Online liquid heating device

Abstract

The utility model relates to the technical field of liquid, and discloses an on-line liquid heating device, which comprises an inflow assembly, a heating assembly and a heating assembly, the outflow assembly is used for outputting the heated liquid; the N connecting plates are provided with M liquid through holes; the heating assembly further comprises (N + 1) sets of infrared heating pipes used for heating liquid to be heated, and the number of the infrared heating pipes in each set is M; the (N + 1) groups of infrared heating pipes are connected in series through the connecting plate, two sides of the connecting plate are respectively connected with one group of infrared heating pipes through liquid via holes, the infrared heating pipe positioned at the inflow end is communicated with the inflow assembly, and the infrared heating pipe positioned at the outflow end is communicated with the outflow assembly. According to the design, the number of the infrared heating pipes arranged on the connecting plates can be increased, the overall number of the infrared heating pipes can be increased by increasing the number of the infrared heating pipes arranged on the connecting plates and connecting the multiple connecting plates, then the heating efficiency of the whole device is improved, and specified heating can be achieved within specified time.

Description

TECHNICAL FIELD

[0001] The utility model relates to liquid heating field especially relates to an online liquid heating device. BACKGROUND

[0002] In modern industrial production process, especially in the field of semiconductor manufacturing, liquid online heater as a kind of key equipment is widely used in the heating treatment of various flowing liquids, aiming at ensuring that chemical solution can reach and maintain in a specific process temperature range in the conveying process;For example, etching liquid must be accurately heated to a certain specific temperature (usually set as 65 DEG C) before playing a role, to ensure that etching reaction can be carried out as expected, while avoiding unnecessary thermal damage to silicon wafer. However, the existing liquid online heater has low heating efficiency in actual application, which leads to too low etching liquid temperature, so that the reaction rate slows down, etching is uneven, and even in some areas, complete etching is impossible, thereby leaving unnecessary material layer on silicon wafer. The case of insufficient heating or heating delay not only leads to the extension of production cycle and the increase of energy consumption cost, more importantly, it can cause incomplete or out-of-control chemical reaction, and then cause adverse effects on the quality of semiconductor products, and even can cause batch production failure, which seriously hinders the continuity and stability of production line.

[0003] Therefore, it becomes an urgent problem to provide an online liquid heating device with high heating efficiency. SUMMARY

[0004] The main purpose of the utility model is to provide an online liquid heating device, aiming at solving the technical problem of low heating efficiency in the process of heating chemical reagent.

[0005] In order to achieve the above purpose, the utility model provides an online liquid heating device, comprising: inflow assembly for inputting liquid to be heated;Outflow assembly for outputting heated liquid;N connecting plate, the connecting plate is provided with M liquid via hole;Heating assembly, the heating assembly further includes (N+1) groups of infrared heating pipes for heating liquid to be heated, the number of each group of infrared heating pipes is M;The (N+1) groups of infrared heating pipes are connected in series through the connecting plate, the two sides of the connecting plate are connected with a group of infrared heating pipes through liquid via hole respectively, the infrared heating pipe at inflow end is communicated with inflow assembly, the infrared heating pipe at outflow end is communicated with outflow assembly, N is a natural number greater than 1, M is a natural number greater than 2.

[0006] Preferably, the inflow assembly comprises an inflow joint, a first fixing seat and a first cover plate connected in sequence, the first fixing seat is provided with a liquid inlet channel, the first cover plate is provided with M distribution holes, the infrared heating tube is in interference fit with the distribution holes and communicates with the liquid inlet channel, and the liquid to be heated enters the liquid inlet channel from the inflow joint and then enters the infrared heating tube at the liquid inlet end through the distribution holes.

[0007] Preferably, the first fixing seat is provided with at least one first wire passing hole for passing the power supply line, and the connecting plate is provided with at least one second wire passing hole for passing the power supply line.

[0008] Preferably, the outflow assembly comprises an outflow joint, a second fixing seat and a second cover plate connected in sequence, the second fixing seat is provided with a liquid outlet channel, the second cover plate is provided with M converging holes, the infrared heating tube is in interference fit with the converging holes and communicates with the liquid outlet channel, and the liquid to be heated enters the liquid outlet channel from the inflow joint and then enters the infrared heating tube at the liquid outlet end through the converging holes.

[0009] Preferably, a first sealing washer is arranged between the infrared heating tube and the distribution hole, and a second sealing washer is arranged between the infrared heating tube and the converging hole.

