Single crystal diamond splicing table

Abstract

The utility model relates to the technical field of diamond manufacturing equipment, in particular to a single crystal diamond splicing table which comprises a carrying table which is independent of a base table of CVD (Chemical Vapor Deposition) equipment and is placed on the base table after loading single diamond bodies; the top surface of the carrying table forms a splicing surface, an air cavity is formed in the carrying table, and the splicing surface is provided with a plurality of adsorption holes which are communicated with the air cavity and are used for adsorbing diamond monomers; the carrying table is further provided with an air exhaust channel, one end of the air exhaust channel is communicated with the air cavity, and the other end of the air exhaust channel serves as a suction end and is used for being connected with air exhaust equipment for air exhaust. A valve piece for controlling the air exhaust channel to be opened / closed is arranged in the air exhaust channel, and the valve piece is configured to be opened to open the air exhaust channel when the air exhaust end performs air exhaust, and is closed to close the air exhaust channel when the air exhaust end stops air exhaust; in this way, splicing of the diamond monomers can be achieved outside the CVD equipment, so that the diamond monomers are not limited by the internal space of the CVD equipment, and splicing operation is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to diamond manufacturing equipment technical field, concretely relates to a single crystal diamond splicing platform. BACKGROUND

[0002] Single crystal diamond has a wide range of applications in the field of electronic devices and the like due to its advantages of no grain boundary and few defects, and the splicing method is a common method for manufacturing single crystal diamond, wherein the splicing method mainly includes the following steps:

[0003] S1, selecting single crystal diamond as a substrate template, and placing it in a CVD vapor deposition device for vapor deposition to grow a single crystal diamond deposition layer on the substrate template;

[0004] S2, using cutting or other methods to separate the deposition layer from the substrate template to obtain a single deposition layer;

[0005] S3, repeating the above steps to obtain a plurality of deposition layer monomers (hereinafter referred to as monomers);

[0006] S4, placing the obtained plurality of deposition layer monomers on the base of the CVD device and splicing them in turn;

[0007] S5, turning on the CVD device, at this time, the spliced plurality of deposition layer monomers can be used as a substrate for vapor deposition, and the required single crystal diamond is grown on the surface of the substrate.

[0008] In step S4, when splicing the monomers, in order to prevent the monomers from shifting during vapor deposition and causing the joint between the two adjacent monomers to widen, some CVD devices have vacuum suction holes on the base, which are used to suction and fix the monomers after splicing to prevent them from shifting.

[0009] Although this vacuum suction method on the base can fix the monomers, it still has drawbacks, mainly because the vacuum suction holes are provided on the base, and the base is directly installed in the CVD device, so the splicing of the monomers needs to be done inside the CVD device, which has a small space and is not convenient for the operator to perform the splicing operation on the base. UTILITY MODEL CONTENTS

[0010] In order to solve at least one of the technical problems mentioned in the background art, the purpose of the utility model is to provide a single crystal diamond splicing platform.

[0011] To achieve the above purpose, the utility model provides the following technical scheme:

[0012] The single crystal diamond splicing platform comprises a platform, which is independent of a base platform of a CVD device and is used for loading diamond monomers and then being placed on the base platform; a top surface of the platform constitutes a splicing surface, and the platform has a gas cavity inside; the splicing surface has a plurality of adsorption holes for adsorbing the diamond monomers and communicating with the gas cavity; the platform further has a gas extraction channel, one end of the gas extraction channel communicates with the gas cavity, and the other end serves as a suction end for being connected with a gas extraction device to perform gas extraction; the gas extraction channel is provided with a valve for controlling opening and closing of the gas extraction channel, and the valve is configured to be opened to open the gas extraction channel when the suction end performs gas extraction, and to be closed to close the gas extraction channel when the suction end stops gas extraction.

[0013] Preferably, the valve comprises a valve plate and a valve seat arranged in the gas extraction channel, the valve seat divides the gas extraction channel into a first region and a second region, the first region communicates with the gas cavity, and the suction end is located in the second region; the valve seat is provided with one or more air holes for communicating the first region and the second region; the valve plate is movable between a first position and a second position, in the first position, the valve plate blocks the air holes, and in the second position, the valve plate opens the air holes to realize communication between the first region and the second region.

