Base assembly

Abstract

The utility model discloses a base assembly, and relates to the semiconductor processing equipment field, the base assembly comprises a flow channel block provided with a flow channel and a processing hole communicated with the flow channel, the inner wall of the processing hole comprises a first sealing part and a second sealing part, the inner diameter of the first sealing part is larger than the inner diameter of the second sealing part; the sealing piece comprises a body and a sealing convex part arranged on one side of the body in the axial direction, the side wall of the body abuts against the first sealing part in a sealed mode, and the sealing convex part abuts against the second sealing part in a sealed mode. The base assembly provided by the technical scheme of the utility model can improve the sealing effect and avoid leakage.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a base assembly. BACKGROUND

[0002] IGS comprehensive gas circuit is the core component of semiconductor equipment ultra-pure gas delivery, and its structure comprises a flow controller MFC, a gas passage flow channel block, a metal sealing gasket, different types of valve bodies, screws and a base, which are combined into an integrated system. The disadvantage of IGS is that multiple parts are assembled and combined into a one-way linear gas flow channel, and the two are not interfered with each other. The upgraded version adopts an integrated flow channel block processing, which contains a multi-directional gas flow channel, and the flow channel can be double-interpenetrated, or the tower bridge method can be used to penetrate the flow channel. The machining process is more complex, and the staggered flow channel combination is formed by drilling, milling and reaming from all directions, and after completion, the excess gas holes are sealed and welded by using sealing sheets according to the flow channel design.

[0003] At present, the sealing contact surface between the sealing sheet and the flow channel block is limited, and the sealing property of the two is easily affected by welding assembly process or human operation and other factors, and leakage is prone to occur. CONTENT OF THE UTILITY MODEL

[0004] The main purpose of the utility model is to provide a base assembly, which aims to solve the technical problem that the sealing sheet and the flow channel block are prone to leakage.

[0005] To achieve the above-mentioned purpose, the base assembly provided by the utility model comprises:

[0006] The flow channel block is provided with a flow channel and a processing hole in communication with the flow channel, the inner wall of the processing hole comprises a first sealing part and a second sealing part, the inner diameter of the first sealing part is greater than that of the second sealing part; and

[0007] The sealing piece comprises a body and a sealing protrusion provided on one side of the body in the axial direction, the side wall of the body is in sealing abutment with the first sealing part, and the sealing protrusion is in sealing abutment with the second sealing part.

[0008] In an embodiment, the inner wall of the processing hole is provided with a first step surface, one side of the first step surface is connected with the first sealing part, and the other side is connected with the second sealing part, the body is provided with a first sealing surface, one side of the first sealing surface is connected with the edge of the body, and the other side is connected with the sealing protrusion, and the first sealing surface is used for sealing abutment with the first step surface.

[0009] In an embodiment, the outer side wall of the sealing protrusion is provided with a second sealing surface, and the second sealing surface is in sealing abutment with the second sealing part.

[0010] In an embodiment, the peripheral wall of the body comprises a first segment and a second segment, and both the first segment and the second segment are arc surfaces.

[0011] In an embodiment, the peripheral wall of the body further comprises a third segment and a fourth segment, both ends of the third segment and the fourth segment are connected to the first segment and the second segment respectively.

[0012] In an embodiment, the inner wall of the processing hole is further provided with a second stepped surface, the second stepped surface is located on the side of the second sealing part away from the first stepped surface, one end of the sealing protrusion away from the body is provided with a third sealing surface, and the third sealing surface is in sealing abutment with the second stepped surface.

[0013] In an embodiment, both ends of the first segment correspond to the connection of both ends of the second segment, and a circular contour is formed around.

[0014] In an embodiment, the edge of the first stepped surface close to the center of the processing hole is provided with a chamfer.

[0015] In an embodiment, the body and the flow channel block are welded.

[0016] In an embodiment, the sealing protrusion is configured as a sealing ring.

