Negative pressure adjusting device, negative pressure adsorption system and workpiece machining equipment

Abstract

The utility model discloses a negative pressure adjusting device, a negative pressure adsorption system and workpiece machining equipment, the negative pressure adjusting device comprises a valve assembly and an adjusting assembly, the valve assembly comprises a valve shell and a first valve element, the valve shell is constructed to form an overflowing cavity, the overflowing cavity is used for being communicated with an adsorption connector of a machining platform and an air inlet connector of a negative pressure source, and the first valve element is arranged in the overflowing cavity; and the adjusting assembly is in driving connection with the first valve element, and the adjusting assembly is used for driving the first valve element to move in the overflowing cavity to adjust the opening degree of the overflowing cavity so as to adjust the negative pressure in the machining platform till the negative pressure in the machining platform is matched with the preset negative pressure of the workpiece arranged on the adsorption face of the machining platform. By means of the arrangement, it is ensured that the actual adsorption force borne by the current workpiece arranged on the machining platform is matched with the actual adsorption force needed by the workpiece, and the workpiece arranged on the machining platform can be properly and stably adsorbed by the machining platform.

Description

Technical Field

[0001] This utility model relates to the field of workpiece processing technology, specifically to a negative pressure regulating device, a negative pressure adsorption system, and workpiece processing equipment. Background Technology

[0002] Workpiece processing equipment often uses negative pressure to adsorb and fix workpieces on the processing platform. However, since workpieces of different sizes and / or thicknesses have different adsorption force requirements, and even the same workpiece has different adsorption force requirements at different processing stages, the non-adjustable negative pressure design of the processing platform in related technologies makes it difficult for the platform to apply appropriate adsorption force to the workpiece placed on it. As a result, the fixing effect of the processing platform on the workpiece is poor, which has the disadvantage of affecting the processing quality of the workpiece due to poor workpiece fixing effect. Utility Model Content

[0003] The purpose of this invention is to provide a negative pressure regulating device, a negative pressure adsorption system, and a workpiece processing equipment, aiming to solve the problem of poor workpiece fixation effect of processing platforms in related technologies.

[0004] To achieve the objectives of this utility model, the following technical solution is provided:

[0005] In a first aspect, this utility model provides a negative pressure regulating device for adjusting the adsorption force applied to a workpiece by a processing platform. The processing platform has multiple adsorption holes on its adsorption surface, which is used to support and adsorb the workpiece. The adsorption holes are connected to an adsorption connector on the processing platform, and the adsorption connector is connected to an air inlet connector of a negative pressure source. The negative pressure source provides negative pressure to the processing platform. The negative pressure regulating device includes:

[0006] A valve assembly includes a valve housing and a first valve core. The valve housing is configured to form a flow cavity, which is used to communicate with the adsorption connector and the air inlet connector respectively. The first valve core is disposed in the flow cavity.

[0007] An adjustment component is driven and connected to the first valve core. The adjustment component is used to drive the first valve core to move within the flow chamber to adjust the opening of the flow chamber. By adjusting the opening of the flow chamber, the negative pressure within the processing platform is adjusted until the negative pressure within the processing platform matches the preset negative pressure of the workpiece placed on the adsorption surface.

[0008] In one embodiment, the valve housing comprises a first housing and a second housing, and the flow passage is enclosed between the first housing and the second housing, wherein the first housing is provided with a first hole communicating with the flow passage, and the second housing is provided with a second hole communicating with the flow passage, so that the flow passage is communicated with the gas inlet connector through the first hole, and the flow passage is communicated with the adsorption connector through the second hole.

[0009] In one embodiment, the valve assembly further comprises a first pipe and / or a second pipe arranged on the valve housing, wherein a pipe passage of the first pipe communicates with the first hole, and a pipe passage of the second pipe communicates with the second hole.

[0010] In one embodiment, when the valve assembly comprises the first pipe, one end of the first pipe close to the valve housing is provided with a first flange connected with the valve housing, or the first pipe is integrally formed with the valve housing.

[0011] When the valve assembly comprises the second pipe, one end of the second pipe close to the valve housing is provided with a second flange connected with the valve housing, or the second pipe is integrally formed with the valve housing.

[0012] In one embodiment, the processing platform is connected with the valve housing through a connecting pipe to form an adsorption pipeline communicating with the adsorption hole and the flow passage.

[0013] The negative pressure adjusting device further comprises a detection member arranged on the adsorption pipeline, which is used to detect the real-time negative pressure of the adsorption pipeline to detect the negative pressure in the processing platform in real time.

[0014] In one embodiment, the adjusting assembly comprises:

[0015] a gas source;

[0016] a cylinder connected with the first valve core;

[0017] a control valve communicated with the gas source and the cylinder, which selectively opens an air inlet path between the gas source and the cylinder to control the movement of the first valve core in the flow passage by controlling the extension and contraction of the cylinder, thereby controlling the opening degree of the flow passage.

[0018] In one embodiment, the cylinder comprises:

[0019] a cylinder barrel having a chamber, a first air inlet hole and a second air inlet hole, the chamber and the control valve form a first air inlet path through the first air inlet hole, and the chamber and the control valve form a second air inlet path through the second air inlet hole;

[0020] a piston, which is in sliding connection with the inner wall of the cylinder barrel and separates the chamber into a first sub-chamber and a second sub-chamber, the first sub-chamber being in communication with the first inlet hole, and the second sub-chamber being in communication with the second inlet hole;

[0021] a piston rod, one end of which is connected with the piston, and the other end of which extends out of the cylinder barrel and is connected with the first spool; wherein,

[0022] the control valve selectively opens the first inlet path and the second inlet path to control the extension and retraction of the piston rod by controlling the movement of the piston, and further control the movement of the first spool in the valve housing.

[0023] In one embodiment, the adjusting assembly further comprises a controller, which is in communication connection with the control valve, the controller outputs a control signal according to whether the negative pressure in the machining platform matches the preset negative pressure, and the control valve selectively opens the first inlet path and the second inlet path according to the control signal.

[0024] In one embodiment, the second spool of the control valve has a first position, a second position, and a neutral position between the first position and the second position, the inlet of the control valve is in communication with the gas source, the first outlet of the control valve is in communication with the first inlet hole, the second outlet of the control valve is in communication with the second inlet hole, the first exhaust port of the control valve is in communication with the outside, and the second exhaust port of the control valve is in communication with the outside; wherein, the control valve selectively opens the first inlet path and the second inlet path according to the control signal comprises:

[0025] Firstly, in the case that the negative pressure in the machining platform is greater than the preset negative pressure, the controller outputs the control signal to make the second spool move to the first position, the second spool makes the inlet in communication with the first outlet and makes the second outlet in communication with the first exhaust port, the first sub-chamber is in communication with the gas source through the first outlet, and the second sub-chamber is in communication with the outside through the first exhaust port, to control the piston rod to extend out of the cylinder barrel;

[0026] Secondly, in the case that the negative pressure in the machining platform is less than the preset negative pressure, the controller outputs the control signal to make the second spool move to the second position, the second spool makes the inlet in communication with the second outlet and makes the first outlet in communication with the second exhaust port, the second sub-chamber is in communication with the gas source through the second outlet, and the first sub-chamber is in communication with the outside through the second exhaust port, to control the piston rod to retract into the cylinder barrel.

[0027] Thirdly, when the negative pressure in the processing platform matches the preset negative pressure, the second valve core moves to the middle position, the second valve core isolates the air inlet, the first air outlet, the second air outlet, the first exhaust outlet and the second exhaust outlet from each other, so that the first sub-chamber and the second sub-chamber are both isolated from the air source and the outside, thereby controlling the action of hovering of the piston rod in the cylinder.

