High-efficiency cooling device for PZT film wafer

Abstract

The utility model discloses an efficient cooling device for a PZT film wafer, which comprises a box body, a box door rotatably connected to the outside of the box body, a fixed plate fixedly connected to the inside of the box body, a placing plate rotatably connected to the top of the fixed plate, a rotating shaft rotatably connected to the inside of the box body, and a rotating plate sleeved on the outside of the rotating shaft, and the rotating plate is fixedly connected with the rotating shaft. According to the efficient cooling device of the PZT thin film wafer, a motor drives a rotating shaft and a rotating plate on the rotating shaft to rotate through a second gear and a third gear, so that the rotating plate drives a spray head to rotate around a placing plate, a reciprocating screw rod is driven to rotate through a first gear and an outer gear ring, and the reciprocating screw rod drives a sliding block to move back and forth; the sliding block drives the swing plate and the nozzle on the swing plate to swing back and forth through the sliding groove and the sliding rod, and the fixed shaft drives the placement plate to rotate through the first bevel gear and the second bevel gear, so that the wafer on the placement plate can be cooled by cold air in multiple directions, and the cooling efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of cooling device technology, and more specifically, to a high-efficiency cooling device for PZT thin film wafers. Background Technology

[0002] During wafer processing, the temperature of the wafer is generally around 300-400℃ when it comes out of the working chamber. It needs to pass through the cooling chamber to cool the temperature to a certain range before it can be transmitted for subsequent operations.

[0003] Chinese patent CN202220291958.0 discloses a novel wafer cooling cavity. This invention uses a gas-liquid separator to facilitate the discharge of air from the water supply assembly, thereby improving the cooling effect. Multiple fans installed on the protective base help to distribute the cold air more evenly. However, there are still some problems. The cold air of this cooling device can only flow from bottom to top, and only the bottom of the wafer is directly blown by the cold air, while the top and other parts of the wafer are not cooled as well, thus reducing the cooling effect. Utility Model Content

[0004] The purpose of this invention is to provide a high-efficiency cooling device for PZT thin film wafers to solve the problems mentioned in the background art.

[0005] Some existing cooling devices only allow cold air to flow from bottom to top, meaning that only the bottom of the wafer is directly exposed to the cold air, while the top and other parts of the wafer are not adequately cooled, thus reducing the cooling effect.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A high-efficiency cooling device for PZT thin film wafers includes a housing with a door rotatably connected to the outside. A fixed plate is fixedly connected inside the housing, and a placement plate is rotatably connected to the top of the fixed plate. The placement plate has through holes for the flow of cold air. A rotating shaft is rotatably connected inside the housing, and a rotating plate is fitted around the rotating shaft. The rotating plate is fixedly connected to the rotating shaft. A swing plate is fitted around the rotating plate and rotatably connected to the rotating plate. A nozzle is fixedly connected inside the swing plate, and the nozzle can directly spray cold air to cool the PZT thin film wafers. The nozzle is connected to the air outlet of a cooling machine or other equipment via a flexible hose. The flexible hose is located inside the rotating plate and the rotating shaft and extends to the outside of the housing. The hose end can be connected to the air outlet of the cooling equipment using a rotary joint.

[0008] Preferably, a first bevel gear is sleeved on the outside of the placement plate, and the first bevel gear is fixedly connected to the placement plate. A fixed shaft is fixedly connected to the outside of the rotating plate, and a second bevel gear is fixedly connected to the outside of the fixed shaft. The second bevel gear meshes with the first bevel gear. The rotating plate drives the second bevel gear to rotate through the fixed shaft, and the second bevel gear then drives the placement plate to rotate through the first bevel gear.

[0009] Preferably, a reciprocating lead screw is rotatably connected inside the rotating plate, a first gear is fixedly connected to the outside of the reciprocating lead screw, an external gear ring is sleeved on the outside of the rotating shaft, the external gear ring is fixedly connected to the housing, the first gear meshes with the external gear ring, and the reciprocating lead screw on the rotating plate will rotate under the action of the first gear and the external gear ring.

[0010] Preferably, a slider is sleeved on the outside of the reciprocating screw, the slider is threadedly connected to the reciprocating screw, a groove is opened inside the swing plate, a slide rod is slidably connected inside the groove, the slide rod is fixedly connected to the slider, when the reciprocating screw rotates, it will drive the slider to move back and forth, and the slider will then drive the swing plate to swing back and forth through the slide rod and the groove.

[0011] Preferably, a limiting groove is formed inside the rotating plate, and a limiting block is slidably connected inside the limiting groove. The limiting block is fixedly connected to the slider. The limiting groove and the limiting block limit the slider. Because the slider is limited by the limiting groove and the limiting block, the slider will move back and forth when the reciprocating screw rotates.