[0017] The technical scheme of the utility model discloses a sealing element and a processing hole are sealed to connect, so that the gas in the base assembly flows through the corresponding flow channel, and the sealing element can also avoid leakage of the flow channel, and ensure the sealing property of the flow channel. Specifically, the sealing protrusion is arranged on one side of the sealing element body, the side wall of the body is in sealing abutment with the first sealing part of the inner wall of the processing hole, and the sealing protrusion is in sealing abutment with the second sealing part. Compared with the prior art, the sealing element is connected with the corresponding part of the inner wall of the processing hole at different positions, the sealing area between the sealing element and the processing hole is increased, and the sealing property of the flow channel can be improved, and leakage can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed in the embodiment or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings from the structures shown in the drawings without creating any creative labor.

[0019] Figure 1 The cross-sectional structure schematic diagram of the base assembly provided by the utility model is an embodiment.

[0020] Figure 2The angle structure schematic view of the sealing element of the base assembly one embodiment provided by the utility model is shown in the figure.

[0021] Figure 3 The angle structure schematic view of the sealing element of the base assembly one embodiment provided by the utility model is shown in the figure.

[0022] Figure 4 The cross section structure schematic view of the sealing element of the base assembly one embodiment provided by the utility model is shown in the figure.

[0023] Figure 5 The cross section structure schematic view of the flow channel block of the base assembly one embodiment provided by the utility model is shown in the figure.

[0024] Figure 6 The structure schematic view of the base assembly another embodiment provided by the utility model is shown in the figure.

[0025] Figure 7 The angle structure schematic view of the sealing element of the base assembly another embodiment provided by the utility model is shown in the figure.

[0026] Figure 8 The angle structure schematic view of the sealing element of the base assembly another embodiment provided by the utility model is shown in the figure.

[0027] Figure 9 The cross section structure schematic view of the sealing element of the base assembly another embodiment provided by the utility model is shown in the figure.

[0028] Figure 10 The cross section structure schematic view of the flow channel block of the base assembly another embodiment provided by the utility model is shown in the figure.

[0029] Explanation of the figure mark:

[0030] 100, flow channel block; 110, flow channel; 120, processing hole; 121, first sealing part; 122, second sealing part; 123, first step surface; 124, second step surface;

[0031] 200, sealing element; 210, body, 211, first sealing surface; 212, first section, 213, second section; 214, third section; 215, fourth section; 220, sealing convex part; 221, second sealing surface; 222, third sealing surface.

[0032] The realization, functional characteristics and advantages of the utility model will be further explained by combining with the embodiments and referring to the drawings. Specific implementation

[0033] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described, obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0034] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative positional relationship, movement condition, etc. between the components in a certain posture, and if the certain posture changes, the directional indications will also change accordingly.

[0035] In addition, if the embodiments of the present application involve descriptions of "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include at least one of the features. In addition, "and / or" or "and / or" appearing throughout the text means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B simultaneously satisfy the scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of the ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the scope of protection required by the present application.

[0036] In the prior art, the sealing contact surface between the sealing sheet and the flow channel block is limited, and the sealing property of the assembly of the two is easily affected by welding assembly process or human operation and other factors, and leakage is prone to occur. The traditional sealing sheet is a flat sheet structure, which is directly welded and fixed with the flow channel block, and is easily affected by human factors to cause poor assembly process, there is a serious gap between the sealing sheet and the flow channel block, and the welding cannot be filled, and leakage is prone to occur.

[0037] The utility model provides a base assembly.

[0038] Please refer to Figures 1 to 10In an embodiment of the utility model, the base assembly comprises: a flow channel block 100 and a sealing piece 200, wherein the flow channel block 100 is provided with a flow channel 110 and a processing hole 120 communicated with the flow channel 110, the inner wall of the processing hole 120 comprises a first sealing part 121 and a second sealing part 122, the inner diameter of the first sealing part 121 is larger than that of the second sealing part 122; the sealing piece 200 comprises a body 210 and a sealing protruding part 220 arranged on one side of the body 210 in the axial direction, the side wall of the body 210 is sealed and abuts against the first sealing part 121, and the sealing protruding part 220 is sealed and abuts against the second sealing part 122.