[0028] In a second aspect, the utility model also provides a negative pressure adsorption system, comprising:

[0029] A processing platform, the processing platform has an adsorption surface for carrying and adsorbing a workpiece, the adsorption surface is provided with a plurality of adsorption holes, and the adsorption holes are communicated with an adsorption connector of the processing platform; and

[0030] The negative pressure adjusting device is connected with the processing platform, so that the flow cavity of the negative pressure adjusting device is communicated with the adsorption connector.

[0031] In an embodiment, the processing platform is further provided with an adsorption cavity, the adsorption cavity is communicated with a plurality of adsorption holes, and the adsorption cavity is communicated with the adsorption connector.

[0032] In a third aspect, the utility model also provides a workpiece processing equipment, comprising the negative pressure adsorption system in any one of the various embodiments of the second aspect; and a processing device, the processing device is used for processing a workpiece placed on the processing platform of the negative pressure adsorption system.

[0033] In the negative pressure adjusting device, the negative pressure adsorption system and the workpiece processing equipment, the opening degree of the flow cavity is adjusted by driving the first valve core to move in the valve shell through the adjusting assembly, so that the flow of the negative pressure source from the processing platform is adjusted, the negative pressure in the processing platform is adjusted, until the negative pressure in the processing platform matches the preset negative pressure of the workpiece placed on the adsorption surface of the processing platform, the adsorption force adjustment of the processing platform applied to the workpiece is completed, so that the actual adsorption force of the workpiece placed on the current processing platform matches the actual required adsorption force of the workpiece, the workpiece placed on the processing platform is properly and stably adsorbed, and the fixing effect of the processing platform on the workpiece is improved. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0035] Figure 1 It is a perspective view of a negative pressure adsorption system of an embodiment;

[0036] Figure 2 It is a top view of a negative pressure adsorption system of an embodiment;

[0037] Figure 3 It is Figure 2 a sectional view along the E-E direction in the figure;

[0038] Figure 4 It is a sectional view of a partial structure of a negative pressure regulating device of an embodiment;

[0039] Figure 5 It is a schematic view of a partial structure of a negative pressure regulating device of an embodiment.

[0040] Explanation of reference signs:

[0041] 100-negative pressure adsorption system;

[0042] 10-processing platform, 11-adsorption surface, 12-adsorption cavity, 13-adsorption hole, 14-supporting plate, 15-adsorption plate, 16-exhaust hole, 17-adsorption joint, 18-connection pipe;

[0043] 20-negative pressure regulating device, 21-valve assembly, 22-detecting piece, 23-regulating assembly;

[0044] 30-valve housing, 301-first hole, 302-flow cavity, 303-second hole, 304-mounting hole, 31-first shell, 32-second shell, 33-first pipe, 331-first flange, 34-second pipe, 341-second flange;

[0045] 40-first valve core;

[0046] 50-gas source;

[0047] 60-control valve;

[0048] 70-cylinder, 71-cylinder barrel, 72-piston, 73-piston rod, 74-chamber, 741-rodless cavity, 742-rod cavity, 75-first air inlet hole, 76-second air inlet hole, 77-first joint, 78-second joint;

[0049] 80 - controller. DETAILED DESCRIPTION

[0050] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0051] It should be noted that when a component is referred to as being "fixed" to another component, it can be directly on the other component or there can be intervening components. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or there can be intervening components.

[0052] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The use of the terms "and / or" includes a combination of one or more of the associated listed items.

[0053] Some embodiments of the present application will be described in detail below with reference to the drawings. The following embodiments and features in the embodiments can be combined with each other without conflict.

[0054] Please refer to Figures 1 to 3 The embodiment of the present application provides a kind of negative pressure adsorption system 100, including processing platform 10 and negative pressure regulating device 20.Negative pressure regulating device 20 is connected with processing platform 10, and negative pressure regulating device 20 is also used to be connected with negative pressure source (not shown), and negative pressure source is used to provide negative pressure to processing platform 10.

[0055] The negative pressure source can be a vacuum pump, and the negative pressure source has an air inlet connector (not shown). When the negative pressure source is working, it can provide negative pressure driving force by drawing air from the processing platform 10 through the air inlet connector.

[0056] The processing platform 10 has an adsorption surface 11 and an adsorption connector 17. The adsorption surface 11 has a plurality of adsorption holes 13, and the adsorption holes 13 are in communication with the adsorption connector 17. The adsorption surface 11 is used to carry and adsorb workpieces, and the adsorption connector 17 is used to communicate with the air inlet connector of the negative pressure source.

[0057] The negative pressure adjusting device 20 is connected with the adsorption connector 17, so that the negative pressure adjusting device 20 communicates with the plurality of adsorption holes 13 through the adsorption connector 17. The negative pressure adjusting device 20 is also connected with the negative pressure source, so that the air inlet connector of the negative pressure source communicates with the plurality of adsorption holes 13 of the processing platform through the negative pressure adjusting device 20. When the workpiece is placed on the adsorption surface 11, the workpiece blocks at least part of the adsorption holes 13, so that one or more sealed cavities are formed in the processing platform 10, and the adsorption holes 13 not covered by the workpiece serve as the air inlet end of the processing platform 10. When the negative pressure source draws air from the processing platform 10 through the negative pressure adjusting device 20, the air in the sealed cavities is drawn out, the air pressure in the sealed cavities decreases rapidly, and at the same time, the adsorption holes 13 not covered by the workpiece continuously suck external air into the processing platform 10. When the amount of air sucked into the processing platform 10 from the adsorption holes 13 not covered by the workpiece per unit time is equal to the amount of air drawn out of the processing platform 10 by the negative pressure source per unit time, the negative pressure in the processing platform 10 no longer changes, and thus the pressure difference between the atmospheric pressure outside and the negative pressure in the processing platform 10 serves as the adsorption force applied by the processing platform 10 to the workpiece through the adsorption holes 13, so that the workpiece is tightly attached to the adsorption surface 11, and the workpiece is adsorbed and fixed by the processing platform 10 in a negative pressure mode.

[0058] Optionally, the processing platform 10 is also configured to form the adsorption cavity 12, the plurality of adsorption holes 13 communicate with the adsorption cavity 12, and the adsorption cavity 12 communicates with the adsorption connector 17. When the negative pressure source is started, a negative pressure is rapidly formed in the adsorption cavity 12, and at the same time, the adsorption force is applied to the workpiece placed on the processing platform 10 through the adsorption holes 13 connected with the adsorption cavity 12. Ideally, because the negative pressure in the adsorption cavity 12 is basically uniform, the adsorption force acting on each part of the workpiece is basically uniform. Based on this, the addition of the adsorption cavity 12 is conducive to the pursuit of strong adsorption force by the processing platform 10 and the control of the flatness of the workpiece.

[0059] Optionally, the processing platform 10 includes the support plate 14 and the adsorption plate 15 arranged in layers, and the surface of the support plate 14 facing the adsorption plate 15 is slotted to form the adsorption cavity 12. The surface of the adsorption plate 15 facing away from the support plate 14 is the adsorption surface 11, which matches the workpiece, for example, the adsorption surface 11 is a plane and the workpiece is a flat plate. The adsorption plate 15 is provided with a plurality of adsorption holes 13, and the plurality of adsorption holes 13 can be uniformly distributed on the adsorption plate 15, for example, the plurality of adsorption holes 13 can be arranged in an array of multiple rows and multiple columns on the adsorption plate 15.

