Motion platform

Abstract

The utility model provides a motion platform, which relates to the technical field of semiconductor manufacturing equipment and is designed for solving the problem of low lifting precision of the existing motion platform. The motion platform comprises a base, a lifting driving piece, a carrying table, a plurality of sets of guide mechanisms and a plurality of sets of gravity balance mechanisms, the lifting driving piece is installed on the base, and the carrying table is installed at the lifting output end of the lifting driving piece; the guide mechanism comprises a crossed roller guide rail extending in the lifting direction and a sliding block used in cooperation with the crossed roller guide rail, the crossed roller guide rail is arranged on the base, and the sliding block is arranged on the carrying table; the gravity balance mechanism is installed on the base, the carrying table is connected to the gravity balance mechanism, and the gravity balance mechanism is used for supporting the carrying table telescopically in the lifting direction; the multiple sets of guide mechanisms and the multiple sets of gravity balance mechanisms are arranged at intervals in the circumferential direction of the lifting driving piece. The lifting device is high in lifting precision.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and more specifically, to a motion platform. Background Technology

[0002] In fields such as semiconductor manufacturing, optical inspection, and high-precision machining, motion platforms are often required to have high-precision lifting capabilities. However, existing motion platforms used to achieve lifting functions have relatively low lifting accuracy and cannot meet the requirements for micron-level or even nanometer-level precision. Utility Model Content

[0003] The purpose of this utility model is to provide a motion platform to solve the technical problem of low lifting accuracy of existing motion platforms.

[0004] The motion platform provided by this utility model includes a base, a lifting drive component, a platform, multiple sets of guide mechanisms, and multiple sets of gravity balancing mechanisms. The lifting drive component is mounted on the base, and the platform is mounted on the lifting output end of the lifting drive component. The guide mechanism includes a cross roller guide rail extending along the lifting direction and a slider that cooperates with the cross roller guide rail. One of the cross roller guide rail and the slider is fixedly disposed on the base, and the other of the cross roller guide rail and the slider is fixedly disposed on the platform. The gravity balancing mechanism is mounted on the base, and the platform is connected to the gravity balancing mechanism. The gravity balancing mechanism is used to telescopically support the platform along the lifting direction. The multiple sets of guide mechanisms and the multiple sets of gravity balancing mechanisms are arranged at circumferential intervals along the lifting drive component.

[0005] Furthermore, the base has a receiving groove, which includes a bottom wall and four side walls surrounding the bottom wall. The lifting drive is installed on the bottom wall. The guide mechanism is housed in the receiving groove, and four sets of the guide mechanism are provided, with the four sets of the guide mechanism respectively located on the four side walls.

[0006] Furthermore, the cross roller guide is fixedly disposed in the middle part of the side wall, and the slider is fixedly disposed on the platform.

[0007] Furthermore, the slider is fixedly disposed on the lower surface of the platform, and the slider is detachably and fixedly connected to the platform.

[0008] Furthermore, the motion platform also includes a displacement sensor disposed in the receiving groove, the displacement sensor being used to detect the height position of the platform.

[0009] Furthermore, the gravity balancing mechanism is provided in four sets, and the four sets of gravity balancing mechanisms are respectively located at the four corner points of the receiving groove.

[0010] Furthermore, the base is made of aluminum alloy.

[0011] Furthermore, the gravity balancing mechanism includes a magnetic spring.

[0012] Furthermore, the lifting drive component includes a linear motor, the stator of which is fixedly connected to the base, and the mover of which is fixedly connected to the platform.

[0013] Furthermore, the motion platform also includes a base plate and a rotary drive component, the rotary drive component is mounted on the base plate, the base is mounted on the rotary output end of the rotary drive component, and the rotary drive component is configured to drive the base to rotate about a vertical axis.

[0014] The beneficial effects of this new motion platform are:

[0015] By setting up a motion platform mainly composed of a base, lifting drive, platform, multiple sets of guide mechanisms and multiple sets of gravity balance mechanisms, when the lifting drive drives the platform to rise and fall, the sliders of each set of guide mechanisms slide and cooperate with the cross roller guide rails to guide the platform's rising and falling process; at the same time, the gravity balance mechanism moves in extension and retraction following the platform's rising and falling, so as to always support the platform.

