Wafer positioning mechanism

Abstract

The utility model discloses a wafer positioning mechanism, which comprises a rotary moving assembly, the rotary moving assembly comprises a rotary bottom plate, a rotary top plate, a lead screw driving assembly, a transmission block and a transmission assembly, the rotary top plate is rotatably arranged on the rotary bottom plate, the transmission block is arranged at the driving end of the lead screw driving assembly, and the transmission assembly is slidably arranged on the transmission block. The sliding direction is perpendicular to the driving direction of the lead screw driving assembly, and meanwhile the transmission assembly is further rotationally connected to the rotary top plate. In the positioning process, the lead screw driving assembly is used for driving the transmission block to move along a straight line and pulling the rotary top plate to move through the transmission assembly, and meanwhile the transmission assembly can slide on the transmission block, so that the transmission assembly and the rotary top plate are kept in a connection relation, and the transmission assembly rotates along with the rotary top plate; linear driving of the lead screw rotating assembly is converted into rotary driving of the rotary top plate, generation of an interference magnetic field in the wafer detection process is reduced from the source, and the wafer detection precision is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer detection technical field, especially a wafer positioning mechanism. BACKGROUND

[0002] In the wafer detection process, the wafer needs to be positioned first to ensure the accuracy of subsequent detection. At present, a linear motor and a direct drive motor are used to form a motion device for moving the wafer detection table, i.e. the linear motor is used to drive a linear shaft, and the direct drive motor is used to drive a rotary shaft to achieve high positioning accuracy.

[0003] However, in the wafer probe detection process, many strong magnets need to be arranged on the entire machine table. In the process of driving the linear motor / direct drive motor, the coil energization during the movement will also generate a magnetic field, which will generate magnetic field interference near the machine table, thereby affecting the normal detection of the wafer. SUMMARY

[0004] In view of the above shortcomings of the prior art, the wafer positioning mechanism provided by the present application can avoid magnetic field interference and improve the accuracy of wafer detection.

[0005] The embodiment adopts the following technical solutions:

[0006] A wafer positioning mechanism includes a rotary moving assembly, which includes:

[0007] A rotary bottom plate;

[0008] A lead screw driving assembly;

[0009] A rotary top plate rotatably arranged on the rotary bottom plate;

[0010] A transmission block transmissionally connected to the lead screw driving assembly; and

[0011] A transmission assembly slidingly arranged on the transmission block, and the sliding direction is perpendicular to the driving direction of the lead screw driving assembly, and the transmission assembly is also rotatably connected to the rotary top plate.

[0012] Further, in the wafer positioning mechanism, the rotary bottom plate is provided with a positioning groove, and the rotary moving assembly further includes a cross roller bearing, the cross roller bearing is arranged in the positioning groove, the outer ring of the cross roller bearing is connected to the rotary bottom plate, and the inner ring of the cross roller bearing is connected to the rotary top plate.

[0013] Further, in the wafer positioning mechanism, the transmission assembly comprises a connecting seat, a rolling bearing and a rotating shaft, the connecting seat is connected to the side of the rotating top plate, the rotating shaft is slidingly connected to the transmission block and penetrates through the connecting seat, the outer ring of the rolling bearing is connected to the connecting seat, and the inner ring of the rolling bearing is connected to the rotating shaft.

[0014] Further, in the wafer positioning mechanism, the screw driving assembly comprises a rotating mounting plate, a rotating motor, a rotating screw, a rotating screw nut and a limiting anti-collision piece, the rotating motor is arranged on the rotating mounting plate and is drivingly connected to the rotating screw, the rotating screw nut is arranged on the rotating screw and is connected to the transmission block, and the limiting anti-collision piece is arranged on the rotating mounting plate and has two pieces, which are respectively arranged at the two ends of the rotating screw.

[0015] Further, in the wafer positioning mechanism, the rotating moving assembly further comprises a rotating grating ruler and a rotating reading head, the rotating grating ruler is arranged on the rotating top plate, and the rotating reading head is arranged on the rotating bottom plate and is aligned with the rotating grating ruler.

[0016] Further, in the wafer positioning mechanism, the rotating moving assembly is drivingly connected to the X-axis moving assembly, the Y-axis moving assembly and the Z-axis moving assembly.

