Substrate conveying device

Abstract

The utility model discloses a substrate conveying device which comprises a conveying belt, a suction cup and a driving assembly. The conveyor belt is used for conveying substrates; the suction cup is used for adsorbing the base plate, and the suction cup is provided with a containing groove used for containing the conveying belt; the driving assembly is used for driving the suction cup to move along a preset moving path; wherein at least one part of the conveying belt is located on the moving path of the suction cup, and when the suction cup and the conveying belt coincide on the moving path, the part, coincide with the suction cup, of the conveying belt is contained in the containing groove of the suction cup, so that interference between the suction cup and the conveying belt is avoided. The substrate conveying device is used for optimizing the conveying path of the substrate on the substrate conveying device so as to reduce the size of the substrate conveying device.

Description

TECHNICAL FIELD

[0001] The utility model relates to coating equipment technical field especially relates to a substrate conveying device. BACKGROUND

[0002] In the coating equipment, substrate conveying device needs to be used to transport the substrate. The substrate conveying device receives the substrate provided by the feeding device, and then conveys the substrate to the coating head below for coating. The substrate conveying device conveys the substrate to the discharging device for material collection after coating. The substrate conveying device generally includes a feeding conveyor belt, a discharging conveyor belt and a suction cup. The feeding conveyor belt is used to receive the substrate provided by the feeding device. The suction cup is used to move the substrate on the feeding conveyor belt to the coating head below for coating and then move to the discharging conveyor belt. The discharging conveyor belt conveys the substrate to the discharging device for material collection.

[0003] In the existing substrate conveying device, the suction cup moves to one side of the conveyor belt and abuts against or abuts against the conveyor belt. The upper surface of the suction cup is flush with the upper surface of the feeding conveyor belt or the discharging conveyor belt. Therefore, the substrate on the feeding conveyor belt can be moved from the end of the feeding conveyor belt to the suction cup and separated from the feeding conveyor belt, or the substrate on the suction cup can be moved to the discharging conveyor belt. In this arrangement, the conveyor belt needs to avoid the moving path of the suction cup, so that the conveyor belt can only be arranged on one side of the moving path of the suction cup, which leads to a large volume of the substrate conveying device. SUMMARY

[0004] The utility model aims at providing a substrate conveying device for optimizing the transportation path of the substrate on the substrate conveying device to reduce the volume of the substrate conveying device.

[0005] The utility model discloses the following technical scheme:

[0006] A substrate conveying device comprises:

[0007] A conveyor belt is used to convey the substrate.

[0008] A suction cup is used to adsorb the substrate. The suction cup is provided with a containing groove for containing the conveyor belt.

[0009] A driving assembly is used to drive the suction cup to move along a predetermined moving path.

[0010] At least a part of the conveyor belt is located on the moving path of the suction cup. When the suction cup coincides with the conveyor belt on the moving path, the part of the conveyor belt coinciding with the suction cup is contained in the containing groove of the suction cup to avoid interference between the suction cup and the conveyor belt.

[0011] Preferably, the suction cup is provided with a suction surface for suctioning the substrate, and the accommodating groove is recessed from the suction surface and penetrates the suction cup along the conveying direction of the conveying belt.

[0012] Preferably, the width of the accommodating groove is greater than the width of the conveying belt, and the height of the accommodating groove is greater than the height of the conveying belt.

[0013] Preferably, the conveying belt is provided with a plurality of conveying belts, and the plurality of conveying belts includes at least one first conveying belt and at least one second conveying belt, the suction cup is used for suctioning the substrate on the first conveying belt, and the suction cup is used for conveying the substrate to the second conveying belt.

[0014] Preferably, the first conveying belt and the second conveying belt are respectively provided with a plurality of conveying belts, and the number of the first conveying belt and the second conveying belt is the same, and the suction cup is provided with the same number of accommodating grooves as the first conveying belt; each accommodating groove is used for accommodating a corresponding first conveying belt and a corresponding second conveying belt.

[0015] Preferably, the first conveying belt and the second conveying belt are each provided with two first conveying belts and two second conveying belts, which are used for supporting and conveying the substrate.

