Photoresist production kettle and funnel device

Abstract

The photoresist production kettle comprises a production kettle main body, the production kettle main body is internally provided with a cavity for accommodating photoresist, the top of the production kettle main body is provided with a cover body, the cover body is provided with a liquid recovery opening, and the cavity is communicated with the outside through the liquid recovery opening; the funnel device is arranged above the cover body and comprises a pipe body part and a funnel main body part located on the pipe body part, the funnel main body part is used for obtaining recycled photoresist from the outside, one end of the pipe body part is connected with the funnel main body part, the other end of the pipe body part is connected with the recycling liquid opening, and the pipe body part is used for guiding the photoresist into the cavity; the funnel main body part extends along the first direction, the first direction is parallel to the vertical direction, the pipe body part comprises a main pipe body section extending along the second direction, and the second direction is different from the first direction, so that the improvement of the efficiency of photoresist recovery work is facilitated, and the purpose of reducing the loss of a photoresist filling process is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technical field especially relates to a photoresist production kettle and funnel device. BACKGROUND

[0002] Photoresist refers to the solubility of electronic chemical materials in alkaline solvents changes through the irradiation or radiation of ultraviolet light, electron beam, ion beam, X-ray, etc. Generally, it is a mixed liquid sensitive to light composed of photosensitive resin, initiator, solvent, additive, etc. In the process of semiconductor or display panel production lithography, it is used as an etching-resistant layer material or a main pattern material. For example, the color filter required by the liquid crystal panel is a key component for colorization. The color photoresist is coated on the glass substrate, and the ultraviolet light is irradiated on the color photoresist through the photomask with a preset pattern, so that it is insoluble in alkaline solvent, thereby forming a pixel pattern.

[0003] Photoresist production generally uses a large-volume reaction kettle or a blending kettle. Before use, the photoresist finished product in the kettle needs to be filtered and then tanked into a smaller production kettle for transportation and use, which becomes a filling process.

[0004] However, the existing photoresist tanking process needs to be further improved. UTILITY MODEL CONTENT

[0005] The technical problem solved by the utility model is to provide a photoresist production kettle and funnel device to improve the utilization rate of photoresist.

[0006] To solve the above technical problem, the utility model embodiment provides a photoresist production kettle, which comprises a production kettle main body, a chamber for containing photoresist in the production kettle main body, a cover body provided at the top of the production kettle main body, a recovery liquid port provided on the cover body, the recovery liquid port connecting the chamber with the outside world, a funnel device provided above the cover body, the funnel device comprising a pipe body part and a funnel main body part on the pipe body part, the funnel main body part being used for obtaining recovered photoresist from the outside world, one end of the pipe body part being connected with the funnel main body part, the other end of the pipe body part being connected with the recovery liquid port, the pipe body part being used for guiding the photoresist to flow into the chamber, the funnel main body part extending along a first direction, the first direction being parallel to the vertical direction, the pipe body part comprising a main pipe body segment extending along a second direction, the second direction being different from the first direction.

[0007] Optionally, the pipe body part further comprises a first pipe body segment connected with the recovery liquid port, the first pipe body segment extending along the first direction; the included angle between the first pipe body segment and the main pipe body segment ranges from 100 degrees to 120 degrees.

[0008] Optionally, the pipe body part is Z-shaped, and the pipe body part further comprises a second pipe body segment connected with the funnel body part, the second pipe body segment extends along the first direction, and the first pipe body segment and the second pipe body segment are respectively located at two ends of the main pipe body segment; and an included angle between the second pipe body segment and the main pipe body segment ranges from 100 degrees to 120 degrees.

[0009] Optionally, an inner diameter of the pipe body part ranges from 30 mm to 50 mm, and a total length of the pipe body part ranges from 12 cm to 15 cm.

[0010] Optionally, the funnel body part is trumpet-shaped, and the funnel body part comprises a columnar upper funnel wall and a lower funnel wall located at a bottom of the upper funnel wall, the upper funnel wall is parallel to the first direction, the lower funnel wall is inclined relative to the upper funnel wall, and the lower funnel wall is connected with the pipe body part.

[0011] Optionally, a height of the funnel body part ranges from 150 mm to 200 mm, an inner diameter of the upper funnel wall ranges from 130 mm to 160 mm, and an included angle between the lower funnel wall and the upper funnel wall ranges from 95 degrees to 115 degrees.

