Analyzing device for high-purity disilane

Abstract

The utility model belongs to the technical field of chemical equipment, and particularly relates to a high-purity disilane analysis device which comprises an analyzer, a detection module, an analysis module, a display device, a getter pump, a power supply and a control device are arranged in the analyzer, a liquid crystal display screen, control keys, an air inlet and an air outlet are arranged on the surface of the analyzer, one end of the air inlet is connected with the getter pump, and the other end of the air inlet is connected with the power supply; the other end is externally connected with a sampling handle; the supporting seat is arranged at the bottom of the analyzer, and supporting legs are arranged at the bottom of the supporting seat; the height adjusting devices are arranged on the supporting legs and used for adjusting the heights of the supporting legs; the supporting legs are connected with the supporting base in a hinged mode. The height adjusting device has the beneficial effects that by arranging the height adjusting device, a thread fixing mode is abandoned, the problem of fastening failure caused by thread abrasion is reduced, and therefore the service life of the height adjusting device is prolonged.

Description

Technical Field

[0001] This application belongs to the field of chemical equipment technology, and in particular relates to an analytical device for high-purity silane. Background Technology

[0002] Currently, silane is an electronic gas. Compared with other silicon-based compounds, silane is preferred due to its unique properties and is widely used in electronics, information, energy, materials and other fields. It is an indispensable gas for many emerging industries in the future. During the use of silane, its purity and quality directly affect the quality of subsequent products. Most existing silane quality analysis devices use quality analysis instruments. First, silane is sampled using a sampling handle connected to a suction pump. Then, its quality is analyzed through its internal analysis and detection modules.

[0003] Patent CN206788136U discloses a high-purity silane quality analysis device, including an analyzer and a support. Slider blocks are fixedly mounted on both sides of the lower surface of the analyzer. The support includes a support plate and support legs. The upper surface of the support plate has a groove that mates with the slider structure, and the lower surface has a baffle located on both sides of the support legs. The baffle and support legs each have identical through holes. Limiting plates a and b are respectively mounted on the outer side of the baffle. Limiting plate a is fixedly connected to the support plate, and limiting plate b is fixedly connected to the support legs. The center positions of limiting plates a and b each have a circular groove and a screw hole with the same diameter as the through holes. The support legs, limiting plates a and b, and the baffle are connected by connecting screws. No threads are provided in the through holes, but the inner surfaces of the circular groove and screw hole have threads that mate with the connecting screws. A height adjustment device is provided at the lower end of the support legs.

[0004] The aforementioned patent adjusts the height using a height adjustment device, namely the cooperation of a first support rod, a second support rod, a fastening block, and an adjusting screw. Although this achieves height adjustment, the threaded fixing method is prone to wear after repeated use, leading to a failure to tighten properly, and therefore requires improvement. Utility Model Content

[0005] The purpose of this application is to provide an analytical apparatus for high-purity silane that can solve the above-mentioned problems.

[0006] The purpose of this application is to provide an analytical apparatus for high-purity silane, comprising:

[0007] The analyzer contains a detection module, an analysis module, a display device, an air pump, a power supply, and a control device. Its surface is equipped with an LCD screen, control buttons, an air inlet, and an air outlet. One end of the air inlet is connected to the air pump, and the other end is connected to a sampling handle.

[0008] A support base is located at the bottom of the analyzer, and support legs are provided at its bottom.

[0009] A height adjustment device, located on the support leg, is used to adjust the height of the support leg;

[0010] The support legs are provided in multiple parts and are hinged to the support base.

[0011] The aforementioned high-purity silane analysis device integrates a detection module, an analysis module, a display device, a suction pump, a power supply, and a control device. Its surface features an LCD screen, control buttons, an air inlet, and an air outlet. One end of the air inlet is connected to the suction pump, and the other end is connected to a sampling handle for easy sampling and analysis of high-purity silane. A support base is located at the bottom of the analyzer to stably support the entire device. Support legs are provided at the bottom of the support base for added support. The height adjustment device allows for flexible adjustment of the support legs' angle and height. Furthermore, this application's height adjustment device eliminates the need for threaded fastening, reducing tightening failures due to thread wear and extending the device's lifespan. By adjusting the height, it can adapt to different working environments and needs, improving the device's versatility and practicality.