[0010] Preferably, the liquid passing hole comprises a first hole section and a second hole section connected to both ends of the first hole section respectively, the outlet sleeve of the infrared heating tube is provided with a third sealing washer, and the third sealing washer is embedded in the second hole section.

[0011] Preferably, a plurality of first fixing rods are arranged between the connecting plate and the first cover plate, a plurality of second fixing rods are arranged between the connecting plate and the second cover plate, and / or a plurality of third fixing rods are arranged between the two connecting plates.

[0012] Preferably, the first fixing rods and the second fixing rods on both sides of the connecting plate are arranged staggered, and / or the third fixing rods on both sides of the connecting plate and the first fixing rods are arranged staggered, and / or the third fixing rods on both sides of the connecting plate and the second fixing rods are arranged staggered.

[0013] Preferably, one side of the first cover plate facing the heating assembly is provided with a first fixing nut ring, and one side of the second cover plate facing the heating assembly is provided with a second fixing nut ring.

[0014] Preferably, the application further comprises a heat insulation shell, and the heat insulation shell is attached to the first fixing seat and the second fixing seat at both ends.

[0015] The technical scheme provided by the utility model discloses, infrared heating pipe is made of nitrided silicon that resists chemical reagent corrosion, is coated with infrared heating coating on the surface, is equipped with electrode ring at both ends and is of bakelite material (metal ions are not generated when heating), and the inside liquid to be heated is heated after electrification. BRIEF DESCRIPTION OF DRAWINGS

[0016] One or more embodiments are illustrated by way of example in the figures that are not intended to be limiting of the embodiments. Like numbers refer to like elements throughout the drawings, and any reference to first, second and third elements throughout the drawing indicates varying, but not necessarily different, elements. Figures in the drawings are not necessarily to scale.

[0017] Figure 1 It is an overall structure schematic view of an embodiment of the online liquid heating device of the utility model.

[0018] Figure 2 It is an explosion structure schematic view of an embodiment of the online liquid heating device of the utility model.

[0019] Figure 3 It is a left view structure schematic view of an embodiment of the online liquid heating device of the utility model.

[0020] Figure 4 It is a right view structure schematic view of an embodiment of the online liquid heating device of the utility model.

[0021] Figure 5 It is Figure 4 It is a sectional view at A-A.

[0022] Figure 6 It is an overall structure schematic view of an embodiment of the online liquid heating device of the utility model.

[0023] In the drawings:

[0024] 1, inflow assembly; 11, inflow connector; 12, first fixed seat; 121, first wire hole; 13, first cover plate; 131, shunt hole; 132, first fixed nut ring; 14, liquid inlet channel;

[0025] 2, outflow assembly; 21, outflow connector; 22, second fixed seat; 23, second cover plate; 231, convergent hole; 232, second fixed nut ring; 24, liquid outlet channel;

[0026] 3, heating assembly; 31, connecting plate; 311, liquid via hole; 3111, first hole section; 3112, second hole section; 312, second wire via hole; 313, first fixing rod; 314, second fixing rod; 315, third fixing rod; 32, infrared heating tube; 321, first sealing washer; 322, second sealing washer; 323, third sealing washer;

[0027] 4, heat insulation shell. DETAILED DESCRIPTION

[0028] For the purpose of facilitating the understanding of the present application, the present application will be described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element or one or more intervening elements can be present therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element or one or more intervening elements can be present therebetween. The terms "vertical", "horizontal", "left", "right", "inner", "outer" and similar expressions used in the present specification are for the purpose of illustration only. In the description of the present application, the terms "first", "second" are used only for the purpose of description and should not be understood as indicating relative importance or implying that the indicated technical features are limited in number. Therefore, unless otherwise specified, the features with "first", "second" can explicitly or implicitly include one or more of the features; the meaning of "plurality" is two or more. The term "comprising" and any variation thereof means non-exclusive inclusion, and one or more other features, integers, steps, operations, units, components and / or combinations thereof can be present or added.

[0029] In addition, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or the communication between two elements. All technical and scientific terms used in the present specification have the same meaning as understood by the person skilled in the art of the present application. The terms used in the present specification are only for the purpose of describing the specific embodiments and are not used to limit the present application. The term "and / or" used in the present specification includes any and all combinations of one or more related listed items.

[0030] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as there is no conflict.