[0016] In the aforementioned motion platform, the rolling contact between the crossed roller guide and the slider creates line contact, enabling the guiding mechanism to withstand forces from multiple directions, thus effectively ensuring the lifting accuracy of the platform. Furthermore, the gravity balancing mechanism allows it to bear most of the platform's weight. This increases the platform's load capacity and reduces the load directly acting on the guiding mechanism, minimizing deformation caused by excessive force and reducing its impact. This further ensures the guiding accuracy of the guiding mechanism, resulting in high lifting precision for the motion platform. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the motion platform after the platform is hidden, as provided in an embodiment of the present utility model.

[0019] Figure 2A schematic diagram of the motion platform provided in an embodiment of this utility model;

[0020] Explanation of reference numerals in the attached figures:

[0021] 100-Base; 200-Lifting drive component; 300-Platform; 400-Guide mechanism; 500-Gravity balance mechanism; 600-Displacement sensor; 700-Base plate; 800-Rotation drive component;

[0022] 110 - Receiving groove; 111 - Bottom wall; 112 - Side wall;

[0023] 410 - Cross roller guide; 420 - Slider. Detailed Implementation

[0024] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it.

[0025] Figure 1 This is a schematic diagram of the structure of the motion platform after the platform 300 is hidden, as provided in this embodiment. Figure 2 This is a schematic diagram of the motion platform provided in this embodiment. Figure 1 and Figure 2 As shown, this embodiment provides a motion platform, including a base 100, a lifting drive 200, a platform 300, multiple sets of guide mechanisms 400, and multiple sets of gravity balancing mechanisms 500. The lifting drive 200 is mounted on the base 100, and the platform 300 is mounted on the lifting output end of the lifting drive 200. The guide mechanism 400 includes a cross roller guide rail 410 extending along the lifting direction and a slider 420 cooperating with the cross roller guide rail 410. The cross roller guide rail 410 is fixedly disposed on the base 100, and the slider 420 is fixedly disposed on the platform 300. The gravity balancing mechanism 500 is mounted on the base 100, and the platform 300 is connected to the gravity balancing mechanism 500. The gravity balancing mechanism 500 is used to telescopically support the platform 300 along the lifting direction. The multiple sets of guide mechanisms 400 and the multiple sets of gravity balancing mechanisms 500 are arranged at intervals along the circumference of the lifting drive 200.

[0026] By setting up a motion platform mainly composed of a base 100, a lifting drive component 200, a platform 300, multiple sets of guide mechanisms 400, and multiple sets of gravity balancing mechanisms 500, when the lifting drive component 200 drives the platform 300 to rise and fall, the sliders 420 of each set of guide mechanisms 400 slide in cooperation with the cross roller guide rails 410 to guide the lifting and falling process of the platform 300; at the same time, the gravity balancing mechanism 500 moves in extension and retraction following the lifting and falling of the platform 300, so as to always support the platform 300.

[0027] In the aforementioned motion platform, the rolling contact between the crossed roller guide 410 and the slider 420 forms a line contact, enabling the guide mechanism 400 to withstand forces from multiple directions, thereby effectively ensuring the lifting accuracy of the platform 300. Furthermore, the gravity balancing mechanism 500 allows most of the weight of the platform 300 to be borne by it. This increases the load capacity of the platform 300 and reduces the load directly acting on the guide mechanism 400, minimizing deformation caused by excessive force on the guide mechanism 400 and reducing its impact. This further ensures the guiding accuracy of the guide mechanism 400, resulting in high lifting accuracy of the motion platform.

[0028] In addition, this configuration, which uses the slider 420 to cooperate with the cross roller guide 410 to ensure the lifting accuracy of the platform 300, eliminates the need to open a sliding groove on the platform 300 for cooperation with the cross roller guide 410, thereby reducing the accuracy requirements of the platform 300 and thus reducing the manufacturing cost of the platform 300.

[0029] It should be noted that in other embodiments, the cross roller guide 410 can be fixedly mounted on the platform 300 and the slider 420 can be fixedly mounted on the base 100. This can also achieve high-precision guidance of the lifting and lowering movement of the platform 300 by utilizing the cooperation of the cross roller guide 410 and the slider 420.

[0030] Please continue to refer to Figure 1 In this embodiment, the base 100 is provided with a receiving groove 110, which includes a bottom wall 111 and four side walls 112 arranged around the bottom wall 111. The lifting drive 200 is installed on the bottom wall 111. The guide mechanism 400 is accommodated in the receiving groove 110, and four sets of guide mechanisms 400 are provided. The four sets of guide mechanisms 400 are respectively arranged on the four side walls 112.

