Radio frequency feed-in device for PECVD reaction cavity and PECVD equipment

Abstract

The utility model provides a radio frequency feed-in device for a PECVD (plasma enhanced chemical vapor deposition) reaction cavity and PECVD equipment. The radio frequency feed-in device for the PECVD reaction cavity penetrates through a vacuum cavity wall from an atmosphere side to enter a vacuum side, sequentially comprises a conductive core shaft, an insulating layer and a shielding layer which are coaxially arranged from inside to outside, and further comprises a corrugated pipe arranged on the outer side of the shielding layer, the first end of the corrugated pipe is fixed on the lower side of the top end of the shielding layer, and the second end is fixed on the wall of the vacuum cavity from the atmosphere side. According to the utility model, the structure dislocation of the radio frequency feed-in device and the vacuum damage of the PECVD reaction cavity caused by high-temperature thermal expansion can be avoided, and the sparking discharge caused by the pressure change of the outer cavity can be avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of photovoltaic manufacturing, especially relates to a radio frequency feedthrough device for PECVD reaction cavity and PECVD equipment. BACKGROUND

[0002] In the manufacture of heterojunction solar cells, PECVD process needs to be carried out by a plasma enhanced chemical vapor deposition (PECVD) device to deposit P-type amorphous microcrystalline silicon, N-type amorphous microcrystalline silicon and intrinsic I-type amorphous microcrystalline silicon films on a silicon wafer.

[0003] In order to enable the PECVD reaction cavity to accommodate more silicon wafers at the same time, the carrier plate carrying the silicon wafers is changed from a horizontal state to a vertical state, and the photovoltaic device cavity vertically conveying the carrier plate is usually provided with a plurality of vertically arranged radio frequency electrode plates, and a plurality of radio frequency feedthrough devices are needed to feed the radio frequency power from the atmospheric side.

[0004] The radio frequency feedthrough device in the prior art is a conductive core shaft, an insulating layer and a shielding layer arranged coaxially from the inside to the outside, the shielding layer is connected with the vacuum cavity wall and the connection is fixed, thermal deformation can cause structural misalignment, and severe thermal deformation can even cause vacuum damage. In addition, the PECVD reaction cavity in the prior art includes an inner cavity and an outer cavity arranged in a nested manner, and the structural misalignment of the radio frequency feedthrough device caused by thermal deformation can cause the pressure of the outer cavity to change, and the change of the pressure of the outer cavity can cause sparking and discharge.

[0005] Therefore, how to provide a radio frequency feedthrough device for a PECVD reaction cavity and a PECVD equipment to avoid structural misalignment of the radio frequency feedthrough device caused by high-temperature thermal expansion and vacuum damage of the PECVD reaction cavity, and to avoid sparking and discharge caused by changes in the pressure of the outer cavity, has become a technical problem to be solved in the industry. SUMMARY

[0006] In view of the above problems of the prior art, the utility model provides a radio frequency feedthrough device for a PECVD reaction cavity, which enters the vacuum side through the vacuum cavity wall from the atmospheric side and includes a conductive core shaft, an insulating layer and a shielding layer arranged coaxially from the inside to the outside, and the PECVD reaction cavity radio frequency feedthrough device further includes a bellows arranged outside the shielding layer, a first end of the bellows is fixed below the top end of the shielding layer, and a second end of the bellows is fixed on the vacuum cavity wall from the atmospheric side.

[0007] In an embodiment, the bellows is a welded bellows, the length of the welded bellows ranges from 110 mm to 130 mm, the compressed length ranges from 90 mm to 110 mm, and the diameter ranges from 25 mm to 35 mm.

[0008] In an embodiment, the bellows comprises a tube body, a first flange, a second flange, and a support, the first flange and the second flange are respectively located at both ends of the tube body, and the support is located outside the tube body and between the first flange and the second flange.

[0009] In an embodiment, the radio frequency feeding device further comprises a cover plate and a plurality of first fasteners, the shielding layer forms a third flange at the top end, and the plurality of first fasteners pass through the cover plate, the third flange, and the first flange arranged in layers from top to bottom, so as to fixedly connect the cover plate, the shielding layer, and the bellows.