[0012] Furthermore, the height adjustment device includes:

[0013] The outer rod is located at the bottom of the support leg and has a movable cavity inside;

[0014] The inner rod is set inside the movable cavity and forms a telescopic structure with the outer rod;

[0015] A positioning structure is installed on the outer rod and used to fix the position of the inner rod;

[0016] The bottom of the inner rod is equipped with positioning feet.

[0017] The outer rod is located at the bottom of the support leg and has a movable cavity inside to accommodate the inner rod and enable its telescopic function. The inner rod is located within the movable cavity of the outer rod and forms a telescopic structure with the outer rod.

[0018] The height of the support legs can be adjusted by changing the extension length of the inner rod within the outer rod. The bottom of the inner rod is equipped with a positioning foot for contact with the ground and to provide stable support. A positioning structure is located on the outer rod to fix the position of the inner rod. Once the inner rod is adjusted to the desired height, the positioning structure locks it in place, preventing it from sliding or wobbling within the outer rod, thus ensuring the stability of the analytical device.

[0019] The telescopic structure of the inner rod within the outer rod allows for flexible adjustment of the support leg height, enabling the analytical device to adapt to different working environments and height requirements, thus improving its versatility and practicality. The positioning structure ensures that the inner rod is securely locked in its current position after adjustment to the desired height, preventing the device from tipping over or being damaged due to slippage or wobbling of the inner rod, and ensuring the stability of the analytical device during height adjustment.

[0020] Furthermore: the positioning structure includes:

[0021] A positioning sleeve is disposed on the outer rod body, including a sleeve body and a first extension and a second extension disposed on the sleeve body;

[0022] A positioning rod, one end of which is provided with a limiting head, and the other end passes through the first extension and the second extension in sequence;

[0023] A locking handle is located at the end of the positioning rod furthest from the limit head and is connected to the positioning rod via an eccentric rotating shaft.

[0024] The first extension and the second extension are provided with a gap, and the outer rod is provided with a tightening groove corresponding to the gap.

[0025] A positioning sleeve is mounted on the outer rod body and consists of a sleeve body and a first extension and a second extension mounted on the sleeve body. A gap is provided between the first extension and the second extension for mounting onto the outer rod body and enabling locking and unlocking functions. The outer rod body has tightening grooves corresponding to the gap, allowing for synchronous tightening when the positioning sleeve tightens, improving the tightening effect. One end of the positioning rod has a limit head to prevent it from completely dislodging from the positioning sleeve. The other end of the positioning rod passes sequentially through the first extension and the second extension. A locking handle is located at the end of the positioning rod furthest from the limit head and is connected to the positioning rod via an eccentric shaft. Moving the locking handle causes the positioning rod to move within the gap, thus achieving the locking and unlocking functions of the positioning structure.

[0026] When the position of the inner rod needs to be fixed, the user moves the locking handle until the edge of its eccentric connection end at the larger radius presses against the side wall of the second extension. At this time, the first and second extensions gradually approach each other, causing the positioning sleeve to tighten and fit tightly against the outer rod, while simultaneously causing the outer rod to tighten and contact the inner rod, thus achieving the locking function of the positioning structure. At this point, the inner rod cannot extend or retract within the outer rod, ensuring the high stability of the analytical device.

[0027] When the position of the inner rod needs to be adjusted, the user moves the locking handle until the edge of its eccentric connection end at the smaller radius presses against the side wall of the second extension. At this point, the first and second extensions gradually move away from each other, the positioning sleeve no longer clamps the outer rod, and the outer rod also locks against the inner rod. The user can then freely adjust the extension length of the inner rod within the outer rod to adjust the height. After adjustment, simply move the locking handle back to the locked position.

