Substrate feeding device and cleaning equipment

Abstract

The embodiment of the utility model provides a substrate feeding device and cleaning equipment, and relates to the field of semiconductor processing equipment. The substrate feeding device comprises a flower basket used for bearing a substrate, a mounting plate used for mounting a processing groove, a placing frame, a fixing assembly and a driving assembly, the placing frame is provided with a containing cavity, and the flower basket is placed in the placing frame through the containing cavity; the fixing assembly is arranged on the placing frame, and when the flower basket is located in the containing cavity, the fixing assembly is used for fixing the flower basket; and the driving assembly is arranged on the mounting plate and connected with the placement frame, and the driving assembly is used for driving the placement frame to move in the vertical direction so that the placement frame can enter or leave the treatment groove. The cleaning equipment provided by the utility model comprises the substrate feeding device and a processing tank. The utility model has the effect of improving the processing efficiency of the semiconductor substrate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a substrate loading device and a cleaning device. Background Technology

[0002] During semiconductor substrate processing, the substrate needs to be transported between different processing equipment for different processing techniques. Between adjacent processing steps, the substrate needs to be cleaned to ensure the cleanliness of the substrate surface. After some processing steps, the substrate surface may have residual processing liquid with attached particles. To prevent the processing liquid from evaporating and causing particles to adhere to the substrate surface, the substrate needs to be kept moist before cleaning.

[0003] Currently, a robotic arm is generally used to immerse a basket containing a substrate into a processing tank to wet the substrate. During the process of immersing the basket into the processing tank and moving it in the tank, the basket and the substrate may be displaced due to buoyancy. Utility Model Content

[0004] The purpose of this invention is to provide a substrate loading device and a substrate cleaning equipment, which can improve the problem of displacement during substrate immersion.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] In a first aspect, this utility model provides a substrate loading device, comprising:

[0007] Flower baskets are used to support the substrate;

[0008] Mounting plate, used to install the treatment tank containing the treatment liquid;

[0009] The shelf has a receiving cavity through which the flower basket is placed.

[0010] A fixing component is provided on the placement rack. When the flower basket is located in the receiving cavity, the fixing component is used to fix the flower basket.

[0011] A drive assembly is mounted on a mounting plate and connected to a placement rack. The drive assembly is used to drive the placement rack to move vertically so that the placement rack enters or leaves the processing tank.

[0012] A limiting component is disposed on the placement rack. Before the flower basket is placed in the receiving cavity and enters the processing tank, the limiting component is used to limit the substrate inside the flower basket.

[0013] In an optional embodiment, the limiting component includes a rotating member and an abutting rod. The abutting rod includes a horizontal section and a vertical section. The horizontal section is rotatably connected to the placement frame and connected to the rotating member. The rotating member is used to drive the abutting rod to rotate so that the vertical section rotates to the opening side of the receiving cavity and abuts against the substrate inside the flower basket.

[0014] In an optional embodiment, the fixing component includes a fixing rod and a first driving member. The fixing rod is disposed on the placement frame and located above the receiving cavity, with the end of the fixing rod extending toward the receiving cavity. The first driving member is disposed on the placement frame and connected to the fixing rod, and the first driving member is used to drive the fixing rod into or out of the receiving cavity.

[0015] In an optional embodiment, the first driving member includes a rotary motor, the fixed rod is L-shaped, one end of the fixed rod is connected to the rotary motor, and the other end of the fixed rod extends vertically downward. The rotary motor drives the fixed rod to enter or leave the receiving cavity, and is also used to drive the fixed rod to rotate so that the fixed rod rotates to enter or leave the receiving cavity.

[0016] In an optional embodiment, a fixing plate is provided at one end of the fixing rod near the receiving cavity for abutting against the flower basket.

[0017] In an optional embodiment, the drive assembly includes a second drive member and a connecting plate. The second drive member is disposed on the side of the mounting plate away from the processing groove. One end of the connecting plate is connected to the second drive member, and the other end of the connecting plate extends vertically upward and is connected to the placement frame. The second drive member is used to drive the connecting plate to move in the vertical direction.

[0018] In an optional implementation, it includes at least one placement rack and at least one drive component, with the placement rack and drive component corresponding to and connected to each other.