[0017] Further, in the wafer positioning mechanism, the Z-axis moving assembly comprises a Z-axis bottom plate, a Z-axis stand, a Z-axis motor, a Z-axis screw, a Z-axis screw nut, a Z-axis guide rail assembly, a Z-axis grating ruler and a Z-axis reading head, the Z-axis motor and the Z-axis reading head are arranged on the Z-axis bottom plate, the Z-axis motor is drivingly connected to the Z-axis screw to drive the Z-axis screw to rotate, the Z-axis screw nut is arranged on the Z-axis screw and is connected to the rotating moving assembly, the Z-axis grating ruler is driven by the rotating moving assembly, and the Z-axis reading head is aligned with the Z-axis grating ruler.

[0018] Further, in the wafer positioning mechanism, the Z-axis moving assembly further comprises a Z-axis belt wheel assembly, the Z-axis belt wheel assembly comprises a driving wheel, a driven wheel and a synchronous belt, the driving wheel is coaxially connected to the rotating shaft of the Z-axis motor, the driven wheel is coaxially connected to the Z-axis screw, and the synchronous belt is sleeved on the driving wheel and the driven wheel.

[0019] Furthermore, in the wafer positioning mechanism, the X-axis moving assembly includes an X-axis base plate, an X-axis motor, an X-axis lead screw, an X-axis lead screw nut, an X-axis grating ruler, and an X-axis reading head. The X-axis motor and the X-axis grating ruler are disposed on the X-axis base plate. The X-axis motor is drivenly connected to the X-axis lead screw to drive the X-axis lead screw to rotate. The X-axis lead screw nut is installed on the X-axis lead screw and connected to the rotary moving assembly. The X-axis reading head follows the rotary moving assembly and is aligned with the X-axis grating ruler.

[0020] Furthermore, in the wafer positioning mechanism, the Y-axis moving assembly includes a Y-axis base plate, a Y-axis motor, a Y-axis lead screw, a Y-axis lead screw nut, a Y-axis grating ruler, and a Y-axis reading head. The Y-axis motor and the Y-axis grating ruler are disposed on the Y-axis base plate. The Y-axis motor is drivenly connected to the Y-axis lead screw to drive the Y-axis lead screw to rotate. The Y-axis lead screw nut is installed on the Y-axis lead screw and connected to the rotary moving assembly. The Y-axis reading head follows the rotary moving assembly and is aligned with the Y-axis grating ruler.

[0021] Compared to existing technologies, the wafer positioning mechanism provided in this application uses a lead screw drive assembly to drive a transmission block to move linearly and pulls a rotary top plate to move via a transmission assembly. Simultaneously, the transmission assembly slides on the transmission block, maintaining a connection with the rotary top plate and rotating together with it. This transforms the linear drive of the lead screw drive assembly into a rotary drive of the rotary top plate, replacing the direct drive method using a direct drive motor. This reduces the generation of interfering magnetic fields during wafer inspection, improves the accuracy of wafer inspection, eliminates the need for additional magnetic field shielding devices on the inspection machine, saves space, and makes the structure of the inspection machine more compact. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of a specific embodiment of the wafer positioning mechanism provided in this application.

[0023] Figure 2 for Figure 1 The diagram shows the structure of the rotary moving component in the wafer positioning mechanism.

[0024] Figure 3 for Figure 2 The exploded structure diagram of the rotating moving component is shown.

[0025] Figure 4 for Figure 2 The diagram shows an exploded view of the transmission component in the rotary moving assembly.

[0026] Figure 5 for Figure 2Structure diagram of the screw driving assembly in the rotary moving assembly.

[0027] Figure 6 For Figure 1 Structure diagram of the Z-axis moving assembly in the wafer positioning mechanism.

[0028] Figure 7 For Figure 6 Exploded structure diagram of the Z-axis moving assembly.

[0029] Figure 8 For Figure 1 Structure diagram of the X-axis moving assembly and the Y-axis moving assembly in the wafer positioning mechanism.