[0016] The suction cup is provided with two accommodating grooves, and the suction cup has a "W" shape.

[0017] Preferably, the suction cup and the driving assembly are respectively provided with a plurality of driving assemblies and correspond to each other, each driving assembly is used for driving one suction cup to move, and a plurality of suction cups are spaced apart along a moving path and move in sequence.

[0018] Preferably, the support table is further provided for supporting the suction cup, the support table is connected with the driving assembly and is driven by the driving assembly, and the support table drives the suction cup to move synchronously.

[0019] The maximum displacement of the driving assembly driving the support table and the suction cup in the vertical direction is greater than the height of the whole formed by the suction cup and the corresponding support table.

[0020] Preferably, the guide rail extending in the first direction is further provided, the driving assembly includes a first driving assembly and a second driving assembly, the first driving assembly includes a sliding block connected with the guide rail and a driving piece for driving the sliding block to move in the first direction; the second driving assembly is respectively connected with the sliding block and the support table, and the second driving assembly is used for driving the support table to move in the second direction.

[0021] Wherein, the first direction is the horizontal direction, and the second direction is the vertical direction; or, the first direction is the vertical direction, and the second direction is the horizontal direction.

[0022] Preferably, the guide rails are provided with two, each of the guide rails is in sliding fit with the slider in the partial number of the driving assemblies.

[0023] Compared with the prior art, the utility model has at least the following beneficial effects:

[0024] By locating at least a part of the conveying belt on the moving path of the suction cup, compared with the prior art in which the whole conveying belt is located outside the moving path of the suction cup, the conveying belt of the present application is only partially located outside the moving path of the suction cup or not at all, effectively reducing the volume of the substrate conveying device. In addition, by locating at least a part of the conveying belt on the moving path of the suction cup, the path of the conveying belt conveying the substrate partially coincides with the moving path of the suction cup, which can reduce the transmission path length of the substrate in the substrate conveying device and improve the conveying efficiency of the substrate conveying device. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a structural schematic view of the substrate conveying device of the utility model embodiment;

[0026] Figure 2 is a partial structural schematic view of the substrate conveying device of the utility model embodiment;

[0027] Figure 3 is still another partial structural schematic view of the substrate conveying device of the utility model embodiment;

[0028] Figure 4 is still another partial structural schematic view of the substrate conveying device of the utility model embodiment.

[0029] In the figure: 100, substrate; 1, conveying belt; 11, first conveying belt; 12, second conveying belt; 2, suction cup; 21, accommodating groove; 22, suction surface; 23, support table; 3, driving assembly; 31, first driving group; 311, slider; 32, second driving group; 4, guide rail. DETAILED DESCRIPTION

[0030] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations, however, can be implemented in many different forms and should not be construed as limited to the implementations set forth herein; rather, these implementations are provided so that this disclosure will be thorough and complete, and fully convey the concept of example implementations to those skilled in the art. Identical reference numerals refer to the same or similar elements throughout the several views of the drawings and like elements are referred to using like reference designators. Thus, for ease of reference, the description will not necessarily refer to all of these identical or similar elements in detail.

[0031] The words for expressing position and direction described in the utility model are all explained by taking the drawings as examples, but changes can also be made according to needs, and the changes made are all included in the protection scope of the utility model.

[0032] As Figure 1 shown, the utility model provides a kind of substrate conveying device, which is used to convey substrate 100, substrate 100 is for example glass substrate;The substrate conveying device can be applied in coating equipment, and the coating equipment can be used to coat perovskite layer on the surface of substrate 100.The substrate conveying device includes conveyor belt 1, suction cup 2 and driving assembly 3, and can also include guide rail 4 and support table 23.