[0012] Preferably, a second gear is sleeved on the outside of the rotating shaft, and the second gear is fixedly connected to the rotating shaft. A mounting plate is fixedly connected to the outside of the housing, and a motor is fixedly connected to the outside of the mounting plate. A third gear is fixedly connected to the output end of the motor, and the third gear meshes with the second gear. The motor drives the rotating shaft to rotate through the second gear and the third gear.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] The motor drives the rotating shaft and the rotating plate on the rotating shaft to rotate through the second and third gears. This causes the rotating plate to drive the nozzle to rotate around the placement plate. Under the action of the first gear and the external gear ring, the reciprocating screw on the rotating plate will rotate. The reciprocating screw drives the slider to move back and forth. The slider drives the swing plate and the nozzle on the swing plate to swing back and forth through the slide groove and the slide rod. The fixed shaft drives the placement plate to rotate through the first bevel gear and the second bevel gear, so that the wafer on the placement plate can be cooled by cold air from multiple directions, thereby improving the cooling efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the external gear ring of this utility model;

[0017] Figure 3 This is a schematic diagram of the structure of the swing plate of this utility model;

[0018] Figure 4 This is a schematic diagram of the limiting block of this utility model.

[0019] The following are the labels in the diagram: 1. Box body; 2. Box door; 3. Fixing plate; 4. Placement plate; 5. Rotating shaft; 6. Rotating plate; 7. Swinging plate; 8. Nozzle; 9. First bevel gear; 10. Fixing shaft; 11. Second bevel gear; 12. Reciprocating screw; 13. First gear; 14. External gear ring; 15. Slider; 16. Slide groove; 17. Slide rod; 18. Limiting groove; 19. Limiting block; 20. Second gear; 21. Mounting plate; 22. Motor; 23. Third gear. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figures 1 to 4 A high-efficiency cooling device for PZT thin film wafers includes a housing 1, a door 2 rotatably connected to the outside of the housing 1, a fixed plate 3 fixedly connected to the inside of the housing 1, a placement plate 4 rotatably connected to the top of the fixed plate 3, and a through hole on the placement plate 4 for the circulation of cold air. A rotating shaft 5 rotatably connects to the inside of the housing 1, a rotating plate 6 is fitted around the outside of the rotating shaft 5, and the rotating plate 6 is fixedly connected to the rotating shaft 5. A swing plate 7 is fitted around the outside of the rotating plate 6, and the swing plate 7 is rotatably connected to the rotating plate 6. A nozzle 8 is fixedly connected inside the swing plate 7, and the nozzle 8 can directly spray cold air to cool the PZT thin film wafers. The nozzle 8 is connected to the air outlet of a cooling machine or other equipment through a hose. The hose is set inside the rotating plate 6 and the rotating shaft 5 and extends to the outside of the housing 1. The hose end can be connected to the air outlet of the cooling equipment with a rotary joint to avoid the hose from tangling or twisting.

[0022] Furthermore, a first bevel gear 9 is sleeved on the outside of the placement plate 4, and the first bevel gear 9 is fixedly connected to the placement plate 4. A fixed shaft 10 is fixedly connected to the outside of the rotating plate 6, and a second bevel gear 11 is fixedly connected to the outside of the fixed shaft 10. The second bevel gear 11 is meshed with the first bevel gear 9. When the rotating plate 6 rotates, the rotating plate 6 will drive the second bevel gear 11 to rotate through the fixed shaft 10, and the second bevel gear 11 will then drive the placement plate 4 to rotate through the first bevel gear 9.

[0023] Furthermore, a reciprocating lead screw 12 is rotatably connected inside the rotating plate 6, and a first gear 13 is fixedly connected to the outside of the reciprocating lead screw 12. An external gear ring 14 is sleeved on the outside of the rotating shaft 5. The external gear ring 14 is fixedly connected to the housing 1. The first gear 13 meshes with the external gear ring 14. When the rotating plate 6 rotates, the reciprocating lead screw 12 on the rotating plate 6 will rotate under the action of the first gear 13 and the external gear ring 14.

[0024] Furthermore, a slider 15 is sleeved on the outside of the reciprocating screw 12. The slider 15 is threadedly connected to the reciprocating screw 12. A groove 16 is opened inside the swing plate 7. A slide rod 17 is slidably connected inside the groove 16. The slide rod 17 is fixedly connected to the slider 15. When the reciprocating screw 12 rotates, it will drive the slider 15 to move back and forth. The slider 15 then drives the swing plate 7 to swing back and forth through the slide rod 17 and the groove 16, so that the swing plate 7 drives the nozzle 8 to swing back and forth.