[0039] It should be noted that according to product requirements, the flow channel block 100 is internally provided with the flow channel 110, and the processing hole 120 is needed to be provided in the processing process, so that the processing hole 120 facilitates the processing of the through flow channel 110, and after the processing of the flow channel 110 is completed, the sealing piece 200 is used to block the processing hole 120, so as to ensure the normal flow of the flow channel 110.

[0040] In the specific implementation process, the sealing piece 200 comprises the body 210 and the sealing protruding part 220, wherein the body 210 is a sheet structure, and the sealing protruding part 220 is arranged on one side of the body 210. The side wall of the sealing protruding part 220 close to the edge of the body 210 has a certain distance from the edge of the body 210 in the radial direction. In order to improve the strength of the sealing piece 200, the sealing protruding part 220 is integrally formed with the body 210. The inner wall of the processing hole 120 is segmented in the axial direction and forms the first sealing part 121 and the second sealing part 122, wherein the inner diameter of the first sealing part 121 is larger than that of the second sealing part 122, and the two are located at different inner diameters.

[0041] In the specific implementation process, the sealing piece 200 is connected with the flow channel block 100 in an interference mode, the sealing piece 200 is pressed into the processing hole 120 by a punch, so that the side wall of the body 210 of the sealing piece 200 is sealed and abuts against the first sealing part 121, and the outer wall of the sealing protruding part 220 close to the edge of the body 210 is sealed and abuts against the second sealing part 122, compared with the traditional single-piece structure of the sealing sheet, the sealing contact area between the sealing piece 200 and the flow channel block 100 can be improved, and the sealing property is improved. It can be understood that the part of the sealing protruding part 220 and the edge of the body 210 is sealed and abuts between the first sealing part 121 and the second sealing part 122, which further improves the sealing contact area between the sealing sheet and the processing hole and improves the sealing property between the two. Further, the body 210 of the sealing piece 200 is also welded with the flow channel block 100, and the vacuum electron beam welding is used in the welding process, so that the body 210 and the flow channel block 100 are fused, which can improve the sealing property and solve the problem of general laser welding metal splashing.

[0042] It also needs to be explained that the sealing element 200 provided by the technical scheme of the utility model is formed by stamping once, and is used for laser-assisted softening of metal stamping, so as to ensure the precision and profile of the sealing convex part 220, and further ensure the dimensional accuracy of the sealing element 200 and the sealing property of cooperation. In the specific implementation process, the traditional numerical control machine tool machining method needs twice clamping to complete from a blank, and the processing time of one sealing piece is about 15 minutes, the stamping forming of the sealing element 200 in the embodiment is about 4 minutes from the blank, feeding, punching, forming, blanking and stamping one welding piece, the advantage is automatic production and ensuring yield, and the productivity is increased by nearly three times. In addition, in the specific implementation process, after mechanical assembly is completed, the helium leakage rate is measured, and the leakage rate is controlled to be lower than 1x 10-9 atm / cc / sec.

[0043] The technical scheme of the utility model seals and connects the sealing element 200 and the processing hole 120, so that the gas flows in the corresponding flow channel 110 in the base assembly, and the sealing element 200 can also avoid leakage of the flow channel 110 and ensure the sealing property of the flow channel 110. Specifically, the sealing convex part 220 is arranged on one side of the body 210 of the sealing element 200, the side wall of the body 210 is sealed and abuts against the first sealing part 121 of the inner wall of the processing hole 120, and the sealing convex part 220 is sealed and abuts against the second sealing part 122, so that, compared with the prior art, the different positions of the sealing element 200 are sealed and connected with the corresponding parts of the inner wall of the processing hole 120, the sealing area between the sealing element 200 and the processing hole is increased, and the sealing property of the flow channel 110 can be improved, so that the leakage condition can be avoided.