[0030] Wherein, 10, rotary moving assembly; 11, rotary bottom plate; 111, positioning groove; 12, rotary top plate; 13, screw driving assembly; 131, rotary mounting plate; 132, rotary motor; 133, rotary screw; 134, rotary screw nut; 135, limit anti-collision piece; 14, transmission block; 15, transmission assembly; 151, connecting seat; 152, rolling bearing; 153, rotary shaft; 16, axial guide rail; 17, radial guide rail; 18, cross roller bearing; 19, rotary reading head; 20, X-axis moving assembly; 21, X-axis bottom plate; 22, X-axis motor; 23, X-axis screw; 24, X-axis screw nut; 25, X-axis grating ruler; 26, X-axis reading head; 27, X-axis guide rail assembly; 30, Y-axis moving assembly; 31, Y-axis bottom plate; 32, Y-axis motor; 33, Y-axis screw; 34, Y-axis screw nut; 35, Y-axis grating ruler; 36, Y-axis reading head; 37, Y-axis guide rail assembly; 40, Z-axis moving assembly; 41, Z-axis bottom plate; 42, Z-axis stand column; 43, Z-axis motor; 44, Z-axis screw; 45, Z-axis screw nut; 46, Z-axis guide rail assembly; 47, Z-axis reading head; 48, Z-axis pulley assembly. DETAILED DESCRIPTION

[0031] To make the objectives, technical solutions and effects of the present application clearer and more explicit, the present application is further described in detail below with reference to the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application and do not limit the present application, and the elements, structures and features in one embodiment can be beneficially combined into other embodiments without further description.

[0032] It should be noted that when an element structure is referred to as "fixed to" or "disposed on" another element structure, it can be directly on the other element structure or indirectly on the other element structure. In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.

[0033] The terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate an orientation or positional relationship based on the orientation or position as shown in the drawings, and are used only to facilitate the description of the application and to simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation.

[0034] Referring to Figure 1 and Figure 2 The wafer positioning mechanism provided by the application comprises a rotary moving assembly 10, the rotary moving assembly 10 comprises a rotary base plate 11, a rotary top plate 12, a lead screw driving assembly 13, a transmission block 14 and a transmission assembly 15, the rotary top plate 12 is rotationally arranged on the rotary base plate 11, the transmission block 14 is arranged on the driving end of the lead screw driving assembly 13, and the transmission assembly 15 is slidingly arranged on the transmission block 14, and the transmission assembly 15 is also rotationally connected to the rotary top plate 12.

[0035] The rotary top plate 12 is used for placing a wafer, the lead screw driving assembly 13 is used for driving the rotary top plate 12 to rotate, so as to adjust the angle of the wafer and realize the positioning of the wafer.

[0036] Specifically, the rotary top plate 12 is rotationally arranged on the rotary base plate 11 around a center point thereof, and a vacuum chuck or the like structure can be mounted on the rotary top plate 12, so as to fix the wafer by vacuum adsorption, thereby avoiding the position deviation of the wafer in the rotating process.

[0037] The driving direction of the lead screw driving assembly 13 is set as a first direction, and the sliding direction of the transmission assembly 15 and the transmission block 14 is set as a second direction, and the first direction is perpendicular to the second direction.

[0038] During the driving process, the lead screw driving assembly 13 drives the transmission block 14 to move in the first direction. At this time, the transmission assembly 15 will move in the first direction together with the transmission block 14, and pull the rotary top plate 12 to rotate in the moving process. At the same time, the transmission assembly 15 will move in the second direction on the transmission block 14, so that the transmission assembly 15 and the rotary top plate 12 maintain a connection relationship, and the transmission assembly 15 rotates together with the rotary top plate 12.

[0039] It can be seen that the application adopts the lead screw driving assembly 13 for transmission, and forms a complete transmission chain by arranging the transmission block 14 and the transmission assembly 15, so as to convert the linear driving of the lead screw rotating assembly into the rotary driving of the rotary top plate 12, thereby replacing the rotary driving mode by directly driving the motor, reducing the generation of the interference magnetic field in the wafer detection process from the source, so that the detection machine does not need to additionally increase the magnetic field shielding device, and space can be saved, so that the structure of the detection machine is more compact.

[0040] Please refer to Figure 4 In some embodiments, the transmission assembly 15 comprises a connecting seat 151, a rolling bearing 152 and a rotating shaft 153. The connecting seat 151 is connected to the side of the rotating top plate 12. The rotating shaft 153 is slidingly connected to the transmission block 14 and passes through the connecting seat 151. The outer ring of the rolling bearing 152 is connected to the connecting seat 151, and the inner ring of the rolling bearing 152 is connected to the rotating shaft 153.