[0031] Please refer to Figures 1 to 5This utility model provides an online liquid heating device, including: an inflow component 1 for inputting liquid to be heated; an outflow component 2 for outputting heated liquid; and a heating component 3, including a connecting plate 31 with three liquid passage holes 311. The heating component 3 also includes six infrared heating tubes 32 for heating the liquid to be heated. One or both ends of the infrared heating tubes 32 are detachably mounted on the connecting plate 31 and communicate with the liquid passage holes 311. Only one end of the infrared heating tube 32 is detachably mounted on the connecting plate 31, and the end of the infrared heating tube 32 facing away from the connecting plate 31 is communicated with the inflow component 1 or the outflow component 2.

[0032] In the technical solution provided by this utility model, the infrared heating tube 32 is made of silicon nitride resistant to chemical corrosion, coated with an infrared heating coating, and has electrode rings at both ends made of plastic (which does not generate metal ions during heating). After being energized, it heats the liquid inside. Due to the presence of the connecting plate 31, this design can increase the overall number of infrared heating tubes 32 by increasing the number of infrared heating tubes 32 installed on the connecting plate 31 and by connecting multiple connecting plates 31, thereby improving the heating efficiency of the entire device and achieving rapid heating, meeting the specified heating requirements within a specified time.

[0033] Please refer to Figures 1 to 5 In this embodiment, the inflow assembly 1 includes an inflow connector 11, a first fixing seat 12, and a first cover plate 13 connected in sequence. The liquid inlet channel 14 is mainly formed by opening the first fixing seat 12. The first cover plate 13 is provided with three diversion holes 131 (the specific number is set according to the heating efficiency required). The infrared heating tube 32 is interference-fitted with the corresponding diversion hole 131 and communicates with the liquid inlet channel 14. A first sealing gasket 321 is provided between the infrared heating tube 32 and the diversion hole 131. The liquid to be heated is input from the inflow connector 11 into the liquid inlet channel 14, and then flows to different infrared heating tubes 32 through the diversion holes 131 on the first cover plate 13. The outflow assembly 2 includes an outflow connector 21, a second fixing seat 22, and a second cover plate 23 connected in sequence. The second cover plate 23 is provided with three converging holes 231. The infrared heating tube 32 is interference-fitted with the converging holes 231 and communicates with the liquid outlet channel 24. A second sealing gasket 322 is provided between the infrared heating tube 32 and the converging holes 231. The heated liquid flows from the infrared heating tube 32 through the flow-gathering hole 231 to the liquid outlet channel 24, and then to the outflow connector 21, and is output to the next process processing point.

[0034] Please refer to Figures 1 to 5In this embodiment, the first fixing base 12 is provided with at least one first wire-passing hole 121 for passing through the power line, and the connecting plate 31 is provided with at least one second wire-passing hole 312 for passing through the power line. During use, the electrode ring on the infrared heating tube 32 needs to be energized. The external wiring passes through the first wire-passing hole 121 and connects to the electrode ring circuit of the infrared heating tube 32. Then, it passes through the second wire-passing hole 312 through the connecting plate 31 and connects to the infrared heating tube 32 circuit located at the other end of the connecting plate 31. This facilitates wiring and wiring organization for installation personnel.

[0035] Please refer to Figures 1 to 5 In this embodiment, the liquid passage 311 includes a first section 3111 and a second section 3112. The two second sections 3112 are respectively connected to both ends of the first section 3111. A third sealing gasket 323 is fitted onto the outlet of the infrared heating tube 32, and the third sealing gasket 323 is embedded in the second section 3112. The first section 3111 is used for the installation of the sealing gasket and can optimize pressure distribution or reduce fluid resistance. The sealing ring ensures the sealing between the infrared heating tube 32 and the liquid passage 311, preventing fluid leakage.

[0036] Please refer to Figures 1 to 6 In this embodiment, a plurality of first fixing rods 313 are provided between the connecting plate 31 and the first cover plate 13, and a plurality of second fixing rods 314 are provided between the connecting plate 31 and the second cover plate 23. The function of the fixing rods is to enhance the structural strength of the assembly and reinforce the connection between the connecting plates 31 and the connecting plates 31 and the two ends. The fixing positions of the first fixing rods and the second fixing rods on the connecting plate are staggered on the axis to avoid stress concentration that could damage the structure of the connecting plate. Figure 6 The heating device contains two connecting plates, which are fixed together by three parallel, spaced third fixing rods. These third fixing rods are staggered from the first or second fixing rods to avoid stress concentration.

[0037] Please refer to Figures 1 to 5 In this embodiment, the first cover plate 13 is provided with a first fixing nut ring 132 on the side facing the heating component 3, which is used to reinforce the connection between the first cover plate 13 and the first fixing seat 12; the second cover plate 23 is provided with a second fixing nut ring 232 on the side facing the heating component 3, which is used to reinforce the connection between the second cover plate 23 and the second fixing seat 22, forming a tighter liquid outlet channel 24.

