Magnet device for positioning coating workpiece

Abstract

The utility model discloses a magnet device for positioning a coating workpiece, which comprises a magnetic attraction piece and a protective shell sleeved on the magnetic attraction piece, the protective shell comprises an upper shell and a lower shell which are spliced with each other, and a first part and a second part which are overlapped with each other are arranged at opposite ends of the upper shell and the lower shell. The first part and the second part are connected through the limiting assembly, the protective shell is divided into an upper shell body and a lower shell body which are spliced in order to enable the magnetic attraction piece and the protective shell to be separated more conveniently in a non-use scene, and the opposite ends of the upper shell body and the lower shell body are connected through the first part and the second part in an overlapped mode. And the first part and the second part are connected through the limiting assembly, so that when an operator needs to take out the magnetic attraction piece in the protective shell, the magnetic attraction piece is exposed by separating the first part from the second part, and the operator can conveniently separate the magnetic attraction piece in the protective shell.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field technology of coating utensil especially is a magnet device of positioning coating work piece. BACKGROUND

[0002] Vacuum coating is the process that the electron of the atom cathode of material in vacuum chamber is accelerated to fly to the substrate wafer under the action of electric field and collides with argon atom, ionizes a large number of argon ion and secondary electron, secondary electron flies to the substrate wafer, and argon ion is accelerated to bombard target material under the action of electric field, and a large number of target atom (or molecule) is deposited on the substrate to form a thin film.

[0003] And the substrate wafer is generally fixed on the cage or other settings using the magnet column before processing, so that the substrate wafer enters the coating chamber for coating, but the magnet column is not protected and used, the magnet powder falling will be adsorbed on the surface of magnet, and the cleaning process is more troublesome, the magnet will be plated with various colors during the process of fixing coating material, and the coating layer will slowly fall like dust after a long time, so that the coating dust on the surface of magnet cannot be cleaned completely. For the unused magnet, when storing, the magnet will be injured due to the high hardness of the magnet itself during mutual adsorption, resulting in great loss of magnet, and generally 3 months need to supplement the magnet.

[0004] Therefore, a magnet device for fixing coating substrate is disclosed in Chinese utility model patent with authorization publication number CN 210796611 U, the magnet column is protected by increasing the protective shell and sleeving with the magnet column, so as to increase the service life of the magnet column, but the protective shell used is adapted with the magnet column, so that the protective shell and the magnet column are difficult to disassemble after the processing of the substrate wafer is completed. UTILITY MODEL CONTENTS

[0005] Therefore, the utility model mainly aims at the existing problems in the prior art, and provides a magnet device for positioning coating work piece, which solves the problem that the protective shell and the magnet column are difficult to disassemble after the processing of the substrate wafer is completed.

[0006] To achieve the above purpose, the utility model adopts the following technical scheme: a magnet device for positioning coating work piece, including magnetic attraction piece and protective shell sleeved on the magnetic attraction piece, the protective shell includes upper shell body and lower shell body spliced, the opposite ends of the upper shell body and the lower shell body are provided with the first part and the second part superimposed, and the first part and the second part are connected through the limiting assembly.

[0007] Further, the limiting assembly comprises a screw thread and a screw groove arranged on opposite faces of the first part and the second part, and the screw thread and the screw groove are screwed.

[0008] Further, one face of the first part or the second part is adapted to the inner wall of the upper shell and the lower shell.

[0009] Further, the limiting assembly comprises a clamping groove or a protrusion arranged on the first part / second part, and the protrusion is inserted into the clamping groove.

[0010] Further, the first part is adjacent to the inner wall of the upper shell and the lower shell, and the clamping groove is arranged on the first part.

[0011] Further, the clamping groove is in an inclined shape, and the clamping groove is in a trumpet shape, and the inlet end of the clamping groove is adjacent to the second part.

[0012] Further, the distance between the two inner walls of the clamping groove is a first distance, the width of the protrusion is a second distance, and the first distance is smaller than the second distance.