[0060] The diameter of the adsorption holes 13 and the distance between adjacent adsorption holes 13 are not limited. For example, the adsorption holes 13 are circular holes, and the diameter of the adsorption holes 13 is 0.5mm-5mm, for example, 0.5mm, 1mm, 1.5mm, 2mm, 2.5mm, 3mm, 3.5mm, 4mm, 4.5mm, 5mm, etc. The distance between adjacent adsorption holes 13 can be 0.5mm-20mm, for example, 0.5mm, 1mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm, 20mm, etc. The diameter of the adsorption holes 13 is small, and the adsorption holes 13 are arranged densely. Each adsorption hole 13 blocked by the workpiece can apply an adsorption force to the workpiece. Multiple adsorption holes 13 blocked by the workpiece and uniformly distributed at different positions can provide uniform adsorption force to multiple positions of the workpiece, so that the workpiece is stably adsorbed and fixed.

[0061] The support plate 14 can be provided with an air exhaust hole 16 penetrating to the surface of the adsorption plate 15 from the bottom wall of the adsorption cavity 12, and the adsorption connector 17 can be installed at the air exhaust hole 16. The adsorption connector 17 can be connected with one end of the connecting pipe 18, and the other end of the connecting pipe 18 is connected with the negative pressure adjusting device 20. In this way, the negative pressure adjusting device 20 is connected with the adsorption holes 13 through the connecting pipe 18, the adsorption connector 17, the air exhaust hole 16 and the adsorption cavity 12 in sequence, and the structure is simple.

[0062] Alternatively, the machining platform 10 can not be provided with the adsorption cavity 12, but the adsorption connector 17 is directly connected with the multiple adsorption holes 13 through a pipeline or a flow channel in the machining platform. One adsorption hole 13 can correspond to one pipeline or flow channel, or multiple adsorption holes 13 can correspond to one pipeline or flow channel, which is not limited. In this way, the negative pressure adjusting device 20 is connected with the adsorption holes 13 through the connecting pipe 18, the adsorption connector 17 and the air exhaust hole 16 in sequence.

[0063] The embodiment of the utility model designs the unique negative pressure adjusting device 20, can according to need, utilize negative pressure adjusting device 20 to adjust the real-time negative pressure in machining platform 10, to adjust the adsorption force that machining platform 10 applies to workpiece through adsorption hole 13 in real time, make the real-time negative pressure in machining platform 10 match the preset negative pressure of workpiece placed on machining platform 10 after adjusting, so that machining platform 10 can apply appropriate adsorption force to the workpiece placed on the adsorption surface 11, which will be described in detail below.

[0064] Please refer to Figure 3 and Figure 4 The embodiment of the utility model provides a negative pressure adjusting device 20, which comprises a valve assembly 21 and an adjusting assembly 23.

[0065] The valve assembly 21 comprises a valve housing 30 and a first valve core 40. The valve housing 30 is internally formed with a flow cavity 302 for respectively communicating with the adsorption joint 17 and the gas inlet joint of the negative pressure source. The first valve core is arranged in the flow cavity 302 and is movable in the flow cavity 302, and the opening degree of the flow cavity 302 is adjusted by the movement of the first valve core 40 in the flow cavity 302 to adjust the negative pressure in the processing platform 10.

[0066] Specifically, the valve housing 30 is further provided with a first hole 301 and a second hole 303, the first hole 301, the flow cavity 302 and the second hole 303 are sequentially communicated, the first hole 301 is used for connecting the flow cavity 302 and the gas inlet joint of the negative pressure source, and the second hole 303 is used for communicating the adsorption joint 17 of the processing platform 10.

[0067] The pipelines and chambers between the adsorption holes 13 and the flow cavity 302 form an adsorption pipeline, which specifically comprises the adsorption joint 17, the connecting pipe 18 and the second hole 303. In the embodiment in which the processing platform 10 is provided with the adsorption cavity 12, the adsorption pipeline further comprises the adsorption cavity 12. In the embodiment in which the adsorption cavity 12 is not provided and the adsorption joint 17 and the plurality of adsorption holes 13 are communicated by the pipelines or flow channels in the processing platform 10, the adsorption pipeline further comprises the pipelines or flow channels in the processing platform 10. The negative pressure adjusting device 20 can adjust the negative pressure in the processing platform 10 by adjusting the negative pressure of the adsorption pipeline, so as to adjust the adsorption force of the processing platform 10 to the workpiece.

[0068] In a specific embodiment, the gas flows from the plurality of adsorption holes 13 to the negative pressure source through the adsorption cavity 12, the adsorption joint 17, the connecting pipe 18, the second hole 303, the flow cavity 302 and the first hole 301 in sequence, and when the first valve core 40 moves to change the opening degree of the flow cavity 302, the gas flow through the flow cavity 302 changes, and the negative pressure adjustment of the adsorption pipeline can be realized to adjust the adsorption force of the processing platform 10 to the workpiece.

[0069] Optionally, the negative pressure adjusting device 20 further comprises a detection member 22 for detecting the real-time negative pressure of the adsorption pipeline and outputting. The detection member 22 is, for example, a sensor, and the specific type is not limited. The detection member 22 can be arranged at any feasible position as needed, and is not limited. The detection member 22 can detect the negative pressure of the adsorption pipeline in real time or periodically, and output the detected negative pressure in real time.

[0070] The second hole 303 is always in communication with the adsorption hole 13 through the adsorption pipeline, the adsorption hole 13 and the adsorption pipeline between the adsorption hole 13 and the flow cavity 302 have substantially the same negative pressure, and the real-time pressure at any position of the adsorption pipeline is detected by the detection member 22 to obtain the real-time pressure inside the processing platform. For the convenience of installation, the detection member 22 can be installed on the adsorption pipeline. The negative pressure detected by the detection member 22 can be converted into an electrical signal of readable pressure information, so as to facilitate subsequent electrical automatic control.

[0071] The adjusting assembly 23 is drivingly connected to the first valve core 40, and the adjusting assembly 23 is used to drive the first valve core 40 to move in the flow cavity 302 to adjust the opening degree of the flow cavity 302, and the negative pressure of the adsorption pipeline (i.e. the negative pressure inside the processing platform 10) is adjusted by adjusting the opening degree of the flow cavity 302, until the negative pressure inside the processing platform 10 matches the preset negative pressure of the workpiece placed on the adsorption surface 11. Alternatively, the adjusting assembly 23 can automatically drive the first valve core 40 to move according to the real-time negative pressure output by the detection member 22. Alternatively, the adjusting assembly 23 can also drive the first valve core 40 to move according to the instruction issued by the operator, and the operator can control whether the adjusting assembly 23 drives the first valve core 40 to move according to the real-time negative pressure detected by the detection member 22 or the real-time negative pressure observed or measured by the operator.

[0072] The specific structure of the adjusting assembly 23 can not be limited. The adjusting assembly 23 can automatically or under the instruction of the operator drive the first valve core 40 to move in real time or periodically according to the real-time negative pressure inside the processing platform 10, to adjust the opening degree of the flow cavity 302 in real time or periodically, so as to realize the adjustment of the negative pressure inside the processing platform 10, to match the appropriate adsorption force required for fixing the workpiece on the processing platform 10.