[0038] Please refer to Figures 1 to 5 In this embodiment, a heat-insulating shell 4 is also included. The inner sides of both ends of the heat-insulating shell 4 are respectively attached to the first fixing seat 12 and the second fixing seat 22, which helps to reduce heat loss and improve the thermal efficiency of the system.

[0039] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Under the concept of this utility model, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of this utility model as described above. For the sake of brevity, they are not provided in detail. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. An online liquid heating device, characterized in that, include: Inflow component (1) is used to input the liquid to be heated; Outlet component (2) for discharging heated liquid; N connecting plates (31), wherein the connecting plates (8) are provided with M liquid through holes (81); The heating component (3) further includes (N+1) groups of infrared heating tubes (32) for heating the liquid to be heated, and the number of infrared heating tubes (32) in each group is M. The (N+1) groups of infrared heating tubes (32) are connected in series through the connecting plate (8). The two sides of the connecting plate (8) are respectively connected to a group of infrared heating tubes (32) through liquid through holes (81). The infrared heating tube (32) located at the inflow end is connected to the inflow component (1), and the infrared heating tube (32) located at the outflow end is connected to the outflow component (2). N is a natural number greater than 1, and M is a natural number greater than 2.

2. The online liquid heating device according to claim 1, characterized in that, The inflow assembly (1) includes an inflow connector (11), a first fixing seat (12), and a first cover plate (13) connected in sequence. The first fixing seat is provided with an inflow channel, and the first cover plate (13) is provided with M diversion holes (131). The infrared heating tube (32) is interference-fitted with the corresponding diversion hole (131) and communicates with the inflow channel (14). The liquid to be heated enters the inflow channel (14) from the inflow connector (11) and then enters the infrared heating tube (32) at the inflow end through the diversion hole (131).

3. The online liquid heating device according to claim 2, characterized in that, The first fixing base (12) is provided with at least one first wire hole (121) for passing through the power line, and the connecting plate (8) is provided with at least one second wire hole (312) for passing through the power line.

4. The online liquid heating device according to any one of claims 1 to 3, characterized in that, The outflow assembly (2) includes an outflow connector (21), a second fixing seat (22), and a second cover plate (23) connected in sequence. The second fixing seat (22) is provided with an outflow channel (24), and the second cover plate (23) is provided with M flow-gathering holes (231). The infrared heating tube (32) is interference-fitted with the flow-gathering holes (231) and communicates with the outflow channel (24). The liquid to be heated enters the outflow channel (24) from the inflow connector (11) and then enters the infrared heating tube (32) at the outflow end through the flow-gathering holes (231).

5. The online liquid heating device according to claim 4, characterized in that, A first sealing gasket (321) is provided between the infrared heating tube (32) and the diversion hole (131), and a second sealing gasket (322) is provided between the infrared heating tube (32) and the convergence hole (231).

6. The online liquid heating device according to claim 5, characterized in that, The liquid passage (311) includes a first section (3111) and a second section (3112). The two second sections (3112) are respectively connected to the two ends of the first section (3111). The outlet of the infrared heating tube (32) is fitted with a third sealing gasket (323), which is embedded in the second section (3112).

7. The online liquid heating device according to claim 6, characterized in that, A plurality of first fixing rods (313) are provided between the connecting plate (8) and the first cover plate (13), and a plurality of second fixing rods (314) are provided between the connecting plate (8) and the second cover plate (23); And / or, a plurality of third fixing rods (315) are provided between the two connecting plates (8).

8. The online liquid heating device according to claim 7, characterized in that, The first fixing rod (313) and the second fixing rod (314) on both sides of the connecting plate (31) are staggered; And / or, the third fixing rods (315) on both sides of the connecting plate (31) and the first fixing rod (313) are staggered; And / or, the third fixing rod (315) and the second fixing rod (314) on both sides of the connecting plate (31) are staggered.

9. The online liquid heating device according to claim 7, characterized in that, The first cover plate (13) has a first fixing nut ring (132) on the side facing the heating component (3), and the second cover plate (23) has a second fixing nut ring (232) on the side facing the heating component (3).

10. The online liquid heating device according to claim 7, characterized in that, It also includes a heat insulation shell (4), the inner sides of both ends of which are respectively attached to the first fixing seat (12) and the second fixing seat (22).

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