Detachable air inlet throat pipe and tail gas treatment device with same

Abstract

The utility model provides a detachable air inlet throat pipe and a tail gas treater provided with the same, the throat pipe comprises an upper section part, a middle section part and a lower section part which are integrally arranged, the middle section part is clamped with an air inlet base, so that the upper section part and the lower section part extend out of the air inlet base; a gap is formed between the middle section part and the air inlet base, and sealing rings are arranged above and below the gap. The utility model has the beneficial effects that the tail gas is prevented from entering the gap between the middle section part of the throat pipe and the air inlet base in a turbulence manner, the adhesion between the throat pipe and the air inlet base is effectively avoided, the disassembly of the throat pipe is more facilitated, the operation time is saved, the operation efficiency is improved, the potential safety hazard is reduced, the safety coefficient is improved, the structure is simple, and the operation is convenient and fast.

Description

TECHNICAL FIELD

[0001] The utility model belongs to tail gas treatment equipment technical field, especially, relate to a detachable air inlet throat pipe and the tail gas processor equipped with the throat pipe. BACKGROUND

[0002] The epitaxial process of semiconductor silicon wafer will discharge a large amount of tail gas, which usually needs to be treated by a water washing type tail gas processor. In order to facilitate regular cleaning and maintenance, a detachable throat pipe is usually installed on the air inlet base. In actual use, there is turbulent flow of tail gas, which flows out from the inner wall of the throat pipe and flows upward, and after cooling, a powdery compound with very strong adhesion is formed between the outer wall of the throat pipe and the air inlet base. During regular cleaning and maintenance, the throat pipe is difficult to pull out, affecting the work efficiency, and the powdery compound is easily ignited and exploded during the disassembly of the throat pipe, which poses a great safety hazard. SUMMARY

[0003] To solve the above technical problems, the utility model provides a detachable air inlet throat pipe and a tail gas processor equipped with the throat pipe, which effectively solves the technical problems of difficult disassembly of the air inlet throat pipe of the tail gas processor, affecting the work efficiency and posing a safety hazard, and overcomes the shortcomings of the prior art.

[0004] The technical scheme adopted by the utility model is: a detachable air inlet throat pipe is arranged on the air inlet base of a tail gas processor, which comprises an upper section, a middle section and a lower section arranged integrally, the middle section is clamped with the air inlet base, so that the upper section and the lower section extend out of the air inlet base, a gap is arranged between the middle section and the air inlet base, and a sealing ring is arranged above and below the gap.

[0005] Further, the outer diameter of the middle section is greater than the outer diameter of the lower section.

[0006] Further, the outer diameter of the middle section is less than the outer diameter of the upper section.

[0007] Further, the gap is 1.5-2mm.

[0008] Further, the sealing ring comprises an upper sealing ring, and a first groove is arranged on the top of the middle section for placing the upper sealing ring.

[0009] Further, the sealing ring further comprises a lower sealing ring, and a second groove is arranged on the top of the lower section for placing the lower sealing ring.

[0010] Further, a plurality of lower sealing rings are arranged along the length of the lower section.

[0011] Further, a disassembly hole is arranged on both sides of the upper section.

[0012] The utility model discloses still provide a tail gas processor, including the air inlet base, be equipped with the detachable air inlet throat pipe of above-mentioned on the air inlet base.

[0013] The utility model discloses has the advantages and positive effect is: because adopt above -mentioned technical scheme, prevent the turbulent flow of tail gas into the clearance between throat pipe middle section part and air inlet base, effectively avoided the adhesion between throat pipe and air inlet base, more favorable to the disassembly of throat pipe, saved the operation time, improved the operation efficiency, reduced the security risk, improved the safety factor, simple structure, convenient operation. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the installation schematic diagram of detachable air inlet throat pipe of the utility model embodiment.

[0015] Figure 2 It is the structure schematic diagram of detachable air inlet throat pipe of the utility model embodiment.

[0016] In the drawing:

[0017] 1, upper section 2, middle section 3, lower section

[0018] 4, Y type air inlet pipe 5, air inlet base 6, gap

[0019] 7, upper sealing ring 8, lower sealing ring 9, first recess

[0020] 10, second recess 11, dismounting hole DETAILED DESCRIPTION

[0021] The utility model embodiment provides a detachable air inlet throat pipe and the tail gas processor with the throat pipe, the following with the drawing to the utility model embodiment make the description.

[0022] In the description of the utility model embodiment, it is understood that the orientation or position relation that the terms "top", "bottom" and the like indicate is based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore can not be understood as the limitation of the utility model. In the description of the utility model, it is explained that, unless otherwise explicitly specified and limited, the terms "arrangement", "connection" should be understood broadly, for example, can be fixedly connected, can be detachably connected, or integrally connected, can be directly connected, or indirectly connected through the intermediate medium, can be the intercommunication of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances.

