Chuck installation calibration tool

Abstract

The utility model relates to a chuck installation calibration tool. The chuck installation correction tool is used for assembling a chuck. The chuck comprises a suction cup, a heating piece and a flow channel disc, the heating piece is arranged on the suction cup, the flow channel disc is assembled above the heating piece and the suction cup, and a wire outlet hole for a lead of the heating piece to penetrate through is formed in the flow channel disc. The chuck installation calibration tool comprises a support, a runner disc carrying piece, a lead fixing piece and a lifting mechanism. The support comprises a base used for bearing the suction cup. And the runner disc carrier is positioned above the base and is connected to the bracket in a manner of moving up and down through a lifting mechanism. And the lead fixing piece is positioned above the runner disc carrying piece and is connected to the bracket. And the lead wire fixing piece is provided with a wire buckle for straightening and fixing the lead wire. The runner disc is driven by the lifting mechanism to move downwards so as to be assembled with the suction cup. The chuck installation calibration tool is convenient to operate, the chuck can be assembled by a single person, and the assembling difficulty of the chuck is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor testing, in particular to a chuck installation gauge for facilitating assembly of a chuck for semiconductor testing. BACKGROUND

[0002] A chuck for semiconductor testing, also known as a chuck plate in the industry, generally comprises a suction plate, a flow channel plate and a heating sheet. The heating sheet and the flow channel plate are assembled on the suction plate to control the temperature of the suction plate. In the prior art, there is a chuck plate with multi-zone temperature control, which comprises a plurality of heating sheets that can be independently controlled. Since each heating sheet needs to be connected to an external power supply component through a lead, there are many leads of the heating sheets. When the chuck plate is assembled, the leads need to pass through the flow channel plate. When manually assembling, the flow channel plate is usually held up, and then the leads of the heating sheet between the flow channel plate and the suction plate are straightened to avoid the leads being bent between the flow channel plate and the suction plate, so that the flow channel plate cannot be installed in place, and then the flow channel plate is slowly lowered and docked with the suction plate. However, since there are many leads of the heating sheet and the assembly of the flow channel plate and the suction plate needs to ensure high assembly accuracy, the above manual assembly process cannot ensure that the leads between the flow channel plate and the suction plate always remain straight, and cannot ensure that the assembly of the flow channel plate and the suction plate meets the assembly accuracy requirements. Moreover, the entire assembly process needs to be completed by 2-3 people, which is high in labor cost.

[0003] Therefore, it is necessary to provide a new technical scheme to overcome the deficiencies in the prior art. CONTENT OF THE UTILITY MODEL

[0004] Based on this, the present application provides a chuck installation gauge, which is convenient to operate and can complete the assembly of the chuck by a single person, thereby reducing the assembly difficulty of the chuck.

[0005] To this end, the present application adopts the following technical scheme: a chuck installation gauge for assembling a chuck, the chuck comprising a suction plate, a heating member and a flow channel plate for controlling the temperature of the suction plate, the heating member being arranged on the suction plate, and the flow channel plate being assembled above the heating member and the suction plate, the flow channel plate being provided with a wire outlet hole, and the heating member comprising a lead wire, the lead wire passing through the wire outlet hole; wherein the chuck installation gauge comprises a support, a flow channel plate carrier, a lead wire fixing member and a lifting mechanism, the support comprising a base for carrying the suction plate, the flow channel plate carrier being located above the base and being movably connected to the support by the lifting mechanism, the lead wire fixing member being located above the flow channel plate carrier and being connected to the support, the lead wire fixing member being provided with a wire buckle for straightening and fixing the lead wire, and the flow channel plate being driven by the lifting mechanism to move downward to be assembled with the suction plate.

[0006] In some embodiments, the flow channel tray carrier includes a side frame capable of surrounding the flow channel tray, and a fixing member for fixing the flow channel tray to the side frame.

[0007] In some embodiments, the fixing member fixes the flow channel tray to the side frame on the upper side and / or the peripheral side of the flow channel tray.

[0008] In some embodiments, the lifting mechanism includes a lifting base, the side frame is fixed to the lifting base, and the flow channel tray carrier further includes a horizontal positioning member for connecting the flow channel tray to the lifting base.