[0073] The appropriate adsorption force required for fixing the workpiece on the adsorption surface 11 is different according to the thickness, size, material hardness and softness and processing stage of the workpiece. The appropriate adsorption force required for fixing the workpiece on the adsorption surface 11 when the workpiece is adsorbed and stably fixed on the adsorption surface 11 by the processing platform 10 can be collected in advance, and the appropriate adsorption force in this case is converted into the preset negative pressure of the workpiece. The adjusting assembly 23 selectively drives the first valve core 40 to move according to the comparison between the real-time negative pressure inside the processing platform 10 and the preset negative pressure, so that the adsorption force applied to the workpiece by the processing platform in the negative pressure adsorption mode matches the adsorption force required for fixing the workpiece on the adsorption surface 11.

[0074] For whether the real-time negative pressure inside the processing platform 10 matches the preset negative pressure of the workpiece placed on the processing platform 10, and how the adjusting assembly 23 drives the first valve core 40 to move, the following cases are discussed:

[0075] If the real-time negative pressure in the processing platform 10 matches the preset negative pressure of the workpiece placed on the processing platform 10, it is known that the adsorption force exerted by the processing platform 10 on the workpiece matches the adsorption force required to fix the workpiece to the processing platform 10, and the adjusting assembly 23 does not act, and the first valve core 40 does not move to remain in the current position in the valve housing 30, so as to maintain the current adsorption force exerted by the processing platform 10 on the workpiece by maintaining the current real-time negative pressure of the processing platform 10.

[0076] If the real-time negative pressure in the processing platform 10 does not match the preset negative pressure of the workpiece placed on the processing platform 10, it is known that the current adsorption force exerted by the processing platform 10 on the workpiece is greater than or less than the adsorption force required to fix the workpiece to the processing platform 10, and the adjusting assembly 23 acts to drive the first valve core 40 to move, so as to adjust the real-time negative pressure of the processing platform 10 by adjusting the opening degree of the overflow cavity 302, and then adjust the adsorption force exerted by the processing platform 10 on the workpiece based on the real-time negative pressure. Specifically, if the real-time negative pressure in the processing platform 10 is less than the preset negative pressure of the workpiece placed on the processing platform 10, the adjusting assembly 23 drives the first valve core 40 to move to increase the opening degree of the overflow cavity 302, increase the flow rate of the air extracted from the adsorption pipeline, and thus increase the adsorption force exerted by the processing platform 10 on the workpiece; if the actual negative pressure of the adsorption pipeline is greater than the preset negative pressure of the workpiece, the adjusting assembly 23 drives the first valve core 40 to move to reduce the opening degree of the overflow cavity 302, reduce the flow rate of the air extracted from the adsorption pipeline, and thus reduce the adsorption force exerted by the processing platform 10 on the workpiece, until the actual adsorption force exerted by the processing platform 10 on the workpiece matches the appropriate adsorption force required to fix the workpiece on the processing platform 10.

[0077] It should be understood that the appropriate adsorption force required by the processing platform 10 to fix the workpiece is different for workpieces of different thicknesses and different materials.

[0078] When the workpiece with a larger thickness is fixed and processed first and then the workpiece with a smaller thickness is fixed and processed, the adsorption force applied by the processing platform 10 to the workpiece with a smaller thickness needs to be reduced. The first spool 40 can be driven to move by the adjusting assembly 23 to reduce the opening of the flow passage 302, reduce the flow rate of the air drawn from the adsorption pipeline, and thus reduce the adsorption force applied by the processing platform 10 to the workpiece, until the appropriate adsorption force required for the processing platform 10 to fix the workpiece with a smaller thickness is reached, so as to avoid applying an excessive adsorption force to the workpiece with a smaller thickness to cause the workpiece to be concave at the adsorption hole 13. Conversely, when the workpiece with a smaller thickness is fixed and processed first and then the workpiece with a larger thickness is fixed and processed, the adsorption force applied by the processing platform 10 to the workpiece with a larger thickness needs to be increased. The first spool 40 can be driven to move by the adjusting assembly 23 to increase the opening of the flow passage 302, increase the flow rate of the air drawn from the adsorption pipeline, and thus increase the adsorption force applied by the processing platform 10 to the workpiece, until the appropriate adsorption force required for the processing platform 10 to fix the workpiece with a larger thickness is reached, so as to ensure that the processing platform 10 stably fixes the workpiece with a larger thickness.

[0079] When the workpiece with a harder material is fixed and processed first and then the workpiece with a softer material is fixed and processed, the adsorption force applied by the processing platform 10 to the workpiece with a softer material needs to be reduced. The first spool 40 can be driven to move by the adjusting assembly 23 to reduce the opening of the flow passage 302, reduce the flow rate of the air drawn from the adsorption pipeline, and thus reduce the adsorption force applied by the processing platform 10 to the workpiece, until the appropriate adsorption force required for the workpiece to be fixed to the processing platform 10 is reached, so as to avoid applying an excessive adsorption force to the workpiece with a softer material to cause the workpiece to be concave at the adsorption hole 13. Conversely, when the workpiece with a softer material is fixed and processed first and then the workpiece with a harder material is fixed and processed, the adsorption force applied by the processing platform 10 to the workpiece with a harder material needs to be increased. The first spool 40 can be driven to move by the adjusting assembly 23 to increase the opening of the flow passage 302, increase the flow rate of the air drawn from the adsorption pipeline, and thus increase the adsorption force applied by the processing platform 10 to the workpiece with a harder material, until the appropriate adsorption force required for the workpiece to be fixed to the processing platform 10 is reached.

[0080] It should be understood that the number of adsorption holes 13 covered by workpieces of different sizes is different, and the plurality of adsorption holes 13 are interconnected at the adsorption pipeline due to the difference in the number of adsorption holes 13, such as the plurality of adsorption holes 13 being interconnected through the adsorption cavity 12 or the plurality of adsorption holes 13 being interconnected through the adsorption connector 17. The adsorption holes 13 not covered by the workpiece are in communication with the outside, causing the processing platform 10 to leak air, and the air from the outside can enter the adsorption pipeline from the uncovered adsorption holes 13. The leakage of air can affect the negative pressure of the adsorption pipeline, and the adjusting assembly 23 can be adjusted to keep the unit adsorption force applied by the processing platform 10 to workpieces of different sizes consistent.

[0081] When the fixation and processing of the workpiece with a larger area are performed first and then the fixation and processing of the workpiece with a smaller area are performed, the number of the adsorption holes 13 covered by the workpiece with a smaller area is smaller than that of the workpiece with a larger area, which increases the number of the adsorption holes 13 that leak air, and reduces the real-time negative pressure of the adsorption pipeline. The adjusting assembly 23 can drive the first valve core 40 to move to increase the opening of the flow passage 302, increase the flow of air drawn from the adsorption pipeline, and increase the actual adsorption force applied by the processing platform 10 to the workpiece with a smaller area until the appropriate adsorption force is reached. Conversely, if the fixation and processing of the workpiece with a smaller area are performed first and then the fixation and processing of the workpiece with a larger area are performed, the number of the adsorption holes 13 that leak air is reduced or even zero, which increases the negative pressure of the adsorption pipeline. The adjusting assembly 23 can drive the first valve core 40 to move to reduce the opening of the flow passage 302, reduce the flow of air drawn from the adsorption pipeline, and reduce the actual adsorption force applied by the processing platform 10 to the workpiece with a larger area until the appropriate adsorption force required by the processing platform 10 to fix the workpiece with a larger area is reached.

[0082] When the number of the adsorption holes 13 that leak air is increased due to drilling, slotting, or other operations on the workpiece, the negative pressure of the adsorption pipeline is reduced, which reduces the adsorption force applied by the processing platform 10 to the workpiece as the number of holes or slots increases. The adjusting assembly 23 can also drive the first valve core 40 to move to increase the opening of the flow passage 302, increase the flow of air drawn from the adsorption pipeline, and increase the adsorption force applied by the processing platform 10 to the workpiece until the appropriate adsorption force required by the workpiece after drilling or slotting to be fixed on the processing platform 10 is reached.

