Alloy target spraying gas stable supply device

Abstract

The utility model relates to an alloy target material spraying gas stable supply device which comprises a gas supply pipeline and a plasma spray gun, one end of the gas supply pipeline is connected with a gas source, the other end of the gas supply pipeline is connected with the plasma spray gun, and a flow control valve and a mass flow meter are installed at the position, close to the plasma spray gun, of the gas supply pipeline, the stable alloy target spraying gas supply device further comprises a constant-temperature box, the constant-temperature box is arranged on the upstream of the flow control valve, and the gas supply pipeline is provided with a coil pipe section located in the constant-temperature box so that mixed gas entering the plasma spray gun can be kept at the preset temperature. By arranging the constant temperature box, the mixed gas is always kept at the preset temperature, so that the plasma flame temperature is kept unchanged, the proportion of silicon to chromium in the silicon-chromium alloy target material is kept unchanged, and the yield of the silicon-chromium alloy target material is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the target material production field, and specifically relates to a kind of alloy target material spraying gas stable supply device. BACKGROUND

[0002] Silicon-chromium alloy target material has strict requirements on the ratio of silicon and chromium. Silicon-chromium alloy target material is usually made by plasma spraying process. Because the melting points of silicon and chromium are different, the temperature of plasma flame must be kept constant to keep the ratio of silicon and chromium in silicon-chromium alloy target material unchanged to ensure the quality of silicon-chromium alloy target material. The temperature of plasma flame is related to the temperature and pressure of mixed gas (hydrogen (H2) and argon (Ar)). The pressure can be controlled by valve opening, while the temperature is affected by the environment and fluctuates greatly. Therefore, how to ensure the constant temperature of mixed gas is the technical problem to be solved by the present application. SUMMARY

[0003] The utility model aims at providing a kind of alloy target material spraying gas stable supply device to solve the above problems. To this end, the specific technical scheme adopted by the utility model is as follows:

[0004] A kind of alloy target material spraying gas stable supply device, including gas supply pipeline and plasma spray gun, the gas supply pipeline one end is connected with gas source, the other end is connected with plasma spray gun and its near the position of plasma spray gun is equipped with flow control valve and mass flow meter, wherein, the alloy target material spraying gas stable supply device further includes thermostat, the thermostat is arranged in the upstream of flow control valve, the gas supply pipeline has coil section in the thermostat, to keep the mixed gas entering into plasma spray gun at preset temperature.

[0005] Further, the coil section is U-shaped.

[0006] Further, the length of the coil section is more than 10 meters.

[0007] Further, the coil section can be made of copper pipe or stainless steel pipe, etc. to improve the heat exchange efficiency.

[0008] Further, the gas supply pipeline includes hydrogen pipeline, argon pipeline and mixed gas pipeline, the hydrogen pipeline and the argon pipeline have corresponding coil section respectively and converge in the mixed gas pipeline after the mass flow meter.

[0009] Further, the thermostat is filled with water or oil.

[0010] Further, the thermostat includes a box body, a heater and a temperature sensor; the heater and the temperature sensor are installed in the box body and electrically connected with a control unit to realize constant temperature control.

[0011] Further, the thermostat further comprises a refrigeration unit, which is electrically connected with the control unit to realize constant temperature control.

[0012] Further, the thermostat further comprises a circulation pipeline, an inlet of which is located at the side of the box body and an outlet of which is located at the top of the box body, and a circulation pump and a valve are installed on the circulation pipeline, which are electrically connected with the control unit.

[0013] Further, the box body is wrapped with thermal insulation cotton.

[0014] The utility model discloses the above-mentioned technical scheme has the beneficial effect of: through setting up the thermostat, make the mixed gas always keep in the preset temperature, thereby ensuring that the temperature of plasma flame remains unchanged, make the proportion of silicon and chromium in silicon-chromium alloy target material remain unchanged, greatly improve the silicon-chromium alloy target material yield. BRIEF DESCRIPTION OF DRAWINGS

[0015] To further illustrate the embodiments, the utility model provides the attached drawing. These attached drawings are part of the utility model disclosure, mainly used to illustrate the embodiment, and can cooperate with the relevant description of the specification to explain the operation principle of the embodiment. With reference to these contents, those skilled in the art should understand other possible implementation modes and the advantages of the utility model. The components in the drawing are not drawn according to scale, and similar component symbols are usually used to represent similar components.

[0016] Figure 1 It is a silicon-chromium alloy target material spraying device of the utility model. DETAILED DESCRIPTION

[0017] It should be noted that the experimental methods in the following implementation solutions are all conventional methods, and the reagents and materials can be obtained from commercial channels unless otherwise specified. In the description of the present application, the terms "lateral", "longitudinal", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the utility model and simplify the description, and do not indicate or imply that the devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0018] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0019] In the description of the present application, it is also necessary to explain that, unless otherwise explicitly specified and limited, the terms "set", "install", "connect", "connect" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0020] The utility model is further illustrated in combination with the drawings and specific embodiments.