[0013] The utility model discloses a magnetic attraction piece protection shell, and compared with the prior art, the utility model has obvious advantages and beneficial effects, specifically speaking, from the above technical scheme, in order to facilitate the separation of the magnetic attraction piece and the protective shell in the non-use scene, the protective shell is divided into the upper shell and the lower shell that are spliced, and the opposite ends of the upper shell and the lower shell are connected through the first part and the second part, and the first part and the second part are connected through the limiting assembly, so that the operator can expose the magnetic attraction piece by separating the first part and the second part when taking out the magnetic attraction piece in the protective shell, and the operator can separate the magnetic attraction piece in the protective shell conveniently.

[0014] In order to make the structure characteristics and functions of the utility model clearer, the utility model will be described in detail below in combination with the drawings and specific embodiments. DRAWINGS

[0015] Figure 1 is the perspective view of embodiment 1 of the utility model.

[0016] Figure 2 is the explosion view of the first mode of embodiment 1 of the utility model.

[0017] Figure 3 is the second mode explosion view of embodiment 1 of the utility model.

[0018] DRAWING IDENTIFICATION:

[0019] 1 first distance, 2 second distance, 10 magnetic attraction piece.

[0020] 20 protective shell, 21 upper shell, 211 first part, 212 second part, 22 lower shell.

[0021] 30 limiting assembly, 31 screw thread, 32 screw groove, 33 clamping slot, 34 protrusion. DETAILED DESCRIPTION

[0022] Please refer to Figures 1-3 As shown in the figure, the specific structure of the preferred first embodiment of the utility model is shown, which is a magnet device for positioning a coated workpiece. The magnet 10 and the protective shell 20 sleeved on the magnet 10 are provided. The protective shell 20 includes an upper shell 21 and a lower shell 22 which are spliced. The opposite ends of the upper shell 21 and the lower shell 22 are provided with a first part 211 and a second part 212 which are superimposed. The first part 211 and the second part 212 are connected by a limiting assembly 30. Compared with the prior art, when the magnet column and the protective shell are separated, another magnet is needed to adsorb the magnet column in the protective shell to separate the magnet column and the protective shell. The magnet device for positioning a coated workpiece can separate the magnet 10 and the protective shell 20 more conveniently in a non-use scenario. The protective shell 20 is divided into the upper shell 21 and the lower shell 22 which are spliced. The opposite ends of the upper shell 21 and the lower shell 22 are connected by the first part 211 and the second part 212 which are superimposed. The first part 211 and the second part 212 are connected by the limiting assembly 30. When the magnet 10 in the protective shell 20 needs to be taken out, the first part 211 and the second part 212 are separated, so that the magnet 10 is exposed, and the magnet 10 in the protective shell 20 can be separated conveniently.

[0023] As Figure 2 shown, the limiting assembly 30 includes a screw thread 31 and a screw groove 32 provided on the opposite surfaces of the first part 211 and the second part 212. The screw thread 31 and the screw groove 32 are screwed. In order to connect the first part 211 and the second part 212 more tightly after superimposition, the screw thread 31 and the screw groove 32 are respectively provided on the opposite surfaces of the first part 211 and the second part 212. The first part 211 and the second part 212 can be twisted to screw the screw thread 31 and the screw groove 32, so as to increase the tightness after the connection of the upper shell 21 and the lower shell 22, and the protective shell 20 can effectively protect the magnet 10.

[0024] In one embodiment, the magnet 10 is a magnetic column, and the protective shell 20 for adjusting the magnet 10 is also a cylindrical shape and is matched with the magnetic column 10, so that the protective shell 20 can effectively protect the magnetic column 10.

[0025] As Figure 2As shown in the drawings, one side of the first part 211 or the second part 212 is matched with the inner wall of the upper shell 21 and the lower shell 22. The first part 211 can be arranged on the upper shell 21, and the second part 212 can be arranged on the lower shell 22, and the first part 211 and the second part 212 are matched and overlapped. In order to ensure the smoothness of the magnetic attraction piece 10 inserted into the protective shell 20, the first part 211 / the second part 212 corresponding to the inner wall of the protective shell 20 is matched with the inner wall of the protective shell 20.

