Substrate bearing mechanism

Abstract

The utility model relates to the technical field of semiconductor production, and discloses a substrate bearing mechanism, which comprises a frame body, a substrate bearing table is arranged at the top of the frame body, support steps for bearing substrates are annularly and uniformly distributed on the substrate bearing table, and guide inclined planes are arranged at the tops of the support steps; the heating assembly is used for heating the substrate; a plurality of guide cylinders; the lifting assembly comprises a driving unit, a lifting table, a plurality of mounting seats and a plurality of PINs, the output end of the driving unit is connected with the lifting table, the plurality of mounting seats are arranged on the lifting table, the mounting seats are arranged in the guide cylinder, and one PIN is fixedly arranged at the top of each mounting seat. The utility model has the beneficial effects that the contact area between the substrate bearing platform and the substrate is reduced, the heat loss of the substrate is reduced, and the heating efficiency of the substrate is improved. And meanwhile, a guide structure is arranged, so that the substrate is prevented from being clamped in the placing process. And clamping stagnation and damage of the PINs in the lifting process are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production, in particular to a substrate bearing mechanism. BACKGROUND

[0002] The existing substrate bearing mechanism is provided with a bearing surface on the substrate bearing table in order to bear the substrate, the contact area between the existing bearing surface and the substrate is large, the precision requirement is high during processing, and the processing difficulty is large. At the same time, due to the large overall area of the bearing surface, part of the heat is easily absorbed by the substrate table during heating of the substrate, the heat loss is large, the heating efficiency of the substrate is reduced, and the subsequent process progress is affected. In addition, when the substrate is placed on the bearing surface, the guiding structure is lacked, the substrate is easily jammed during the placing process, and the production efficiency is affected. In addition, the PIN needle is generally provided with a guide hole according to the outer dimension of the PIN needle during the lifting process, due to the long length of the PIN needle, the PIN needle is easily jammed and damaged due to the shift of the installation position during sliding in the guide hole, and the production efficiency is affected. SUMMARY

[0003] The utility model aims at providing a substrate bearing mechanism, reducing the contact area between the substrate bearing table and the substrate, reducing the heat loss of the substrate, and improving the heating efficiency of the substrate. At the same time, the guiding structure is provided to avoid the jamming of the substrate during the placing process. And the PIN needle is avoided from being jammed and damaged during the lifting process.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a substrate bearing mechanism, which comprises

[0005] The frame body is provided with a substrate bearing table on the top, the substrate bearing table is uniformly provided with a support step for bearing the substrate in a ring shape, the top of the support step is provided with a guide inclined surface, and the top of the guide inclined surface is inclinedly arranged away from the support step;

[0006] The heating assembly is fixedly arranged in the frame body and located below the substrate bearing table, and is used for heating the substrate;

[0007] A plurality of guide cylinders are fixedly arranged below the heating assembly;

[0008] The lifting assembly comprises a driving unit, a lifting table, a plurality of mounting seats and a plurality of PIN needles, the output end of the driving unit is connected with the lifting table, a plurality of mounting seats are arranged on the lifting table and correspond to the positions of the guide cylinders, the mounting seat is arranged in the guide cylinder and is in sliding connection with the guide cylinder, and one PIN needle is fixedly arranged on the top of each mounting seat;

[0009] The driving unit drives the lifting platform to ascend in the vertical direction, the mounting seat slides in the guide cylinder, and then drives the PIN pin to ascend in the vertical direction and penetrate the heating assembly and the substrate on the substrate supporting table.

[0010] Further, the heating assembly comprises a first base, a plurality of heat insulation discs, a second base, a heating disc, and a plurality of pressing rods. The bottom of the first base is provided with the guide cylinder. The first base is fixedly connected with the frame. The first base is provided with a mounting cavity. The second base is arranged in the mounting cavity. The heat insulation discs are arranged between the first base and the second base in a stacked manner. The heating disc is arranged above the second base. A plurality of pressing rods are arranged above the heating disc in a radial direction. The two ends of the pressing rods are connected with the first base.

[0011] Further, the heating assembly further comprises a plurality of plug screws and a plurality of supporting rings. The first base and the second base are connected by the plurality of plug screws. The threaded section of the plug screw is connected with the first base. The plug screw penetrates the second base and the plurality of heat insulation discs in sequence. The plug screw is provided with a plurality of supporting rings in an axial direction. The supporting rings are arranged between the first base and the heat insulation disc, between adjacent heat insulation discs, and between the heat insulation disc and the second base.

[0012] Further, the frame is provided with a plurality of bearings at the bottom. The bearings are provided with guide rods. The top of the guide rod is fixedly connected with the lifting platform.

[0013] Further, the top of the first base is provided with an installation groove corresponding to the pressing rod. The top of the first base is provided with a pressing piece for limiting the installation of the pressing rod.