[0019] In an optional embodiment, a first detection element is provided on the placement rack, and when a flower basket is placed in the accommodating cavity, the first detection element is used to detect the substrate inside the flower basket.

[0020] In an optional embodiment, a second detection element is provided on the connecting plate, which is used to detect the distance between the placement rack and the mounting plate.

[0021] Secondly, this utility model provides a substrate cleaning device, including a processing tank and a substrate loading device according to any of the foregoing embodiments. The processing tank is mounted on a mounting plate and is used to hold the processing liquid.

[0022] The beneficial effects of the substrate loading device and substrate cleaning equipment provided in this embodiment of the invention include:

[0023] The basket containing the substrate is transported to the placement cavity of the placement rack by a robotic arm or manually. The basket is fixed by a fixing component, and the placement rack is driven to move vertically by a driving component, thereby driving the basket to be immersed in the treatment tank and then leave the treatment tank, achieving the effect of wetting the substrate. At the same time, the substrate is limited and fixed by a limiting component. This utility model improves the problem of displacement that occurs during the substrate immersion process. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the cleaning equipment provided in this embodiment from a first-view perspective;

[0026] Figure 2 This is a schematic diagram of the substrate loading device provided in this embodiment;

[0027] Figure 3 This is a structural schematic diagram of the cleaning equipment provided in this embodiment from a second perspective.

[0028] Icons: 100 - Processing tank; 200 - Flower basket; 210 - Base plate; 300 - Mounting plate; 400 - Placement rack; 410 - Receiving cavity; 500 - Fixing component; 510 - Fixing rod; 520 - First driving component; 600 - Driving component; 610 - Second driving component; 620 - Connecting plate; 700 - Limiting component; 710 - Rotating component; 720 - Abutment rod; 800 - First detection component; 900 - Second detection component. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0030] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0031] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0032] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0033] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0034] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0035] In semiconductor substrate processing, substrates undergo various steps such as oxidation, photolithography, etching, and thin film deposition. Therefore, substrates need to be transported between different processing devices for different processing steps. Between adjacent processing steps, the substrates must be cleaned to ensure their surface remains clean. After some processing steps (such as CMP), processing solution with adhering particulate matter may remain on the substrate surface. To prevent the evaporation of the processing solution from causing particulate matter to adhere to the substrate surface and affect subsequent processing, the substrate needs to be kept moist before cleaning. Currently, a robotic arm is typically used to place a specialized clamping basket containing substrates into a solution for wetting. However, when the basket and the substrates within it enter and move within the solution, the basket and the substrates may shift due to buoyancy. This displacement can lead to misalignment of the forks when the substrate is picked up after wetting, affecting substrate unloading. Furthermore, the displacement of the substrate within the basket can cause it to collide with external structures such as the basket or the inner wall of the processing tank, resulting in damage.

[0036] To address the aforementioned technical problems and improve substrate processing efficiency while minimizing damage caused by collisions between the substrate and other equipment during the substrate wetting process, this utility model provides a substrate loading device and a cleaning device.

[0037] The overall structure, working principle, and technical effects of the device A provided by this utility model are described in detail below through embodiments and in conjunction with the accompanying drawings.

[0038] Please refer to Figure 1 and Figure 3 This utility model provides a substrate cleaning device, including a substrate loading device and a processing tank 100. The processing tank 100 contains a processing solution for immersing and wetting a substrate 210. The substrate loading device is used to transport the substrate 210 to the processing tank 100 for immersion processing.

[0039] Please refer to Figure 1 - Figure 3 This utility model provides a substrate feeding device for feeding the substrate 210 in the substrate 210 wetting process before cleaning and processing, and then conveying the substrate 210 to the processing tank 100 containing the processing liquid for wetting.