[0014] Preferably, the valve further comprises a valve rod, the valve rod is axially movable along the valve seat and arranged in the valve seat, one end of the valve rod is connected with the valve plate, and the other end of the valve rod is provided with a limiting part for limiting the valve rod from being extracted from the valve seat.

[0015] Preferably, the valve further comprises a spring, the spring is used to provide an elastic force to make the valve plate have a tendency to move to the first position; the spring is sleeved on the valve rod, one end of the spring abuts against the valve seat, and the other end of the spring abuts against the limiting part.

[0016] Preferably, a pull ring is arranged on a side of the valve plate away from the valve seat.

[0017] Preferably, the limiting part is threadedly connected on the valve rod, and / or the valve seat is threadedly connected in the gas extraction channel along an axial direction of the gas extraction channel.

[0018] Preferably, a sealing ring is arranged between the gas extraction channel and the valve seat.

[0019] Preferably, a force receiving part is arranged on a side of the valve seat facing the suction end.

[0020] Preferably, a positioning component is further included, the positioning component comprises a positioning hole and a positioning column capable of being inserted into the positioning hole, one of the positioning hole and the positioning column is arranged on a bottom of the platform, and the other of the positioning hole and the positioning column is arranged on a surface of the base platform of the CVD device.

[0021] Compared with the prior art, the present application has the following advantages:

[0022] In the scheme, the carrier is independent of the base station, that is, it can be removed from the base station, and it mainly serves as a carrier for splicing diamond monomers, so that when splicing diamond monomers, the carrier can be removed from the CVD device, then the splicing of diamond monomers is carried out on the splicing surface of the removed carrier, and each diamond monomer is adsorbed on the carrier by using the vacuum adsorption hole, and then the entire carrier is placed on the base station of the CVD device, and the subsequent gas deposition process can be started.

[0023] Therefore, in the scheme, the splicing work is carried out on the carrier, and the carrier can be removed from the CVD device, so that the splicing of diamond monomers can be realized outside the CVD device, thereby being not limited by the internal space of the CVD device and facilitating splicing operation.

[0024] In addition, in the scheme, due to the presence of the valve, the entire splicing table can be separated from the air extraction device after adsorbing the diamond monomers, and does not need to be put into the CVD device together with the air extraction device. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 Structure schematic view of the utility model for loading diamond monomers and then putting into the base station;

[0026] Figure 2 Structure schematic view of the utility model;

[0027] Figure 3 Structure schematic view of the utility model; Figure 2 Enlarged view of A part in the middle (valve plate is in the first position);

[0028] Figure 4 Structure schematic view of the utility model in the air extraction state (valve plate is in the second position);

[0029] Figure 5 Schematic view of the utility model for loading and unloading the valve seat by using the U-shaped piece. DETAILED DESCRIPTION

[0030] The technical scheme of the utility model embodiment will be explained and described below in combination with the drawings of the utility model embodiment, but the following embodiments are only preferred embodiments of the utility model, not all. Based on the embodiments in the embodiments, other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0031] In the following description, the terms such as "inner", "outer", "upper", "lower", "left", "right", etc. indicating the orientation or positional relationship, are only for the convenience of describing the embodiments and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility new type.

[0032] Please refer to Figures 1-5 As shown in the drawings, the embodiment provides a single crystal diamond splicing platform, which is mainly used for splicing of diamond monomers 7. The diamond monomers 7 herein can also be understood as the deposition layer monomers mentioned in the background art of the application.

[0033] As Figure 2 shown, the splicing platform comprises a carrier table 1 which is independent of a base table 3 of a CVD device (i.e. a CVD vapor deposition device). The carrier table 1 being independent of the CVD device means that the carrier table 1 and the base table 3 are two separable components. When vapor deposition is performed, the carrier table 1 is used to load the diamond monomers 7 and then placed on the base table 3, that is, after the diamond monomers 7 are spliced on the carrier table 1, the carrier table 1 is placed on the base table 3 of the device (as Figure 1 shown).