[0012] Optionally, the funnel body part can accommodate photoresist with a weight ranging from 0 to 2 Kg.

[0013] Optionally, an included angle between the second direction and the first direction ranges from 100 degrees to 120 degrees.

[0014] Correspondingly, the utility model provides a funnel device for photoresist filling process, comprising: a pipe body part for accommodating photoresist; a funnel body part located on the pipe body part, one end of the pipe body part is connected with the funnel body part, the funnel body part extends along a first direction, and the pipe body part comprises a main pipe body segment extending along a second direction, and the second direction is different from the first direction.

[0015] Optionally, the pipe body part further comprises a first pipe body segment, the first pipe body segment extends along the first direction, and an included angle between the first pipe body segment and the main pipe body segment ranges from 100 degrees to 120 degrees.

[0016] Optionally, the pipe body part is Z-shaped, and the pipe body part further comprises a second pipe body segment connected with the funnel body part, the second pipe body segment extends along the first direction, the first pipe body segment and the second pipe body segment are respectively located at two ends of the main pipe body segment, and an included angle between the second pipe body segment and the main pipe body segment ranges from 100 degrees to 120 degrees.

[0017] Optionally, the inner diameter of the pipe body part ranges from 30mm to 50mm; and the total length of the pipe body part ranges from 12cm to 15cm.

[0018] Optionally, the funnel body part is trumpet-shaped, and the funnel body part comprises a columnar upper funnel wall and a lower funnel wall at the bottom of the upper funnel wall, the upper funnel wall is parallel to the first direction, and the lower funnel wall is inclined relative to the upper funnel wall and connected with the pipe body part.

[0019] Optionally, the height of the funnel body part ranges from 150mm to 200mm; the inner diameter of the upper funnel wall ranges from 130mm to 160mm; and the included angle between the lower funnel wall and the upper funnel wall ranges from 95 degrees to 115 degrees.

[0020] Optionally, the funnel body part can accommodate photoresist weighing less than or equal to 2Kg.

[0021] Optionally, the included angle between the second direction and the first direction ranges from 100 degrees to 120 degrees.

[0022] Compared with the prior art, the technical scheme of the embodiment of the utility model has the following beneficial effects:

[0023] In the photoresist production kettle provided by the technical scheme of the utility model, the funnel body part extends along a first direction, the first direction is parallel to a vertical direction, the pipe body part comprises a main pipe body segment extending along a second direction, the second direction is different from the first direction, the pipe body part of the funnel device is designed into an "inclined" shape through the main pipe body segment, and in the case that the space in the vertical direction of the predetermined position of the funnel device is small, a funnel body part with a larger size can still be used, thereby improving the efficiency of photoresist recovery work and achieving the purpose of reducing photoresist filling process loss.

[0024] Further, the pipe body part is limited to be Z-shaped, which is beneficial to the processing of the funnel device under the limitation of the given funnel device material, such as SUS316 stainless steel.

[0025] In the funnel device provided by the technical scheme of the utility model, the funnel device is detachably installed in a photoresist production kettle, the photoresist to be recovered from the outside is guided into the photoresist production kettle through the funnel device to recover the initial distillation, the pipe body part of the funnel device is designed into an "inclined" shape through the main pipe body segment, and in the case that the space in the vertical direction of the predetermined position of the funnel device is small, a funnel body part with a larger size can still be used, thereby improving the efficiency of photoresist recovery work and achieving the purpose of reducing photoresist filling process loss.

[0026] Further, the pipe body part is Z-shaped, which is beneficial to the processing of the funnel device under the limitation of the given funnel device material, such as SUS316 stainless steel. BRIEF DESCRIPTION OF DRAWINGS

[0027] The drawing is a structure schematic view of the photoresist production kettle in an embodiment of the present application,

[0028] Figure 1 is a schematic view of the production kettle main body and the funnel device,

[0029] Figure 2 is Figure 1 a three-dimensional schematic view of the pipe body part,

[0030] Figure 3 is Figure 1 an enlarged view of the funnel device. DETAILED DESCRIPTION

[0031] It should be noted that the "surface", "upper", in the present application, are used to describe the relative position relationship in space, and are not limited to whether direct contact.

[0032] As described in the background, the design of the existing photoresist production kettle needs to be further improved, and the present application will be described in combination with a photoresist filling process.