[0031] The aforementioned receiving slot 110 enables the accommodating installation of the lifting drive component 200 and the guide mechanism 400, effectively utilizing the height space of the base 100, thereby facilitating the compact structural design of the motion platform in this embodiment.

[0032] By providing guide mechanisms 400 on each side wall 112 of the receiving groove 110, the platform 300 is guided by the guide mechanisms 400 on all sides during the lifting and lowering process. This not only ensures the smooth lifting and lowering of the platform 300 and avoids jamming during the lifting and lowering process, but also further improves the lifting and lowering accuracy of the platform 300.

[0033] Please continue to refer to Figure 1In this embodiment, the cross roller guide 410 is fixedly installed in the middle part of the side wall 112.

[0034] By setting the cross roller guide 410 in the above position, on the one hand, the force balance of the side wall 112 can be ensured, thereby ensuring the overall force balance of the base 100. On the other hand, it also allows sufficient space to be reserved on both sides of the cross roller guide 410, which is convenient for installation and debugging.

[0035] Please continue to refer to Figure 1 and Figure 2 In this embodiment, the slider 420 is fixedly disposed on the lower surface of the platform 300, and the slider 420 and the platform 300 are detachably and fixedly connected.

[0036] By fixing the slider 420 to the lower surface of the platform 300, the slider 420 can not only support the platform 300 and prevent it from swaying during lifting, but also prevent the slider 420 from restricting the lateral dimension of the platform 300, thereby increasing the bearing area of ​​the platform 300.

[0037] In addition, by setting the slider 420 and the stage 300 to be detachably fixed, it is also convenient to replace the slider 420 in a timely manner after wear occurs.

[0038] Specifically, in this embodiment, the top of the slider 420 is provided with a connecting screw hole, and the connecting screw can pass through the platform 300 from above and be screwed into the connecting screw hole to realize the detachable connection between the platform 300 and the slider 420.

[0039] Please continue to refer to Figure 1 In this embodiment, the motion platform may also include a displacement sensor 600. Specifically, the displacement sensor 600 is disposed in the receiving groove 110 and is used to detect the height position of the platform 300.

[0040] The displacement sensor 600 enables real-time detection of the height of the platform 300, thereby facilitating precise control of the lifting and lowering motion of the platform 300.

[0041] Specifically, the displacement sensor 600 can be electrically connected to the control device of the motion platform, so that the displacement sensor 600 can output the detected displacement signal to the control device, and the control device can use the feedback control of the lifting drive 200 to realize closed-loop control, so as to ensure that each lifting movement is accurate.

[0042] In this embodiment, the displacement sensor 600 may include a grating ruler and a reading head. The reading head may be fixedly mounted on the base 100, and the grating ruler may be fixedly mounted on the slider 420 of a set of guide mechanisms 400. By utilizing the cooperation between the reading head and the grating ruler during the lifting and lowering process of the platform 300, the lifting and lowering height of the platform 300 can be detected.

[0043] It should be noted that how the displacement sensor 600 outputs the detected displacement signal to the control device so as to use the control device to control the lifting drive 200 is something that those skilled in the art can obtain based on the prior art, and it is not the focus of this application, so it will not be described in detail here.

[0044] Please continue to refer to Figure 1 In this embodiment, four sets of gravity balancing mechanisms 500 are provided, and the four sets of gravity balancing mechanisms 500 are respectively located at the four corner points of the receiving groove 110.

[0045] By setting gravity balancing mechanisms 500 at the four corners of the receiving groove 110, four-point support can be achieved for the platform 300, effectively avoiding uneven force on each group of guide mechanisms 400 due to the uneven load on the platform 300, thereby further improving the lifting accuracy of the platform 300.

[0046] In this embodiment, the gravity balancing mechanism 500 includes a magnetic spring.

[0047] This method of using magnetic springs as a gravity balancing mechanism 500 not only has high repeatability but also fast response.

[0048] In this embodiment, the base 100 is made of aluminum alloy.

[0049] By making the base 100 an aluminum alloy, the hardness of the base 100 can be effectively increased, ensuring that the base 100 has sufficient rigidity and reducing the deformation of the base 100.

[0050] Please continue to refer to Figure 1 In this embodiment, the lifting drive 200 may include a linear motor. Specifically, the stator of the linear motor is fixedly connected to the base 100, and the mover of the linear motor is fixedly connected to the platform 300.