[0028] The positioning structure enables flexible locking and unlocking of the inner rod. This not only improves the height adjustment flexibility and stability of the analysis device but also makes operation more convenient and efficient.

[0029] Furthermore, an elastic element is also sleeved on the positioning rod, the elastic element is located in the gap, and its two ends are in contact with the first extension and the second extension, respectively.

[0030] The elastic element is sleeved on the positioning rod and located in the gap between the first extension and the second extension. Both ends of the elastic element contact the first and second extensions respectively, providing a certain preload force to the positioning rod. When the locking handle is turned to the locked state, the preload force of the elastic element helps the positioning rod to fit tightly against the inner rod body, enhancing the locking effect of the positioning structure. It also facilitates the reset of the first and second extensions when the locking handle is turned to the unlocked state.

[0031] Furthermore, a limiting protrusion is provided at the bottom of the outer rod body, and the diameter of the limiting protrusion is larger than the inner diameter of the positioning sleeve.

[0032] A limiting protrusion ring is set at the bottom of the outer rod, with a diameter larger than the inner diameter of the positioning sleeve. This ensures that the positioning sleeve cannot slide out from the bottom of the outer rod, enhancing the stability of the entire height adjustment device and ensuring that components such as the positioning sleeve, positioning rod, and locking handle can be firmly connected together and work together.

[0033] Furthermore, a washer is provided at the end of the locking grip that contacts the second extension, and the washer is fitted onto the positioning rod.

[0034] The washer is located in the area where the locking grip contacts the second extension, and is fitted onto the positioning rod to ensure tight contact with both. It is made of wear-resistant and corrosion-resistant material. As a buffer layer between the locking grip and the second extension, the washer effectively reduces direct contact and wear between the two, thereby extending the service life of the component. Simultaneously, by adding the washer, the locking grip can fit more tightly against the second extension in the locked state, thus enhancing the locking effect of the positioning structure and ensuring the stability of the inner rod.

[0035] The beneficial effects of this application are:

[0036] 1. By setting up a height adjustment device, the threaded fixing method is eliminated, reducing the problem of fastening failure caused by thread wear, thereby extending the service life of the height adjustment device;

[0037] 2. By adjusting the height, it can adapt to different working environments and needs, thus improving the versatility and practicality of the equipment;

[0038] 3. The positioning structure enables flexible locking and unlocking of the inner rod. This not only improves the height adjustment flexibility and stability of the analysis device but also makes operation more convenient and efficient. Attached Figure Description

[0039] Figure 1 This is a schematic diagram of the structure of this utility model;

[0040] Figure 2 This is a structural schematic diagram from another perspective of the present invention;

[0041] Figure 3 yes Figure 2 Enlarged view of A in the middle;

[0042] Figure 4 This is a connection diagram of the analyzer of this utility model.

[0043] The reference numerals in the figure are as follows: 100, analyzer; 101, detection module; 102, analysis module; 103, display device; 104, suction pump; 105, power supply; 106, control device; 120, LCD screen; 130, control button; 140, air inlet; 150, air outlet; 200, support base; 210, support leg; 300, height adjustment device; 310, outer rod; 330, inner rod; 340, positioning foot; 400, positioning structure; 410, positioning sleeve; 411, sleeve body; 412, first extension; 413, second extension; 420, positioning rod; 421, limiting head; 430, locking handle; 431, eccentric shaft connection; 440, gap; 450, tightening groove; 460, elastic element; 470, limiting protrusion ring; 480, gasket. Detailed Implementation

[0044] The technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application are within the scope of protection of this application.

[0045] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0046] The analytical apparatus for high-purity silane provided in this application will be described in detail below with reference to the accompanying drawings, through specific embodiments and application scenarios.