[0009] In some embodiments, the fixing member and the horizontal positioning member are provided with long strip-shaped connecting grooves, and the fixing member and the horizontal positioning member are connected to the flow channel tray by fasteners passing through the connecting grooves.

[0010] In some embodiments, the lead fixing member includes a plurality of wire clamps, each wire clamp being provided for fixing a plurality of leads.

[0011] In some embodiments, the lead fixing member includes a strip-shaped side frame, the strip-shaped side frame is fixed to the support, and the plurality of wire clamps are arranged on the strip-shaped side frame.

[0012] In some embodiments, the wire clamp includes a fixed arm fixed to the strip-shaped side frame and an elastic arm cooperating with the fixed arm to surround a wire passing space, and the free end of the elastic arm is capable of being locked towards the fixed arm.

[0013] In some embodiments, the lifting mechanism includes a lifting base, a lead screw, a lead screw nut, and a guide rail assembly, the lead screw nut is fixed to the lifting base, the lead screw passes through the lead screw nut, and the guide rail assembly is connected between the lifting base and the support.

[0014] In some embodiments, the chuck installation gauge further includes a plurality of positioning rods, the positioning rods extend upward from the base for positioning the flow channel tray.

[0015] The chuck installation gauge provided by the application comprises a support, a flow channel disc carrier, a lead wire fixing member and a lifting mechanism, the flow channel disc carrier is used to carry a flow channel disc, the lead wire fixing member is used to fix a lead wire passing through the flow channel disc, the flow channel disc carrier carries the flow channel disc to be installed towards a suction disc under the action of the lifting mechanism, during the movement, since the lead wire is fixed and straightened by the lead wire fixing member, the movement of the flow channel disc towards the suction disc is not affected. Therefore, the chuck installation gauge provided by the application can ensure that the lead wire between the suction disc and the flow channel disc is in a straightened state, facilitate the installation of the flow channel disc and the suction disc, and at the same time, the installation by the lifting mechanism is convenient and reliable in positioning, and the assembly can be completed by one person, so that the assembly difficulty of the chuck is greatly reduced. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description only constitute some embodiments of the application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0017] Figure 1 It is a schematic view of the three-dimensional structure of the chuck involved in the chuck installation gauge of the application.

[0018] Figure 2 It is a three-dimensional assembly view of one embodiment of the chuck installation gauge of the application.

[0019] Figure 3 It is a three-dimensional assembly view of another view of one embodiment of the chuck installation gauge of the application.

[0020] Figure 4 It is Figure 3 It is a partial enlarged view of position A in FIG. 4.

[0021] Figure 5 It is a partial enlarged view of the lower part of the positioning rod in one embodiment of the chuck installation gauge of the application.

[0022] Figure 6 It is a schematic view of the assembly state when the chuck installation gauge of the application is installed.

[0023] Figure 7 It is a schematic view of the assembly state when the chuck installation gauge of the application is installed from another view.

[0024] The element reference numbers are as follows: 100, chuck installation gauge; 1, support; 11, base; 12, limiting column; 2, flow channel disc carrier; 21, side frame; 22, fixing piece; 23, horizontal positioning piece; 3, lead wire fixing piece; 31, strip-shaped frame; 32, wire buckle; 320, wire threading space; 321, fixing arm; 322, elastic arm; 4, lifting mechanism; 41, lifting base; 42, lead screw; 43, lead screw nut; 44, guide rail; 45, sliding block; 46, hand wheel; 5, positioning rod; 51, installation head; 510, screw hole; 200, chuck; 201, suction disc; 202, flow channel disc; 203, heating piece; 204, lead wire; 205, wire outlet hole. DETAILED DESCRIPTION

[0025] To make the above objectives, features and advantages of the present application more apparent, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. In the following description, a lot of specific details are set forth in order to fully understand the present application. However, the present application can be implemented in many different ways other than those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0026] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there can be a middle element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there can be a middle element. The terms "vertical", "horizontal", "up", "down", "left", "right", and the like used in the specification of the present application are for the purpose of illustration only, and do not indicate the only implementation.