[0023] As Figure 1 And Figure 2 As shown in the utility model embodiment a detachable intake throat pipe, set up on the air intake base 5 of the tail gas treater, including integrally arranged upper section 1, middle section 2 and lower section 3, middle section 2 is engaged with air intake base 5, make upper section 1 and lower section 3 extend air intake base 5. The top of upper section 1 is provided with Y-type air inlet pipe 4, Y-type air inlet pipe 4 is fixedly connected with air intake base 5. Y-type air inlet pipe 4 and air intake base 5 are prior art, and specific structure and connecting mode will not be repeated here. In order to facilitate installation and disassembly, gap 6 is formed between middle section 2 and air intake base 5. In order to prevent the turbulent flow of tail gas into the gap 6, the extremely strong adhesive powder compound is formed after cooling, so that the throat pipe and the air intake base 5 are adhered together and cannot be pulled out, and the upper and lower parts of the gap 6 are provided with sealing rings. The sealing ring is arranged between the throat pipe and the air intake base 5, so that the gap 6 is sealed, and the tail gas cannot enter the gap 6 from the upper and lower parts, so that the throat pipe and the air intake base 5 are not adhered together, which is more conducive to disassembly.

[0024] Specifically, the outer diameter of the middle section 2 is greater than the outer diameter of the lower section 3, and a stepped shape is formed at the outer wall connection between the middle section 2 and the lower section 3, which is matched with the stepped shape on the inner wall of the air intake base 5, so that the middle section 2 can be engaged with the inner wall of the air intake base 5, thereby enabling the entire throat pipe to be engaged and placed on the air intake base 5.

[0025] Specifically, the outer diameter of the middle section 2 is less than the outer diameter of the upper section 1, so that a relatively large gap 6 is formed between the middle section 2 and the air intake base 5. Even if the sealing effect of the sealing ring is not good, part of the tail gas enters the gap 6, and it is not easy to cause adhesion between the middle section 2 and the inside of the air intake base 5 due to the large gap 6. Preferably, the gap 6 is set to 1.5-2mm.

[0026] Specifically, the sealing ring includes an upper sealing ring 7, a first recess 9 is arranged on the top outer wall of the middle section 2, the first recess 9 is an annular recess for placing the upper sealing ring 7, and the upper sealing ring 7 is arranged between the middle section 2 and the air intake base 5 to seal the upper part of the gap 6 to prevent the tail gas from entering the gap 6 from the upper part.

[0027] Specifically, the sealing ring further includes a lower sealing ring 8, a second recess 10 is arranged on the top outer wall of the lower section 3, the second recess 10 is an annular recess for placing the lower sealing ring 8, and the lower sealing ring 8 is arranged between the lower section 3 and the air intake base 5 to seal the lower part of the gap 6 to prevent the tail gas from entering the gap 6 from the lower part.

[0028] Preferably, the number of lower sealing rings 8 is set to be multiple, which are arranged along the length of the lower section 3. Since the turbulent flow of exhaust gas is more likely to occur below the gap 6, by setting multiple lower sealing rings 8, the sealing performance of the lower part of the gap 6 is further ensured.

[0029] Specifically, in order to facilitate the removal of the throat pipe from the air inlet base 5, the upper section 1 is symmetrically provided with a dismounting hole 11 on both sides. When dismounting, the Y-shaped air inlet pipe 4 is first removed from the air inlet base 5, and then the dismounting tool is inserted into the dismounting hole 11, so that the throat pipe can be pulled out of the air inlet base 5. A small amount of exhaust gas will flow from the dismounting hole 11 to the outer wall of the throat pipe, and by setting the upper sealing ring 7, the exhaust gas flowing from the dismounting hole 11 can be prevented from entering the gap 6.

[0030] An exhaust gas processor includes an air inlet base 5, and the air inlet base 5 is provided with a detachable air inlet throat pipe as described above.

[0031] Embodiment one: a detachable air inlet throat pipe arranged on the air inlet base 5 of an exhaust gas processor, which includes an integrally arranged upper section 1, middle section 2 and lower section 3. The middle section 2 is clamped with the air inlet base 5, so that the upper section 1 and the lower section 3 extend out of the air inlet base 5. The top of the upper section 1 is provided with a Y-shaped air inlet pipe 4, which is fixedly connected with the air inlet base 5. The gap 6 is arranged between the middle section 2 and the air inlet base 5. The upper part and the lower part of the gap 6 are provided with sealing rings, which are arranged between the throat pipe and the air inlet base 5. The outer diameter of the middle section 2 is larger than the outer diameter of the lower section 3, so that a stepped structure is formed at the connection between the outer wall of the middle section 2 and the lower section 3, which is matched with the stepped structure on the inner wall of the air inlet base 5, so that the middle section 2 can be clamped with the inner wall of the air inlet base 5. The outer diameter of the middle section 2 is smaller than the outer diameter of the upper section 1, so that a relatively large gap 6 is formed between the middle section 2 and the air inlet base 5. The gap 6 is set to be 1.5 mm. The sealing rings include upper sealing rings 7 and lower sealing rings 8. The top outer wall of the middle section 2 is provided with a first groove 9, which is an annular groove for placing the upper sealing ring 7. The top outer wall of the lower section 3 is provided with a second groove 10, which is an annular groove for placing the lower sealing ring 8. In this embodiment, one upper sealing ring 7 and one lower sealing ring 8 are arranged. The upper section 1 is symmetrically provided with a dismounting hole 11 on both sides.