[0014] Further, the number of the pressing rods is at least three. The pressing rods are arranged in a radial direction of the heating disc.

[0015] Further, the second base and the heating disc are provided with through holes for the PIN pin to penetrate.

[0016] Further, the top of the substrate supporting table is provided with a guide screw near the supporting step. The guide screw has the guide inclined surface.

[0017] Further, the top of the substrate supporting table is provided with a substrate taking groove.

[0018] Further, the number of the supporting steps is at least three. The supporting steps are arranged in a ring shape on the top of the frame.

[0019] The embodiment of the utility model a substrate bearing mechanism compared with prior art, its beneficial effect lies in: on the piece of support annular uniform distribution is used for bearing the substrate support step, reduce the contact area between the piece of support and the substrate, convenient processing, reduce the heat loss of the substrate, improve the substrate heating efficiency. In addition, the top of support step is equipped with guide slope, the top of guide slope is set up obliquely to the back of support step, is used for guiding when the substrate is placed, avoids the substrate to place the jam. In addition, be equipped with a plurality of guide cylinder, PIN needle is equipped with the top of mounting seat, mounting seat is equipped with in guide cylinder, and with guide cylinder sliding connection, the process of driving unit is driven PIN to lift, because mounting seat is in guide cylinder sliding guide, replaces the structure according to the appearance of PIN needle and guides, can avoid PIN needle jammed damage in the process of lifting. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is the sectional view of the utility model embodiment substrate bearing mechanism;

[0021] Figure 2 It is Figure 1 The local enlarged view of A in

[0022] Figure 3 It is the top view of the utility model embodiment substrate bearing mechanism.

[0023] In the figure, 1, frame body;100, guide slope;11, piece of support;111, support step;112, take piece groove;12, guide screw;2, heating assembly;21, first base;211, mounting groove;212, press piece;22, heat insulation disc;23, second base;24, heating disc;25, press rod;26, plug screw;27, support ring;3, guide cylinder;4, lifting assembly;41, lifting platform;42, mounting seat;43, PIN needle;5, bearing;6, guide rod;7, via hole. DETAILED DESCRIPTION

[0024] The specific implementation of the utility model will be described in further detail below in combination with the drawings and examples. The following examples are used to illustrate the utility model, but not to limit the scope of the utility model.

[0025] In the description of the utility model, it should be understood that the position relationship indicated by the terms "upper", "lower", "front", "rear", "inner", "outer" and the like in the utility model is based on the position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the devices and elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the utility model.

[0026] In the description of the utility model, it should be understood that the utility model uses the terms "first", "second" and the like to describe various information, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the utility model, the "first" information can also be referred to as "second" information, and similarly, the "second" information can also be referred to as "first" information.

[0027] As Figures 1 to 3 Indicated, the utility model preferred embodiment of a substrate bearing mechanism is used to bear the substrate, and is used to heat the substrate, it includes frame body 1, heating assembly 2, guide cylinder 3, lifting assembly 4. Wherein, frame body 1 is used as the installation carrier, frame body 1 top is equipped with the piece table 11, in order to reduce the contact area between piece table 11 and substrate, reduce the processing difficulty, the support step 111 for bearing substrate is uniformly distributed on piece table 11 annular, further, in order to facilitate the guidance when placing the substrate, avoid the jam when placing the substrate, refer to Figure 1 , the top of support step 111 is equipped with guide slope 110, the top of guide slope 110 is inclined to set back to support step 111. In order to facilitate the heating of the substrate, refer to Figure 1 , heating assembly 2 is fixedly arranged in frame body 1 and is located below piece table 11. Because the corresponding guide structure is directly set according to the outer shape size of PIN, the installation precision of PIN needle 43 is higher, at the same time, PIN needle 43 is easy to jam and damage in the lifting process, therefore, the utility model sets multiple guide cylinders 3, and cooperates with mounting seat 42, guides and limits between mounting seat 42 and guide cylinder 3 in the lifting process, makes PIN needle 43 lifting process stable, avoids PIN needle 43 jam and damage. Specifically, multiple guide cylinders 3 are fixedly arranged below heating assembly 2; lifting assembly 4 includes drive unit (not shown in the figure), lifting platform 41, multiple mounting seats 42 and multiple PIN needles 43, wherein the output end of drive unit and lifting platform 41 are connected, in order to simplify the structure, reduce the design difficulty, drive unit can select cylinder or linear module, and can be directly purchased. Multiple mounting seats 42 are arranged on lifting platform 41 and correspond to the positions of guide cylinders 3, mounting seat 42 is arranged in guide cylinder 3 and is connected with guide cylinder 3 slidingly, and one PIN needle 43 is fixedly arranged on the top of each mounting seat 42. The process that lifting assembly 4 drives PIN needle 43 to rise is specifically as follows: drive unit drives lifting platform 41 to rise along the vertical direction, mounting seat 42 slides in guide cylinder 3, and then drives PIN needle 43 to rise in the vertical direction and penetrates heating assembly 2 and the substrate on piece table 11 to contact. Figure 1 In the description of the utility model, it should be understood that the utility model uses the terms "first", "second" and the like to describe various information, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the utility model, the "first" information can also be referred to as "second" information, and similarly, the "second" information can also be referred to as "first" information.

