sleeve portion (122) and an annular fin portion (123) connected to each other. The fin portion (123) is placed in the large diameter section, and the sleeve portion (122) is placed in the small diameter section. The heat dissipation fins (12) are tightly sleeved on the rotating shaft (22) of the magnetic fluid sealing device through the sleeve portion (122).
2. The cooling assembly according to claim 1, characterized in that, The size of the heat dissipation fins (12) is smaller than the size of the first through cavity (111), so that there is a gap between the heat dissipation fins (12) and the cavity wall of the first through cavity (111).
3. The cooling assembly according to claim 2, characterized in that, The axial height of the sleeve portion (122) is greater than the axial height of the large diameter section. The cooling assembly (10) also includes a locking sleeve (13), which can be locked onto the rotating shaft (22). The locking sleeve (13) is located below the sleeve portion (122) to support the sleeve portion (122).
4. The cooling assembly according to claim 1, characterized in that, The upper end face of the fin portion (123) and / or the lower end face of the fin portion (123) have a first groove (121) distributed circumferentially.
5. The cooling assembly according to claim 4, characterized in that, The first through cavity (111) has a second groove (115) on the cavity wall of the small diameter section.
6. A magnetohydrodynamic sealing device, characterized in that, include: A magnetofluid assembly (20) includes a magnetofluid cavity (21) and a rotating shaft (22). The magnetofluid cavity (21) is used to hold magnetofluid, and the rotating shaft (22) is connected to the magnetofluid cavity (21). The cooling assembly (10) according to any one of claims 1-5 is capable of sealingly connecting the magnetorheological cavity (21) and the external cavity, wherein the rotating shaft (22) is provided with heat dissipation fins (12) and enters the external cavity, and the heat dissipation fins (12) rotate with the rotating shaft (22).
7. The magnetohydrodynamic sealing device according to claim 6, characterized in that, The magnetohydrodynamic sealing device further includes a fixing seat (30), which is located on the side of the cooling assembly (10) away from the magnetohydrodynamic assembly (20). The fixing seat (30) is sealed to the cooling plate (11). The fixing seat (30) has a second through cavity (31), and the rotating shaft (22) passes through the second through cavity (31). The end of the fixing seat (30) away from the cooling assembly (10) can be sealed and fixed to the external cavity.
8. The magnetohydrodynamic sealing device according to claim 7, characterized in that, The fixed base (30) is provided with a second liquid inlet and a second liquid outlet, and the second liquid inlet and the second liquid outlet are connected through a second flow channel (32) provided in the fixed base (30).
9. The magnetohydrodynamic sealing device according to claim 8, characterized in that, The inner wall of the second through cavity (31) is provided with a third groove (33) corresponding to the second flow channel (32).
10. The magnetohydrodynamic sealing device according to claim 6, characterized in that, Multiple cooling plates (11) and heat dissipation fins (12) are stacked along the axial direction of the rotation axis (22).
11. The magnetohydrodynamic sealing device according to claim 6, characterized in that, The upper end face of the cooling plate (11) is provided with a sealing element (50) surrounding the first through cavity (111).
12. The magnetohydrodynamic sealing device according to claim 6, characterized in that, The magnetic fluid sealing device is provided with a ring sleeve (40), which is sandwiched between the magnetic fluid cavity (21) and the cooling plate (11). An air inlet channel (41) is provided on the ring sleeve (40), one end of which is connected to an external air inlet device, and the other end is connected to the inner ring of the ring sleeve (40).
13. An epitaxial apparatus, comprising a reaction chamber (60), characterized in that, It also includes the magnetohydrodynamic sealing device as claimed in any one of claims 6-12, wherein the rotating shaft (22) passes through the reaction chamber (60) to connect to a base (70) located within the reaction chamber (60) for fixing a substrate.