[0041] During installation, the rolling bearing 152 can be an angular contact ball bearing. The outer ring of the pair of angular contact ball bearings is installed on the connecting seat 151 and is pressed by a pressure plate. The rotating shaft 153 is connected to the inner ring of the pair of angular contact ball bearings and is tightened by a nut. Finally, the rotating shaft 153 is rotationally connected to the rotating top plate 12.

[0042] Also, please refer to Figure 3 The rotating bottom plate 11 can be provided with an axial guide rail 16 in the first direction. The connecting block is installed on the sliding block of the axial guide rail 16, and the movement of the connecting block is guided by the axial guide rail 16. The connecting block can be provided with a radial guide rail 17 in the second direction. The rotating shaft 153 is installed on the sliding block of the radial guide rail 17, and the movement of the transmission assembly 15 is guided by the radial guide rail 17.

[0043] Please refer to Figure 5 In some embodiments, the lead screw drive assembly 13 can comprise a rotating mounting plate 131, a rotating motor 132, a rotating lead screw 133 and a rotating lead screw nut 134. The rotating motor 132 is provided on the rotating mounting plate 131 and is drivingly connected to the rotating lead screw 133. The rotating lead screw nut 134 is installed on the rotating lead screw 133 and is connected to the transmission block 14.

[0044] The rotating motor 132 is used to drive the rotating lead screw 133 to rotate, thereby causing the rotating lead screw nut 134 to move in the axial direction of the rotating lead screw 133. The rotating motor 132 can be a servo motor / stepper motor. It is placed in a suitable position through the rotating mounting plate 131 to avoid interference with the detection of the wafer by the magnetic field generated by the rotating motor 132.

[0045] Further, the lead screw drive assembly 13 can also comprise a limit and anti-collision piece 135, which is two in number and is located at both ends of the rotating lead screw 133.

[0046] The limit and anti-collision piece 135 can prevent the rotating lead screw nut 134 from moving out of range, thereby serving as a movement limiter.

[0047] In addition, an inductive sheet can be provided on the rotating top plate 12, and two photoelectric sensors can be provided on the rotating bottom plate 11. Through the inductive cooperation of the photoelectric sensor and the inductive sheet, the positive / negative limit and the origin of the rotating motion are obtained, further limiting the rotation range of the rotating top plate 12.

[0048] In some embodiments, the rotating base plate 11 is provided with a positioning groove 111, and the rotating movement assembly 10 further comprises a cross roller bearing 18 arranged in the positioning groove 111, the outer ring of the cross roller bearing 18 is connected to the rotating base plate 11, and the inner ring of the cross roller bearing 18 is connected to the rotating top plate 12.

[0049] The cross roller bearing 18 plays a role of positioning, guiding and bearing. Due to the special structure of the cross roller bearing 18, the translational freedom of the inner ring of the bearing in X / Y / Z and the rotational freedom of the inner ring of the bearing around the X / Y axis are limited, and only the rotational movement of the inner ring of the bearing around the center of the bearing (Z axis) is left.

[0050] During installation, the outer ring of the bearing is matched with the inner hole of the rotating base plate 11 and is fixed by four pressing blocks, and the rotating top plate 12 is matched with the inner ring of the bearing through a pressing ring and is pressed tightly by a screw, so that the rotating top plate 12 can only rotate around the center of the bearing, thereby realizing the positioning and guiding of the rotating top plate 12.

[0051] In some embodiments, the rotating movement assembly 10 further comprises a rotating grating ruler (not shown in the figure) and a rotating reading head 19, the rotating grating ruler is arranged on the rotating top plate 12, and the rotating reading head 19 is arranged on the rotating base plate 11 and is aligned with the rotating grating ruler.

[0052] The rotating grating ruler can be attached to the side surface of the rotating top plate 12, the rotating reading head 19 can feed back the position of the rotating top plate 12 by reading the data of the rotating grating ruler, the position signal is converted and processed by a PLC / upper computer, the rotating motor 132 drives the entire transmission chain to move the rotating top plate 12 to the required position, and a closed-loop control is formed.

[0053] In specific implementation, the rotating lead screw 133 is selected to be a precision ground screw, is driven by a servo motor / stepping motor, and uses a high-resolution grating ruler for position feedback, so as to realize the linear movement and rotating movement in the wafer detection process, not only a high precision level (the linear shaft laser interferometer actually measures a repeat positioning precision of ±0.2 μm, and the rotating shaft 153 actually measures a repeat positioning precision of ±0.2 arcsec) can be achieved, but also the generation of a magnetic field can be controlled and reduced from the source, and the influence of the magnetic field interference on the wafer detection is reduced.