[0034] The top surface of the carrier table 1 constitutes a splicing surface for placing the diamond monomers 7. The carrier table 1 has a gas cavity 11 inside. The splicing surface has a plurality of adsorption holes 12 for adsorbing the diamond monomers 7, which are in communication with the gas cavity 11. The adsorption holes 12 are mainly used to adsorb the diamond monomers 7 under negative pressure. As Figure 2 shown, one adsorption hole 12 can correspond to one diamond monomer 7. Of course, a plurality of adsorption holes 12 can also adsorb one diamond monomer 7 at the same time, which is not limited in detail herein.

[0035] The carrier table 1 also has a gas extraction channel 13 which is in communication with the gas cavity 11 at one end and has a suction end 13a at the other end for connecting with a gas extraction device to perform gas extraction. The gas extraction device can be a gas pump 5. The suction end 13a of the gas pump 5 is aligned with the suction end 13a to start gas extraction. The air in the gas cavity 11 is extracted through the gas extraction channel 13 to form a negative pressure gas cavity 11, so that the adsorption holes 12 adsorb the diamond monomers 7 under negative pressure. The adsorption of the adsorption holes 12 is equivalent to vacuum adsorption.

[0036] The gas extraction channel 13 is provided with a valve for controlling the opening and closing of the gas extraction channel 13. The valve is configured to open when the suction end 13a performs gas extraction, so as to open the gas extraction channel 13. When the suction end 13a stops gas extraction, the valve is closed to close the gas extraction channel 13.

[0037] In use, the carrier 1 is taken out of the device, and then the diamond monomers 7 are placed on the splicing surface one by one, and the adjacent two diamond monomers 7 are tightly attached, and the diamond monomers 7 cover the adsorption holes 12; then the suction port of the air pump 5 is connected to a suction cover 51 through a pipeline, as shown in Figure 4 the drawing, the suction cover 51 covers the suction end 13a of the suction passage 13, the air pump 5 is turned on to perform suction, at this time, the valve member is in an open state, the air in the air cavity 11 is sucked out through the suction passage 13, so that a negative pressure is formed in the air cavity 11, and thus the diamond monomers 7 are adsorbed on the carrier 1 by the adsorption holes 12; then the air pump 5 is turned off and the suction cover 51 is removed, at this time, the valve member is automatically closed, so that the air cavity 11 maintains the current negative pressure state, and the splicing of the diamond monomers 7 is completed.

[0038] Then, the carrier 1 is placed on the base 3 of the CVD device as a whole, and the subsequent vapor deposition process can be started.

[0039] In the embodiment, the splicing is performed on the carrier 1, and the carrier 1 can be taken out of the CVD device, so that the splicing of the diamond monomers 7 can be realized outside the CVD device, thereby being not limited by the internal space of the CVD device and facilitating the splicing operation.

[0040] In addition, in the embodiment, the valve member can be used to separate the entire splicing table from the suction device after the diamond monomers 7 are adsorbed, so that the splicing table does not need to be placed in the CVD device together with the suction device.

[0041] In the embodiment, the valve member has a specific structure, as shown in Figure 3 the drawing, the valve member includes a valve plate 22 and a valve seat 21 arranged in the suction passage 13, the suction passage 13 is divided into a first region 131 and a second region 132 through the valve seat 21, the first region 131 is in communication with the air cavity 11, and the suction end 13a is located in the second region 132.

[0042] One or more air holes 211 are arranged on the valve seat 21 to communicate the first region 131 and the second region 132.

[0043] The valve plate 22 can move between a first position and a second position, and in the embodiment, the valve plate 22 moves along the axial direction of the valve seat 21 between the first position and the second position, in the first position, as shown in Figure 3 the drawing, the valve plate 22 simultaneously blocks all the air holes 211, and in the second position, as shown in Figure 4 the drawing, the valve plate 22 opens the air holes 211 to realize the communication between the first region 131 and the second region 132.