[0028] In some embodiments, in order to facilitate the design of heating assembly 2, simplify the structure, refer toFigure 1 、 Figure 2 The heating assembly 2 comprises a first base 21, a plurality of heat insulation discs 22, a second base 23, a heating disc 24 and a plurality of pressing rods 25. The bottom of the first base 21 is provided with the guide cylinder 3, and the first base 21 is fixedly connected with the frame body 1. The first base 21 is internally provided with a mounting cavity, and the second base 23 is arranged in the mounting cavity. The heating disc 24 is arranged above the second base 23. In order to reduce heat loss during the operation of the heating disc 24, the heat insulation disc 22 is arranged between the first base 21 and the second base 23. In order to facilitate the positioning of the heating disc 24 and the heat insulation disc 22, a plurality of pressing rods 25 are arranged above the heating disc 24 in the radial direction, and the two ends of the pressing rod 25 are connected with the first base 21. The pressing rod 25 is used to position the parts in the mounting cavity, so that a certain deformation space can be reserved to avoid damage caused by the deformation of the parts due to heat.

[0029] Further, in order to facilitate the installation and positioning between the first base 21 and the second base 23, the heating assembly 2 further comprises a plurality of plug screws 26 and a plurality of support rings 27. The first base 21 and the second base 23 are connected through the plurality of plug screws 26. The threaded section of the plug screw 26 is connected with the first base 21, and the plug screw 26 sequentially penetrates the second base 23 and the plurality of heat insulation discs 22. In order to facilitate the stacking of the heat insulation disc 22 and improve the heat insulation effect, the plug screw 26 is axially sleeved with a plurality of support rings 27. The support ring 27 is arranged between the first base 21 and the heat insulation disc 22, between adjacent heat insulation discs 22 and between the heat insulation disc 22 and the second base 23. In this embodiment, the number of plug screws 26 is three, and they are evenly distributed along the axial direction of the first base 21.

[0030] Further, in order to facilitate the movement of the lifting platform 41, the bearing 5 and the guide rod 6 are further included. Specifically, the bottom of the frame body 1 is connected with a plurality of bearings 5, the guide rod 6 is arranged in the bearing 5, and the top of the guide rod 6 is fixedly connected with the lifting platform 41. The driving unit can be arranged at the top of the frame body 1, and the output end extends into the frame body 1 and is fixedly connected with the lifting platform 41.

[0031] In some embodiments, in order to facilitate the installation and positioning of the pressing rod 25, the top of the first base 21 is provided with an installation groove 211 corresponding to the pressing rod 25, and the top of the first base 21 is provided with a pressing piece 212 for installation and positioning of the pressing rod 25. The pressing piece 212 can limit the installation of the pressing rod 25 in the axial and vertical directions. Further, in order to facilitate the arrangement of the pressing rod 25 and make the parts in the mounting cavity bear force uniformly, the number of the pressing rod 25 is at least three, and they are evenly distributed along the radial direction of the heating disc 24.

[0032] Further, in order to facilitate the contact between the PIN needle 43 and the substrate when the PIN needle 43 rises, the second base 23 and the heating disc 24 are provided with through holes 7 for the PIN needle 43 to pass through, and the gap between the through hole 7 and the PIN needle 43 can be greater than 0.5 mm.

[0033] Further, in some embodiments, in order to facilitate the setting of the guide slope 110 and reduce the processing difficulty of the substrate supporting table 11, the top of the substrate supporting table 11 is provided with a guide screw 12 near the support step 111, and the guide screw 12 has the guide slope 110. At the same time, in order to facilitate the taking and placing of the substrate, the top of the substrate supporting table 11 is provided with a substrate taking groove 112, which facilitates the taking and placing of the substrate on the substrate supporting table 11. Further, in order to ensure the support strength of the substrate and facilitate the limiting, the number of support steps 111 is at least 3, and the support steps 111 are evenly distributed on the top of the frame body 1.