[0025] Furthermore, a limiting groove 18 is provided inside the rotating plate 6, and a limiting block 19 is slidably connected inside the limiting groove 18. The limiting block 19 is fixedly connected to the slider 15. The slider 15 is limited by the limiting groove 18 and the limiting block 19. When the reciprocating screw 12 rotates, the slider 15 will move back and forth due to the limitation of the limiting groove 18 and the limiting block 19.

[0026] Furthermore, a second gear 20 is sleeved on the outside of the rotating shaft 5, and the second gear 20 is fixedly connected to the rotating shaft 5. A mounting plate 21 is fixedly connected to the outside of the housing 1, and a motor 22 is fixedly connected to the outside of the mounting plate 21. A third gear 23 is fixedly connected to the output end of the motor 22, and the third gear 23 meshes with the second gear 20. The motor 22 drives the rotating shaft 5 to rotate through the second gear 20 and the third gear 23, and the rotating shaft 5 then drives the rotating plate 6 to rotate around the placement plate 4.

[0027] The steps of using this utility model are as follows: When using this high-efficiency cooling device for PZT thin film wafers, the motor 22 drives the rotating shaft 5 and the rotating plate 6 on the rotating shaft 5 to rotate through the second gear 20 and the third gear 23. This causes the rotating plate 6 to drive the nozzle 8 to rotate around the placement plate 4. During this process, under the action of the first gear 13 and the external gear ring 14, the reciprocating screw 12 on the rotating plate 6 will rotate. The reciprocating screw 12 drives the slider 15 to move back and forth. The slider 15 then drives the swing plate 7 and the nozzle 8 on the swing plate 7 to swing back and forth through the slide groove 16 and the slide rod 17. At the same time, the rotating plate 6 will also drive the fixed shaft 10 to rotate. The fixed shaft 10 drives the placement plate 4 to rotate through the first bevel gear 9 and the second bevel gear 11. This allows the wafer on the placement plate 4 to be cooled by cold air from multiple directions, thereby improving the cooling efficiency.

[0028] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A high-efficiency cooling device for PZT thin film wafers, comprising a housing (1), wherein a door (2) is rotatably connected to the outside of the housing (1), characterized in that: A fixing plate (3) is fixedly connected inside the housing (1). A placement plate (4) is rotatably connected to the top of the fixing plate (3). A rotating shaft (5) is rotatably connected inside the housing (1). A rotating plate (6) is sleeved on the outside of the rotating shaft (5). The rotating plate (6) is fixedly connected to the rotating shaft (5). A swing plate (7) is sleeved on the outside of the rotating plate (6). The swing plate (7) is rotatably connected to the rotating plate (6). A nozzle (8) is fixedly connected inside the swing plate (7).

2. The high-efficiency cooling device for PZT thin film wafers according to claim 1, characterized in that: The placement plate (4) is fitted with a first bevel gear (9), which is fixedly connected to the placement plate (4). The rotating plate (6) is fixedly connected to a fixed shaft (10), and the fixed shaft (10) is fixedly connected to a second bevel gear (11), which meshes with the first bevel gear (9).

3. The high-efficiency cooling device for PZT thin film wafers according to claim 1, characterized in that: The rotating plate (6) is internally connected to a reciprocating lead screw (12), and the reciprocating lead screw (12) is externally fixedly connected to a first gear (13). The rotating shaft (5) is externally fitted with an external gear ring (14), which is fixedly connected to the housing (1). The first gear (13) meshes with the external gear ring (14).

4. The high-efficiency cooling device for PZT thin film wafers according to claim 3, characterized in that: The reciprocating screw (12) is fitted with a slider (15) on its outside. The slider (15) is threadedly connected to the reciprocating screw (12). The swing plate (7) has a groove (16) inside. A slide rod (17) is slidably connected inside the groove (16). The slide rod (17) is fixedly connected to the slider (15).

5. The high-efficiency cooling device for PZT thin film wafers according to claim 4, characterized in that: The rotating plate (6) has a limiting groove (18) inside, and a limiting block (19) is slidably connected inside the limiting groove (18). The limiting block (19) is fixedly connected to the slider (15).

6. The high-efficiency cooling device for PZT thin film wafers according to claim 1, characterized in that: The rotating shaft (5) is fitted with a second gear (20), which is fixedly connected to the rotating shaft (5). The housing (1) is fixedly connected with a mounting plate (21), which is fixedly connected to a motor (22). The output end of the motor (22) is fixedly connected with a third gear (23), which meshes with the second gear (20).

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