[0033] Referring to Figure 1 and Figure 3 , conveyor belt 1 is used to convey substrate 100, and conveyor belt 1 can keep position fixed in substrate conveying device.Conveyor belt 1 can be provided with multiple, and multiple conveyor belts 1 include at least one first conveyor belt 11 and at least one second conveyor belt 12.The first conveyor belt 11 is used to be connected with external feeding device, so that the first conveyor belt 11 can receive the substrate 100 provided by feeding device.The first conveyor belt 11 is preferably provided with multiple, and multiple first conveyor belts 11 are arranged at intervals, and multiple first conveyor belts 11 can be used together to support and convey substrate 100.In the embodiment, the first conveyor belt 11 can be specifically provided with two, and the two first conveyor belts 11 are driven by the same driving member, so that the two first conveyor belts 11 can move synchronously.The feeding device is a device widely used in coating equipment, and the feeding device is used to supply substrate 100.

[0034] The second conveyor belt 12 is used to be connected with external discharging device, so that the substrate 100 on the second conveyor belt 12 can be transmitted to discharging device for material collection.The second conveyor belt 12 can be provided with multiple, and the number of second conveyor belt 12 is the same as the number of first conveyor belt 11, and multiple second conveyor belts 12 can be used together to support and convey substrate 100.In the embodiment, the second conveyor belt 12 can be specifically provided with two, and the two second conveyor belts 12 are driven by the same driving member, so that the two second conveyor belts 12 can move synchronously.The discharging device is a device widely used in coating equipment, and the discharging device is used to receive substrate 100.

[0035] The suction cup 2 moves cyclically between the first conveying belt 11, the coating position, and the second conveying belt 12. Specifically, the suction cup 2 can adsorb and fix the substrate 100 on the first conveying belt 11, and then the suction cup 2 drives the substrate 100 to move to the coating position, so that the external coating head can perform coating processing on the substrate 100. After the coating is completed, the substrate 100 can be moved to the second conveying belt 12 under the driving of the suction cup 2, and the second conveying belt 12 transports the substrate 100 to the unloading device. The coating position is the position required by the suction cup 2 carrying the substrate 100 when the substrate 100 is coated in the coating equipment using the substrate conveying device.

[0036] To reduce the volume of the substrate conveying device, at least a part of the conveying belt 1 is located on the moving path of the suction cup 2. Specifically, only at least a part of the first conveying belt 11 can be located on the moving path of the suction cup 2, or only at least a part of the second conveying belt 12 can be located on the moving path of the suction cup 2, or at least a part of the first conveying belt 11 and at least a part of the second conveying belt 12 are located on the moving path of the suction cup 2, respectively. As a preferred embodiment, a part of the first conveying belt 11 and a part of the second conveying belt 12 are located on the moving path of the suction cup 2, respectively, and the part of the first conveying belt 11 used for connecting with the loading device and the part of the second conveying belt 12 used for connecting with the unloading device are not located on the moving path of the suction cup 2.

[0037] By locating at least a part of the conveying belt 1 on the moving path of the suction cup 2, compared with the prior art in which the entire conveying belt 1 is located outside the moving path of the suction cup 2, the conveying belt 1 of the present application is only partially located outside the moving path of the suction cup 2 or not located outside the moving path of the suction cup 2 at all, effectively reducing the volume of the substrate conveying device. In addition, by locating at least a part of the conveying belt 1 on the moving path of the suction cup 2, the path of the conveying belt 1 for transporting the substrate 100 partially coincides with the moving path of the suction cup 2, which can reduce the length of the transmission path of the substrate 100 in the substrate conveying device and improve the conveying efficiency of the substrate conveying device.

[0038] Referring to Figures 2 to 4 To avoid interference between the suction cup 2 and the conveying belt 1 during movement, the suction cup 2 is provided with a receiving groove 21 for accommodating the conveying belt 1. When the suction cup 2 moves along the moving path to coincide with the conveying belt 1, the receiving groove 21 of the suction cup 2 accommodates the part of the conveying belt 1 that coincides with the suction cup 2 on the moving path, while the solid part of the suction cup 2 is separated from the conveying belt 1, thereby avoiding interference between the suction cup 2 and the conveying belt 1. The receiving groove 21 of the suction cup 2 can be recessed from the adsorption surface 22 of the suction cup 2. For example, the top surface of the suction cup 2 forms the adsorption surface 22 for adsorbing the substrate 100, and the receiving groove 21 is recessed from the top surface of the suction cup 2 towards the bottom surface of the suction cup 2.