[0034] In summary, the substrate supporting mechanism provided by the embodiments of the present application has the support steps 111 evenly distributed on the substrate supporting table 11, which reduces the contact area between the substrate supporting table 11 and the substrate, facilitates the processing, reduces the heat loss of the substrate, and improves the heating efficiency of the substrate. In addition, the top of the support step 111 is provided with the guide slope 110, the top of the guide slope 110 is inclined away from the support step 111, and the guide slope 110 is used for guiding the placement of the substrate to avoid the placement of the substrate from being stuck. In addition, a plurality of guide cylinders 3 are provided, the PIN needle 43 is arranged on the top of the mounting seat 42, the mounting seat 42 is arranged in the guide cylinder 3 and is in sliding connection with the guide cylinder 3, and during the lifting process of the PIN driven by the driving unit, the mounting seat 42 slides in the guide cylinder 3 to replace the structure for guiding according to the shape of the PIN needle 43, so that the PIN needle 43 can be prevented from being stuck and damaged during the lifting process.

[0035] The above only describes the preferred embodiments of the present application, and it should be noted that for those skilled in the art, without departing from the technical principles of the present application, a number of improvements and replacements can be made, and these improvements and replacements should also be considered as the protection scope of the present application.

Claims

1. A substrate support mechanism, characterized in that: The utility model provides a substrate heating device, including The frame body top is equipped with the tablet bearing station, and the tablet bearing station is uniformly distributed with the support step for carrying the substrate in the annular, and the top of support step is equipped with the guide slope, and the top of guide slope is arranged in the slope to the support step back; The heating assembly is fixedly arranged in the frame body and located below the tablet bearing station, and is used for heating the substrate; A plurality of guide cylinders are fixedly arranged below the heating assembly; The lifting assembly includes a driving unit, a lifting table, a plurality of mounting seats, and a plurality of PIN needles. The output end of the driving unit is connected to the lifting table. A plurality of mounting seats are arranged on the lifting table and correspond to the positions of the guide cylinders. The mounting seats are arranged in the guide cylinders and are in sliding connection with the guide cylinders. The top of each mounting seat is fixedly provided with a PIN needle. The driving unit drives the lifting table to rise in the vertical direction, the mounting seat slides in the guide cylinder, and the PIN needle is driven to rise in the vertical direction and penetrate the heating assembly to contact the substrate on the tablet bearing station.

2. The substrate support mechanism of claim 1 wherein: the substrate support mechanism is configured to support a substrate having a diameter of 300 mm or greater. The heating assembly includes a first base, a plurality of heat insulation discs, a second base, a heating disc, and a plurality of pressing rods. The bottom of the first base is provided with the guide cylinder. The first base is fixedly connected to the frame body. The first base is provided with a mounting cavity. The second base is arranged in the mounting cavity. The heat insulation discs are arranged between the first base and the second base. The second base is provided with the heating disc above. A plurality of pressing rods are arranged radially above the heating disc. The two ends of the pressing rod are connected to the first base.

3. The substrate support mechanism of claim 2 wherein: the first and second support members are formed of a material having a coefficient of thermal expansion that is less than the coefficient of thermal expansion of the substrate. The heating assembly further includes a plurality of plug screws and a plurality of support rings. The first base and the second base are connected by a plurality of plug screws. The threaded section of the plug screw is connected to the first base. The plug screw penetrates the second base and a plurality of heat insulation discs in sequence. The plug screw is provided with a plurality of support rings in the axial direction. The support rings are arranged between the first base and the heat insulation disc, between adjacent heat insulation discs, and between the heat insulation disc and the second base.

4. The substrate support mechanism of claim 2, wherein: the first and second support members are formed of a material having a coefficient of thermal expansion that is less than a coefficient of thermal expansion of the substrate. The frame body is further provided with a plurality of bearings at the bottom, and the bearings are provided with a guide rod. The top of the guide rod is fixedly connected to the lifting table.

5. The substrate support mechanism of claim 2 wherein: the substrate support mechanism is configured to support a substrate having a diameter of 300 mm or greater. The top of the first base is provided with an installation groove corresponding to the pressing rod. The top of the first base is provided with a pressing piece for limiting the installation of the pressing rod.

6. The substrate support mechanism of claim 2 wherein: the substrate support mechanism is configured to support a substrate having a diameter of 300 mm or greater. The number of pressing rods is at least three, and they are uniformly distributed in the radial direction of the heating disc.

7. The substrate support mechanism of claim 2 wherein: the substrate support mechanism is configured to support a substrate having a diameter of 300 mm or greater. The second base and the heating disc are provided with through holes for the PIN needles to penetrate.

8. The substrate support mechanism of claim 1 wherein: the substrate support mechanism is configured to support a substrate having a diameter of 300 mm or greater. The top of the tablet bearing station is provided with a guide screw near the support step. The guide screw has the guide slope.

9. The substrate support mechanism of claim 1 wherein: the substrate support mechanism is configured to support a substrate having a diameter of 300 mm or greater. The top of the tablet bearing station is provided with a tablet taking groove.

10. The substrate support mechanism of claim 1 wherein: the substrate support mechanism is configured to support a substrate having a diameter of 300 mm or greater. The number of support steps is at least three, and they are uniformly distributed in the annular top of the frame body.

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