[0040] The substrate loading device includes a basket 200, a mounting plate 300, a placement rack 400, a fixing component 500, and a driving component 600. The basket 200 is a commonly used tool in the substrate 210 processing, used to support the substrate 210 to be loaded. The mounting plate 300 is used to mount a processing tank 100 containing processing liquid. When the substrate 210 is wetted, the basket 200 carrying the substrate 210 is driven to move into the processing tank 100. The placement rack 400 is located directly above the processing tank 100. The placement rack 400 has a receiving cavity 410 for accommodating the basket 200, through which the basket 200 is placed. The fixing component 500 is disposed on the placement rack 400. When the basket 200 is placed in the receiving cavity 410, the fixing component 500 is used to fix the basket 200 to the placement rack 400. The drive assembly 600 is disposed on the side of the mounting plate 300 opposite to the processing tank 100. The drive assembly 600 is connected to the placement rack 400 and is used to drive the placement rack 400 to move vertically, thereby driving the placement rack 400 into or out of the processing tank 100. Thus, when a flower basket 200 is placed in the placement rack 400, the placement rack 400 can drive the flower basket 200 into the processing tank 100, thereby wetting the substrate 210 inside the flower basket 200.

[0041] By setting a processing groove 100 and a driving assembly 600 on the mounting plate 300, and setting a placement rack 400 on the driving assembly 600, the driving assembly 600 drives the placement rack 400 to enter or leave the processing groove 100, thereby driving the basket 200 placed in the placement rack 400 to enter or leave the processing groove 100. When wetting the substrate 210, the substrate 210 is placed in the basket 200, and the basket 200 is placed in the receiving cavity 410 in the placement rack 400. The fixing assembly 500 fixes the basket 200 to the placement rack 400 to prevent the basket 200 from falling out of the receiving cavity 410 during the movement of the placement rack 400. Then, the driving assembly 600 drives the placement rack 400 and the basket 200 in the placement rack 400 to move into the processing groove 100, thereby achieving the effect of wetting the substrate 210 in the basket 200 and keeping the substrate 210 in a moist state. Meanwhile, the substrate loading device is easy to operate and has high processing efficiency.

[0042] Please refer to Figure 1 - Figure 3 In some optional embodiments, the fixing assembly 500 includes a fixing rod 510 and a first driving member 520. The fixing rod 510 is disposed on the placement frame 400 and located above the receiving cavity 410, with its end extending vertically downward toward the receiving cavity 410. The first driving member 520 is disposed on the placement frame 400 and connected to the fixing rod 510. The first driving member 520 is used to drive the fixing rod 510 into or out of the receiving cavity 410. Thus, when the first driving member 520 drives the fixing rod 510 to abut against the flower basket 200, the flower basket 200 is firmly fixed against the placement frame 400 to prevent displacement of the flower basket 200 during processing, which would affect the accuracy of the external robot arm in picking up and placing the flower basket 200. In this embodiment, to facilitate the installation of the fixing rod 510 and the first driving member 520, a back plate providing a mounting base for the fixing rod 510 is detachably connected to the top of the placement frame 400 by bolts. An L-shaped bracket is detachably connected to the back plate by bolts, and the first driving member 520 is mounted on the bracket. In this embodiment, the first driving member 520 is a rotary motor. The rotary motor in this embodiment can be an electric push rod lifting rotary motor, a lead screw lifting rotary motor, a hydraulic lifting rotary motor, or any other motor capable of simultaneously driving the fixing rod 510 to rotate and lift. This allows the fixing rod 510 to rotate away from the opening of the receiving cavity 410, thus facilitating the placement or removal of the flower basket 200 from the receiving cavity 410. Furthermore, to facilitate driving the fixing rod 510 to rotate away from the opening of the receiving cavity 410, the fixing rod 510 is L-shaped, with one end connected to the first driving member 520 and the other end extending vertically downwards.

[0043] Furthermore, in order to improve the fixing effect of the fixing rod 510 on the flower basket 200 when it abuts against the flower basket 200, a fixing plate is also provided at the end of the fixing rod 510 near the flower basket 200 to increase the contact area between the abutting rod 720 and the flower basket 200, thereby improving the fixing effect of the fixing rod 510 on the flower basket 200.