[0044] The valve plate 22 is mainly operated by the air pump 5. During the air pump 5 operation, the air pressure in the first region 131 is greater than the air pressure in the second region 132, thus creating a pressure difference. Under the action of this pressure difference, the valve plate 22 is pushed to move axially to the right, thereby moving the valve plate 22 away from the vent 211. In this way, the vent 211 is opened, which is equivalent to the valve being opened, thereby opening the air extraction channel 13 and realizing the air extraction of the air chamber 11.

[0045] When the suction is completed and the suction cover 51 is removed, the suction end 13a is exposed to the external environment. As a result, the air pressure in the second region 132 is greater than the air pressure in the first region 131, forming a pressure difference. Under this pressure difference, the valve plate 22 will be pushed to the left until the valve plate 22 is pressed against the right side of the valve seat 21 to cover all the vent holes 211, thereby closing the valve and shutting off the suction channel 13.

[0046] As can be seen, in this embodiment, the opening and closing of the valve can be automatically performed by the suction action of the air pump 5, without the need for additional human operation to control the opening and closing of the valve.

[0047] To guide the axial movement of the valve plate 22, such as Figure 3 As shown, the valve also includes a valve stem 23, which is axially mounted on the valve seat 21. One end of the valve stem 23 is connected to the valve plate 22, and the other end is provided with a limiting part 24 for limiting the valve stem 23 from being pulled out of the valve seat 21. The limiting part 24 protrudes circumferentially from the valve stem 23. The main function of the limiting part 24 is to limit the valve stem 23 and prevent the valve stem 23 from being pulled out of the valve seat 21 when the valve plate 22 moves to the right during air extraction.

[0048] In order to enable the valve plate 22 to close the vent 211 more quickly after the air pump 5 is removed, in this embodiment, the valve also includes a spring 25. The spring 25 is used to provide elastic force so that the valve plate 22 tends to move to the first position. Specifically, the spring 25 is sleeved on the valve stem 23, one end of which abuts against the valve seat 21 and the other end abuts against the limiting part 24.

[0049] After the air pump 5 is removed after the air extraction is completed, the valve plate 22 will move to the left and close the vent 211 under the combined action of the aforementioned air pressure difference and the elastic force of the spring 25. In this way, compared to relying solely on the air pressure difference to drive the valve plate 22 to move to the left and close the vent 211, the action of the valve plate 22 will be faster.

[0050] In addition, in order to release the negative pressure state of the air cavity 11 after the deposition is completed, so that the adsorption holes 12 no longer adsorb the diamond monomers 7, the valve plate 22 is provided with a pull ring 27 on the side away from the valve seat 21. Thus, after the deposition process is completed, the pull ring 27 can be pulled to the right to move the valve plate 22 to the right to make the valve plate 22 away from the valve seat 21, so that the negative pressure state of the air cavity 11 can be eliminated.

[0051] In addition, in order to be able to remove the valve plate 22 from the valve seat 21, the limiting part 24 in the embodiment is threadedly connected to the valve rod 23. For example, a threaded hole is formed in the limiting part 24, and the valve rod 23 is in the form of a threaded rod at the end close to the valve rod 23, and the thread is threaded into the threaded hole. Thus, when it is necessary to remove the valve plate 22, the limiting part 24 is simply unscrewed, and then the valve plate 22 and the valve rod 23 are pulled out to the right.

[0052] Similarly, in order to be able to remove the valve from the stage 1, the valve seat 21 in the embodiment is threadedly connected to the air suction channel 13 in the axial direction of the air suction channel 13. Specifically, the valve seat 21 and the radial cross section of the air suction channel 13 are both circular in the embodiment. The outer periphery wall of the valve seat 21 has external threads, and the inner periphery wall of the air suction channel 13 has internal threads that match the external threads. Thus, after the valve seat 21 is axially inserted into the air suction channel 13, the valve seat 21 is rotated to threadedly assemble the valve seat 21 to the air suction channel 13. Conversely, the valve seat 21 can be rotated out of the air suction channel 13.

[0053] In addition, in order to improve the sealing performance of the connection between the valve seat 21 and the air suction channel 13, a sealing ring 26 is arranged between the air suction channel 13 and the valve seat 21. Specifically, an annular recess is formed in the periphery wall of the air suction channel 13. In the assembled state, the valve seat 21 axially presses the sealing ring 26 against the recess.