[0027] In addition, the terms "first", "second", etc. are used only for the purpose of description and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0028] In the present application, unless specifically defined and limited otherwise, the first feature is "on", "under", "above" or "over" the second feature can be that the first feature is in direct contact with the second feature, or the first feature is indirectly in contact with the second feature through an intermediate medium. Moreover, the first feature is "on", "above" and "over" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature is "under", "below" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is lower than the second feature in horizontal height.

[0029] Unless otherwise defined, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used in the specification of the present application includes any and all combinations of one or more related listed items.

[0030] Please refer to Figures 1 to 7 As shown in the figure, the present application provides a chuck installation gauge 100 for assembling a chuck 200. Please refer to Figure 1 As shown in the figure, the chuck 200 includes a suction cup 201, and a heating element 203 and a flow channel disc 202 for temperature control of the suction cup 201. The heating element 203 is arranged on the suction cup 201, and the flow channel disc 202 is assembled above the heating element 203 and the suction cup 201. The flow channel disc 202 is provided with a wire outlet hole 205, and the heating element 203 includes a lead wire 204 which passes through the wire outlet hole 205.

[0031] In the present embodiment, the lower surface of the suction cup 201 is the adsorption surface for adsorbing devices such as semiconductor chips, and the heating element 203 is arranged at the upper surface of the suction cup 201. In the present embodiment, the heating element 203 is a ceramic heating sheet, which is arranged in an array on the upper surface of the suction cup 201. The lead wire 204 included in the heating element 203 passes through the flow channel disc 202 upwardly to be electrically connected with the power supply component.

[0032] In the assembled state, the flow channel disc 202 is in contact with the suction disc 201, and the heating element 203 is clamped between the flow channel disc 202 and the suction disc 201. The flow channel disc 202 is provided with a flow channel for the flow of cooling medium. The flow channel disc 202 and the heating element 203 work together to regulate the temperature of the suction disc 201. The flow channel disc 202 is provided with a wire outlet hole 205 corresponding to the lead wire 204. The wire outlet hole 205 penetrates the flow channel disc 202 from top to bottom, but does not communicate with the flow channel in the flow channel disc 202, so as to avoid leakage of the cooling medium. The size of the wire outlet hole 205 is set to be as small as possible under the premise of ensuring that the lead wire 204 can pass through, so as to reduce the opening area of the flow channel disc 202 and reduce the influence on the heat transfer performance of the flow channel disc 202. However, since the wire outlet hole 205 cannot be too large, when the flow channel disc 202 is installed towards the suction disc 201, the lead wire 204 located between the flow channel disc 202 and the suction disc 201 should be in a straightened state, so as to prevent the lead wire 204 located between the flow channel disc 202 and the suction disc 201 from being bent and causing the flow channel disc 202 to be not installed in place.

[0033] Please refer to Figure 2 and Figure 3 The chuck installation tool 100 provided by the present application is used to assemble the chuck 200 as described above. The chuck installation tool 100 comprises a support 1, a flow channel disc carrier 2, a lead wire fixing member 3 and a lifting mechanism 4. The support 1 comprises a base 11 for carrying the suction disc 201. The flow channel disc carrier 2 is located above the base 11 and is movably connected to the support 1 by the lifting mechanism 4. The lead wire fixing member 3 is located above the flow channel disc carrier 2 and is connected to the support 1. The lead wire fixing member 3 is provided with a wire buckle 32 for straightening and fixing the lead wire 204. The flow channel disc 202 is driven by the lifting mechanism 4 to move downward to assemble with the suction disc 201.

[0034] The chuck installation tool 100 provided by the present application can ensure that the lead wire 204 between the suction disc 201 and the flow channel disc 202 is in a straightened state, facilitating the installation of the flow channel disc 202 and the suction disc 201. At the same time, the movement of the flow channel disc 202 is realized by the lifting mechanism 4, which is convenient and reliable in operation, and can be completed by a single person, greatly reducing the assembly difficulty of the chuck 200.

[0035] Please continue to refer to Figure 2 and Figure 3As shown, the support 1 is used to install the flow channel disc carrier 2, the lead fixing member 3 and the lifting mechanism 4. In the embodiment, the support 1 comprises a base 11 and a frame in the shape of a door. The base 11 constitutes the base of the support 1, and is used to stably place the support 1 on a table top. The base 11 comprises a boss portion, which is used to support the suction disc 201. The frame in the shape of a door extends vertically, and its lower end is fixed on the base 11. The frame is used to install the lead fixing member 3 and the lifting mechanism 4. The lead fixing member 3 is fixed on the frame, and is located close to the upper end of the frame; the lifting mechanism 4 is connected to the frame and can move up and down.