[0010] In an embodiment, the insulating layer is a Teflon PTFE layer.

[0011] In an embodiment, the shielding layer is a metal alloy layer capable of shielding electromagnetic radiation, and the conductive core shaft and the shielding layer are respectively connected with a live wire and a ground wire of a radio frequency power supply.

[0012] In an embodiment, the shielding layer is an aluminum alloy layer.

[0013] In an embodiment, the first end of the conductive core shaft on the atmospheric side is one of a male head protrusion and a female head recess, and the second end on the vacuum side is the other one of the male head protrusion and the female head recess.

[0014] The utility model discloses still a kind of PECVD equipment, it includes PECVD reaction cavity and multiple radio frequency feeding devices from atmospheric side through the vacuum cavity wall of PECVD reaction cavity into vacuum side, the radio frequency feeding device is as any one described above for the radio frequency feeding device of PECVD reaction cavity.

[0015] In an embodiment, the PECVD reaction cavity comprises a plurality of radio frequency electrode plates, and the second end of the conductive core shaft of the radio frequency feeding device is connected to the top of the plurality of radio frequency electrode plates.

[0016] Compared with the fixed connection of radio frequency feeding device and vacuum cavity wall in the prior art, which is easy to cause thermal deformation structure misplacement, the radio frequency feeding device for PECVD reaction cavity of the utility model passes through the vacuum cavity wall from the atmospheric side into the vacuum side, and sequentially comprises a conductive core shaft, an insulating layer and a shielding layer arranged coaxially from inside to outside, the PECVD reaction cavity radio frequency feeding device further comprises a bellows arranged outside the shielding layer, the first end of the bellows is fixed below the top end of the shielding layer, and the second end is fixed on the vacuum cavity wall from the atmospheric side. The utility model can avoid the structure misplacement of radio frequency feeding device caused by high-temperature thermal expansion and the vacuum damage of PECVD reaction cavity, and avoid the spark discharge caused by the change of outer cavity pressure. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above features and advantages of the present application will be better understood by reading the detailed description of the embodiments of the present application in conjunction with the following drawings, in which: In the drawings, the components are not necessarily drawn to scale, and components of similar or identical function or components having similar or identical features can have the same or similar reference characters.

[0018] Figure 1 The above features and advantages of the present application will be better understood by reading the detailed description of the embodiments of the present application in conjunction with the following drawings, in which: In the drawings, the components are not necessarily drawn to scale, and components of similar or identical function or components having similar or identical features can have the same or similar reference characters.

[0019] Figure 2 The above features and advantages of the present application will be better understood by reading the detailed description of the embodiments of the present application in conjunction with the following drawings, in which: In the drawings, the components are not necessarily drawn to scale, and components of similar or identical function or components having similar or identical features can have the same or similar reference characters. DETAILED DESCRIPTION

[0020] The above features and advantages of the present application will be better understood by reading the detailed description of the embodiments of the present application in conjunction with the following drawings, in which: In the drawings, the components are not necessarily drawn to scale, and components of similar or identical function or components having similar or identical features can have the same or similar reference characters.

[0021] In the description of the present application, it should be noted that unless specifically stated and limited otherwise, the terms "mounting", "connected", "connecting" should be understood broadly, for example, can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, can be electrically connected; can be directly connected, can be indirectly connected through an intermediate medium, or can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0022] In addition, in the following description, "up", "down", "left", "right", "top", "bottom", "horizontal", "vertical" should be understood as the orientation shown in the paragraph and the related drawings. Such relative terms are only used for convenience of description, and do not mean that the device described thereby needs to be manufactured or operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0023] It is to be understood that, although the terms "first", "second", "third", and the like can be used herein to describe various components, regions, layers and / or sections, these components, regions, layers and / or sections should not be limited by these terms. These terms are only used to distinguish one component, region, layer and / or section from another. Thus, a first component, region, layer and / or section discussed below could be termed a second component, region, layer and / or section without departing from the scope of some embodiments of the present application.