[0083] Through the above analysis, for workpieces with different thicknesses, different hardnesses, different areas, whether or not to be drilled or slotted, etc., the adjusting assembly 23 can selectively drive the first valve core 40 to move, adjust the opening of the flow passage 302 according to the preset negative pressure of the workpiece, and then adjust the flow of air drawn from the adsorption pipeline, and adjust the real-time negative pressure of the adsorption pipeline, so that the workpiece placed on the current processing platform receives an adsorption force that matches the actual adsorption force required by the workpiece.

[0084] It should be understood that the preset negative pressure of the workpiece is usually a pressure interval. When the real-time negative pressure of the adsorption pipeline is in the pressure interval, it indicates that the adsorption force applied by the processing platform 10 to the workpiece matches the actual adsorption force required by the workpiece to be fixed on the processing platform 10, the adjusting assembly 23 remains inactive, and the opening of the flow passage 302 remains unchanged. When the real-time negative pressure of the adsorption pipeline is less than the minimum value of the pressure interval, the adjusting assembly 23 drives the first valve core 40 to move to increase the opening of the flow passage 302, so that the negative pressure of the adsorption pipeline increases and reaches the pressure interval. When the real-time negative pressure of the adsorption pipeline is greater than the maximum value of the pressure interval, the adjusting assembly 23 drives the first valve core 40 to move to reduce the opening of the flow passage 302, so that the negative pressure of the adsorption pipeline decreases and reaches the pressure interval.

[0085] The negative pressure adjusting device 20 provided by the embodiment of the utility model, through adjusting assembly 23 drive first valve core 40 move, with the opening of overflow chamber 302, so that the flow of negative pressure source from the adsorption pipeline suction flow, realize the negative pressure adjustment to the adsorption pipeline to the negative pressure adjustment in processing platform 10, until the real-time negative pressure of adsorption pipeline (that is the real-time negative pressure in processing platform 10) and the preset negative pressure of workpiece on the adsorption surface 11 of processing platform 10 match, complete the adsorption force adjustment of processing platform 10 to workpiece, so as to ensure that the workpiece on the current processing platform 10 actually receives the adsorption force and the adsorption force actually required by the workpiece match, realize the proper and stable adsorption of processing platform 10 to the workpiece on it, improve the fixing effect of processing platform 10 to workpiece, for different thickness, different material, different area and drilling, through groove processing etc. workpiece can satisfy the fixed demand, simple structure, low control difficulty, low cost.

[0086] The negative pressure adjusting device 20 of the embodiment of the utility model is further described in detail below.

[0087] Please refer to Figure 3 And Figure 4 Valve assembly 21 can also include the first tube 33 and / or second tube 34 in valve shell 30. The first tube 33 is used to connect valve shell 30 and processing platform 10, and the second tube 34 is used to connect valve shell 30 and negative pressure source. Among them, the pipe passage of the first tube 33 is communicated with the overflow chamber 302 through the first hole 301, and the pipe passage of the second tube 34 is communicated with the overflow chamber 302 through the second hole 303. It should be understood that the first tube 33 and the second tube 34 can be selectively provided with one or both. By providing the first tube 33 and the second tube 34, the valve assembly 21 can be conveniently connected with at least one of the processing platform 10 and the negative pressure source. Among them, the second tube 34 can be considered as part of the aforementioned adsorption pipeline, and the detection piece 22 can be arranged on the side wall of the second tube 34 and used to detect the negative pressure of the adsorption pipeline between the second tube 34 and the adsorption hole 13.

[0088] The first tube 33 and the second tube 34 can be circular tubes, and each of them can be connected with the valve shell 30 by welding, screwing or other connection methods. Optionally, as shown in Figure 4As shown, the first pipe 33 is provided with a first flange 331 at one end close to the valve shell 30, and the first flange 331 is connected with the valve shell 30, which can be welded or screwed, without limitation. The second pipe 34 is provided with a second flange 341 at one end close to the valve shell 30, and the second flange 341 is connected with the valve shell 30, which can be welded or screwed, without limitation. By connecting the first flange 331 and the second flange 341 with the valve shell 30, it is easier to operate and more stable to fix. Alternatively, the first pipe 33 can be integrally formed with the valve shell 30, and the second pipe 34 can be integrally formed with the valve shell 30. Integrally forming can make the overall structural strength of the valve shell 30, the first pipe 33 and / or the second pipe 34 higher, and the reliability better.

[0089] The valve shell 30 can be any feasible structure, without limitation. In a specific embodiment, the valve shell 30 includes a first shell 31 and a second shell 32 connected. The first shell 31 and the second shell 32 enclose a flow cavity 302. The first shell 31 is provided with a first hole 301, and the second shell 32 is provided with a second hole 303. The flow cavity 302 communicates with the air inlet joint of the negative pressure source through the first hole 301, and the flow cavity 302 communicates with the adsorption joint 17 through the second hole 303. In the embodiment provided with the first pipe 33 and the second pipe 34, the first pipe 33 is connected with the surface of the first shell 31 away from the second shell 32, and the second pipe 34 is connected with the surface of the second shell 32 away from the first shell 31.

[0090] The first shell 31 and the second shell 32 can be fixed by welding, screwing or the like, and sealed, without limitation. Alternatively, the center lines of the first pipe 33, the second pipe 34, the first hole 301 and the second hole 303 can coincide. In this way, the path of the airflow is approximately straight, reducing unnecessary resistance caused by path bending.

[0091] Alternatively, the first shell 31 and the second shell 32 can be approximately flat plates, and the two are arranged in close contact. The surface of the first shell 31 facing the second shell 32 is provided with a groove, and / or the surface of the second shell 32 facing the first shell 31 is provided with a groove, and the groove forms the flow cavity 302. Alternatively, the depths of the grooves are equal, and the first valve core 40 is tightly attached to the first shell 31 and the second shell 32 in the depth direction of the groove (i.e. the direction opposite to the first shell 31 and the second shell 32). In this way, the first valve core 40 is tightly matched with the first shell 31 and the second shell 32, reducing unnecessary air leakage.

[0092] Alternatively, in the orthographic projection in the depth direction of the groove, the four peripheral side walls of the groove are located outside the four peripheral side walls of the first hole 301, and the four peripheral side walls of the groove are located outside the four peripheral side walls of the second hole 303. In this way, when the first valve core 40 moves to completely close the flow cavity 302, it will inevitably completely block the first hole 301 and the second hole 303, avoiding unnecessary air leakage.

[0093] The first shell 31 and / or the second shell 32 can be provided with a mounting hole 304, the adjusting assembly 23 can extend into the flow cavity 302 from the mounting hole 304, and the mounting hole 304 can be sealed to avoid air leakage.

[0094] In one embodiment, referring to Figures 3 to 5 , the adjusting assembly 23 includes an air source 50, a control valve 60, and a cylinder 70. The cylinder 70 is connected with the first valve core 40, and the control valve 60 is in communication with the air source 50 and the cylinder 70, respectively. The control valve 60 selectively opens an air inlet path between the air source 50 and the cylinder 70 to control the extension and retraction of the cylinder 70, thereby controlling the movement of the first valve core 40 in the flow cavity 302 and further controlling the opening degree of the flow cavity 302.