[0044] Please refer to Figure 1 - Figure 3 In some optional embodiments, the drive assembly 600 includes a second drive member 610 and a connecting plate 620. The second drive member 610 is disposed on the side of the mounting plate 300 opposite to the processing slot 100, i.e., below the mounting plate 300. Simultaneously, to facilitate the installation of the drive assembly 600, in this embodiment, a back plate providing a mounting platform for the second drive member 610 can also be detachably installed below the mounting plate 300. One end of the connecting plate 620 is connected to the second drive member 610, and the other end of the connecting plate 620 extends vertically upward and is connected to the placement rack 400. The second drive member 610 is used to drive the connecting plate 620 to move vertically, thereby driving the placement rack 400 into or out of the processing slot 100. In this embodiment, the second driving component 610 is a cylinder, which drives the connecting plate 620 to move in the vertical direction by extending and retracting the piston rod of the cylinder. In other optional embodiments, the second driving component 610 can also be a linear motor, a slide rail structure, a ball screw pair, or other structures that can drive the connecting plate 620 to move in a straight line. In this embodiment, the specific structure of the second driving component 610 is not limited.

[0045] For further details, please refer to Figure 1 - Figure 3 The substrate 210 loading mechanism includes at least two placement racks 400 and at least two drive components 600, with each placement rack 400 and drive component 600 corresponding and connected to the other. The drive component 600 drives the placement rack 400 to move vertically. In this embodiment, two placement racks 400 and two drive components 600 are used as an example. By setting two placement racks 400 and two drive components 600, one loading device is activated while the other is on standby. The alternating use of the two loading devices improves the transfer efficiency. Simultaneously, the two loading devices can be controlled independently without interference. In other embodiments, the number of placement racks 400 and drive components 600 can also be different.

[0046] Please refer to Figure 1 - Figure 3The flower basket 200 is placed into the processing tank 100, and the substrate 210 enters the processing liquid in the processing tank 100. The substrate 210 in the flower basket 200 will be subject to buoyancy. In order to prevent the substrate 210 immersed in the processing tank 100 from sliding under the action of buoyancy, in some optional embodiments, a limiting component 700 is also provided on the placement rack 400. When the flower basket 200 is placed into the receiving cavity 410, the limiting component 700 is used to limit the substrate 210 on the flower basket 200 in the receiving cavity 410, so as to prevent the substrate 210 from sliding on the flower basket 200. Furthermore, in some optional embodiments, the limiting component 700 includes a rotating member 710 and an abutting rod 720. The abutting rod 720 is an L-shaped rod body, including a horizontal section and a vertical section that are perpendicular to each other and connected. The horizontal section of the abutting rod 720 is rotatably connected to the top of the placement frame 400, and the vertical section of the abutting rod 720 is located on the opening side of the accommodating cavity 410 on the placement frame 400. The rotating member 710 is disposed on the top of the placement frame 400 and connected to the horizontal section of the abutting rod 720. The rotating member 710 is used to drive the abutting rod 720 to rotate. In this embodiment, the rotating member 710 includes a rotary cylinder. In other optional embodiments, the rotating member 710 may also include a servo motor, a gear and rack device, or other structures that can drive the abutting rod 720 to rotate. This utility model does not limit the specific structure of the rotating member 710.

[0047] When the basket 200 is placed in the receiving cavity 410, the rotating member 710 drives the abutment rod 720 to rotate, so that the vertical section of the abutment rod 720 rotates to contact the multiple substrates 210 on the basket 200, thereby preventing the substrates 210 from sliding when moving in the treatment liquid. After the substrates 210 are soaked, the rotating member 710 drives the abutment rod 720 to rotate, so that the vertical section of the abutment rod 720 disengages from the substrates 210 and rotates to one side of the opening of the receiving cavity 410, preventing the abutment rod 720 from obstructing the removal of the basket 200 from the receiving cavity 410.

[0048] Please refer to Figure 1 - Figure 3 In some optional embodiments, a first detection element 800 is provided on the placement rack 400. When a flower basket 200 is placed in the receiving cavity 410, the first detection element 800 can detect the substrate 210 inside the flower basket 200, thereby detecting whether there is a substrate 210 on the flower basket 200 located in the receiving cavity 410. The first detection element 800 can be a photoelectric sensor, ultrasonic sensor, or other device that can be used for precise detection of materials. The specific implementation of the first detection element 800 is not limited here.

[0049] Please refer to Figure 1 - Figure 3In some optional embodiments, a second detection element 900 is provided on the connecting plate 620. The second detection element 900 is used to detect the distance between the placement rack 400 and the mounting plate 300, that is, the second detection element 900 is used to detect the height of the flower basket 200 inside the placement rack 400 to monitor the vertical position of the flower basket 200, thereby detecting whether the flower basket 200 is completely immersed in the treatment liquid in the treatment tank 100. The second detection element 900 can be a device such as a laser sensor or an ultrasonic sensor that can be used for distance detection. The specific implementation of the second detection element 900 is not limited here.