[0047] Example 1:

[0048] like Figures 1 to 4 As shown in the figure, this application provides an analytical apparatus for high-purity silane, comprising:

[0049] The analyzer 100 has a detection module 101, an analysis module 102, a display device 103, an air pump 104, a power supply 105, and a control device 106. Its surface is equipped with an LCD screen 120, control buttons 130, an air inlet 140, and an air outlet 150. One end of the air inlet 140 is connected to the air pump 104, and the other end is connected to a sampling handle.

[0050] A support base 200 is located at the bottom of the analyzer 100, and a support leg 210 is provided at its bottom.

[0051] A height adjustment device 300 is provided on the support leg 210 for adjusting the height of the support leg 210;

[0052] The support legs 210 are provided in multiple sizes and are hinged to the support base 200.

[0053] In some embodiments of this application, such as Figure 1As shown, the analyzer 100, which employs the aforementioned high-purity silane analysis device, integrates a detection module 101, an analysis module 102, a display device 103, an air pump 104, a power supply 105, and a control device 106. Its surface is equipped with a liquid crystal display screen 120, control buttons 130, an air inlet 140, and an air outlet 150. One end of the air inlet 140 is connected to the air pump 104, and the other end is connected to a sampling handle, facilitating sampling and analysis of the high-purity silane. A support base 200 is located at the bottom of the analyzer 100, providing stable support for the entire analyzer. Support legs 210 are provided at the bottom of the support base 200 for support. The height adjustment device 300 allows the support legs 210 to be flexibly adjusted in angle and height. Furthermore, the height adjustment device 300 of this application eliminates the threaded fixing method, reducing the problem of fastening failure due to thread wear, thereby extending the service life of the height adjustment device 300. By adjusting the height, the equipment can adapt to different working environments and needs, thus improving its versatility and practicality.

[0054] Example 2:

[0055] This application provides an analytical apparatus for high-purity silane. In addition to the above-mentioned technical features, the analytical apparatus for high-purity silane in this application also includes the following technical features.

[0056] like Figure 2 and Figure 3 As shown, the height adjustment device 300 includes:

[0057] The outer rod 310 is located at the bottom of the support leg 210 and has a movable cavity inside;

[0058] The inner rod 330 is disposed in the movable cavity and forms a telescopic structure with the outer rod 310;

[0059] The positioning structure 400 is set on the outer rod 310 and is used to fix the position of the inner rod 330.

[0060] The bottom of the inner rod 330 is provided with a positioning foot 420.

[0061] In this embodiment, the outer rod 310 is disposed at the bottom of the support leg 210, and has an internal movable cavity for accommodating the inner rod 330 and enabling telescopic movement. The inner rod 330 is disposed within the movable cavity of the outer rod 310, forming a telescopic structure with the outer rod 310. By adjusting the extension length of the inner rod 330 within the outer rod 310, the height of the support leg 210 can be adjusted. A positioning foot 340 is provided at the bottom of the inner rod 330 for contacting the ground and providing stable support. A positioning structure 400 is disposed on the outer rod 310 for fixing the position of the inner rod 330. When the inner rod 330 is adjusted to the desired height, the positioning structure 400 can lock it in its current position, preventing the inner rod 330 from sliding or wobbling within the outer rod 310, thereby ensuring the stability of the analysis device.

[0062] The telescopic structure of the inner rod 330 within the outer rod 310 allows for flexible adjustment of the support leg 210's height, enabling the analytical device to adapt to different working environments and height requirements, thus improving its versatility and practicality. The positioning structure 400 ensures that the inner rod 330 is securely locked in its current position after adjustment to the desired height, preventing the device from tipping over or being damaged due to slippage or shaking of the inner rod 330, and ensuring the stability of the analytical device during height adjustment.

[0063] Furthermore, a limiting protrusion ring 470 is provided at the bottom of the outer rod body 310, and the diameter of the limiting protrusion ring 470 is larger than the inner diameter of the positioning sleeve 410.