[0024] Referring to Figure 1 and Figure 2 , which are respectively a perspective view and a sectional view of a component structure of a radio frequency feeding device for a PECVD reaction chamber according to an embodiment of the present application. As shown in Figure 1 and Figure 2 , the radio frequency feeding device 1 for a PECVD reaction chamber according to the present application penetrates a vacuum chamber wall from an atmospheric side to a vacuum side, and comprises, from inside to outside, a conductive core shaft 10, an insulating layer 11, a shielding layer 12, a bellows 13, a cover plate 14, a plurality of first fasteners 15 and a plurality of second fasteners 16 arranged coaxially. The bellows 13 is arranged outside the shielding layer 12, and a first end of the bellows 13 is fixed to a lower side of a top end of the shielding layer 12, and a second end of the bellows 13 is fixed to the vacuum chamber wall from the atmospheric side. The plurality of first fasteners 15 and the plurality of second fasteners 16 can be bolts or screws.

[0025] The radio frequency feeding device 1 is provided with a first end and a second end corresponding to the atmospheric side S1 and the vacuum side S2 respectively, and the conductive core shaft 10 is one of a male protrusion and a female groove at the first end 100 at the atmospheric side S1, and is the other of the male protrusion and the female groove at the second end 102 at the vacuum side S2. In this embodiment, the first end 100 of the conductive core shaft 10 is the male protrusion, and the second end 102 is the female groove.

[0026] The bellows 13 comprises a tube body 130, a first flange 132, a second flange 134 and a bracket 136, the first flange 132 and the second flange 134 are respectively arranged at both ends of the tube body 130, and the bracket 136 is arranged outside the tube body 130 and between the first flange 132 and the second flange 134. The bellows 13 further comprises a plurality of third fasteners 138 for fixing the bracket 136 to the second flange 134. The bellows 13 can be a welded bellows, the length of the welded bellows ranges from 110 mm to 130 mm, the compressed length ranges from 90 mm to 110 mm, and the diameter ranges from 25 mm to 35 mm.

[0027] The shielding layer 12 forms a third flange 120 at the top end, and the plurality of first fasteners 15 pass through the cover plate 14, the third flange 120 and the first flange 132 arranged in layers from top to bottom, so as to fixedly connect the cover plate 14, the shielding layer 12 and the corrugated pipe 13. The insulating layer 11 is a Teflon PTFE layer. The shielding layer 12 is a metal alloy layer capable of shielding electromagnetic radiation, and the conductive core shaft 10 and the shielding layer 12 are respectively connected with a live wire and a ground wire of a radio frequency power supply. The shielding layer 12 can be an aluminum alloy layer, or other metal alloy layers commonly used in the industry.

[0028] The radio frequency feeding device 1 shown in Figure 1 and Figure 2 Before the radio frequency feeding device 1 is used, the conductive core shaft 10, the insulating layer 11, the shielding layer 12 and the corrugated pipe 13 are coaxially arranged, then the cover plate 14 is covered on the third flange 120 of the shielding layer 12, and then the conductive core shaft 10, the insulating layer 11, the shielding layer 12 and the corrugated pipe 13 are fixedly connected through the plurality of first fasteners 15, then the second end of the radio frequency feeding device 1 passes through the vacuum cavity wall to be arranged in the vacuum side S2, and then the second flange 134 is fixed on the vacuum cavity wall through the plurality of second fasteners 16. When the PECVD reaction chamber performs the PECVD process, it is heated to 180-250 degrees Celsius, and the thermal expansion or thermal deformation is absorbed by the corrugated pipe 13, so as to avoid structural misplacement of the radio frequency feeding device 1, avoid vacuum damage of the PECVD reaction chamber caused by structural misplacement, and avoid fire discharge caused by pressure change of the outer cavity.

[0029] The utility model discloses a kind of PECVD equipment, it includes PECVD reaction chamber and a plurality of radio frequency feeding device from atmospheric side into vacuum side through the vacuum cavity wall of PECVD reaction chamber, the radio frequency feeding device is as shown in Figure 1 and Figure 2 The radio frequency feeding device 1 for PECVD reaction chamber. The PECVD reaction chamber includes a plurality of radio frequency electrode plates, and the second end of the conductive core shaft of the radio frequency feeding device is connected with the top of the plurality of radio frequency electrode plates. The PECVD reaction chamber includes nested inner and outer cavities, and the top of the plurality of radio frequency electrode plates can be fixed on the inner cavity wall. The vacuum cavity wall of the utility model is the outer cavity wall.