[0095] The air source 50 can be a compressed air tank. The cylinder 70 can be a rod cylinder, a rodless cylinder, or the like, without limitation. By providing the control valve 60, the air inlet path between the air source 50 and the cylinder 70 can be selected as needed, so that the movement of the first valve core 40 in the valve shell 30 can be controlled by controlling the extension and retraction of the cylinder 70 to increase or decrease the opening degree of the flow cavity 302, which is simple in structure, convenient to operate, and low in cost.

[0096] Optionally, the cylinder 70 includes a cylinder barrel 71, a piston 72, and a piston rod 73. The cylinder barrel 71 has a cavity 74, and the piston 72 is arranged in the cavity 74 and is in sliding connection with the inner wall of the cylinder barrel 71. One end of the piston rod 73 is connected with the piston 72, and the other end of the piston rod 73 extends out of the cylinder barrel 71 and is connected with the first valve core 40. The piston 72 divides the cavity 74 into a first sub-cavity and a second sub-cavity. Figure 5 The first sub-cavity is a rodless cavity 741 (a cavity without the piston rod 73, i.e., the cavity 74 on the side of the piston 72 away from the first valve core 40), and the second sub-cavity is a rod cavity 742 (a cavity with the piston rod 73, i.e., the cavity 74 on the side of the piston 72 toward the first valve core 40). Figure 5 The cylinder barrel 71 has a first air inlet hole 75 and a second air inlet hole 76 in communication with the cavity 74, and the first air inlet hole 75 and the second air inlet hole 76 are located on opposite sides of the piston 72, i.e., the first air inlet hole 75 is in communication with the rodless cavity 741, and the second air inlet hole 76 is in communication with the rod cavity 742. The first air inlet hole 75 is in communication with the rodless cavity 741 and the control valve 60 to form a first air inlet path, and the second air inlet hole 76 is in communication with the rod cavity 742 and the control valve 60 to form a second air inlet path.

[0097] The air source 50 is in communication with the control valve 60, and the control valve 60 is used to selectively guide the first air inlet path and the second air inlet path. Specifically, the control valve 60 is selectively used to guide the air to the first air inlet hole 75, or to the second air inlet hole 76, or to neither of the first air inlet hole 75 and the second air inlet hole 76, so as to control the movement of the first valve core 40 in the flow passage 302 of the valve housing 30 by controlling the extension of the piston rod 73 out of the cylinder barrel 71, the retraction of the piston rod 73 into the cylinder barrel 71, or the hovering of the piston rod 73 in the cylinder barrel 71, and then to control the decrease, increase or keeping of the opening degree of the flow passage 302.

[0098] The one end of the cylinder barrel 71 extending the piston rod 73 can extend into the flow passage 302 from the mounting hole 304 of the valve housing 30, and the piston rod 73 and the first valve core 40 can be connected and fixed by welding, screwing or the like, without limitation. The first joint 77 can be arranged at the first air inlet hole 75, and the second joint 78 can be arranged at the second air inlet hole 76. The first joint 77 and the second joint 78 can be in communication with the control valve 60 through corresponding pipelines. The air source 50 can also be in communication with the control valve 60 through corresponding pipelines.

[0099] For example, the first air inlet hole 75 is located on the side of the piston 72 away from the first valve core 40, and the second air inlet hole 76 is located on the side of the piston 72 close to the first valve core 40. When it is needed to drive the first valve core 40 to move to decrease the opening degree of the flow passage 302, the control valve 60 guides the air source 50 to the first joint 77, and the second joint 78 can be in communication with the atmosphere (i.e. the external air) through the control valve 60, so as to drive the piston 72 to move towards the first valve core 40, the length of the piston rod 73 extending out of the cylinder barrel 71 is increased, and the first valve core 40 is driven to move to decrease the opening degree of the flow passage 302. When it is needed to drive the first valve core 40 to move to increase the opening degree of the flow passage 302, the control valve 60 guides the air source 50 to the second joint 78, and the first joint 77 can be in communication with the atmosphere through the control valve 60, so as to drive the piston 72 to move away from the first valve core 40, the piston rod 73 is retracted into the cylinder barrel 71, and the first valve core 40 is driven to move to increase the opening degree of the flow passage 302. When it is not needed to adjust the opening degree of the flow passage 302, the air source 50 can not be in communication with the first joint 77 and the second joint 78, or the air source 50 is in communication with the first joint 77 and the second joint 78, so as to keep the length of the piston rod 73 extending out of the cylinder barrel 71, and keep the opening degree of the flow passage 302 unchanged. It can be understood that the positions of the first air inlet hole 75 and the second air inlet hole 76 can also be reversed, and the control valve 60 can be adjusted adaptively, and details are not described herein.

[0100] In a specific embodiment, the second valve core (not shown) of the control valve 60 can be moved to have three working positions: the first position, the second position and the intermediate position between the first position and the second position. As shown in FIG. 4, the second valve core is in the first position, the air source 50 is in communication with the first joint 77 through the control valve 60, and the second joint 78 is in communication with the atmosphere through the control valve 60. When the second valve core is in the second position, the air source 50 is in communication with the second joint 78 through the control valve 60, and the first joint 77 is in communication with the atmosphere through the control valve 60. When the second valve core is in the intermediate position, the air source 50 is not in communication with the first joint 77 and the second joint 78 through the control valve 60. Figure 5As shown, the control valve 60 has 5 ports: an inlet port (P port), a first outlet port (A port), a second outlet port (B port), a first exhaust port (R port) and a second exhaust port (S port). The second spool is in Figure 5 When the second spool is in the left position (one of the first position and the second position), the P port communicates with the A port, and the B port communicates with the S port; the second spool is in Figure 5 When the second spool is in the middle position, the 5 ports are not communicated with each other, realizing the middle position check function; the second spool is in Figure 5 When the second spool is in the right position (the other of the first position and the second position), the P port communicates with the B port, and the A port communicates with the R port.

[0101] Taking the first inlet hole 75 communicating the chamber 74 (i.e. the rodless chamber 741) on the side of the piston 72 in the cylinder 71 away from the first spool 40 and the second inlet hole 76 communicating the chamber 74 (i.e. the rod chamber 742) on the side of the piston 72 in the cylinder 71 toward the first spool 40 as an example, when the solenoid valve is applied to the embodiment of the utility model, the P port of the control valve 60 communicates with the gas source 50, the A port of the control valve 60 communicates with the first inlet hole 75, the B port of the control valve 60 communicates with the second inlet hole 76, and the R port and the S port of the control valve 60 both communicate with the outside.

[0102] When the second spool is in the middle position, the gas source 50 does not communicate with the A port and the B port, and due to the middle position check function of the control valve 60, the rodless chamber 741 of the cylinder 70 cannot exhaust through the R port, and the rod chamber 742 of the cylinder 70 cannot exhaust through the S port, so that the piston rod 73 keeps the current length of extension, the first spool 40 hovers in the valve housing 30, that is, the first spool 40 does not move relative to the valve housing 30, so that the opening degree of the overflow chamber 302 does not change.

[0103] When the second spool is in the left position, the gas of the gas source 50 enters the rodless chamber 741 through the P port, the A port and the first inlet hole 75, and the gas of the rod chamber 742 is exhausted to the outside through the second inlet hole 76, the B port and the S port, so that the gas pressure of the rodless chamber 741 is greater than that of the rod chamber 742, the piston 72 is pushed to move toward the first spool 40, the length of the piston rod 73 extending out of the cylinder 71 increases, and the first spool 40 is driven to move to reduce the opening degree of the overflow chamber 302.