[0036] Please refer to Figure 2 and Figure 3 , the chuck installation gauge 100 further comprises a plurality of positioning rods 5, which extend upward from the base 11 to pass through the flow channel disc 202 for positioning. It can be understood that the flow channel disc 202 is correspondingly provided with holes for the positioning rods 5 to pass through. In the embodiment, there are three positioning rods 5, so that the position of the flow channel disc 202 in the horizontal direction can be uniquely determined. The positioning of the flow channel disc 202 can be achieved by the penetrating cooperation of the flow channel disc 202 and the positioning rods 5, and the positioning rods 5 can also play a guiding role during the downward movement of the flow channel disc 202 for assembly. Please refer to Figure 5 together, in the embodiment, the lower end of the positioning rod 5 has a mounting head 51, which is non-cylindrical, and is inserted into the matching groove in the base 11 to prevent the positioning rod 5 from rotating. In the embodiment, the mounting head 51 is a D-shaped column, and in other embodiments, it can also be a rectangular column or other shapes. The bottom surface of the mounting head 51 is provided with a screw hole 510, so that a screw can pass through from below the base 11 and be locked in the screw hole 510 to fix the positioning rod 5.

[0037] Please continue to refer to Figure 2 and Figure 3As shown, the flow channel disc carrier 2 comprises a side frame 21 capable of surrounding the flow channel disc 202, and a fixing member 22 for fixing the flow channel disc 202 to the side frame 21. In the embodiment, the flow channel disc 202 is circular, and the side frame 21 is a substantially circular metal hoop. The side frame 21 is bent from a metal strip, and the two ends thereof are fixedly connected to the lifting mechanism 4. Since the flow channel disc 202 is to be installed from top to bottom with the suction disc 201, the flow channel disc carrier 2 cannot support the flow channel disc 202 from below, and therefore in the embodiment, the fixing member 22 fixes the flow channel disc 202 to the side frame 21 on the upper side and the peripheral side of the flow channel disc 202. Specifically, the fixing member 22 is a plurality of substantially L-shaped connecting pieces, and the L-shaped connecting pieces extend to the upper surface and the peripheral side of the flow channel disc 202. Connecting grooves are formed on the connecting pieces, and the flow channel disc 202 is provided with connecting holes corresponding to the connecting grooves, and the flow channel disc 202 can be fixed by means of fasteners such as screws passing through the connecting grooves and locking to the connecting holes of the flow channel disc 202. In the embodiment, the connecting grooves are long strips, which can accommodate certain manufacturing and assembly errors, so as to ensure that the connecting grooves can correspond to the connecting holes on the flow channel disc 202. In other embodiments, the fixing member 22 can fix the flow channel disc 202 only on the upper side thereof, or only on the peripheral side thereof.

[0038] Referring to Figure 3 As shown, the flow channel disc carrier 2 further comprises a horizontal positioning member 23, which is used to connect the flow channel disc 202 to the lifting base 41 of the lifting mechanism 4, so as to keep the flow channel disc 202 in a horizontal state. In the embodiment, the fixing members 22 can be relatively concentrated at one end of the side frame 21 opposite to the lifting base 41, and the fixing members 22 and the horizontal positioning member 23 are respectively positioned at substantially opposite ends of the flow channel disc 202, so as to keep the flow channel disc 202 in a horizontal state. The horizontal positioning member 23 is also provided with long strip-shaped connecting grooves, and the horizontal positioning member 23 is connected to the flow channel disc 202 by means of fasteners passing through the connecting grooves.