[0033] In the existing photoresist filling process, after the photoresist is extracted from the reaction kettle or the blending kettle at the initial stage of filling, the impurities are removed by the filter, and then transmitted to a small storage device for subsequent transportation and use.

[0034] However, when the photoresist passes through the new filter, air and foreign matter will be mixed into the photoresist due to the holes in the filter. Therefore, most of the time, the photoresist obtained at the initial stage of filtration is discarded, thereby causing the loss of the photoresist filling process.

[0035] To solve the above technical problems, the technical scheme of the present application provides a photoresist production kettle and a funnel device, wherein the pipe body part of the funnel device is designed in an "inclined" shape through the main pipe body segment. In the case that the space in the vertical direction of the predetermined position of the funnel device is small, a funnel main body part with a larger size can still be used, thereby improving the efficiency of the photoresist recovery work and achieving the purpose of reducing the loss of the photoresist filling process.

[0036] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings.

[0037] Figures 1 to 3 is a structure schematic view of the photoresist production kettle in an embodiment of the present application,

[0038] Please refer to Figures 1 to 3 , Figure 1 is a schematic view of the production kettle body 20 and the funnel device 21, Figure 2 is Figure 1 is a perspective view of the middle tube body part 211, Figure 3 is Figure 1 is an enlarged view of the funnel device 21, the photoresist production kettle comprises a production kettle body 20, the production kettle body 20 has a chamber 201 containing photoresist inside, the production kettle body 20 is provided with a cover 202 at the top, the cover 202 is provided with a recovery liquid port 203, the recovery liquid port 203 communicates the chamber 201 with the outside; the funnel device 21 arranged above the cover 202, the funnel device 21 comprises a tube body part 211 and a funnel body part 212 located on the tube body part 211, the funnel body part 212 is used to obtain the recovered photoresist from the outside, one end of the tube body part 211 is connected with the funnel body part 212, the other end of the tube body part 211 is connected with the recovery liquid port 203, the tube body part 211 is used to guide the photoresist to flow into the chamber 201, the funnel body part 212 extends along a first direction X, the first direction X is parallel to the vertical direction, the tube body part 211 comprises a main tube body segment 2110 extending along a second direction Y, the second direction Y is different from the first direction X.

[0039] So far, the funnel body part 212 extends along the first direction X, the first direction X is parallel to the vertical direction, the tube body part 211 comprises a main tube body segment 2110 extending along a second direction Y, the second direction Y is different from the first direction X, the tube body part 211 of the funnel device 21 is designed into an "inclined" shape through the main tube body segment 2110, in the case that the space in the vertical direction of the predetermined position of the funnel device 21 is small, a funnel body part 212 with larger size can still be used, thereby improving the efficiency of photoresist recovery work and achieving the purpose of reducing the loss of photoresist filling process.

[0040] Specifically, at the height beneficial to manual operation (convenient for pouring photoresist), the funnel body part 212 can be placed directly above the cover 202 or at a proper position away from the cover 202, without being limited by the space in the vertical direction of the predetermined position of the funnel device 21.

[0041] It is to be noted that the other end of the pipe body 211 is connected with the recovery liquid port 203, which means that the pipe body 211 can be inserted into the recovery liquid port 203, or the pipe body 211 is connected with the recovery liquid port 203 and the pipe body 211 is connected with the chamber 201, so that the photoresist to be recovered is guided into the chamber 201 through the funnel device 21. The specific connection mode of the pipe body 211 and the recovery liquid port 203 is not limited.

[0042] In this embodiment, the pipe body 211 is partially inserted into the recovery liquid port 203.

[0043] It is to be further noted that the funnel device 21 can be fixedly arranged above the cover body 202, or can be detachably arranged above the cover body 202, and the specific mounting mode is not limited.

[0044] In this embodiment, a plurality of pipelines (not shown in the figure) are further arranged above the cover body 202, such as pipelines for taking liquid, pipelines for feeding and discharging (not shown in the figure), etc., so that the space in the vertical direction of the predetermined position of the funnel device 21 is small, which is not conducive to the installation of the funnel body 212, and therefore the pipe body 211 of the funnel device 21 is designed to be "inclined".

[0045] In this embodiment, the included angle between the second direction Y and the first direction X is 10 degrees to 30 degrees. The purpose of limiting the included angle between the second direction Y and the first direction X is to arrange the funnel body 212 above the predetermined position of the funnel device 21, and to more optimally avoid interference with the cover body 202 and the mechanism arranged on the cover body 202.