[0030] In summary, the radio frequency feeding device for the PECVD reaction cavity of the utility model, from the atmospheric side through the vacuum cavity wall into the vacuum side, and from inside to outside in turn including coaxially arranged conductive core shaft, insulating layer and shielding layer, the PECVD reaction cavity radio frequency feeding device still includes the bellows of setting in the shielding layer outside, the first end of the bellows is fixed in the shielding layer top downside, and its second end is fixed on the vacuum cavity wall from the atmospheric side.

[0031] The foregoing description of the present disclosure has been provided for the purposes of enabling any person skilled in the art to make or use the present disclosure. Various modifications to the present disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the present disclosure is not intended to be limited to the examples described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein. The above embodiments are provided to persons skilled in the art to realize or use the utility model, and persons skilled in the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the utility model, so the protection scope of the utility model is not limited by the above embodiments, but should be the maximum scope consistent with the innovative features mentioned in the claims.

Claims

1. A radio frequency feed device for a PECVD reaction chamber, which enters the vacuum side from the atmospheric side through the vacuum chamber wall, and sequentially comprises, from the inside to the outside, a coaxially arranged conductive mandrel, an insulating layer, and a shielding layer, characterized in that, The PECVD reaction chamber radio frequency feed device also includes a bellows disposed outside the shielding layer. The first end of the bellows is fixed to the lower side of the top of the shielding layer, and the second end is fixed to the vacuum chamber wall from the atmospheric side.

2. The radio frequency feed device for a PECVD reaction chamber according to claim 1, characterized in that, The corrugated pipe is a welded corrugated pipe with a length range of 110-130mm, a compressed length range of 90mm-110mm, and a diameter range of 25-35mm.

3. The radio frequency feed device for a PECVD reaction chamber according to claim 1 or 2, characterized in that, The corrugated pipe includes a pipe body, a first flange, a second flange, and a support. The first flange and the second flange are located at both ends of the pipe body, and the support is located outside the pipe body and between the first flange and the second flange.

4. The radio frequency feed device for a PECVD reaction chamber according to claim 3, characterized in that, The radio frequency feed device also includes a cover plate and a plurality of first fasteners. The shielding layer forms a third flange at the top. The plurality of first fasteners pass through the cover plate, the third flange and the first flange stacked on top of each other to fix the cover plate, the shielding layer and the bellows together.

5. The radio frequency feed device for a PECVD reaction chamber according to claim 1, characterized in that, The insulating layer is a Teflon PTFE layer.

6. The radio frequency feed device for a PECVD reaction chamber according to claim 1, characterized in that, The shielding layer is a metal alloy layer capable of shielding electromagnetic radiation, and the conductive core and the shielding layer are respectively connected to the live wire and the ground wire of the radio frequency power supply.

7. The radio frequency feed device for a PECVD reaction chamber according to claim 6, characterized in that, The shielding layer is an aluminum alloy layer.

8. The radio frequency feed device for a PECVD reaction chamber according to claim 1, characterized in that, The conductive mandrel has one of a male protrusion and a female groove at its first end on the atmospheric side, and the other of a male protrusion and a female groove at its second end on the vacuum side.

9. A PECVD apparatus, comprising a PECVD reaction chamber and a plurality of radio frequency feed devices that enter the vacuum side from the atmospheric side through the vacuum chamber wall of the PECVD reaction chamber, characterized in that, The radio frequency feed device is the radio frequency feed device for a PECVD reaction chamber as described in any one of claims 1 to 8.

10. The PECVD equipment according to claim 9, characterized in that, The PECVD reaction chamber includes multiple radio frequency electrode plates, and the second end of the conductive mandrel of the radio frequency feed device is connected to the top of the multiple radio frequency electrode plates in a concave-convex manner.

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