[0026] As shown in the drawings, Figure 3 As shown in the drawings, the limiting assembly 30 includes a clamping groove 33 or a protruding block 34 arranged on the first part 211 / the second part 212, and the protruding block 34 is inserted into the clamping groove 33.

[0027] The first part 211 is adjacent to the inner wall of the upper shell 21 and the lower shell 22, and the clamping groove 33 is arranged on the first part 211. In order to better separate the upper shell 21 and the lower shell 22, the clamping groove 33 is arranged on the first part 211, the protruding block 34 is arranged on the side of the second part 212 corresponding to the first part 211, one end of the clamping groove 33 extends out of the bottom end of the first part 211, so that when the first part 211 and the second part 212 are spliced, the protruding block 34 can be inserted into the clamping groove 33 to form a pre-insertion. Because the second part 212 is arranged on the lower shell 22, the user can twist the lower shell 22 to make the protruding block 34 completely inserted into the clamping groove 33, so that the upper shell 21 and the lower shell 22 are completely overlapped and positioned.

[0028] As shown in the drawings, Figure 3 As shown in the drawings, the clamping groove 33 is in an inclined shape, and the clamping groove 33 is a horn mouth, and the entrance end of the clamping groove 33 is adjacent to the second part 212. In order to ensure the stability between the overlapped upper shell 21 and the lower shell 22, the clamping groove 33 is arranged as an inclined horn mouth, so that after the protruding block 34 is completely inserted into the clamping groove 33 under the twisting of the lower shell 22, the connection is more closely.

[0029] As shown in the drawings, Figure 3 As shown in the drawings, the distance between the two inner walls of the clamping groove 33 is a first distance 1, the width of the protruding block 34 is a second distance 2, and the first distance 1 is less than the second distance 2. Because the protective shell 20 is generally made of iron shell, and the protruding block 34 is also made of iron, the distance between the first distance 1 and the second distance 2 is not greater than 0.3 mm, so that the protruding block 34 can be smoothly inserted into the clamping groove 33, and the tightness of the connection between the protruding block 34 and the clamping groove 33 is ensured.

[0030] The above is only a preferred embodiment of the present application, and does not limit the technical scope of the present application. Therefore, any slight modification, equivalent change and modification made according to the technical essence of the present application are still within the scope of the technical solution of the present application.

Claims

1. A magnet device for positioning a coated workpiece, characterized in that: The utility model relates to a magnetic attraction piece (10) and a protective shell (20) sleeved on the magnetic attraction piece (10), the protective shell (20) includes spliced upper shell (21) and lower shell (22), the opposite ends of the upper shell (21) and the lower shell (22) are provided with the first part (211) and the second part (212) of superposition, the first part (211) and the second part (212) are connected through the limiting assembly (30).

2. The magnet apparatus for positioning a workpiece for coating according to claim 1, wherein: The limiting assembly (30) includes the thread (31) and the thread groove (32) on the opposite side of the first part (211) and the second part (212), and the thread (31) and the thread groove (32) are screwed.

3. The magnet apparatus for positioning a workpiece for coating according to claim 2, wherein: One side of the first part (211) or the second part (212) is matched with the inner wall of the upper shell (21) and the lower shell (22).

4. The magnet device for positioning a coated workpiece according to claim 1, characterized in that: The limiting assembly (30) includes the clamping groove (33) or the protruding block (34) on the first part (211) / the second part (212), and the protruding block (34) is inserted into the clamping groove (33).

5. The magnet device for positioning a coated workpiece according to claim 4, characterized in that: The first part (211) is adjacent to the inner wall of the upper shell (21) and the lower shell (22), and the clamping groove (33) is formed on the first part (211).

6. The magnet apparatus of claim 5, wherein: The clamping groove (33) is inclined, and the clamping groove (33) is a horn mouth, and the inlet end of the clamping groove (33) is adjacent to the second part (212).

7. The magnet apparatus of claim 6, wherein: The distance between the two inner walls of the clamping groove (33) is a first interval (1), the width of the protruding block (34) is a second interval (2), and the first interval (1) is less than the second interval (2).

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