[0046] In this embodiment, the pipe body 211 further comprises a first pipe segment 2111 connected with the recovery liquid port 203, and the first pipe segment 2111 extends along the first direction X. The first pipe segment 2111 is conducive to the installation of the funnel device 21.

[0047] In other embodiments, only the main pipe segment can be included, and the first pipe segment can not be included.

[0048] In this embodiment, the pipe body 211 is Z-shaped, and the pipe body 211 further comprises a second pipe segment 2112 connected with the funnel body 2110, and the second pipe segment 2112 extends along the first direction X, and the first pipe segment 2111 and the second pipe segment 2112 are respectively located at two ends of the main pipe segment 2110.

[0049] In other embodiments, the tubular body portion can not include the second tubular segment.

[0050] Here, the tubular body portion 211 is defined as Z-shaped, which facilitates the processing of the funnel device 21 under the limitation of the material of the funnel device 21 (for example, SUS316 stainless steel).

[0051] Specifically, the first tubular segment 2111 and the main tubular segment 2110 are welded by the first bend i, and the second tubular segment 2112 and the main tubular segment 2110 are welded by the second bend ii.

[0052] In this embodiment, the material of the funnel device can be SUS316 stainless steel. The stainless steel material facilitates processing and limits its purity, reducing the introduction of impurities into the photoresist.

[0053] In another embodiment, the material of the funnel device includes metal; the metal includes SUS316 stainless steel and stainless steel with a purity level greater than SUS316.

[0054] In other embodiments, the material of the funnel device can also be polytetrafluoroethylene (PTFE), pure silica gel, high polyethylene (PHPE), and the like.

[0055] In this embodiment, it is required that the weld should be smooth with the base material, and the weld surface is not allowed to have defects such as cracks, pores, slag, spatter, craters, and undercut.

[0056] In this embodiment, the included angle α between the first tubular segment 2111 and the main tubular segment 2110 ranges from 100 degrees to 120 degrees; the included angle β between the second tubular segment 2112 and the main tubular segment 2110 ranges from 100 degrees to 120 degrees. The shape of the tubular body portion 211 is further limited by the included angles α and β, thereby limiting the degree of inclination of the tubular body portion 211.

[0057] In other embodiments, the shape of the tubular body portion can not be limited to Z-shaped, but can also be S-shaped, multi-segment Z-shaped, and the like.

[0058] In this embodiment, the inner diameter d1 of the tubular body portion 211 ranges from 30 mm to 50 mm. In this embodiment, the total length of the tubular body portion 211 ranges from 12 cm to 15 cm. It should be noted that the total length of the tubular body portion 211 includes the length of the first bend i and the second bend ii.

[0059] In this embodiment, the weight of the photoresist that can be accommodated by the funnel body portion 212 ranges from less than or equal to 2 Kg.

[0060] In the embodiment, the funnel body part 212 is trumpet-shaped, and includes a columnar upper funnel wall 2121 parallel to the first direction X and a lower funnel wall 2122 at the bottom of the upper funnel wall 2121 and inclined relative to the upper funnel wall 2121 and connected with the pipe body part 211.

[0061] In the embodiment, the limitation of the weight of the photoresist that can be accommodated is realized by the inner diameter D2 of the upper funnel wall 2121 and the included angle γ between the lower funnel wall 2122 and the upper funnel wall 2121.

[0062] Specifically, the inner diameter D2 of the upper funnel wall ranges from 130 mm to 160 mm, and the included angle γ between the lower funnel wall and the upper funnel wall ranges from 95 degrees to 115 degrees.

[0063] In the embodiment, the height H of the funnel body part 212 ranges from 150 mm to 200 mm. Here, the purpose of limiting the height of the funnel body part 212 is to limit the height h of the photoresist that can be accommodated.

[0064] Correspondingly, the utility model also provides a funnel device 21 used in a photoresist filling process, please continue to refer to Figures 1 to 3 , comprising: a pipe body part 211 for accommodating photoresist; a funnel body part 212 on the pipe body part 21, one end of the pipe body part 211 is connected with the funnel body part 212, the funnel body part 212 extends along the first direction X, and the pipe body part 211 includes a main pipe body segment 2110 extending along the second direction Y, and the second direction Y is different from the first direction X.