[0104] When the second spool is in the right position, the gas of the gas source 50 enters the rod chamber 742 through the P port, the B port and the second inlet hole 76, and the gas of the rodless chamber 741 is exhausted to the outside through the first inlet hole 75, the A port and the R port, so that the gas pressure of the rod chamber 742 is greater than that of the rodless chamber 741, the piston 72 is pushed to move away from the first spool 40, the length of the piston rod 73 extending out of the cylinder 71 decreases, and the first spool 40 is driven to move to increase the opening degree of the overflow chamber 302.

[0105] In one specific embodiment, the control valve 60 is a 3-position 5-way center return solenoid valve in compliance with the standard (ISO 15218), and it is worth mentioning that the solenoid valve also has two reset springs, which can automatically reset the spool of the solenoid valve to the center position when the power is off. Through the application of the 3-position 5-way center return solenoid valve, the second spool of the solenoid valve can be moved to different positions, so that the air source 50 can conduct different intake paths of the cylinder 70, and the function of moving the first spool 40 by the cylinder 70 to adjust the opening of the overflow chamber 302, while the center return function can keep the first spool 40 at the current position, so as to keep the opening of the overflow chamber 302 unchanged, so that the adjustment of the opening of the overflow chamber 302 can be easily realized, and the opening of the overflow chamber 302 can be kept unchanged, and the structure is simple.

[0106] Optionally, referring to Figure 5 The negative pressure adjusting device 20 further comprises a controller 80. In one example, the controller 80 is in communication connection with the control valve 60; and in one example, the controller 80 is in communication connection with both the detecting member 22 and the control valve 60. The controller 80 is configured to output a control signal according to whether the received real-time negative pressure in the machining platform 10 matches the preset negative pressure of the workpiece placed on the machining platform 10, and the control valve 60 selectively conducts the first intake path and the second intake path according to the control signal to control the movement of the second spool, so as to realize any one of the following:

[0107] Firstly, the second spool is controlled to be in the left position, and the P port is in communication with the A port, so that the air source 50 is in communication with the chamber 74 (i.e. the rodless chamber 741) through the first intake hole 75;

[0108] Secondly, the second spool is controlled to be in the right position, and the P port is in communication with the B port, so that the air source 50 is in communication with the chamber 74 (i.e. the rod chamber 742) through the second intake hole 76;

[0109] Thirdly, the second spool is controlled to be in the center position, and the P port is isolated from the A port and the P port is isolated from the B port, so that the chamber 74 is isolated from the air source 50 to control the action of the piston rod 73 hovering in the cylinder barrel 71.

[0110] The controller 80 can be a PLC, an industrial computer, etc., without limitation. The controller 80 can store the preset negative pressure of the workpiece placed on the machining platform 10, or a storage (not shown) can be provided to store the preset negative pressure of the workpiece, and the controller 80 can read the preset negative pressure of the workpiece stored in the storage. The controller 80 compares and judges whether the preset negative pressure of the workpiece stored by itself or the storage matches the real-time negative pressure output by the detecting member 22, and then outputs a corresponding control signal.

[0111] When the negative pressure outputted by the detecting member 22 to the controller 80 matches the preset negative pressure of the workpiece placed on the machining platform 10, the second spool moves to the neutral position under the control of the controller 80, and the P port, the A port, the B port, the R port and the S port are isolated from each other, so that the chambers 74 (the rodless chamber 741 and the rod chamber 742) of the cylinder 70 are isolated from the outside and the gas source 50. In this case, the piston rod 73 does not move relative to the cylinder barrel 71, so that the first spool 40 does not move in the valve housing 30, that is, the first spool 40 hovers in the valve housing 30, and at this time, the opening degree of the overflow chamber 302 does not change.

[0112] In an example, when the negative pressure outputted by the detecting member 22 to the controller 80 matches the preset negative pressure of the workpiece placed on the machining platform 10, the controller 80 does not output the control signal, the control valve 60 is powered off, and the second spool of the control valve 60 is automatically reset to the neutral position. For example, the 3-position 5-way neutral position check valve automatically resets the second spool to the neutral position under the action of the reset spring. Since the time required for the workpiece to adjust the negative pressure adsorption force is much shorter than the time for the workpiece to be machined on the machining platform 10, by designing the control valve 60 to be automatically reset to the neutral position by powering off, the controller 80 does not need to continuously output the control signal, and the controller 80 can be on standby to reduce the working time and avoid damage caused by long-time working of the controller 80. In another example, when the negative pressure outputted by the detecting member 22 to the controller 80 matches the preset negative pressure of the workpiece placed on the machining platform 10, the controller 80 outputs the control signal to the control valve 60 to reset the second spool to the neutral position.

[0113] When the negative pressure outputted by the detecting member 22 to the controller 80 does not match the preset negative pressure of the workpiece placed on the machining platform 10, the controller 80 outputs the corresponding control signal, that is, the cylinder lifting signal and the cylinder lowering signal. Exemplarily, in the case that the second spool moves to the right position based on the control signal, the second spool connects the P port to the B port and connects the A port to the R port, so that the rod chamber 742 is connected to the gas source 50 through the second inlet hole 76, the B port and the P port, and the rodless chamber 741 is connected to the outside through the first inlet hole 75, the A port and the R port; in the case that the second spool moves to the left position based on the control signal, the second spool connects the P port to the A port and connects the B port to the S port, and the rodless chamber 741 is connected to the gas source 50 through the first inlet hole 75, the A port and the P port, and the rod chamber 742 is connected to the outside through the second inlet hole 76, the B port and the S port.

[0114] For example, when the controller 80 outputs a cylinder lifting signal, the spring of the 3-position 5-way center stop solenoid drives the second spool to move so that the second spool is in the left position, the gas of the gas source 50 enters the rodless cavity 741 of the cylinder 70 through the P port, the A port and the first gas inlet hole 75, pushes the piston 72 to move so that the length of the piston rod 73 extending out of the cylinder barrel 71 increases, that is, the piston rod 73 performs the action of extending out of the cylinder barrel 71, thereby moving the first spool 40 to reduce the opening degree of the overflow cavity 302; when a cylinder lowering signal is output, the spring of the 3-position 5-way center stop solenoid drives the second spool to move so that the second spool is in the right position, the gas of the gas source 50 enters the rod cavity 742 of the cylinder 70 through the P port, the B port and the second gas inlet hole 76, pushes the piston 72 to move so that the length of the piston rod 73 extending out of the cylinder barrel 71 decreases, that is, the piston rod 73 performs the action of retracting into the cylinder barrel 71, thereby moving the first spool 40 to increase the opening degree of the overflow cavity 302.

[0115] By setting the controller 80 to output control signals to make the 3-position 5-way center stop solenoid be in different working positions, the length of the piston rod 73 extending out of the cylinder barrel 71 of the cylinder 70 can be changed, the position of the first spool 40 can be adjusted, and the opening degree of the overflow cavity 302 can be adjusted, so that the structure is simple and the cost is low.

[0116] In the third aspect of the embodiment of the utility model, a workpiece machining device is also provided, which comprises the negative pressure adsorption system of any of the preceding embodiments and a machining device, and the machining device is used for machining a workpiece placed on the machining platform of the negative pressure adsorption system. Since the negative pressure adjusting device of any of the preceding embodiments is arranged in the workpiece machining device, the fixing effect of the machining platform on the workpiece can be improved, thereby facilitating the subsequent improvement of the machining precision of the workpiece and the improvement of the machining quality and performance of the workpiece.