[0039] Referring to Figures 2 to 4As shown, in the present embodiment, the lead fixing member 3 comprises a strip-shaped frame 31 and a plurality of wire clamps 32. The strip-shaped frame 31 is fixed to the support 1, and the plurality of wire clamps 32 are arranged on the strip-shaped frame 31. Each wire clamp 32 is provided for fixing a plurality of leads 204. In the present embodiment, the plurality of wire clamps 32 are evenly distributed on the outer side of the strip-shaped frame 31. The leads 204 can be distributed into groups, and the portions of the leads 204 in the same group above the runner tray 202 can be bundled and then inserted into a wire clamp 32. It should be noted that although the portions of the leads 204 above the runner tray 202 are bent and inclined when bundled, the leads 204 between the runner tray 202 and the suction tray 201 are straightened and limited by the lead holes 205 on the runner tray 202, so that the leads 204 between the runner tray 202 and the suction tray 201 are in a vertical state, which can ensure that the runner tray 202 is smoothly installed downward.

[0040] In the present embodiment, the wire clamp 32 comprises a fixed arm 321 fixed to the strip-shaped frame 31 and an elastic arm 322 cooperating with the fixed arm 321 to enclose a wire passing space 320. The fixed arm 321 and the elastic arm 322 are both provided with holes, and the free end of the elastic arm 322 can be locked toward the fixed arm 321 by locking a fastener such as a screw into the holes, so as to clamp the leads 204 passing through the wire passing space 320. In the present embodiment, the wire clamp 32 is bent from a metal sheet, which can be fixed to the strip-shaped frame 31 by welding, riveting, screwing or the like; in other embodiments, the wire clamp 32 can be integrally formed with the strip-shaped frame 31.

[0041] Please refer to Figure 3 As shown, the lifting mechanism 4 comprises a lifting base 41, a lead screw 42, a lead screw nut 43 and a guide rail assembly. The lead screw nut 43 is fixed to the lifting base 41. The lead screw 42 passes through the lead screw nut 43 and is threadedly connected with the lead screw nut 43. The guide rail assembly is connected between the lifting base 41 and the support 1. The guide rail assembly comprises a guide rail 44 and a sliding block 45. The guide rail 44 is fixed to the support 1, and the sliding block 45 is fixed to the lifting base 41. The sliding block 45 is sleeved on the guide rail 44, and the lifting base 41 and the sliding block 45 as a whole can slide relative to the guide rail 44. The lifting mechanism 4 further comprises a hand wheel 46 fixed to the lead screw 42, which can manually drive the lead screw 42 to rotate. The side frame 21 of the runner tray carrier 2 is fixed to the lifting base 41. The base 11 is further provided with a limiting post 12 below the position opposite to the lifting base 41 to limit the lowest position of the downward movement of the lifting base 41. In the present embodiment, the limiting post 12 is a bolt. The height of the limiting post 12 can be adjusted by the depth of the bolt screwed into the base 11, so as to adjust the lowest position of the movable lifting base 41.

[0042] Please refer to Figure 6 and Figure 7As shown, in use, first, the suction disc 201 is fixed on the base 11; second, the flow channel disc 202 is passed through the positioning rod 5 and fixed on the flow channel disc carrier 2, the lead wire 204 is passed through the wire hole 205 on the flow channel disc 202; then the part of the lead wire 204 above the flow channel disc 202 is divided into several bundles and respectively inserted into the wire buckle 32 of the lead wire fixing member 3, and is straightened and locked and fixed, so that the part of the lead wire 204 between the flow channel disc 202 and the suction disc 201 is in a vertical state; then the hand wheel 46 is rotated to make the flow channel disc 202 move downward to be installed with the suction disc 201; after the assembly of the flow channel disc 202 and the suction disc 201 is completed, the flow channel disc 202 is removed from the flow channel disc carrier 2, the lead wire 204 is taken out of the wire buckle 32, and the assembled chuck 200 is taken off from the chuck installation gauge 100.

[0043] From the above description of the specific embodiments, it can be known that the chuck installation gauge 100 provided by the present application includes the bracket 1, the flow channel disc carrier 2, the lead wire fixing member 3 and the lifting mechanism 4, the flow channel disc carrier 2 is used to carry the flow channel disc 202, the lead wire fixing member 3 is used to fix the lead wire 204 passing through the flow channel disc 202, and the flow channel disc carrier 2 carrying the flow channel disc 202 is installed towards the suction disc 201 under the action of the lifting mechanism 4. In the movement process, since the lead wire 204 is fixed and straightened by the lead wire fixing member 3, it does not affect the movement and installation of the flow channel disc 202 towards the suction disc 201. Therefore, the chuck installation gauge 100 provided by the present application can ensure that the lead wire 204 between the suction disc 201 and the flow channel disc 202 is in a straightened state, facilitate the installation of the flow channel disc 202 and the suction disc 201, and at the same time, the installation is convenient, the movement during installation is reliable, and the assembly can be completed by one person, thereby greatly reducing the assembly difficulty of the chuck 200.