[0065] At this point, the funnel device 21 can be detachably installed in a photoresist production kettle, and the photoresist that needs to be recycled outside is guided into the photoresist production kettle through the funnel device 21 to recycle the initial distillation, and the pipe body part 211 of the funnel device 21 is designed into an "inclined" shape through the main pipe body segment 2110, so that a funnel body part 212 with a larger size can still be used in the case that the space in the vertical direction of the predetermined position of the funnel device 21 is small, thereby improving the efficiency of the photoresist recycling work and achieving the purpose of reducing the loss of the photoresist filling process.

[0066] In the embodiment, the angle between the second direction Y and the first direction X is in the range of 10 degrees to 30 degrees. The purpose of limiting the angle between the second direction Y and the first direction X is to make the funnel body part 212 be arranged in the oblique upper side of the predetermined position of the funnel device 21, and more optimally avoid the interference with the cover body 202 and the mechanism arranged on the cover body 202.

[0067] In the embodiment, the pipe body part 211 further comprises a first pipe body segment 2111 extending along the first direction X. The first pipe body segment 2111 is beneficial to the installation of the funnel device 21.

[0068] In other embodiments, only the main pipe body segment can be included, and the first pipe body segment can not be included.

[0069] In the embodiment, the pipe body part 211 is Z-shaped, and the pipe body part 211 further comprises a second pipe body segment 2112 connected with the funnel body part 2110, the second pipe body segment 2112 extending along the first direction X, and the first pipe body segment 2111 and the second pipe body segment 2112 being respectively located at two ends of the main pipe body segment 2110.

[0070] In other embodiments, the pipe body part can not include the second pipe body segment.

[0071] Here, the pipe body part is limited to be Z-shaped, which is beneficial to the processing of the funnel device 21 under the limitation of the given material of the funnel device 21, such as SUS316 stainless steel.

[0072] Specifically, the first pipe body segment 2111 and the main pipe body segment 2110 are welded through a first bending i, and the second pipe body segment 2112 and the main pipe body segment 2110 are welded through a second bending ii.

[0073] In the embodiment, the angle α between the first pipe body segment 2111 and the main pipe body segment 2110 is in the range of 100 degrees to 120 degrees, and the angle β between the second pipe body segment and the main pipe body segment is in the range of 100 degrees to 120 degrees. The shape of the pipe body part 211 is further limited by the angle α and the angle β, so as to limit the inclination degree of the pipe body part 211.

[0074] In other embodiments, the shape of the pipe body part 211 can not be limited to Z-shaped, and can be S-shaped, multi-segment Z-shaped, etc.

[0075] In the embodiment, the inner diameter d1 of the pipe body part 211 is in the range of 20 mm to 32 mm.

[0076] In the embodiment, the outer diameter D1 of the pipe body 211 ranges from 30mm to 50mm. The purpose of limiting the range of the outer diameter D1 is to limit the thickness of the pipe body 211, so as to obtain better strength of the pipe body 211.

[0077] In the embodiment, the total length of the pipe body 211 ranges from 12cm to 15cm. It is to be noted that the total length of the pipe body 211 includes the length of the first bending i and the second bending ii.

[0078] In the embodiment, the weight of the photoresist that can be accommodated by the funnel body 212 ranges from less than or equal to 2Kg.

[0079] In the embodiment, the funnel body 212 is trumpet-shaped, and the funnel body 212 includes a columnar upper funnel wall 2121 and a lower funnel wall 2122 located at the bottom of the upper funnel wall 2121. The upper funnel wall 2121 is parallel to the first direction X, and the lower funnel wall 2122 is inclined relative to the upper funnel wall 2121 and connected with the pipe body 211.

[0080] In the embodiment, the limitation on the weight of the photoresist that can be accommodated is achieved by limiting the inner diameter D2 of the upper funnel wall 2121 and the included angle γ between the lower funnel wall 2122 and the upper funnel wall 2121.

[0081] Specifically, the inner diameter D2 of the upper funnel wall ranges from 130mm to 160mm, and the included angle γ between the lower funnel wall and the upper funnel wall ranges from 95 degrees to 115 degrees.

[0082] In the embodiment, the height H of the funnel body 212 ranges from 100mm to 200mm. Here, the purpose of limiting the height of the funnel body 212 is to limit the height h of the photoresist that can be accommodated.

[0083] Although the utility model discloses as above, the utility model is not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be limited by the range defined in the claims.