[0044] In an embodiment, the inner wall of the processing hole 120 is provided with a first step surface 123, one side of the first step surface 123 is connected with the first sealing part 121, the other side is connected with the second sealing part 122, the body 210 is provided with a first sealing surface 211, one side of the first sealing surface 211 is connected with the edge of the body 210, the other side is connected with the sealing convex part 220, and the first sealing surface 211 is used for sealing and abutting against the first step surface 123.

[0045] In the specific implementation process, the first step surface 123 is located between the first connecting part and the second connecting part, correspondingly, the part of the body 210 corresponding to the edge of the body 210 from the connecting part of the sealing convex part 220 to the body 210 forms the first sealing surface 211, when the sealing element 200 is pressed into the processing hole 120, the first step surface 123 is sealed and abutted against the first sealing surface 211, so as to increase the sealing area between the sealing element 200 and the flow channel block 100 and improve the sealing property.

[0046] In an embodiment, the outer side wall of the sealing convex part 220 is provided with a second sealing surface 221, and the second sealing surface 221 is sealed and abutted against the second sealing part 122.

[0047] In the embodiment, the side of the sealing protrusion 220 facing the edge of the body 210 is an outer side wall, which is configured as a second sealing surface 221 and tightly abuts against the second sealing portion 122. The second sealing portion 122 cooperates with the sealing protrusion 220, so that the sealing protrusion 220 is tightly connected in the machining hole 120.

[0048] In an embodiment, the edge of the first step surface 123 close to the center of the machining hole 120 is provided with a chamfer, which can facilitate the sealing protrusion 220 to enter the machining hole 120 and cooperate with the second sealing portion 122.

[0049] In the embodiment, the sealing protrusion 220 is configured as a sealing ring. Specifically, the sealing ring protrudes from the surface of the body 210 and surrounds the body 210 in the circumferential direction to form a ring structure. The outer peripheral wall of the ring structure is configured to form the second sealing surface 221 and tightly abuts against the second sealing portion 122.

[0050] The outer peripheral wall of the body 210 includes a first section 212 and a second section 213, and both the first section 212 and the second section 213 are arc surfaces.

[0051] Referring to Figures 1 to 5 In an embodiment, both ends of the first section 212 correspond to the connection of both ends of the second section 213, and surround to form a circular profile. Specifically, the two ends of the first section 212 and the second section 213 correspond to the connection, thereby surrounding to form the body 210, and making the cross section of the body 210 in the radial direction circular. It can be understood that the sealing member 200 in the embodiment is applicable to the circular machining hole 120.

[0052] Referring to Figures 6 to 10 In another embodiment, the outer peripheral wall of the body 210 further includes a third section 214 and a fourth section 215, and both ends of the third section 214 and the fourth section 215 are connected to the first section 212 and the second section 213.

[0053] In the embodiment, one end of the first section 212 is connected to the third section 214, the third section 214 is further connected to the second section 213, the second section 213 is connected to the fourth section 215, and the fourth section 215 is connected to the first section 212, thereby surrounding the profile of the body 210. In the embodiment, according to the actual needs of the product, the profile of the body 210 surrounded can be any shape. It can be understood that the machining hole 120 is arranged corresponding to the profile of the body 210. In addition, the profile of the sealing protrusion 220 is adapted to the profile of the machining hole 120 and tightly abuts against, so as to ensure the sealing effect.

[0054] Further, in the embodiment, the inner wall of the machining hole 120 is further provided with a second step surface 124, the second step surface 124 is located on the side of the second sealing part 122 away from the first step surface 123, and the end of the sealing convex part 220 away from the body 210 is provided with a third sealing surface 222, and the third sealing surface 222 is in sealing abutment with the second step surface 124.