[0054] Please refer to Figure 1 In some embodiments, the wafer positioning mechanism further comprises an X-axis movement assembly 20, a Y-axis movement assembly 30 and a Z-axis movement assembly 40, and the rotating movement assembly 10 is drivingly connected to the X-axis movement assembly 20, the Y-axis movement assembly 30 and the Z-axis movement assembly 40.

[0055] The X-axis moving assembly 20, the Y-axis moving assembly 30 and the Z-axis moving assembly 40 can constitute linear driving in three directions of a space coordinate system, and in combination with the rotary moving assembly 10 for rotary driving in one direction, the position of the wafer can be moved as required in the detection process, so as to adjust the camera alignment.

[0056] The rotary moving assembly 10, the X-axis moving assembly 20, the Y-axis moving assembly 30 and the Z-axis moving assembly 40 can be provided with relative driving relationship according to actual needs. For example, the rotary moving assembly 10 is provided at the driving end of the X-axis moving assembly 20, the X-axis moving assembly 20 is provided at the driving end of the Y-axis moving assembly 30, and the Y-axis moving assembly 30 is provided at the driving end of the Z-axis moving assembly 40; or other relative driving relationship can also be provided.

[0057] Please refer to Figure 6 In some embodiments, the Z-axis moving assembly 40 comprises a Z-axis base plate 41, a Z-axis stand column 42, a Z-axis motor 43, a Z-axis lead screw 44, a Z-axis lead screw nut 45, a Z-axis guide rail assembly 46, a Z-axis grating ruler (not shown in the figure) and a Z-axis reading head 47. The Z-axis motor 43 and the Z-axis reading head 47 are provided on the Z-axis base plate 41. The Z-axis motor 43 is drivingly connected to the Z-axis lead screw 44 to drive the Z-axis lead screw 44 to rotate. The Z-axis lead screw nut 45 is installed on the Z-axis lead screw 44 and connected to the rotary moving assembly 10. The Z-axis grating ruler follows the rotary moving assembly 10, and the Z-axis reading head 47 is aligned with the Z-axis grating ruler.

[0058] Specifically, the Z-axis lead screw nut 45 can be connected to the rotary base plate 11 and positioned and guided by the Z-axis guide rail assembly 46 installed on the Z-axis stand column 42. The Z-axis lead screw 44 cooperates with the Z-axis lead screw nut 45 to limit the translational freedom of the rotary base plate 11 in the X / Y direction and the rotational freedom of the rotary base plate 11 around the X / Y / Z axis, so that the rotary moving assembly 10 can only move linearly along the Z direction.

[0059] When the Z-axis motor 43 rotates forward / reversely, the rotary moving assembly 10 can make reciprocating motion in the Z-axis stroke range through the cooperation of the Z-axis lead screw 44 and the Z-axis lead screw nut 45. The Z-axis reading head 47 can feed back the position of the rotary moving assembly 10 by reading the data of the Z-axis grating ruler. The position signal is converted and processed by the PLC / upper computer to control the Z-axis motor 43 to drive the entire transmission chain to move the rotary moving assembly 10 to the required position, forming a closed-loop control.

[0060] Further, the Z-axis moving assembly 40 further comprises a Z-axis pulley assembly 48. The Z-axis pulley assembly 48 comprises a driving pulley, a driven pulley and a synchronous belt. The driving pulley is coaxially connected to the rotating shaft of the Z-axis motor 43, the driven pulley is coaxially connected to the Z-axis lead screw 44, and the synchronous belt is sleeved on the driving pulley and the driven pulley.

[0061] By setting the Z-axis pulley assembly 48, not only can the transmission accuracy be guaranteed, but also the position of the Z-axis motor 43 can be adjusted, making the overall structure of the Z-axis moving assembly 40 more compact.

[0062] Moreover, a Z-axis motor mounting seat can be provided, the Z-axis motor 43 is mounted on the Z-axis motor mounting seat, one end of the Z-axis pulley assembly 48 is connected with the output shaft of the Z-axis motor 43, the Z-axis motor 43 is mounted on the Z-axis bottom plate 41 and locked from top to bottom by screws; the side of the Z-axis motor mounting seat has two threaded holes, two screws are locked thereon and abut against the Z-axis upright column 42, the tension of the synchronous belt can be adjusted by adjusting the length of the screw abutment, and the synchronous belt can be prevented from loosening, which has simple structure, easy operation and good effect.