[0039] In order to accommodate the conveying belt 1 in the accommodation groove 21, the accommodation groove 21 can extend through the suction plate 2 along the conveying direction of the conveying belt 1, and the width of the accommodation groove 21 can be greater than the width of the conveying belt 1, and the height of the accommodation groove 21 can be greater than the height of the conveying belt 1. The height of the conveying belt 1 is the height of the overall profile formed by the conveying belt 1; for example, when the conveying belt 1 forms a waist-shaped profile as a whole, the height of the conveying belt 1 is the height of the waist-shaped profile. When a plurality of conveying belts 1 are provided, the width of the accommodation groove 21 is greater than the width of any one of the conveying belts 1, and the length of the accommodation groove 21 is greater than the length of any one of the conveying belts 1.

[0040] When the first conveying belt 11 and the second conveying belt 12 are both provided in a plurality, the suction plate 2 can be provided with a plurality of accommodation grooves 21, and the number of the accommodation grooves 21 on the suction plate 2 is the same as the number of the first conveying belts 11. Each accommodation groove 21 is used to accommodate a corresponding first conveying belt 11 when the suction plate 2 moves along the movement path to coincide with the first conveying belt 11, and is used to accommodate a corresponding second conveying belt 12 when the suction plate 2 moves along the movement path to coincide with the second conveying belt 12.

[0041] In the present embodiment, the first conveying belt 11 and the second conveying belt 12 can be provided in two respectively, and the suction plate 2 is provided with two accommodation grooves 21, and the two accommodation grooves 21 are spaced apart from each other, so that the two spaced-apart accommodation grooves 21 can be used to accommodate two spaced-apart first conveying belts 11 or two spaced-apart second conveying belts 12. Among them, the suction plate 2 forms a "W" shaped structure, and the structure and size of the first conveying belt 11 and the second conveying belt 12 can be the same or similar.

[0042] The suction plate 2 can ascend from below the first conveying belt 11 towards the first conveying belt 11, and the suction surface 22 of the suction plate 2 is in contact with the substrate 100 on the first conveying belt 11, so that the suction plate 2 can adsorb the substrate 100 on the first conveying belt 11. Then the suction plate 2 can move along the conveying direction of the first conveying belt 11, so that the suction plate 2 gradually separates from the first conveying belt 11 (i.e. the suction plate 2 and the first conveying belt 11 do not coincide along the movement path), and the suction plate 2 moves to the coating position for coating after separating from the first conveying belt 11, and the coated suction plate 2 can move towards the second conveying belt 12. Specifically, the suction plate 2 moves to the position where the suction surface 22 is flush with or higher than the upper surface of the second conveying belt 12, and the accommodation groove 21 of the suction plate 2 is at the same height as the corresponding second conveying belt 12, at this time, the suction plate 2 can move from one side of the second conveying belt 12 towards the second conveying belt 12 and coincide with the second conveying belt 12 along the movement path, when the substrate 100 on the suction plate 2 is placed above the second conveying belt 12, the suction plate 2 can be lowered and the adsorption of the substrate 100 is released, and the substrate 100 can fall onto the second conveying belt 12.

[0043] The suction surface 22 of the suction cup 2 is a surface for adsorbing the substrate 100. The suction surface 22 can be provided with a plurality of suction holes. The suction holes can generate suction force under the action of a vacuum device connected to the suction cup 2, so as to adsorb the substrate 100.

[0044] The suction cup 2 can be moved towards the first conveying belt 11 again, so that the suction cup 2 can move along the moving path in a circulating manner. A plurality of suction cups 2 can be provided, and the plurality of suction cups 2 can be arranged in sequence on the moving path. The plurality of suction cups 2 can move along the moving path in a circulating manner respectively, so as to improve the efficiency of the substrate conveying device in conveying the substrate 100.