[0044] The technical features of the above embodiments can be combined arbitrarily, and in order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, however, as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0045] The above-described embodiments only express several implementation manners of the present application, the description is more specific and detailed, but it should not be understood as a limitation on the patent protection scope of the present application. It should be pointed out that for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A chuck installation gauge for assembling a chuck (200), the chuck (200) comprising a chuck plate (201), a heating element (203) for temperature control of the chuck plate (201), and a flow channel plate (202) assembled above the heating element (203) and the chuck plate (201), the heating element (203) being arranged on the chuck plate (201), the flow channel plate (202) being provided with a wire outlet hole (205), the heating element (203) comprising a lead wire (204), the lead wire (204) passing through the wire outlet hole (205); characterized in that, The chuck mounting tool (100) comprises a support (1), a flow channel disc carrier (2), a lead wire fixing member (3) and a lifting mechanism (4), the support (1) comprises a base (11) for carrying the suction disc (201), the flow channel disc carrier (2) is located above the base (11) and is movably connected to the support (1) by the lifting mechanism (4), the lead wire fixing member (3) is located above the flow channel disc carrier (2) and is connected to the support (1), the lead wire fixing member (3) is provided with a wire buckle (32) for straightening and fixing the lead wire (204), and the flow channel disc (202) is driven by the lifting mechanism (4) to move downward to be assembled with the suction disc (201).

2. The chuck set-up tool of claim 1, wherein The flow channel disc carrier (2) comprises a side frame (21) capable of surrounding the flow channel disc (202), and a fixing member (22) for fixing the flow channel disc (202) to the side frame (21).

3. The chuck set-up tool of claim 2 wherein, The fixing member (22) fixes the flow channel disc (202) to the side frame (21) on the upper side and / or the peripheral side of the flow channel disc (202).

4. The chuck set-up tool of claim 3 wherein, The lifting mechanism (4) comprises a lifting base (41), the side frame (21) is fixed to the lifting base (41), and the flow channel disc carrier (2) further comprises a horizontal positioning member (23) for connecting the flow channel disc (202) to the lifting base (41).

5. The chuck set-up tool of claim 4 wherein, The fixing member (22) and the horizontal positioning member (23) are provided with an elongated connecting groove, and the fixing member (22) and the horizontal positioning member (23) are connected to the flow channel disc (202) by a fastener passing through the connecting groove.

6. The chuck set-up tool of claim 1 wherein, The lead wire fixing member (3) comprises a plurality of wire buckles (32), each wire buckle (32) is provided for fixing a plurality of lead wires (204).

7. The chuck set-up tool of claim 6 wherein, The lead wire fixing member (3) comprises a strip-shaped edge frame (31), the strip-shaped edge frame (31) is fixed to the support (1), and the plurality of wire buckles (32) are arranged on the strip-shaped edge frame (31).

8. The chuck set-up tool of claim 7 wherein, The wire buckle (32) comprises a fixed arm (321) fixed to the strip-shaped edge frame (31) and an elastic arm (322) cooperating with the fixed arm (321) to surround a wire passing space (320), and the free end of the elastic arm (322) can be locked towards the fixed arm (321).

9. The chuck set-up tool of claim 1 wherein, The lifting mechanism (4) comprises a lifting base (41), a lead screw (42), a lead screw nut (43) and a guide rail (44) assembly, the lead screw nut (43) is fixed to the lifting base (41), the lead screw (42) passes through the lead screw nut (43), and the guide rail (44) assembly is connected between the lifting base (41) and the support (1).

10. The chuck set-up tool of claim 1 wherein, The chuck mounting tool (100) further comprises a plurality of positioning rods (5) extending upward from the base (11) for positioning the flow channel disc (202).

Images