[0117] In the utility model, the workpiece can be a circuit board, which can specifically include a PCB (Printed Circuit Board), an IC (Integrated Circuit) packaging substrate or other circuit boards used for realizing chip connection. In addition, the workpiece can also be a carrier plate, a wafer, a glass plate and other arbitrary feasible plates.

[0118] When the workpiece machining device is used for machining a circuit board, the machining device is used for drilling, slotting, cutting, forming and the like of the circuit board placed on the machining platform.

[0119] In the description of the embodiments of the utility model, it needs to explain, the term "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and so on the direction or position relation of index is the direction or position relation described based on the drawing, only is for the convenience of describing the utility model and simplifying the description, and is not the device or element indicated or implied must have a particular direction, with a particular direction structure and operation, therefore cannot be understood as the limitation to the utility model.

[0120] The above disclosed is only a preferred embodiment of the utility model, of course cannot with this to limit the utility model right scope, the person skilled in the art can understand the implementation all or part of the above-mentioned embodiment process, and the equivalent change made by the utility model claim, still belongs to the range covered by the utility model.

Claims

1. A negative pressure regulating device, characterized in that, The application relates to a negative pressure adjusting device for adjusting the adsorption force of a processing platform to a workpiece, wherein the adsorption surface of the processing platform is provided with a plurality of adsorption holes, the adsorption surface is used for carrying and adsorbing the workpiece, the adsorption holes are communicated with adsorption connectors of the processing platform, the adsorption connectors are communicated with air inlet connectors of a negative pressure source, the negative pressure source is used for providing negative pressure to the processing platform, and the negative pressure adjusting device comprises the following components: a valve assembly, which comprises a valve shell and a first valve core, the valve shell is configured to form a flow cavity, the flow cavity is used for being communicated with the adsorption connectors and the air inlet connectors respectively, and the first valve core is arranged in the flow cavity; an adjusting assembly, which is drivingly connected to the first valve core, and is used for driving the first valve core to move in the flow cavity to adjust the opening degree of the flow cavity, the negative pressure in the processing platform is adjusted by adjusting the opening degree of the flow cavity until the negative pressure in the processing platform matches the preset negative pressure of the workpiece placed on the adsorption surface.

2. The negative pressure regulating device of claim 1, wherein, The valve shell comprises a first shell and a second shell, the flow cavity is formed between the first shell and the second shell, the first shell is provided with a first hole for communicating with the flow cavity, the second shell is provided with a second hole for communicating with the flow cavity, the flow cavity is communicated with the air inlet connectors through the first hole, and the flow cavity is communicated with the adsorption connectors through the second hole.

3. The negative pressure regulating device of claim 2, wherein, The valve assembly further comprises a first pipe and / or a second pipe arranged on the valve shell, the pipe channel of the first pipe is communicated with the first hole, and the pipe channel of the second pipe is communicated with the second hole.

4. The negative pressure adjusting device according to claim 3, wherein, in the case that the valve assembly comprises the first pipe: an end of the first pipe close to the valve shell is provided with a first flange, the first flange is connected with the valve shell, or the first pipe is integrally formed with the valve shell; in the case that the valve assembly comprises the second pipe: an end of the second pipe close to the valve shell is provided with a second flange, the second flange is connected with the valve shell, or the second pipe is integrally formed with the valve shell.

5. The negative pressure regulating device of claim 1, wherein, The processing platform is connected with the valve shell through a connecting pipe to form an adsorption pipeline communicated with the adsorption holes and the flow cavity; The negative pressure adjusting device further comprises a detection member arranged on the adsorption pipeline, the detection member is used for detecting the real-time negative pressure of the adsorption pipeline to detect the negative pressure in the processing platform in real time.

6. The negative pressure regulating device of any one of claims 1 to 5, wherein, The adjusting assembly comprises: an air source; a cylinder, which is connected with the first valve core; a control valve, which is communicated with the air source and the cylinder respectively, selectively guides the air inlet path between the air source and the cylinder, controls the extension and contraction of the cylinder to control the movement of the first valve core in the flow cavity, and further controls the opening degree of the flow cavity.

7. The negative pressure regulating device of claim 6, wherein, The cylinder comprises: a cylinder barrel, which has a cavity, a first air inlet hole and a second air inlet hole, the cavity and the control valve form a first air inlet path through the first air inlet hole, and the cavity and the control valve form a second air inlet path through the second air inlet hole. a piston, which is in sliding connection with the inner wall of the cylinder barrel and separates the chamber into a first sub-chamber and a second sub-chamber, the first sub-chamber being in communication with the first inlet hole, and the second sub-chamber being in communication with the second inlet hole; a piston rod, one end of which is connected with the piston, and the other end of which extends out of the cylinder barrel and is connected with the first spool; wherein, the control valve selectively opens the first inlet path and the second inlet path to control the extension and retraction of the piston rod by controlling the movement of the piston, and further control the movement of the first spool in the valve housing.

8. The negative pressure regulating device of claim 7, wherein, The negative pressure regulating device further comprises a controller, which is in communication connection with the control valve, and the controller outputs a control signal according to whether the negative pressure in the processing platform matches the preset negative pressure, and the control valve selectively opens the first inlet path and the second inlet path according to the control signal.

9. The negative pressure regulating device of claim 8, wherein, The second spool of the control valve has a first position, a second position and a neutral position between the first position and the second position, the inlet of the control valve is in communication with the gas source, the first outlet of the control valve is in communication with the first inlet hole, the second outlet of the control valve is in communication with the second inlet hole, the first exhaust port of the control valve is in communication with the outside, and the second exhaust port of the control valve is in communication with the outside; wherein, the control valve selectively opens the first inlet path and the second inlet path according to the control signal includes: First, when the negative pressure in the processing platform is greater than the preset negative pressure, the controller outputs the control signal to make the second spool move to the first position, the second spool makes the inlet communicate with the first outlet and makes the second outlet communicate with the first exhaust port, the first sub-chamber communicates with the gas source through the first outlet, and the second sub-chamber communicates with the outside through the first exhaust port, to control the piston rod to extend out of the cylinder barrel; Second, when the negative pressure in the processing platform is less than the preset negative pressure, the controller outputs the control signal to make the second spool move to the second position, the second spool makes the inlet communicate with the second outlet and makes the first outlet communicate with the second exhaust port, the second sub-chamber communicates with the gas source through the second outlet, and the first sub-chamber communicates with the outside through the second exhaust port, to control the piston rod to retract into the cylinder barrel; Third, when the negative pressure in the processing platform matches the preset negative pressure, the second spool moves to the neutral position, the second spool makes the inlet, the first outlet, the second outlet, the first exhaust port and the second exhaust port isolated from each other, so that the first sub-chamber and the second sub-chamber are isolated from the gas source and the outside, to control the piston rod to hover in the cylinder barrel.

10. A pressure swing adsorption system, characterized by, including: A processing platform has a suction surface for carrying and adsorbing a workpiece, the suction surface is provided with a plurality of suction holes, and the suction holes are communicated with a suction connector of the processing platform; and The negative pressure regulating device as claimed in any one of claims 1 to 9 is connected with the processing platform, so that the flow cavity of the negative pressure regulating device is communicated with the suction connector.

11. The pressure swing adsorption system of claim 10, wherein, The processing platform is further provided with a suction cavity, the suction cavity is communicated with the plurality of suction holes, and the suction cavity is communicated with the suction connector.

12. A workpiece processing apparatus, characterized by comprising: Comprise: The negative pressure adsorption system as claimed in claim 10 or 11; and A processing device for processing a workpiece placed on the processing platform of the negative pressure adsorption system.

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