[0054] In order to facilitate the rotation of the valve seat 21 by a tool to achieve the installation or removal of the valve seat 21, as shown in Figure 5 the side of the valve seat 21 facing the suction end 13a is provided with a force application part. The force application part can be understood as a part for a tool to apply force. For example, in the embodiment, the force application part is in the form of two insertion holes 212 formed in the right side surface of the valve seat 21. A tool in the form of a U-shaped piece 6 is inserted into the two insertion holes 212, and then the U-shaped piece 6 is rotated to rotate the valve seat 21.

[0055] In addition, the embodiment also includes a positioning component. As shown in Figure 1 the positioning component includes a positioning hole 42 and a positioning column 41 that can be inserted into the positioning hole. One of the positioning hole 42 and the positioning column 41 is arranged on the bottom of the stage 1, and the other is arranged on the surface of the base 3 of the CVD device.

[0056] Preferably, the positioning hole 42 is arranged at the bottom of the carrier 1, and the positioning column 41 is arranged on the upper surface of the base 3 of the CVD device; thus, when the carrier 1 is placed on the base 3, the positioning column 41 and the positioning hole 42 can be used as a reference to limit the relative position of the carrier 1 on the base 3.

[0057] It is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and range of the equivalent elements of the claims are intended to be embraced in the present application.

Claims

1. A single crystal diamond bench, characterized by, The carrier is independent of the base of the CVD device and is used to load the diamond monomers and then place the diamond monomers on the base; a top surface of the carrier forms a splicing surface, the carrier has a gas cavity inside, and the splicing surface has a plurality of adsorption holes for adsorbing the diamond monomers and communicating with the gas cavity; the carrier further has a gas extraction channel, one end of the gas extraction channel communicates with the gas cavity, and the other end serves as a suction end for connecting with a gas extraction device to perform gas extraction; the gas extraction channel is provided with a valve member for controlling opening and closing of the gas extraction channel, and the valve member is configured to be opened to open the gas extraction channel when the suction end performs gas extraction, and to be closed to close the gas extraction channel when the suction end stops gas extraction.

2. A single crystal diamond bench according to claim 1, wherein, The valve member includes a valve plate and a valve seat arranged in the gas extraction channel, and the valve seat divides the gas extraction channel into a first region and a second region, the first region communicates with the gas cavity, and the suction end is located in the second region; the valve seat is provided with one or more air holes for communicating the first region and the second region; the valve plate is movable between a first position and a second position, in the first position, the valve plate blocks the air holes, and in the second position, the valve plate opens the air holes to realize communication between the first region and the second region.

3. A single crystal diamond bench according to claim 2, wherein, The valve member further includes a valve rod, the valve rod is axially movable along the valve seat and arranged in the valve seat, one end of the valve rod is connected with the valve plate, and the other end of the valve rod is provided with a limiting portion for limiting the valve rod from being extracted from the valve seat.

4. A single crystal diamond bench according to claim 3, wherein, The valve member further includes a spring, the spring is used to provide an elastic force to make the valve plate have a tendency to move to the first position; the spring is sleeved on the valve rod, one end of the spring abuts against the valve seat, and the other end of the spring abuts against the limiting portion.

5. A single crystal diamond bench according to claim 3, wherein, The side of the valve plate away from the valve seat is provided with a pull ring.

6. A single crystal diamond bench according to claim 3, wherein, The limiting portion is threadedly connected on the valve rod, and / or the valve seat is threadedly connected in the gas extraction channel along the axial direction of the gas extraction channel.

7. A single crystal diamond bench according to claim 6, wherein, A sealing ring is arranged between the gas extraction channel and the valve seat.

8. A single crystal diamond bench according to claim 6, wherein, The side of the valve seat facing the suction end is provided with a force receiving portion.

9. A single crystal diamond bench according to claim 6, wherein, Further comprising a positioning component, the positioning component includes a positioning hole and a positioning column capable of being inserted into the positioning hole, one of the positioning hole and the positioning column is arranged on the bottom of the carrier, and the other is arranged on the surface of the base of the CVD device.

Images