Claims

1. A photoresist production kettle, characterized by, The application relates to a funnel device for photoresist filling process, comprising: a production kettle body with a chamber containing photoresist in the body, a cover body provided on the top of the production kettle body, and a recovery liquid port provided on the cover body, the recovery liquid port being connected with the chamber and the outside; a funnel device provided above the cover body, the funnel device comprising a tube body and a funnel body provided on the tube body, the funnel body being used for obtaining the recovered photoresist from the outside, one end of the tube body being connected with the funnel body, the other end of the tube body being connected with the recovery liquid port, the tube body being used for guiding the photoresist into the chamber, the funnel body extending along a first direction, the first direction being parallel to a vertical direction, the tube body comprising a main tube segment extending along a second direction, the second direction being different from the first direction.

2. The photoresist production kettle of claim 1, wherein, The tube body further comprises a first tube segment connected with the recovery liquid port, the first tube segment extending along the first direction. The included angle between the first tube segment and the main tube segment ranges from 100 degrees to 120 degrees.

3. The photoresist production kettle of claim 2, wherein, The tube body is Z-shaped, the tube body further comprises a second tube segment connected with the funnel body, the second tube segment extending along the first direction, the first tube segment and the second tube segment being respectively located at two ends of the main tube segment, and the included angle between the second tube segment and the main tube segment ranges from 100 degrees to 120 degrees.

4. The photoresist production kettle of claim 1, wherein, The inner diameter of the tube body ranges from 30 mm to 50 mm, and the total length of the tube body ranges from 12 cm to 15 cm.

5. The photoresist production kettle of claim 1, wherein, The funnel body is trumpet-shaped, the funnel body comprising a columnar upper funnel wall and a lower funnel wall located at the bottom of the upper funnel wall, the upper funnel wall being parallel to the first direction, and the lower funnel wall being inclined relative to the upper funnel wall and connected with the tube body.

6. The photoresist production kettle of claim 5, wherein, The height of the funnel body ranges from 150 mm to 200 mm, and the inner diameter of the upper funnel wall ranges from 130 mm to 160 mm. The included angle between the lower funnel wall and the upper funnel wall ranges from 95 degrees to 115 degrees.

7. The photoresist production kettle of claim 1 wherein, The funnel body can contain photoresist with a weight less than or equal to 2 Kg.

8. The photoresist production kettle of claim 1, wherein, The included angle between the second direction and the first direction ranges from 100 degrees to 120 degrees.

9. A funnel device, characterized in that The funnel device is used in the photoresist filling process, comprising: a tube body used for containing photoresist; a funnel body provided on the tube body, one end of the tube body being connected with the funnel body, the funnel body extending along a first direction, and the tube body comprising a main tube segment extending along a second direction, the second direction being different from the first direction.

10. The funnel apparatus of claim 9, wherein, The tube body further comprises a first tube segment, the first tube segment extending along the first direction, and the included angle between the first tube segment and the main tube segment ranging from 100 degrees to 120 degrees.

11. The hopper apparatus of claim 10, wherein, The pipe body part is Z-shaped, and further comprises a second pipe body segment connected with the funnel body part, the second pipe body segment extends along the first direction, and the first pipe body segment and the second pipe body segment are respectively located at two ends of the main pipe body segment; the included angle between the second pipe body segment and the main pipe body segment ranges from 100 degrees to 120 degrees.

12. The funnel apparatus of claim 9, wherein, The inner diameter of the pipe body part ranges from 30 mm to 50 mm, and the total length of the pipe body part ranges from 12 cm to 15 cm.

13. The funnel apparatus of claim 9, wherein, The funnel body part is trumpet-shaped, and comprises a columnar upper funnel wall and a lower funnel wall located at the bottom of the upper funnel wall, the upper funnel wall is parallel to the first direction, the lower funnel wall is inclined relative to the upper funnel wall, and the funnel body part is connected with the pipe body part.

14. The hopper apparatus of claim 13, wherein, The height of the funnel body part ranges from 150 mm to 200 mm, the inner diameter of the upper funnel wall ranges from 130 mm to 160 mm, and the included angle between the lower funnel wall and the upper funnel wall ranges from 95 degrees to 115 degrees.

15. The funnel apparatus of claim 9, wherein, The weight of photoresist that can be contained by the funnel body part ranges from less than or equal to 2 Kg.

16. The funnel apparatus of claim 9, wherein, The included angle between the second direction and the first direction ranges from 100 degrees to 120 degrees.

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