[0055] In the specific implementation process, the first step surface 123 and the second step surface 124 are both directed to the outside of the flow channel block 100, the second step surface 124 is in sealing abutment with the third sealing surface 222 of the sealing convex part 220, further increasing the sealing contact area of the sealing part 200 and the flow channel block 100 and improving the sealing effect. Specifically, the third sealing surface 222 of the sealing convex part 220 is in close abutment with the second sealing surface 221, in the assembly process, the body 210 is extruded so that the sealing convex part 220 is extruded to tightly adhere to the second step surface 124, thereby playing a positioning role and further improving the sealing contact area and the sealing effect. In addition, the sealing convex part 220 is extruded, so that the gap between the sealing part 200 and the machining hole is filled, further improving the sealing effect.

[0056] In the specific implementation process, the body 210 is in sealing abutment with the machining hole 120 to form a first layer of sealing, the sealing convex part 220 is in sealing abutment with the machining hole 120 to form a second layer of sealing, the body 210 is sealingly welded with the flow channel block 100 to form a third layer of sealing, thereby ensuring the sealing effect.

[0057] The technical scheme of the utility model adopts the step surface arranged at the machining hole, of course, the step surface does not affect the function of the flow channel 110, cooperates with the sealing surface of the sealing part 200, so as to solve the leakage problem between the sealing part 200 and the flow channel block 100. And the sealing part 200 is produced by cooperating with laser stamping, compared with the traditional mechanical machining process, the efficiency can be improved and the cost can be reduced, the production capacity is doubled and the cost is saved.

[0058] The above-mentioned is only an exemplary embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structural transformation made according to the contents of the utility model specification and drawings, or direct / indirect application in other related technical fields is included in the patent protection range of the utility model.

Claims

1. A base assembly, characterized in that, include: A flow channel block has a flow channel and a machining hole communicating with the flow channel. The inner wall of the machining hole includes a first sealing part and a second sealing part, wherein the inner diameter of the first sealing part is larger than the inner diameter of the second sealing part. as well as A sealing element includes a body and a sealing protrusion disposed on one side of the body in the axial direction. The sidewall of the body is in sealing contact with the first sealing portion, and the sealing protrusion is in sealing contact with the second sealing portion.

2. The base assembly as claimed in claim 1, characterized in that, The inner wall of the machining hole is provided with a first stepped surface. One side of the first stepped surface is connected to the first sealing part and the other side is connected to the second sealing part. The body is provided with a first sealing surface. One side of the first sealing surface is connected to the edge of the body and the other side is connected to the sealing protrusion. The first sealing surface is used to seal against the first stepped surface.

3. The base assembly as described in claim 2, characterized in that, The outer wall of the sealing protrusion is provided with a second sealing surface, which is in sealing contact with the second sealing part.

4. The base assembly as claimed in claim 2, characterized in that, The outer peripheral wall of the body includes a first segment and a second segment, and both the first segment and the second segment are curved surfaces.

5. The base assembly as claimed in claim 4, characterized in that, The outer peripheral wall of the body also includes a third segment and a fourth segment, the two ends of which are respectively connected to the first segment and the second segment.

6. The base assembly as claimed in claim 5, characterized in that, The inner wall of the machining hole is also provided with a second stepped surface. The second stepped surface is located on the side of the second sealing part away from the first stepped surface. The end of the sealing protrusion away from the body is provided with a third sealing surface, and the third sealing surface seals against the second stepped surface.

7. The base assembly as claimed in claim 4, characterized in that, The two ends of the first segment are respectively connected to the two ends of the second segment, forming a circular outline.

8. The base assembly as claimed in claim 2, characterized in that, The edge of the first stepped surface near the center of the machining hole is chamfered.

9. The base assembly as claimed in claim 1, characterized in that, The main body is welded to the flow channel block.

10. The base assembly as claimed in claim 1, characterized in that, The sealing protrusion is configured as a sealing ring.

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