[0064] A limiting protrusion ring 470 is provided at the bottom of the outer rod 310. Its diameter is larger than the inner diameter of the positioning sleeve 410. This ensures that the positioning sleeve 410 cannot slide out from the bottom of the outer rod 310, which enhances the stability of the entire height adjustment device 300. It also ensures that components such as the positioning sleeve 410, positioning rod 420, and locking handle 430 can be firmly connected together and work together.

[0065] Furthermore, a washer 480 is provided at the end of the locking grip 430 that contacts the second extension 413, and the washer 480 is fitted onto the positioning rod 420.

[0066] Example 3:

[0067] This application provides an analytical apparatus for high-purity silane. In addition to the above-mentioned technical features, the analytical apparatus for high-purity silane in this application also includes the following technical features.

[0068] like Figure 3 As shown, the positioning structure 400 includes:

[0069] The positioning sleeve 410 is disposed on the outer rod body 310 and includes a sleeve body 411 and a first extension 412 and a second extension 413 disposed on the sleeve body 411.

[0070] The positioning rod 420 has a limiting head 421 at one end and the other end passes through the first extension 412 and the second extension 413 in sequence.

[0071] A locking handle 430 is located at the end of the positioning rod 420 away from the limiting head 421 and is connected to the positioning rod 420 via an eccentric rotating shaft 431;

[0072] A gap 440 is provided between the first extension 412 and the second extension 413, and a tightening groove 450 corresponding to the gap 440 is provided on the outer rod 310.

[0073] In this embodiment, the positioning sleeve 410 is disposed on the outer rod body 310 and consists of a sleeve body 411 and a first extension 412 and a second extension 413 disposed on the sleeve body 411. A gap 440 is provided between the first extension 412 and the second extension 413 for mounting onto the outer rod body 310 and realizing locking and unlocking functions. A tightening groove 450 corresponding to the gap 440 is provided on the outer rod body 310 for synchronous tightening when the positioning sleeve is tightened, thereby improving the tightening effect. One end of the positioning rod 420 is provided with a limiting head 421 to prevent the positioning rod 420 from completely dislodging from the positioning sleeve 410. The other end of the positioning rod 420 passes through the first extension 412 and the second extension 413 in sequence. A locking handle 430 is disposed at the end of the positioning rod 420 away from the limiting head 421 and is connected to the positioning rod 420 by an eccentric rotating shaft 431. The movement of the locking handle 430 can cause the positioning rod 420 to move within the gap 440, thereby realizing the locking and unlocking functions of the positioning structure 400.

[0074] When it is necessary to fix the position of the inner rod 330, the user moves the locking handle 430 until the edge of its eccentric connection end with a larger radius presses against the side wall of the second extension 413. At this time, the first extension 412 and the second extension 413 gradually approach each other, causing the positioning sleeve 410 to tighten and fit tightly against the outer rod 310, while simultaneously causing the outer rod 310 to tighten and contact the inner rod 330, thereby realizing the locking function of the positioning structure 400. At this time, the inner rod 330 cannot extend or retract within the outer rod 310, ensuring the high stability of the analysis device.

[0075] When the position of the inner rod 330 needs to be adjusted, the user moves the locking handle 430 until the edge of its eccentric connecting end at the smaller radius presses against the side wall of the second extension 413. At this time, the first extension 412 and the second extension 413 gradually move away from each other, the positioning sleeve 410 no longer clamps the outer rod 310, and the outer rod 310 also becomes detached from the inner rod 330. The user can then freely adjust the extension length of the inner rod 330 within the outer rod 310 to adjust the height. After adjustment, the locking handle 430 is moved back to the locked position.

[0076] The positioning structure 400 enables flexible locking and unlocking of the inner rod at position 330. This not only improves the height adjustment flexibility and stability of the analysis device but also makes operation more convenient and efficient.

[0077] Furthermore, an elastic element 460 is also sleeved on the positioning rod 420. The elastic element 460 is located within the gap 440, and its two ends are in contact with the first extension 412 and the second extension 413, respectively.