[0045] With reference to Figure 1 and Figure 2 The driving assembly 3 is used for driving the suction cup 2 to move, so that the suction cup 2 can move along a predetermined moving path in a circulating manner between the first conveying belt 11, the coating position and the second conveying belt 12. The driving assembly 3 can be indirectly connected to the suction cup 2 to drive the suction cup 2 to move. Specifically, the driving assembly 3 is connected to the support table 23 and is used for driving the support table 23 to move. The support table 23 is used for supporting the suction cup 2 and keeping the position of the suction cup 2 relatively fixed. The driving assembly 3 is connected to the suction cup 2 through the support table 23. When the driving assembly 3 drives the support table 23 to move, the support table 23 can drive the suction cup 2 to move synchronously. When a plurality of suction cups 2 are provided, a plurality of driving assemblies 3 and support tables 23 can be provided respectively. Each driving assembly 3 is connected to one suction cup 2 through one support table 23, and is used for driving the corresponding suction cup 2 to move.

[0046] In the substrate conveying device, the first conveying belt 11 is located above, and the second conveying belt 12 is located below. When the suction cup 2 adsorbs the substrate 100 on the first conveying belt 11 and moves towards the coating position, the suction cup 2 moves above. When the suction cup 2 places the substrate 100 on the second conveying belt 12 and moves towards the first conveying belt 11, the suction cup 2 moves below. When a plurality of suction cups 2 are provided, some of the suction cups 2 can move above while some of the suction cups 2 move below. In order to avoid interference between the suction cups 2 in the upper layer and the suction cups 2 in the lower layer during movement, the driving assembly 3 drives the suction cup 2 to move along the vertical direction with a maximum displacement greater than the height of the suction cup 2 and the corresponding support table 23. Therefore, the suction cup 2 located above and the corresponding support table 23 can be spaced apart from the suction cup 2 located below and the corresponding support table 23 along the vertical direction. At this time, the horizontal movement of the suction cups 2 in the upper and lower layers can not be disturbed, and interference between the suction cups 2 in the upper and lower directions during movement can be avoided.

[0047] The driving assembly 3 can specifically include a first driving group 31 and a second driving group 32. The first driving group 31 includes a sliding block 311 in sliding fit with the guide rail 4 and a driving member for driving the sliding block 311 to move. The driving member drives the sliding block 311 to slide relative to the extension direction of the guide rail 4, which can specifically be in the first direction. The second driving group 32 is installed on the sliding block 311 of the first driving group 31, so that the second driving group 32 can move synchronously with the sliding block 311. The second driving group 32 is connected with the support table 23 and is used to drive the support table 23 to move in the second direction, so that the support table 23 and the suction cup 2 can realize movement in the first direction and the second direction under the driving of the driving assembly 3. The first direction is the horizontal direction and the second direction is the vertical direction, or the first direction is the vertical direction and the second direction is the horizontal direction. In the embodiment, the first direction is specifically the horizontal direction and the second direction is specifically the vertical direction. The driving manner of the driving member in the first driving group 31 to drive the sliding block 311 to move and the driving manner of the second driving group 32 to drive the support table 23 to move are common driving manners, and thus will not be described here.

[0048] When the driving assembly 3 and the suction cup 2 are correspondingly provided with a plurality of driving assemblies 3, the sliding blocks 311 in the plurality of driving assemblies 3 can be in sliding fit with one guide rail 4. Alternatively, the guide rail 4 is provided with two guide rails 4, and the sliding blocks 311 in part of the driving assemblies 3 are in sliding fit with one guide rail 4, and the sliding blocks 311 in the rest of the driving assemblies 3 are in sliding fit with the other guide rail 4. In the embodiment, to avoid mutual interference when the plurality of driving assemblies 3 move in fit with the same guide rail 4, the plurality of driving assemblies 3 are in fit with two guide rails 4.

[0049] Although the embodiments of the utility model have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary and cannot be understood as limiting the utility model. The ordinary skilled in the art can change, modify, replace and transform the above-mentioned embodiments without departing from the principles and purposes of the utility model in the range of the utility model, and all these changes should belong to the protection range of the utility model claim.