[0063] In some embodiments, the Y-axis moving assembly 30 comprises a Y-axis bottom plate 31, a Y-axis motor 32, a Y-axis lead screw 33, a Y-axis lead screw nut 34, a Y-axis grating ruler 35 and a Y-axis reading head 36, the Y-axis motor 32 and the Y-axis grating ruler 35 are arranged on the Y-axis bottom plate, the Y-axis motor 32 is drivingly connected to the Y-axis lead screw 33 to drive the Y-axis lead screw 33 to rotate, the Y-axis lead screw nut 34 is installed on the Y-axis lead screw 33 and connected to the rotary moving assembly 10, the Y-axis reading head 36 follows the rotary moving assembly 10 and is aligned with the Y-axis grating ruler 35.

[0064] Specifically, the Y-axis lead screw nut 34 can be connected to the Z-axis bottom plate 41, and a Y-axis guide rail assembly 37 can be provided for positioning and guiding by two sets of Y-axis guide rail assemblies 37 installed on the Y-axis bottom plate 31. The Y-axis lead screw 33 cooperates with the Y-axis lead screw nut 34 to limit the translational freedom of the Z-axis bottom plate 41 in the X / Z direction and the rotational freedom of the Z-axis bottom plate 41 around the X / Y / Z axis, so that the Z-axis moving assembly 40 can only move linearly along the Y direction.

[0065] When the Y-axis motor 32 rotates forward / reversely, the Y-axis lead screw 33 can be driven to rotate by the Y-axis shaft coupling, so that the rotary moving assembly 10 moves reciprocally along the Y-axis within a stroke range; the Y-axis reading head 36 can feed back the position of the rotary moving assembly 10 by reading the data of the Y-axis grating ruler 35, the position signal is converted and processed by PLC / upper computer, the Y-axis motor 32 drives the entire transmission chain to move the rotary moving assembly 10 to the required position, forming a closed-loop control.

[0066] In some embodiments, the X-axis moving assembly 20 comprises an X-axis base plate 21, an X-axis motor 22, an X-axis screw rod 23, an X-axis screw nut 24, an X-axis grating ruler 25 and an X-axis reading head 26. The X-axis motor 22 and the X-axis grating ruler 25 are arranged on the X-axis base plate. The X-axis motor 22 is drivingly connected to the X-axis screw rod 23 to drive the X-axis screw rod 23 to rotate. The X-axis screw nut 24 is installed on the X-axis screw rod 23 and connected to the rotary moving assembly 10. The X-axis reading head 26 follows the rotary moving assembly 10 and is aligned with the X-axis grating ruler 25.

[0067] Specifically, the X-axis screw nut 24 can be connected to the Y-axis base plate 31, and an X-axis guide rail assembly 27 can be arranged for positioning and guiding. The X-axis screw rod 23 cooperates with the X-axis screw nut 24 to limit the translational freedom of the Y-axis base plate 31 in the X / Z direction and the rotational freedom of the Y-axis base plate 31 around the X / X / Z axis, so that the Y-axis moving assembly 30 can only move linearly along the X direction.

[0068] When the X-axis motor 22 rotates forward or reversely, the X-axis screw rod 23 can be driven to rotate through the X-axis coupling, so that the rotary moving assembly 10 moves reciprocally along the X-axis within a stroke range. The X-axis reading head 26 can feed back the position of the rotary moving assembly 10 by reading the data of the X-axis grating ruler 25. The position signal is converted and processed by a PLC / upper computer to control the X-axis motor 22 to drive the entire transmission chain to move the rotary moving assembly 10 to a required position, forming a closed-loop control.

[0069] It can be understood that, for those skilled in the art, equivalent replacements or changes can be made according to the technical solutions and the application concept of the present application, and all these changes or replacements shall fall within the protection scope of the claims attached to the present application.

Claims

1. A wafer positioning mechanism, characterized in that, Includes a rotary moving component, the rotary moving component comprising: Rotary base plate; Lead screw drive assembly; A rotating top plate is rotatably mounted on the rotating bottom plate; The transmission block is connected to the lead screw drive assembly; and The transmission component is slidably disposed on the transmission block, and the sliding direction is perpendicular to the driving direction of the lead screw drive component. The transmission component is also rotatably connected to the rotary top plate.