[0078] The elastic element 460 is sleeved on the positioning rod 420 and located within the gap 440 between the first extension 412 and the second extension 413. Both ends of the elastic element 460 contact the first extension 412 and the second extension 413 respectively, providing a certain preload force to the positioning rod 420. When the locking handle 430 is turned to the locked state, the preload force of the elastic element 460 helps the positioning rod 420 to fit tightly against the inner rod body 330, enhancing the locking effect of the positioning structure 400. It also facilitates the reset of the first extension 412 and the second extension 413 when the locking handle 430 is turned to the unlocked state.

[0079] Example 4:

[0080] This application provides an analytical apparatus for high-purity silane. In addition to the above-mentioned technical features, the analytical apparatus for high-purity silane in this application also includes the following technical features.

[0081] like Figure 3 As shown, a washer 480 is provided at the end of the locking grip 430 that contacts the second extension 413, and the washer 480 is sleeved on the positioning rod 420.

[0082] In this embodiment, the gasket 480 is located in the area where the locking grip 430 contacts the second extension 413, and is fitted onto the positioning rod 420 to ensure tight contact with both. It is made of wear-resistant and corrosion-resistant material. As a buffer layer between the locking grip 430 and the second extension 413, the gasket 480 effectively reduces direct contact and wear between them, thereby extending the service life of the component. Simultaneously, by adding the gasket 480, the locking grip 430 can fit more tightly against the second extension 413 in the locked state, thereby enhancing the locking effect of the positioning structure 400 and ensuring the stability of the inner rod 330.

[0083] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples. The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. An analytical apparatus for high-purity silane, characterized in that: include: The analyzer (100) is equipped with a detection module (101), an analysis module (102), a display device (103), an air pump (104), a power supply (105), and a control device (106). Its surface is equipped with an LCD screen (120), control buttons (130), an air inlet (140), and an air outlet (150). One end of the air inlet (140) is connected to the air pump (104), and the other end is connected to a sampling handle. A support base (200) is provided at the bottom of the analyzer (100), and a support leg (210) is provided at the bottom of the analyzer; A height adjustment device (300) is provided on the support leg (210) for adjusting the height of the support leg (210); Among them, multiple support legs (210) are provided and are hinged to the support base (200); The height adjustment device (300) includes: The outer rod (310) is located at the bottom of the support leg (210) and has a movable cavity inside; The inner rod (330) is located inside the movable cavity and forms a telescopic structure with the outer rod (310); A positioning structure (400) is provided on the outer rod (310) and is used to fix the position of the inner rod (330); The bottom of the inner rod (330) is provided with a positioning foot (340); The positioning structure (400) includes: The positioning sleeve (410) is disposed on the outer rod body (310) and includes a sleeve body (411) and a first extension (412) and a second extension (413) disposed on the sleeve body (411); The positioning rod (420) has a limiting head (421) at one end and passes through the first extension (412) and the second extension (413) in sequence at the other end; A locking grip (430) is located at the end of the positioning rod (420) away from the limiting head (421) and is connected to the positioning rod (420) via an eccentric rotating shaft (431); A gap (440) is provided between the first extension (412) and the second extension (413), and a tightening groove (450) corresponding to the gap (440) is provided on the outer rod (310).

2. The analytical apparatus for high-purity silane according to claim 1, characterized in that: The positioning rod (420) is also fitted with an elastic element (460), which is located in the gap (440) and its two ends are in contact with the first extension (412) and the second extension (413) respectively.

3. The analytical apparatus for high-purity silane according to claim 2, characterized in that: The bottom of the outer rod (310) is provided with a limiting protrusion ring (470), the diameter of which is larger than the inner diameter of the positioning sleeve (410).

4. The analytical apparatus for high-purity silane according to claim 3, characterized in that: A gasket (480) is also provided at the end of the locking grip (430) that contacts the second extension (413), and the gasket (480) is sleeved on the positioning rod (420).

Images