[0021] As Figure 1 As shown in the drawings, an alloy target material spraying gas stable supply device can include a gas supply pipeline 1 and a plasma spray gun 2, one end of the gas supply pipeline 1 is connected to a gas source (not shown), the other end is connected to the plasma spray gun 2 and a flow control valve 3 and a mass flow meter 4 are installed near the position of the plasma spray gun 2. Specifically, the gas supply pipeline 1 includes a hydrogen gas pipeline 11, an argon gas pipeline 12 and a mixed gas pipeline 13, the hydrogen gas pipeline 11 and the argon gas pipeline 12 are installed with respective flow control valves 3 and mass flow meters 4 and converge in the mixed gas pipeline 13 after the mass flow meters 4. The mixed gas pipeline 13 is connected with the plasma spray gun 2. The plasma spray gun 2, the flow control valve 3 and the mass flow meter 4 are well known and will not be described here. Among them, the silicon-chromium alloy target material spraying gas stable supply device further includes a thermostat 5, the thermostat 5 is arranged upstream of the flow control valve 3, and is filled with a heat exchange medium (for example, deionized water or oil, etc.). The hydrogen gas pipeline 11 and the argon gas pipeline 12 respectively have coil sections 111 and 112 in the thermostat 1 to keep the mixed gas (H2 and Ar) entering the plasma spray gun 2 at a preset temperature (for example, 20℃). By setting the thermostat, the mixed gas is always kept at a preset temperature, thereby ensuring that the plasma flame temperature remains unchanged, the ratio of silicon and chromium in the silicon-chromium alloy target material remains unchanged, and the silicon-chromium alloy target material yield is greatly improved.

[0022] The length of the coil section 111, 121 is more than 10 meters to ensure sufficient heat exchange. Preferably, the coil section 111, 121 is U-shaped to reduce the occupied space. The coil section 11 can be made of copper pipe or stainless steel pipe, etc. to improve the heat exchange efficiency.

[0023] The thermostat 5 includes a cabinet 51, a circulation line 52, a heater 53, a temperature sensor 54, and a refrigeration unit 55. The cabinet 51 can be welded from steel plates, and its outside is wrapped with thermal insulation cotton 50 to reduce heat loss. The inlet of the circulation line 52 is located at the bottom of the cabinet 51, and the outlet is located at the side of the cabinet 51, and a circulation pump 56 and a valve 57 are installed on the circulation line 52. The circulation line 52 is also wrapped with thermal insulation cotton (not shown) to prevent heat loss. The heater 53, the temperature sensor 54, and the refrigeration unit 55 are installed in the cabinet 51. The heater 53, the temperature sensor 54, the refrigeration unit 55, the circulation pump 56, and the valve 57 are electrically connected with a control unit (not shown) to achieve thermostat control. The heater 53, the temperature sensor 54, the refrigeration unit 55, the circulation pump 56, and the valve 57 are commercially available, and will not be described here. The control unit can be independent or integrated in the control system of the plasma spraying device. It should be understood that in some embodiments, there can also be no circulation system (circulation line 52, circulation pump 56, and valve 57). In the case of low ambient temperature, the refrigeration unit 55 can also be omitted.

[0024] Although the present application has been specifically shown and described with respect to the preferred embodiments, it should be understood that various changes in form and detail can be made without departing from the spirit and scope of the application as defined in the appended claims.

Claims

1. An alloy target material gas stable supply device for a spray gun, comprising a gas supply line, one end of which is connected to a gas source and the other end of which is connected to a plasma spray gun, and a flow control valve and a mass flow meter installed at a position close to the plasma spray gun, characterized in that, The alloy target spraying gas stable supply device further comprises a thermostat, which is arranged upstream of the flow control valve, and the gas supply pipeline has a coil section in the thermostat to keep the mixed gas entering the plasma torch at a preset temperature.

2. A stable supply device for alloy target material spraying gas according to claim 1, wherein The coil section is in a U shape.

3. A stable supply device for alloy target material spraying gas according to claim 1, wherein The length of the coil section is more than 10 meters.

4. The apparatus for stable supply of alloy target material vapor deposition gas according to claim 1, wherein The coil section is made of copper pipe or stainless steel pipe.

5. The apparatus for stable supply of alloy target material vapor for sputtering according to claim 1, wherein The gas supply pipeline comprises a hydrogen gas pipeline, an argon gas pipeline and a mixed gas pipeline, and the hydrogen gas pipeline and the argon gas pipeline have respective coil sections and converge into the mixed gas pipeline after the mass flow meter.

6. A stable supply apparatus for alloy target material spraying gas according to claim 1, wherein The thermostat is filled with deionized water or oil.

7. A stable supply of alloy target material for sputter coating as claimed in claim 6, wherein The thermostat comprises a box body, a heater and a temperature sensor; the heater and the temperature sensor are installed in the box body and electrically connected with a control unit to realize constant temperature control.

8. A stable supply of alloy target material for sputtering gas as defined in claim 7, wherein The thermostat further comprises a refrigeration unit, which is electrically connected with the control unit to realize constant temperature control.

9. A stable supply device for alloy target material spraying gas according to claim 7, wherein The thermostat further comprises a circulation pipeline, an inlet of which is located at a side of the box body and an outlet of which is located at a top of the box body, and a circulating pump and a valve are installed on the circulation pipeline and electrically connected with the control unit.

10. The apparatus of claim 7, wherein the gas supply means is a gas cylinder. The box body is wrapped with thermal insulation cotton.

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