[0051] This method, which uses a linear motor as the lifting drive component 200, allows the platform 300 to be directly driven to move up and down via electromagnetic force. It not only has a fast response speed but also provides smooth movement.

[0052] Please continue to refer to Figure 1 and Figure 2In this embodiment, the motion platform may further include a base plate 700 and a rotary drive 800. Specifically, the rotary drive 800 is mounted on the base plate 700, and the base 100 is mounted on the rotary output end of the rotary drive 800. The rotary drive 800 is configured to drive the base 100 to rotate around a vertical axis.

[0053] When it is necessary to rotate the stage 300, the rotary drive 800 is activated, driving the base 100 to rotate. During the rotation of the base 100, the stage 300 will rotate synchronously, thereby realizing the rotation of the stage 300 and the workpiece it carries.

[0054] When the motion platform is in use, the workpiece is clamped and fixed on the platform 300. The base 100 can be rotated by the rotation drive 800, thereby causing the platform 300 set on the base 100 to rotate. At the same time, the platform 300 can be raised and lowered by the lifting drive 200, so that the workpiece located on the platform 300 can have both rotational displacement and lifting displacement at the same time.

[0055] In this embodiment, the rotary drive 800 can be an arc-shaped motor, wherein the stator of the arc-shaped motor is fixedly connected to the base plate 700, and the mover of the arc-shaped motor is fixedly connected to the base 100.

[0056] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

[0057] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0058] In the above embodiments, descriptions of directions such as "up", "down", and "side" are based on the accompanying drawings.

[0059] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A motion platform, characterized in that, The system includes a base (100), a lifting drive (200), a platform (300), multiple guide mechanisms (400), and multiple gravity balancing mechanisms (500). The lifting drive (200) is mounted on the base (100), and the platform (300) is mounted on the lifting output end of the lifting drive (200). The guide mechanism (400) includes a cross roller guide (410) extending along the lifting direction and a slider (420) cooperating with the cross roller guide (410). Of the cross roller guide (410) and the slider (420), the cross roller guide (410) and the slider (420) are... One of the components is fixedly mounted on the base (100), and the other of the cross roller guide (410) and the slider (420) is fixedly mounted on the platform (300); the gravity balancing mechanism (500) is mounted on the base (100), and the platform (300) is connected to the gravity balancing mechanism (500), which is used to telescopically support the platform (300) along the lifting direction; multiple sets of the guide mechanism (400) and multiple sets of the gravity balancing mechanism (500) are arranged at intervals along the circumference of the lifting drive component (200).

2. The motion platform according to claim 1, characterized in that, The base (100) has a receiving groove (110), which includes a bottom wall (111) and four side walls (112) surrounding the bottom wall (111). The lifting drive (200) is installed on the bottom wall (111). The guide mechanism (400) is accommodated in the receiving groove (110), and four sets of guide mechanisms (400) are provided. The four sets of guide mechanisms (400) are respectively provided on the four side walls (112).

3. The motion platform according to claim 2, characterized in that, The cross roller guide (410) is fixedly disposed in the middle part of the side wall (112), and the slider (420) is fixedly disposed on the platform (300).

4. The motion platform according to claim 3, characterized in that, The slider (420) is fixedly disposed on the lower surface of the platform (300), and the slider (420) and the platform (300) are detachably and fixedly connected.

5. The motion platform according to claim 3, characterized in that, The motion platform also includes a displacement sensor (600), which is disposed in the receiving groove (110) and is used to detect the height position of the platform (300).

6. The motion platform according to claim 2, characterized in that, The gravity balancing mechanism (500) is provided in four sets, and the four sets of gravity balancing mechanisms (500) are respectively located at the four corner points of the receiving groove (110).

7. The motion platform according to claim 1, characterized in that, The base (100) is made of aluminum alloy.

8. The motion platform according to claim 1, characterized in that, The gravity balancing mechanism (500) includes a magnetic spring.

9. The motion platform according to claim 1, characterized in that, The lifting drive unit (200) includes a linear motor, the stator of which is fixedly connected to the base (100), and the mover of which is fixedly connected to the platform (300).

10. The motion platform according to claim 1, characterized in that, The motion platform also includes a base plate (700) and a rotary drive (800), the rotary drive (800) being mounted on the base plate (700), and the base (100) being mounted on the rotary output end of the rotary drive (800). The rotary drive (800) is configured to drive the base (100) to rotate about a vertical axis.

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