Claims

1. A substrate transport apparatus, characterized by, The application relates to a conveying device for conveying a substrate (100), comprising: a conveying belt (1) for conveying the substrate (100); a suction disc (2) for sucking the substrate (100), the suction disc (2) being provided with a receiving groove (21) for receiving the conveying belt (1); and a driving assembly (3) for driving the suction disc (2) to move along a predetermined moving path; wherein at least a part of the conveying belt (1) is located on the moving path of the suction disc (2), when the suction disc (2) coincides with the conveying belt (1) on the moving path, the part of the conveying belt (1) coinciding with the suction disc (2) is received in the receiving groove (21) of the suction disc (2), so as to avoid interference between the suction disc (2) and the conveying belt (1). The suction disc (2) is provided with a suction surface (22) for sucking the substrate (100), the receiving groove (21) is recessed from the suction surface (22), and the receiving groove (21) penetrates through the suction disc (2) along the conveying direction of the conveying belt (1). The width of the receiving groove (21) is greater than the width of the conveying belt (1), and the height of the receiving groove (21) is greater than the height of the conveying belt (1). The conveying belt (1) is provided with a plurality of conveying belts (1), wherein at least one first conveying belt (11) and at least one second conveying belt (12) are included in the plurality of conveying belts (1), the suction disc (2) sucks the substrate (100) on the first conveying belt (11), and the suction disc (2) is used for conveying the substrate (100) to the second conveying belt (12). The first conveying belt (11) and the second conveying belt (12) are respectively provided with a plurality of first conveying belts (11) and a plurality of second conveying belts (12), the number of the first conveying belts (11) is the same as that of the second conveying belts (12), and the suction disc (2) is provided with a same number of receiving grooves (21) as the first conveying belts (11); each receiving groove (21) is used for receiving a corresponding first conveying belt (11) and a corresponding second conveying belt (12).

2. The substrate transport apparatus of claim 1, wherein, The first conveying belt (11) and the second conveying belt (12) are each provided with two first conveying belts (11) and two second conveying belts (12), and the two first conveying belts (11) and the two second conveying belts (12) are respectively used for supporting and conveying the substrate (100) together.

3. The substrate transport apparatus of claim 2, wherein, The suction disc (2) is provided with two receiving grooves (21), and the suction disc (2) has a "W" type structure.

4. The substrate transport apparatus of claim 1, wherein, The suction disc (2) and the driving assembly (3) are respectively provided with a plurality of driving assemblies (3) and correspond to each other one by one, each driving assembly (3) is used for driving one suction disc (2) to move, and a plurality of suction discs (2) are spaced apart and sequentially moved along a moving path.

5. The substrate transport apparatus of claim 4, wherein, The application further comprises a supporting table (23) for supporting the suction disc (2), the supporting table (23) is connected with the driving assembly (3) and is driven by the driving assembly (3), and the supporting table (23) drives the suction disc (2) to move synchronously.

6. The substrate transport apparatus of claim 5, wherein, The maximum displacement of the driving assembly (3) in the vertical direction for driving the supporting table (23) and the suction disc (2) is greater than the height of the whole formed by the suction disc (2) and the corresponding supporting table (23). ​ 7. The substrate transport apparatus of claim 1, wherein, ​ 8. The substrate transport apparatus of claim 7, wherein, ​ ​ 9. The substrate transport apparatus of claim 8, wherein, The driving assembly (3) comprises a first driving group (31) and a second driving group (32), the first driving group (31) comprises a sliding block (311) connected with the guide rail (4) and a driving member for driving the sliding block (311) to move in the first direction; the second driving group (32) is connected with the sliding block (311) and the support table (23) respectively, and the second driving group (32) is used for driving the support table (23) to move in the second direction. The first direction is a horizontal direction, and the second direction is a vertical direction; or the first direction is a vertical direction, and the second direction is a horizontal direction.

10. The substrate transport apparatus of claim 9, wherein, The guide rail (4) is provided with two, and each guide rail (4) is in sliding fit with a part of the sliding blocks (311) in the driving assemblies (3).

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