[0050] In summary, the implementation principle of the substrate 210 feeding mechanism provided by this utility model is as follows: a basket 200 containing substrate 210 is transported to the placement cavity in the placement rack 400 by a robotic arm or manually. The basket 200 is fixed by a fixing component 500, and the substrate 210 is limited by a limiting component 700 to prevent the substrate 210 from sliding. Then, the placement rack 400 is driven to move vertically by a driving component 600, thereby driving the basket 200 to be immersed in the processing tank 100. After the substrate 210 in the basket 200 is wetted, the basket 200 is driven to rise and leave the liquid surface to reach a predetermined position. The limiting component 700 is then driven to release the limiting of the substrate 210. Then, the basket 200 is moved by a robotic arm or the substrate is picked up by a fork, thereby achieving the effect of wetting the substrate 210.

[0051] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A substrate loading device, characterized in that, include: Flower basket, the flower basket being used to support the substrate; Mounting plate, the mounting plate being used to mount a treatment tank containing treatment liquid; A placement rack having a receiving cavity, through which the flower basket is placed; A fixing component is provided on the placement frame, and when the flower basket is located in the receiving cavity, the fixing component is used to fix the flower basket. A drive assembly is disposed on the mounting plate and connected to the placement rack. The drive assembly is used to drive the placement rack to move in a vertical direction so that the placement rack enters or leaves the processing tank. A limiting component is disposed on the placement rack. Before the flower basket is placed in the receiving cavity and enters the processing tank, the limiting component is used to limit the substrate inside the flower basket.

2. The substrate loading device according to claim 1, characterized in that, The limiting component includes a rotating member and an abutting rod. The abutting rod includes a horizontal section and a vertical section. The horizontal section is rotatably connected to the placement frame and connected to the rotating member. The rotating member is used to drive the abutting rod to rotate so that the vertical section rotates to the opening side of the receiving cavity and abuts against the substrate inside the flower basket.

3. The substrate loading device according to claim 1, characterized in that, The fixing component includes a fixing rod and a first driving member. The fixing rod is disposed on the placement frame and located above the receiving cavity. The end of the fixing rod extends toward the receiving cavity. The first driving member is disposed on the placement frame and connected to the fixing rod. The first driving member is used to drive the fixing rod into or out of the receiving cavity.

4. The substrate loading device according to claim 3, characterized in that, The first driving component includes a rotary motor, and the fixed rod is L-shaped. One end of the fixed rod is connected to the rotary motor, and the other end of the fixed rod extends vertically downward. The rotary motor drives the fixed rod to enter or leave the receiving cavity, and is also used to drive the fixed rod to rotate so that the fixed rod rotates to enter or leave the receiving cavity.

5. The substrate loading device according to claim 3 or 4, characterized in that, The end of the fixing rod near the receiving cavity is provided with a fixing plate for abutting against the flower basket.

6. The substrate loading device according to claim 1, characterized in that, The driving assembly includes a second driving member and a connecting plate. The second driving member is disposed on the side of the mounting plate opposite to the processing slot. One end of the connecting plate is connected to the second driving member, and the other end of the connecting plate extends vertically upward and is connected to the placement frame. The second driving member is used to drive the connecting plate to move in the vertical direction.

7. The substrate loading device according to claim 1, characterized in that, It includes at least two of the placement racks and at least two of the drive components, with each placement rack and drive component corresponding to and connected to the other.

8. The substrate loading device according to claim 1, characterized in that, The placement rack is equipped with a first detection element. When the flower basket is placed in the accommodating cavity, the first detection element is used to detect the substrate inside the flower basket.

9. The substrate loading device according to claim 6, characterized in that, The connecting plate is provided with a second detection element, which is used to detect the distance between the placement rack and the mounting plate.

10. A cleaning device, characterized in that, It includes a processing tank and a substrate loading device according to any one of claims 1-9, wherein the processing tank is mounted on the mounting plate and is used to hold the processing liquid.

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