2. The wafer positioning mechanism according to claim 1, characterized in that, The slewing base plate is provided with a positioning groove, and the slewing moving assembly also includes a crossed roller bearing. The crossed roller bearing is disposed in the positioning groove, the outer ring of the crossed roller bearing is connected to the slewing base plate, and the inner ring of the crossed roller bearing is connected to the slewing top plate.

3. The wafer positioning mechanism according to claim 2, characterized in that, The transmission assembly includes a connecting seat, a rolling bearing, and a rotating shaft. The connecting seat is connected to the side of the rotating top plate. The rotating shaft is slidably connected to the transmission block and passes through the connecting seat. The outer ring of the rolling bearing is connected to the connecting seat, and the inner ring of the rolling bearing is connected to the rotating shaft.

4. The wafer positioning mechanism according to claim 1, characterized in that, The lead screw drive assembly includes a rotary mounting plate, a rotary motor, a rotary lead screw, a rotary lead screw nut, and limit anti-collision components. The rotary motor is mounted on the rotary mounting plate and is drivenly connected to the rotary lead screw. The rotary lead screw nut is mounted on the rotary lead screw and connected to the transmission block. Two limit anti-collision components are mounted on the rotary mounting plate and are located at both ends of the rotary lead screw.

5. The wafer positioning mechanism according to claim 1, characterized in that, The rotary moving assembly also includes a rotary grating ruler and a rotary reading head. The rotary grating ruler is disposed on the rotary top plate, and the rotary reading head is disposed on the rotary bottom plate and aligned with the rotary grating ruler.

6. The wafer positioning mechanism according to claim 1, characterized in that, It also includes an X-axis moving component, a Y-axis moving component, and a Z-axis moving component, wherein the rotary moving component is drivenly connected to the X-axis moving component, the Y-axis moving component, and the Z-axis moving component.

7. The wafer positioning mechanism according to claim 6, characterized in that, The Z-axis moving assembly includes a Z-axis base plate, a Z-axis column, a Z-axis motor, a Z-axis lead screw, a Z-axis lead screw nut, a Z-axis guide rail assembly, a Z-axis grating ruler, and a Z-axis reading head. The Z-axis motor and the Z-axis reading head are mounted on the Z-axis base plate. The Z-axis motor is driven by the Z-axis lead screw to drive the Z-axis lead screw to rotate. The Z-axis lead screw nut is mounted on the Z-axis lead screw and connected to the rotary moving assembly. The Z-axis grating ruler moves with the rotary moving assembly, and the Z-axis reading head is aligned with the Z-axis grating ruler.

8. The wafer positioning mechanism according to claim 7, characterized in that, The Z-axis moving assembly further includes a Z-axis pulley assembly, which includes a driving pulley, a driven pulley, and a timing belt. The driving pulley is coaxially connected to the shaft of the Z-axis motor, the driven pulley is coaxially connected to the Z-axis lead screw, and the timing belt is sleeved on the driving pulley and the driven pulley.

9. The wafer positioning mechanism according to claim 6, characterized in that, The X-axis moving assembly includes an X-axis base plate, an X-axis motor, an X-axis lead screw, an X-axis lead screw nut, an X-axis grating ruler, and an X-axis reading head. The X-axis motor and the X-axis grating ruler are mounted on the X-axis base plate. The X-axis motor is driven by the X-axis lead screw to drive the X-axis lead screw to rotate. The X-axis lead screw nut is mounted on the X-axis lead screw and connected to the rotary moving assembly. The X-axis reading head follows the rotary moving assembly and is aligned with the X-axis grating ruler.

10. The wafer positioning mechanism according to claim 6, characterized in that, The Y-axis moving assembly includes a Y-axis base plate, a Y-axis motor, a Y-axis lead screw, a Y-axis lead screw nut, a Y-axis grating ruler, and a Y-axis reading head. The Y-axis motor and the Y-axis grating ruler are mounted on the Y-axis base plate. The Y-axis motor is driven by the Y-axis lead screw to drive the Y-axis lead screw to rotate. The Y-axis lead screw nut is mounted on the Y-axis lead screw and connected to the rotary moving assembly. The Y-axis reading head follows the rotary moving assembly and is aligned with the Y-axis grating ruler.

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