[0032] Embodiment two: a detachable air inlet throat, which is arranged on the air inlet base 5 of the exhaust gas treater, comprises an upper section 1, a middle section 2 and a lower section 3 arranged integrally, the middle section 2 is clamped with the air inlet base 5, so that the upper section 1 and the lower section 3 extend out of the air inlet base 5. The top of the upper section 1 is provided with a Y-shaped air inlet pipe 4, and the Y-shaped air inlet pipe 4 is fixedly connected with the air inlet base 5. A gap 6 is arranged between the middle section 2 and the air inlet base 5. The upper and lower parts of the gap 6 are provided with sealing rings, which are arranged between the throat and the air inlet base 5. The outer diameter of the middle section 2 is greater than that of the lower section 3, and a stepped structure is formed at the connection between the outer walls of the middle section 2 and the lower section 3, which is matched with the stepped structure on the inner wall of the air inlet base 5, so that the middle section 2 can be clamped with the inner wall of the air inlet base 5. The outer diameter of the middle section 2 is smaller than that of the upper section 1, so that a relatively large gap 6 is formed between the middle section 2 and the air inlet base 5. The gap 6 is set to 2mm. The sealing ring comprises an upper sealing ring 7 and a lower sealing ring 8. A first groove 9 is arranged on the top outer wall of the middle section 2, which is an annular groove for placing the upper sealing ring 7. A second groove 10 is arranged on the top outer wall of the lower section 3, which is an annular groove for placing the lower sealing ring 8. In this embodiment, one upper sealing ring 7 is arranged, and two lower sealing rings 8 are arranged, which are arranged at intervals along the length of the lower section 3. Detaching holes 11 are symmetrically arranged on both sides of the upper section 1.

[0033] The utility model has the advantages and positive effects that:

[0034] 1. The outer diameter of the middle section is smaller than that of the upper section, and a relatively large gap is formed between the middle section and the air inlet base, so that the middle section of the throat and the air inlet base are prevented from being adhered.

[0035] 2. By arranging the upper and lower sealing rings, the turbulent flow of exhaust gas is prevented from entering the gap between the middle section and the air inlet base, and the formation of a strongly adhered powdery compound in the gap after the exhaust gas is cooled is avoided.

[0036] 3. The throat is more convenient to detach, the operation time is saved, the operation efficiency is improved, the safety hazard is reduced, and the safety factor is improved.

[0037] The embodiments of the utility model have been described in detail above, but the content described is only the preferred embodiment of the utility model, and cannot be considered as limiting the scope of the utility model. Any equivalent changes and improvements made within the scope of the utility model application shall still belong to the patent coverage range of the utility model.

Claims

1. A detachable air intake pipe, disposed on the air intake base of an exhaust gas processor, characterized in that: It includes an integrally formed upper section, middle section and lower section. The middle section engages with the air inlet base, so that the upper section and lower section extend out of the air inlet base. There is a gap between the middle section and the air inlet base. Sealing rings are provided above and below the gap.

2. The detachable air intake pipe according to claim 1, characterized in that: The outer diameter of the middle section is larger than the outer diameter of the lower section.

3. A detachable air intake pipe according to claim 2, characterized in that: The outer diameter of the middle section is smaller than the outer diameter of the upper section.

4. A detachable air intake pipe according to claim 3, characterized in that: The gap is set to 1.5–2 mm.

5. A detachable air intake pipe according to any one of claims 1-4, characterized in that: The sealing ring includes an upper sealing ring, and the top of the middle section is provided with a first groove for placing the upper sealing ring.

6. A detachable air intake pipe according to claim 5, characterized in that: The sealing ring also includes a lower sealing ring, and the top of the lower section is provided with a second groove for placing the lower sealing ring.

7. A detachable air intake pipe according to claim 6, characterized in that: The number of the lower sealing rings is multiple, and they are arranged along the length of the lower section.

8. A detachable intake manifold according to any one of claims 1-4 and 6-7, characterized in that: The upper section has disassembly holes on both sides.

9. An exhaust gas processor, comprising an air inlet base, characterized in that: The air inlet base is provided with a detachable air inlet duct as described in any one of claims 1-8.

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